TWI266972B - ARDS-an environment monitoring and control device and its design method - Google Patents

Abstract

This invention is about a monitoring device which can be used to monitor the semiconductor equipment signals and to control the specified equipment parts. The monitoring device includes: semiconductor communication standard protocol unit, data storage media unit, program parameters storage media unit, control process unit, data collection unit, and input/output unit. The semiconductor communication standard protocol unit is of SECS compatible communication unit. The device uses the SECS unit to communicate with the semiconductor equipment or facilities. The messages got from SECS unit are sent to the control process unit and are decoded to an internal message of the monitoring device. Basing on the internal message, the data collection unit collects the semiconductor equipments signals from their environment. Afterward, the collected data will be sent to the control process unit. The control process unit takes the parameters which saved in the parameter storage media to decide how to analysis the collected data. According the analysis result, the control process unit will send the proper information to the semiconductor facilities through the SECS unit.

Description

1266972 V. INSTRUCTIONS (1) 所属Invented by the invention - Environmental monitoring of the communication protocol of the system and environmental monitoring semiconductor manufacturing equipment of the present invention [Prior Art] According to the I Agreement, the information cannot be directly used in the technical field. A semiconductor device and a computer, a device for controlling functions, a device for controlling auxiliary devices, a device for semi-conducting communication, or a program for information gathering and production equipment, particularly a method for using semiconductors to produce semiconductor devices with integrated systems. The environmental monitoring exchange and intelligence are used to have a semi-general application, i will prepare the ring for the ring, and then the brain. The use of the semi-prepared, semi-conducting production unit on the computer includes this environmental monitoring in view of this maintenance and price advantage. The processing unit can be used to reduce the semiconductor. SUMMARY OF THE INVENTION Each of the monitoring computers of the present invention collects a phase-conductor production computer integration program logic control method, which requires a suitable environmental monitoring system. Such as the production of turtles, the collection. The conductor habitat monitoring device can be connected to the information and communication system or the system and the memory control module. Remote transmission, maintenance structure simple support and a small reduction of the audit. It is installed in semi-conducting computers or information services and semiconductor newspapers using a dedicated serial communication protocol. In the case of these serial communication protocols where the input and output are difficult and the price, the user device and its input and output control facilities are used, the industrial production and industrial production reuse environment monitoring and monitoring facilities are set. It is expensive. It is easy to design the calculation cost of the method, and also aims to provide an environmental supervision for semiconductor production equipment.

Page 8 1266972 V. INSTRUCTIONS (2) The design method of the auxiliary device, which can produce and disassemble the benefits easily. The slightly assisted device has a simple structure 'installation and: the environment provides - the ring for the production of vehicle conductors. The device can be collected according to the semiconductor... and the semiconductor production equipment is detailed. The degree of v 4 g two messages. The invention only requires the use of low complex points. The ^ processing can be completed in advance, and it is easy to install. It is easy to install. It is a kind of internal logic calculation unit. , Ji = potential. The production and processing of the production type is early, the analogy is into the production of r L hidden media, communication 埠, digital input and backup environment "and control";: 2 output 埠 'to achieve semiconductor production equipment installed" Yun 5: ^ 2: /J, the environmental monitoring and control communication protocol for the production equipment SECS communication communication / use of communication and has a semi-inductive information; according to the input message, the information is connected to obtain the command message Converting the internal information of the cost setting; f The processing order f interprets and interprets the output input unit for the environment e, and the early element according to the internal message translucent operation control unit handles the information and then the information is transferred to the modal parameter storage medium. The content determines the operation, and the different control processing unit interprets the information node 6 according to the program element;

