WO2019047063A1

WO2019047063A1 - Integrated detection sensor and touch sensing device

Info

Publication number: WO2019047063A1
Application number: PCT/CN2017/100716
Authority: WO
Inventors: 方鹏; 田岚; 张浩诗; 李光林
Original assignee: 中国科学院深圳先进技术研究院
Priority date: 2017-09-06
Filing date: 2017-09-06
Publication date: 2019-03-14

Abstract

An integrated detection sensor and a touch sensing device. The sensor comprises: a first structural body, a second structural body and a bonding layer; the first structural body comprising a first electrode, a second electrode, and a first flexible membrane disposed between the first electrode and the second electrode; the first flexible membrane having a pyroelectric effect and a piezoelectric effect, and the first electrode and the second electrode being disposed so as to output a mixed temperature and pressure detection signal; the second structural body comprising a third electrode, a fourth electrode, and a second flexible membrane disposed between the third electrode and the fourth electrode; the second flexible membrane having a piezoelectric effect, and the third electrode and the fourth electrode being disposed so as to output a pure pressure detection signal; the bonding layer being configured so as to insulate and connect the first structural body and the second structural body.

Description

Integrated detection sensor and touch sensing device

Technical field

The present disclosure relates to the field of signal detection technologies, for example, to an integrated detection sensor and a touch sensing device.

Background technique

The coordination of movement and sensory functions is the key to realizing the natural and precise grasping of objects by prosthetic hands. The prosthetic technique in the related art provides a possibility for the recovery of the amputee's motor function, but the recovery of sensory function remains a challenge. For real human hands, the skin surface has a variety of susceptors for acquiring sensory information and transmitting this information to the brain through the nervous system; for prosthetic hands, a variety of artificial sensors can be used to detect different sensory signals, after processing, through the nerve The interface is passed to the brain.

Therefore, in order to realize the sensory feedback of the prosthetic hand and realize the closed-loop control, it is first necessary to realize the detection of the sensory signal. Temperature and force are two types of sensory information that are important for prosthetic hands and exist in most prosthetic applications. Sensors used to obtain sensory information in the hands of prostheses are usually easy to integrate (eg light, thin, soft or stretchable), simple in structure, and excellent in performance (eg high sensitivity of the sensor, stable frequency response or low drift) Durable, low energy consumption and low cost.

Although there are many methods for detecting temperature and force, the sensing technology that can be integrated into the prosthetic hand for signal detection in related art has more or less in terms of material properties, signal accuracy, manufacturing difficulty and cost. Lack of.

Summary of the invention

The present disclosure provides an integrated detection sensor and touch sensing device to provide a miniaturized integrated detection sensor capable of simultaneously measuring temperature and pressure.

In a first aspect, the present disclosure provides an integrated detecting sensor including: a first structural body, a second structural body, and a bonding layer, wherein the second structural body is disposed at one side of the first structural body, An adhesive layer is disposed between the first structural body and the second structural body;

The first structure body includes a first electrode, a second electrode, and a first flexible film disposed between the first electrode and the second electrode; the first flexible film has a heat release An electrical effect and a piezoelectric effect, the first electrode pair formed by the first electrode and the second electrode is used for outputting a mixed measurement signal of temperature and pressure;

The second structure includes a third electrode, a fourth electrode, and a second flexible film disposed between the third electrode and the fourth electrode; the second flexible film has a piezoelectric An effect, the second electrode pair formed by the third electrode and the fourth electrode is used to output a pure pressure measurement signal;

The bonding layer is provided to insulate the first structure body from the second structure body.

Optionally, the sensor further includes: a signal processing module;

The first electrode pair and the second electrode pair are respectively electrically connected to the signal processing module;

The signal processing module is configured to acquire a mixed measurement signal of the temperature and pressure output by the first electrode pair, and obtain a pure pressure measurement signal output by the second electrode pair; according to the signal processing module and the Performing electrical connection manners of the first electrode pair and the second electrode pair, calculating the mixed measurement signal of the temperature and pressure and the pure pressure measurement signal, acquiring a pure temperature detection signal; and outputting the pure temperature respectively The detection signal and the pure pressure detection signal.

Optionally, the signal processing module is further configured to: perform at least one of the following steps, the mixed measurement signal of the temperature and pressure outputted by the acquired first electrode pair, and the acquired The second electrode amplifies and filters the output pure pressure measurement signal;

The pure temperature detection signal and the pure pressure detection signal are subjected to amplification filtering before outputting the pure temperature detection signal and the pure pressure detection signal.

