TWI238908B - Layer insulation film for liquid crystal display element and liquid display element using the same - Google Patents

Abstract

The present invention relates to a layer insulation film for liquid crystal display element characterized in that it is obtained by hydrolyzing and condensing: (A) at least one compound selected from the group consisting of (A-1) a compound of general formula (1): RaSi(OR1)4-a, (wherein R is a hydrogen atom, a fluorine atom, or an monovalent organic group, R1 is alkyl, aryl, allyl or glycidyl, and a is an integer of 1 to 2), (A-2) a compound of general formula (2): Si(OR2)4, (wherein R2 is alkyl, aryl, allyl or glycidyl), and (A-3) a compound of general formula (3): R3b(R4O)3-bSi-(R7)d-Si(OR5)3-cR6c, (wherein R3 to R6 are the same or different and are independently alkyl, aryl, allyl or glycidyl, b and c are the same or different and are an integer of 0 to 2, R7 is an oxygen atom, phenylene or a group of -(CH2)a- (wherein n is an integer of 1 to 6), and d is 0 or 1), in the presence of a catalyst to produce a hydrolyzed condensate and heating the resultant condensate.

Description

1238908 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (1) [Technical field to which the invention belongs] The present invention relates to an interlayer insulating film for a liquid crystal display element. More specifically, it relates to the use of a liquid crystal display element. (LCD) driven TFTs (Thin Film Transistors) are used as interlayer insulating film materials. It is possible to form them at low temperatures. They show low specific permittivity and have excellent heat resistance for LCD films. Used LCD. [Known Technology] Conventionally, as for the interlayer insulating film for L C D, it is mostly a silicon dioxide (S i 0 2) film formed by a vacuum process such as the C V D method. However, with the advancement of the high definition of the pixels of L C D, the flicker of L C D due to the high dielectric constant (4 · 1) of the Si 102 film used for the L C D interlayer insulating film has become a problem. In order to eliminate this flicker phenomenon, an interlayer insulating film for L C D having a dielectric constant of 3 or less is expected. For this, an organic interlayer insulation film made of acrylate or the like or a coating type interlayer insulation film based on a hydrolyzed organism of tetramethoxysilicon, which is called a SOG (Spin On Glass) film, etc. Although it has been reviewed as an interlayer insulating film for LCDs, the organic interlayer insulating film made of acrylic resin, for the heat treatment required for forming the TFT, the step (350 t) is based on heat resistance, and it is also composed of S. G forms a so-called interlayer insulating film which has a specific dielectric constant of 3 or less under firing conditions of 350 ° C. [Problems to be solved by the invention] This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297). -4 ^ 衣 ------ 1T ------ (Please read the precautions on the back first. Fill out this page) -4- 1238908 Μ B7 V. Description of the invention (2) (Please read the precautions on the back before filling out this page) The present invention is an interlayer insulating film for LCDs that solves the above problems, in more detail The purpose is to provide an LCD interlayer insulating film for LCD driving TFTs as an interlayer insulating material. It is possible to display a low specific dielectric constant at a low temperature, and it has excellent heat resistance of the coating film and its use. LCD. [Means for Solving the Problem] The present invention relates to a compound represented by A) (A-1) represented by the following general formula (1) by heating R a S i (OR1) 4-a ... (1) (where R represents a hydrogen atom, a fluorine atom, or a monovalent organic group, R1 represents a monovalent organic group, and a represents an integer of 1 to 2), (A-2) is expressed by the following general formula (2 (2) (wherein R2 represents a monovalent organic group) and (A-3) a compound represented by the following general formula (3) R3b ( R4.