4 stored in 1 material storage media and in accordance with SECS 1266972

^ I V. Invention Description (3) Communication message command to send out information; information operation Zeng 〇 d ' Interpretation of intelligence results * Semiconductor students * Equipment ^ ^ * The root can also be interrupted and cannot be executed, in the auxiliary device of the present invention, Preface: When environmental monitoring and control auxiliary equipment occurs = a watchdog type::: The dog program will activate the environmental monitoring and control auxiliary device by environmental monitoring and control. Reset, to re-/for the above purpose, the semi-guided media of the present invention includes: a semiconductor production system for the production equipment:: % 楗 - - - - - - - - - - - -疋, 兀, the function of the information capability; data storage media, for the production facility to store media; intelligence computing control room = poor material; program parameters with tributary storage media and program parameter storage media, 1 = this; the data collection unit is connected to the intelligence operation control processing unit. The environmental monitoring and control auxiliary device has a medium for storing and collecting semi-conducting 1 μ: report; and an output input unit coupled to the situation. Into the unit, it has the function of collecting through the connection with the semiconductor device. In order to achieve the above object, the present invention utilizes a ^ 巍 calculation process ^ 'the internal has a computational logic unit, a data memory medium, a digital input and output 埠, an analog input 埠 and a clock input/output 埠f = Input interface for environmental monitoring and controller devices for semiconductor manufacturing equipment.

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W 1266972 V. INSTRUCTIONS (4) [Embodiment] The design of the dish control device with the semiconductor ^^^^ is implemented on the integrated computing processing unit. The method is the application information media. The media is divided into: semiconductor production equipment communication, early communication, consultation, "l is w _, Bessie storage media management unit, program parameter storage media two self = two two, report operation control processing unit, data collection unit and control News output unit. μ二二1, which shows a schematic diagram of a program information medium #借二二π二 in a preferred embodiment of the present invention. As shown in the figure, the semiconductor production device of the present invention includes: a semiconductor production equipment communication assistant H: a storage medium management unit 2; a program parameter storage medium control processing unit 4; a data collection unit 5 In the case of Yuyuan Semiconductor Manufacturing Co., Ltd., the production and supply of the company, and the design of the ^^^ protocol, it has the ability to communicate with the facility. From,, there is a data transmission media management unit 2 _ material collection unit 5 received in the 丨 丨 中 & 又 又 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有 具有Processing the media 35 management unit of the program parameter storage medium is stored in the middle of the medium management unit: the ten has a program mode. In order to change the operation of the present invention in the operation control control processing control unit, the design has the intelligence operation to pre-order the information from the various units 1266972. 5, invention description (5) analysis 'and the analysis results Make decisions and perform task assignments for specific units. The function of the watchdog program is also provided in the e-intelligence control unit 4, which can reset the device itself when the device is disabled to restart the device. The information operation control processing unit 4 of the present invention is preferably an integrated computing processing unit. In the data collection unit 5, a program media having data collection is designed to perform data collection at a fixed time or at any time. In the control message output unit 6, a private information medium having a control message transmission _ is designed to send a unit message from the information operation control process. Please refer to FIG. 2, which is a schematic diagram showing the flow of information processing and waiting for reply when the environmental monitoring and control auxiliary device of the present invention communicates with the semiconductor manufacturing equipment. As shown in the figure, the information processing and replying method for environmental monitoring for the semiconductor manufacturing equipment of the present invention comprises the following steps: waiting for the semiconductor production a and 30 of the SEC protocol unit 31 SECS (Semiconductor)

Equipment Communication Standard (SECS) message incoming (step 1); processing SECS message (step 2); accessing data memory media (step 3); performing semiconductor device intelligence collection (step 4); and returning to SECS Message (step 5). In the first step, the present invention waits for the message sent by the communication agreement unit 31 of the semiconductor manufacturing device 30, and stores the information after the message is transmitted. Preferably, the message sent by the communication protocol unit 31 is sent by the S E C S protocol. In step 2, according to the information in step 1, the interpretation is performed and determined.