Optionally, the first flexible film is a ferroelectric polymer film.

Optionally, the second flexible film is a piezoelectric electret film.

Optionally, the material of the first flexible film comprises: a copolymer of polyvinylidene fluoride or polyvinylidene fluoride.

Optionally, the material of the second flexible film comprises: polypropylene, polyethylene terephthalate, polyethylene naphthalate, fluorinated ethylene ionomer or polytetrafluoroethylene.

Optionally, the method for preparing the first flexible film comprises: spin coating or stretching.

Optionally, the preparation method of the second flexible film comprises: a puffing method, a template method or an etching method.

Optionally, the first electrode pair and the second electrode pair are formed by a set coating process; wherein the setting coating process comprises: evaporation or sputtering.

Optionally, the first structural body and the second structural body are respectively combined with the adhesive layer by a flexible composite manner;

Wherein, the flexible composite method comprises: pasting, hot pressing or melting.

Optionally, the first electrode is disposed in the first structure body away from the second structure body a side, the second electrode is disposed on a side of the first structure body adjacent to the second structure body; or

The first electrode is disposed on a side of the first structure adjacent to the second structure, and the second electrode is disposed on a side of the first structure away from the second structure.

Optionally, the third electrode is disposed on a side of the second structure body adjacent to the first structure body, and the fourth electrode is disposed in the second structure body away from the first structure body One side; or

The third electrode is disposed on a side of the second structure away from the first structure, and the fourth electrode is disposed on a side of the second structure adjacent to the first structure.

In a second aspect, the present disclosure provides a touch sensing device comprising the sensor of any of the above.

Optionally, the touch sensing device comprises at least one of the following: a prosthetic hand, a robot hand, and an artificial skin.

The present disclosure provides an integrated detection sensor and a touch sensing device that construct a first structural body by using a first flexible film having a pyroelectric effect and a piezoelectric effect, and construct a second using a second flexible film having a piezoelectric effect The structure can obtain a flexible sensor capable of simultaneously measuring temperature and pressure, and solves the detection technology of integrated temperature and force in the related art, and has the defects in material characteristics, signal precision, manufacturing difficulty and cost, and realizes temperature. The force signal is detected simultaneously on a single sensor; at the same time, the sensor is light in weight, thin in thickness, flexible and bendable, has certain flexibility and is suitable for the skin surface, and can be applied to smart skin, robot hand, prosthetic hand and the like.

DRAWINGS

1a is a schematic structural view of an integrated detecting sensor in the first embodiment;

1b is a flowchart of a method performed by a signal processing module to which the sensor of the first embodiment is applied;

1c is a schematic structural diagram of a hardware of a signal processing module according to an embodiment;

2 is a schematic structural view of an integrated detecting sensor in Embodiment 2;

3 is a schematic structural diagram of a touch sensing device in Embodiment 3.

Detailed ways

The inventors found that temperature and force are two important types of sensory information in the hands of prosthetics. They exist in most prosthetic hand movements, and through the detection of force signals, information such as contact, disengagement, and pressure can be obtained. Acquisition of temperature and force signals involves sensor material development, sensor design packaging, and signal Handling other technologies.

For the measurement of temperature, a thermal resistance can be used as the detecting element. The thermal resistance is usually made of a metal material, and the temperature coefficient is low, so that the sensitivity is low, the cost is high, and it is easy to break, and the metal material is easily oxidized and denatured; the output of the thermistor Generally, it is non-linear, so the temperature range is narrow, the uniformity is poor, and there is a large sensitivity drift. Thermocouples can also be used as detection elements. Thermocouples use two conductors to form a loop. The structure is high and complex, and has certain restrictions on use. It is not easy to miniaturize, and it is difficult to meet prosthetic hands, smart skin, and robotic hands. Application environment.

For the measurement of force, the accuracy and linearity of the capacitive sensor are high, but the circuit is complex and subject to electromagnetic interference; the sensitivity and signal stability of the resistive sensor are limited; the preparation process of the piezoelectric sensor is high, and generally The signal of piezoelectric materials (such as polyvinylidene fluoride PVDF, also known as ferroelectric polymer) is greatly affected by temperature. When gripping hot or cold objects, temperature changes will also generate signals, and interference signals will be generated. Detection

In addition, in the grasping of the prosthetic hand, there are usually simultaneous temperature and force signals. Since the characteristics of the above two types of signals are largely different, the detection methods are different, and in practical applications, multiple sensor combinations or sensor arrays are often used for detection. Therefore, there are some unfavorable factors, such as complex structure, signal interference, and unfavorable integration.

