US20090151906A1 - Heat sink with vapor chamber - Google Patents
Heat sink with vapor chamber Download PDFInfo
- Publication number
- US20090151906A1 US20090151906A1 US11/959,313 US95931307A US2009151906A1 US 20090151906 A1 US20090151906 A1 US 20090151906A1 US 95931307 A US95931307 A US 95931307A US 2009151906 A1 US2009151906 A1 US 2009151906A1
- Authority
- US
- United States
- Prior art keywords
- heat sink
- plate
- wick layer
- tank
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F28—HEAT EXCHANGE IN GENERAL
- F28D—HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA DO NOT COME INTO DIRECT CONTACT
- F28D15/00—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies
- F28D15/02—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes
- F28D15/04—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure
- F28D15/046—Heat-exchange apparatus with the intermediate heat-transfer medium in closed tubes passing into or through the conduit walls ; Heat-exchange apparatus employing intermediate heat-transfer medium or bodies in which the medium condenses and evaporates, e.g. heat pipes with tubes having a capillary structure characterised by the material or the construction of the capillary structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/427—Cooling by change of state, e.g. use of heat pipes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Definitions
- the present invention relates to a heat sink with vapor chamber, and more particularly to a heat sink with vapor chamber having wick structure.
- heat is generated during operations of electronic components, such as integrated circuit chips.
- cooling devices such as heat sinks are often employed to dissipate the generated heat away from these electronic components.
- a heat sink is more effective when there is a uniform heat flux applied over an entire base of the heat sink.
- a heat sink with a large base is attached to an integrated circuit chip with a much smaller contact area, there is significant resistance to the flow of heat to the other portions of the heat sink base which are not in direct contact with the chip.
- a mechanism for overcoming the resistance to heat flow in a heat sink base is to attach a heat spreader to the heat sink base or directly make the heat sink base as a heat spreader.
- the heat spreader includes a vacuum chamber defined therein, a wick structure provided in the chamber and lining an inside wall of the chamber, and a working fluid contained in chamber.
- the working fluid contained in the wick structure corresponding to a hot contacting location vaporizes.
- the vapor then spreads to fill the chamber, and wherever the vapor comes into contact with a cooler surface of the chamber, it releases its latent heat of vaporization and condenses.
- the condensate returns to the hot contacting location via a capillary force generated by the wick structure. Thereafter, the condensate frequently vaporizes and condenses to form a circulation to thereby remove the heat generated by the chip.
- the electronic components are made to be more powerful while occupying a smaller size.
- a heating area of the heat spreader needs to transfer more heat to a cooling area of the heat spreader.
- the heating area of the heat spreader is decreased as the size of the electronic component is decreased, and the cooling area of the heat spreader is commensurately increased. Therefore, the heat flux density between the heating and the cooling areas of the heat spreader is increased.
- the wick structure needs to have more powerful heat transfer capability.
- the wick structure of the heat spreader selected from the conventional types, such as mesh, fiber, fine grooves, and sintered powder cannot satisfy such requirement, which further limits the increase for the heat transfer capability of the heat spreader.
- a heat sink in accordance with a preferred embodiment of the present invention comprises a tank and a plate covering on the tank and hermetically engaging with the tank.
- the tank comprises a base for absorbing heat from heat-generating members and a first wick layer formed at an inner face of base.
- the plate has a second wick layer formed at an inner face thereof.
- a chamber is defined between the tank and the plate and contains working fluid therein.
- An artery mesh is located in the chamber between the tank and the plate. The artery mesh is in porosity communication with the first wick layer and the second wick layer.
- FIG. 1 is an isometric, exploded view of a heat sink in accordance with a preferred embodiment of the present invention
- FIG. 2 is an assembled view of FIG. 1 ;
- FIG. 3 is an inverted view of FIG. 2 ;
- FIG. 4 is a sectional view of FIG. 2 taking along a line IV-IV;
- FIG. 5 is an enlarged view of a part V shown in FIG. 4 .
