CN107345825A - Integrated detection sensor and touch sensible equipment - Google Patents
Integrated detection sensor and touch sensible equipment Download PDFInfo
- Publication number
- CN107345825A CN107345825A CN201710794583.3A CN201710794583A CN107345825A CN 107345825 A CN107345825 A CN 107345825A CN 201710794583 A CN201710794583 A CN 201710794583A CN 107345825 A CN107345825 A CN 107345825A
- Authority
- CN
- China
- Prior art keywords
- electrode
- signal
- flexible membrane
- structure body
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring And Recording Apparatus For Diagnosis (AREA)
Abstract
The embodiment of the invention discloses a kind of integrated detection sensor and touch sensible equipment.The sensor includes：First structure body, the second structure and adhesive linkage；First structure body, including first electrode, second electrode and the first flexible membrane being arranged between first electrode and second electrode；First flexible membrane has pyroelectric effect and piezo-electric effect, and first electrode and second electrode are used for output temperature and the hybrid measurement signal of pressure；Second structure, including the 3rd electrode, the 4th electrode and the second flexible membrane being arranged between the 3rd electrode and the 4th electrode；Second flexible membrane has piezo-electric effect, and the 3rd electrode and the 4th electrode are used to export simple pressure measurement signal；Adhesive linkage, for first structure body and the insulation of the second structure to be connected.The technical scheme of the embodiment of the present invention realizes temperature and force signal on single-sensor while detected.Sensor has the features such as light weight, thickness of thin, can be applied to the fields such as intelligent skin, mechanical hand, prosthetic hand.
Description
Technical field
Signal detection technique of the embodiment of the present invention, more particularly to a kind of integrated detection sensor and touch sensible equipment.
Background technology
Motion and the coordinating and unifying of sensory function are to realize that prosthetic hand is natural, precisely grasps the key of object.Current vacation
Limb technology provides various possibility for the recovery of amputee athletic's function, but the recovery of sensory function is still a challenge.For
Real human hand, all kinds of receptors of skin surface obtain sensory information and simultaneously encoded, by nervous system by these information transmissions extremely
Brain；For prosthetic hand, then all kinds of artificial sensor detection sensory signals are can use, after processing, are transferred to by neural interface
Brain.
Therefore, in order to realize the sense feedback of prosthetic hand, closed-loop control is realized, it is necessary first to realize that sensory signal detects.
Temperature and power are the most important two classes sensory informations of prosthetic hand, are present in the application of most prosthetic hands.Applied to artificial limb
It is used to obtain the sensor of sensory information in hand, generally to possess and be easily integrated (such as：Gently, it is thin, soft or stretchable), knot
Structure is simple, function admirable (such as：High sensitivity, frequency response is stable or drifts about low), durable in use, low energy consumption and low cost etc.
Advantage.
At present, although there are many kinds to the detection method of temperature and power, correlation technique also comparative maturity, can integrate at present
It is used for the sensing technology of signal detection on to prosthetic hand, in material property, signal accuracy, manufacture difficulty and cost etc. or more
It is or few all in the presence of shortcoming.
The content of the invention
The embodiments of the invention provide a kind of integrated detection sensor and touch sensible equipment, to provide a kind of miniaturization
, it is capable of the integrated detection sensor of measurement temperature and pressure simultaneously.
In a first aspect, the embodiments of the invention provide a kind of integrated detection sensor, including, first structure body, the second knot
Structure body and adhesive linkage, the first structure body, directly contacted with test object, second structure, be arranged at described
Side of one structure away from the test object, the adhesive linkage, it is arranged at the first structure body and second structure
Between body；
The first structure body, including be oppositely arranged first electrode, second electrode and be arranged at the first electrode
The first flexible membrane between the second electrode；First flexible membrane has pyroelectric effect and piezo-electric effect, described
The first electrode that first electrode and the second electrode are formed is to the hybrid measurement signal for output temperature and pressure；
Second structure, including be oppositely arranged the 3rd electrode, the 4th electrode and be arranged at the 3rd electrode
With the second flexible membrane between the 4th electrode；Second flexible membrane has a piezo-electric effect, the 3rd electrode and described
The second electrode that 4th electrode is formed is to for exporting simple pressure measurement signal.
Further, the sensor also includes：Signal processing module；
Wherein, the first electrode pair and the second electrode with the signal processing module to being electrically connected respectively
Connect；
The signal processing module, for obtaining hybrid measurement of the first electrode to the temperature and pressure of output
Signal, and obtain simple pressure measurement signal of the second electrode to output；According to the first electrode pair and institute
The electrical connection direction of second electrode pair is stated, hybrid measurement signal and the simple pressure measxurement letter to the temperature and pressure
Number carry out computing, obtain simple temperature detection signal；The simple temperature detection signal and the simple pressure are exported respectively
Detection signal.
Further, the signal processing module, is additionally operable to：The temperature to the first electrode of acquisition to output
Filter is amplified to the simple pressure measurement signal of output with the hybrid measurement signal of pressure, and the second electrode obtained
Ripple；And/or
Before the simple temperature detection signal and the simple pressure detecting signal is exported, to the simple temperature
Detection signal and the simple pressure detecting signal are amplified filtering.
Further, first flexible membrane is ferroelectric polymers film.
Further, second flexible membrane is piezo-electric electret film.
Further, the material of first flexible membrane includes：The copolymer of Kynoar or Kynoar.
Further, the material of second flexible membrane includes：Polypropylene, polyethylene terephthalate, poly- naphthalene two
Formic acid glycol ester, ethylene fluoride ionomer or polytetrafluoroethylene (PTFE).
Further, the preparation method of first flexible membrane includes：Spin-coating method or pulling method.
Further, the preparation method of second flexible membrane includes：Expanded method, template or etching method.
