WO2002041413A1 - Piezo flexural transducer unit and piezo valve which is equipped with the same - Google Patents

Piezo flexural transducer unit and piezo valve which is equipped with the same Download PDF

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Publication number
WO2002041413A1
WO2002041413A1 PCT/EP2001/012843 EP0112843W WO0241413A1 WO 2002041413 A1 WO2002041413 A1 WO 2002041413A1 EP 0112843 W EP0112843 W EP 0112843W WO 0241413 A1 WO0241413 A1 WO 0241413A1
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WO
WIPO (PCT)
Prior art keywords
piezo
bending
transducer unit
bending transducer
transducers
Prior art date
Application number
PCT/EP2001/012843
Other languages
German (de)
French (fr)
Inventor
Herbert Frisch
Hannes Wirtl
Martin Maichl
Michael Weinmann
Original Assignee
Festo Ag & Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo Ag & Co filed Critical Festo Ag & Co
Publication of WO2002041413A1 publication Critical patent/WO2002041413A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Definitions

  • the invention relates to a piezo bending transducer unit containing at least two piezoelectric bending transducers and a piezo valve suitable for controlling fluid flows and equipped with such a bending transducer unit.
  • WO 98/25061 discloses a piezo valve which is equipped with two piezoelectric bending transducers arranged alongside one another along the side and which are fixed to the valve housing separately from one another.
  • Each bending transducer contains a piezo body that has a plurality of piezo material layers and an electrode arrangement.
  • the electrode arrangement is part of a flexible contacting strand consisting of plastic material and containing electrical conductors, which is led out of the valve and enables the contacting required for feeding in the control voltage.
  • the continuous contact makes it easier to contact the electrodes contained in the individual bending transducers.
  • the assembly of the piezo valve including the necessary adjustment of the bending transducers is still relatively cumbersome. It is the object of the present invention to take measures which make it easier to manufacture and / or assemble bending transducers.
  • a piezo bending transducer unit which contains at least two bending transducers, each of which has at least one piezo body containing one or more layers of piezo material with an associated electrode arrangement, and which are arranged alongside one another along the sides with mutually parallel deflection planes, at one end region the bending transducer unit with the piezo material layers of its piezo body are integrally connected to one another.
  • the object is further achieved by a piezo valve which is equipped with a piezo bending transducer unit of the aforementioned construction.
  • the at least two bending transducers are thus combined to form a fixed structural unit, the fixed connection taking place at one end region of the bending transducer unit, where the piezo material layers of the piezo bodies on both sides are connected to one another in one piece.
  • Bending transducers possible, the relative position between the bending transducers being unchangeably predetermined even after the bending transducer unit has been manufactured. As for assembly and adjustment If several bending transducers only have one component in the form of the bending transducer unit to be installed and adjusted, the assembly of devices equipped with the bending transducers, in particular of piezo valves equipped with several bending transducers, is simplified.
  • the end region of the bending transducer unit which has the one-piece connection of the bending transducers, can form a bearing section, via which the bending transducer unit is fixed with respect to the valve housing of the piezo valve when in use.
  • the piezo bodies of the individual bending transducers can be designed in such a way that individual control is possible, which allows the user to activate them in any way.
  • the end region of the bending transducer unit which has the one-piece connection between the bending transducers is expediently used as a storage section, via which the bending transducer unit is firmly clamped in the associated valve housing, so that all bending transducers are clamped simultaneously.
  • FIG. 1 is a longitudinal section of a piezo valve according to the invention, which is equipped with a piezo bending transducer unit of the design according to the invention,
  • FIG. 2 shows a perspective illustration of the piezo valve from FIG. 1, the valve housing being largely not shown in order to make the piezo bending transducer unit more visible, and
  • FIG. 3 shows an individual illustration of the piezo bending transducer unit used in the piezo valve according to FIGS. 1 and 2 in a top view of one of its two larger longitudinal sides.
  • the piezo valve 1 shown in the drawing has an elongated valve housing 2 which defines a valve chamber 3 in the interior. Extending in the valve chamber 3 are two piezoelectric bending transducers 4, 5 which are arranged alongside one another in the longitudinal direction and are an integral part of an elongated piezo bending transducer unit 6. The latter is shown separately in FIG. 3.
  • the two bending transducers 4, 5 are firmly connected to one another on one end face by means of a bearing section 7, which defines one of the two axially-side end regions of the bending transducer unit.
  • the bending transducer unit 6 is connected to the valve housing 2 via its mounting section 7. This is done in particular by clamping the bearing section 7 in a manner fixed to the housing, which in the exemplary embodiment is realized by embedding in a casting compound 8 introduced into the valve housing 2.
  • the potting compound 8 is applied in the end section of the valve chamber 3 assigned to the storage section 7 and, after curing, establishes a rigid connection between the storage section 7 and the surrounding wall of the valve housing 2.
  • the bending transducer unit 6 has a plate-like flat shape extending in a main expansion plane and has a slot-like intermediate space 12 which separates the two bending transducers 4, 5 and which extends from the free front end of the bending transducers 4, 5 to the rear to the beginning of the Storage section 7 extends.
  • the piezo valve of the exemplary embodiment is designed as a 3/2-way valve.
  • a first valve opening 18 to be controlled is placed, which is delimited by a valve seat 22 and is connected to a feed channel 23 guided to the outside.
  • Deflection path of the other, second bending transducer 5 there is a controllable second valve opening 19 with an associated valve seat 22, which is connected, for example, to the Atmosphere-guided ventilation duct 24 is connected.