- the heat sink comprises a heat spreader 10 and a plurality of fins 30 arranged on the heat spreader 10 .
- the heat spreader 10 comprises a tank 110 and a top plate 150 hermetically covering on the tank 110 , thereby defining a chamber 180 between the tank 110 and the plate 150 .
- the tank 110 comprises a cuboids body 111 and a flange 112 circumferentially extending outwardly from the body 111 .
- the body 111 comprises a heat absorbing base 113 and four interconnecting sidewalls 114 integrally extending upwardly from the base 113 .
- a first wick layer 116 is formed on an inner face of the body 111 by sintering metal power at the inner face.
- the first wick layer 116 covers allover the inner face, that is to say, the first wick layer 116 covers the base 113 and the sidewalls 114 of the tank 110 .
- a second wick layer 156 is formed on an inner face of the plate 150 by tightly engaging a mesh sheet to the inner face.
- the first wick layer 116 is a sintered wick layer which is formed from sintering metal power.
- the second wick layer 156 is a meshed wick layer which is formed from a mesh.
- the first wick layer 116 on the sidewalls 114 extends toward the plate 150 to engage with the second wick layer 156 .
- the first wick layer 116 and the second wick layer 156 are in porosity communication, therefore, liquid can flows between the first wick layer 116 and the second wick layer 156 .
- the plate 150 has edges thereof air-tightly and liquid-tightly engaging with the flange 112 of the tank 110 .
- Working fluid (not labeled) is filled in the chamber 180 .
- a plurality of artery meshes 170 are positioned between the base 113 and the plate 150 .
- the artery mesh 170 is a flexible elongate hollow tube which is woven from a plurality of metal wires such as copper wires, aluminum wires, or stainless steel wires.
- the artery mesh 170 can also be woven from a plurality of fiber wires.
- a plurality of pores is defined in a wall (not labeled) of the artery mesh 170 .
- the pores communicate the artery meshes 170 with the first wick layer 116 and the second wick layer 156 so that the working fluid can move between top and bottom portions of the heat spreader 10 . That is, the working fluid can move between the second wick layer 156 and the first wick layer 116 via capillary forces generated by the artery meshes 170 .
- the artery mesh 170 has an annular cross section and a channel (not labeled) defined in a middle portion of the artery mesh 170 .
- each artery mesh 170 is substantially L-shaped in profile.
- the four artery meshes 170 are spaced from each other and define a substantially X-shaped figure between the base 113 and the plate 150 .
- Each artery mesh 170 has one end therefore located at a central portion (not labeled) of the base 113 and another end thereof extending to a corresponding lateral portion (not labeled) of the base 113 .
- Each fin 30 is made from metal sheet.
- the fin 30 is substantially L-shaped, and comprises a contacting portion thermally contacting the plate 150 of the heat spreader 10 and a heat dissipation portion extending remote from the plate 150 .
- the base 113 of the tank 110 of the heat spreader 10 has the central portion thereof thermally contacting and absorbing heat from a heat-generating chip.
- the working fluid in the chamber 180 of the tank 110 is heated and vapored upwardly to reach the plate 150 of the heat spreader 10 .
- the vapored working fluid exchanges heat with the plate 150 and then is condensed to liquid.
- the liquid refluences to the base 113 via the second wick layer 156 , the first wick layer 116 and the artery meshes 170 .
- the artery meshes 170 not only carry the working liquid from the second wick layer 156 to the first wick layer 116 , but also carry the working liquid to a central portion of the base 113 from a lateral portion of the base 113 .
- the vapored and condensed cycle of the working fluid in the tank 110 continues, the heat generated by the chip is transferred to the plate 150 , and the heat in the plate 150 is dissipated by the fins 30 on the plate 150 .
Abstract
Description
- 1. Field of the Invention
- The present invention relates to a heat sink with vapor chamber, and more particularly to a heat sink with vapor chamber having wick structure.
- 2. Description of Related Art
- It is well known that heat is generated during operations of electronic components, such as integrated circuit chips. To ensure normal and safe operations, cooling devices such as heat sinks are often employed to dissipate the generated heat away from these electronic components.