〇) 3-bSi- (R7) d-Si (OR5) 3-cR6〇 ...... (3) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs [where R3 ~ R6 represent the same or Different, each is a monovalent organic group, b ~ c represents the same or different integers of 0 ~ 2, R7 represents an oxygen atom, a phenyl group, or — (CH2) a — group (where η is an integer of 1 to 6) ), D represents at least one compound selected from the group of 0 or 1], and the hydrolyzed condensate formed by hydrolysis and condensation in the presence of a catalyst is heated to obtain an LCD with an interlayer insulating film for LCD. This paper size applies to Chinese National Standard (CNS) A4 specification (210X29 * 7 mm) -5- 1238908 A7 B7 V. Description of the invention (3) [Form of implementation of the invention] (Please read the precautions on the back before filling in this Page) The so-called hydrolyzed condensate of the present invention (A) is a hydrolysate or condensate of at least one kind of silane compound selected from the group of the compounds (1) to (3). Here, in the hydrolysis of the component (A), the compounds constituting the component (a) described above are among the RiO-group, R20-group, R40-group and R50-group contained in (1) to (3). All of them do not need to be hydrolyzed. For example, only one hydrolyzed, two or more hydrolyzed, or a mixture thereof may be used. In addition, the so-called condensation of the component (A), and the hydrolyzed silanol group condensation of the compounds (1) to (3) constituting the component (A) forms a si _0-S i bond, but the silanol group of the present invention is not necessary All are condensed, and only one of them is condensed by a silanol group, which includes different degrees of condensation to form different mixtures. _L A) Hydrolyzed condensate The (A) hydrolyzed condensate printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs is the presence of at least one silane compound selected from the group of compounds (1) to (3) above It is obtained by hydrolysis and condensation. Compound (1): In the above general formula (1), when it is a monovalent organic group of R and Ri ', an alkyl group, an aromatic group, an allyl group, an epoxy group, and the like can be mentioned. For a paper size, the Chinese National Standard (CNS) A4 (210X297 mm) 1238908 A7 B7____ V. Description of the invention (4) General formula (1), 1 ^ is a monovalent organic group, especially alkyl or benzene The group is preferably here. As for the alkyl group, methyl, ethyl, propyl, butyl, etc. are mentioned. It is preferably 1 to 5 carbon atoms, and such alkyl groups may be chained or branched. Alternatively, the hydrogen atom may be replaced by a fluorine atom. Compound (1); For the general formula (1) above, when it is an aromatic group, phenyl, naphthyl, methylphenyl, ethylphenyl, chlorophenyl, bromophenyl, and fluorophenyl Wait. As for specific examples of the compound represented by the general formula (1), 'trimethoxysilane, triethoxysilane, tri-n-propoxysilane, tri-isopropoxysilane, di-n- Butoxy sand ash, two-one-one, "butoxysilane, tri-third butoxysilane, triphenoxysilane, fluorotrimethoxysilane, fluorotriethoxysilane, fluorotri-n-butane Oxysilane, fluorofluorene-second butoxysilane, fluorotri-third-butoxysilane, fluorotetraphenoxysilane, and the like. Methyltrimethoxysilane, methyltriethoxysilane, methyl-n-propoxysilane, methyltri-second-butoxysilane, methyltri-third-butoxysilane, Methyltriphenoxysilane, ethyltrimethoxysilane, ethyltriethoxysilane, ethyltri-η-propoxysilane, ethyltriisoisopropoxysilane, ethyltri- N-butoxy sand courtyard, ethyl tri-first-butoxy sand courtyard, ethyl tri-third-butoxy sand courtyard, ethyl triphenoxy silane, vinyl trimethoxy silane, vinyl Triethoxysilane and ethyl paper sizes are applicable to Chinese National Standard (CNS) A4 (210 '乂 297 mm)-......--I—j I i-II! (Please read first (Notes on the back then fill out this page)