  • Both valve openings 18, 19 open out on the inner surface of the valve housing 2 into the valve chamber 3, which further communicates continuously with a working channel 25 which is provided for connecting a consumer to be controlled fluidically, for example a fluid-operated drive.
  • the bending transducers 4, 5 In the deactivated state and without additional measures, the bending transducers 4, 5 according to FIG. 1 would each be arranged at a short distance from the associated valve seat 22. In the exemplary embodiment, however, effective spring means 26 are provided between the valve housing 2 and the first bending transducer 4, which bias the first bending transducer 4 into its closed position, in which it rests on the associated valve seat and closes the relevant first valve opening 18 (FIG. 2). In this way, when the bending transducers 4, 5 are deactivated, there is an initial state in which the working channel 25 is connected to the venting channel 24 via the valve chamber 3 and is thus vented, while at the same time the feed channel 23 is shut off.
  • a switchover can take place, for example, in such a way that the second bending transducer 5 blocks the second valve opening 19 and thus the ventilation channel 24, while at the same time the first bending transducer 4 counteracts the actuating force of the spring means 26 from the assigned one first valve opening 18 is lifted off and thus the working channel 25 is fed through the valve chambers 3 through the feed channel 23 with pressure medium.
  • the print medium is a gaseous medium such as compressed air or a hydraulic medium.
  • the two bending transducers 4, 5 are firmly and in particular rigidly connected to one another.
  • the rigidity of the connection depends largely on the rigidity of the piezo material of the bending transducers 4, 5 on both sides.
  • each bending transducer 4, 5 in the exemplary embodiment has, for example, two piezo material layers 27a, 27b arranged one above the other in parallel layer planes, which are integrally connected to one another in the region of the bearing section 7 to form the same.
  • the bending transducer unit 6 is a multilayer body which has a plurality of piezomaterial layers which are layered one above the other and which have a somewhat U-shaped outline to form the two bending transducers 4, 5, so that the slotted outer contour according to FIG. 3 results.
  • the two piezo material layers 27a, 27b of a respective bending transducer 4, 5 could be part of a single piezo body which, with appropriate control, enables deflection essentially in only one direction, so that one could speak of a unimorph structure.
  • there is a bimorph opening with each piezo material layer 27a, 27b being a component of a piezo body 28a, 28b equipped with an electrode arrangement 32a, 32b and with the piezo bodies 28a, 28b being firmly connected to one another along the sides, for example by gluing that a deflection of the relevant bending transducer 4, 5 is possible in either direction by electrical control.
  • Each piezo body 28a, 28b of a respective bending transducer 4, 5 could also have a multi-layer structure with a plurality of piezo material layers instead of the single-layer structure present in the exemplary embodiment.
  • the bending transducers could also each have only one piezo body with only one piezo material layer.
  • the electrodes of the electrode arrangement 27a placed on the upper side of the bending transducers 4, 5 are identified by hatching.
  • a comparable electrode structure is located on the underside of the bending transducers.
  • outgoing electrical conductors 33 lead to the electrical contact means 13, 14, which enable the electrical control of the bending transducer unit 6.
  • the bending transducers 4, 5 can, for example, be designed such that individual control is possible and operation can take place independently of one another. However, it would also be conceivable to have an electrical connection such that when a control voltage is applied, both bending transducers 4, 5 automatically execute a predetermined movement, for example an opposite deflection movement. This connection can be provided directly on the bending transducer unit 6.
  • An advantage of the bending transducer unit 6 is that several individual bending transducers 4, 5 are combined into a rigid, self-supporting structural unit at the same time, which have a common bearing section 7, which simultaneously fixes all the bending transducers 4, 5. possible, whereby a mutual alignment of the individual bending transducers 4, 5 can be omitted. Only the bending transducer unit 6 as a whole is to be aligned.
  • the storage section 7 preferably has a rectangular or square contour.
  • valve housing 2 When aligning the bending transducer unit 6 in the valve housing 2, it can be helpful if the valve housing 2 has a stabilizing projection 33 which engages in the slot-like intermediate space 12 when the bending transducer unit 6 is mounted and whose length is selected such that it is suitable for the longitudinal alignment of the Support bending transducer unit 6.
  • the bending transducer unit 6 For the production of the bending transducer unit 6, it is expedient to use a number of layer components consisting of piezo material which correspond to the desired number of piezo material layers and which correspond to the desired outline of the bending transducer unit 6 and which, taking into account the electrode arrangements, are layered on top of one another and firmly connected to one another. In principle, there is also the possibility of realizing the bending transducer unit 6 with only a single layer component.
  • the starting point can be a rectangular, elongated piezo material plate into which an incision is made to remove the slot-like intermediate space 12 by material removal.
  • the bending transducer unit 6 can thus be conceived in particular in such a way that either a single layer component or a plurality of layer components 29a, 29b layered one on top of the other are present, which consist of piezomaterial and have a one-piece structure, with several parallel to one another from an end region defining the bearing section 7 Strip strips that each belong to a bending transducer.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

The invention relates to a piezo flexural transducer unit which contains at least two flexural transducers (4, 5). Said flexural transducers (4, 5) each have at least one piezo body containing one or more piezo material layers and having a corresponding electrode arrangement and are situated longitudinally adjacently to each other with excursion planes that are parallel with each other. In one end area (7) of the flexural transducer unit (6), the flexural transducers (4, 5) are permanently interconnected, in a single piece, by the piezo material layers of their piezo bodies.

