WO2020184490A1 - Adhesive agent composition, film-like adhesive agent, adhesive sheet, and semiconductor device manufacturing method - Google Patents
Adhesive agent composition, film-like adhesive agent, adhesive sheet, and semiconductor device manufacturing method Download PDFInfo
- Publication number
- WO2020184490A1 WO2020184490A1 PCT/JP2020/009887 JP2020009887W WO2020184490A1 WO 2020184490 A1 WO2020184490 A1 WO 2020184490A1 JP 2020009887 W JP2020009887 W JP 2020009887W WO 2020184490 A1 WO2020184490 A1 WO 2020184490A1
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- WIPO (PCT)
- Prior art keywords
- adhesive
- film
- mass
- adhesive composition
- component
- Prior art date
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- 239000000853 adhesive Substances 0.000 title claims abstract description 199
- 230000001070 adhesive effect Effects 0.000 title claims abstract description 193
- 239000004065 semiconductor Substances 0.000 title claims abstract description 120
- 239000000203 mixture Substances 0.000 title claims abstract description 61
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 239000005011 phenolic resin Substances 0.000 claims abstract description 22
- 125000002723 alicyclic group Chemical group 0.000 claims abstract description 17
- 229920005989 resin Polymers 0.000 claims abstract description 17
- 239000011347 resin Substances 0.000 claims abstract description 17
- 229920001971 elastomer Polymers 0.000 claims abstract description 16
- 239000000806 elastomer Substances 0.000 claims abstract description 16
- 239000011256 inorganic filler Substances 0.000 claims abstract description 15
- 229910003475 inorganic filler Inorganic materials 0.000 claims abstract description 15
- 229920001187 thermosetting polymer Polymers 0.000 claims abstract description 15
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 13
- 239000003822 epoxy resin Substances 0.000 claims description 47
- 229920000647 polyepoxide Polymers 0.000 claims description 47
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 claims description 24
- 239000000758 substrate Substances 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 18
- 229920000178 Acrylic resin Polymers 0.000 claims description 16
- 239000004925 Acrylic resin Substances 0.000 claims description 16
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims description 13
- 229920001568 phenolic resin Polymers 0.000 claims description 12
- 238000010030 laminating Methods 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 6
- 238000002788 crimping Methods 0.000 claims description 5
- 239000000377 silicon dioxide Substances 0.000 claims description 5
- 238000011156 evaluation Methods 0.000 description 15
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 14
- 239000002966 varnish Substances 0.000 description 13
- 239000004593 Epoxy Substances 0.000 description 12
- 230000000740 bleeding effect Effects 0.000 description 12
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 10
- -1 mesityrene Chemical compound 0.000 description 10
- 239000002904 solvent Substances 0.000 description 10
- HECLRDQVFMWTQS-RGOKHQFPSA-N 1755-01-7 Chemical compound C1[C@H]2[C@@H]3CC=C[C@@H]3[C@@H]1C=C2 HECLRDQVFMWTQS-RGOKHQFPSA-N 0.000 description 7
- 229920003986 novolac Polymers 0.000 description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 6
- 239000000523 sample Substances 0.000 description 6
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 5
- 238000002156 mixing Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 238000011282 treatment Methods 0.000 description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 4
- 229920000800 acrylic rubber Polymers 0.000 description 4
- 125000002947 alkylene group Chemical group 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- ZUOUZKKEUPVFJK-UHFFFAOYSA-N diphenyl Chemical compound C1=CC=CC=C1C1=CC=CC=C1 ZUOUZKKEUPVFJK-UHFFFAOYSA-N 0.000 description 4
- 125000003700 epoxy group Chemical group 0.000 description 4
- 229920000058 polyacrylate Polymers 0.000 description 4
- 229920000139 polyethylene terephthalate Polymers 0.000 description 4
- 239000005020 polyethylene terephthalate Substances 0.000 description 4
- 230000009257 reactivity Effects 0.000 description 4
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000006087 Silane Coupling Agent Substances 0.000 description 3
- 239000002313 adhesive film Substances 0.000 description 3
- 239000012790 adhesive layer Substances 0.000 description 3
- 239000004305 biphenyl Substances 0.000 description 3
- 235000010290 biphenyl Nutrition 0.000 description 3
- 229930003836 cresol Natural products 0.000 description 3
- 229910002026 crystalline silica Inorganic materials 0.000 description 3
- 230000009477 glass transition Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 150000002460 imidazoles Chemical class 0.000 description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000002985 plastic film Substances 0.000 description 3
- 229920006255 plastic film Polymers 0.000 description 3
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- 229920000642 polymer Polymers 0.000 description 3
- 239000003566 sealing material Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 2
- JWAZRIHNYRIHIV-UHFFFAOYSA-N 2-naphthol Chemical compound C1=CC=CC2=CC(O)=CC=C21 JWAZRIHNYRIHIV-UHFFFAOYSA-N 0.000 description 2
- BVYPJEBKDLFIDL-UHFFFAOYSA-N 3-(2-phenylimidazol-1-yl)propanenitrile Chemical compound N#CCCN1C=CN=C1C1=CC=CC=C1 BVYPJEBKDLFIDL-UHFFFAOYSA-N 0.000 description 2
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 2
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 2
- 239000004743 Polypropylene Substances 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- WNROFYMDJYEPJX-UHFFFAOYSA-K aluminium hydroxide Chemical compound [OH-].[OH-].[OH-].[Al+3] WNROFYMDJYEPJX-UHFFFAOYSA-K 0.000 description 2
- 125000003118 aryl group Chemical group 0.000 description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 description 2
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 2
- 239000000292 calcium oxide Substances 0.000 description 2
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 2
- 239000000378 calcium silicate Substances 0.000 description 2
- 229910052918 calcium silicate Inorganic materials 0.000 description 2
- OYACROKNLOSFPA-UHFFFAOYSA-N calcium;dioxido(oxo)silane Chemical compound [Ca+2].[O-][Si]([O-])=O OYACROKNLOSFPA-UHFFFAOYSA-N 0.000 description 2
- 125000004432 carbon atom Chemical group C* 0.000 description 2
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- RWGFKTVRMDUZSP-UHFFFAOYSA-N cumene Chemical compound CC(C)C1=CC=CC=C1 RWGFKTVRMDUZSP-UHFFFAOYSA-N 0.000 description 2
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
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- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
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- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000004898 kneading Methods 0.000 description 2
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 2
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- 229910000021 magnesium carbonate Inorganic materials 0.000 description 2
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 2
- 239000000347 magnesium hydroxide Substances 0.000 description 2
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 2
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 2
- 239000000395 magnesium oxide Substances 0.000 description 2
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 2
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- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 2
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- NXPPAOGUKPJVDI-UHFFFAOYSA-N naphthalene-1,2-diol Chemical compound C1=CC=CC2=C(O)C(O)=CC=C21 NXPPAOGUKPJVDI-UHFFFAOYSA-N 0.000 description 2
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- JYEUMXHLPRZUAT-UHFFFAOYSA-N 1,2,3-triazine Chemical group C1=CN=NN=C1 JYEUMXHLPRZUAT-UHFFFAOYSA-N 0.000 description 1
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- MODAACUAXYPNJH-UHFFFAOYSA-N 1-(methoxymethyl)-4-[4-(methoxymethyl)phenyl]benzene Chemical group C1=CC(COC)=CC=C1C1=CC=C(COC)C=C1 MODAACUAXYPNJH-UHFFFAOYSA-N 0.000 description 1
- FBHPRUXJQNWTEW-UHFFFAOYSA-N 1-benzyl-2-methylimidazole Chemical compound CC1=NC=CN1CC1=CC=CC=C1 FBHPRUXJQNWTEW-UHFFFAOYSA-N 0.000 description 1
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- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
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- SESYNEDUKZDRJL-UHFFFAOYSA-N 3-(2-methylimidazol-1-yl)propanenitrile Chemical compound CC1=NC=CN1CCC#N SESYNEDUKZDRJL-UHFFFAOYSA-N 0.000 description 1
- VPWNQTHUCYMVMZ-UHFFFAOYSA-N 4,4'-sulfonyldiphenol Chemical compound C1=CC(O)=CC=C1S(=O)(=O)C1=CC=C(O)C=C1 VPWNQTHUCYMVMZ-UHFFFAOYSA-N 0.000 description 1
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- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 125000004805 propylene group Chemical group [H]C([H])([H])C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 125000004076 pyridyl group Chemical group 0.000 description 1
- 150000003242 quaternary ammonium salts Chemical class 0.000 description 1
- GHMLBKRAJCXXBS-UHFFFAOYSA-N resorcinol Chemical compound OC1=CC=CC(O)=C1 GHMLBKRAJCXXBS-UHFFFAOYSA-N 0.000 description 1
- 229960001755 resorcinol Drugs 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
- 125000000467 secondary amino group Chemical class [H]N([*:1])[*:2] 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 235000021286 stilbenes Nutrition 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 230000009974 thixotropic effect Effects 0.000 description 1
- PJANXHGTPQOBST-VAWYXSNFSA-N trans-stilbene Chemical compound C=1C=CC=CC=1/C=C/C1=CC=CC=C1 PJANXHGTPQOBST-VAWYXSNFSA-N 0.000 description 1
- 238000009849 vacuum degassing Methods 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 125000006839 xylylene group Chemical group 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J163/00—Adhesives based on epoxy resins; Adhesives based on derivatives of epoxy resins
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/02—Non-macromolecular additives
- C09J11/04—Non-macromolecular additives inorganic
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
- C09J11/08—Macromolecular additives
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/52—Mounting semiconductor bodies in containers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/43—Manufacturing methods
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8319—Arrangement of the layer connectors prior to mounting
- H01L2224/83191—Arrangement of the layer connectors prior to mounting wherein the layer connectors are disposed only on the semiconductor or solid-state body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
- H01L2224/8338—Bonding interfaces outside the semiconductor or solid-state body
- H01L2224/83385—Shape, e.g. interlocking features
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Definitions
- the present invention relates to a method for manufacturing an adhesive composition, a film-like adhesive, an adhesive sheet, and a semiconductor device.