Further, using setting coating process, the first electrode pair is formed at the both ends of first flexible membrane, with
And form the second electrode pair at the both ends of second flexible membrane；
Wherein, the setting coating process includes：Evaporation or sputtering.
Further, the first structure body and second structure are glued with described respectively by flexible compound mode
It is compound to connect layer progress；Wherein, the flexible compound mode includes：Stickup, hot pressing or melting.
Further, the first electrode is arranged in the first structure body close to the side of the test object, institute
State second electrode and be arranged at the side away from the test object in the first structure body；Or
The first electrode is arranged at the side away from the test object, the second electrode in the first structure body
It is arranged in the first structure body close to the side of the test object.
Further, the 3rd electrode is arranged in second structure close to the side of the first structure body,
4th electrode is arranged at the side away from the first structure body in second structure；Or
3rd electrode is arranged at the side away from the first structure body in second structure, the 4th electricity
Pole is arranged in second structure close to the side of the first structure body.
Second aspect, the embodiment of the present invention additionally provide a kind of touch sensible equipment, including any embodiment of the present invention institute
The sensor stated.
Further, the touch sensible equipment includes at least one of following：Prosthetic hand, mechanical hand and artificial skin.
The embodiments of the invention provide a kind of integrated detection sensor and touch sensible equipment, by using with pyroelectricity
First flexible membrane of effect and piezo-electric effect constructs first structure body, and uses the second flexible membrane structure only with piezo-electric effect
The second structure is made, a flexible sensor for being capable of measurement temperature and pressure simultaneously, the embodiment of the present invention can be finally given
Technical scheme solve the detection technique of existing integrated temperature and power, material property, signal accuracy, manufacture difficulty and into
Shortcoming present in this etc., realizes temperature and force signal on single-sensor while detects.Meanwhile the sensing utensil
There is light weight, thickness of thin is soft bent, the characteristics of having certain retractility and be applied to skin surface, can be applied to intelligence
The fields such as skin, mechanical hand, prosthetic hand.
Brief description of the drawings
Fig. 1 a are a kind of structural representations of integrated detection sensor in the embodiment of the present invention one；
Fig. 1 b are the flow charts of method performed by signal processing module that the sensor in the embodiment of the present invention one is applicable；
Fig. 1 c are a kind of hardware architecture diagrams of signal processing module of the embodiment of the present invention；
Fig. 2 is a kind of structural representation of integrated detection sensor in the embodiment of the present invention two；
Fig. 3 is a kind of structural representation of touch sensible equipment in the embodiment of the present invention three.
Embodiment
The present invention is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched
The specific embodiment stated is used only for explaining the present invention, rather than limitation of the invention.It also should be noted that in order to just
Part related to the present invention rather than entire infrastructure are illustrate only in description, accompanying drawing.
It also should be noted that for the ease of description, illustrate only in accompanying drawing part related to the present invention rather than
Full content.It should be mentioned that some exemplary embodiments are described before exemplary embodiment is discussed in greater detail
Into the processing or method described as flow chart.Although operations (or step) are described as the processing of order by flow chart,
It is that many of which operation can be implemented concurrently, concomitantly or simultaneously.In addition, the order of operations can be by again
Arrange.The processing can be terminated when its operations are completed, it is also possible to the additional step being not included in accompanying drawing.
The processing can correspond to method, function, code, subroutine, subprogram etc..
For the ease of understanding hereinafter, first by the generation background and hair of the integrated detection sensor of various embodiments of the present invention
Bright construction thinking is simply introduced.
As it was previously stated, temperature and power are the most important two classes sensory informations of prosthetic hand, it is manual to be present in most artificial limbs
In work, and the detection for passing through force signal, moreover it is possible to the information such as acquisition is contacted, disengaged, pressure size.Temperature and force signal
Obtain the technology for being related to sensing material exploitation, Sensor Design encapsulation, signal transacting etc..
Measurement for temperature, thermal resistance generally use metal material, temperature coefficient it is low so as to sensitivity it is low, cost compared with
Height, and be easily broken off, metal material is easy to aoxidize and be denatured；The output of thermistor is usually nonlinear, therefore thermometric
Narrow range, uniformity is poor, larger sensitivity drift be present；Thermocouple forms a loop using two kinds of conductors, and structure will
Ask high and more complicated, and have certain use limitation, miniaturization is not easily achieved, it is difficult to meet prosthetic hand, intelligent skin, machine
The application environment of device hand.
Measurement for power, condenser type precision and the linearity are higher, but circuit is complicated, big by electromagnetic interference；Resistance-type spirit
Sensitivity and signal stabilization are by a definite limitation；Piezoelectric type preparation technology is higher, and in general piezoelectric (such as Kynoar
PVDF, also known as ferroelectric polymers) signal be affected by temperature, when grasping hotter or colder object, temperature change can also produce
Raw signal, disturbs the detection of force signal；
In addition, in the grasping of prosthetic hand generally simultaneously temperature and force signal be present, due to the feature of two class signals have compared with
Big difference, detection method is different, is often detected respectively by the way of multi sensor combination or array in actual applications, therefore
In the presence of some unfavorable factors, such as complicated, signal interference, be unfavorable for it is integrated.
Above mentioned problem based on prior art, the creative proposition of inventor：There is pyroelectric effect simultaneously using one
(pyroelectric effect, referring to the electric charge release phenomenon that the polarization intensity of crystal changes and shown with temperature) and piezoelectricity are imitated
(so-called piezo-electric effect, should refer to that it will produce the phenomenon of potential difference if applying pressure to piezoelectric) first is flexible
Film (such as：Ferroelectric polymers), and one be only combined with the second flexible membrane of piezo-electric effect.Use the first flexible membrane
Pressure signal and temperature signal are detected simultaneously, pressure signal is only detected using the second flexible membrane, afterwards detects above two
Signal is calculated, and can isolate a temperature signal, and then can be with one pressure signal of final output and a temperature
Signal.By above-mentioned setting, the first flexible membrane can be influenceed in the environment of measurement pressure merely by temperature and be caused defeated
Go out this inaccurate inferior position of result be converted into can this advantage of measurement temperature and pressure measurements simultaneously, it is creative
Propose a kind of miniaturization, being capable of the integrated detection sensor of measurement temperature and pressure simultaneously.