Description

Piezo-Bieqewandlereinheit und damit ausgestattetes Piezo bending transducer unit and equipped with it
Piezoventilpiezo valve
Beschreibungdescription
Die Erfindung betrifft eine mindestens zwei piezoelektrische Biegewandler enthaltende Piezo-Biegewandlereinheit sowie ein zur Steuerung von Fluidströmen geeignetes Piezoventil, das mit einer derartigen Biegewandlereinheit ausgestattet ist.The invention relates to a piezo bending transducer unit containing at least two piezoelectric bending transducers and a piezo valve suitable for controlling fluid flows and equipped with such a bending transducer unit.
Aus der WO 98/25061 geht ein Piezoventil hervor, das mit zwei längsseits nebeneinander angeordneten piezoelektrischen Biegewandlern ausgestattet ist, die getrennt voneinander am Ven- tilgehäuse fixiert sind. Jeder Biegewandler enthält einen Piezokörper, der mehrere Piezomaterialschichten und eine Elektrodenanordnung aufweist. Die Elektrodenanordnung ist Bestandteil eines aus Kunststoffmaterial bestehenden und elektrische Leiter enthaltenden flexiblen Kontaktierungsstranges, der aus dem Ventil herausgeführt ist und die zur Einspeisung der Ansteuerspannung erforderliche Kontaktierung ermöglicht.WO 98/25061 discloses a piezo valve which is equipped with two piezoelectric bending transducers arranged alongside one another along the side and which are fixed to the valve housing separately from one another. Each bending transducer contains a piezo body that has a plurality of piezo material layers and an electrode arrangement. The electrode arrangement is part of a flexible contacting strand consisting of plastic material and containing electrical conductors, which is led out of the valve and enables the contacting required for feeding in the control voltage.
Zwar wird durch den durchgehenden Kontakt i er ungs sträng die Kontaktierung der in den einzelnen Biegewandlern enthaltenen Elektroden vereinfacht. Der Zusammenbau des Piezoventils einschließlich der erforderlichen Justierung der Biegewandler ist jedoch weiterhin relativ umständlich. Es ist die Aufgabe der vorliegenden Erfindung, Maßnahmen zu treffen, die eine Vereinfachung der Herstellung und/oder Montage von Biegewandlern ermöglichen.The continuous contact makes it easier to contact the electrodes contained in the individual bending transducers. However, the assembly of the piezo valve including the necessary adjustment of the bending transducers is still relatively cumbersome. It is the object of the present invention to take measures which make it easier to manufacture and / or assemble bending transducers.
Zur Lösung dieser Aufgabe ist eine Piezo-Biegewandlereinheit vorgesehen, die mindestens zwei Biegewandler enthält, die jeweils mindestens einen, eine oder mehrere Piezomaterialschichten enthaltenden Piezokörper mit zugehöriger Elektro- denanordnung aufweisen und die mit zueinander parallelen Auslenkebenen längsseits nebeneinander angeordnet sind, wobei sie am einen Endbereich der Biegewandlereinheit mit den Piezomaterialschichten ihrer Piezokörper einstückig fest miteinander verbunden sind.To achieve this object, a piezo bending transducer unit is provided which contains at least two bending transducers, each of which has at least one piezo body containing one or more layers of piezo material with an associated electrode arrangement, and which are arranged alongside one another along the sides with mutually parallel deflection planes, at one end region the bending transducer unit with the piezo material layers of its piezo body are integrally connected to one another.
Gelöst wird die Aufgabe ferner durch ein Piezoventil, das mit einer Piezo-Biegewandlereinheit des zuvor erwähnten Aufbaues ausgestattet ist.The object is further achieved by a piezo valve which is equipped with a piezo bending transducer unit of the aforementioned construction.
Die mindestens zwei Biegewandler sind somit zu einer festen Baueinheit zusammengefasst, wobei die feste Verbindung am einen Endbereich der Biegewandlereinheit stattfindet, wo die Piezomaterialschichten der beiderseitigen Piezokörper einstückig miteinander verbunden sind. Durch diese integrale Bau- form ist eine gleichzeitige einfache Herstellung mehrererThe at least two bending transducers are thus combined to form a fixed structural unit, the fixed connection taking place at one end region of the bending transducer unit, where the piezo material layers of the piezo bodies on both sides are connected to one another in one piece. This integral design makes it easy to manufacture several at the same time
Biegewandler möglich, wobei die Relativlage zwischen den Biegewandlern bereits nach Herstellung der Biegewandlereinheit unveränderlich vorgegeben ist. Da zur Montage und Justierung mehrerer Biegewandler somit nur ein Bauteil in Gestalt der Biegewandlereinheit montiert und justiert werden muss, vereinfacht sich der Zusammenbau von mit den Biegewandlern ausgestatteten Einrichtungen, insbesondere von mit mehreren Bie- gewandlern ausgestatteten Piezoventilen.Bending transducers possible, the relative position between the bending transducers being unchangeably predetermined even after the bending transducer unit has been manufactured. As for assembly and adjustment If several bending transducers only have one component in the form of the bending transducer unit to be installed and adjusted, the assembly of devices equipped with the bending transducers, in particular of piezo valves equipped with several bending transducers, is simplified.
Vorteilhafte Weiterbildungen der Erfindung gehen aus den Unteransprüchen hervor.Advantageous developments of the invention emerge from the subclaims.
