WO2014196359A1

WO2014196359A1 - Piezoelectric sensor and pressure detection device

Info

Publication number: WO2014196359A1
Application number: PCT/JP2014/063444
Authority: WO
Inventors: 裕次渡津; 喜子末▲富▼; 栄二角谷; 啓佑尾▲崎▼; 柴田　淳一; 勝己 ▲徳▼野; 奥村　秀三; 面　了明
Original assignee: 日本写真印刷株式会社
Priority date: 2013-06-04
Filing date: 2014-05-21
Publication date: 2014-12-11
Also published as: US20160124560A1; KR20160008637A; CN105264350A; KR101789905B1; US9864450B2; CN105264350B

Abstract

[Problem] To provide a piezoelectric sensor in which position detection and load detection can be carried out within the sensor. [Solution] This piezoelectric sensor (10) is a piezoelectric sensor (10) in which a piezoelectric layer (11) is sandwiched between an upper electrode (12) and a lower electrode (13), said piezoelectric sensor (10) being configured such that the upper electrode (12), lower electrode (13), or both are provided with a plurality of electrode patterns.

Description

Piezoelectric sensor and pressure detection device

The present invention relates to a piezoelectric sensor that generates a piezoelectric signal corresponding to a load, and more particularly to a piezoelectric sensor that can detect a position where a load is applied.

A piezoelectric sensor using a piezoelectric layer is known to detect a given load. For example, Patent Document 1 discloses a transparent piezoelectric sensor including a transparent pressure-sensitive layer and a pair of transparent conductive layers.

JP 2004-125571 A

However, the transparent piezoelectric sensor of Patent Document 1 can detect a given load, but cannot detect a position where the load is applied in the transparent piezoelectric sensor. .

In order to achieve the above object, the present invention is configured as follows.

In the piezoelectric sensor of the present invention, the piezoelectric layer is sandwiched between the upper electrode and the lower electrode. At least one of the upper electrode and the lower electrode includes a plurality of pattern electrodes. The upper electrode may include a plurality of first pattern electrodes, and the lower electrode may include a plurality of second pattern electrodes extending in the same direction as the first pattern electrode. The upper electrode may include a plurality of first pattern electrodes, and the lower electrode may include a plurality of second pattern electrodes that intersect the first pattern electrodes.

According to the above configuration, when a load is applied to the piezoelectric sensor and a charge is generated from the piezoelectric layer, the load is applied by specifying which electrode among the plurality of pattern electrodes has detected the charge. The position can be specified.

The reference electrode may be provided between the upper electrode and the lower electrode. In such a case, a first piezoelectric layer may be provided between the upper electrode and the reference electrode, and a second piezoelectric layer may be provided between the lower electrode and the reference electrode.

Then, the charges generated in the first piezoelectric layer and the second piezoelectric layer can be detected independently by the upper electrode and the lower electrode.

The first pattern electrode may include a first connection part that electrically connects the first electrode part and the first electrode part. The second pattern electrode may also include a second electrode part and a second connection part. Further, the first electrode part may be provided on the piezoelectric layer so as to overlap the second electrode part.

Then, the charge generated from the piezoelectric layer can be detected by the first electrode part and the second electrode part, and the position and amount of load applied can be detected.

The first electrode part may be arranged so as to overlap with the plurality of second electrode parts via the piezoelectric layer.

Then, the number of locations where the first electrode portion and the second electrode portion overlap is greater than in the above case. As a result, the position detection accuracy in the piezoelectric sensor is improved.

The first pattern electrode may have a strip shape.

The second pattern electrode may have a strip shape.

The size of the first pattern electrode in the width direction may increase as it approaches the peripheral edge of the piezoelectric layer.

In this case, the load detection sensitivity is improved for the peripheral portion of the piezoelectric layer with a small amount of deflection when a load is applied and the load detection sensitivity is poor.

The size of the second pattern electrode in the width direction may increase as it approaches the peripheral edge of the piezoelectric layer.

The pitch interval of the first pattern electrodes may be constant.

In this case, the position detection accuracy with respect to a given load is improved while keeping the sensitivity of the peripheral edge constant.

The pitch interval of the second pattern electrodes may be constant.

The first pattern electrode has a concavo-convex shape composed of a convex portion and a concave portion, and the pitch interval of the first pattern electrodes is shorter than the length of the short diameter of the contact surface formed when the input means contacts the piezoelectric sensor. It may be designed. Furthermore, between the adjacent electrodes of the first pattern electrode, the convex portion and the concave portion may be engaged with each other.

Then, when the piezoelectric sensor and the object come into contact, the number of the first pattern electrodes that come into contact with the object increases. As a result, it is possible to detect the load position and the load amount with higher accuracy than in the above case.

The second pattern electrode has a concavo-convex shape composed of a convex portion and a concave portion, and the pitch interval of the second pattern electrode is shorter than the length of the minor axis of the contact surface formed when the input means contacts the piezoelectric sensor. It may be designed. Furthermore, between the adjacent electrodes of the second pattern electrode, the convex portion and the concave portion may be configured to mesh with each other.

Then, when the piezoelectric sensor and the target object come in contact, the number of the target object and the second pattern electrode that come in contact increases. As a result, it is possible to detect the load position and the load amount with higher accuracy than in the above case.

The pressure detection device of the present invention includes a piezoelectric layer, a first electrode, a second electrode, a first detection unit, and a second detection unit. The first electrode is laminated on the first main surface side of the piezoelectric layer. The first electrode includes a pattern electrode. The pattern electrode includes an L-type reference electrode and an L-type electrode. The L-type reference electrode is an L-shaped electrode in which two sides are combined. The L-type electrode is a plurality of L-shaped electrodes arranged at an interval in one direction from the two sides of the L-type reference electrode, and the end side of the L-type electrode is the end of the L-type reference electrode. It is arranged on the extended line of the side.

Then, the number of the L-type reference electrode and the L-type electrode arranged varies depending on the position in the one direction. The L-type reference electrode and the L-type electrode are connected to the L-type reference electrode detection unit and the L-type electrode of the first electrode. Therefore, when a load is applied to the piezoelectric layer, the number of L-type reference electrode detection units and L-type electrode detection units that detect charges differs depending on the position in the one direction where the load is applied. Therefore, by specifying the number of detection units that have detected charges, the position in one direction to which a load is applied can be specified.

The second electrode is laminated on the second main surface side of the piezoelectric layer. The second electrode includes a plurality of strip-like electrodes that are arranged in a direction perpendicular to the one direction and cover the pattern electrode. The second detection unit includes a strip electrode detection unit that is independently connected to the strip electrode.

Then, when a load is applied to the piezoelectric layer, the position in the direction perpendicular to the one direction where the load is applied can be specified by specifying the type of the strip-shaped electrode detection unit that detects the electric charge. .

Therefore, the position to which the load is applied can be specified by combining the position information obtained by the first electrode detection unit and the second electrode detection unit.

The pressure detection device of the present invention includes a piezoelectric layer, a first electrode, two electrodes, a first detection unit, and a second detection unit. The first electrode is laminated on the first main surface side of the piezoelectric layer.
The first electrode includes a strip-shaped pattern electrode composed of a plurality of strip-shaped electrodes arranged in one direction.
The second electrode includes a stepping portion, a step portion, and a connection portion. The stepping portion is disposed between the strip electrodes. The step portion connects the stepped portions. The step portion intersects with the strip electrode in a one-to-one correspondence. The connection part connects the start point of the stepping part and the end point of the step part.
In addition, the 1st detection part is provided with the strip | belt-shaped electrode detection part connected with each strip | belt-shaped electrode of a strip | belt-shaped pattern electrode. The second detection unit includes a plurality of strip electrode detection units connected to the plurality of step electrodes.

Then, the number of overlapping strip electrodes and staircase electrodes varies depending on the position in the above one direction. The strip electrode is connected to the strip electrode detector. Therefore, when a load is applied to the piezoelectric layer, the number of strip-shaped electrode detection units that detect charges varies depending on the position in the one direction. Therefore, by specifying the number of detection units that have detected charges, the position in one direction to which a load is applied can be specified.

The second electrode is laminated on the second main surface side of the piezoelectric layer. The second electrode includes a staircase electrode. The second detection unit includes a staircase electrode detection unit that is independently connected to the staircase electrode.

Then, when a load is applied to the piezoelectric layer, by specifying the type of the staircase electrode detection unit that detects charges generated from the piezoelectric layer, the position in the direction perpendicular to the one direction where the load is applied can be specified. It is like that.

Therefore, by combining the position information obtained by the first electrode detection unit and the second electrode detection unit,
The position where the load is applied can be specified.