Page 12 1266972 V. Description of invention (6) Access to data memory media ^ ^ 0 ^ ^ Take care of work or conduct semiconductor equipment 30 information After the sigh of the information is obtained, it will be as good as it is... In the third step, the information on the semiconductor device is reported in the third section of the media. According to the command in step 2, the specified data Λ intelligence 'delivery information operation control processing list is used in & 2 步骤 step 4', according to the command in step 2, the designation input 埠g Lu to Beixun, and The acquired information is delivered to the information processing control processing unit. In the step 5, according to the command in step 2, the message is sent to the semiconductor device 3 connected thereto by means of semiconductor = 1 (refer to FIG. 5). Referring to FIG. 3, it is a schematic diagram of the flow of environmental monitoring and control = communication between the auxiliary device and the semiconductor production equipment in the preferred embodiment of the present invention, and the control = command sending and replying. As shown in the figure, the ring and detection and control method of the present invention includes the following steps in the information processing and communication command sending and replying with the semiconductor manufacturing equipment: waiting for the semiconductor (|the communication protocol unit of the production equipment 30) The SECS message of 31 is passed in (step 1); the SECS message is processed (step 2); the data memory medium 2 is accessed (step 3 performs semiconductor device information collection (step 4); and the semiconductor device 30 is commanded to send out (step 5); and replying to the SECS message (step 6). In the step 1, the present invention waits for the message of the semiconductor facility 30, and stores the information after the message is sent in. In the step 2, according to the step 1 in the information to interpret and decide

Page 13 1266972

V. INSTRUCTIONS (7) The access work of the data storage medium management unit 2 or the intelligence collection of the semiconductor device 30 is carried out. After the information is obtained, it is decided to notify the information content of the semiconductor facility 30. In the step 3, the information information in the designated data storage medium 2 management unit block is delivered to the information operation control processing unit 4 in accordance with the command in the step 2.

In the step 4, according to the command in the step 2, the designated input 璋 is used to obtain the information, and the obtained information is sent to the information operation control processing unit 4 for processing. In the step 5, according to the command in the step 2 and the information result of the step 4, the decision is sent to the receiving unit (not shown) of the semiconductor facility 30 for control purposes. In the step 6, according to the command execution result in the step 5, the message is sent to the semiconductor device 30' connected thereto by the semiconductor communication protocol. The message sent by the communication protocol unit 31 is preferably secs (Semiconductor) The Equipment Communication Standard (SECS) protocol is sent out. 4, which is a block diagram of the intelligence operation control unit 4 of a preferred embodiment of the present invention. As shown in the figure, the information processing type processing unit of the present invention is: memory memory medium 41; calculation logic unit 42; communication output 46 "input output 44, analog input 埠 45; and clock Input and loss

Page 14 1266972

V. Description of the invention (8) ^ Information memory media of the Ministry. The computational logic unit 42 is a computational logic unit internal to the computational processing unit 4. The communication port 43 is a communication device inside the calculation processing unit 4 of the combined type. The digital transmission wheel is a digital system. The internal processing unit 4 is a digital input unit. The analog input processing unit 4 is an analog type input processing unit. The clock input/output unit 系4 6 is a clock input/output unit 内部 inside the integrated unit 4 of the unit. In addition, the integrated processing unit 4 further includes a watchdog program (not shown:), which is: when the device is disabled, the device is reset by itself to enable the attack. Referring to FIG. 5, the control auxiliary device and the body device are connected to the environmental measurement and control auxiliary assembly system 20, wherein the ring is provided, and the environment is the semiconductor factory 30. Between the semiconductor measurement and control auxiliary equipment 30, its body equipment 30 data, sent to the integrated manufacturing SECS communication will command

It shows a schematic diagram of the environmental monitoring semiconductor computer integrated manufacturing system connection and the half-pen monitoring in a preferred embodiment of the present invention. As shown in the figure, the environment of this case is 10 in use, combined with semiconductor computer integration, and environmental monitoring of semiconductor devices 30. < The environment monitoring and control auxiliary device is the function of the monitoring and control of the invention. The integrated manufacturing system 2 〇 = semiconductor computer integrated manufacturing system. And the semiconductor language equipment monitoring occasions. In operation, the environmental system is placed in the integrated manufacturing system 20 and the semi-conductor can be collected by the intelligence collection and control interface and analyzed and judged by the *SECS communication system. 20; or the integrated manufacturing system 20 can also be transmitted via the border monitoring and control auxiliary device.