1T Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economy 1238908 A7 B7 V. Description of the Invention (5) Alkenyl tri-n-propoxysilane, vinyl-iso-propyl Oxysilane, vinyl-n-butoxysilane, vinyltri-second-butoxysilane, vinyltri-third-butoxysilane, vinyltriphenoxysilane, n-propyltrimethyl Oxy-n-propyltriethoxysilane, n-propyltri-n-propoxysilane, n-propyltri-iso-propoxysilane, n-propyltri-n-butoxysilane , N-propyltrione-second-butoxysilane, η-propyltri-third-butoxysilane, n-propyltriphenoxysilane, i-propyltrimethoxysilane, i- Propyltriethoxysilane, i-propyltri-n-propoxysilane, i-propyltri-iso-propoxysilane, i-propyltri-n-butoxysilane, i-propyl Tris-II-butoxysilane, i-propyltriphenoxysilane, n-butyltrimethoxysilane, n-butyltriethoxysilane, n-butyltri-n-propoxy Silane, n-butyltri- -Propoxysilane, n-butyltri-n-butoxysilane, n-butyltri-second-butoxysilane, n-butyltri-third-butoxysilane, n-butyl Triphenyloxysilane, second-butyltrimethoxysilane, second-butyltriethoxysilane, second-butyl-tri-n-propoxysilane, third-butyl-trisiloxane -Iso-propoxysilane, second-butyl-tri-n-butoxysilane, second-butyl-tri-second-butoxysilane, second-butyl-tri-third- Butoxysilane, second monobutyl-triphenoxysilane, t-butyl-trimethoxysilane, 1: monobutyltriethoxysilane, t-butyltri-n-propoxy Silane, t-butyl-tris-iso-propoxysilane, t-butyltri-n-butoxysilane, t-butyltri-second-butoxysilane, t-butyltri-one Tri-butoxysilane, t-butyltriphenoxysilane, phenyltrimethoxy This paper is sized for the Chinese National Standard (CNS) A4 (210X297 mm) ------------ ----- ·!-. (Please read the notes on the back before filling this page) -8- 12389 08 A7 B7 V. Description of the invention (6) silane, phenyltriethoxysilane, phenyltri-n-propoxysilane, phenyltri-iso-propoxysilane, phenyltri-n-butane Oxysilane, phenyltri · -second-butoxysilane, phenyltri-third-butoxysilane, phenyltriphenoxysilane, vinyltrimethoxysilane, vinyltriethoxy Silane, r-aminopropyltrimethoxysilane, r-aminopropyltriethoxysilane, r-glycidoxypropyltrimethoxysilane, τ-glycidoxypropyltriethoxy Silane, r-tri-m-phenylpropyltrimethoxysilane, r-tri-m-phenylpropyltriethoxysilane, and the like. Dimethyl dimethoxysilane, dimethyl diethoxysilane, dimethyl-di-n-propoxysilane, dimethyl-di-iso-propoxysilane, dimethyl-dione N-butoxysilane, dimethyl-di-second-butoxysilane, dimethyl-1,2-tertiary-butoxysilane, dimethyldiphenoxysilane, diethyldimethoxy Silane, diethyldiethoxysilane, diethylbis-n-propoxysilane, diethyl-diisoisopropoxysilane, diethyl-12-n-butoxysilane , Diethyl-di-second-butoxysilane, diethyl-1,2-third-butoxysilane, diethyldiphenoxysilane, di-n-propyldimethoxysilane, Di-n-propyldiethoxysilane, di-n-propyl-di-n-propoxysilane, di-n-propyl-1,2-iso-propoxysilane, di-n-propyl One-two η-butoxysilane, two-n-propyl-1,2-second-butoxysilane, two-n-propyl-two-third-butoxysilane, two-n-propyl One two one phenoxysilane, two Isopropylpropyldimethoxysilane, diisopropylpropylethoxysilane, diisopropyl-di-n-propoxysilane, diisopropyl-diisopropylpropane Silane, diisopropylpropyl, paper size is applicable to Chinese National Standard (CNS) A4 specification (210X 297mm) L,-(Please read the precautions on the back before filling this page), 11 -Φ, Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs' Consumer Cooperatives-9- Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs (printed by the Industrial and Consumer Cooperatives 1238908 A7 B7 V. Description of the Invention (7) Di-n-butoxysilane, -diiso-propyl One-two-second-butoxysilane, two-second-propyl-1,2-third-butoxysilane, two-iso-propyl-1,2-phenoxysilane, two-n-butyldisilane Ethoxysilane, di-n-butyldiethoxysilane, di-n-butyl-1,2-n-propoxysilane, di-n-butyl-1,2-iso-propoxysilane, two One-n-butyl-two-n-butoxysilane, two-n-butyl-di-second-butoxysilane, two-n-butyl-1,2-third-butyl Oxysilane, di-n-butyl-diphenoxysilane, di-second-butyldimethoxysilane, di-second-butyldiethoxysilane, di-second-dibutyl Base—one-n-propoxy sand institute, two-second-butyl-1,2-iso-propoxy stone institute, .