Vor allem in Verbindung mit einem Piezoventil kann der die einstückige Verbindung der Biegewandler aufweisende Endbereich der Biegewandlereinheit einen Lagerungsabschnitt bilden, über den die Biegewandlereinheit im Gebrauchszustand bezüglich des Ventilgehäuses des Piezoventils fixiert wird.Especially in connection with a piezo valve, the end region of the bending transducer unit, which has the one-piece connection of the bending transducers, can form a bearing section, via which the bending transducer unit is fixed with respect to the valve housing of the piezo valve when in use.
Die Piezokörper der einzelnen Biegewandler können so ausgebildet sein, dass eine individuelle Ansteuerung möglich ist, die dem Anwender eine beliebig gesteuerte Aktivierung gestattet.The piezo bodies of the individual bending transducers can be designed in such a way that individual control is possible, which allows the user to activate them in any way.
Vor allem wenn abwechselnd mehrere Ventilöffnungen eines Piezoventils gesteuert werden sollen, ist es von Vorteil, die Biegewandler der Biegewandlereinheit dahingehend elektrisch zu verschalten, dass sie bei Anlegen einer entsprechenden An- steuerspannung automatisch eine gegensinnige Auslenkbewegung ausführen. In Verbindung mit einem Piezoventil wird der die einstückige Verbindung zwischen den Biegewandlern aufweisende Endbereich der Biegewandlereinheit zweckmäßigerweise als Lagerungsabschnitt eingesetzt, über den die Biegewandlereinheit fest im zugeordneten Ventilgehäuse eingespannt wird, so dass eine gleichzeitige Einspannung sämtlicher Biegewandler erfolgt.Above all, if several valve openings of a piezo valve are to be controlled alternately, it is advantageous to electrically connect the bending transducers of the bending transducer unit such that they automatically execute an opposite deflection movement when a corresponding control voltage is applied. In connection with a piezo valve, the end region of the bending transducer unit which has the one-piece connection between the bending transducers is expediently used as a storage section, via which the bending transducer unit is firmly clamped in the associated valve housing, so that all bending transducers are clamped simultaneously.
Nachfolgend wird die Erfindung anhand der beiliegenden Zeichnung näher erläutert. In dieser zeigen:The invention is explained in more detail below with reference to the accompanying drawing. In this show:
Fig. 1 im Längsschnitt ein erfindungsgemäßes Piezoventil, das mit einer Piezo-Biegewandlereinheit der erfindungsgemäßen Bauform ausgestattet ist,1 is a longitudinal section of a piezo valve according to the invention, which is equipped with a piezo bending transducer unit of the design according to the invention,
Fig. 2 eine perspektivische Darstellung des Piezoventils aus Fig. 1, wobei das Ventilgehäuse größtenteils nicht dargestellt ist, um die Piezo-Biegewandlereinheit besser sichtbar zu machen, undFIG. 2 shows a perspective illustration of the piezo valve from FIG. 1, the valve housing being largely not shown in order to make the piezo bending transducer unit more visible, and
Fig. 3 eine Einzeldarstellung der bei dem Piezoventil gemäß Fig. 1 und 2 verwendeten Piezo-Biegewandlereinheit in Draufsicht auf eine ihrer beiden grö- ßerflächigen Längsseiten.3 shows an individual illustration of the piezo bending transducer unit used in the piezo valve according to FIGS. 1 and 2 in a top view of one of its two larger longitudinal sides.
Das in der Zeichnung dargestellte Piezoventil 1 verfügt über ein längliches Ventilgehäuse 2, das im Innern eine Ventilkammer 3 definiert. In der Ventilkammer 3 erstrecken sich zwei in Parallelausrichtung längsseits nebeneinander angeordnete piezoelektrische Biegewandler 4, 5, die fester Bestandteil einer längli- chen Piezo-Biegewandlereinheit 6 sind. Letztere ist in Fig. 3 nochmals separat dargestellt.The piezo valve 1 shown in the drawing has an elongated valve housing 2 which defines a valve chamber 3 in the interior. Extending in the valve chamber 3 are two piezoelectric bending transducers 4, 5 which are arranged alongside one another in the longitudinal direction and are an integral part of an elongated piezo bending transducer unit 6. The latter is shown separately in FIG. 3.
Zum Erhalt der Biegewandlereinheit 6 sind die beiden Biegewandler 4 , 5 an einer Stirnseite über einen Lagerungsab- schnitt 7 fest miteinander verbunden, der einen der beiden axialseitigen Endbereiche der Biegewandlereinheit definiert.To obtain the bending transducer unit 6, the two bending transducers 4, 5 are firmly connected to one another on one end face by means of a bearing section 7, which defines one of the two axially-side end regions of the bending transducer unit.
Die Biegewandlereinheit 6 ist über ihren Lagerungsabschnitt 7 gehäusefest mit dem Ventilgehäuse 2 verbunden. Dies geschieht insbesondere durch eine gehäusefeste Einspannung des Lagerungsabschnittes 7, die beim Ausführungsbeispiel durch Einbetten in eine in das Ventilgehäuse 2 eingebrachte Verguss- masse 8 realisiert ist. Die Vergussmasse 8 ist in dem dem La- gerungsabschnitt 7 zugeordneten Endabschnitt der Ventilkammer 3 appliziert und stellt nach dem Aushärten eine starre Verbindung zwischen dem Lagerungsabschnitt 7 und der umgebenden Wandung des Ventilgehäuses 2 her.The bending transducer unit 6 is connected to the valve housing 2 via its mounting section 7. This is done in particular by clamping the bearing section 7 in a manner fixed to the housing, which in the exemplary embodiment is realized by embedding in a casting compound 8 introduced into the valve housing 2. The potting compound 8 is applied in the end section of the valve chamber 3 assigned to the storage section 7 and, after curing, establishes a rigid connection between the storage section 7 and the surrounding wall of the valve housing 2.