1266972

The semiconductor device 30.圃〇 圃〇 兵 兵 兵 兵 兵 兵 兵 兵 兵 牵 牵 牵 牵 牵 牵 牵 牵 牵 牵 牵 姊 姊 姊 姊 姊 姊 姊 姊 ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ For the semi-conductor, the weight of the monitor is 示. Α Baskets a and wu %, as shown in the figure, the ice-protecting auxiliary device 1 of the present invention can also be connected with the tongue and the brother. _ J is connected to the semiconductor mine system 20 by multiple connections and丰逡駚4〇Λ 卞 卞 卞 Τ Τ Τ ^ ^ ^ ^ ^ ^ ^ 30 30 30 30 30 30 30 30 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 多重 ΐ ΐ ΐ ΐ ΐ The semiconductor device 3 performs a plurality of: an environmental monitoring and control assisting device 10 is connected to the semiconductor device 3. The number can be increased or decreased depending on the computer. T, Si

Please refer to Multiple Connections for multiple monitoring and control integration. The environmental monitoring of the ring-conductor computer monitors a situation of 20. Please refer to Figure 7 H. The environment monitoring and control of the case. The single SECS communication is used to perform multiple environmental monitoring and dry-up of semiconductor devices. As shown in the figure, the environmental monitoring and control aids in this case can be expanded in series to expand the collection of environmental intelligence collection. The loop detection and control assisting device 10 of the present invention can utilize: the extended connection interface 16 of the invention device (please refer to FIG. 8), and serially connect a plurality of loop monitoring and control assistants of the present invention. Device 丨〇. Such a configuration includes: a semiconductor electrically integrated manufacturing system 2 〇; a plurality of environmental monitoring and control auxiliary devices 10 of the present invention and a plurality of semiconductor devices 3 监控 monitoring occasions. The number of environmental monitoring and control aids 丨〇 and semiconductor devices 3 is the same. Referring to FIG. 8, a schematic diagram of the design of the environmental monitoring and control assisting device 1 using the integrated computing processing unit 4 is illustrated. As shown in the figure, this issue

Page 16 1266972 V. INSTRUCTIONS (10) Monthly environmental monitoring and control auxiliary device 10 device includes: printed circuit board, integrated computing unit 4; interface circuit ;2; power module 13; communication port 埠1 4; connection 埠 1 5 ; and expansion interface 16 and so on. The printed circuit board 11 is used to carry components such as the integrated computing processing unit 4, the interface circuit 12, the power module 13, the communication port 14, the connection port 15, and the expansion interface 16. The far-integrated type different processing unit 4 is placed on the printed circuit board i j '. For a description, please refer to FIG. 4 , which is not described herein. The interface circuit 12 2 is disposed on the printed circuit board and coupled to the integrated computing processing unit 4 and is an isolation interface circuit of the external unit; the power module 13 is disposed on the printed circuit a power supply for the device 1 is provided on the board; the communication port 4 is disposed on the printed circuit board 11 and coupled to the integrated computing processing unit 4, preferably A serial communication port, such as an SECS port or an Ethernet network, is a communication communication system for the semiconductor computer integrated manufacturing system 2; the port is coupled to the integration The type computing processing unit 4 is configured to be connected to the monitored semiconductor device 3; and the expansion interface 16 is coupled to the integrated computing processing unit 4, which is a self-expanding connection interface for expanding the device. The number of connections. In addition, the environmental monitoring and control assisting device 5 of the present invention further includes a body (not shown) for accommodating and protecting the environmental monitoring and control assisting device 10. The disclosure of the present invention is a preferred embodiment. It is familiar with the technical idea of the present invention and is familiar with the technique: κ, it is easy for people to infer ΙΙΗϋ