- As progress continues to be made in the electronics art, more components on the same real estate generate more heat. The heat sinks used to cool these chips are accordingly made larger in order to possess a higher heat removal capacity, which causes the heat sinks to have a much larger footprint than the chips. Generally speaking, a heat sink is more effective when there is a uniform heat flux applied over an entire base of the heat sink. When a heat sink with a large base is attached to an integrated circuit chip with a much smaller contact area, there is significant resistance to the flow of heat to the other portions of the heat sink base which are not in direct contact with the chip.
- A mechanism for overcoming the resistance to heat flow in a heat sink base is to attach a heat spreader to the heat sink base or directly make the heat sink base as a heat spreader. Typically, the heat spreader includes a vacuum chamber defined therein, a wick structure provided in the chamber and lining an inside wall of the chamber, and a working fluid contained in chamber. As an integrated circuit chip is maintained in thermal contact with the heat spreader, the working fluid contained in the wick structure corresponding to a hot contacting location vaporizes. The vapor then spreads to fill the chamber, and wherever the vapor comes into contact with a cooler surface of the chamber, it releases its latent heat of vaporization and condenses. The condensate returns to the hot contacting location via a capillary force generated by the wick structure. Thereafter, the condensate frequently vaporizes and condenses to form a circulation to thereby remove the heat generated by the chip.
- As progress continues to be made in electronics area, the electronic components are made to be more powerful while occupying a smaller size. Thus, a heating area of the heat spreader needs to transfer more heat to a cooling area of the heat spreader. In contrast, the heating area of the heat spreader is decreased as the size of the electronic component is decreased, and the cooling area of the heat spreader is commensurately increased. Therefore, the heat flux density between the heating and the cooling areas of the heat spreader is increased. Accordingly, the wick structure needs to have more powerful heat transfer capability. However, the wick structure of the heat spreader selected from the conventional types, such as mesh, fiber, fine grooves, and sintered powder, cannot satisfy such requirement, which further limits the increase for the heat transfer capability of the heat spreader.
- What is needed therefore is to provide a heat sink with vapor chamber having wick structures which achieves good heat dissipation performance.
- A heat sink in accordance with a preferred embodiment of the present invention comprises a tank and a plate covering on the tank and hermetically engaging with the tank. The tank comprises a base for absorbing heat from heat-generating members and a first wick layer formed at an inner face of base. The plate has a second wick layer formed at an inner face thereof. A chamber is defined between the tank and the plate and contains working fluid therein. An artery mesh is located in the chamber between the tank and the plate. The artery mesh is in porosity communication with the first wick layer and the second wick layer.
- Many aspects of the present heat sink with vapor chamber can be better understood with reference to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present portable projector using a related heat dissipation system. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.