Es versteht sich, dass auch andere Möglichkeiten zur Fixie- rung des Lagerungsabschnittes 7 im Gehäuse des Piezoventils 1 möglich sind. Im deaktivierten Zustand hat die Biegewandlereinheit 6 eine sich in einer Hauptausdehnungsebene erstreckende plattenartige Flachgestalt und verfügt über einen die beiden Biegewandler 4, 5 voneinander trennenden schlitzartigen Zwischenraum 12, der sich ausgehend vom freien vorderen Ende der Biegewandler 4, 5 zur Rückseite hin bis zum Beginn des Lagerungsabschnittes 7 erstreckt.It goes without saying that other possibilities for fixing the bearing section 7 in the housing of the piezo valve 1 are also possible. In the deactivated state, the bending transducer unit 6 has a plate-like flat shape extending in a main expansion plane and has a slot-like intermediate space 12 which separates the two bending transducers 4, 5 and which extends from the free front end of the bending transducers 4, 5 to the rear to the beginning of the Storage section 7 extends.
Mit den beiden Biegewandlern 4, 5 verbundene elektrische Kon- taktmittel 13, 14 sind aus dem Ventilgehäuse 2 herausgeführt und ermöglichen das Anlegen einer für den Betrieb der Biegewandler 4, 5 erforderlichen AnsteuerSpannung. Das Anlegen der Ansteuerspannung hat ein Verbiegen bzw. Auslenken des betroffenen Biegewandlers 4, 5 quer zu seiner Längsrichtung zur Folge, wobei die Auslenkbewegung in Fig. 1 durch Doppelpfeil 15 angedeutet ist. Die Auslenkbewegungen der beiden Biegewandler 4, 5 finden dabei in zueinander parallelen Auslenkebenen 16, 17 statt, die rechtwinkelig zur Hauptausdehnungsebene der deaktivierten Biegewandlereinheit 6 verlaufen.Electrical contact means 13, 14 connected to the two bending transducers 4, 5 are led out of the valve housing 2 and enable the application of a control voltage required for the operation of the bending transducers 4, 5. The application of the control voltage results in the affected bending transducer 4, 5 being bent or deflected transversely to its longitudinal direction, the deflection movement being indicated in FIG. 1 by double arrow 15. The deflection movements of the two bending transducers 4, 5 take place in mutually parallel deflection planes 16, 17, which are perpendicular to the main plane of expansion of the deactivated bending transducer unit 6.
Das Piezoventil des Ausführungsbeispiels ist als 3/2-Wege- ventil ausgebildet. Im Auslenkweg des einen, ersten Biegewandlers 4 ist eine zu steuernde erste Ventilöffnung 18 platziert, die von einem Ventilsitz 22 umgrenzt ist und mit einem nach außen geführten Speisekanal 23 in Verbindung steht. ImThe piezo valve of the exemplary embodiment is designed as a 3/2-way valve. In the deflection path of the one, first bending transducer 4, a first valve opening 18 to be controlled is placed, which is delimited by a valve seat 22 and is connected to a feed channel 23 guided to the outside. in the
Auslenkweg des anderen, zweiten Biegewandlers 5 befindet sich eine steuerbare zweite Ventilöffnung 19 mit ebenfalls zugeordnetem Ventilsitz 22, die mit einem beispielsweise an die Atmosphäre geführten Entlüftungskanal 24 verbunden ist. Beide Ventilöffnungen 18, 19 münden an der Innenfläche des Ventilgehäuses 2 in die Ventilkammer 3 ein, die des weiteren ständig mit einem Arbeitskanäl 25 kommuniziert, der zum Anschluss eines fluidisch anzusteuernden Verbrauchers, beispielsweise eines fluidbetätigten Antriebes, vorgesehen ist.Deflection path of the other, second bending transducer 5 there is a controllable second valve opening 19 with an associated valve seat 22, which is connected, for example, to the Atmosphere-guided ventilation duct 24 is connected. Both valve openings 18, 19 open out on the inner surface of the valve housing 2 into the valve chamber 3, which further communicates continuously with a working channel 25 which is provided for connecting a consumer to be controlled fluidically, for example a fluid-operated drive.