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1266972

Page 18 1266972 Figure $ Brief Description [Schematic Description] FIG. 1 is a schematic view showing a design method of an information medium unit in a preferred embodiment of the present invention. Fig. 2 is a schematic view showing the flow of information processing and waiting for reply when the environmental monitoring and control auxiliary device of the present invention communicates with the semiconductor manufacturing equipment. FIG. 3 is a schematic diagram showing the flow of information processing of the environmental monitoring and control auxiliary device and the semiconductor production equipment in the present case, and the flow of the control command sending and replying. Fig. 4 is a schematic view showing the block diagram of the information operation control processing unit 4 of the present invention. Fig. 5 is a schematic view showing the connection between the environmental monitoring and control auxiliary device of the present invention and the integrated manufacturing system of the semiconductor computer and the environmental monitoring of the semiconductor device. Fig. 6 is a schematic view showing the environmental monitoring and control auxiliary device of the present invention, which is connected with a semiconductor computer integrated manufacturing system by multiple connections and performs multiple environmental monitoring of the semiconductor device. Figure 7 is a schematic diagram showing the environmental monitoring and control aid of the present invention with multiple SECS communications to perform multiple environmental monitoring of semiconductor devices. FIG. 8 is a schematic diagram showing a schematic diagram of the design environment monitoring and control assisting device 10 in the present embodiment using the integrated computing processing unit 4. [Main component symbol description] Semiconductor production equipment communication agreement unit 1

Page 19 1266972

Environmental monitoring and control aids i 〇 Integrated computing unit 4 Power module 1 3 Connection to the monitored unit 资料 15 Data storage media management unit 2 Program parameter storage media management unit 3 Communication protocol unit 3 1 Information transfer control Processing unit 4 Calculation logic unit 42 Digital input wheel 埠 4 4 Clock input wheel 埠 4 6 Control message wheeling unit 6 Printed circuit board 1 1 Interface circuit 1 2 Communication connection 4 1 4 Expansion interface 1 6 Computer integrated manufacturing system 20 Semiconductor production equipment 30 Data memory media 4 1 Communication 埠 43 Analog input 埠 4 5 Data collection unit 5

Claims (1)