The inventors propose to use a pyroelectric effect (the pyroelectric effect refers to a charge release phenomenon in which the polarization of a crystal changes with temperature) and a piezoelectric effect (a so-called piezoelectric effect refers to A first flexible film (for example, a ferroelectric polymer) which generates a potential difference when a pressure is applied to the piezoelectric material, and a second flexible film having only a piezoelectric effect are combined. Simultaneously detecting the pressure signal and the temperature signal using the first flexible membrane, and detecting only the pressure signal using the second flexible membrane, and then calculating the above two detection signals, a temperature signal can be separated, and finally a pressure signal and a temperature can be finally output. signal. Through the above arrangement, the disadvantage that the first flexible film is subjected to temperature influence in the environment of simply measuring pressure and the output result is inaccurate can be converted into the advantage that the temperature and the pressure measurement result can be simultaneously measured, and accordingly, An integrated detection sensor that can be miniaturized to measure temperature and pressure simultaneously.

Embodiment 1

FIG. 1 is a schematic structural diagram of an integrated detecting sensor according to Embodiment 1. As shown in FIG. 1 , the integrated detecting sensor includes a first structural body 110 , a second structural body 120 , and an adhesive layer 130 .

The first structure body 110 can be disposed in direct contact with the test object, and the second structure body 120 can be disposed on a side of the first structure body 110 away from the test object;

The first structure body 110 includes a first electrode 111, a second electrode 113, and a first flexible film 112 disposed between the first electrode 111 and the second electrode 113. The first flexible film 112 has pyroelectricity. Effect and piezoelectric effect, the first electrode pair formed by the first electrode 111 and the second electrode 113 is used for outputting a mixed measurement signal of temperature and pressure;

The second structure 120 includes a third electrode 121, a fourth electrode 123, and a second flexible film 122 disposed between the third electrode 121 and the fourth electrode 123. The second flexible film 122 has a piezoelectric effect. The second electrode pair formed by the third electrode 121 and the fourth electrode 123 is used to output a single pressure measurement signal.

The bonding layer 130 is configured to insulate the first structure body 110 from the second structure body 120, that is, to insulate the second electrode 113 from the third electrode 121. In this embodiment, the first structural body 110 is directly in contact with the test object, and the first structural body 110 detects the temperature and pressure of the test object through the first flexible film 112 having the pyroelectric effect and the piezoelectric effect, and The first electrode pair formed by the first electrode 111 and the second electrode 113 outputs a mixed measurement signal of temperature and pressure; at the same time, the first structural body 110 uniformly transmits the force to the second structural body 120, and the second structural body 120 passes The second flexible film 122 having a piezoelectric effect detects the pressure of the test object, and outputs a pure pressure measurement signal through the second electrode pair constituted by the third electrode 121 and the fourth electrode 123.

Optionally, the first flexible film is a ferroelectric polymer film. Ferroelectric polymers (also known as ferroelectrics), such as polyvinylidene fluoride (PVDF) or PVDF copolymers, ie PVDF ferroelectric films, usually based on polymers; PVDF ferroelectric film is light in weight It is thin, soft and bendable, and has a certain flexibility to be applied to the skin surface. When using a PVDF ferroelectric film to hold a hot or cold object, the temperature change will also cause the PVDF ferroelectric film to generate an electrical signal. This property is called the "pyroelectric effect." Although this effect is unfavorable for the detection of pressure signals, we can use this characteristic to detect the temperature signal and use polyvinylidene fluoride as a temperature sensor.

Optionally, the second flexible film may be a piezoelectric electret film. Piezoelectric electrets are usually polymers The substrate is light in weight, thin in thickness, soft and bendable, and has certain flexibility and is suitable for the skin surface; when using a piezoelectric electret to detect a pressure signal, the sensitivity is high and the linearity is good; the piezoelectric electret preparation process Simple, low cost, etc. Piezoelectric electrets have no pyroelectric effects and are essentially unaffected by temperature changes over the operating temperature range. Therefore, a piezoelectric electret can be used as a force sensor.