Im deaktivierten Zustand und ohne zusätzliche Maßnahmen wären die Biegewandler 4, 5 gemäß Figur 1 jeweils mit geringem Ab- stand zum zugeordneten Ventilsitz 22 angeordnet. Beim Ausführungsbeispiel sind jedoch zwischen dem Ventilgehäuse 2 und dem ersten Biegewandler 4 wirksame Federmittel 26 vorgesehen, die den ersten Biegewandler 4 in seine Schließstellung vorspannen, in der er am zugeordneten Ventilsitz aufliegt und die betreffende erste Ventilöffnung 18 verschließt (Figur 2) . Auf diese Weise liegt bei deaktivierten Biegewandlern 4, 5 ein Ausgangszustand vor, bei dem der Arbeitskanal 25 über die Ventilkammer 3 hinweg mit dem Entlüftungskanal 24 verbunden und somit entlüftet ist, während gleichzeitig der Speisekanal 23 abgesperrt ist. Durch entsprechende Ansteuerung der Biegewandler 4 , 5 kann ausgehend hiervon ein Umschalten beispielsweise dahingehend erfolgen, dass der zweite Biegewandler 5 die zweite Ventilöffnung 19 und somit den Entlüftungskanal 24 absperrt, während gleichzeitig der erste Biegewandler 4 ent- gegen der Stellkraft der Federmittel 26 von der zugeordneten ersten Ventilöffnung 18 abgehoben wird und somit der Arbeitskanal 25 durch die Ventilkämmer 3 hindurch vom Speisekanal 23 mit Druckmedium gespeist wird. Bei dem Druckmedium handelt es sich beispielsweise um ein gasförmiges Medium wie Druckluft oder auch um ein hydraulisches Medium.In the deactivated state and without additional measures, the bending transducers 4, 5 according to FIG. 1 would each be arranged at a short distance from the associated valve seat 22. In the exemplary embodiment, however, effective spring means 26 are provided between the valve housing 2 and the first bending transducer 4, which bias the first bending transducer 4 into its closed position, in which it rests on the associated valve seat and closes the relevant first valve opening 18 (FIG. 2). In this way, when the bending transducers 4, 5 are deactivated, there is an initial state in which the working channel 25 is connected to the venting channel 24 via the valve chamber 3 and is thus vented, while at the same time the feed channel 23 is shut off. By appropriately activating the bending transducers 4, 5, a switchover can take place, for example, in such a way that the second bending transducer 5 blocks the second valve opening 19 and thus the ventilation channel 24, while at the same time the first bending transducer 4 counteracts the actuating force of the spring means 26 from the assigned one first valve opening 18 is lifted off and thus the working channel 25 is fed through the valve chambers 3 through the feed channel 23 with pressure medium. The print medium is a gaseous medium such as compressed air or a hydraulic medium.
Die hier geschilderte Bauform und auch Art der Ansteuerung der Biegewandler 4, 5 ist exemplarisch aufgeführt. Es versteht sich, dass auch andere Ventilbauformen und Ventilfunktionalitäten auf Basis der Biegewandlereinheit 6 realisiert werden können.The design described here and also the type of control of the bending transducers 4, 5 are listed as examples. It goes without saying that other valve designs and valve functionalities can also be implemented on the basis of the bending transducer unit 6.
Im Rahmen der Biegewandlereinheit 6 sind die beiden Biegewandler 4 , 5 fest und insbesondere starr miteinander verbunden. Die Starrheit der Verbindung hängt dabei maßgeblich von der Steifigkeit des Piezomaterials der beiderseitigen Biegewandler 4, 5 ab.In the context of the bending transducer unit 6, the two bending transducers 4, 5 are firmly and in particular rigidly connected to one another. The rigidity of the connection depends largely on the rigidity of the piezo material of the bending transducers 4, 5 on both sides.
Der Grund dafür liegt darin, dass jeder Biegewandler 4, 5 beim Ausführungsbeispiel beispielsweise zwei in zueinander parallelen Schichtebenen übereinanderliegend angeordnete Piezomaterialschichten 27a, 27b aufweist, die im Bereich des La- gerungsabschnittes 7 unter Bildung desselben einstückig miteinander verbunden sind. Mit anderen Worten ist also die Biegewandlereinheit 6 ein Mehrschichtkörper, der mehrere, schichtweise übereinanderliegende Piezomateriallagen aufweist, die zur Bildung der beiden Biegewandler 4, 5 einen et- wa U-förmigen Umriss haben, so dass sich die geschlitzte Außenkontur gemäß Fig. 3 ergibt. Die beiden Piezomaterialschichten 27a, 27b eines jeweiligen Biegewandlers 4, 5 könnten Bestandteil eines einzigen Piezo- körpers sein, der bei entsprechender Ansteuerung eine Auslenkung im wesentlichen in nur einer Richtung ermöglicht, so dass man von einem Unimorph-Aufbau sprechen könnte. Beim Ausführungsbeispiel liegt hingegen ein Bimorph-Auf au vor, wobei jede Piezomaterialschicht 27a, 27b Bestandteil eines mit einer Elektrodenanordnung 32a, 32b ausgestatteten Piezokörpers 28a, 28b ist und wobei die Piezokörper 28a, 28b, beispiels- weise durch Verkleben so längsseits fest miteinander verbunden sind, dass durch elektrische Ansteuerung eine Auslenkung des betreffenden Biegewandlers 4, 5 nach Wahl in beiden Richtungen möglich ist.The reason for this is that each bending transducer 4, 5 in the exemplary embodiment has, for example, two piezo material layers 27a, 27b arranged one above the other in parallel layer planes, which are integrally connected to one another in the region of the bearing section 7 to form the same. In other words, the bending transducer unit 6 is a multilayer body which has a plurality of piezomaterial layers which are layered one above the other and which have a somewhat U-shaped outline to form the two bending transducers 4, 5, so that the slotted outer contour according to FIG. 3 results. The two piezo material layers 27a, 27b of a respective bending transducer 4, 5 could be part of a single piezo body which, with appropriate control, enables deflection essentially in only one direction, so that one could speak of a unimorph structure. In the exemplary embodiment, on the other hand, there is a bimorph opening, with each piezo material layer 27a, 27b being a component of a piezo body 28a, 28b equipped with an electrode arrangement 32a, 32b and with the piezo bodies 28a, 28b being firmly connected to one another along the sides, for example by gluing that a deflection of the relevant bending transducer 4, 5 is possible in either direction by electrical control.