1266972 VI. Scope of application for patents • \ Ά 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二 二4, the support device and the semiconductor factory have a communication agreement with the conductor production equipment, the yuan 4 from the communication and exchange of information; the father to change the message from the ring, please check the waves ek 1 d this mouth x clothes, And an information transfer control unit of the control auxiliary device interprets and interprets the conversion of the 儿子 贝 儿子 son J ΰ 成 into one of its internal messages; one of the environmental monitoring and control aids transmits the information according to the information The second component of the environmental monitoring and control auxiliary device is used for environmental monitoring intelligence collection; the intelligence is sent to the intelligence operation control processing unit; the child control device is controlled according to the environment monitoring and control auxiliary device The content of the program parameter storage medium determines the operation method; the intelligence operation control processing unit interprets the intelligence result; Stored in the data storage media and semiconductor production according to the protocol did not prepare the information sent. 2. The method of designing an environmental monitoring and control aid for a semiconductor manufacturing facility as described in claim 1, wherein the semiconductor production equipment communication protocol is a communication protocol for satisfying a semiconductor production equipment communication protocol. 3. The method of designing an environmental monitoring and control aid for a semiconductor manufacturing facility as described in claim 2, wherein the communication protocol is SECS communication. 4 · The design method of environmental monitoring and control aids for semiconductor production equipment as described in claim 1 of the patent application, wherein the internal information system 1266972 6. The scope of application for patents is the sequence of commands in the environmental monitoring and control auxiliary device. "Λ广! ϊ ϊ 范围 ϊ 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d d π 士 士 ...... ι 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计 计The design method of the ί 覃 氙 氙 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体The storage method for the device;;...the design method, wherein the program parameter storage medium can be modified through the internal unit of the ;=========================================================================== The system for the semiconductor production equipment is located in the integrated type of f"where the data storage medium conductor device is inside the squeezing place' and the information is semi-inquiry. Provide semi-guide Integrated system check 9. If the Shenqing patent scope mentioned in item 1 2 monitoring and control auxiliary equipment + conductor production equipment - the steps of the watchdog program, when the 4 occurs, provide clothing monitoring and control auxiliary equipment 1266972 ^^ Sixth, the scope of application for patents -__ ί:: Ξ ί ί: When the dog program is viewed, the environment will be monitored and: The initial device will be reset to restart the device. The design is located in the help 2: The method of the watchdog program is reported to the nose control unit. "1", a program information medium for semiconductor production equipment, which includes a semiconductor production equipment communication protocol unit, and the _W auxiliary device is right.盥4, i# ^ ^ ^ ^ , to enable 4 environment monitoring and control, set up a work data storage medium with communication capability with a + conductor production facility for storing data; a program parameter storage medium; The operation control processing unit is coupled to the communication protocol unit, the data storage medium, and the program table. ^ The production and control auxiliary device has two g, two] = a data collection unit coupled to the situation The medium used to make the environmental monitoring and control auxiliary device and = two-unit processing unit, producing equipment information; and the square Fanger collection semiconductor output-input unit, #接i ^ ^ to make it transparent to the semiconductor device Even: 匕 nose" processing unit, can. According to the information collected by the drought-inducing information, the program information media as described in the application of the patent scope (j), the control unit of the information for the cattle conductor production equipment is a whole page 23,126,692. The calculation processing unit that is suitable for the patent range. • 1 3 • A program information medium for a semiconductor manufacturing device as described in claim 12, wherein the integrated computing processing unit further includes a computing logic unit, a data memory medium, and a communication unit.埠 Digital input and output Tan, an analog input 璋, and a clock input and output 埠. 1 4 . The program information medium for semiconductor production equipment as described in claim ii, wherein the semiconductor production equipment communication protocol unit has the function of performing SECS communication with a semiconductor manufacturing facility. 1 5 . The program information medium for a semiconductor manufacturing device as described in claim 3, wherein the integrated computing processing unit further comprises a watchdog program, and the environmental monitoring and control auxiliary device interruption occurs when the environment occurs. If the program cannot be executed, the dog program will reset the environment monitoring and control auxiliary device to restart the device. 16 · Environmental monitoring and control auxiliary wheat set for plant semiconductor production equipment, including: a printed circuit board for carrying the components described later; an integrated computing processing unit is placed on the printed circuit board; The interface circuit is disposed on the printed circuit board and coupled to the integrated computing processing unit, and is an isolation interface circuit between the external unit and the external unit; the power module is disposed on the printed circuit board. Power supply for the library; ~W clothing 1266972 6. A communication link for applying for a patent range communication; a connection port to the integrated plastic computing processing unit for connecting to the semiconductor device monitored by the fork; and an expansion interface coupled to the integrated package The calculation processing unit is configured to supplement the number of connections of the device. 3 1 7 · A method for measuring and controlling a semiconductor device for a semiconductor manufacturing device as described in claim 16 wherein the integrated computing unit further comprises: a computing logic unit; The media, one pass 5 bee, one digit input/output port, one analog input port, and one clock input 1 output. Brother 1 8 · A device for monitoring and controlling a ring-shaped device for a semiconductor manufacturing device as described in claim 16 of the patent application, wherein the interface circuit is a interface circuit that is isolated from the external unit. ° 1 9 · The environmental monitoring and control aid for semiconductor production equipment as described in claim 16 of the patent application, wherein the communication link is a communication port for communication with the semiconductor installation. 20 · Environmental monitoring and control aids for semiconductor manufacturing equipment as described in claim 19, wherein the communication link is an s Ecs communication port. 21 · For example, the % 丨 监测 监测 监测 监测 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体 半导体2 2 · Environmental monitoring and control aids for semiconductor production equipment as described in Section 6 of the Patent Application, in which the connection system is 1266972 Sixth, the scope of application for patents Road communication connection 埠. • 2 3. The environmental monitoring and control aid for semiconductor production equipment as described in claim 16 further comprising a housing for housing and protecting the environmental monitoring and control aid. 24. The environmental monitoring and control assisting device for a semiconductor manufacturing device according to claim 17, wherein the integrated computing processing unit further comprises a watchdog program, and the environmental monitoring and control assisting device occurs when the environment occurs. If the interrupt cannot be executed, the watchdog program will reset the integrated computing unit to restart the device. Page 26