Alternatively, the material (or substrate) of the first flexible film may include: a copolymer of polyvinylidene fluoride or polyvinylidene fluoride. Wherein, the copolymer of polyvinylidene fluoride may be a copolymer of all polyvinylidene fluoride which can be experimentally obtained, for example: (P(VDF-TFE), P(VDF-TrFE), P(VDF-TrFE-) CTFE), P(VDF-TrFE-CFE), etc., are not limited in this embodiment.

Optionally, the method for preparing the first flexible film may include: a spin coating method or a stretching method, etc., of course, it can be understood that the first flexible film may be prepared by other methods in the art. This embodiment is not limited thereto.

Optionally, the material of the second flexible film may include: polypropylene (PP), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), fluorinated ethylene The electret material such as a polymer (FEP) or a polytetrafluoroethylene (PTFE) is not limited in this embodiment.

The method for preparing the second flexible film may include: a puffing method, a template method, or an etching method, etc., and the second flexible film may be prepared by other methods in the art, which is not limited in this embodiment. .

Alternatively, the first electrode pair may be formed at both ends of the first flexible film and the second electrode pair may be formed at both ends of the second flexible film by a set coating process.

Wherein, the setting coating process may include: evaporation or sputtering, etc., and other coating processes may be adopted to form the first electrode pair at both ends of the first flexible film, and in the second flexibility The second electrode pair is formed at both ends of the film, which is not limited in this embodiment.

Optionally, the bonding layer may be a set insulating material, for example, an insulating material such as shellac, resin or rubber. For example, a flexible insulating material may be selected as the bonding layer.

Optionally, the first structural body 110 and the second structural body 120 may be respectively combined with the adhesive layer by a flexible composite manner; wherein the flexible composite manner may include: pasting, hot pressing or melting Wait. Using the flexible composite method, the resulting integrated detection sensor can be made flexible without damaging the overall flexibility of the sensor.

In an optional implementation manner of this embodiment, the sensor further includes: a signal processing module, wherein the first electrode pair and the second electrode pair are respectively electrically connected to the signal processing module;

The signal processing module is configured to acquire a mixed measurement signal of the temperature and pressure output by the first electrode pair, and obtain a pure pressure measurement signal output by the second electrode pair; according to the signal processing module and the The first electrode pair and the second electrode pair are electrically connected, and the temperature and pressure mixed measurement signals and the pure pressure measurement signal are calculated to obtain a pure temperature detection signal; and the pure temperature detection is respectively output Signal and the pure pressure detection signal.

The signal processing module may be a micro-processing chip with a simple computing function, or may be implemented by cascading a plurality of hardware components (for example, a resistor, a capacitor, or an inductor) to implement an adder function, a subtractor function, and a filter. A purely hardware circuit that at least one function of the amplification function.

In an optional implementation manner of this embodiment, the signal processing module is implemented by a micro processing chip. FIG. 1b is a flowchart of a method performed by a signal processing module (ie, a micro processing chip) to which the sensor in the first embodiment is applied. As shown in FIG. 1b, the method includes:

S210. Acquire a mixed measurement signal of the temperature and pressure output by the first electrode pair, and acquire a pure pressure measurement signal output by the second electrode pair.

Wherein, since the first structure body 110 and the second structure body 120 are electrically connected to the signal processing module, respectively, the signal output by the first electrode pair of the first structure body 110 and the second electrode pair output of the second structure body are The signals are extracted separately. The second electrode pair only has a force signal output, denoted as Y(B), which is the final pure pressure measurement signal.

The signal output of the first electrode pair, denoted as Y(A), includes two components, namely the temperature component Y (A temperature) and the force component Y (A force), with: Y(A) = Y (A temperature) +Y (A force);

Since the force signal detected by the second structure body is transmitted by the first structure body, the first structure body and the second structure body detect the same force signal, so the force signal component of the output of the first electrode pair and the second The force signals output by the electrodes are equal, and there are: |Y(A force)|=|Y(B)|.

S220: Perform amplifying filtering on the obtained mixed measurement signal of the temperature and pressure output by the first electrode pair and the obtained pure pressure measurement signal output by the second electrode pair.

S230. Perform a calculation on the mixed measurement signal of the temperature and pressure and the pure pressure measurement signal according to an electrical connection manner between the signal processing module and the first electrode pair and the second electrode pair to obtain a pure temperature. Detection signal.

Y (A) and Y (B) are operated in conjunction with the electrical connection of the first electrode pair and the second electrode pair to the signal processing module.