- silver paste is mainly used for joining a semiconductor chip and a support member for mounting the semiconductor chip.
- the support members used are also required to be miniaturized and densified.
- problems such as protrusion of the paste or inclination of the semiconductor chip during wire bonding, difficulty in controlling the film thickness, and void generation may occur.
- a film-like adhesive for joining a semiconductor chip and a support member has been used (see, for example, Patent Document 1).
- an adhesive sheet including a dicing tape and a film-like adhesive laminated on the dicing tape is used, the film-like adhesive is attached to the back surface of the semiconductor wafer, and the semiconductor wafer is separated by dicing to form a film.
- a semiconductor chip with an adhesive can be obtained.
- the obtained semiconductor chip with a film-like adhesive can be attached to a support member via a film-like adhesive and bonded by thermocompression bonding.
- the film-like adhesive is used as FOW (Film Over Will), which is a wire-embedded film-like adhesive, or FOD (Film Over Die), which is a semiconductor chip-embedded film-like adhesive
- FOW Fem Over Will
- FOD Find Over Die
- the film-like adhesive is used as FOW (Film Over Will), which is a wire-embedded film-like adhesive, or FOD (Film Over Die), which is a semiconductor chip-embedded film-like adhesive
- high fluidity is required during thermocompression bonding. Therefore, the frequency and amount of bleeding tend to increase further. In some cases, bleeding may occur even on the upper surface of the semiconductor chip, which may lead to electrical failure or wire bonding failure.
- the present invention has been made in view of such circumstances, and an object of the present invention is to provide an adhesive composition capable of suppressing bleeding while having good embedding property at the time of thermocompression bonding. To do.
- the adhesive composition contains a thermosetting resin, a curing agent, an elastomer, and an inorganic filler.
- the curing agent contains a phenolic resin having an alicyclic ring.
- the content of the elastomer is 10 to 80 parts by mass with respect to 100 parts by mass of the thermosetting resin. According to such an adhesive composition, it is possible to suppress bleeding while having good embedding property at the time of thermocompression bonding.
- the thermosetting resin may be an epoxy resin.
- the epoxy resin may contain a bisphenol F type epoxy resin.
- the elastomer may be an acrylic resin.
- the inorganic filler may be silica.
- the content of the inorganic filler may be 25% by mass or more based on the total amount of the adhesive composition.
- the total content of the thermosetting resin, the curing agent, the elastomer, and the inorganic filler may be 95% by mass or more based on the total amount of the adhesive composition.
- the adhesive composition may further contain a curing accelerator.
- the adhesive composition is used in a semiconductor device in which a first semiconductor element is wire-bonded on a substrate via a first wire, and a second semiconductor element is crimped onto the first semiconductor element. , It may be used for crimping the second semiconductor element and embedding at least a part of the first wire.
- the present invention further comprises a first semiconductor via a first wire on a substrate of a composition containing a thermosetting resin, a curing agent and an elastomer, and the curing agent containing a phenol resin having an alicyclic ring.
- the second semiconductor element is crimped onto the first semiconductor element, the second semiconductor element is crimped and at least a part of the first wire is embedded. It may also relate to an application as an adhesive or an application for the production of an adhesive used for the purpose.
- Another aspect of the present invention provides a film-like adhesive obtained by forming the above-mentioned adhesive composition into a film.
- Another aspect of the present invention provides an adhesive sheet comprising a base material and the above-mentioned film-like adhesive provided on the base material.
- the base material may be a dicing tape.
- an adhesive sheet whose base material is a dicing tape may be referred to as a “dicing die bonding integrated adhesive sheet”.
- the adhesive sheet may further include a protective film laminated on the surface opposite to the base material of the film-like adhesive.
- Another aspect of the present invention is a wire bonding step of electrically connecting a first semiconductor element on a substrate via a first wire, and a film-like adhesive described above on one side of the second semiconductor element.
- a die bond that embeds at least a part of the first wire in the film-like adhesive by crimping the second semiconductor element to which the film-like adhesive is attached with the film-like adhesive.
- a method for manufacturing a semiconductor device including a process.
- the first semiconductor chip is wire-bonded and connected to the semiconductor substrate via the first wire, and the second semiconductor chip is crimped onto the first semiconductor chip via an adhesive film.
- a wire-embedded semiconductor device in which at least a part of the first wire is embedded in the adhesive film may be used, and the first wire and the first semiconductor chip are embedded in the adhesive film. It may be a chip-embedded semiconductor device.
- the film-like adhesive formed by forming the adhesive composition into a film is FOD (Film Over Die), which is a semiconductor chip-embedded film-like adhesive, or FOW (Film), which is a wire-embedded film-like adhesive. It can be useful as OverWire). Further, according to the present invention, there is provided a method for manufacturing an adhesive sheet and a semiconductor device using such a film-like adhesive.
- (meth) acrylic acid means acrylic acid or methacrylic acid corresponding thereto.
- the adhesive composition according to the present embodiment contains (A) a thermosetting resin, (B) a curing agent, (C) an elastomer, and (D) an inorganic filler.
- the adhesive composition is thermosetting and can be in a semi-cured (B stage) state and then in a fully cured (C stage) state after the curing treatment.
- Thermosetting resin may be an epoxy resin from the viewpoint of adhesiveness.
- the epoxy resin can be used without particular limitation as long as it is a compound having an epoxy group in the molecule.
- examples of the epoxy resin include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, bisphenol A novolac type epoxy resin, and bisphenol F novolac type epoxy resin.
- Stilben type epoxy resin triazine skeleton containing epoxy resin, fluorene skeleton containing epoxy resin, triphenol methane type epoxy resin, biphenyl type epoxy resin, xylylene type epoxy resin, biphenyl aralkyl type epoxy resin, naphthalene type epoxy resin, alicyclic ring Epoxy resin having the above can be mentioned. These may be used individually by 1 type or in combination of 2 or more type. Among these, the epoxy resin may contain a bisphenol F type epoxy resin. When the epoxy resin contains a bisphenol F type epoxy resin, the embedding property tends to be improved.
- the epoxy resin may contain an epoxy resin having an alicyclic ring from the viewpoint of fluidity, and the epoxy resin having an alicyclic ring has a dicyclopentadiene type epoxy resin (having a dicyclopentadiene structure). Epoxy resin) may be used.
- the epoxy equivalent of the component (A) is not particularly limited, but may be 90 to 600 g / eq, 100 to 500 g / eq, or 120 to 450 g / eq. When the epoxy equivalent of the component (A) is in such a range, good reactivity and fluidity tend to be obtained.
- the component (A) contains a bisphenol F type epoxy resin the epoxy equivalent of the bisphenol F type epoxy resin may be less than 180 g / eq, and 170 g / eq or 160 g / eq or less from the viewpoint of embedding property. Good.
- the epoxy equivalent of the bisphenol F type epoxy resin may be 90 g / eq or more, 100 g / eq or more, or 120 g / eq or more.
- the component (B) contains a phenolic resin (B-1) having an alicyclic ring.
- the component (B-1) is a compound having an alicyclic ring and a hydroxyl group in the molecule.
- the hydroxyl group may be bonded to a site other than the alicyclic ring or the alicyclic ring of the compound via a single bond or a linking group (for example, an alkylene group, an oxyalkylene group, etc.).
- a linking group for example, an alkylene group, an oxyalkylene group, etc.
- the component (B-1) may be, for example, a phenol resin represented by the following general formula (1).
- E represents an alicyclic ring
- G represents a single bond or an alkylene group
- R 1 independently represents a hydrogen atom or a monovalent hydrocarbon group.
- n1 indicates an integer of 1 to 10
- m indicates an integer of 1 to 3.
- the number of carbon atoms of E may be 4 to 12, 5 to 11, or 6 to 10.
- E may be a monocyclic ring or a polycyclic ring, but it is preferably a polycyclic ring, and more preferably a dicyclopentadiene ring.
- the alkylene group in G may be an alkylene group having 1 to 5 carbon atoms such as a methylene group, an ethylene group, a propylene group, a butylene group and a pentylene group. G is preferably a single bond.
- Monovalent hydrocarbon group for R 1 is, for example, a methyl group, an ethyl group, a propyl group, a butyl group, an alkyl group such as a pentyl group, an aryl group such as phenyl group and naphthyl group, a heteroaryl group such as pyridyl group It may be there.