The piezoelectric layer has an active piezoelectric portion and an inactive piezoelectric portion, and a first pattern electrode may be laminated on the active piezoelectric portion.

Then, the occurrence of the crosstalk phenomenon can be prevented. As a result, the detection accuracy of the position applied to the piezoelectric sensor and the load is improved.

The piezoelectric layer has an active piezoelectric portion and an inactive piezoelectric portion, and a second pattern electrode may be laminated on the active piezoelectric portion.

Then, the occurrence of the crosstalk phenomenon can be prevented. As a result, the position detection accuracy of the piezoelectric sensor is improved.

The upper electrode may contain indium tin oxide or polyethyldioxothiophene.

Then, since the transparency of the upper electrode is increased, a piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.

The lower electrode may contain indium tin oxide or polyethyldioxothiophene.

Then, since the transparency of the lower electrode is increased, the piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.

The piezoelectric layer may be composed of an organic piezoelectric material.

Then, since the flexibility of the piezoelectric layer is increased, the bending resistance of the piezoelectric sensor is improved. As a result, the piezoelectric sensor can be arranged on an R curved surface.

The organic piezoelectric material may contain polyvinylidene fluoride or polylactic acid.

Then, since the transparency of the piezoelectric layer is increased, the piezoelectric sensor can be disposed on a display device such as a liquid crystal or an organic EL.

The piezoelectric layer may be made of an inorganic material.

Then, since the piezoelectric constant is improved, the load detection sensitivity is improved.

The pressure detection device may have a touch panel laminated on the piezoelectric sensor.

In that case, the load position can be detected even when the load is hardly applied to the piezoelectric sensor.

The capacitive touch panel may be a capacitive touch panel.

Then, the transparency of the entire pressure detection device is improved.

In the piezoelectric sensor according to the present invention, position detection can be performed within the piezoelectric sensor.

It is a conceptual diagram of a pressure detection apparatus. FIG. 2 is a cross-sectional view taken along line A-A ′ of FIG. 1. It is a top view of a piezoelectric sensor. FIG. 4 is a B-B ′ sectional view of FIG. 3. It is a top view of a piezoelectric sensor. FIG. 6 is a C-C ′ sectional view of FIG. 5. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is D-D 'sectional drawing of FIG. It is a top view of a piezoelectric sensor. It is E-E 'sectional drawing of FIG. It is a top view of a piezoelectric sensor. It is sectional drawing of a piezoelectric sensor. It is a conceptual diagram of a pressure detection apparatus. It is A-A 'sectional drawing of FIG. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. It is a top view of a piezoelectric sensor. FIG. 22 is a B-B ′ sectional view of FIG. 21. It is a top view of a piezoelectric sensor. It is C-C 'sectional drawing of FIG. It is sectional drawing of a piezoelectric sensor. It is sectional drawing of a piezoelectric sensor. It is sectional drawing of a piezoelectric sensor. It is a conceptual diagram of a pressure detection apparatus. It is A-A 'sectional drawing of FIG. It is a conceptual diagram of a pressure detection apparatus. It is a conceptual diagram of a pressure detection apparatus. It is a conceptual diagram of a pressure detection apparatus. FIG. 33 is a B-B ′ sectional view of FIG. 32. It is a conceptual diagram of a pressure detection apparatus. It is a conceptual diagram of a pressure detection apparatus. It is sectional drawing of a piezoelectric sensor. It is sectional drawing of the pressure detection apparatus which combined the piezoelectric sensor and the touchscreen.

Hereinafter, embodiments according to the present invention will be described in more detail with reference to the drawings. It should be noted that the dimensions, materials, shapes, relative positions, etc. of the parts and portions described in the embodiments of the present invention are not intended to limit the scope of the present invention only to those unless otherwise specified. This is just an illustrative example.

1. First Embodiment (1) Overall Structure of Pressure Detection Device The overall structure of a pressure detection device according to the first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a schematic view of a pressure detection device. FIG. 2 is a sectional view of the piezoelectric sensor.

The pressure detection device has a function of detecting the amount and position of a given load.
As shown in FIG. 1, the pressure detection device 1 includes a piezoelectric sensor 10, a detection unit 20, and a control unit 30. The piezoelectric sensor 10 is a device that generates an electric charge according to a given load. The detection unit 20 is a device that detects charges generated by the piezoelectric sensor 10. The control unit 30 is a device that controls the switch S installed in the piezoelectric sensor 10. Below, the structure of the pressure detection apparatus 1 is demonstrated in detail.

(2) Piezoelectric Sensor As shown in FIG. 2, the piezoelectric sensor 10 has a configuration in which a piezoelectric layer 11 is sandwiched between an upper electrode 12 and a lower electrode 13. The upper electrode 12 is laminated on the upper surface of the piezoelectric layer 11, and the lower electrode 13 is laminated on the lower surface of the piezoelectric layer 11.

As shown in FIG. 1 again, the upper electrode 12 includes a strip-shaped first pattern electrode 14. A plurality of first pattern electrodes 14 are arranged in the Y-axis direction. The lower electrode 13 is planar.

When a load is applied to such a piezoelectric sensor 10, a charge corresponding to the applied load is generated in the piezoelectric layer 11. The generated charges are detected by the detection unit 20 via the first pattern electrode 14 and the lower electrode 13 existing in the vicinity of the load. At this time, the amount of load applied to the piezoelectric sensor 10 can be specified by measuring the amount of charge detected by the detection unit 20. As for the load position, the control unit 30 determines which of the first pattern electrodes 14 among the plurality of first pattern electrodes 14 the charges detected by the detection unit 20 are detected by the detection unit 20. It can be specified by detecting with.

(3) Piezoelectric layer Examples of the material constituting the piezoelectric layer 11 include inorganic piezoelectric materials and organic piezoelectric materials.

Examples of inorganic piezoelectric materials include barium titanate, lead titanate, lead zirconate titanate, potassium niobate, lithium niobate, and lithium tantalate.

Examples of the organic piezoelectric material include a fluoride polymer or a copolymer thereof, and a polymer material having chirality. Examples of the fluoride polymer or a copolymer thereof include polyvinylidene fluoride, vinylidene fluoride-tetrafluoroethylene copolymer, and vinylidene fluoride-trifluoroethylene copolymer. Examples of the polymer material having chirality include L-type polylactic acid and R-type polylactic acid.

Further, when the pressure detection device 1 is applied to a display device provided with a touch panel, it is preferable that the piezoelectric portion is made of a transparent material or thin enough to allow light to pass therethrough.

(4) Electrode The upper electrode 12 and the lower electrode 13 can be comprised with the material which has electroconductivity. Examples of the conductive material include transparent conductive oxides such as indium-tin oxide (ITO), tin-zinc oxide (Tin), polyethylene dioxythiophene A conductive polymer such as (Polyethylenedioxythiophene, PEDOT) can be used. In this case, the electrode can be formed by using vapor deposition or screen printing.

Also, a conductive metal such as copper or silver may be used as the conductive material. In this case, the electrode may be formed by vapor deposition, or may be formed using a metal paste such as a copper paste or a silver paste.

Furthermore, as a conductive material, a material in which conductive materials such as carbon nanotubes, metal particles, and metal nanofibers are dispersed in a binder may be used.

(5) Detection Unit As shown in FIG. 1, the detection unit 20 has two inputs. One input is connected to the upper electrode 12. The other input is connected to the lower electrode 13.

With the above configuration, the detection unit 20 can detect the electric charge generated between the upper electrode 12 and the lower electrode 13 (that is, between both main surfaces of the piezoelectric layer 11) when the piezoelectric layer 11 is pressed. The detection unit 20 can use a detection device that combines an AD converter and an amplifier.

(6) Control Unit The control unit 30 is connected to the switch S that connects the upper electrode 12 and the detection unit 20 and the switch S that connects the lower electrode 13 and the detection unit 20. The control unit 30 has a function of outputting an ON / OFF switching signal for the switch S.

The control unit 30 can be included in the drive system of the pressure detection device 1, for example. The drive system may be a microcomputer including a CPU (Central Processing Unit), a storage unit, and an interface for driving a piezoelectric sensor. Alternatively, the drive system may be integrated into one IC by a custom IC or the like.

Further, the above functions of the control unit may be realized by causing a CPU or a custom IC to execute a program stored in a storage unit such as the microcomputer or the custom IC.

As described above, when the pressure detection device 1 is configured, the charge generated between the upper electrode 12 and the lower electrode 13 can be detected using the control unit 30. Then, it is possible to calculate the position and amount where the load is applied from the detected electric charge. Similarly, when there are a plurality of places where the load is applied, the position of each place and the amount of the load can be detected. That is, the pressure detection device 1 has a configuration capable of multi-force detection.