Embodiment one
Fig. 1 is a kind of structural representation for integrated detection sensor that the embodiment of the present invention one provides.As shown in figure 1, institute
Stating integrated detection sensor includes：First structure body 110, the second structure 120 and adhesive linkage 130.
First structure body 110, directly contacted with test object, the second structure 120, it is remote to be arranged at first structure body 110
From the side of the test object；
First structure body 110, including be oppositely arranged first electrode 111, second electrode 113 and be arranged at first electricity
The first flexible membrane 112 between pole 111 and second electrode 113；There is first flexible membrane 112 pyroelectric effect and piezoelectricity to imitate
Should, the first electrode that first electrode 111 and second electrode 113 are formed is to the hybrid measurement signal for output temperature and pressure；
Second structure 120, including be oppositely arranged the 3rd electrode 121, the 4th electrode 123 and be arranged at the 3rd electricity
The second flexible membrane 122 between the electrode 123 of pole 121 and the 4th；Second flexible membrane 122 has a piezo-electric effect, the 3rd electrode 121 and
The second electrode that 4th electrode 123 is formed is to for exporting simple pressure measurement signal.
Adhesive linkage 130, it is connected for first structure body 110 to be insulated with second structure 120, namely：By second
The insulation connection of the electrode 121 of electrode 113 and the 3rd.In the present embodiment, first structure body 110 is directly in contact with test object,
First structure body 110 by with pyroelectric effect and piezo-electric effect the first flexible membrane 112, detect the temperature of test object
Degree and power, and the first electrode being made up of first electrode 111 and second electrode 113 is to output temperature and the hybrid measurement of pressure
Signal；Meanwhile power is transferred uniformly into the second structure 120 by first structure body 110, the second structure 120 is by with pressure
Second flexible membrane 122 of electrical effect, it is accurate to detect the power of test object, and be made up of the 3rd electrode 121 and the 4th electrode 123
Second electrode to exporting simple pressure measurement signal.
Optionally, first flexible membrane is ferroelectric polymers film.Ferroelectric polymers is (alternatively referred to as
Ferroelectrics), such as Kynoar (referred to as PVDF) or PVDF copolymer, i.e. PVDF ferroelectric films, generally with poly-
Compound is matrix, and light weight, thickness of thin is soft bent, has certain retractility and is applied to skin surface.Its signal by
Temperature influences, and when grasping hotter or colder object, temperature change can also produce signal, and this characteristic is referred to as " pyroelectricity effect
Should ".Although detection of the effect for force signal is unfavorable, we can utilize the Characteristics Detection temperature signal, will be poly- inclined
PVF uses as temperature sensor.
Optionally, second flexible membrane can be piezo-electric electret film.In the new function material that developed recently gets up
In, piezo-electric electret (alternatively referred to as piezoelectret) is used as a kind of machine-sensor material, is led in flexible electronic and sensing
The application potential in domain has obtained more and more extensive concern.Piezo-electric electret is generally using polymer as matrix, light weight, thickness
It is thin, it is soft bent, there is certain retractility and be applied to skin surface；When detecting force signal, high sensitivity, the linearity is good；
Preparation technology is simple, and cost is cheap etc..More it is essential that piezo-electric electret is without pyroelectric effect, the base in operating temperature range
This is independent of temperature variations.Therefore piezo-electric electret can be used as force snesor.
Further, the material (base material in other words) of first flexible membrane can include：Kynoar is poly- inclined
The copolymer of PVF.Wherein, the copolymer of the Kynoar can be that the whole that can test to obtain at present gathers inclined fluorine
The copolymer of ethene, such as：(P(VDF-TFE)、P(VDF-TrFE)、P(VDF-TrFE-CTFE)、P(VDF-TrFE-CFE))
Deng the present embodiment is to this and is not limited.
The preparation method of first flexible membrane can include：Spin-coating method or pulling method etc., it will of course be understood that
That those skilled in the art can also take other modes to prepare first flexible membrane, the present embodiment to this and without
Limit.
Further, the material of second flexible membrane can include：Polypropylene (PP), polyethylene terephthalate
(PET), the electret material such as PEN (PEN), ethylene fluoride ionomer (FEP), polytetrafluoroethylene (PTFE) (PTFE)
Material, the present embodiment is to this and is not limited.
The preparation method of second flexible membrane can include：Expanded method, template or etching method etc., of course, it is possible to
Understand, those skilled in the art can also take other modes to prepare second flexible membrane, the present embodiment to this simultaneously
It is not limited.
Further, setting coating process can be used, the first electrode is formed at the both ends of first flexible membrane
It is right, and form the second electrode pair at the both ends of second flexible membrane.
Wherein, the setting coating process can include：Evaporation or sputtering etc., certainly, those skilled in the art can be with
Understand be：Other coating process can also be taken to form the first electrode pair at the both ends of first flexible membrane, with
And the second electrode pair is formed at the both ends of second flexible membrane, the present embodiment is to this and is not limited.
Optionally, the adhesive linkage can be setting insulating materials, for example, the insulating materials such as shellac, resin or rubber.
Typically, flexible insulating material can be selected as the adhesive linkage.