-
FIG. 1 is an isometric, exploded view of a heat sink in accordance with a preferred embodiment of the present invention; -
FIG. 2 is an assembled view ofFIG. 1 ; -
FIG. 3 is an inverted view ofFIG. 2 ; -
FIG. 4 is a sectional view ofFIG. 2 taking along a line IV-IV; and -
FIG. 5 is an enlarged view of a part V shown inFIG. 4 . - Referring to
FIGS. 1 and 2 , the heat sink comprises aheat spreader 10 and a plurality offins 30 arranged on theheat spreader 10. - Referring also to
FIGS. 3-5 , theheat spreader 10 comprises atank 110 and atop plate 150 hermetically covering on thetank 110, thereby defining achamber 180 between thetank 110 and theplate 150. Thetank 110 comprises acuboids body 111 and aflange 112 circumferentially extending outwardly from thebody 111. Thebody 111 comprises aheat absorbing base 113 and fourinterconnecting sidewalls 114 integrally extending upwardly from thebase 113. Afirst wick layer 116 is formed on an inner face of thebody 111 by sintering metal power at the inner face. Thefirst wick layer 116 covers allover the inner face, that is to say, thefirst wick layer 116 covers thebase 113 and thesidewalls 114 of thetank 110. Asecond wick layer 156 is formed on an inner face of theplate 150 by tightly engaging a mesh sheet to the inner face. Thefirst wick layer 116 is a sintered wick layer which is formed from sintering metal power. Thesecond wick layer 156 is a meshed wick layer which is formed from a mesh. Thefirst wick layer 116 on thesidewalls 114 extends toward theplate 150 to engage with thesecond wick layer 156. Thefirst wick layer 116 and thesecond wick layer 156 are in porosity communication, therefore, liquid can flows between thefirst wick layer 116 and thesecond wick layer 156. Theplate 150 has edges thereof air-tightly and liquid-tightly engaging with theflange 112 of thetank 110. Working fluid (not labeled) is filled in thechamber 180. - In the
chamber 180 of theheat spreader 10, a plurality ofartery meshes 170 are positioned between thebase 113 and theplate 150. In this embodiment, there are fourartery meshes 170 constructed in the heat sink. Theartery mesh 170 is a flexible elongate hollow tube which is woven from a plurality of metal wires such as copper wires, aluminum wires, or stainless steel wires. Alternatively, theartery mesh 170 can also be woven from a plurality of fiber wires. A plurality of pores is defined in a wall (not labeled) of theartery mesh 170. The pores communicate theartery meshes 170 with thefirst wick layer 116 and thesecond wick layer 156 so that the working fluid can move between top and bottom portions of theheat spreader 10. That is, the working fluid can move between thesecond wick layer 156 and thefirst wick layer 116 via capillary forces generated by theartery meshes 170. Theartery mesh 170 has an annular cross section and a channel (not labeled) defined in a middle portion of theartery mesh 170. In this embodiment, eachartery mesh 170 is substantially L-shaped in profile. The fourartery meshes 170 are spaced from each other and define a substantially X-shaped figure between thebase 113 and theplate 150. Eachartery mesh 170 has one end therefore located at a central portion (not labeled) of thebase 113 and another end thereof extending to a corresponding lateral portion (not labeled) of thebase 113. - Each
fin 30 is made from metal sheet. Thefin 30 is substantially L-shaped, and comprises a contacting portion thermally contacting theplate 150 of theheat spreader 10 and a heat dissipation portion extending remote from theplate 150. - In use, the
base 113 of thetank 110 of theheat spreader 10 has the central portion thereof thermally contacting and absorbing heat from a heat-generating chip. The working fluid in thechamber 180 of thetank 110 is heated and vapored upwardly to reach theplate 150 of theheat spreader 10. At theplate 150, the vapored working fluid exchanges heat with theplate 150 and then is condensed to liquid. The liquid refluences to thebase 113 via thesecond wick layer 156, thefirst wick layer 116 and the artery meshes 170. In thetank 110, the artery meshes 170 not only carry the working liquid from thesecond wick layer 156 to thefirst wick layer 116, but also carry the working liquid to a central portion of the base 113 from a lateral portion of thebase 113. The vapored and condensed cycle of the working fluid in thetank 110 continues, the heat generated by the chip is transferred to theplate 150, and the heat in theplate 150 is dissipated by thefins 30 on theplate 150. - It is believed that the present invention and its advantages will be understood from the foregoing description, and it will be apparent that various changes may be made thereto without departing from the spirit and scope of the invention or sacrificing all of its material advantages, the examples hereinbefore described merely being preferred or exemplary embodiments of the invention.