If the polarity of the first electrode pair and the second electrode pair are the same when electrically connected to the signal processing module (the polarity of the connection between the positive electrode and the negative electrode of each electrode pair is the same), it is determined that: Y (A temperature) = Y (A)-Y(B); if the polarity of the first electrode pair and the second electrode pair are opposite when the electrical connection with the signal processing module is performed (the polarity of the connection between the positive electrode and the negative electrode of each electrode pair is opposite), Determine: Y (A temperature) = Y (A) + Y (B). In actual use, it is possible to determine Y (A temperature) = |Y(A)|-|Y(B)| without considering the polarity of the connection of the electrode pairs.

The polarity of the first electrode pair and the second electrode pair is the same, that is, the signal electrode of the first electrode pair is connected to the first signal input end of the signal processing module, the ground electrode of the first electrode pair and the ground end of the signal processing module Connected, the signal electrode of the second electrode pair is connected to the second signal input end of the signal processing module, the ground electrode of the second electrode pair is connected to the ground end of the signal processing module; or, the signal electrode and signal of the first electrode pair are connected The grounding end of the processing module is connected, the ground electrode of the first electrode pair is connected to the first signal input end of the signal processing module, the signal electrode of the second electrode pair is connected to the ground end of the signal processing module, and the ground electrode of the second electrode pair is The second signal input of the signal processing module is connected.

The opposite polarity of the first electrode pair and the second electrode pair means that the signal electrode of the first electrode pair is connected to the first signal input end of the signal processing module, the ground electrode of the first electrode pair and the ground end of the signal processing module. Connected, the signal electrode of the second electrode pair is connected to the ground end of the signal processing module, the ground electrode of the second electrode pair is connected to the second signal input end of the signal processing module; or, the signal electrode and signal of the first electrode pair are connected The grounding end of the processing module is connected, the ground electrode of the first electrode pair is connected to the first signal input end of the signal processing module, the signal electrode of the second electrode pair is connected to the second signal input end of the signal processing module, and the second electrode pair is The ground electrode is connected to the ground of the signal processing module.

S240. Perform amplification filtering on the pure temperature detection signal and the pure pressure detection signal.

S250. Output the pure temperature detection signal and the pure pressure detection signal, respectively.

In another optional implementation manner of this embodiment, the signal processing module can be implemented in a purely hardware manner. FIG. 1c is a schematic diagram showing the hardware structure of a signal processing module in Embodiment 1. Referring to FIG. 1c, the signal processing module includes: a first amplification filter circuit 11, a second amplification filter circuit 12, a first full-wave rectifier circuit (absolute value circuit) 13, and a second full-wave rectifier circuit (absolute value circuit) 14. a subtractor circuit 15 and a third amplification filter circuit 16; wherein the first amplification filter circuit 11 is configured to process a mixed measurement signal of the received temperature and pressure, a first full-wave rectification circuit (absolute value circuit) 13 and the first The amplification filter circuit 11 is electrically connected, and the first full-wave rectifier circuit (absolute value circuit) 13 is provided to process the mixed measurement signal of the temperature and pressure processed by the first amplification filter circuit 11; the second amplification filter circuit 12 is set to process Receiving the pure pressure measurement signal, the second full-wave rectifier circuit (absolute value circuit) 14 is electrically connected to the second amplification filter circuit 12, and the second full-wave rectifier circuit (absolute value circuit) 14 is arranged to process the second The pure pressure measurement signal processed by the amplification filter circuit 12; the subtractor circuit 15 is electrically connected to the first full-wave rectifier circuit (absolute value circuit) 13 and the second full-wave rectifier circuit (absolute value circuit) 14, respectively, and is set to The first full-wave rectification circuit (absolute value circuit) 13 and the second full-wave rectification circuit (absolute value circuit) 14 process the processed signal to obtain a pure temperature measurement signal; the third amplification filter circuit 16 and the subtractor circuit The 15 electrical connections are arranged to process the pure temperature measurement signal processed by the subtractor circuit 15 to obtain a final pure temperature measurement signal. The method performed by the microprocessor chip of FIG. 1b can also be implemented by the use of the above series of hardware components.

Optionally, the first electrode 111 (the positive electrode or the signal electrode of the first electrode pair) is disposed on a side of the first structure 110 adjacent to the test object, and the second electrode 113 (the first electrode) a pair of negative electrodes or ground electrodes) disposed on a side of the first structural body 110 remote from the test object; or

The first electrode 111 is disposed on a side of the first structure body 110 away from the test object, and the second electrode 113 is disposed on a side of the first structure body 110 adjacent to the test object.