Further, the first structure body and second structure can by flexible compound mode respectively with institute
It is compound to state adhesive linkage progress；Wherein, the flexible compound mode can include：Stickup, hot pressing or melting etc..It is multiple using flexibility
The reason for conjunction is so that it is flexible that the integrated detection sensor finally given possesses certain flexible entirety without destroying sensor
Degree.
In an optional embodiment of the present embodiment, the sensor also includes：Described in signal processing module
One electrode pair and the second electrode with the signal processing module to being electrically connected respectively；
The signal processing module, for obtaining hybrid measurement of the first electrode to the temperature and pressure of output
Signal, and obtain simple pressure measurement signal of the second electrode to output；According to the first electrode pair and institute
The electrical connection direction of second electrode pair is stated, hybrid measurement signal and the simple pressure measxurement letter to the temperature and pressure
Number carry out computing, obtain simple temperature detection signal；The simple temperature detection signal and the simple pressure are exported respectively
Detection signal.
Further, the signal processing module, is additionally operable to：The temperature to the first electrode of acquisition to output
Filter is amplified to the simple pressure measurement signal of output with the hybrid measurement signal of pressure, and the second electrode obtained
Ripple；And/or
Before the simple temperature detection signal and the simple pressure detecting signal is exported, to the simple temperature
Detection signal and the simple pressure detecting signal are amplified filtering.
Certainly, it will be understood by those skilled in the art that：The signal processing module can be with simple computation work(
Can micro-chip processor, can also be by various hardware elements (for example, resistance, electric capacity or inductance etc.) overlap joint form can
To realize the pure hardware circuit of adder functions, subtracter function or filter and amplification function.
In an optional embodiment of the present embodiment, the signal processing module passes through a micro-chip processor reality
It is existing.Wherein, show in Figure 1b signal processing module that the sensor in the embodiment of the present invention one is applicable (namely：Micro- place
Manage chip) performed by method flow chart, as shown in Figure 1 b, methods described includes：
S210, hybrid measurement signal of the first electrode to the temperature and pressure of output is obtained, and obtain institute
State simple pressure measurement signal of the second electrode to output.
Wherein, because first structure body and the second structure are electrically connected respectively with signal processing module, therefore
The first electrode of first structure body is to extract respectively to the signal of output to the signal of output and the second electrode of the second structure
's.Second electrode exports to only powerful signal, is designated as Y (B), as final simple pressure measurement signal.
The signal output of first electrode pair, Y (A) is designated as, includes two components, i.e. temperature components Y (A temperature) and power point
Y (A power) is measured, is had：Y (A)=Y (A temperature)+Y (A power)；
Because the force signal of the second structure detection is transmitted to by first structure body, first structure body and the second structure
What physical examination measured is same force signal, therefore first electrode is believed the power of output with second electrode the force signal component of output
It is number equal in magnitude, have：| Y (A power) |=| Y (B) |.
S220, the hybrid measurement signal to the first electrode of acquisition to the temperature and pressure of output, and obtain
The second electrode taken is amplified filtering to the simple pressure measurement signal of output.
S230, according to and the first electrode pair and the second electrode pair electrical connection direction, to the temperature and
The hybrid measurement signal of pressure and the simple pressure measurement signal carry out computing, obtain simple temperature detection signal.
With reference to first electrode pair and second electrode pair and the electrical connection direction of signal processing module, Y (A) and Y (B) is carried out
Computing.
If when being electrically connected with signal processing module, first electrode pair (each electricity identical with the polarity of second electrode pair
Extremely to positive pole it is identical with the connection polarity of negative pole), it is determined that：Y (A temperature)=Y (A)-Y (B)；If with signal processing module
When being electrically connected, opposite polarity (positive pole of each electrode pair and the connection polarity of negative pole of first electrode pair and second electrode pair
Conversely), it is determined that：Y (A temperature)=Y (A)+Y (B).The connection polarity of electrode pair can not be considered in actual use, determines Y (A
Temperature)=| Y (A) |-| Y (B) |.
Need to illustrate again, so-called first electrode pair is identical with the polarity of second electrode pair, refers to first electrode pair
Signal electrode be connected with the first signal input part of signal processing module, the grounding electrode of first electrode pair and signal transacting mould
The earth terminal of block is connected, and the signal electrode of second electrode pair is connected with the secondary signal input of signal processing module, the second electricity
Extremely to grounding electrode be connected with the earth terminal of signal processing module；Or refer to the signal electrode and signal of first electrode pair
The earth terminal of processing module is connected, and the grounding electrode of first electrode pair is connected with the first signal input part of signal processing module,
The signal electrode of second electrode pair is connected with the earth terminal of signal processing module, the grounding electrode and signal transacting of second electrode pair
The secondary signal input of module is connected.
The opposite polarity of so-called first electrode pair and second electrode pair, refer at the signal electrode and signal of first electrode pair
First signal input part of reason module is connected, and the grounding electrode of first electrode pair is connected with the earth terminal of signal processing module, the
The signal electrode of two electrode pairs is connected with the earth terminal of signal processing module, grounding electrode and the signal transacting mould of second electrode pair
The secondary signal input of block is connected；Or refer to the signal electrode of first electrode pair and the earth terminal phase of signal processing module
Even, the grounding electrode of first electrode pair is connected with the first signal input part of signal processing module, the signal electricity of second electrode pair
Pole is connected with the secondary signal input of signal processing module, the grounding electrode of second electrode pair and the ground connection of signal processing module
End is connected.
S240, filtering is amplified to the simple temperature detection signal and the simple pressure detecting signal.
S250, the simple temperature detection signal and the simple pressure detecting signal are exported respectively.
In another optional embodiment of the present embodiment, it can be realized by way of pure hardware at the signal
Manage module.Wherein, a kind of hardware architecture diagram of signal processing module in the embodiment of the present invention one is shown in figure 1 c.