2. Second Embodiment In the first embodiment, the lower electrode 13 has a planar shape and does not have a pattern shape, but the lower electrode 13 may have a second pattern electrode 15.

FIG. 3 is a plan view of the piezoelectric sensor according to the second embodiment. 4 is a cross-sectional view taken along the line B-B 'of FIG.

As shown in FIG. 3, in addition to the above, the lower electrode 13 includes a strip-shaped second pattern electrode 15. A plurality of first pattern electrodes 14 and second pattern electrodes 15 are arranged in the Y-axis direction. The first pattern electrode 14 is stacked on the second pattern electrode 15 via the piezoelectric layer 11. As shown in FIGS. 3 and 4, the first pattern electrode 14 is laminated on the piezoelectric layer 11 so as to follow the shape of the second pattern electrode 15.

When a load is applied to such a piezoelectric sensor 10, a charge corresponding to the applied load is generated in the piezoelectric layer 11. The generated charges are detected by the detection unit 20 via the first pattern electrode 14 and the second pattern electrode 15 existing in the vicinity of the load. At this time, the amount of load applied to the piezoelectric sensor 10 can be specified by measuring the amount of charge detected by the detection unit 20. As for the load position, the charge detected by the detection unit 20 passes through the first pattern electrode 14 and the second pattern electrode 15 among the plurality of first pattern electrodes 14 and second pattern electrodes 15. It can be specified by detecting by the control unit 30 whether it has been detected by the detection unit 20. Thereby, the position of the place where the load was loaded and the load amount of the loaded load can be detected.

With the above configuration, since the lower electrode 13 is patterned in addition to the upper electrode 12, position detection and load detection with higher accuracy are possible.

In the above example, the first pattern electrode 14 and the second pattern electrode 15 are arranged in the Y-axis direction of the piezoelectric layer 11. However, the first pattern electrode 14 and the second pattern electrode 15 are arranged in the X-axis direction. May be.

3. Third Embodiment The method of laminating the first pattern electrode 14 and the second pattern electrode 15 is not limited to the case where the first pattern electrode 14 is laminated on the piezoelectric layer 11 so as to follow the shape of the second electrode portion 18. Hereinafter, other arrangement methods will be described.

FIG. 5 is a plan view of the piezoelectric sensor according to the third embodiment. 6 is a cross-sectional view taken along the line C-C ′ of FIG. 5.

As shown in FIG. 5, the first pattern electrode 14 is laminated on the piezoelectric layer 11 across the plurality of second pattern electrodes 15. By configuring as described above, the number of first pattern electrodes 14 stacked on the second pattern electrode 15 via the piezoelectric layer 11 is increased as shown in FIG. 6 (in the case of the second embodiment). 4, the number of overlapping portions of the first pattern electrode 14 and the second pattern electrode 15 is 4. On the other hand, in the case of the second embodiment, as shown in FIG. And the number of overlapping portions of the second pattern electrode 15 is eight). As a result, the number of detection points for detecting the input means increases, so that the position detection accuracy and load detection accuracy when the input means contacts the piezoelectric sensor 10 are improved.

4). Fourth Embodiment In the first to third embodiments, the length in the width direction of the first pattern electrode 14 and the second pattern electrode 15 is constant, but as the length approaches the peripheral portion of the piezoelectric layer 11, the length is increased. You may be comprised so that it may become long.

7, 8, and 9 are plan views of the piezoelectric sensor according to the third embodiment.

As shown in FIG. 7, the upper electrode 12 includes first pattern electrodes 14 arranged in a plurality in the Y-axis direction. Fixing members W for fixing the piezoelectric sensor 10 are provided at both ends of the piezoelectric sensor 10 in the Y-axis direction. The fixing member W is composed of an adhesive material or a fixing frame. In this case, the upper electrode 12 is configured such that the first pattern electrode 14 having a wider electrode width is disposed closer to the both end portions. The same applies to the second pattern electrode 15 of the lower electrode 13 (dotted line portion in FIG. 7).

As shown in FIG. 8, fixing members W for fixing the piezoelectric sensor 10 may be provided at both ends in the X-axis direction of the piezoelectric sensor 10. In such a case, the upper electrode 12 includes a first electrode pattern 14 having a neck shape in which the width of the electrode becomes wider as it approaches the both end portions. The same applies to the second pattern electrode 15 of the lower electrode 13 (dotted line portion in FIG. 8).

As shown in FIG. 9, a fixing member W for fixing the piezoelectric sensor 10 may be provided on the periphery of the piezoelectric sensor 10. In such a case, the upper electrode 12 may have a structure combining the above. That is, the upper electrode 12 includes a first electrode pattern 14 having a neck shape that increases in width as it approaches both ends in the X-axis direction. The first electrode pattern electrode 14 approaches the both ends in the Y-axis direction. The electrode may have a wide width. The same applies to the second pattern electrode 15 (dotted line portion in FIG. 9).

As described above, when the piezoelectric sensor 10 is fixed by the fixing member W or the like, when a load is applied to the piezoelectric sensor 10, the portion where the fixing member W is provided or a portion in the vicinity thereof is not bent. It becomes difficult to transmit power. For this reason, it is difficult to detect the load at the above-described places.

In the fourth embodiment, when the fixing members W are provided at both ends of the piezoelectric sensor 10 in the Y-axis direction, the upper electrode 1 has a first electrode pattern 14 having a larger electrode width as it approaches both ends in the Y-axis direction. When the fixing members W are provided at both ends of the piezoelectric sensor 10 in the X-axis direction, the upper electrode 12 has a wedge-shaped first shape in which the electrode width increases as it approaches both ends in the X-axis direction. By being configured to have one electrode pattern 14, the physical detection sensitivity of the electrode is improved, and the detection of the vicinity of the fixed member W where it is difficult to detect the load is made possible.

In the fourth embodiment, the first pattern electrodes 14 may be arranged on the piezoelectric layer 11 so that the pitch interval L between the first pattern electrodes 14 is constant. The second pattern electrodes 15 may also be arranged on the piezoelectric layer 11 so that the pitch interval l between the second pattern electrodes 15 is constant. If comprised in this way, since the 1st pattern electrode 14 and the 2nd pattern electrode 15 are arrange | positioned on the piezoelectric layer 11 at equal intervals, in addition to the above, an exact position detection is attained. The pitch interval is a distance from the center portion of the electrode to the center portion of the adjacent electrode.

5. Fifth Embodiment The first pattern electrode 14 and the second pattern electrode 15 are not limited to other ones as long as they extend in the same direction. Therefore, the shape of the first pattern electrode 14 and the second pattern electrode 15 is not particularly limited to a belt shape. Hereinafter, the shape of the electrode will be described.

FIG. 10 is a plan view of the piezoelectric sensor according to the fifth embodiment.

As shown in FIG. 10, the first pattern electrode 14 has an uneven shape. This concavo-convex shape is a repetitive shape corresponding to a convex portion and a concave portion. The first pattern electrode 14 is arranged on the piezoelectric layer 11 so that the convex portion and the concave portion are engaged with each other in the first pattern electrode 14.

The pitch length L of the first pattern electrode is designed to be shorter than the length of the short diameter of the contact surface when the input means (for example, a finger or a stylus pen) and the pressure sensor 10 are in contact. . When the input means is a finger, the pitch length L of the convex portion is 1 mm to 16 mm, and when the stylus pen is 0.5 mm to 4 mm.

Then, when the input unit and the pressure sensor 10 are in contact with each other, the input unit is in contact with many first pattern electrodes 14 as compared with the case where the shape of the first pattern electrode 14 is a strip shape. As a result, more accurate position detection and load detection are possible.

In addition, the 2nd pattern electrode 15 may have uneven | corrugated shape similarly. In such a case, it is preferable that the pitch length l of the convex portion of the second pattern electrode 15 is designed to be shorter than the length of the short diameter of the contact surface when the input means and the pressure sensor 10 are in contact.

When configured as described above, when the input means and the pressure sensor 10 come into contact, the input means comes into contact with more first pattern electrodes 14 and second pattern electrodes 15. Therefore, more accurate position detection and load detection are possible.

6). Sixth Embodiment Other pattern shapes of the first pattern electrode 14 and the second pattern electrode 15 will be described below.

FIG. 11 is a plan view of the piezoelectric sensor according to the sixth embodiment. 12 is a cross-sectional view taken along the line D-D ′ of FIG. 11.