Claims (15)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/959,313 US20090151906A1 (en) | 2007-12-18 | 2007-12-18 | Heat sink with vapor chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/959,313 US20090151906A1 (en) | 2007-12-18 | 2007-12-18 | Heat sink with vapor chamber |
Publications (1)
Publication Number | Publication Date |
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US20090151906A1 true US20090151906A1 (en) | 2009-06-18 |
Family
ID=40751684
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US11/959,313 Abandoned US20090151906A1 (en) | 2007-12-18 | 2007-12-18 | Heat sink with vapor chamber |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090195984A1 (en) * | 2008-02-04 | 2009-08-06 | Meyer Iv George Anthony | Cooling device |
US20130199757A1 (en) * | 2012-02-03 | 2013-08-08 | Celsia Technologies Taiwan, Inc. | Heat-dissipating module having loop-type vapor chamber |
TWI596312B (en) * | 2016-11-10 | 2017-08-21 | 展緻企業有限公司 | Vapor chamber device with integrated heat sink and method for manufacturing the same |
US20180164042A1 (en) * | 2016-12-08 | 2018-06-14 | Microsoft Technology Licensing, Llc | Lost wax cast vapor chamber device |
US20190113290A1 (en) * | 2017-10-12 | 2019-04-18 | Tai-Sol Electronics Co., Ltd. | Vapor chamber with inner ridge forming passage |
US10388540B2 (en) * | 2017-03-13 | 2019-08-20 | International Business Machines Corporation | High-performance compliant heat-exchanger comprising vapor chamber |
US20200365485A1 (en) * | 2019-05-15 | 2020-11-19 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method for manufacturing the same |
US20200378690A1 (en) * | 2019-05-27 | 2020-12-03 | Asia Vital Components (China) Co., Ltd. | Heat dissipation unit with axial capillary structure |
WO2021188128A1 (en) * | 2020-03-18 | 2021-09-23 | Kelvin Thermal Technologies, Inc. | Deformed mesh thermal ground plane |
US20220104399A1 (en) * | 2020-09-25 | 2022-03-31 | Intel Corporation | Cooling apparatus with two-tier vapor chamber |
US11353269B2 (en) | 2009-03-06 | 2022-06-07 | Kelvin Thermal Technologies, Inc. | Thermal ground plane |
US11598594B2 (en) | 2014-09-17 | 2023-03-07 | The Regents Of The University Of Colorado | Micropillar-enabled thermal ground plane |
US11930621B2 (en) * | 2020-06-19 | 2024-03-12 | Kelvin Thermal Technologies, Inc. | Folding thermal ground plane |
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US6315032B1 (en) * | 1998-12-15 | 2001-11-13 | Foxconn Precision Components Co., Ltd. | Heat sink and method for making the same |
US6477045B1 (en) * | 2001-12-28 | 2002-11-05 | Tien-Lai Wang | Heat dissipater for a central processing unit |
US6639802B1 (en) * | 2002-11-05 | 2003-10-28 | Hon Hai Precision Ind. Co., Ltd. | Heat sink with interlocked fins |
US20040040696A1 (en) * | 2002-08-21 | 2004-03-04 | Samsung Electronics Co., Ltd. | Flat heat transferring device and method of fabricating the same |
US20050189091A1 (en) * | 2003-06-26 | 2005-09-01 | Rosenfeld John H. | Brazed wick for a heat transfer device and method of making same |
US20060005950A1 (en) * | 2004-07-06 | 2006-01-12 | Wang Chin W | Structure of heat conductive plate |
US20060144565A1 (en) * | 2004-12-30 | 2006-07-06 | Delta Electronics, Inc. | Heat dissipation devices and fabrication methods thereof |
US7137442B2 (en) * | 2003-12-22 | 2006-11-21 | Fujikura Ltd. | Vapor chamber |
US7261142B2 (en) * | 2003-02-17 | 2007-08-28 | Fujikura, Ltd. | Heat pipe excellent in reflux characteristic |
US20070261242A1 (en) * | 2006-05-15 | 2007-11-15 | Foxconn Technology Co., Ltd. | Method for manufacturing phase change type heat sink |
US20070295486A1 (en) * | 2006-04-21 | 2007-12-27 | Taiwan Microloops Corp. | Heat spreader with composite micro-structure |