— • first-^-butyl-a * -n-butoxy sand institute 、 — 、 — First one-butyl 1-two-two second butoxy sand factory, two one-two-butyl one-two-two second butoxy sand factory, two-second one-butyl one two A phenoxy compound, two-third-butyl-butoxysilane, two-second-butyl-1,2-phenoxysilane, two-third-butyl-dimethoxysilane, two One-three-butyldiethoxysilane, two-third-butyl-di-n-propoxysilicone institute, — * —% di-butyl -_ ^^ one iso-propoxy sand institute , One-two-butyl-1,2-n-butoxysilane, two-third-butyl-1,2-second-butoxysilane, two-third-butyl-1,2-third-butyl Oxysilane, 1,2,3,1-butyl-1,2-phenoxysilane, diphenyldimethyl Oxysilane, diphenyl-di-ethoxysilane, diphenyl-di-n-butoxysilane, diphenyl-12-second-butoxysilane, diphenyl-12-third Monobutoxysilane, diphenyldiphenoxysilane, divinyltrimethoxysilane and the like. This paper size applies to Chinese National Standard (CNS) A4 specification (210X 297 mm) l · ------------ IT ------ (Please read the precautions on the back before filling This page) 1238908 A7 B7 V. Description of the invention (8) The compound (1) is regarded as a suitable compound, which is methyltrimethoxysilane, methyltriethoxysilane, methyltri-n-propoxysilane , Methyldi-iso-propoxy sand garden, ethyldimethoxy sand garden, ethyltriethoxysilane, vinyltrimethoxysilane, vinyltriethoxysilane, phenyltrimethoxy Silane, phenyltriethoxysilane, dimethyldimethoxysilane, dimethyldiethoxysilane, diethyldimethoxysilane, diethyldiethoxysilane, diphenyldisiloxane These include methoxysilane, diphenyldiethoxysilane, and the like, and one or two or more thereof may be used simultaneously. Compound (2); For the above general formula (2), R2 represents a monovalent organic group and the same general organic group as the aforementioned general formula (1). Specific examples of the compound represented by the general formula (2) include tetramethoxy sand institute, tetraethoxy sand institute, tetra-n-propoxy radical institute, tetra-iso-propoxy radical institute, and —N-butoxysilane, tetra-second-butoxysilane, tetra-third-butoxysilane, tetraphenoxysilane, etc. Compound (3); In the above general formula (3), R3 to R6 are monovalent organic groups, and the same organic groups as in the above general formula (1) can be cited. In the general formula (3), R7 is a compound having a fluorine atom, and examples thereof include hexamethoxydisilazane, hexaethoxydisilaxane, hexaphenoxydisilaxane, 1, 1, 1, 1 ， 3 ， 3-Pentamethoxy-1 3-methyldioxane This paper is sized for the Chinese National Standard (CNS) A4 (210X297 mm) l · ^ Clothing-(Please read the precautions on the back first (Fill in this page again) Order printed by the 8th Industrial Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -11-1238908 A7 B7 V. Description of the invention (9, 3-pentaethoxy-3 3-methyldisilaxane 3-pentaphenoxy 3-methyldisilaxane, 1,1,3,3,1,3,3- 1,3,3-penta, 3,3-pentaethyl 3,3-pentaphenoxy, one pentamethyl Oxy- 3 -ethyl-pentaethoxy- 3 -ethylpentaphenoxy- 3 -ethyldimethoxy- 3 -phenyldisilaxoxy-3 -phenyldisoxaxy-3- Phenyl—Sandoxanyl disilaxoxane, Shixoxoxane ', printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 3 — Tetramethoxy-1,3--dimethyl 3 — Tetraethoxy- -1, 3-- Methyl 3-tetraphenoxy- -1 3--dimethyl 3-tetramethoxy- -1 3--diethyl 3-tetraethoxy- -1 3--diethyl 3-tetra Phenoxy- -1 3--diethyl 3 — tetramethoxy- -1 3--diphenyl 3-tetraethoxy- -1 3--diphenyl 3-tetraphenoxy-- 1 3--diphenyldimethoxy — 1, 3 3-—dimethyldiethoxy — 1, 3 3-didiamidyldiphenoxy — 1, 3 3-monodimethyldioxy Methoxy — 1, 3 3-monodiethyldiethoxy — 1, 3 3 — —diethyldiphenoxy — 1, 3, 3 — —diethylmethoxy — 1 3 radical Siloxane