As shown in FIG. 11, the first pattern electrode 14 includes a plurality of first electrode portions 16 arranged in the X-axis direction and a first connection portion 17 that electrically connects the first electrode portions 16 to each other. .
The second pattern electrode 15 includes a plurality of second electrode portions 18 (FIG. 11: diamond dotted line portions) arranged in the X-axis direction and a second connection portion 19 (FIG. 11) that electrically connects the second electrode portions 18 to each other. : Dotted line part). In addition, although the shape of the 1st electrode part 16 and the 1st electrode part 18 was shown by the rhombus shape in FIG. 9, polygonal shapes, such as a triangle and a quadrangle | tetragon, a circle | round | yen, and an ellipse shape may be sufficient.

Further, as shown in FIGS. 11 and 12, the first electrode portion 16 is laminated on the piezoelectric layer 11 so as to follow the shape of the second electrode portion 18. Then, when an input means (for example, a finger or a stylus pen) comes into contact with the first electrode unit 16, the charge generated in the piezoelectric layer 11 passes through the first electrode unit 16 and the second electrode unit 18 and is detected by the detection unit 20. Detected. At this time, the amount of load applied to the piezoelectric sensor 10 can be specified by measuring the amount of charge detected by the detection unit 20. As for the load position, the charge detected by the detection unit 20 passes through the first pattern electrode 14 and the second pattern electrode 15 among the plurality of first pattern electrodes 14 and second pattern electrodes 15. It can be specified by detecting by the control unit 30 whether it has been detected by the detection unit 20.

7). Seventh Embodiment The method of laminating the first pattern electrode 14 and the second pattern electrode 15 is not limited to the case where the first electrode portion 16 is laminated on the piezoelectric layer 11 so as to follow the shape of the second electrode portion 18. Hereinafter, other arrangement methods will be described. Since the basic configuration is the same as that of the sixth embodiment, only the differences will be described.

FIG. 13 is a plan view of the piezoelectric sensor according to the seventh embodiment. 14 is a cross-sectional view taken along the line E-E 'of FIG.

As shown in FIG. 13, a plurality of first pattern electrodes 14 are arranged in the Y-axis direction. Further, the first pattern electrode 14 is disposed on the piezoelectric layer 11 so as to mesh with each other. The second pattern electrode is also disposed on the piezoelectric layer 11 so as to be engaged with each other between the adjacent second pattern electrodes 15.

In addition, in the above, the 1st electrode part 16 is arrange | positioned so that it may straddle on the 4th 2nd electrode part 18 arrange | positioned at four directions.

When the piezoelectric sensor 10 is configured as described above, the number of the first electrode portions 16 stacked on the second electrode portion 18 is increased (in the case of the sixth embodiment, as shown in FIG. The number of overlapping portions of the electrode portion 16 and the second electrode portion 18 is three, whereas in the case of the seventh embodiment, it is six as shown in FIG. As a result, since the number of detection points increases, the position detection accuracy and load detection accuracy when the input means contacts the piezoelectric sensor 10 are improved.

Furthermore, as described above, the first pattern electrodes 14 are arranged so as to mesh with each other, so that the electrodes are spread on the piezoelectric layer 10 without any gaps. This is the same when the second pattern electrodes 15 are arranged so as to mesh with each other. As a result, the piezoelectric sensor 10 is difficult to see the pattern shapes of the first pattern electrode 14 and the second pattern electrode 15 pattern electrode.

8). Eighth Embodiment In addition to the upper electrode 12 and the lower electrode 13, the piezoelectric layer 11 may be patterned so as to have an active portion and an inactive portion.

FIG. 15 is a cross-sectional view of the piezoelectric sensor according to the eighth embodiment.

As shown in FIG. 15, the piezoelectric layer 11 includes an active piezoelectric portion 110 and an inactive piezoelectric portion 111. The active piezoelectric portion 110 is a portion where electric charges are generated when a load is applied to the piezoelectric sensor 10. On the other hand, the inactive piezoelectric portion 111 is a portion where no charge is generated even when a load is applied.

In the example of FIG. 15, the first pattern electrode 14 and the second pattern electrode 15 are disposed above and below the active piezoelectric portion 110. With such a configuration, it is possible to prevent electric charges generated near the first pattern electrode 14 from leaking and mixing into other first pattern electrodes 14 (a crosstalk phenomenon can be prevented). As a result, position detection accuracy and load detection accuracy are improved. In the above description, an example in which the first pattern electrode 14 and the second pattern electrode 15 are directly laminated on the active piezoelectric portion 110 has been described. However, the active piezoelectric portion 110 or the active piezoelectric portion is interposed between the active piezoelectric portion 110 and the first pattern electrode 14. Between 110 and the 2nd pattern electrode 15, insulating materials, such as an adhesive agent and a film, may be laminated | stacked.

9. Ninth Embodiment In the above description, the configuration in which the piezoelectric layer is sandwiched between the upper electrode and the lower electrode has been described. However, a reference electrode may be provided between the upper electrode and the lower electrode.

FIG. 16 is a cross-sectional view of the piezoelectric sensor according to the ninth embodiment.

As shown in FIG. 16, the piezoelectric sensor 10 of the ninth embodiment includes a reference electrode 40 between the upper electrode 12 and the lower electrode 13. A first piezoelectric layer 11 a is provided between the upper electrode 12 and the reference electrode 40. Between the lower electrode 13 and the reference electrode 40, the second piezoelectric layer 11b is provided. The material of the first piezoelectric layer 11 a and the second piezoelectric layer 11 b is the same as that of the piezoelectric layer 11. The material of the reference electrode 40 is also the same as that of the upper electrode 12 and the lower electrode 13.
As described above, when the reference electrode 40 is provided between the upper electrode 12 and the lower electrode 13, the charges generated in the first piezoelectric layer 11 a and the second piezoelectric layer 11 b are independently generated by the upper electrode 12 and the lower electrode 13. Can be detected. As a result, the design of the detection circuit is simplified.

10. Tenth Embodiment In the second embodiment, the direction in which a plurality of first pattern electrodes 14 are arranged and the direction in which a plurality of second pattern electrodes 15 are arranged are the same direction, but a plurality of first pattern electrodes 14 are arranged. And the direction in which a plurality of second pattern electrodes 15 are arranged may intersect each other.

FIG. 17 is a schematic view of a pressure detection device according to the tenth embodiment. 18 is a cross-sectional view taken along the line A-A 'of FIG.

As shown in FIG. 17, the pressure detection device 1 in the tenth embodiment also includes a piezoelectric sensor 10, a detection unit 20, and a control unit 30. The piezoelectric sensor 10 is a device that generates an electric charge according to a given load. The detection unit 20 is a device that detects charges generated by the piezoelectric sensor 10. The control unit 30 is a device that controls the switch S installed in the piezoelectric sensor 10.

As shown in FIG. 17, the upper electrode 12 in the tenth embodiment includes a strip-shaped first pattern electrode 14. A plurality of first pattern electrodes 14 are arranged in the Y-axis direction. The lower electrode 13 in the tenth embodiment also includes a strip-shaped second pattern electrode 15. The difference from the second embodiment is that a plurality of second pattern electrodes 15 in the tenth embodiment are arranged in the X-axis direction.

When a load is applied to such a piezoelectric sensor 10, an electric charge corresponding to the applied load is generated. The generated charges are detected by the detection unit 20 via the first pattern electrode 14 and the second pattern electrode 15 existing in the vicinity of the load. At this time, the amount of load applied to the piezoelectric sensor 10 can be specified by measuring the amount of charge detected by the detection unit 20. As for the load position, which first pattern electrode 14 and second pattern electrode 15 out of the plurality of first pattern electrodes 14 and second pattern electrodes 15 detected by the detection unit 20 pass through. Can be identified by the control unit 30.

In the tenth embodiment, the first pattern electrode 14 is arranged in the Y-axis direction of the piezoelectric layer 11 and the second pattern electrode 15 is arranged in the X-axis direction. However, the first pattern electrode 14 and the second pattern are arranged. The arrangement position of the electrodes 15 may be switched.

11. Eleventh Embodiment In the tenth embodiment, the length in the width direction of the first pattern electrode 14 and the second pattern electrode 15 intersecting in the arrangement direction is constant. You may be comprised so that it may become long as it approaches.

FIG. 19 is a plan view of the piezoelectric sensor according to the eleventh embodiment.

As shown in FIG. 19, a fixing member W for fixing the piezoelectric sensor 10 is provided on the peripheral edge of the piezoelectric sensor 10. The fixing member W is an adhesive material or a fixing frame. In such a case, the first pattern electrode 14 whose electrode width increases as it approaches the peripheral edge of the piezoelectric sensor 10 may be disposed. The same applies to the second pattern electrode 15.