Optionally, the first electrode 111 is disposed on a side of the first structure body 110 away from the second structure body 120, and the second electrode 113 is disposed in the first structure body 110. One side of the second structural body 120; or

The first electrode 111 is disposed in the first structure body 110 adjacent to the second structure body 120 The second electrode 113 is disposed on a side of the first structure body 110 away from the second structure body 120.

Optionally, the third electrode 121 (the positive electrode or the signal electrode of the second electrode pair) is disposed on a side of the second structure body 120 adjacent to the first structure body 110, and the fourth electrode 123 ( a negative electrode or a ground electrode of the second electrode pair is disposed on a side of the second structural body 120 away from the first structural body 110; or

The third electrode 121 is disposed on a side of the second structure body 120 away from the first structure body 110, and the fourth electrode 123 is disposed in the second structure body 120 near the first structure. One side of the body 110.

The present embodiment provides an integrated detecting sensor that constructs a first structural body by using a first flexible film having a pyroelectric effect and a piezoelectric effect, and constructs a second structural body using a second flexible film having only a piezoelectric effect Finally, a flexible sensor capable of simultaneously measuring temperature and pressure can be obtained, and the integrated temperature and force detection technology in the related art is solved, and the defects in material characteristics, signal accuracy, fabrication difficulty, and cost are realized, and the temperature is realized. And the pressure signal is detected simultaneously on a single sensor. At the same time, the sensor is light in weight, thin in thickness, flexible and bendable, has certain flexibility and is suitable for skin surface, and can be applied to smart skin, robot hand, prosthetic hand and the like.

Embodiment 2

FIG. 2 is a schematic structural diagram of an integrated detecting sensor according to Embodiment 2, wherein the dimension ratio in FIG. 2 is only a schematic, and the electric dipole direction (the connection manner of the electrode pairs) is merely illustrative. As shown in FIG. 2, the integrated detecting sensor of this embodiment includes an A structure and a B structure. The upper and lower surfaces of the A structure respectively form metal electrodes (the upper metal electrode 21 and the lower metal electrode 22) for outputting temperature and pressure measurement signals; the upper and lower surfaces of the B structure respectively form metal electrodes (the upper metal electrode 23 and the lower metal electrode 24) For outputting a pure pressure measurement signal; a bonding layer C is formed between the lower metal electrode 22 of the A structure and the upper metal electrode 23 of the B structure for insulatingly connecting the A structure and the B structure. In addition, the upper metal electrode 21 of the A structure may be disposed to be electrically connected to the first signal input terminal D1 or the ground terminal D3 of the signal processing module D. Correspondingly, the lower metal electrode 22 of the A structure is disposed with the signal processing module D. The ground terminal D3 or the first signal input terminal D1 is electrically connected. The upper metal electrode 23 of the B structure may be disposed with the signal processing module D The second signal input terminal D2 or the ground terminal D3 is electrically connected. Correspondingly, the lower metal electrode 22 of the A structure is disposed to be electrically connected to the ground terminal D3 or the second signal input terminal D2 of the signal processing module D.

The A structure is used to detect temperature and force signals. The A structure includes a ferroelectric polymer film. The A structure is characterized by having both a piezoelectric effect and a pyroelectric effect. The substrate of the A structure includes, but is not limited to, a copolymer of polyvinylidene fluoride (PVDF) and PVDF (P(VDF-TFE), P(VDF-TrFE), P(VDF-TrFE-CTFE), and P (VDF). -TrFE-CFE)), etc., the microstructure of the A structure has an electric dipole. The preparation method of the A structure includes, but is not limited to, a molding method such as a spin coating method or a stretching method. Used to output temperature and pressure measurement signals.

The B structure is used to detect a force signal. The B structure includes a piezoelectric electret film. The B structure is characterized by having only a piezoelectric effect (or the pyroelectric effect is negligible with respect to the piezoelectric effect). The B structure is a piezoelectric electret, which is a porous polymer film, and the substrate includes but is not limited to polypropylene (PP), polyethylene terephthalate (PET), polyethylene naphthalate. (PEN), fluorinated ethylene ionomer (FEP), polytetrafluoroethylene (PTFE) and other electret materials, B structure is a piezoelectric electret film, which is a porous film, and the hole includes an electric dipole. The preparation method of the B structure includes, but is not limited to, a molding method such as a puffing method, a template method, and an etching method. The upper and lower surfaces of the B structure are respectively vapor-deposited or sputtered with metal electrodes for transmitting signals.