By a series of being used cooperatively for above-mentioned hardware elements, the method performed by the micro-chip processor in Fig. 1 b can be equally realized.
Optionally, the first electrode (positive pole or signal electrode of first electrode pair) is arranged at the first structure body
In close to the side of the test object, the second electrode (negative pole or grounding electrode of first electrode pair) is arranged at described
Side away from the test object in first structure body；Or
The first electrode is arranged at the side away from the test object, the second electrode in the first structure body
It is arranged in the first structure body close to the side of the test object.
Optionally, the 3rd electrode (positive pole or signal electrode of second electrode pair) is arranged at second structure
In close to the side of the first structure body, the 4th electrode (negative pole or grounding electrode of second electrode pair) is arranged at institute
State the side away from the first structure body in the second structure；Or
3rd electrode is arranged at the side away from the first structure body in second structure, the 4th electricity
Pole is arranged in second structure close to the side of the first structure body.
The embodiments of the invention provide a kind of integrated detection sensor, by using with pyroelectric effect and piezoelectricity effect
The the first flexible membrane construction first structure body answered, and the second structure is constructed using only the second flexible membrane with piezo-electric effect,
A flexible sensor for being capable of measurement temperature and pressure simultaneously can be finally given, solves existing integrated temperature and power
Detection technique, in the shortcoming present in material property, signal accuracy, manufacture difficulty and cost etc., realize temperature and power
Signal detects simultaneously on single-sensor.Meanwhile the sensor has light weight, thickness of thin is soft bent, has certain
Retractility and the characteristics of be applied to skin surface, can be applied to the fields such as intelligent skin, mechanical hand, prosthetic hand.
Embodiment two
Fig. 2 is a kind of structural representation for integrated detection sensor that the embodiment of the present invention two provides, wherein it is desired to illustrate
, the dimension scale in Fig. 2 is only to illustrate, and electric dipole direction (closure of electrode pair) is only to illustrate.Such as Fig. 2 institutes
Show, the integrated detection sensor of the embodiment of the present invention includes A structures and B structure.
The A structures are used for detection temperature and force signal.The A structures are one layer of ferroelectric polymers films.The A structures
It is characterized in that there is piezo-electric effect and pyroelectric effect simultaneously.The base material of the A structures includes but is not limited to Kynoar
(PVDF) and PVDF copolymer (P (VDF-TFE), P (VDF-TrFE), P (VDF-TrFE-CTFE) and P (VDF-TrFE-
CFE)) etc..The preparation method of the A structures includes but is not limited to the forming methods such as spin-coating method, pulling method.Above and below the A structures
Surface is deposited or sputtered respectively metal electrode, for output signal.
The B structure is used to detect force signal.The B structure is a lamination electroelectret film.The B structure is characterized in
Only there is piezo-electric effect (or pyroelectric effect can be ignored relative to piezo-electric effect).The B structure is piezo-electric electret, is more
Pore polymer film, base material include but is not limited to polypropylene (PP), polyethylene terephthalate (PET), poly- naphthalenedicarboxylic acid
The electrets such as glycol ester (PEN), ethylene fluoride ionomer (FEP), polytetrafluoroethylene (PTFE) (PTFE).The system of the B structure
Preparation Method includes but is not limited to the forming methods such as expanded method, template, etching method.The B structure upper and lower surface be deposited respectively or
Sputtering has metal electrode, for output signal.
The operation principle of ferroelectric polymers is to store effect of the microstructure in external force or ambient temperature of electric dipole
Under deform upon, change electric dipole moment, compensation electric charge changes, and externally shows corresponding electric charge or voltage signal.Pressure
The operation principle of electroelectret is that the microcellular structure for storing electric dipole produces deformation in the presence of external force, changes galvanic couple
Polar moment, compensation electric charge change, and externally show corresponding electric charge or voltage signal.Both operation principles are similar, but still
Have any different.Ferroelectric polymers have simultaneously temperature and force signal output, piezo-electric electret powerful signal output and without temperature signal
Output.
The A structures is compound as lower floor as upper strata, the B structure.The A structures on upper strata directly connect with test object
Touch, detection temperature signal and force signal, while force signal is transferred uniformly into the B structure of lower floor so that the B structure energy of lower floor
It is accurate to obtain force signal.By appropriate complex method, including but not limited to stickup, hot pressing, melting etc., can preferably bond
Force signal is transferred to B layers and undistorted by A, two layers of B, and can from A layers, is also equipped with certain flexible without destroying the whole of sensor
Body suppleness.
A, B double-layer structure are electrically connected, encapsulates whole composite construction.Composite construction is sealed using appropriate material
Dress, realize and protect antiwear purpose.Respectively to the upper/lower electrode of A, B layer, signal end and earth terminal are rightly chosen, using connecing
Ground terminal is electromagnetically shielded, and reduces signal interference.
Such as above-mentioned sensing arrangement, the A Rotating fields can detection temperature signal, and can detection force signal, and two kinds of signals
Mix, the B Rotating fields can only detect force signal, it is therefore desirable to separate and extract A, B layer signal and A layer signals
In temperature and force signal component.
It is electrically connected for two layers due to A, B, therefore two layers of A, B signal extract respectively.B layer powerful signals
Output, is designated as X (B), is final force signal to be detected.
The signal output of A layers, X (A) is designated as, includes two components, i.e. temperature components X (A temperature) and force component (A
Power), have：
X (A)=X (A temperature)+X (A power) (1)
Because the force signal of B layers detection is transmitted to by A layers, what A, B were detected for two layers is same force signal, therefore, A
The force signal of force signal component and B layers in layer signal is equal in magnitude, has：
| X (A power) |=| X (B) | (2)
The absolute value of A layers output signal and B layer output signals is subtracted each other, above formula (1) and (2) is brought into, has：
| X (A) |-| X (B) |=| X (A temperature) |+| X (A power) |-| X (B) |=| X (A temperature) |+| X (A power) |-| X (A
Power) |=X (A temperature).