Jeder Piezokörper 28a, 28b eines jeweiligen Biegewandlers 4, 5 könnte anstelle des beim Ausführungsbeispiel vorhandenen einschichtigen Aufbaues auch einen Mehrschichtaufbau mit mehreren Piezomaterialschichten haben. Auch könnten die Biegewandler jeweils über nur einen Piezokörper mit lediglich ei- ner Piezomaterialschicht verfügen.Each piezo body 28a, 28b of a respective bending transducer 4, 5 could also have a multi-layer structure with a plurality of piezo material layers instead of the single-layer structure present in the exemplary embodiment. The bending transducers could also each have only one piezo body with only one piezo material layer.
Schließlich wäre es auch möglich, die Biegewandler 4, 5 nach Art sogenannter Trimorph-Biegewandler auszuführen, bei denen zwischen den beiden Piezokörpern 28a, 28b noch eine Träger- schicht sitzt. Mischformen mit unterschiedlichem Biegewandleraufbau innerhalb der Biegewandlereinheit 6 könnten ebenfalls realisiert werden.Finally, it would also be possible to design the bending transducers 4, 5 in the manner of so-called trimorph bending transducers, in which there is still a carrier layer between the two piezo bodies 28a, 28b. Mixed forms with different bending transducer structures within the bending transducer unit 6 could also be implemented.
In Fig. 3 sind die an der Oberseite der Biegewandler 4, 5 platzierten Elektroden der Elektrodenanordnung 27a durch eine Schraffur kenntlich gemacht. Eine vergleichbare Elektrodenstruktur befindet sich an der Unterseite der Biegewandler. Im Bereich des Lagerungsabschnittes 7 abgehende elektrische Lei- ter 33 führen zu den elektrischen Kontaktmitteln 13, 14, die die elektrische Ansteuerung der Biegewandlereinheit 6 ermöglichen.In FIG. 3, the electrodes of the electrode arrangement 27a placed on the upper side of the bending transducers 4, 5 are identified by hatching. A comparable electrode structure is located on the underside of the bending transducers. In the area of the storage section 7, outgoing electrical conductors 33 lead to the electrical contact means 13, 14, which enable the electrical control of the bending transducer unit 6.
Die Biegewandler 4, 5 können beispielsweise so ausgebildet sein, dass eine individuelle Ansteuerung möglich ist und ein voneinander unabhängiger Betrieb stattfinden kann. Denkbar wäre aber auch eine dahingehende elektrische Verschaltung, dass bei Anlegen einer Ansteuerspannung beide Biegewandler 4 , 5 automatisch eine vorbestimmte Bewegung ausführen, bei- spielsweise eine gegensinnige Auslenkbewegung. Diese Verschaltung kann unmittelbar auf der Biegewandlereinheit 6 vorgesehen werden.The bending transducers 4, 5 can, for example, be designed such that individual control is possible and operation can take place independently of one another. However, it would also be conceivable to have an electrical connection such that when a control voltage is applied, both bending transducers 4, 5 automatically execute a predetermined movement, for example an opposite deflection movement. This connection can be provided directly on the bending transducer unit 6.
Ein Vorteil der Biegewandlereinheit 6 besteht darin, dass in ihr gleichzeitig mehrere einzelne Biegewandler 4, 5 zu einer steifen, selbsttragenden Baueinheit zusam engefasst sind, die über einen gemeinsamen Lagerungsabschnitt 7 verfügen, der eine gleichzeitige Fixierung sämtlicher Biegewandler 4, 5 er- möglicht, wobei eine gegenseitige Ausrichtung der einzelnen Biegewandler 4, 5 entfallen kann. Auszurichten ist lediglich die Biegewandlereinheit 6 als Ganzes.An advantage of the bending transducer unit 6 is that several individual bending transducers 4, 5 are combined into a rigid, self-supporting structural unit at the same time, which have a common bearing section 7, which simultaneously fixes all the bending transducers 4, 5. possible, whereby a mutual alignment of the individual bending transducers 4, 5 can be omitted. Only the bending transducer unit 6 as a whole is to be aligned.
Der Lagerungsabschnitt 7 hat vorzugsweise eine rechteckige oder quadratische Kontur.The storage section 7 preferably has a rectangular or square contour.
Bei der Ausrichtung der Biegewandlereinheit 6 im Ventilgehäuse 2 kann hilfreich sein, wenn das Ventilgehäuse 2 über einen Stabilisierungsvorsprung 33 verfügt, der bei montierter Biegewandlereinheit 6 in den schlitzartigen Zwischenraum 12 eingreift und dessen Länge so gewählt ist, dass er sich dafür eignet, die Längsausrichtung der Biegewandlereinheit 6 zu unterstützen.When aligning the bending transducer unit 6 in the valve housing 2, it can be helpful if the valve housing 2 has a stabilizing projection 33 which engages in the slot-like intermediate space 12 when the bending transducer unit 6 is mounted and whose length is selected such that it is suitable for the longitudinal alignment of the Support bending transducer unit 6.