US20080210407A1 (en) * | 2005-01-06 | 2008-09-04 | Celsia Technologies Korea Inc. | Heat Transfer Device and Manufacturing Method Thereof Using Hydrophilic Wick |
US20080283222A1 (en) * | 2007-05-18 | 2008-11-20 | Foxconn Technology Co., Ltd. | Heat spreader with vapor chamber and heat dissipation apparatus using the same |
-
2007
- 2007-12-18 US US11/959,313 patent/US20090151906A1/en not_active Abandoned
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US4019571A (en) * | 1974-10-31 | 1977-04-26 | Grumman Aerospace Corporation | Gravity assisted wick system for condensers, evaporators and heat pipes |
US6315032B1 (en) * | 1998-12-15 | 2001-11-13 | Foxconn Precision Components Co., Ltd. | Heat sink and method for making the same |
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US20070295486A1 (en) * | 2006-04-21 | 2007-12-27 | Taiwan Microloops Corp. | Heat spreader with composite micro-structure |
US20070261242A1 (en) * | 2006-05-15 | 2007-11-15 | Foxconn Technology Co., Ltd. | Method for manufacturing phase change type heat sink |
US20080283222A1 (en) * | 2007-05-18 | 2008-11-20 | Foxconn Technology Co., Ltd. | Heat spreader with vapor chamber and heat dissipation apparatus using the same |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090195984A1 (en) * | 2008-02-04 | 2009-08-06 | Meyer Iv George Anthony | Cooling device |
US7599185B2 (en) * | 2008-02-04 | 2009-10-06 | Celsia Technologies Taiwan, Inc. | Cooling device |
US11353269B2 (en) | 2009-03-06 | 2022-06-07 | Kelvin Thermal Technologies, Inc. | Thermal ground plane |
US20130199757A1 (en) * | 2012-02-03 | 2013-08-08 | Celsia Technologies Taiwan, Inc. | Heat-dissipating module having loop-type vapor chamber |
US8792238B2 (en) * | 2012-02-03 | 2014-07-29 | Celsia Technologies Taiwan, Inc. | Heat-dissipating module having loop-type vapor chamber |
US11598594B2 (en) | 2014-09-17 | 2023-03-07 | The Regents Of The University Of Colorado | Micropillar-enabled thermal ground plane |
TWI596312B (en) * | 2016-11-10 | 2017-08-21 | 展緻企業有限公司 | Vapor chamber device with integrated heat sink and method for manufacturing the same |
US10451356B2 (en) * | 2016-12-08 | 2019-10-22 | Microsoft Technology Licensing, Llc | Lost wax cast vapor chamber device |
US20180164042A1 (en) * | 2016-12-08 | 2018-06-14 | Microsoft Technology Licensing, Llc | Lost wax cast vapor chamber device |
US10388540B2 (en) * | 2017-03-13 | 2019-08-20 | International Business Machines Corporation | High-performance compliant heat-exchanger comprising vapor chamber |
US20190113290A1 (en) * | 2017-10-12 | 2019-04-18 | Tai-Sol Electronics Co., Ltd. | Vapor chamber with inner ridge forming passage |
US20200365485A1 (en) * | 2019-05-15 | 2020-11-19 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method for manufacturing the same |
US10985085B2 (en) * | 2019-05-15 | 2021-04-20 | Advanced Semiconductor Engineering, Inc. | Semiconductor device package and method for manufacturing the same |
US20200378690A1 (en) * | 2019-05-27 | 2020-12-03 | Asia Vital Components (China) Co., Ltd. | Heat dissipation unit with axial capillary structure |
US11874067B2 (en) * | 2019-05-27 | 2024-01-16 | Asia Vital Components (China) Co., Ltd | Heat dissipation unit with axial capillary structure |
WO2021188128A1 (en) * | 2020-03-18 | 2021-09-23 | Kelvin Thermal Technologies, Inc. | Deformed mesh thermal ground plane |
US11930621B2 (en) * | 2020-06-19 | 2024-03-12 | Kelvin Thermal Technologies, Inc. | Folding thermal ground plane |
US20220104399A1 (en) * | 2020-09-25 | 2022-03-31 | Intel Corporation | Cooling apparatus with two-tier vapor chamber |
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