Therefore, A layers output signal and B layer output signals are subtracted each other, and obtain X (A temperature), are final temperature letter to be detected
Number.
Two layers of A, B output characteristics and electrical connection direction need to be combined, if polarity is identical, is subtracted each other, if opposite polarity, phase
Add, the purpose is to offset the force component in a-signal.It can first take absolute value, then subtract each other in actual use.
The embodiment of the present invention by ferroelectric polymer material and piezoelectric electret material each the advantages of combine, both
In the case of having temperature and powerful signal, piezo-electric electret detection force signal (not by temperature interference), ferroelectric polymers is examined simultaneously
Testing temperature and force signal, then the signal subtraction by the two, force signal is offset, with regard to that can obtain temperature signal.By this method
With regard to that can isolate force signal and temperature signal, output respectively uses.Temperature and force signal are realized in single sensing unit while is examined
Survey.Meanwhile overall sensor still has light weight, thickness of thin is soft bent, has certain retractility and is applied to skin
The characteristics of skin surface, it can be applied to the fields such as intelligent skin, mechanical hand, prosthetic hand.
Embodiment three
Figure 3 illustrates a kind of touch sensible equipment in the embodiment of the present invention three, the touch sensible equipment includes
Integrated detection sensor described in any embodiment of the present invention.
In the present embodiment, the touch sensible equipment can include at least one of following：Prosthetic hand, mechanical hand and people
Make skin.
It should be noted that：The touch sensible equipment of the embodiment of the present invention, can be with addition to it can be the said equipment
Needed for other into other electronic equipments of the measurement of trip temperature and power, the present embodiment is to this and is not limited.
, being capable of measurement temperature and pressure simultaneously by using one the embodiments of the invention provide a kind of touch sensible equipment
Flexible sensor, solve the detection technique of existing integrated temperature and power, in material property, signal accuracy, manufacture difficulty
Shortcoming with present in cost etc., realizes temperature and force signal on single-sensor while detects.The sensing utensil
There is light weight, thickness of thin is soft bent, the characteristics of having certain retractility and be applied to skin surface, can be applied to intelligence
The fields such as skin, mechanical hand, prosthetic hand.
Pay attention to, above are only presently preferred embodiments of the present invention and institute's application technology principle.It will be appreciated by those skilled in the art that
The invention is not restricted to specific embodiment described here, can carry out for a person skilled in the art various obvious changes,
Readjust and substitute without departing from protection scope of the present invention.Therefore, although being carried out by above example to the present invention
It is described in further detail, but the present invention is not limited only to above example, without departing from the inventive concept, also
Other more equivalent embodiments can be included, and the scope of the present invention is determined by scope of the appended claims.
Claims (15)
1. a kind of integrated detection sensor, it is characterised in that including first structure body, the second structure and adhesive linkage are described
First structure body, directly contacted with test object, second structure, be arranged at the first structure body away from the test
The side of object, the adhesive linkage, it is arranged between the first structure body and second structure；
The first structure body, including be oppositely arranged first electrode, second electrode and be arranged at the first electrode and institute
State the first flexible membrane between second electrode；First flexible membrane has pyroelectric effect and a piezo-electric effect, and described first
The first electrode that electrode and the second electrode are formed is to the hybrid measurement signal for output temperature and pressure；
Second structure, including be oppositely arranged the 3rd electrode, the 4th electrode and be arranged at the 3rd electrode and institute
State the second flexible membrane between the 4th electrode；Second flexible membrane has piezo-electric effect, the 3rd electrode and the described 4th
The second electrode that electrode is formed is to for exporting simple pressure measurement signal；
The adhesive linkage, for the first structure body and second structure insulation to be connected.
2. sensor according to claim 1, it is characterised in that the sensor also includes：Signal processing module；
Wherein, the first electrode pair and the second electrode with the signal processing module to being electrically connected respectively；
The signal processing module, the hybrid measurement of the temperature and pressure of output is believed for obtaining the first electrode
Number, and obtain simple pressure measurement signal of the second electrode to output；According to the first electrode pair and described
The electrical connection direction of second electrode pair, hybrid measurement signal and the simple pressure measurement signal to the temperature and pressure
Computing is carried out, obtains simple temperature detection signal；The simple temperature detection signal and the simple pressure inspection are exported respectively
Survey signal.
3. sensor according to claim 2, it is characterised in that the signal processing module, be additionally operable to：To the institute of acquisition
Hybrid measurement signal of the first electrode to the temperature and pressure of output, and the second electrode obtained are stated to output
Simple pressure measurement signal is amplified filtering；And/or
Before the simple temperature detection signal and the simple pressure detecting signal is exported, to the simple temperature detection
Signal and the simple pressure detecting signal are amplified filtering.
4. according to the sensor described in claim any one of 1-3, it is characterised in that first flexible membrane is ferroelectric polymers
Film.
5. according to the sensor described in claim any one of 1-3, it is characterised in that second flexible membrane is piezo-electric electret
Film.
6. sensor according to claim 4, it is characterised in that the material of first flexible membrane includes：Polyvinylidene fluoride
The copolymer of alkene or Kynoar.
7. sensor according to claim 5, it is characterised in that the material of second flexible membrane includes：Polypropylene, gather
Ethylene glycol terephthalate, PEN, ethylene fluoride ionomer or polytetrafluoroethylene (PTFE).
8. sensor according to claim 4, it is characterised in that the preparation method of first flexible membrane includes：Spin coating
Method or pulling method.
9. sensor according to claim 5, it is characterised in that the preparation method of second flexible membrane includes：It is expanded
Method, template or etching method.