When the piezoelectric sensor 10 is fixed by the fixing member W or the like, when a load is applied to the pressure-sensitive sensor 10, the bending force is hardly transmitted to a location where the fixing member W is provided or a location in the vicinity thereof. For this reason, it is difficult to detect the load at the above-described places.
In the eleventh embodiment, as the position where the fixing member W is provided is approached, an electrode having a wider electrode width is arranged to improve the physical detection sensitivity, thereby detecting the vicinity of the fixing member W where it is difficult to detect the load. It is possible.

Further, the first pattern electrodes 14 are arranged on the piezoelectric layer 11 so that the pitch interval L of the first pattern electrodes 14 is constant. The second pattern electrodes 15 are also arranged below the piezoelectric layer 11 so that the pitch interval l between the second pattern electrodes 15 is constant. If comprised in this way, since the 1st pattern electrode 14 and the 2nd pattern electrode 15 are arranged on the piezoelectric layer 11 at equal intervals, in addition to the above, an exact position detection is attained.

12 Twelfth Embodiment Since the first pattern electrode 14 and the second pattern electrode 15 that intersect in the arrangement direction only need to overlap with each other via the piezoelectric layer 11, the shapes of the first pattern electrode 14 and the second pattern electrode 15 are The belt shape is not particularly limited.

FIG. 20 is a plan view of the piezoelectric sensor according to the twelfth embodiment.

As shown in FIG. 20, the first pattern electrode 14 has an uneven shape. This concavo-convex shape is a repetitive shape corresponding to a convex portion and a concave portion. The convex portion and the concave portion are arranged so as to mesh with each other between the adjacent first pattern electrodes 14.

Note that the pitch length L of the first pattern electrode 14 is designed to be shorter than the length of the short diameter of the contact surface when the input means (for example, a finger or a stylus pen) and the pressure sensor 10 are in contact with each other. Yes. When the input means is a finger, the pitch length L of the convex portion is 1 mm to 16 mm, and when the input means is a stylus pen, the pitch length L is 0.5 mm to 4 mm.

Then, when the input means and the pressure sensor come into contact with each other, the input means comes into contact with more first pattern electrodes 14 as compared with the case where the shape of the first pattern electrode 14 is a band shape. As a result, more accurate position detection and load detection are possible than in the above case.

In the above case, the second pattern electrode 15 may be disposed below the first pattern electrode 14 via the piezoelectric layer 11 so as to follow the shape of the first pattern electrode 14.

13. Thirteenth Embodiment Another pattern shape of the first pattern electrode 14 and the second pattern electrode 15 whose arrangement directions intersect will be described below.

FIG. 21 is a plan view of the piezoelectric sensor according to the thirteenth embodiment. 22 is a cross-sectional view taken along the line B-B ′ of FIG. 21.

As shown in FIG. 21, the first pattern electrode 14 includes a plurality of first electrode portions 16 that are arranged in the X-axis direction and a first connection portion 17 that electrically connects the first electrode portions 16 to each other. .
The second pattern electrode 15 includes a plurality of second electrode portions 18 (FIG. 21: rhombus dotted line portions) arranged in the Y-axis direction and a second connection portion 19 (FIG. 21) that electrically connects the second electrode portions 18 to each other. : Dotted line part). In addition, although the shape of the 1st electrode part 16 and the 1st electrode part 18 was shown by the rhombus shape in FIG. 21, polygon shape, such as a triangle and a quadrangle | tetragon, a circle | round | yen, and an ellipse shape may be sufficient.

21 and 22, the first electrode portion 16 is laminated on the piezoelectric layer 11 so as to follow the shape of the second electrode portion 18. Then, when an input means (for example, a finger or a stylus pen) comes into contact with the first electrode unit 16, the charge generated in the piezoelectric layer 11 is detected by the detector 20 via the first electrode unit 16 and the second electrode unit 18. Is done. The detection of the touched position can be specified by detecting which first pattern electrode 14 and second pattern electrode 15 the detected charge has passed through by the control unit 20. The load amount can be detected by specifying the charge amount detected by the detection unit 20.

14 Fourteenth Embodiment The method of laminating the first pattern electrode 14 and the second pattern electrode 15 whose arrangement directions cross each other is laminated on the piezoelectric layer 11 so that the first electrode portion 16 follows the shape of the second electrode portion 18. It is not limited to the case. Hereinafter, other arrangement methods will be described.

FIG. 23 is a plan view of the piezoelectric sensor according to the fourteenth embodiment. 24 is a cross-sectional view taken along the line C-C ′ of FIG. 23.

As shown in FIG. 23, the first electrode portion 16 is laminated on the piezoelectric layer 11 across the plurality of second electrode portions 18. By configuring as described above, the number of overlapping portions of the first electrode portion 16 and the second electrode portion 18 is increased compared to the case of the thirteenth embodiment. As a result, the position detection accuracy and load detection accuracy when the input means contacts the piezoelectric sensor 10 are improved.

15. Fifteenth Embodiment Also in an aspect in which arrangement directions intersect, not only the upper electrode 12 and the lower electrode 13 but also the piezoelectric layer 11 may be patterned so as to have an active portion and an inactive portion.

25 and 26 are cross-sectional views of the piezoelectric sensor according to the fifteenth embodiment.

As shown in FIG. 25, the piezoelectric layer 11 includes an active piezoelectric portion 110 and an inactive piezoelectric portion 111.
The active piezoelectric portion 110 is a portion where electric charges are generated when a load is applied to the piezoelectric sensor 10. On the other hand, the inactive piezoelectric portion 111 is a portion where no charge is generated even when a load is applied.

25, the first pattern electrode 14 is stacked on the active piezoelectric portion 110, and the second pattern electrode 15 is stacked below the active piezoelectric portion 110 and the inactive piezoelectric portion 111. With such a configuration, it is possible to prevent electric charges generated near the first pattern electrode 14 from leaking and mixing into other first pattern electrodes 14 (a crosstalk phenomenon can be prevented). As a result, position detection accuracy and load detection accuracy are improved.

As shown in FIG. 26, the second pattern electrode 15 is laminated below the active piezoelectric portion 110, and the first pattern electrode 14 is laminated on the active piezoelectric portion 110 and the inactive piezoelectric portion 111. Also good. In the above description, an example in which the first pattern electrode 14 and the second pattern electrode 15 are directly laminated on the active piezoelectric portion 110 has been described. However, the active piezoelectric portion 110 or the active piezoelectric portion is interposed between the active piezoelectric portion 110 and the first pattern electrode 14. Between 110 and the 2nd pattern electrode 15, insulating materials, such as an adhesive agent and a film, may be laminated | stacked.

16. Sixteenth Embodiment In the tenth to fifteenth embodiments, the configuration in which the piezoelectric layer 11 is sandwiched between the upper electrode 12 and the lower electrode 13 has been described, but the reference electrode 40 is provided between the upper electrode 12 and the lower electrode 13. It may be provided.

FIG. 27 is a sectional view of the piezoelectric sensor according to the sixteenth embodiment.

As shown in FIG. 27, in the piezoelectric sensor 10 of the sixteenth embodiment, a reference electrode 40 is provided between the upper electrode 12 and the lower electrode 13. A first piezoelectric layer 11 a is provided between the upper electrode 12 and the reference electrode 40. Between the lower electrode 13 and the reference electrode 40, the second piezoelectric layer 11b is provided. The material of the first piezoelectric layer 11 a and the second piezoelectric layer 11 b is the same as that of the piezoelectric layer 11. The material of the reference electrode 40 is also the same as that of the upper electrode 12 and the lower electrode 13.
As described above, when the reference electrode 40 is provided between the upper electrode 12 and the lower electrode 13, the charges generated in the first piezoelectric layer 11 a and the second piezoelectric layer 11 b are independently generated by the upper electrode 12 and the lower electrode 13. Can be detected. As a result, the design of the detection circuit is simplified.

17. Seventeenth Embodiment (1) Overall Structure of Pressure Detection Device The overall structure of a pressure detection device according to a seventeenth embodiment of the present invention will be described with reference to FIG. FIG. 28 is a schematic view of a pressure detection device. 29 is a cross-sectional view taken along the line AA ′ in FIG.

As shown in FIG. 28, the pressure detection device 1 includes a piezoelectric sensor 10 and a detection unit 20. The piezoelectric sensor 10 is a device that generates an electric charge according to a given load. The detection unit 20 is a device that detects charges generated in the piezoelectric layer 11. Below, the structure of the pressure detection apparatus 1 is demonstrated in detail.

(2) Piezoelectric Sensor As shown in FIG. 29, the piezoelectric sensor 10 includes a piezoelectric layer 11, and an upper electrode (first electrode) 12 and a lower electrode (second electrode) 13 sandwiching the piezoelectric layer 11. The first electrode 12 is disposed on the first main surface side of the piezoelectric layer 11, and the second electrode 13 is disposed on the second main surface side opposite to the first main surface side of the piezoelectric layer 11. Although not shown, a reference electrode may be provided between the first electrode 12 and the second electrode 13.

As shown in FIG. 30, the first electrode 12 includes a first pattern electrode 120, a second pattern electrode 121, and a third pattern electrode 122. The electrode pattern is arranged in the Y-axis direction. Each of the pattern electrodes includes an L-type reference electrode 123 and an L-type electrode 124.
The L-type reference electrode 123 is disposed outside the L-type electrode 124 and has two sides. Of the two sides, the short side is arranged in the Y-axis direction, and the long side is arranged in the X-axis direction orthogonal to the Y-axis direction.

A plurality of L-type electrodes 124 are arranged inside the L-type reference electrode 123. The L-type electrode 124 includes a first L-type electrode 125, a second L-type electrode 126, and a third L-type electrode 127.

The short sides of the first L-type electrode 125 to the third L-type electrode 127 are arranged in the Y-axis direction, and the long sides are arranged in the X-axis direction. Further, the end of the short side of the L-type electrode 124 is disposed on an extension line of the end of the short side of the L-type reference electrode 123, and the end of the long side is the end of the long side of the L-type reference electrode 123. It is arranged on the extension line.

Note that the first L-type electrode 125 is disposed inside the L-type reference electrode 123. The second L-type electrode 126 is disposed inside the first L-type electrode 125. The third L-type electrode 127 is disposed inside the second L-type electrode 126.

As shown in FIG. 31, the second electrode 13 includes a plurality of strip electrodes. The strip electrode is composed of a first strip electrode 130, a second strip electrode 131, and a third strip electrode 132 arranged in the Y-axis direction. The strip electrode covers the electrode pattern of the first electrode portion 12 via the piezoelectric layer 11. That is, the first strip electrode 130 covers the first pattern electrode 120, the second strip electrode 131 covers the second pattern electrode 121, and the third strip electrode 132 covers the third pattern electrode 122.

In the above description, the example in which the first electrode 12 includes the three pattern electrodes from the first pattern electrode 120 to the third pattern electrode 122 has been described. However, the present invention is not limited to this. That is, the first electrode may include n (n = 1, 2, 3,...) Pattern electrodes. The same applies to the L-shaped electrode and the strip electrode.

(3) Electrode The 1st electrode 12 and the 2nd electrode 13 can be comprised with the material which has the same electroconductivity as having shown in "1. 1st Embodiment."

(4) Piezoelectric layer Examples of the material constituting the piezoelectric layer 11 include inorganic piezoelectric materials and organic piezoelectric materials similar to those described in “1. First embodiment”.

When the pressure detection device 1 is arranged on a display device such as a liquid crystal device or an organic EL device, the piezoelectric layer is made of a transparent material so that the display of the display device can be seen, or It is preferable that the thickness be thin enough to transmit light sufficiently.

(5) Detection Unit As shown in FIG. 28, the detection unit 20 includes a first detection unit 21 and a second detection unit 22. As shown in FIG. 30 again, the first detection unit 21 includes an L-type reference electrode detection unit 210, a first L-type electrode detection unit 211, a second L-type electrode detection unit 212, and a third L-type electrode detection unit 213. Become. The L-type reference electrode detection unit 210 is connected to each L-type reference electrode 123. Similarly, the first L-type electrode detector 211 is connected to each first L-type electrode 125, the second L-type electrode detector 212 is connected to each second L-type electrode 126, and the third L-type electrode detector 213 is Are connected to each third L-type electrode 127.

When configured as described above, the L-type reference electrode detector 210 can detect charges generated in the piezoelectric layer 11 disposed under the L-type reference electrode 123 when the piezoelectric layer 11 is pressed. Regarding the charges generated in the piezoelectric layer 11 disposed below the first L-type electrode 125, the second L-type electrode 126, and the third L-type electrode 127, the first L-type electrode detection unit 211, the second L-type electrode detection unit 212, It can be detected by the third L-type electrode detector 213.

Again, as shown in FIG. 31, the second detection unit 22 includes a first strip electrode detection unit 220, a second strip electrode detection unit 221, and a third strip electrode detection unit 222. The first strip electrode detector 220 is connected to the first strip electrode 130. Similarly, the second strip electrode detector 221 is connected to the second strip electrode 131, and the third strip electrode detector 222 is connected to the third strip electrode 132.

When configured as described above, the first strip electrode detection unit 220 can detect the charge generated in the piezoelectric layer 11 disposed below the first strip electrode 130 when the piezoelectric layer 11 is pressed. The charges generated in the piezoelectric layer 11 disposed below the second strip electrode 131 and the third strip electrode 132 can be detected by the second strip electrode detector 221 and the third strip electrode detector 222, respectively.

As described above, when the pressure detection apparatus 1 is configured, as shown in FIG. 30 again, in the X1 region in the X-axis direction, the L-type reference electrode 123, the first L-type electrode 125, the second L-type electrode 126, A third L-type electrode 127 is disposed. An L-type reference electrode 123, a first L-type electrode 125, and a second L-type electrode 126 are arranged in the X2 region, and an L-type reference electrode 123 and a first L-type electrode 125 are arranged in the X3 region. An L-type reference electrode 123 is disposed in the X4 region. The L-type reference electrode 123 is connected to the L-type reference electrode detection unit 210, the first L-type electrode 125 is connected to the first L-type electrode detection unit 210, and the second L-type electrode 126 is connected to the second L-type electrode detection unit. The third L-type electrode 127 is connected to the second L-type electrode detection unit 222.

Therefore, when a load is applied to the X1 region, the charge generated by the load is transferred to the L-type reference electrode 123, the first L-type electrode 125, the second L-type electrode 126, and the third L-type electrode 127. The detection is performed by four detection units: a type reference electrode detection unit 210, a first L type electrode detection unit 211, a second L type electrode detection unit 212, and a third L type electrode detection unit 213.

When a load is applied to the X2 region, the L-type reference electrode detection unit 210 and the first L-type electrode detection unit 211 pass through the L-type reference electrode 123, the first L-type electrode 125, and the second L-type electrode 126. The charge is detected by the three detection units of the second L-type electrode detection unit 212.

When a load is applied to the X3 region, charges are passed through the L-type reference electrode 123 and the first L-type electrode 125 through the L-type reference electrode detection unit 210 and the first L-type electrode detection unit 211. Is detected.

When a load is applied to the X4 region, the charge is detected by one detection unit of the L-type reference electrode detection unit 210 via the L-type reference electrode 123.

That is, in the X-axis direction, the number of detection units that detect electric charges differs depending on the portion where the load is applied. Using this difference, the position in the X-axis direction at the position where the load is applied can be specified.

Further, with the above configuration, as shown in FIG. 31, the first strip electrode 130 is disposed in the Y1 region in the Y-axis direction, the second strip electrode 131 is disposed in the Y2 region, and the Y3 region. The third belt-like electrode 132 is disposed. The first strip electrode 130, the second strip electrode 131, and the third strip electrode 132 are connected to the first strip electrode detection unit 220, the second strip electrode detection unit 221, and the third strip electrode detection unit 222, respectively.

Therefore, when a load is applied to the Y1 region, the charge generated by the load is detected by the first strip electrode detection unit 220 via the first strip electrode 130. When a load is applied to the Y2 region, it is detected by the second strip electrode detection unit 221 via the second strip electrode 131. When a load is applied to the Y3 region, the load is applied via the third strip electrode 132. , And is detected by the third strip electrode detector 222.

That is, in the Y-axis direction, the type of detection unit that detects the charge differs depending on the portion where the load is applied. Using this difference, the position in the Y-axis direction at the position where the load is applied can be specified.

Finally, by combining the position information in the X-axis direction and the Y-axis direction detected above, it is possible to specify the position where the load is applied.

In addition, the detection of the load amount is obtained from the total of detected charges. The method of obtaining the load amount from the charge amount can be achieved by programming a conversion method in advance for detection. Accordingly, it is possible to specify the position and amount of load applied to the piezoelectric sensor.

Thus, the first electrode 11 constituting the piezoelectric sensor 10 includes the L-type reference electrode 123 and the L-type electrode 124, and the L-type electrode 124 is spaced from the two sides of the L-type reference electrode 123 inward. And the number of the L-type reference electrode 123 and the L-type electrode 124 to be arranged varies depending on the position in the X-axis direction. ing.
That is, when a load is applied to an arbitrary portion of the piezoelectric sensor 10, the number of the first detection units 21 that detect charges is a unique number depending on the position in the X-axis direction to which the load is applied. By detecting, the position of the applied load in the X-axis direction can be specified.

The second electrode 12 constituting the piezoelectric sensor 10 includes a plurality of strip electrodes covering the L-type reference electrode 123 and the L-type electrode 124, and the strip electrodes are independently connected to the respective strip electrode detection units. . As a result, the position in the Y-axis direction where the load is applied can be specified by the type of the strip-shaped electrode detection unit that detects charges.

Therefore, by combining the detection results of the first electrode and the second electrode, it is possible to specify the position where the load is applied.

In addition, the detection of the applied load amount obtains the applied load from the total of the detected charges. The method of obtaining the load amount from the charge amount is achieved by programming a conversion method in advance for detection.

Therefore, by configuring as described above, the pressure detection device of the present application can detect the position and amount of the applied load when the load is applied.

18. Eighteenth Embodiment In the seventeenth embodiment, the piezoelectric sensor includes a piezoelectric layer, a first electrode, and a second electrode, the first electrode includes an L-type reference electrode and an L-type electrode, and the second electrode includes a strip electrode. I was prepared. However, the first electrode may include a strip electrode, and the second electrode may include a staircase electrode. Below, the strip | belt-shaped electrode with which a 1st electrode is provided, and the staircase electrode with which a 2nd electrode is provided are demonstrated.

FIG. 32 is a plan view of the pressure detection device 1 according to the eighteenth embodiment. 33 is a cross-sectional view taken along the line B-B ′ in FIG. 32.

32, the pressure detection device 1 includes a piezoelectric sensor 10, a first detection unit 21, and a second detection unit 22. The piezoelectric sensor 10 includes a piezoelectric layer 11, a first electrode 12, and a second electrode 13. The first electrode 12 is disposed on the first main surface side of the piezoelectric layer 11, and the second electrode 13 is disposed on the second main surface side opposite to the first main surface side of the piezoelectric layer 11. The first detection unit 21 includes a first strip electrode detection unit 250, a second strip electrode detection unit 251, and a third strip electrode detection unit 252. The second detection unit 22 includes a first staircase electrode detection unit 260, a second staircase electrode detection unit 261, and a third staircase electrode detection unit 262.

As shown in FIG. 34, the first electrode 12 includes a first strip pattern electrode 200, a second strip pattern electrode 201, and a third strip pattern electrode 202 arranged in the Y-axis direction. The strip pattern electrode includes a first strip electrode 150, a second strip electrode 151, and a third strip electrode 152 arranged in the Y-axis direction. The first strip electrode 150 of each strip pattern electrode is connected to the first strip electrode detector 250. The second strip electrode 151 and the third strip electrode 152 of each strip pattern electrode are connected to the second strip electrode detector 251 and the third strip electrode detector 252, respectively.

As shown in FIG. 35, the second electrode 13 includes stepped step electrodes arranged in the Y-axis direction. The staircase electrode includes a first staircase electrode 160, a second staircase electrode 161, and a third staircase electrode 162. Each step electrode includes a stepped portion 163, a stepped portion 164, and an L-shaped portion 165. The stepping portion 163 is arranged in a direction parallel to the strip electrode in plan view. That is, the stepping portion 163 is located above the first strip electrode 150, between the first strip electrode 150 and the second strip electrode 151, between the second strip electrode 151 and the third strip electrode 152, and the third strip electrode 152. It is arranged below at an interval. The stepped portion 164 is disposed in a direction intersecting with the strip electrode and connects the stepped portions 163. The L-shaped portion 165 has an L-shaped shape that connects the start point of the stepping portion 163 and the end point of the stepped portion 164. The first staircase electrode 160 is independent of the first staircase electrode detector 260, the second strip electrode 161 is independent of the second staircase electrode detector 261, and the third strip electrode 162 is independent of the third staircase electrode detector 262. Connected.

The strip electrode and the staircase electrode are arranged such that the first strip electrode 150, the second strip electrode 151, and the third strip electrode 152 of the strip electrode intersect the stepped portion 164 of the staircase electrode.

As shown in FIG. 34, when configured as described above, in the X1 region in the X-axis direction, the first strip electrode 150, the second strip electrode 151, and the third strip electrode 152 of each strip pattern electrode are The first step electrode 160, the second step electrode 161, and the third step electrode 162 overlap.
In the X2 region, the second strip electrode 151 and the third strip electrode 152 of each strip pattern electrode overlap the first step electrode 160, the second step electrode 161, and the third step electrode 162.
In the X3 region, the third strip electrode 152 of each strip pattern electrode overlaps the first step electrode 160, the second step electrode 161, and the third step electrode 162.

Therefore, when a load is applied to the X1 region, the charge generated by the load is transmitted through the first strip electrode 150, the second strip electrode 151, and the third strip electrode 152 of each strip pattern electrode. Detection is performed by the detection unit 250, the second strip electrode detection unit 251, and the third strip electrode detection unit 252.

When a load is applied to the X2 region, the charge is detected by the second strip electrode detector 251 and the third strip electrode detector 252 via the second strip electrode 151 of each strip pattern electrode and the third strip electrode 152. Is done.

When a load is applied to the X3 region, the load is detected by the third strip electrode detection unit 252 via the third strip electrode 152 of each strip pattern electrode.

As shown in FIG. 35, the first staircase electrode 160 is disposed in the Y1 region in the Y-axis direction, the second staircase electrode 161 is disposed in the Y2 region, and the third staircase electrode 162 is disposed in the Y3 region. Has been.

Therefore, when a load is applied to the Y1 region, the charge generated by the load is detected by the first staircase electrode detection unit 260 via the first staircase electrode 160. When a load is applied to the Y2 region, it is detected by the second staircase electrode detector 261 via the second staircase electrode 161. When a load is applied to the Y3 region, the load is applied via the third staircase electrode 162. , Detected by the third staircase electrode detector 262.

Thus, the piezoelectric sensor 10 includes the piezoelectric layer 11, the first electrode 12, and the second electrode 13, and the first electrode 12 and the second electrode 13 are connected to the first main surface side of the piezoelectric layer 11 and the first electrode. The first electrode 12 is disposed on the second seed surface side, and includes a band-shaped pattern electrode that is arranged in the Y-axis direction and includes a plurality of band-shaped electrodes (first band-shaped electrode 150, second band-shaped electrode 151, and third band-shaped electrode 152). The second electrode 13 connects the plurality of stepped portions 163 and the stepped portions 163 and intersects with the strip electrodes (the first strip electrode 150, the second strip electrode 151, the third strip electrode 152) in a one-to-one correspondence. A stepped staircase electrode having a plurality of stepped portions 164 and an L-shaped connecting portion 165 connecting the start point of the stepped portion 163 and the end point of the stepped portion 164 (first stepped electrode 160, second stepped electrode 161, By providing the three-step electrode 162) Depending on the position in the axial direction, strip electrodes (the first strip electrode 150, the second strip electrode 151, the third strip electrode 152) and the stair electrodes (the first stair electrode 160, the second stair electrode 161) which overlap through the piezoelectric layer 11 are arranged. The number of the third staircase electrodes 162) is different.

That is, when a load is applied to a specific portion of the piezoelectric sensor 10, the number of the first detection units 21 that detect charges is a unique number depending on the position in the X-axis direction to which the load is applied. By doing so, the position of the applied load in the X-axis direction can be specified.

Further, by being configured as described above, a plurality of staircase electrodes are arranged in the Y-axis direction, and the staircase electrodes are independently connected to the respective staircase electrode detectors. As a result, the position in the Y-axis direction where the load is applied can be specified by the type of the strip-shaped electrode detection unit that detects charges.

19. Nineteenth Embodiment The piezoelectric layer 11 may be patterned so as to have an active portion and an inactive portion.

FIG. 36 is a cross-sectional view of the piezoelectric sensor according to the nineteenth embodiment.

As shown in FIG. 36, the piezoelectric layer 11 includes an active piezoelectric portion 110 and an inactive piezoelectric portion 111.
The active piezoelectric portion 110 is a portion where electric charges are generated when a load is applied to the piezoelectric sensor 10. On the other hand, the inactive piezoelectric portion 111 is a portion where no charge is generated even when a load is applied.

36, the L-type reference electrode 123 and the L-type electrode 124 (the first L-type electrode 125, the second L-type electrode 126, and the third L-type electrode 127) are disposed on the upper surface of the active piezoelectric portion 110. On the lower surfaces of the active piezoelectric part 110 and the inactive piezoelectric part 111, a first strip electrode 130 is disposed. With this configuration, it is possible to prevent electric charges generated near the L-type reference electrode 123 from leaking and mixing into the L-type electrode 124 (a crosstalk phenomenon can be prevented). As a result, position detection accuracy and load detection accuracy are improved. In FIG. 36, an example in which the L-type reference electrode 123 and the L-type electrode 124 are directly laminated on the active piezoelectric portion 110 is shown, but between the active piezoelectric portion 110 and the L-type reference electrode 123, or An insulating material such as an adhesive or a film may be laminated between the active piezoelectric portion 110 and the L-type electrode 124.

20. Other Embodiments In the first to nineteenth embodiments, an example in which the position and amount of a given load is detected by the piezoelectric sensor 10 has been described. However, as shown in FIG. 37, the position and amount of the applied load may be detected by laminating the touch panel 50 on the piezoelectric sensor 10.
By laminating the touch panel 50 on the piezoelectric sensor 10, even if the applied load is so small that it cannot be detected by the piezoelectric sensor 10 (in the case of feather touch), the load is obtained by laminating the touch panel 50 on the piezoelectric sensor 10. Can be detected. Of the touch panels, it is particularly preferable to use a capacitive touch panel.

1: Pressure detection device 10: Piezoelectric sensor 11: Piezoelectric layer 11a: First piezoelectric layer 11b: Second piezoelectric layer 12: Upper electrode (first electrode)
13: Lower electrode (second electrode)
14: 1st pattern electrode 15: 2nd pattern electrode 16: 1st electrode part 17: 1st connection part 18: 2nd electrode part 19: 2nd connection part 20: Detection part 30: Control part 40: Reference electrode
50: Capacitance type touch panel 110: Active piezoelectric unit 111: Inactive piezoelectric unit S: Switch L: Pitch interval of first pattern electrodes l: Pitch interval of first pattern electrodes W: Fixing member 21: First detection unit 22 : Second detection unit 120: first pattern electrode 121: second pattern electrode 122: third pattern electrode 123: L-type reference electrode 124: L-type electrode 125: first L-type electrode 126: second L-type electrode 127: third L Type electrode 130: First strip electrode 131: Second strip electrode 132: Third strip electrode 150: First strip electrode 151: Second strip electrode 152: Third strip electrode 160: First step electrode 161: Second step electrode 162: Third step electrode 163: Step portion 164: Stepped portion 165: L-shaped portion 200: First strip pattern electrode 201: Second strip pattern electrode 202: Third Band-shaped pattern electrode 210: L-type reference electrode detection unit 211: First L-type electrode detection unit 212: Second L-type electrode detection unit 213: Third L-type electrode detection unit 220: First band-shaped electrode detection unit 221: Second band-shaped electrode detection Unit 222: Third strip electrode detector 250: First strip electrode detector 251: Second strip electrode detector 252: Third strip electrode detector 260: First stair electrode detector 261: Second stair electrode detector 262 : Third staircase electrode detector

Claims

A piezoelectric sensor in which a piezoelectric layer is sandwiched between an upper electrode and a lower electrode,
A piezoelectric sensor in which at least one of the upper electrode and the lower electrode has a plurality of electrode patterns.
The upper electrode is
A plurality of first pattern electrodes extending in one direction;
The lower electrode is
The piezoelectric sensor according to claim 1, comprising a plurality of second pattern electrodes extending in the same direction as the first pattern electrodes.
A piezoelectric sensor in which a piezoelectric layer is sandwiched between an upper electrode and a lower electrode,
The upper electrode is
A plurality of first pattern electrodes extending in one direction;
The lower electrode is
A piezoelectric sensor comprising a plurality of second pattern electrodes extending in another direction intersecting with the one direction.
The first pattern electrode is
A plurality of first electrode portions stacked on the piezoelectric layer at intervals;
A first connection part that is formed between the adjacent first electrode parts and electrically connects the first electrode parts;
The second pattern electrode is
A plurality of second electrode portions stacked under the piezoelectric layer so as to overlap the first electrode portion;
The piezoelectric sensor according to any one of claims 2 to 3, further comprising a second connection portion that electrically connects the second electrode portions.
The piezoelectric sensor according to claim 4, wherein the first electrode portion is disposed so as to overlap a plurality of the second electrode portions with the piezoelectric layer interposed therebetween.
The piezoelectric sensor according to any one of claims 2 to 5, wherein the first pattern electrode has a strip shape.
The piezoelectric sensor according to any one of claims 2 to 6, wherein the second pattern electrode has a strip shape.
The piezoelectric sensor according to any one of claims 2 to 7, wherein the size of the first pattern electrode in the width direction increases as it approaches the periphery of the piezoelectric layer.
The piezoelectric sensor according to any one of claims 2 to 8, wherein the size of the second pattern electrode in the width direction increases as it approaches the periphery of the piezoelectric layer.
10. The piezoelectric sensor according to claim 2, wherein a pitch interval of the first pattern electrodes is constant.
The piezoelectric sensor according to any one of claims 2 to 10, wherein a pitch interval between the second pattern electrodes is constant.
The first pattern electrode has a concavo-convex shape, the first pattern electrode is disposed such that the convex and concave portions of the concavo-convex shape are engaged with each other, and the pitch interval of the first pattern electrodes The piezoelectric sensor according to any one of claims 2 to 11, which is shorter than a length of a short diameter of a contact surface formed when the input means comes into contact with the piezoelectric sensor.
The second pattern electrode has a concavo-convex shape, the second pattern electrode is arranged such that the convex and concave portions of the concavo-convex shape are engaged with each other, and the pitch interval of the second pattern electrodes The piezoelectric sensor according to any one of claims 2 to 12, which is shorter than the length of the short diameter of the contact surface formed when the input means comes into contact with the piezoelectric sensor.
14. The piezoelectric sensor according to claim 2, wherein the piezoelectric layer includes an active piezoelectric portion and an inactive piezoelectric portion, and the first pattern electrode is laminated on the active piezoelectric portion.
14. The piezoelectric sensor according to claim 2, wherein the piezoelectric layer includes an active piezoelectric portion and an inactive piezoelectric portion, and the second pattern electrode is laminated on the active piezoelectric portion.
The piezoelectric layer is
A first piezoelectric layer in contact with the upper electrode;
A second piezoelectric layer in contact with the lower electrode,
The piezoelectric sensor according to any one of claims 1 to 15, further comprising a reference electrode between the first piezoelectric layer and the second piezoelectric layer.
The piezoelectric sensor according to any one of claims 1 to 16, wherein the upper electrode includes indium tin oxide or polyethyldioxothiophene.
The piezoelectric sensor according to any one of claims 1 to 17, wherein the lower electrode contains indium tin oxide or polyethyldioxothiophene.
The piezoelectric sensor according to any one of claims 1 to 18, wherein the piezoelectric layer is made of an organic piezoelectric material.
The piezoelectric sensor according to claim 19, wherein the organic piezoelectric material contains polyvinylidene fluoride or polylactic acid.
The piezoelectric sensor according to any one of claims 1 to 18, wherein the piezoelectric layer is made of an inorganic material.
A pressure detection device comprising: a piezoelectric sensor having a piezoelectric layer sandwiched between a first electrode and a second electrode; a first detection unit connected to the first electrode; and a second detection unit connected to the second electrode. Because
The first electrode is
An L-shaped L-type reference electrode having two sides combined and a plurality of L-type reference electrodes arranged inward from the two sides of the L-type reference electrode. An L-shaped L-shaped electrode having a side and a pattern electrode arranged in one direction;
The second electrode is
A strip electrode covering the pattern electrode;
The first detection unit includes:
An L-type reference electrode detector connected to the L-type reference electrode of the pattern electrode;
An L-type electrode detector connected to the L-type electrode of the pattern electrode,
The second detector is
A pressure detection device comprising a strip electrode detector connected to the strip electrode.
A pressure detection device comprising: a piezoelectric sensor having a piezoelectric layer sandwiched between a first electrode and a second electrode; a first detection unit connected to the first electrode; and a second detection unit connected to the second electrode. Because
The first electrode includes a strip-shaped pattern electrode composed of a plurality of strip-shaped electrodes arranged in one direction,
The second electrode is
A plurality of stepped portions, a plurality of stepped portions connecting the stepped portions, a plurality of stepped portions intersecting with the plurality of strip-like electrodes in a one-to-one correspondence, and an L-shape connecting a start point of the stepped portion and an end point of the stepped portion With a connection of
The first detection unit includes a strip electrode detection unit connected to each strip electrode of the strip pattern electrode,
A 2nd detection part is a pressure detection apparatus provided with the some strip | belt-shaped electrode detection part each connected with the said some staircase electrode.
A pressure detection device in which a touch panel is laminated on the piezoelectric sensor according to any one of claims 1 to 23.
25. The pressure detection device according to claim 24, wherein the touch panel is a capacitance type.