The working principle of the ferroelectric polymer is that the microstructure of the electric dipole stored is deformed by the external force and the external temperature, the electric dipole moment is changed, the charge is changed, and the corresponding electric charge or voltage signal is exhibited. The working principle of the piezoelectric electret is that the microporous structure in which the electric dipole is stored is deformed by the external force, the electric dipole moment is changed, the charge is changed, and the corresponding electric charge or voltage signal is externally displayed. The two work similarly, but there are still differences. The ferroelectric polymer has both temperature and force signal outputs, and the piezoelectric electret only has a force signal output and no temperature signal output.

Referring to FIG. 2, for example, the A structure is used as an upper layer and the B structure is used as a lower layer composite. The A structure of the upper layer directly contacts the test object, detects the temperature signal and the force signal, and simultaneously transmits the force signal uniformly to the B structure of the lower layer, so that the B structure of the lower layer can accurately acquire the force signal. Through appropriate compounding methods, including but not limited to pasting, hot pressing, melting, etc., it can better bond the two layers A and B, and can transmit the force signal from the A layer to the B layer without distortion, and also has certain Flexibility without compromising the overall flexibility of the sensor.

The composite structure is encapsulated with a suitable material to protect against wear. The upper and lower electrodes of the A and B layers are appropriately selected to be electrically connected to the ground and the ground, and the ground is used for the electromagnetic screen. Coverage can reduce signal interference.

The A-layer structure can detect both the temperature signal and the force signal, and the two signals are mixed together. The B-layer structure can only detect the force signal, so the A and B layer signals and the A layer need to be separated and extracted. Temperature and force signal components in the signal.

Since the two layers A and B are electrically connected separately, the signals of the two layers A and B are separately extracted. The B layer only has the force signal output, which is recorded as X(B), which is the final force signal to be detected.

The signal output of layer A, denoted as X(A), consists of two components, temperature component X (A temperature) and force component X (A force), with:

X(A)=X(A temperature)+X(A force) (1)

Since the force signal detected by the B layer is transmitted from the A layer, the A and B layers detect the same force signal. Therefore, the force signal component in the A layer signal is equal to the force signal of the B layer, and has:

|X(A力)|=|X(B)| (2)

Subtracting the absolute values of the A-layer output signal and the B-layer output signal, using the above equations (1) and (2), are:

|X(A)|-|X(B)|=|X(A temperature)|+|X(A force)|-|X(B)|=|X(A temperature)|+|X(A force )|-|X(A force)|=X(A temperature).

Therefore, the A-layer output signal and the B-layer output signal are subtracted to obtain X (A temperature), which is the temperature signal to be finally detected.

It is necessary to combine the output characteristics and the electrical connection mode of the two layers A and B. If the polarities are the same, the output signal of the A layer and the output signal of the B layer are subtracted. If the polarities are opposite, the output signal of the A layer and the output signal of the B layer are added. According to this, the force component in the A signal can be cancelled. In actual use, the absolute value can also be taken first and then subtracted.

This embodiment combines the advantages of ferroelectric polymer materials and piezoelectric electret materials. In the case of both temperature and strong signals, piezoelectric electrets are used to detect force signals (without temperature interference), iron. The electropolymer is used to simultaneously detect the temperature and force signals, and then subtract the signals of the two to cancel the force signal to obtain the temperature signal. In this way, the force signal and the temperature signal can be separated, and the temperature and force signals can be detected simultaneously in a single sensing unit. At the same time, the overall sensor is light in weight, thin in thickness, soft and bendable, and has certain flexibility and is suitable for the skin surface, and can be applied to smart skin, robot hand, prosthetic hand and the like.

Embodiment 3

A touch sensing device 31 of the third embodiment is shown in FIG. 3, and the touch sensing device 31 includes the integrated detecting sensor 310 described in any of the above embodiments.

In this embodiment, the touch sensing device 31 may include at least one of the following: a prosthetic hand, a robot hand, and an artificial skin.

The touch sensing device 31 of the present embodiment can also be applied to other electronic devices that need to perform temperature and force measurement, which is not limited in this embodiment.