10. sensor according to claim 1, it is characterised in that：
Using setting coating process, the first electrode pair is formed at the both ends of first flexible membrane, and described second
The both ends of flexible membrane form the second electrode pair；
Wherein, the setting coating process includes：Evaporation or sputtering.
11. sensor according to claim 1, it is characterised in that the first structure body and second structure
Carried out respectively with the adhesive linkage by flexible compound mode compound；
Wherein, the flexible compound mode includes：Stickup, hot pressing or melting.
12. according to the sensor described in claim any one of 1-3, it is characterised in that：
The first electrode is arranged in the first structure body to be set close to the side of the test object, the second electrode
The side away from the test object in the first structure body；Or
The first electrode is arranged at the side away from the test object in the first structure body, and the second electrode is set
Close to the side of the test object in the first structure body.
13. according to the sensor described in claim any one of 1-3, it is characterised in that：
3rd electrode is arranged in second structure and set close to the side of the first structure body, the 4th electrode
It is placed in the side away from the first structure body in second structure；Or
3rd electrode is arranged at the side away from the first structure body, the 4th electrode in second structure and set
It is placed in second structure close to the side of the first structure body.
14. a kind of touch sensible equipment, including the sensor described in claim any one of 1-13.
15. touch sensible equipment according to claim 14, it is characterised in that the touch sensible equipment include it is following extremely
One item missing：Prosthetic hand, mechanical hand and artificial skin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710794583.3A CN107345825A (en) | 2017-09-06 | 2017-09-06 | Integrated detection sensor and touch sensible equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710794583.3A CN107345825A (en) | 2017-09-06 | 2017-09-06 | Integrated detection sensor and touch sensible equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107345825A true CN107345825A (en) | 2017-11-14 |
Family
ID=60257809
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710794583.3A Pending CN107345825A (en) | 2017-09-06 | 2017-09-06 | Integrated detection sensor and touch sensible equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107345825A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108645520A (en) * | 2018-05-08 | 2018-10-12 | 电子科技大学 | A kind of flexible pyroelectric infrared detector sensing unit of low pressure electrical interference |
| CN108871592A (en) * | 2018-05-08 | 2018-11-23 | 电子科技大学 | A kind of flexible pyroelectricity thermal infrared imager pixel array of low tension and temperature interference |
| CN109068477A (en) * | 2018-09-14 | 2018-12-21 | 上海无线电设备研究所 | A kind of sensitive member of pliable pressure temperature integrated thin-film sensor array and preparation method |
| CN109990928A (en) * | 2019-04-30 | 2019-07-09 | 广东工业大学 | A kind of temperature and pressure compound sensor |
| WO2020037885A1 (en) * | 2018-08-24 | 2020-02-27 | 深圳先进技术研究院 | Composite sensor, composite sensor manufacturing method, and composite sensor system |
| CN112486360A (en) * | 2020-12-17 | 2021-03-12 | 电子科技大学 | Pyroelectric sensing structure, gesture recognition device, display device and sensing method |
| CN112513463A (en) * | 2018-07-30 | 2021-03-16 | 尤里克拉国际有限公司 | Electrically driven compressor system |
| CN113728216A (en) * | 2019-05-31 | 2021-11-30 | 株式会社村田制作所 | Sensor device, and sensor system and article provided with same |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3940974A (en) * | 1974-05-06 | 1976-03-02 | Minnesota Mining And Manufacturing Company | Electrically compensated sensor |
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
| CN202871002U (en) * | 2012-10-19 | 2013-04-10 | 纳米新能源（唐山）有限责任公司 | Piezoelectric film alarm equipment |
| CN103519924A (en) * | 2013-10-22 | 2014-01-22 | 深圳先进技术研究院 | Intelligent artificial hand system |
| CN103900741A (en) * | 2014-03-25 | 2014-07-02 | 深圳市豪恩声学股份有限公司 | Wearable smart measuring system and smart shoe |
| CN104161529A (en) * | 2014-09-05 | 2014-11-26 | 深圳先进技术研究院 | Plantar pressure distribution detection system and manufacturing method thereof |
| CN104583762A (en) * | 2012-03-26 | 2015-04-29 | 泰克年研究发展基金会公司 | A platform unit for combined sensing of pressure, temperature and humidity |
| CN104866134A (en) * | 2014-01-13 | 2015-08-26 | 苹果公司 | Temperature compensating transparent force sensor having a compliant layer |
| US20160041114A1 (en) * | 2013-03-29 | 2016-02-11 | Stmicroelectronics Pte Ltd. | Integrated multi-sensor module |
| CN106813812A (en) * | 2016-12-28 | 2017-06-09 | 华中科技大学 | A kind of electroactive flexible compound mould electric transducer of high pressure and preparation method thereof |
| CN207231534U (en) * | 2017-09-06 | 2018-04-13 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensible equipment |
-
2017
- 2017-09-06 CN CN201710794583.3A patent/CN107345825A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3940974A (en) * | 1974-05-06 | 1976-03-02 | Minnesota Mining And Manufacturing Company | Electrically compensated sensor |
| CN104583762A (en) * | 2012-03-26 | 2015-04-29 | 泰克年研究发展基金会公司 | A platform unit for combined sensing of pressure, temperature and humidity |
| CN102749092A (en) * | 2012-07-13 | 2012-10-24 | 合肥工业大学 | Flexible compound type array sensor used for artificial sensitive skin of intelligent robot |
| CN202871002U (en) * | 2012-10-19 | 2013-04-10 | 纳米新能源（唐山）有限责任公司 | Piezoelectric film alarm equipment |