- R 1 is preferably a hydrogen atom.
- the phenolic resin represented by the general formula (1) may be a phenolic resin represented by the following general formula (1a).
- n1 has the same meaning as above.
- Examples of commercially available epoxy resins represented by the general formula (1a) include J-DPP-85, J-DPP-95, and J-DPP-115 (all manufactured by JFE Chemical Co., Ltd.).
- the hydroxyl group equivalent of the component (B-1) is not particularly limited, but may be 80 to 400 g / eq, 90 to 350 g / eq, or 100 to 300 g / eq. When the hydroxyl group equivalent of the component (B-1) is in such a range, good reactivity and fluidity tend to be obtained.
- the content of the component (B-1) may be 5% by mass or more, 10% by mass or more, or 15% by mass or more based on the total amount of the adhesive composition.
- the content of the component (B-1) may be 50% by mass or less, 40% by mass or less, or 30% by mass or less based on the total amount of the adhesive composition.
- the component (B) may further contain a phenol resin (B-2) having no alicyclic ring in addition to the component (B-1).
- a phenol resin (B-2) having no alicyclic ring in addition to the component (B-1).
- the component (B-2) include phenols such as phenol, cresol, resorcin, catechol, bisphenol A, bisphenol F, phenylphenol, aminophenol and / or ⁇ -naphthol, ⁇ -naphthol, dihydroxynaphthalene and the like.
- Novolak-type phenol resin allylated bisphenol A, allylated bisphenol F, allylated naphthalenediol, phenol novolac, phenol obtained by condensing or co-condensing naphthols and compounds having an aldehyde group such as formaldehyde under an acidic catalyst.
- phenols and / or naphthols and phenol aralkyl resin synthesized from dimethoxyparaxylene or bis (methoxymethyl) biphenyl, naphthol aralkyl resin, biphenyl aralkyl type phenol resin, phenyl aralkyl type phenol resin and the like can be mentioned. These may be used individually by 1 type or in combination of 2 or more type.
- the hydroxyl group equivalent of the component (B-2) is not particularly limited, but may be 80 to 400 g / eq, 90 to 350 g / eq, or 100 to 300 g / eq.
- the hydroxyl group equivalent of the component (B-1) is in such a range, good reactivity and fluidity tend to be obtained.
- the content of the component (B-1) may be 50 to 100% by mass based on the total amount of the component (B).
- the content of the component (B-1) may be 60% by mass or more or 70% by mass or more based on the total amount of the component (B).
- the content of the component (B-2) may be 0 to 50% by mass based on the total amount of the component (B).
- the content of the component (B-2) may be 40% by mass or less or 30% by mass or less based on the total amount of the component (B).
- the ratio of the epoxy equivalent of the epoxy resin to the hydroxyl equivalent of the component (B) is 0 from the viewpoint of curability.
- 30 / 0.70 to 0.70 / 0.30, 0.35 / 0.65 to 0.65 / 0.35, 0.40 / 0.60 to 0.60 / 0.40, or 0.45 It may be /0.55 to 0.55 / 0.45.
- the equivalent amount ratio is 0.30 / 0.70 or more, more sufficient curability tends to be obtained.
- the equivalent equivalent ratio is 0.70 / 0.30 or less, it is possible to prevent the viscosity from becoming too high, and it is possible to obtain more sufficient fluidity.
- the total content of the component (A) and the component (B) may be 30 to 70% by mass based on the total amount of the adhesive composition.
- the total content of the component (A) and the component (B) may be 33% by mass or more, 36% by mass or more, or 40% by mass or more, and 65% by mass or less, 60% by mass or less, or 55% by mass. It may be less than or equal to%.
- the adhesiveness tends to be improved.
- the total content of the component (A) and the component (B) is 70% by mass or less based on the total amount of the adhesive composition, it is possible to prevent the viscosity from becoming too low and further suppress bleeding. Tend to be able to.
- the adhesive composition according to this embodiment contains (C) an elastomer.
- the component (C) preferably has a glass transition temperature (Tg) of the polymer constituting the elastomer of 50 ° C. or lower.
- component (C) examples include acrylic resin, polyester resin, polyamide resin, polyimide resin, silicone resin, butadiene resin, acrylonitrile resin, and modified products thereof.
- the component (C) may contain an acrylic resin from the viewpoint of solubility in a solvent and fluidity.
- the acrylic resin means a polymer containing a structural unit derived from a (meth) acrylic acid ester.
- the acrylic resin is preferably a polymer containing a structural unit derived from a (meth) acrylic acid ester having a crosslinkable functional group such as an epoxy group, an alcoholic or phenolic hydroxyl group, or a carboxyl group as a structural unit.
- the acrylic resin may be an acrylic rubber such as a copolymer of (meth) acrylic acid ester and acrylonitrile.
- the glass transition temperature (Tg) of the acrylic resin may be -50 to 50 ° C or -30 to 30 ° C.
- Tg of the acrylic resin is ⁇ 50 ° C. or higher, it tends to be possible to prevent the adhesive composition from becoming too flexible. This makes it easier to cut the film-like adhesive during wafer dicing, and it is possible to prevent the occurrence of burrs.
- the Tg of the acrylic resin is 50 ° C. or lower, the decrease in flexibility of the adhesive composition tends to be suppressed. As a result, when the film-like adhesive is attached to the wafer, the voids tend to be sufficiently embedded. In addition, it is possible to prevent chipping during dicing due to a decrease in wafer adhesion.
- the glass transition temperature (Tg) means a value measured using a TMA test apparatus (TMA400Q, manufactured by TA Instruments).
- the weight average molecular weight (Mw) of the acrylic resin may be 100,000 to 3 million or 500,000 to 2 million.
- Mw means a value measured by gel permeation chromatography (GPC) and converted using a calibration curve using standard polystyrene.
- acrylic resin products examples include SG-70L, SG-708-6, WS-023 EK30, SG-280 EK23, and SG-P3 solvent-modified products (all manufactured by Nagase ChemteX Corporation).
- the content of the component (C) is 10 to 80 parts by mass with respect to 100 parts by mass of the component (A).
- the content of the component (C) may be 20 parts by mass or more, 30 parts by mass or more, 35 parts by mass or more, 40 parts by mass or more, or 42 parts by mass or more with respect to 100 parts by mass of the component (A). , 75 parts by mass or less, 72 parts by mass or less, 70 parts by mass or less, or 68 parts by mass or less.
- the handleability for example, bendability
- the content of the component (C) is 80 parts by mass or less with respect to 100 parts by mass of the component (A), it tends to be possible to prevent the adhesive composition from becoming too flexible. This makes it easier to cut the film-like adhesive during wafer dicing, and it is possible to prevent the occurrence of burrs. Further, when the content of the component (C) is 80 parts by mass or less with respect to 100 parts by mass of the component (A), the embedding property of the wire or the semiconductor chip tends to be improved.
- the content of the component (C) may be 10 parts by mass or more, 20 parts by mass or more, or 30 parts by mass or more, and 80 parts by mass with respect to 100 parts by mass of the total amount of the components (A) and (B). Hereinafter, it may be 75 parts by mass or less, 60 parts by mass or less, or 55 parts by mass or less.
- the handleability of the film-like adhesive for example, bendability
- the content of the component (C) is 80 parts by mass or less with respect to 100 parts by mass of the total amount of the components (A) and (B), it is possible to further prevent the adhesive composition from becoming too flexible. Tend to be able to. This makes it easier to cut the film-like adhesive during wafer dicing, and tends to further prevent the occurrence of burrs.
- Inorganic filler examples include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, aluminum nitride, aluminum borate whisker, boron nitride, and crystals. Examples thereof include sex silica and amorphous silica. One of these may be used alone, or two or more thereof may be used in combination. From the viewpoint of further improving the thermal conductivity of the obtained film-like adhesive, the inorganic filler may contain aluminum oxide, aluminum nitride, boron nitride, crystalline silica or amorphous silica.
- the inorganic fillers include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, and calcium silicate. It may be magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, crystalline silica, or amorphous silica, and may be silica (crystalline silica or amorphous silica).
- the average particle size of the component (D) may be 0.005 to 0.5 ⁇ m or 0.05 to 0.3 ⁇ m from the viewpoint of further improving the adhesiveness.
- the average particle size means a value obtained by converting from the BET specific surface area.
- the component (D) may be surface-treated with a surface treatment agent from the viewpoint of compatibility between the surface and the solvent, other components and the like, and adhesive strength.
- a surface treatment agent include a silane coupling agent and the like.
- the functional group of the silane coupling agent include a vinyl group, a (meth) acryloyl group, an epoxy group, a mercapto group, an amino group, a diamino group, an alkoxy group, an ethoxy group and the like.
- the content of the component (D) may be 25% by mass or more, 28% by mass or more, or 30% by mass or more, based on the total amount of the adhesive composition.
- the dicing property of the adhesive layer before curing tends to be improved, and the adhesive strength of the adhesive layer after curing tends to be improved. It is in. Thereby, for example, sufficient dicing property is ensured even in a relatively thick film-like adhesive for FOD / FOW applications (for example, 20 ⁇ m or more, preferably 30 ⁇ m or more).
- the upper limit of the content of the component (D) is not particularly limited, but may be 60% by mass or less, 50% by mass or less, or 40% by mass or less based on the total amount of the adhesive composition.
- the content of the component (D) is 60% by mass or less based on the total amount of the adhesive composition, the decrease in fluidity can be suppressed and the elastic modulus of the film-like adhesive after curing becomes too high. It becomes possible to prevent.
- the adhesive composition according to the present embodiment contains (A) component, (B) component, (C) component, and (D) component as main components, and (A) component, (B) component, (C).
- the total content of the component and the component (D) may be 95% by mass or more or 97% by mass or more, and may be 100% by mass or less or 99% by mass or less, based on the total amount of the adhesive composition. ..
- the adhesive composition according to this embodiment may contain (E) a curing accelerator.
- the curing accelerator is not particularly limited, and generally used ones can be used.
- Examples of the component (E) include imidazoles and derivatives thereof, organic phosphorus compounds, secondary amines, tertiary amines, quaternary ammonium salts and the like. These may be used individually by 1 type or in combination of 2 or more type. Among these, the component (E) may be imidazoles and derivatives thereof from the viewpoint of reactivity.
- imidazoles examples include 2-methylimidazole, 1-benzyl-2-methylimidazole, 1-cyanoethyl-2-phenylimidazole, 1-cyanoethyl-2-methylimidazole and the like. These may be used individually by 1 type or in combination of 2 or more type.
- the content of the component (E) is 0.01 to 3 parts by mass or 0.03 to 1 part by mass with respect to 100 parts by mass of the total amount of the component (A), the component (B), and the component (C). You can. When the content of the component (E) is in such a range, both curability and reliability tend to be compatible.
- the adhesive composition according to the present embodiment may further contain an antioxidant, a silane coupling agent, a rheology control agent and the like as other components.
- the content of these components may be 0.01 to 3 parts by mass with respect to 100 parts by mass of the total amount of the components (A), (B), and (C).
- the adhesive composition according to this embodiment may be used as an adhesive varnish diluted with a solvent.
- the solvent is not particularly limited as long as it can dissolve a component other than the component (D).
- the solvent include aromatic hydrocarbons such as toluene, xylene, mesityrene, cumene and p-simene; aliphatic hydrocarbons such as hexane and heptane; cyclic alkanes such as methylcyclohexane; tetrahydrofuran, 1,4-dioxane and the like.
- Cyclic ethers such as acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, 4-hydroxy-4-methyl-2-pentanone; esters such as methyl acetate, ethyl acetate, butyl acetate, methyl lactate, ethyl lactate, ⁇ -butyrolactone; Carbonated esters such as ethylene carbonate and propylene carbonate; amides such as N, N-dimethylformamide, N, N-dimethylacetamide and N-methyl-2-pyrrolidone can be mentioned. These may be used individually by 1 type or in combination of 2 or more type. Of these, the solvent may be toluene, xylene, methyl ethyl ketone, methyl isobutyl ketone, or cyclohexanone from the viewpoint of solubility and boiling point.
- the concentration of solid components in the adhesive varnish may be 10 to 80% by mass based on the total mass of the adhesive varnish.
- the adhesive varnish is prepared by mixing and kneading the component (A), the component (B), the component (C), the component (D), and the solvent, and if necessary, the component (E) and other components.
- Mixing and kneading can be carried out by appropriately combining a disperser such as a normal stirrer, a raft machine, a triple roll, a ball mill, and a bead mill.
- a disperser such as a normal stirrer, a raft machine, a triple roll, a ball mill, and a bead mill.
- the mixing time can be shortened by mixing the component (D) and the low molecular weight component in advance and then adding the high molecular weight component.
- air bubbles in the varnish may be removed by vacuum degassing or the like.
- FIG. 1 is a schematic cross-sectional view showing a film-like adhesive according to an embodiment.
- the film-like adhesive 10 is formed by forming the above-mentioned adhesive composition into a film.
- the film-like adhesive 10 may be in a semi-cured (B stage) state.
- Such a film-like adhesive 10 can be formed by applying an adhesive composition to a support film.
- an adhesive varnish is used, the film-like adhesive 10 can be formed by applying the adhesive varnish to the support film and removing the solvent by heating and drying.
- the support film is not particularly limited, and examples thereof include films such as polytetrafluoroethylene, polyethylene, polypropylene, polymethylpentene, polyethylene terephthalate, and polyimide.
- the thickness of the support film may be, for example, 10 to 200 ⁇ m or 20 to 170 ⁇ m.
- a known method can be used, and examples thereof include a knife coating method, a roll coating method, a spray coating method, a gravure coating method, a bar coating method, and a curtain coating method. Be done.
- the conditions for heat drying are not particularly limited as long as the solvent used is sufficiently volatilized, but may be, for example, 0.1 to 90 minutes at 50 to 200 ° C.
- the thickness of the film-like adhesive can be adjusted as appropriate according to the application.
- the thickness of the film-like adhesive may be 20 to 200 ⁇ m, 30 to 200 ⁇ m, or 40 to 150 ⁇ m from the viewpoint of sufficiently embedding irregularities of semiconductor chips, wires, wiring circuits of substrates, and the like.
- FIG. 2 is a schematic cross-sectional view showing an adhesive sheet according to an embodiment.
- the adhesive sheet 100 includes a base material 20 and the above-mentioned film-like adhesive 10 provided on the base material.
- the base material 20 is not particularly limited, but may be a base material film.
- the base film may be the same as the support film described above.
- the base material 20 may be a dicing tape.
- Such an adhesive sheet can be used as a dicing die bonding integrated adhesive sheet. In this case, since the laminating process on the semiconductor wafer is performed once, the work efficiency can be improved.
- the dicing tape examples include plastic films such as polytetrafluoroethylene film, polyethylene terephthalate film, polyethylene film, polypropylene film, polymethylpentene film, and polyimide film. Further, the dicing tape may be subjected to surface treatment such as primer coating, UV treatment, corona discharge treatment, polishing treatment, and etching treatment, if necessary.
- the dicing tape is preferably one having adhesiveness. Such a dicing tape may be one in which adhesiveness is imparted to the above-mentioned plastic film, or may be one in which an adhesive layer is provided on one side of the above-mentioned plastic film.
- the adhesive sheet 100 can be formed by applying an adhesive composition to a base film in the same manner as the above-mentioned method for forming a film-like adhesive.
- the method of applying the adhesive composition to the base material 20 may be the same as the method of applying the adhesive composition to the support film described above.
- the adhesive sheet 100 may be formed by using a film-like adhesive prepared in advance.
- the adhesive sheet 100 can be formed by laminating under predetermined conditions (for example, room temperature (20 ° C.) or a heated state) using a roll laminator, a vacuum laminator, or the like. Since the adhesive sheet 100 can be continuously manufactured and has high efficiency, it is preferable to form the adhesive sheet 100 in a heated state using a roll laminator.
- the thickness of the film-like adhesive 10 may be 20 to 200 ⁇ m, 30 to 200 ⁇ m, or 40 to 150 ⁇ m from the viewpoint of embedding the unevenness of the semiconductor chip, the wire, the wiring circuit of the substrate, and the like.
- the thickness of the film-like adhesive 10 is 20 ⁇ m or more, more sufficient adhesive force tends to be obtained, and when the thickness of the film-like adhesive 10 is 200 ⁇ m or less, it is economical and a semiconductor device. It will be possible to meet the demand for miniaturization.
- FIG. 3 is a schematic cross-sectional view showing an adhesive sheet according to another embodiment.
- the adhesive sheet 110 further includes a protective film 30 laminated on the surface of the film-like adhesive 10 opposite to the base material 20.
- the protective film 30 may be the same as the support film described above.
- the thickness of the protective film may be, for example, 15 to 200 ⁇ m or 70 to 170 ⁇ m.
- FIG. 4 is a schematic cross-sectional view showing the semiconductor device according to the embodiment.
- the first semiconductor element Wa of the first stage is wire-bonded to the substrate 14 via the first wire 88, and the second semiconductor element Wa is mounted on the first semiconductor element Wa.
- the semiconductor device is a wire-embedded semiconductor device in which at least a part of the first wire 88 is embedded, but is a semiconductor device in which the first wire 88 and the first semiconductor element Wa are embedded. You may.
- the substrate 14 and the second semiconductor element Waa are further electrically connected via the second wire 98, and the second semiconductor element Waa is sealed by the sealing material 42. ing.
- the thickness of the first semiconductor element Wa may be 10 to 170 ⁇ m, and the thickness of the second semiconductor element Wa may be 20 to 400 ⁇ m.
- the first semiconductor element Wa embedded inside the film-like adhesive 10 is a controller chip for driving the semiconductor device 200.
- the substrate 14 is composed of an organic substrate 90 having two circuit patterns 84 and 94 formed on the surface thereof.
- the first semiconductor element Wa is crimped onto the circuit pattern 94 via an adhesive 41.
- the second semiconductor element Waa is via a film-like adhesive 10 so that a part of the circuit pattern 94, the first semiconductor element Wa, and the circuit pattern 84 in which the first semiconductor element Wa is not crimped is covered. It is crimped to the substrate 14.