disiloxane This paper is sized for China National Standard (CNS) A4 (210X 297 mm) 3 3 3 (Please read the precautions on the back before filling this page) 11 111 3 3 3 3 3 3 3 3 -12- 1238908 A7 B7 V. Description of the invention (1〇) diethoxy-1,3,3-triphenyldisilaxane Λ 1 3--dimethoxy-1,1,3, 3 — Tetramethyldisiloxane 1, 3--diethoxy-1,1,1,3,3-tetramethyldisilaxane Λ 1 3--diphenoxy-1,1,3,3-tetramethyldisilaxine > 1 > 3--dimethoxy-1,1,3,3-tetraethyldisilaxane Λ 1 3---", ethoxy-1,1,3,3-tetraethyl 1 2 3--diphenoxy-1,1,3,3-tetraethyldisoxyl Λ 1 3--dimethoxy-1,1,3,3-tetra Phenyldisilaxane 1, 3--diethoxy-1,1,3,3-tetraphenyldisilaxane > 1, 3--diphenoxy-1, 1, 3, 3 --Tetraphenyldisilax's, etc. 0 Among them, methoxydisilaxon Λ… Γ-ethoxydithiaxamine, 1, 1, 3, 3 — tetramethyl Oxygen — 1 3 — Dimethicone Institute, 1, · 1, 1, 3, 3 — Tetramethoxyl — 1, 3 — Dimethicone Institute, 1, 1, 3, 3 — Tetra Methoxy — 1 3 — diphenyldisiloxane, 1 ， 3 — -dimethoxy — 1 1 5 3 > 3 —tetramethyldisilaxane, 1, 3--monoethoxy — 1 > 1 5 3 j 3 — tetramethyldisilax Institute, 1, 3--dimethoxy — 1 5 1? 3 5 3-tetraphenyldioxanoxane, 1, 3--diethoxy-1, 1 3-3 tetraphenyl S; An appropriate example is the Ershixi Oxygen Hospital. For compounds of general formula (3), where d is 0, hexamethoxyethisilane, hexaethoxyethisiloxane, hexaphenoxyethisilane, 1, 1, 1, 2, 2, —Pentamethoxy—2 —methylethilasane, 1, 1, 1, 2, 2, —pentaethoxy—2 —methylethilasane, 1, 1, 1, 2, 2, 2-pentaphenoxy— 2 —Methylethylsilane, 1, 1, 1, 1, this paper size applies Chinese National Standard (CNS) A4 specification (210 × 297 mm) L clothing-(Please read the precautions on the back before filling this page)

Printed by the Consumer Property Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs -13- Intellectual Property Bureau B of the Ministry of Economic Affairs (printed by the Industrial and Consumer Cooperative Cooperatives 1238908 A7 B7 V. Description of the invention (11) 2, 2 -pentamethoxy-2 -ethyl Ethylsilane, 1,1,1,1,2,2-pentaethoxy-2—ethylethylsilane, 1,1,1,2,2—pentaphenoxy-2—ethylethylsilane, 1,1 , 1,2,2-Pentamethoxy-2-2-phenylethisilane, 1,1,1,2,2-pentaethoxy-2-phenylethisilane, 1,1,1,2,2 —Pentaphenoxy—2 —phenylethylsilane, 1,1,2,2 —tetramethoxy —1,2, dimethyldimethylsilane, 1,1,2,2 —tetraethoxy-1 , 2-Dimethysilane, 1, 1, 2, 2, 2-Tetraphenoxy-1, 2-Dimethysilane, 1, 1, 2, 2, 2-Tetramethoxy-1, 2, 2-Di Ethyl ethylsilane, 1,1,2,2-tetraethoxy-1, 2-diethylethilanes, 1,1,2,2-tetraphenoxy-1, 2-ethylethylsilane, 1,1,2,2-tetramethoxy-1,2-diphenylethisilane, 1,1,2,2-tetra Oxy-1,2-diphenylethisilane, 1,1,2,2-tetraphenoxy-1,2-diphenylethisilane, 1,1,2-trimethoxy-1,2, 2-trimethylethisilane, 1,1,2-triethoxy-1,2,2-trimethylethisilane, 1,1,2-triphenoxy-1,2,2-trimethyl Ethoxysilane, 1,1,2-trimethoxy-1,2,2-triethylethisilane, 1,1,2-triethoxy-1,2,2-triethylethisilane, 1 1,2,3-triphenoxy-1,1,2,2-triethylethisilane, 1,1,2-trimethoxy-1,2,2-triphenylethisilane, 1,1,2 Triethoxy-1,2,2-triphenylethisilane, 1,1,2-triphenyloxy-1,2,2-triphenylethisilane, 1,2-dimethoxy-1 1,2,2-tetramethylethilasane, 1,2-diethoxy-1,1, This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) L clothing ----- -1T ------ ^ __ w— (Please read the notes on the back before filling out this page) 1238908 A7 _____B7 _ V. Description of the invention ( 2) 2, 2-tetramethylethisilane, 1,2-diphenoxy-1,1,2,2-tetramethylethisilane, 1,2-dimethoxy-1,1,2, 2-tetraethylethisilane, 1,2-diethoxy-1,1,2,2-tetraethylethisilane, 1,2-diphenoxy-1,1,2,2-tetraethyl Ethoxysilane, 1,2-dimethoxy-1,1,2,2-tetraphenylethistein, 1,2-diethoxy-1,1,2,2-tetraphenylethisilane , 1,2-diphenoxy-1,1,2,2-tetraphenylethane Among these, hexamethoxyethoxylate, hexaethoxyethylate, 1,1,2,2-tetramethoxy-1,2, dimethyldimethylsilane, 1,1, 2,2 -tetramethoxy-1,2, dimethyldimethylsilane, 1,1,2,2-tetramethoxy-1,2-diphenylethilanes, 1,2-dimethoxy -1,1,2,2-tetramethylethylsilane, 1,2-diethoxy-1,1,2,2-tetramethylethilanes, 1,2-dimethoxy-1,1 For example, 2,2-tetraphenylethisilane, 1,2-diethoxy-1,2,2-tetraphenylethisilane etc. are suitable examples. For the general formula (3), 117 To represent a compound of ((: 1 ^) 3 group, bis (trimethoxysilyl) methane, bis (triethoxysilyl) methane, bis (tri-n-propoxysilyl) Base) Jiayuan, bis (tri-i-propoxymethylate base) formamidine, bis (tri-n-butoxysilyl) methane, bis (tri-second-butoxymethyl sand) Alkyl) oxane, bis (tri-t-butoxysilyl) methane, hydrazone, 2-bis (tri Methoxysilyl) ethane, 1,2-bis (triethoxysilyl) ethane, 1,2-bis (tri-n-propoxymethanil) $ The paper size is applicable to Chinese national standards (CNS) A4 specification (210X297 mm)-"-'-15- I ~ * 1 (Please read the precautions on the back before filling out this page) Ordered by the Ministry of Economic Affairs, Intellectual Property Bureau, K Industrial Consumer Cooperative, 1238908 A7 B7 V. Description of the invention (13-based) ethane, 1,2-bis (tri-i-propoxysilyl) ethane, 1,2-bis (tri-n-butoxysilyl) ethyl Alkane, 1, 2-bis (tri-second-butoxysilyl) ethane, i, 2-bis (tri-t-butoxysilyl) ethane, 1- (dimethoxy) Methylsilyl)-1-(trimethoxysilyl) pinane, 1-(diethoxymethylsilyl)-1-(triethoxysilyl) methane,-( N-propoxymethylsilyloxy) -1 (tri-n-propoxysilyl) methane, 1- (di-i-propoxymethylsilyl) —1— (trione i monopropoxysilyl) methyl , 1- (di-n-butoxysilyl) -1 (tri-n-butoxysilyl) methane 1 (tri- (di-second-butoxymethylsilyl) ) Monobutoxysilyl) 1 1 (Thirty-one Second Ding Yuji Jiashi Xiyuan Foundation) A Yuan, 1 one (a. ~ Silyl) 1 1 (trinyl t-butoxysilyl) t monobutoxymethylsilyl) methane, 1 Intellectual Property Bureau of the Ministry of Economic Affairs g (printed by Industrial and Consumer Cooperatives (dimethoxymethylsilyl) -2— (trimethoxysilyl) ethane , 1- (diethoxymethylsilyl)-2-(triethoxysilyl ') ethane, 1- (di-n-propoxymethylsilyl) -2-( Tri-n-propoxymethylsilyl) ethane, 1- (di-i-propoxysilyl)-2-(tri-i-propoxysilyl) ethane, 1- N-butoxymethylsilyl) -2 (tri-n-butoxysilyl) ethane, 1- (two-second-butoxymethylsilyl) -2-(tri One-second-butoxysilyl ) Ethane, 1- (two-second-butoxymethylsilyl)-2— (tri-second-butoxysilyl) ethane, 1- (di-t-butyl) paper Standards are applicable to China National Standard (CNS) A4 specifications (210X297 mm). ITI (Please read the precautions on the back before filling out this page) -16- 1238908 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs 3 Industrial Consumer Cooperative A7 B7 V. Invention Explanation (14) oxymethylsilyl) 2-(tri-t-butoxysilyl) Yiyuan, bis (dimethoxymethylsilyl) ethane, bis (diethoxy) Methylmethylsilyl) methane, bis (di-n-propoxymethylsilyl) methane, bis (di-i-propoxymethylsilyl) methane, bis (di-n-one Butoxymethylsilyl) methane, bis (di-2nd-butoxymethylsilyl) methane, bis (di-t-butoxymethylsilyl) methane, 1, 2 —Bis (dimethoxymethylsilyl) ethanes' 1 '2 —Bis (diethoxymethylsilyl) ethanes' 1, 2 —bis (di-n-n-propoxy) Methylsilyl) ethane, 1,2-bis (di-i-propoxyfluorenylsilyl) ethane, 1,2-bis (di-n-butoxymethylphosphonium silyl) ethane Alkane, 1,2-bis (di-second-butoxymethylsilyl) ethane, 1,2-bis (di-t-butoxymethylsilyl) ethane, 1, 2 -Bis (trimethoxysilyl) benzene, 12, bis (triethoxysilyl) benzene, 1,2-bis (tri-n-propoxysilyl) benzene, 1,2- Bis (tri-i-propoxysilyl) benzene, 1,2-bis (tri-n-butoxysilyl) benzene, 1,2-bis (tri-second-butoxymethyl) Silyl) benzene, 1,2-bis (tri-t-butoxysilyl) benzene, 1,3-bis (trimethoxysilyl) benzene, 1,3-bis (triethoxy) Silyl) benzene, 1,3-bis (tri-n-propoxysilyl) benzene, 1,3-bis (tri-i-propoxysilyl) benzene, 1,3-bis ( Tri-n-butoxysilyl) benzene, 1,3-bis (trione-second-butoxy Methylsilyl) benzene, 1,3-bis (tri-t-butoxysilyl) benzene, 1,4-bis (trimethoxysilyl) benzene Paper standards are applicable to Chinese National Standards (CNS) A4 specifications (210X297 mm) -17- II ------- • clothing L ----- tT ------ (Please read the precautions on the back before filling this page) 