The present embodiment provides a touch sensing device that solves the integrated temperature and force detection technology in the related art by using a flexible sensor capable of simultaneously measuring temperature and pressure, in material characteristics, signal accuracy, manufacturing difficulty, cost, and the like. The lack of aspects enables simultaneous detection of temperature and force signals on a single sensor. The sensor is light in weight, thin in thickness, flexible and bendable, has certain flexibility and is suitable for the skin surface, and can be applied to smart skin, robot hand, prosthetic hand and the like.

Industrial applicability

The present disclosure provides an integrated detection sensor and a touch sensing device, which solves the integrated temperature and force detection technology in the related art, and has the defects in material characteristics, signal precision, manufacturing difficulty and cost, and realizes temperature and Force signals are detected simultaneously on a single sensor.

Claims

An integrated detecting sensor includes: a first structural body, a second structural body, and an adhesive layer, wherein the second structural body is disposed on one side of the first structural body, and the adhesive layer is disposed on the first Between a structure and the second structure;

The first structure body includes a first electrode, a second electrode, and a first flexible film disposed between the first electrode and the second electrode; the first flexible film has a heat release An electrical effect and a piezoelectric effect, the first electrode pair formed by the first electrode and the second electrode is used for outputting a mixed measurement signal of temperature and pressure;

The second structure includes a third electrode, a fourth electrode, and a second flexible film disposed between the third electrode and the fourth electrode; the second flexible film has a piezoelectric An effect, the second electrode pair formed by the third electrode and the fourth electrode is used to output a pure pressure measurement signal;

The bonding layer is provided to insulate the first structure body from the second structure body.
The sensor of claim 1 further comprising: a signal processing module;

The first electrode pair and the second electrode pair are respectively electrically connected to the signal processing module;

The signal processing module is configured to acquire a mixed measurement signal of the temperature and pressure output by the first electrode pair, and obtain a pure pressure measurement signal output by the second electrode pair; according to the signal processing module and the Performing electrical connection manners of the first electrode pair and the second electrode pair, calculating the mixed measurement signal of the temperature and pressure and the pure pressure measurement signal, acquiring a pure temperature detection signal; and outputting the pure temperature respectively The detection signal and the pure pressure detection signal.
The sensor according to claim 2, wherein the signal processing module is further configured to: perform at least one of the following steps, the mixed measurement signal of the temperature and pressure outputted by the acquired first electrode pair, And obtaining the pure pressure measurement signal output by the second electrode pair to perform amplification filtering;

The pure temperature detection signal and the pure pressure detection signal are subjected to amplification filtering before outputting the pure temperature detection signal and the pure pressure detection signal.
The sensor according to any one of claims 1 to 3, wherein the first flexible film is a ferroelectric polymer film.
The sensor according to any one of claims 1 to 3, wherein the second flexible film is a piezoelectric electret film.
The sensor according to claim 4, wherein the material of the first flexible film comprises: a copolymer of polyvinylidene fluoride or polyvinylidene fluoride.
The sensor according to claim 5, wherein the material of the second flexible film comprises: polypropylene, Polyethylene terephthalate, polyethylene naphthalate, fluorinated ethylene ionomer or polytetrafluoroethylene.
The sensor according to claim 4, wherein the method of preparing the first flexible film comprises spin coating or stretching.
The sensor according to claim 5, wherein the method for preparing the second flexible film comprises: a puffing method, a template method or an etching method.
The sensor of claim 1:

The first electrode pair and the second electrode pair are formed by a set coating process; wherein the set coating process comprises: evaporation or sputtering.
The sensor according to claim 1, wherein the first structural body and the second structural body are respectively combined with the adhesive layer by a flexible composite method;

Wherein, the flexible composite method comprises: pasting, hot pressing or melting.
A sensor according to any of claims 1-3:

The first electrode is disposed on a side of the first structure body away from the second structure body, and the second electrode is disposed on a side of the first structure body adjacent to the second structure body; or

The first electrode is disposed on a side of the first structure adjacent to the second structure, and the second electrode is disposed on a side of the first structure away from the second structure.
A sensor according to any of claims 1-3:

The third electrode is disposed on a side of the second structure body adjacent to the first structure body, and the fourth electrode is disposed on a side of the second structure body that is away from the first structure body; or

The third electrode is disposed on a side of the second structure away from the first structure, and the fourth electrode is disposed on a side of the second structure adjacent to the first structure.
A touch sensing device comprising the sensor of any of claims 1-13.
The touch sensing device according to claim 14, wherein the touch sensing device comprises at least one of the following: a prosthetic hand, a robot hand, and an artificial skin.