- the film-like adhesive 10 is embedded in the uneven steps caused by the circuit patterns 84 and 94 on the substrate 14. Then, the second semiconductor element Waa, the circuit pattern 84, and the second wire 98 are sealed by the resin-made sealing material 42.
- the method for manufacturing a semiconductor device includes a first wire bonding step of electrically connecting a first semiconductor element on a substrate via a first wire, and a method of manufacturing the semiconductor device on one side of the second semiconductor element.
- the semiconductor device 200 is a semiconductor device in which the first wire 88 and the first semiconductor element Wa are embedded, and is manufactured by the following procedure.
- the first semiconductor element Wa having the adhesive 41 is crimped onto the circuit pattern 94 on the substrate 14, and the circuit pattern 84 and the first are on the substrate 14 via the first wire 88.
- the semiconductor element Wa of 1 is electrically bonded and connected (first wire bonding step).
- the adhesive sheet 100 is laminated on one side of the semiconductor wafer (for example, thickness 100 ⁇ m, size: 8 inches), and the base material 20 is peeled off, so that the film-like adhesive 10 (for example, thickness) is attached to one side of the semiconductor wafer. Wafer 110 ⁇ m) is pasted. Then, after the dicing tape is attached to the film-like adhesive 10, the dicing tape is diced to a predetermined size (for example, 7.5 mm square), so that the second film-like adhesive 10 is attached as shown in FIG. (Laminating step).
- a predetermined size for example, 7.5 mm square
- the temperature condition of the laminating process may be 50 to 100 ° C or 60 to 80 ° C.
- the temperature of the laminating step is 50 ° C. or higher, good adhesion to the semiconductor wafer can be obtained.
- the temperature of the laminating step is 100 ° C. or lower, the film-like adhesive 10 is suppressed from being excessively flowed during the laminating step, so that it is possible to prevent a change in thickness or the like.
- Examples of the dicing method include blade dicing using a rotary blade, a method of cutting a film-like adhesive or both a wafer and a film-like adhesive with a laser, and the like.
- the second semiconductor element Waa to which the film-like adhesive 10 is attached is crimped to the substrate 14 to which the first semiconductor element Wa is bonded and connected via the first wire 88.
- the second semiconductor element Waa to which the film-like adhesive 10 is attached is covered with the film-like adhesive 10 so that the first wire 88 and the first semiconductor element Wa are covered.
- the second semiconductor element Waa is fixed to the substrate 14 by crimping the second semiconductor element Waa to the substrate 14 (die bonding step).
- the film-like adhesive 10 is pressure-bonded at 80 to 180 ° C. and 0.01 to 0.50 MPa for 0.5 to 3.0 seconds.
- the film-like adhesive 10 is pressurized and heated at 60 to 175 ° C. and 0.3 to 0.7 MPa for 5 minutes or more.
- the circuit pattern 84 and the second wire are sealed with the sealing material 42.
- the semiconductor device 200 can be manufactured through such a process.
- the semiconductor device may be a wire-embedded semiconductor device in which at least a part of the first wire 88 is embedded.
- Examples 1 to 8 and Comparative Examples 1 to 4 ⁇ Making an adhesive sheet>
- Each component shown below was mixed at the blending ratios (parts by mass) shown in Tables 1 and 2 to prepare a varnish of an adhesive composition having a solid content of 40% by mass using cyclohexanone as a solvent.
- the obtained varnish was filtered through a 100 mesh filter and vacuum defoamed.
- the varnish after vacuum defoaming was applied as a base film on a polyethylene terephthalate (PET) film having a thickness of 38 ⁇ m and subjected to a mold release treatment.
- the applied varnish was heated and dried in two steps at 90 ° C. for 5 minutes and then at 140 ° C. for 5 minutes. In this way, an adhesive sheet having a film-like adhesive having a thickness of 110 ⁇ m in a semi-cured (B stage) state was obtained on the base film.
- PET polyethylene terephthalate
- Thermosetting resin A-1 Epoxy resin having a dicyclopentadiene structure, manufactured by DIC Corporation, trade name: HP-7200L, epoxy equivalent: 250 to 280 g / eq
- A-2 Epoxy resin having a dicyclopentadiene structure, manufactured by Nippon Kayaku Co., Ltd., trade name: XD-1000, epoxy equivalent: 254 g / eq
- A-3 Alicyclic epoxy resin, manufactured by Daicel Corporation, trade name: EHPE3150, epoxy equivalent: 170-190 g / eq
- A-4 Polyfunctional aromatic epoxy resin, manufactured by Printec Co., Ltd., trade name: VG3101L, epoxy equivalent: 210 g / eq
- A-5 Cresol novolac type epoxy resin, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name: YDCN-700-10, epoxy equivalent: 209 g / eq
- A-6 Bisphenol F type epoxy resin (liquid at 25 °
- B-1-2 Phenolic resin having a dicyclopentadiene structure represented by the general formula (1a), manufactured by JFE Chemical Co., Ltd., trade name: J-DPP-115, hydroxyl group equivalent: 177 to 181 g / eq, softening point.
- Phenolic resin not having an alicyclic ring B-2-1 Bisphenol A novolak type phenol resin, manufactured by DIC Corporation, trade name: LF-4871, hydroxyl group equivalent: 118 g / eq B-2-2: Phenylaralkyl type phenolic resin, manufactured by Mitsui Chemicals, Inc., trade name: XLC-LL, hydroxyl group equivalent: 175 g / eq B-2-3: Phenyl aralkyl type phenolic resin, manufactured by Air Water Inc., trade name: HE100C-30, hydroxyl group equivalent: 170 g / eq (C)
- Elastomer C-1 Epoxide group-containing acrylic resin (acrylic rubber), manufactured by Nagase Chemtex Co., Ltd., trade name: SG-P3 solvent-modified product, weight average molecular weight: 800,000, glycidyl functional group monomer ratio: 3% , Tg:
- C-3 Carboxylic group-containing acrylic resin (acrylic rubber), manufactured by Nagase ChemteX Corporation, trade name: SG-708-6, weight average molecular weight: 700,000, acid value: 9 mgKOH / g, Tg: 4 ° C.
- D Inorganic filler
- D-1 Silica filler dispersion, fused silica, manufactured by Admatex Co., Ltd., trade name: SC2050-HLG, average particle size: 0.50 ⁇ m
- E Curing Accelerator E-1: 1-Cyanoethyl-2-phenylimidazole, manufactured by Shikoku Chemicals Corporation, trade name: Curesol 2PZ-CN
- the obtained adhesive sheet was evaluated for embedding property and bleeding amount.
- the embedding property of the adhesive sheet was evaluated by preparing the following evaluation samples.
- the base film of the film-like adhesive (thickness 110 ⁇ m) obtained above was peeled off and attached to a dicing tape to prepare a dicing die bonding integrated adhesive sheet.
- a semiconductor wafer (8 inches) having a thickness of 100 ⁇ m was prepared, and this was attached to the adhesive side of the dicing die bonding integrated adhesive sheet by heating to 70 ° C.
- the semiconductor chip A was obtained by dicing this semiconductor wafer into a 7.5 mm square.
- a semiconductor wafer (8 inches) with a thickness of 50 ⁇ m and a dicing die bonding integrated adhesive sheet (Hitachi Kasei Co., Ltd., trade name: HR9004-10) (thickness 10 ⁇ m) different from the above are prepared, and the semiconductor wafer is prepared.
- the semiconductor wafer was prepared.
- the semiconductor wafer was diced into a 4.5 mm square to obtain a semiconductor chip B with a die bonding film.
- an evaluation substrate having a total thickness of 260 ⁇ m coated with a solder resist (Taiyo Nisshi Co., Ltd., trade name: AUS308) was prepared so that the die bonding film of the semiconductor chip B and the solder resist of the evaluation substrate were in contact with each other. , 120 ° C., 0.20 MPa, 2 seconds. Then, the film-like adhesive of the semiconductor chip A and the semiconductor wafer of the semiconductor chip B were pressure-bonded under the conditions of 120 ° C., 0.20 MPa, and 1.5 seconds to obtain an evaluation sample. At this time, the alignment was performed so that the semiconductor chip B crimped first was centered on the semiconductor chip A.
- the evaluation sample obtained in this way is observed with an ultrasonic digital diagnostic imaging device (manufactured by Insight Co., Ltd., probe: 75 MHz) for the presence or absence of voids, and if voids are observed, per unit area.
- the ratio of void area was calculated, and these analysis results were evaluated as implantability.
- the evaluation criteria are as follows. The results are shown in Tables 1 and 2. A: No voids were observed. B: Voids were observed, but the proportion was less than 5 area%. C: Voids were observed, and the ratio was 5 area% or more.
- the adhesive composition according to the present invention has good embedding property at the time of thermal pressure bonding and is excellent in that bleeding can be suppressed. Therefore, the adhesive composition is formed into a film.
- the film-like adhesive can be useful as FOD (Film Over Die), which is a chip-embedded film-like adhesive, or FOW (Film Over Ware), which is a wire-embedded film-like adhesive.
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Abstract
Description
本実施形態に係る接着剤組成物は、(A)熱硬化性樹脂と、(B)硬化剤と、(C)エラストマーと、(D)無機フィラーとを含有する。接着剤組成物は、熱硬化性であり、半硬化(Bステージ)状態を経て、硬化処理後に完全硬化物(Cステージ)状態となり得る。 [Adhesive composition]
The adhesive composition according to the present embodiment contains (A) a thermosetting resin, (B) a curing agent, (C) an elastomer, and (D) an inorganic filler. The adhesive composition is thermosetting and can be in a semi-cured (B stage) state and then in a fully cured (C stage) state after the curing treatment.
(A)成分は、接着性の観点から、エポキシ樹脂であってよい。エポキシ樹脂は、分子内にエポキシ基を有する化合物であれば特に制限されずに用いることができる。エポキシ樹脂としては、例えば、ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、フェノールノボラック型エポキシ樹脂、クレゾールノボラック型エポキシ樹脂、ビスフェノールAノボラック型エポキシ樹脂、ビスフェノールFノボラック型エポキシ樹脂、スチルベン型エポキシ樹脂、トリアジン骨格含有エポキシ樹脂、フルオレン骨格含有エポキシ樹脂、トリフェノールメタン型エポキシ樹脂、ビフェニル型エポキシ樹脂、キシリレン型エポキシ樹脂、ビフェニルアラルキル型エポキシ樹脂、ナフタレン型エポキシ樹脂、脂環式環を有するエポキシ樹脂等が挙げられる。これらは、1種を単独で又は2種以上を組み合わせて用いてもよい。これらの中でも、エポキシ樹脂は、ビスフェノールF型エポキシ樹脂を含んでいてもよい。エポキシ樹脂が、ビスフェノールF型エポキシ樹脂を含むことによって、埋め込み性が向上する傾向にある。また、エポキシ樹脂は、流動性の観点から、脂環式環を有するエポキシ樹脂を含んでいてもよく、脂環式環を有するエポキシ樹脂は、ジシクロペンタジエン型エポキシ樹脂(ジシクロペンタジエン構造を有するエポキシ樹脂)であってもよい。 <Component (A): Thermosetting resin>
The component (A) may be an epoxy resin from the viewpoint of adhesiveness. The epoxy resin can be used without particular limitation as long as it is a compound having an epoxy group in the molecule. Examples of the epoxy resin include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol S type epoxy resin, phenol novolac type epoxy resin, cresol novolac type epoxy resin, bisphenol A novolac type epoxy resin, and bisphenol F novolac type epoxy resin. , Stilben type epoxy resin, triazine skeleton containing epoxy resin, fluorene skeleton containing epoxy resin, triphenol methane type epoxy resin, biphenyl type epoxy resin, xylylene type epoxy resin, biphenyl aralkyl type epoxy resin, naphthalene type epoxy resin, alicyclic ring Epoxy resin having the above can be mentioned. These may be used individually by 1 type or in combination of 2 or more type. Among these, the epoxy resin may contain a bisphenol F type epoxy resin. When the epoxy resin contains a bisphenol F type epoxy resin, the embedding property tends to be improved. Further, the epoxy resin may contain an epoxy resin having an alicyclic ring from the viewpoint of fluidity, and the epoxy resin having an alicyclic ring has a dicyclopentadiene type epoxy resin (having a dicyclopentadiene structure). Epoxy resin) may be used.
(B)成分は、脂環式環を有するフェノール樹脂(B-1)を含む。 <Component (B): Hardener>
The component (B) contains a phenolic resin (B-1) having an alicyclic ring.
本実施形態に係る接着剤組成物は、(C)エラストマーを含有する。(C)成分は、エラストマーを構成する重合体のガラス転移温度(Tg)が50℃以下であるものが好ましい。 <Component (C): Elastomer>
The adhesive composition according to this embodiment contains (C) an elastomer. The component (C) preferably has a glass transition temperature (Tg) of the polymer constituting the elastomer of 50 ° C. or lower.
無機フィラーとしては、例えば、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、ケイ酸カルシウム、ケイ酸マグネシウム、酸化カルシウム、酸化マグネシウム、酸化アルミニウム、窒化アルミニウム、ホウ酸アルミウィスカ、窒化ホウ素、結晶性シリカ、非晶性シリカ等が挙げられる。これらは1種を単独で用いてもよく、2種以上を組み合わせて用いてもよい。得られるフィルム状接着剤の熱伝導性がより向上する観点から、無機フィラーは、酸化アルミニウム、窒化アルミニウム、窒化ホウ素、結晶性シリカ又は非晶性シリカを含んでいてよい。また、接着剤組成物の溶融粘度を調整する観点及び接着剤組成物にチキソトロピック性を付与する観点から、無機フィラーは、水酸化アルミニウム、水酸化マグネシウム、炭酸カルシウム、炭酸マグネシウム、ケイ酸カルシウム、ケイ酸マグネシウム、酸化カルシウム、酸化マグネシウム、酸化アルミニウム、結晶性シリカ、又は非晶性シリカであってよく、シリカ(結晶性シリカ又は非晶性シリカ)であってもよい。 <Component (D): Inorganic filler>
Examples of the inorganic filler include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, calcium silicate, magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, aluminum nitride, aluminum borate whisker, boron nitride, and crystals. Examples thereof include sex silica and amorphous silica. One of these may be used alone, or two or more thereof may be used in combination. From the viewpoint of further improving the thermal conductivity of the obtained film-like adhesive, the inorganic filler may contain aluminum oxide, aluminum nitride, boron nitride, crystalline silica or amorphous silica. Further, from the viewpoint of adjusting the melt viscosity of the adhesive composition and imparting thixotropic properties to the adhesive composition, the inorganic fillers include aluminum hydroxide, magnesium hydroxide, calcium carbonate, magnesium carbonate, and calcium silicate. It may be magnesium silicate, calcium oxide, magnesium oxide, aluminum oxide, crystalline silica, or amorphous silica, and may be silica (crystalline silica or amorphous silica).
本実施形態に係る接着剤組成物は、(E)硬化促進剤を含有していてよい。硬化促進剤は、特に限定されず、一般に使用されるものを用いることができる。(E)成分としては、例えば、イミダゾール類及びその誘導体、有機リン系化合物、第二級アミン類、第三級アミン類、第四級アンモニウム塩等が挙げられる。これらは、1種を単独で又は2種以上を組み合わせて用いてもよい。これらの中でも、反応性の観点から(E)成分はイミダゾール類及びその誘導体であってよい。 <Component (E): Curing accelerator>
The adhesive composition according to this embodiment may contain (E) a curing accelerator. The curing accelerator is not particularly limited, and generally used ones can be used. Examples of the component (E) include imidazoles and derivatives thereof, organic phosphorus compounds, secondary amines, tertiary amines, quaternary ammonium salts and the like. These may be used individually by 1 type or in combination of 2 or more type. Among these, the component (E) may be imidazoles and derivatives thereof from the viewpoint of reactivity.
本実施形態に係る接着剤組成物は、その他の成分として、抗酸化剤、シランカップリング剤、レオロジーコントロール剤等をさらに含有していてもよい。これらの成分の含有量は、(A)成分、(B)成分、及び(C)成分の総量100質量部に対して、0.01~3質量部であってよい。 <Other ingredients>
The adhesive composition according to the present embodiment may further contain an antioxidant, a silane coupling agent, a rheology control agent and the like as other components. The content of these components may be 0.01 to 3 parts by mass with respect to 100 parts by mass of the total amount of the components (A), (B), and (C).
図1は、一実施形態に係るフィルム状接着剤を示す模式断面図である。フィルム状接着剤10は、上述の接着剤組成物をフィルム状に形成してなるものである。フィルム状接着剤10は、半硬化(Bステージ)状態であってよい。このようなフィルム状接着剤10は、接着剤組成物を支持フィルムに塗布することによって形成することができる。接着剤ワニスを用いる場合は、接着剤ワニスを支持フィルムに塗布し、溶剤を加熱乾燥して除去することによってフィルム状接着剤10を形成することができる。 [Film-like adhesive]
FIG. 1 is a schematic cross-sectional view showing a film-like adhesive according to an embodiment. The film-
図2は、一実施形態に係る接着シートを示す模式断面図である。接着シート100は、基材20と基材上に設けられた上述のフィルム状接着剤10とを備える。 [Adhesive sheet]
FIG. 2 is a schematic cross-sectional view showing an adhesive sheet according to an embodiment. The
図4は、一実施形態に係る半導体装置を示す模式断面図である。半導体装置200は、基板14に、第1のワイヤ88を介して1段目の第1の半導体素子Waがワイヤボンディング接続されると共に、第1の半導体素子Wa上に、第2の半導体素子Waaがフィルム状接着剤10を介して圧着されることで、第1のワイヤ88の少なくとも一部がフィルム状接着剤10に埋め込まれてなる半導体装置である。半導体装置は、第1のワイヤ88の少なくとも一部が埋め込まれてなるワイヤ埋め込み型の半導体装置であっても、第1のワイヤ88及び第1の半導体素子Waが埋め込まれてなる半導体装置であってもよい。また、半導体装置200では、基板14と第2の半導体素子Waaとがさらに第2のワイヤ98を介して電気的に接続されると共に、第2の半導体素子Waaが封止材42により封止されている。 [Semiconductor device]
FIG. 4 is a schematic cross-sectional view showing the semiconductor device according to the embodiment. In the
本実施形態に係る半導体装置の製造方法は、基板上に第1のワイヤを介して第1の半導体素子を電気的に接続する第1のワイヤボンディング工程と、第2の半導体素子の片面に、上述のフィルム状接着剤を貼付するラミネート工程と、フィルム状接着剤が貼付された第2の半導体素子を、フィルム状接着剤を介して圧着することで、第1のワイヤの少なくとも一部をフィルム状接着剤に埋め込むダイボンド工程を備える。 [Manufacturing method of semiconductor devices]
The method for manufacturing a semiconductor device according to the present embodiment includes a first wire bonding step of electrically connecting a first semiconductor element on a substrate via a first wire, and a method of manufacturing the semiconductor device on one side of the second semiconductor element. By crimping the above-mentioned laminating step of applying the film-like adhesive and the second semiconductor element to which the film-like adhesive is attached via the film-like adhesive, at least a part of the first wire is filmed. It is provided with a die bonding process of embedding in a state adhesive.
<接着シートの作製>
以下に示す各成分を表1及び表2に示した配合割合(質量部)で混合し、溶媒としてシクロヘキサノンを用いて固形分40質量%の接着剤組成物のワニスを調製した。次に、得られたワニスを100メッシュのフィルターでろ過し、真空脱泡した。真空脱泡後のワニスを、基材フィルムとして、厚さ38μmの離型処理を施したポリエチレンテレフタレート(PET)フィルム上に塗布した。塗布したワニスを、90℃で5分間、続いて140℃で5分間の2段階で加熱乾燥した。このようにして、基材フィルム上に、半硬化(Bステージ)状態にある厚さ110μmのフィルム状接着剤を備える接着シートを得た。 (Examples 1 to 8 and Comparative Examples 1 to 4)
<Making an adhesive sheet>
Each component shown below was mixed at the blending ratios (parts by mass) shown in Tables 1 and 2 to prepare a varnish of an adhesive composition having a solid content of 40% by mass using cyclohexanone as a solvent. Next, the obtained varnish was filtered through a 100 mesh filter and vacuum defoamed. The varnish after vacuum defoaming was applied as a base film on a polyethylene terephthalate (PET) film having a thickness of 38 μm and subjected to a mold release treatment. The applied varnish was heated and dried in two steps at 90 ° C. for 5 minutes and then at 140 ° C. for 5 minutes. In this way, an adhesive sheet having a film-like adhesive having a thickness of 110 μm in a semi-cured (B stage) state was obtained on the base film.
A-1:ジシクロペンタジエン構造を有するエポキシ樹脂、DIC株式会社製、商品名:HP-7200L、エポキシ当量:250~280g/eq
A-2:ジシクロペンタジエン構造を有するエポキシ樹脂、日本化薬株式会社製、商品名:XD-1000、エポキシ当量:254g/eq
A-3:脂環式エポキシ樹脂、ダイセル株式会社製、商品名:EHPE3150、エポキシ当量:170~190g/eq
A-4:多官能芳香族エポキシ樹脂、株式会社プリンテック製、商品名:VG3101L、エポキシ当量:210g/eq
A-5:クレゾールノボラック型エポキシ樹脂、新日鉄住金化学株式会社製、商品名:YDCN-700-10、エポキシ当量:209g/eq
A-6:ビスフェノールF型エポキシ樹脂(25℃で液体)、DIC株式会社製、商品名:EXA-830CRP、エポキシ当量:159g/eq
(B)硬化剤
(B-1)脂環式環を有するフェノール樹脂
B-1-1:一般式(1a)で表されるジシクロペンタジエン構造を有するフェノール樹脂、JFEケミカル株式会社製、商品名:J-DPP-85、水酸基当量:164~167g/eq、軟化点85~89℃
B-1-2:一般式(1a)で表されるジシクロペンタジエン構造を有するフェノール樹脂、JFEケミカル株式会社製、商品名:J-DPP-115、水酸基当量:177~181g/eq、軟化点107~116℃
(B-2)脂環式環を有しないフェノール樹脂
B-2-1:ビスフェノールAノボラック型フェノール樹脂、DIC株式会社製、商品名:LF-4871、水酸基当量:118g/eq
B-2-2:フェニルアラルキル型フェノール樹脂、三井化学株式会社製、商品名:XLC-LL、水酸基当量:175g/eq
B-2-3:フェニルアラルキル型フェノール樹脂、エア・ウォーター株式会社製、商品名:HE100C-30、水酸基当量:170g/eq
(C)エラストマー
C-1:エポキシ基含有アクリル樹脂(アクリルゴム)、ナガセケムテクス株式会社製、商品名:SG-P3溶剤変更品、重量平均分子量:80万、グリシジル官能基モノマー比率:3%、Tg:-7℃
C-2:アクリル樹脂(アクリルゴム)、ナガセケムテクス株式会社製、商品名:SG-70L、重量平均分子量:90万、酸価:5mgKOH/g、Tg:-13℃
C-3:カルボキシル基含有アクリル樹脂(アクリルゴム)、ナガセケムテックス株式会社製、商品名:SG-708-6、重量平均分子量:70万、酸価:9mgKOH/g、Tg:4℃
(D)無機フィラー
D-1:シリカフィラー分散液、溶融シリカ、アドマテックス株式会社製、商品名:SC2050-HLG、平均粒径:0.50μm
(E)硬化促進剤
E-1:1-シアノエチル-2-フェニルイミダゾール、四国化成工業株式会社製、商品名:キュアゾール2PZ-CN (A) Thermosetting resin A-1: Epoxy resin having a dicyclopentadiene structure, manufactured by DIC Corporation, trade name: HP-7200L, epoxy equivalent: 250 to 280 g / eq
A-2: Epoxy resin having a dicyclopentadiene structure, manufactured by Nippon Kayaku Co., Ltd., trade name: XD-1000, epoxy equivalent: 254 g / eq
A-3: Alicyclic epoxy resin, manufactured by Daicel Corporation, trade name: EHPE3150, epoxy equivalent: 170-190 g / eq
A-4: Polyfunctional aromatic epoxy resin, manufactured by Printec Co., Ltd., trade name: VG3101L, epoxy equivalent: 210 g / eq
A-5: Cresol novolac type epoxy resin, manufactured by Nippon Steel & Sumikin Chemical Co., Ltd., trade name: YDCN-700-10, epoxy equivalent: 209 g / eq
A-6: Bisphenol F type epoxy resin (liquid at 25 ° C), manufactured by DIC Corporation, trade name: EXA-830CRP, epoxy equivalent: 159 g / eq
(B) Hardener (B-1) Phenolic resin having an alicyclic ring B-1-1: Phenolic resin having a dicyclopentadiene structure represented by the general formula (1a), manufactured by JFE Chemical Co., Ltd., trade name : J-DPP-85, hydroxyl group equivalent: 164 to 167 g / eq, softening point 85 to 89 ° C.
B-1-2: Phenolic resin having a dicyclopentadiene structure represented by the general formula (1a), manufactured by JFE Chemical Co., Ltd., trade name: J-DPP-115, hydroxyl group equivalent: 177 to 181 g / eq, softening point. 107-116 ° C
(B-2) Phenolic resin not having an alicyclic ring B-2-1: Bisphenol A novolak type phenol resin, manufactured by DIC Corporation, trade name: LF-4871, hydroxyl group equivalent: 118 g / eq
B-2-2: Phenylaralkyl type phenolic resin, manufactured by Mitsui Chemicals, Inc., trade name: XLC-LL, hydroxyl group equivalent: 175 g / eq
B-2-3: Phenyl aralkyl type phenolic resin, manufactured by Air Water Inc., trade name: HE100C-30, hydroxyl group equivalent: 170 g / eq
(C) Elastomer C-1: Epoxide group-containing acrylic resin (acrylic rubber), manufactured by Nagase Chemtex Co., Ltd., trade name: SG-P3 solvent-modified product, weight average molecular weight: 800,000, glycidyl functional group monomer ratio: 3% , Tg: -7 ° C
C-2: Acrylic resin (acrylic rubber), manufactured by Nagase Chemtex Co., Ltd., trade name: SG-70L, weight average molecular weight: 900,000, acid value: 5 mgKOH / g, Tg: -13 ° C.
C-3: Carboxylic group-containing acrylic resin (acrylic rubber), manufactured by Nagase ChemteX Corporation, trade name: SG-708-6, weight average molecular weight: 700,000, acid value: 9 mgKOH / g, Tg: 4 ° C.
(D) Inorganic filler D-1: Silica filler dispersion, fused silica, manufactured by Admatex Co., Ltd., trade name: SC2050-HLG, average particle size: 0.50 μm
(E) Curing Accelerator E-1: 1-Cyanoethyl-2-phenylimidazole, manufactured by Shikoku Chemicals Corporation, trade name: Curesol 2PZ-CN
得られた接着シートについて、埋め込み性及びブリード量の評価を行った。 <Evaluation of various physical properties>
The obtained adhesive sheet was evaluated for embedding property and bleeding amount.