| US20160041114A1 (en) * | 2013-03-29 | 2016-02-11 | Stmicroelectronics Pte Ltd. | Integrated multi-sensor module |
| CN103519924A (en) * | 2013-10-22 | 2014-01-22 | 深圳先进技术研究院 | Intelligent artificial hand system |
| CN104866134A (en) * | 2014-01-13 | 2015-08-26 | 苹果公司 | Temperature compensating transparent force sensor having a compliant layer |
| CN103900741A (en) * | 2014-03-25 | 2014-07-02 | 深圳市豪恩声学股份有限公司 | Wearable smart measuring system and smart shoe |
| CN104161529A (en) * | 2014-09-05 | 2014-11-26 | 深圳先进技术研究院 | Plantar pressure distribution detection system and manufacturing method thereof |
| CN106813812A (en) * | 2016-12-28 | 2017-06-09 | 华中科技大学 | A kind of electroactive flexible compound mould electric transducer of high pressure and preparation method thereof |
| CN207231534U (en) * | 2017-09-06 | 2018-04-13 | 中国科学院深圳先进技术研究院 | Integrated detection sensor and touch sensible equipment |
Non-Patent Citations (1)
| Title |
|---|
| 谢娜，秦岚: "三维柔性触觉/热觉传感器设计与仿真", 《传感器与微系统》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108871592B (en) * | 2018-05-08 | 2020-07-03 | 电子科技大学 | Flexible pyroelectric thermal infrared imager pixel array with low voltage and temperature interference |
| CN108871592A (en) * | 2018-05-08 | 2018-11-23 | 电子科技大学 | A kind of flexible pyroelectricity thermal infrared imager pixel array of low tension and temperature interference |
| CN108645520A (en) * | 2018-05-08 | 2018-10-12 | 电子科技大学 | A kind of flexible pyroelectric infrared detector sensing unit of low pressure electrical interference |
| CN108645520B (en) * | 2018-05-08 | 2020-08-21 | 电子科技大学 | Flexible pyroelectric infrared detector sensitive unit with low-voltage electric interference |
| CN112513463A (en) * | 2018-07-30 | 2021-03-16 | 尤里克拉国际有限公司 | Electrically driven compressor system |
| US11867163B2 (en) | 2018-07-30 | 2024-01-09 | Unicla International Limited | Electric drive compressor system |
| WO2020037885A1 (en) * | 2018-08-24 | 2020-02-27 | 深圳先进技术研究院 | Composite sensor, composite sensor manufacturing method, and composite sensor system |
| CN109068477B (en) * | 2018-09-14 | 2019-11-08 | 上海无线电设备研究所 | A kind of sensitive member of pliable pressure temperature integrated thin-film sensor array and preparation method |
| CN109068477A (en) * | 2018-09-14 | 2018-12-21 | 上海无线电设备研究所 | A kind of sensitive member of pliable pressure temperature integrated thin-film sensor array and preparation method |
| CN109990928A (en) * | 2019-04-30 | 2019-07-09 | 广东工业大学 | A kind of temperature and pressure compound sensor |
| CN109990928B (en) * | 2019-04-30 | 2024-05-14 | 广东工业大学 | Temperature and pressure composite sensor |
| CN113728216A (en) * | 2019-05-31 | 2021-11-30 | 株式会社村田制作所 | Sensor device, and sensor system and article provided with same |
| CN112486360A (en) * | 2020-12-17 | 2021-03-12 | 电子科技大学 | Pyroelectric sensing structure, gesture recognition device, display device and sensing method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107345825A (en) | Integrated detection sensor and touch sensible equipment | |
| Kang et al. | Fingerprint‐inspired conducting hierarchical wrinkles for energy‐harvesting E‐skin | |
| Zou et al. | A flexible self-arched biosensor based on combination of piezoelectric and triboelectric effects | |
| Xia et al. | A thermally flexible and multi-site tactile sensor for remote 3D dynamic sensing imaging | |
| CN207231534U (en) | Integrated detection sensor and touch sensible equipment | |
| CN110568952A (en) | Pressure sensing device and method | |
| Fang et al. | Fabrication, structure characterization, and performance testing of piezoelectret-film sensors for recording body motion | |
| Yang et al. | Human movement monitoring and behavior recognition for intelligent sports using customizable and flexible triboelectric nanogenerator | |
| CN106662899A (en) | Integrated piezoelectric cantilever actuator and transistor for touch input and haptic feedback applications | |
| Shu et al. | Machine‐Learning Assisted Electronic Skins Capable of Proprioception and Exteroception in Soft Robotics | |
| CN107328497A (en) | A kind of signal detection sensing arrangement and preparation method thereof, signal detecting method | |
| EP3423925B1 (en) | Sensor device and sensing method based on an electroactive material | |
| CN112649128A (en) | Sensing device and method for measuring three-dimensional contact stress | |
| Nie et al. | A droplet-based passive force sensor for remote tactile sensing applications | |
| Mastronardi et al. | Low stiffness tactile transducers based on AlN thin film and polyimide | |
| Xu et al. | Scalable sensing electronics towards a motion capture suit | |
| CN104827491B (en) | The intelligence machine application on human skin of high sensitivity | |
| CN108709585B (en) | Artificial skin and method for detecting pressure, temperature and humidity and adjusting temperature of artificial skin | |
| Min et al. | Integrated piezo-triboelectric nanogenerators based self-powered flexible temperature and pressure sensor | |
| Gao et al. | Piezoelectric material based technique for concurrent force sensing and energy harvesting for interactive displays | |
| Ma et al. | Self-powered multifunctional body motion detectors based on highly compressible and stretchable ferroelectrets with an air-filled parallel-tunnel structure | |
| CN207036311U (en) | A kind of signal detection sensing arrangement | |
| CN204604356U (en) | Flexible responsive artificial skin | |
| JPS5911841B2 (en) | electret sensing device | |
| KR102240611B1 (en) | Apparatus and method of imaging pressure distribution by using multi-layered pressure sensor |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |