WO2004068651A2 - Systeme laser - Google Patents

Systeme laser Download PDF

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Publication number
WO2004068651A2
WO2004068651A2 PCT/EP2004/000672 EP2004000672W WO2004068651A2 WO 2004068651 A2 WO2004068651 A2 WO 2004068651A2 EP 2004000672 W EP2004000672 W EP 2004000672W WO 2004068651 A2 WO2004068651 A2 WO 2004068651A2
Authority
WO
WIPO (PCT)
Prior art keywords
laser
laser system
resonator
amplifier
pulse
Prior art date
Application number
PCT/EP2004/000672
Other languages
German (de)
English (en)
Other versions
WO2004068651A3 (fr
Inventor
Angelika Beyertt
Adolf Giesen
Detlef Nickel
Original Assignee
Forschungsgesellschaft Für Strahlwerkzeuge-Fgsw -Mbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungsgesellschaft Für Strahlwerkzeuge-Fgsw -Mbh filed Critical Forschungsgesellschaft Für Strahlwerkzeuge-Fgsw -Mbh
Publication of WO2004068651A2 publication Critical patent/WO2004068651A2/fr
Publication of WO2004068651A3 publication Critical patent/WO2004068651A3/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/23—Arrangements of two or more lasers not provided for in groups H01S3/02 - H01S3/22, e.g. tandem arrangements of separate active media
    • H01S3/2308—Amplifier arrangements, e.g. MOPA
    • H01S3/2325—Multi-pass amplifiers, e.g. regenerative amplifiers
    • H01S3/235—Regenerative amplifiers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/10007—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers
    • H01S3/10023—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating in optical amplifiers by functional association of additional optical elements, e.g. filters, gratings, reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S2301/00—Functional characteristics
    • H01S2301/08—Generation of pulses with special temporal shape or frequency spectrum
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/0602—Crystal lasers or glass lasers
    • H01S3/0604—Crystal lasers or glass lasers in the form of a plate or disc
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08004—Construction or shape of optical resonators or components thereof incorporating a dispersive element, e.g. a prism for wavelength selection

Definitions

  • the invention relates to a laser system for generating laser pulses, comprising a seed laser and a regenerative amplifier, in which an amplifier laser pulse generated from a seed laser pulse of the seed laser can be amplified by multiple rotations, the regenerative amplifier having a resonator and an in Controllable coupling element arranged in the resonator and a solid-state disk with laser-active medium arranged in the resonator.
  • the invention is therefore based on the object of improving a laser system of the generic type in such a way that outcoupled laser pulses in the picosecond or sub-picosecond range can be generated as simply as possible.
  • This object is achieved according to the invention in a laser system of the type described in the introduction in that at least one dispersion compensation element with negative dispersion penetrated by the multiple revolving amplifier laser pulse in each revolution is provided in the resonator for generating outcoupled laser pulses in the region of less than five picoseconds, one of which is provided counteracts pulse duration increase by positive dispersion of components of the regenerative amplifier.
  • the at least one dispersion compensation element provided directly in the resonator makes it possible to compensate for the effect of the positive dispersion which increases or lengthens the pulse duration, so that the decoupled laser pulse itself already exists in the picosecond or sub-picosecond range and thus has the desired short pulse duration.
  • the positive dispersion causing a pulse duration increase in the amplifier laser pulse in each revolution can also be compensated for in the revolution itself, so that with each revolution the pulse duration increase occurring during this revolution can also be counteracted by positive dispersion and thus the required negative dispersion of the at least one dispersion compensation element does not have to be so large that it compensates for the sum of the pulse duration increases occurring in all round trips, but only has to be so large that it counteracts the pulse duration increase occurring during each round trip by positive dispersion of the amplifier laser pulse ,
  • the laser system according to the invention operates in the range of less than five picoseconds.
  • the advantages of the system according to the invention become particularly clear when it is intended for generating laser pulses in the sub-picosecond range, since even in the sub-picosecond range, even a small amount of dispersion leads to a time widening of the laser pulses in the resonator in the case of a large number of circulations of a laser pulse to be amplified, which leads them out of the sub-picosecond range.
  • the at least one dispersion compensation element essentially compensates for a positive dispersion of optical resonator components in each revolution of the amplifier laser pulse in the resonator, so that an increase in pulse duration can be substantially avoided with each revolution and thus the increase in the pulse duration of the decoupled Laser pulse is essentially independent of the number of revolutions in the resonator of the regenerative amplifier.
  • the at least one dispersion compensation element essentially compensates for a positive dispersion of the controllable coupling element.
  • the at least one dispersion compensation element is designed as an interferometer.
  • interferometers are preferably Gires Tournois interferometers, which are known from the literature.
  • the pair of prisms is preferably formed from Brewster prisms which have particularly low optical losses.
  • the dispersion compensation elements In order to be able to manufacture and use the dispersion compensation elements as simply as possible, provision is preferably made for the dispersion compensation elements to be arranged in the resonator at a plurality of points in the radiation profile.
  • the tuning can be set, for example, by selecting the number and the corresponding negative dispersion of the dispersion compensation elements, for example instead of conventional reflectors, the reflectors already present in the resonator, for example those without dispersion, possibly using reflectors with a suitable negative dispersion, which in this case are then act as dispersion compensation elements, can be replaced.
  • diameters of the radiation field in the resonator can be realized, which allow the laser system to be essentially free of positive dispersion elements arranged in front of the resonator for increasing the pulse duration, so that the laser amplifier pulses circulating in the resonator also have pulse durations which are in the order of magnitude of the coupled-in seed laser pulse, in particular are essentially identical to it.
  • a polarization-rotating coupling element preferably a Pockels cell, is provided as the controllable coupling element.
  • an optical isolator is preferably provided following the seed laser, in particular between the seed laser and the regenerative amplifier.
  • a mode adaptation unit is arranged between the seed laser and the regenerative amplifier, which allows the mode of the seed laser to be adapted to the mode of the regenerative amplifier, in particular the resonator thereof.
  • a pulse separator is preferably provided between the seed laser and the regenerative amplifier in order to be able to advantageously couple the outcoupled laser pulse and, in particular, to largely avoid a reaction on the seed laser.
  • Such a pulse separator can be arranged particularly favorably between the mode adaptation device and the regenerative amplifier, so that the decoupled laser pulse emerges directly with the mode of the amplifier laser pulse in the resonator and no longer runs over the mode adaptation device and undergoes a change in it.
  • the optical isolator which represents additional protection for the seed laser against any retroactive laser pulses, is preferably also provided between the mode adaptation device and the seed laser.
  • the pulse separator is constructed so that it has a polarizer and an optical rotator.
  • the polarizer is preferably designed as a thin-film polarizer.
  • An advantageous exemplary embodiment provides that the laser system generates outcoupled laser pulses with a repetition rate of several kilohertz.
  • This laser system is particularly advantageous when it generates outcoupled laser pulses with a repetition rate of more than five kilohertz.
  • the laser system according to the invention is particularly suitable for all those applications in which a high number of revolutions in the resonator is required for amplification.
  • the decoupling element can be controlled by a control such that the Amplifier laser pulses are only decoupled from the resonator after at least twenty revolutions, even better only after at least fifty revolutions, and even better only after more than one hundred revolutions.
  • the maximum energy density per amplifier laser pulse is less than one hundred millijoules per square centimeter, even better less than fifty millijoules per square centimeter and even better less than thirty Is millijoules per square centimeter, so that high powers have the consequence that these are to be distributed over a large cross section of an amplifier radiation field.
  • Fig. 1 is a schematic representation of a first embodiment of the laser system according to the invention in plan view and
  • FIG. 2 shows a schematic illustration of a second exemplary embodiment of the laser system according to the invention similar to FIG. 1.
  • An embodiment of a laser system according to the invention shown in FIG. 1, comprises a seed laser 10, which is preferably designed as a diode-pumped ytterbium glass laser oscillator or ytterbium tungsten laser oscillator and is passively mode-locked.
  • a seed laser 10 which is preferably designed as a diode-pumped ytterbium glass laser oscillator or ytterbium tungsten laser oscillator and is passively mode-locked.
  • the mode coupling is preferably carried out by a saturable semiconductor absorber mirror.
  • the seed laser 10 operates, for example, with a repetition rate of more than 20 MHz, and generates seed laser pulses 20 limited by the time bandwidth with a pulse duration of approximately 300 femtoseconds.
  • the wavelengths of the seed laser 10 are in the range of, for example, 1000 to 1100 nanometers with pulse energies in the order of 1 nanojoule.
  • an optical isolator designated as a whole by 12
  • Faraday isolator 14 which prevents reflected laser pulses from acting back on the seed laser 10 and disturbing it.
  • a ⁇ / 2 plate 16 is provided for polarization rotation.
  • the seed laser pulse 20 leaving the seed laser 10 is preferably coupled into the optical isolator 12 by deflecting mirrors 22 and 24 and passes through it.
  • a photodiode 26 and a spectrometer 28 are provided for monitoring the function of the seed laser 10, with which a laser pulse 30 coupled out parasitically to the seed laser pulse 20 can be analyzed.
  • the laser system is preferably triggered by means of the photodiode 26.
  • a pulse selector 32 is preferably provided, which in particular includes a Pockels cell 34 comprises a polarizer 36, the Pockels cell being driven accordingly for pulse selection.
  • the seed laser pulse 20 decoupled from the seed laser 10 passes through a mode adaptation unit 40, preferably designed as a telescope with, for example, three telescope mirrors 42, 44, 46, with which an adaptation to a mode described in detail below Resonators 50 takes place.
  • the seed laser pulse 20 Before entering the resonator, the seed laser pulse 20 passes through a pulse separator 52, comprising a thin-film polarizer 54, a Faraday rotator 56 and a ⁇ / 2 plate 58, which serve to separate the seed laser pulse 20 entering the resonator 50 from one Laser pulse 70 decoupled from the resonator 50 later, as described in detail below.
  • a pulse separator 52 comprising a thin-film polarizer 54, a Faraday rotator 56 and a ⁇ / 2 plate 58, which serve to separate the seed laser pulse 20 entering the resonator 50 from one Laser pulse 70 decoupled from the resonator 50 later, as described in detail below.
  • the seed laser pulse 20 is coupled into the resonator 50 via an adjusting unit 66, comprising, for example, two mirrors 62 and 64, with the penetration of a thin-film polarizer 68 belonging to the resonator 50, via which the seed laser pulse is coupled 20 takes place in the resonator 50, the seed laser pulse 20 circulating several times as an amplifier laser pulse 60 in the resonator 50 and being amplified until the amplifier laser pulse 60 is decoupled as a laser pulse 70 from the resonator 50.
  • an adjusting unit 66 comprising, for example, two mirrors 62 and 64, with the penetration of a thin-film polarizer 68 belonging to the resonator 50, via which the seed laser pulse is coupled 20 takes place in the resonator 50, the seed laser pulse 20 circulating several times as an amplifier laser pulse 60 in the resonator 50 and being amplified until the amplifier laser pulse 60 is decoupled as a laser pulse 70 from the resonator 50.
  • the resonator 50 comprises a first end mirror 72, a second end mirror 74 and a laser-active medium 76 in the form of a thin disk, which can be cooled by a cooling device 78, as described, for example, in European Patent 0 632 551, to which reference is hereby made.
  • a Pockels cell 80 is arranged in the resonator 50 between the thin-film polarizer 68 and the first end mirror 72 as a coupling element and can be controlled by a control 82, for example a so-called push / pull circuit, the control 82 generating a trigger signal from one of the end mirrors 74 assigned photodiode 75 and preferably also the photodiode 26.
  • the Pockels cell 80 is further combined with a so-called ⁇ / 4 plate 84.
  • the amplifier laser pulse 60 is reflected at the first end mirror 72, passes through the Pockels cell 80 and the ⁇ / 4 plate 84 again and is thereby, when this amplifier laser pulse 60 is to be amplified in the resonator 50, by the coupling / decoupling element 68 not transmitted again as a decoupled laser pulse 70 in the direction of the pulse separator 52, but reflected to a deflecting mirror 86, reflected by the latter to a deflecting mirror 88 and then penetrating, for example, a ⁇ / 2 plate 90 provided for polarization rotation.
  • the amplifier laser pulse 60 After passing through the ⁇ / 2 plate 90, the amplifier laser pulse 60 strikes the laser-active medium 76, which in turn is provided on the back with a reflector 92, which again amplifies the laser pulse 60 on a deflecting mirror 94 and on a deflecting mirror 96, which in turn deflects onto a deflecting mirror 98, from which the amplifier laser pulse 60 then strikes the second end mirror 74 and is reflected back by the latter.
  • the amplifier laser pulse 60 was amplified twice by the laser-active medium 76 before it reached the second end mirror 74.
  • the Pockels cell 80 is now controlled by the control unit 82 in such a way that the originally coupled seed laser pulse 20 passes through the resonator 50 more than about 100 times, even better more than about 150 times and more, and is thereby amplified.
  • Laser pulse can be a multiple of the pulse duration of the seed laser pulse 20.
  • the pulse duration can be broadened by a factor of 10 or more.
  • dispersion compensation elements penetrated by the rotating amplifier laser pulse 60 are provided directly in the resonator 50, which have a negative dispersion compensating for a positive dispersion of the individual elements of the resonator 50, in particular a dispersion of the Pockels cell 80.
  • Such dispersion compensation elements are, for example, the first end mirror 72, the deflection element 86 and the deflection element 98, which are designed as so-called Gires Tournois interferometer mirrors, which together allow compensation of the positive dispersion generated by the Pockels cell.
  • Gires Tournois interferometer mirrors are for example from the article by F. Gires and P. Tournois, Comt. Rend. Acad. Be. (Paris) 258, 6112 (1964).
  • the corresponding activation of the Pockels cell 80 via the coupling / decoupling element 68 decouples the amplifier laser pulse 60 in the form of the decoupled laser pulse 70, which then passes through the adjusting device 66 and the pulse separator 52 and through the thin-film polarizer 54 thereof is reflected and thus strikes a substrate 110, for example for material processing.
  • the Pockels cell 80 is preferably operated with cycles whose frequency is several kilohertz, preferably between 1 and 10 kHz or even possibly even more in order to obtain a high repetition rate of the outcoupled laser pulse 70.
  • all materials are suitable as laser-active medium for the solid-state disk 76 which, with a maximum thickness of the solid-state disk of 0.5 mm, have a reinforcement of at least 5% per double passage through the reinforcing material, that is to say through the solid-state disk, and the bandwidth of the generation of laser pulses shorter than 10 picoseconds allowed.
  • the laser active medium 76 in the form of a disc less than 0.5 mm thick is preferably Yb-KYW, but there are also similar materials, such as Yb: KGW or Yb: YAG or Yb doped sesquioxides e.g. Lutetium oxide, or semiconductor materials are suitable.
  • the thickness of the disk of the laser-active medium is, for example, approximately in the order of magnitude of less than 300 ⁇ m and in particular is in the order of approximately 100 ⁇ m, and the doping of the laser-active medium is, for example, less than 20%, preferably in the order of approximately 10% ,
  • the energy density per amplifier laser pulse in the regenerative amplifier 100 is advantageously less than 100 millijoules per square centimeter, even better less than 50 millijoules per square centimeter.
  • the resonator 50 preferably operates in TEMoo mode and the mode adaptation device 40 is set such that it converts a radiation field of the seed laser pulse 20 to a radiation field corresponding to the TEMoo mode of the resonator 50.
  • a pair of prisms comprising two prisms 122 and 124, is provided as the dispersion compensation element 120, wherein the pair of prisms 120 is preferably arranged between the deflecting mirror 94 and the end mirror 74.
  • the pair of prisms 120 can be designed in such a way that it itself has such a large negative dispersion that the positive dispersion of the Pockels cell 80 is essentially compensated for every revolution, so that it is not necessary to include the first end mirror 72 and the deflecting element 86 to train as dispersion compensation elements. Rather, they can be designed as conventional optical components.
  • the second exemplary embodiment according to FIG. 2 functions in the same way as the first exemplary embodiment, so that with regard to its function, reference is also made in full to the first exemplary embodiment according to FIG. 1.

Abstract

La présente invention concerne un système laser destiné à produire des impulsions laser, comprenant un laser SEED et un amplificateur à récupération dans lequel une impulsion laser amplifiée produite à partir de l'impulsion laser SEED du laser SEED, peut être amplifiée en effectuant plusieurs passages, l'amplificateur à récupération comprenant un résonateur et un élément de couplage commandable disposé dans le résonateur, ainsi qu'un disque à semi-conducteur à support laser actif, disposé dans le résonateur. L'invention a pour objet d'apporter des améliorations au système laser de sorte que des impulsions laser de sortie peuvent être produites en un temps de l'ordre de la picoseconde ou de la subpicoseconde de la manière la plus simple possible. A cet effet, pour permettre la production des impulsions laser de sortie en un temps de moins de cinq picosecondes, au moins un élément de compensation de dispersion à dispersion négative, parcouru à chaque passage de l'impulsion laser amplifiée à passages multiples, est disposé dans le résonateur, ledit élément de compensation de dispersion agissant contre une augmentation de durée d'impulsion liée à la dispersion positive de composants de l'amplificateur à récupération.
PCT/EP2004/000672 2003-01-30 2004-01-27 Systeme laser WO2004068651A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10304399.3 2003-01-30
DE2003104399 DE10304399A1 (de) 2003-01-30 2003-01-30 Lasersystem

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Publication Number Publication Date
WO2004068651A2 true WO2004068651A2 (fr) 2004-08-12
WO2004068651A3 WO2004068651A3 (fr) 2004-12-29