接着シートの埋め込み性を以下の評価サンプルを作製して評価した。上記で得られたフィルム状接着剤(厚さ110μm)の基材フィルムを剥がし、ダイシングテープに貼り付け、ダイシングダイボンディング一体型接着シートを作製した。次に、厚さ100μmの半導体ウェハ(8インチ)を用意し、これをダイシングダイボンディング一体型接着シートの接着剤側に、70℃に加熱して貼り付けた。その後、この半導体ウェハを7.5mm角にダイシングすることによって、半導体チップAを得た。次に、厚さ50μmの半導体ウェハ(8インチ)及び上記とは別のダイシングダイボンディング一体型接着シート(日立化成株式会社、商品名:HR9004-10)(厚さ10μm)を用意し、半導体ウェハをダイシングダイボンディング一体型接着シートの接着剤側に、70℃に加熱して貼り付けた。その後、この半導体ウェハを4.5mm角にダイシングすることによって、ダイボンディングフィルム付き半導体チップBを得た。次いで、ソルダーレジスト(太陽日酸株式会社、商品名:AUS308)を塗布した総厚さ260μmの評価用基板を用意し、半導体チップBのダイボンディングフィルムと評価用基板のソルダーレジストとが接するように、120℃、0.20MPa、2秒間の条件で圧着した。その後、半導体チップAのフィルム状接着剤と半導体チップBの半導体ウェハとが接するように、120℃、0.20MPa、1.5秒間の条件で圧着し、評価サンプルを得た。この際、先に圧着している半導体チップBが半導体チップAの中央となるように位置合わせを行った。このようにして得られた評価サンプルを超音波デジタル画像診断装置(インサイト株式会社製、プローブ:75MHz)にてボイドの観測の有無を観測し、ボイドが観測された場合は、単位面積あたりのボイドの面積の割合を算出し、これらの分析結果を埋め込み性として評価した。評価基準は、以下のとおりである。結果を表1及び表2に示す。
A:ボイドが観測されなかった。
B:ボイドが観測されたが、その割合が5面積%未満であった。
C:ボイドが観測され、その割合が5面積%以上であった。 [Embedability evaluation]
The embedding property of the adhesive sheet was evaluated by preparing the following evaluation samples. The base film of the film-like adhesive (
A: No voids were observed.
B: Voids were observed, but the proportion was less than 5 area%.
C: Voids were observed, and the ratio was 5 area% or more.
上記埋め込み性評価で「A」又は「B」であったものについて、ブリード量評価を行った。上記埋め込み性評価で作製した評価サンプルと同様にして、ブリード量評価の評価サンプルを作製した。顕微鏡を用いて、評価サンプルの4辺の中心から、フィルム状接着剤のはみ出し量を測長し、その最大値をブリード量とした。結果を表1及び表2に示す。 [Bleed amount evaluation]
The bleed amount was evaluated for those having "A" or "B" in the above-mentioned embedding property evaluation. An evaluation sample for bleed amount evaluation was prepared in the same manner as the evaluation sample prepared for the embedding property evaluation. Using a microscope, the amount of protrusion of the film-like adhesive was measured from the center of the four sides of the evaluation sample, and the maximum value was taken as the bleed amount. The results are shown in Tables 1 and 2.
Claims (13)
- 熱硬化性樹脂と、硬化剤と、エラストマーと、無機フィラーとを含有し、
前記硬化剤が脂環式環を有するフェノール樹脂を含み、
前記エラストマーの含有量が、前記熱硬化性樹脂100質量部に対して、10~80質量部である、接着剤組成物。 Contains a thermosetting resin, a curing agent, an elastomer, and an inorganic filler.
The curing agent contains a phenolic resin having an alicyclic ring.
An adhesive composition in which the content of the elastomer is 10 to 80 parts by mass with respect to 100 parts by mass of the thermosetting resin. - 前記熱硬化性樹脂がエポキシ樹脂である、請求項1に記載の接着剤組成物。 The adhesive composition according to claim 1, wherein the thermosetting resin is an epoxy resin.
- 前記エポキシ樹脂がビスフェノールF型エポキシ樹脂を含む、請求項2に記載の接着剤組成物。 The adhesive composition according to claim 2, wherein the epoxy resin contains a bisphenol F type epoxy resin.
- 前記エラストマーがアクリル樹脂である、請求項1~3のいずれか一項に記載の接着剤組成物。 The adhesive composition according to any one of claims 1 to 3, wherein the elastomer is an acrylic resin.
- 無機フィラーがシリカである、請求項1~4のいずれか一項に記載の接着剤組成物。 The adhesive composition according to any one of claims 1 to 4, wherein the inorganic filler is silica.
- 前記無機フィラーの含有量が、接着剤組成物全量を基準として、25質量%以上である、請求項1~5のいずれか一項に記載の接着剤組成物。 The adhesive composition according to any one of claims 1 to 5, wherein the content of the inorganic filler is 25% by mass or more based on the total amount of the adhesive composition.
- 前記熱硬化性樹脂、前記硬化剤、前記エラストマー、及び前記無機フィラーの合計の含有量が、接着剤組成物全量を基準として、95質量%以上である、請求項1~6のいずれか一項に記載の接着剤組成物。 Any one of claims 1 to 6, wherein the total content of the thermosetting resin, the curing agent, the elastomer, and the inorganic filler is 95% by mass or more based on the total amount of the adhesive composition. The adhesive composition according to.
- 硬化促進剤をさらに含有する、請求項1~7のいずれか一項に記載の接着剤組成物。 The adhesive composition according to any one of claims 1 to 7, further containing a curing accelerator.
- 請求項1~8のいずれか一項に記載の接着剤組成物をフィルム状に形成してなる、フィルム状接着剤。 A film-like adhesive obtained by forming the adhesive composition according to any one of claims 1 to 8 in the form of a film.
- 基材と、
前記基材上に設けられた、請求項9に記載のフィルム状接着剤と、
を備える、接着シート。 With the base material
The film-like adhesive according to claim 9 provided on the base material and
Adhesive sheet. - 前記基材がダイシングテープである、請求項10に記載の接着シート。 The adhesive sheet according to claim 10, wherein the base material is a dicing tape.
- 前記フィルム状接着剤の前記基材とは反対側の面に積層された保護フィルムをさらに備える、請求項10又は11に記載の接着シート。 The adhesive sheet according to claim 10 or 11, further comprising a protective film laminated on the surface of the film-like adhesive opposite to the base material.
- 基板上に第1のワイヤを介して第1の半導体素子を電気的に接続するワイヤボンディング工程と、
第2の半導体素子の片面に、請求項9に記載のフィルム状接着剤を貼付するラミネート工程と、
前記フィルム状接着剤が貼付された第2の半導体素子を、前記フィルム状接着剤を介して圧着することで、前記第1のワイヤの少なくとも一部を前記フィルム状接着剤に埋め込むダイボンド工程と、
を備える、半導体装置の製造方法。 A wire bonding step of electrically connecting a first semiconductor element on a substrate via a first wire,
A laminating step of attaching the film-like adhesive according to claim 9 to one side of the second semiconductor element, and
A die bonding step of embedding at least a part of the first wire in the film-like adhesive by crimping the second semiconductor element to which the film-like adhesive is attached via the film-like adhesive.
A method for manufacturing a semiconductor device.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
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SG11202109506YA SG11202109506YA (en) | 2019-03-11 | 2020-03-06 | Adhesive agent composition, film-like adhesive agent, adhesive sheet, and semiconductor device manufacturing method |
CN202080019222.1A CN113544229A (en) | 2019-03-11 | 2020-03-06 | Adhesive composition, film-like adhesive, adhesive sheet, and method for manufacturing semiconductor device |
JP2021505054A JPWO2020184490A1 (en) | 2019-03-11 | 2020-03-06 | |
KR1020217028964A KR20210137041A (en) | 2019-03-11 | 2020-03-06 | Adhesive composition, film-like adhesive, adhesive sheet, and method for manufacturing a semiconductor device |
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JPPCT/JP2019/009762 | 2019-03-11 | ||
PCT/JP2019/009762 WO2020183581A1 (en) | 2019-03-11 | 2019-03-11 | Adhesive agent composition, film-like adhesive agent, adhesive sheet, and semiconductor device manufacturing method |
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PCT/JP2020/009887 WO2020184490A1 (en) | 2019-03-11 | 2020-03-06 | Adhesive agent composition, film-like adhesive agent, adhesive sheet, and semiconductor device manufacturing method |
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KR (1) | KR20210137041A (en) |
CN (1) | CN113544229A (en) |
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WO2023047594A1 (en) * | 2021-09-27 | 2023-03-30 | 昭和電工マテリアルズ株式会社 | Film adhesive, two-in-one dicing and die-bonding film, semiconductor device, and manufacturing method for same |
JP7356534B1 (en) | 2022-03-30 | 2023-10-04 | 株式会社レゾナック | Adhesive film for semiconductors, dicing die bonding film, and method for manufacturing semiconductor devices |
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WO2022186285A1 (en) * | 2021-03-05 | 2022-09-09 | 昭和電工マテリアルズ株式会社 | Film adhesive, integrated dicing/die bonding film, semiconductor device, and method for producing semiconductor device |
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SG11202109506YA (en) | 2021-09-29 |
CN113544229A (en) | 2021-10-22 |
WO2020183581A1 (en) | 2020-09-17 |
JPWO2020184490A1 (en) | 2020-09-17 |
TW202045676A (en) | 2020-12-16 |
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