Zur Herstellung der Biegewandlereinheit 6 greift man zweckmäßigerweise auf eine der gewünschten Anzahl von Piezomaterial~ schichten entsprechende Anzahl von aus Piezomaterial bestehenden Schichtkomponenten zurück, die dem gewünschten Umriss der Biegewandlereinheit 6 entsprechen und die man, unter Berücksichtigung der Elektrodenanordnungen, aufeinander schichtet und fest miteinander verbindet. Dabei besteht prinzipiell auch die Möglichkeit, die Biegewandlereinheit 6 mit nur einer einzigen Schichtkomponente zu realisieren. Ausgangspunkt kann eine rechteckige längliche Piezomaterialplatte sein, in die man zur Bildung des schlitzartigen Zwischenraumes 12 durch Materialabtrag einen Einschnitt einbringt. Die Biegewandlereinheit 6 kann man sich also insbesondere derart aufgebaut vorstellen, dass entweder eine einzige Schichtkomponente oder mehrere übereinandergeschichtete Schichtkomponenten 29a, 29b vorhanden sind, die aus Piezoma- terial bestehen und einen einstückigen Aufbau haben, wobei von einem den Lagerungsabschnitt 7 definierenden Endbereich mehrere zueinander parallele Streifenkörper abgehen, die jeweils zu einem Biegewandler gehören. For the production of the bending transducer unit 6, it is expedient to use a number of layer components consisting of piezo material which correspond to the desired number of piezo material layers and which correspond to the desired outline of the bending transducer unit 6 and which, taking into account the electrode arrangements, are layered on top of one another and firmly connected to one another. In principle, there is also the possibility of realizing the bending transducer unit 6 with only a single layer component. The starting point can be a rectangular, elongated piezo material plate into which an incision is made to remove the slot-like intermediate space 12 by material removal. The bending transducer unit 6 can thus be conceived in particular in such a way that either a single layer component or a plurality of layer components 29a, 29b layered one on top of the other are present, which consist of piezomaterial and have a one-piece structure, with several parallel to one another from an end region defining the bearing section 7 Strip strips that each belong to a bending transducer.

Claims

Ansprüche Expectations
1. Piezo-Biegewandlereinheit, mit mindestens zwei Biege- Wandlern (4, 5), die jeweils mindestens einen, eine oder mehrere Piezomaterialschichten (27a, 27b) enthaltenden Piezokörper (28a, 28b) mit zugehöriger Elektrodenanordnung (32a, 32b) aufweisen und die mit zueinander parallelen Auslenkebenen (16, 17) längsseits nebeneinander angeordnet sind, wobei sie am einen Endbereich (7) der Biegewandlereinheit (6) mit den Piezomaterialschichten (27a, 27b) ihrer Piezokörper (28a, 28b) einstückig fest miteinander verbunden sind.1. Piezo bending transducer unit, with at least two bending transducers (4, 5), each having at least one, one or more piezo material layers (27a, 27b) containing piezo bodies (28a, 28b) with associated electrode arrangement (32a, 32b) and the with mutually parallel deflection planes (16, 17) are arranged alongside one another, with them being integrally connected to one another at one end region (7) of the bending transducer unit (6) with the piezo material layers (27a, 27b) of their piezo bodies (28a, 28b).
2. Piezo-Biegewandlereinheit nach Anspruch 1, dadurch ge- kennzeichnet, dass der die einstückige Verbindung der Biegewandler (4, 5) aufweisende Endbereich einen Lagerungsabschnitt (7) zur Fixierung der Biegewandlereinheit (6) im Gebrauchszustand bildet.2. Piezo bending transducer unit according to claim 1, character- ized in that the one-piece connection of the bending transducers (4, 5) having end region forms a bearing section (7) for fixing the bending transducer unit (6) in the state of use.
3. Piezo-Biegewandlereinheit nach Anspruch 1 oder 2 , dadurch gekennzeichnet, dass die Biegewandler (4, 5) so ausgebildet sind, dass eine individuelle Ansteuerung möglich ist.3. Piezo bending transducer unit according to claim 1 or 2, characterized in that the bending transducers (4, 5) are designed so that an individual control is possible.
4. Piezo-Biegewandlereinheit nach einem der Ansprüche 1 bis 3 , gekennzeichnet durch eine dahingehende elektrische Ver- schaltung, dass die Biegewandler (4, 5) bei Anlegen einer entsprechenden AnsteuerSpannung automatisch eine gegensinnige Auslenkbewegung ausführen. 4. Piezo bending transducer unit according to one of claims 1 to 3, characterized by an electrical connection to the effect that the bending transducers (4, 5) automatically execute an opposite deflection movement when a corresponding control voltage is applied.
5. Piezo-Biegewandlereinheit nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass zwischen benachbarten Biegewandlern ein schlitzartiger Zwischenraum (12) vorgesehen ist.5. Piezo bending transducer unit according to one of claims 1 to 4, characterized in that a slot-like intermediate space (12) is provided between adjacent bending transducers.
6. Piezoventil, gekennzeichnet durch eine in einem Ventilgehäuse (2) angeordnete Piezo-Biegewandlereinheit nach einem der Ansprüche 1 bis 5.6. Piezo valve, characterized by a in a valve housing (2) arranged piezo bending transducer unit according to one of claims 1 to 5.
7. Piezoventil nach Anspruch 6, dadurch gekennzeichnet, dass die Biegewandlereinheit (6) mit ihrem die einstückige Verbindung aufweisenden Endbereich bezüglich dem Ventilgehäuse (2) fest eingespannt ist. 7. Piezo valve according to claim 6, characterized in that the bending transducer unit (6) is firmly clamped with its end region having the one-piece connection with respect to the valve housing (2).
PCT/EP2001/012843 2000-11-20 2001-11-07 Piezo flexural transducer unit and piezo valve which is equipped with the same WO2002041413A1 (en)

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EP1391647B1 (en) * 2002-08-17 2005-10-26 FESTO AG & Co Multiple way valve
WO2005084952A1 (en) * 2004-03-03 2005-09-15 Rea Elektronik Gmbh Ink-jet printing element
WO2005110759A1 (en) * 2004-05-11 2005-11-24 Rea Elektronik Gmbh Ink jet write head

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