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394591B2 (en) 2000-05-23 2008-07-01 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US7630416B2 (en) * 2005-11-03 2009-12-08 Gwangju Institute Of Science And Technology High-repetition-rate femtosecond regenerative amplification system
US20110206072A1 (en) * 2010-02-24 2011-08-25 Michael Karavitis High Power Femtosecond Laser with Repetition Rate Adjustable According to Scanning Speed
WO2011106498A2 (fr) 2010-02-24 2011-09-01 Alcon Lensx, Inc. Laser femtoseconde de haute puissance avec fréquence de répétition réglable
CN103022886A (zh) * 2013-01-05 2013-04-03 北京工业大学 全固态皮秒激光放大器

Citations (4)

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US3675154A (en) * 1970-10-01 1972-07-04 Bell Telephone Labor Inc Dispersion compensation in lasers
US5553093A (en) * 1994-05-09 1996-09-03 Massachusetts Institute Of Technology Dispersion-compensated laser using prismatic end elements
US6363090B1 (en) * 1998-02-25 2002-03-26 Dentek-Lasersystems Produktions Ges.M.B.H Laser system for producing ultra-short light pulses
DE10063976A1 (de) * 2000-12-21 2002-07-04 Lzh Laserzentrum Hannover Ev Resonator, regenerativer Verstärker für ultrakurze Laserpulse und mehrschichtiger Spiegel

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US5912915A (en) * 1997-05-19 1999-06-15 Coherent, Inc. Ultrafast laser with multiply-folded resonant cavity
EP1236249B1 (fr) * 1999-12-08 2007-04-25 Time-Bandwidth Products AG Laser a disque fin a modes bloques

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3675154A (en) * 1970-10-01 1972-07-04 Bell Telephone Labor Inc Dispersion compensation in lasers
US5553093A (en) * 1994-05-09 1996-09-03 Massachusetts Institute Of Technology Dispersion-compensated laser using prismatic end elements
US6363090B1 (en) * 1998-02-25 2002-03-26 Dentek-Lasersystems Produktions Ges.M.B.H Laser system for producing ultra-short light pulses
DE10063976A1 (de) * 2000-12-21 2002-07-04 Lzh Laserzentrum Hannover Ev Resonator, regenerativer Verstärker für ultrakurze Laserpulse und mehrschichtiger Spiegel

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7394591B2 (en) 2000-05-23 2008-07-01 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US7929203B2 (en) 2000-05-23 2011-04-19 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US8773754B2 (en) 2000-05-23 2014-07-08 Imra America, Inc. Utilization of Yb: and Nd: mode-locked oscillators in solid-state short pulse laser systems
US7630416B2 (en) * 2005-11-03 2009-12-08 Gwangju Institute Of Science And Technology High-repetition-rate femtosecond regenerative amplification system
JP2013520846A (ja) * 2010-02-24 2013-06-06 アルコン レンゼックス， インコーポレーテッド 調節可能な繰り返し率を有する高出力のフェムト秒レーザ
EP2539976A2 (fr) * 2010-02-24 2013-01-02 Alcon LenSx, Inc. Laser femtoseconde de haute puissance avec fréquence de répétition réglable
JP2013520848A (ja) * 2010-02-24 2013-06-06 アルコン レンゼックス， インコーポレーテッド 走査速度に従い調節可能な繰り返し率を有する高出力のフェムト秒レーザ
WO2011106498A2 (fr) 2010-02-24 2011-09-01 Alcon Lensx, Inc. Laser femtoseconde de haute puissance avec fréquence de répétition réglable
EP2539976A4 (fr) * 2010-02-24 2013-10-09 Alcon Lensx Inc Laser femtoseconde de haute puissance avec fréquence de répétition réglable
US20110206072A1 (en) * 2010-02-24 2011-08-25 Michael Karavitis High Power Femtosecond Laser with Repetition Rate Adjustable According to Scanning Speed
US8953651B2 (en) * 2010-02-24 2015-02-10 Alcon Lensx, Inc. High power femtosecond laser with repetition rate adjustable according to scanning speed
US20150117480A1 (en) * 2010-02-24 2015-04-30 Alcon Lensx, Inc. High Power Femtosecond Laser With Variable Repetition Rate
US9054479B2 (en) 2010-02-24 2015-06-09 Alcon Lensx, Inc. High power femtosecond laser with adjustable repetition rate
US9325148B2 (en) * 2010-02-24 2016-04-26 Alcon Lensx, Inc. High power femtosecond laser with variable repetition rate
JP2016157984A (ja) * 2010-02-24 2016-09-01 アルコン レンゼックス， インコーポレーテッド 調節可能な繰り返し率を有する高出力のフェムト秒レーザ
CN103022886A (zh) * 2013-01-05 2013-04-03 北京工业大学 全固态皮秒激光放大器

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WO2004068651A3 (fr) 2004-12-29

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