1238908 A7 _____ B7 V. Description of the invention (15), 1, 4-bis (triethoxysilyl) benzene, 1,4-bis (tri-n-propoxymethylsilyl) benzene, 1,4-bis ( Tri-i-dioxysilyl) benzene, 1,4-bis (tri-n-butoxysilyl) benzene, 1,4-bis (tri-second-butoxysilyl) ) Benzene, 1 '4 bis (tri-t-butoxysilyl) benzene, etc. Among these, bis (trimethoxysilyl) methane, bis (triethoxymethylsulfonyl) methylamine, 1,2-bis (trimethoxymethylsulfonyl) ethane, 1,2 —Bis (triethoxysilyl) ethane, 1 (dimethoxymethylsilyl) -1 (trimethoxysilyl) methane, 1 (diethoxymethylmethyl) Silyl)-1- (triethoxymethsyl) ethane, 1- (dimethoxymethylsilyl)-2-(trimethoxysilyl) ethane, 1- (di Ethoxymethylsilyl) — 2-(Triethoxymethanyl) Einyuan, bis (dimethoxymethylsilyl) methane, bis (diethoxymethylsilyl) ) Methane, 1, 2-bis (dimethoxymethylsilyl) ethane,] _, 2-bis (diethoxymethylsilyl) ethane, 1,2-bis (trimethoxy Methylsilyl) benzene, 1,2-bis (triethoxysilyl) benzene, 1,3-bis (trimethoxysilyl) benzene, 1,3-bis (triethoxysilyl) Base) benzene, 1, 4 bis (trimethoxysilyl) Yl) preferably of the benzene, 1,4-bis (triethoxysilyl silicon alkyl) benzene Example. As the compounds (1) to (3) of the present invention, one kind or two or more kinds can be used. In addition, when at least one kind of silane compound selected from the above-mentioned compounds (1) to (3) is hydrolyzed and condensed, the compound (1) to this paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297) (Mm) I ------- 0—r (Please read the notes on the back before filling out this page) Order printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy -18 Printed 1238908 A7 _____ _B7_ V. Description of the invention (16) (3) For every 1 m ο 1 (mole), it is better to use more than 0 · 5 m ο 1 to I50 〇1 water, especially for more than 〇 · 5mo 1 to 13 〇m ο 1 water. When the (A) hydrolyzed condensate of the present invention is produced, at least one type of silane compound selected from the group of the above-mentioned compounds (1) to (3) is hydrolyzed and condensed using a catalyst as a feature. As for the catalyst that can be used at this time, it should be tested catalyst. Examples of the alkali catalyst include sodium hydroxide, potassium hydroxide, lithium hydroxide, pyridine, pyrrole, piperazine, pyrrolidine, piperidine, picolin, monoethanolamine, diethanolamine, dimethylmonoethanolamine, Monomethyldiethanolamine, triethanolamine, diazabicyclooctane, diazabicyclononane, diazabicycloundecene, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropyl Ammonium oxide, tetrabutylammonium hydroxide, ammonia, methylamine, ethylamine, propylamine, octylamine, pentylamine, hexylamine, pentylamine, octylamine, nonylamine , Decylamine, N, N-dimethylamine, N, N-diethylamine, N, N-dipropylamine, n, N-dibutylamine, trimethylamine, triethylamine, Tripropylamine, tributylamine, cycloethylamine, trimethylimidine, 1-amino-3-methylbutane, dimethylglycine, 3-amino-3-methylamine, etc. are more suitable as It is an organic amine, and from the point of adhesion of the substrate of the paint film, ammonia, alkylamine, and tetraalkylamine hydroxide are particularly preferred. These alkali catalysts may be used singly or in combination of two or more kinds. Without impairing the scope of the present invention, other catalysts may be used, or other catalysts may be obtained by blending hydrolysates. As for other catalysts, metal chelate compounds are mentioned. The size of the acid catalyst is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm). -、 Order ------ (Please read the notes on the back before filling this page) -19- 1238908 A7 _ B7 V. Description of the invention (17) 〇 (Please read the notes on the back before filling this page) Printed on metal chelate compounds by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, such as triethoxy •-(acetamidine acetone ligand) titanium, tri-n-propoxy • mono (acetamidine acetone ligand ) Titanium, tri-i-propoxy ·· (acetylacetone ligand) titanium, tri-n-butoxy ·· (acetylacetone ligand) titanium, tri-second-butoxy · — (Acetamidine acetone ligand) titanium, Trinity t — butoxy • mono (acetamidine acetone ligand) titanium, diethoxy • bis (acetamidine acetone ligand) titanium, two-n-one Propoxy • bis (acetamidineacetone ligand) titanium, di-i-propoxy • bis (acetamidineacetone ligand) titanium, di-n-butoxy • bis (acetamidineacetone ligand) )titanium Twenty-two second-butoxy • bis (acetamidineacetone ligand) titanium, two-t-butoxy-bis (acetamidineacetone ligand) titanium, monoethoxy • ginseng (tds) (B醯 Acetone ligand) Titanium, n-propoxy acetate ligand (a) (Ethyl acetone ligand) Titanium, i-propoxy ginseng (a) Acetyl acetone ligand) Titanium, one-n-butoxy • ginseng (a) (acetonitrile acetone ligand) titanium, — second one-butoxy • ginseng (a) (acetamidine acetone ligand) titanium, one one t Monobutoxy • ginseng (acetoacetone ligand) titanium, tetrakis (acetyacetone ligand) titanium, triethoxy · ((ethylacetamate acetate) titanium, Mono-n-propoxy • mono (ethyl acetoacetate) titanium, tri-i i-propoxy • mono (ethyl acetoacetate) titanium, tri-n-butoxy • mono (ethyl ethyl)醯 Acetate) Titanium, Trinity-II-butoxy • mono (ethylacetamidineacetate) titanium, Trinity t — Butoxy • mono (ethylacetamidineacetate) titanium, diethoxy • Bis (ethyl acetoacetate) titanium, dione Propoxy • bis (ethylacetamate acetate) titanium, di-i-propoxy • bis (ethylacetamate acetate) The paper size is applicable to China National Standard (CNS) A4 specification (210 > < 297) (Centi) -20-1238908 A7 B7 V. Description of the invention (18)) Titanium, di-n-butoxy-bis (ethylacetamate acetate) titanium, di-second-butoxy-bis (ethyl) Acetyl Acetate) Titanium, Titanium Monobutoxide • Bis (Ethyl Acetyl Acetate) Titanium, Monoethoxy • Tris (Ethyl Acetyl Acetate) Titanium, Mono-n-propane Oxygen · Titanium (Ethyl Acetyl Acetate) Titanium, ——i-propoxy • Titanium (Ethyl Acetyl Acetyl Acetate) Titanium, 1-n-butoxy • ginseng (Ethyl Acetyl Acetate) ) Titanium, ——Second-butoxy • gins (ethylacetamate acetate) Titanium, one-t-butoxy • gins (acetacetone ligand), ginseng (ethylacetamate acetate) Titanium chelation of titanium, titanium (bis (acetamidineacetone)), bis (ethylacetamate acetate) titanium, titanium (acetylacetonate)-(ethylacetamate acetate) titanium, etc. Compound •-(Ethylacetone ligand) Chromium, Tri-n-monopropoxy • mono (Ethylacetone ligand) 鍩, Trione i-propoxy • mono (Ethylacetone ligand) Chromium , Tri-n-butoxy (acetamidine acetone ligand), tritium t-butoxy • mono (acetamidine acetone ligand) chromium, diethoxy • bis (acetamidine acetone ligand) ) Pin, di-n-propoxy • bis (acetamidoacetone ligand) zirconium, di-i-propoxy • bis (acetamidoacetone ligand) pin, di-n-butoxy • bis (Acetamidine acetone ligand) chromium, two-two-butoxy • bis (acetamidine acetone ligand) pin, two-t-butoxy · • bis (acetamidine acetone ligand) pin, Monoethoxy • Ginseng (acetamidine acetone ligand) chromium, ——N-monopropoxy • tris (pieces) (ethamidine acetone ligand_ chromium, --i -propoxy • ginseng (acetamidine) Acetone ligand) Chromium, one-n-butoxy • gin (acetamidine acetone ligand) chromium, --- second-butoxy • gin (acetamidine acetone ligand) cone, --t a Butoxy L-(Please read the notes on the back before filling this page )

、 1T Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is printed in accordance with the Chinese National Standard (CNS) Α4 specification (210X297 mm) -21-Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 1238908 Μ Β7__ 19) • Ginseng (acetamidine acetone ligand) 鍩, （(acetamidine acetone ligand) 鍩, triethoxy · — (ethylacetamidine acetate) pin, trinity n-propoxyl · 1 (Ethyl acetoacetate) 鍩, tri-i-propoxy • mono (ethyl acetoacetate) pin, tri-n-butoxy ·-(ethyl acetoacetate) pin, Trinity Second monobutoxy • mono (ethyl acetoacetate) 鍩, trin t — butoxy • mono (ethyl acetoacetate) zirconium, diethoxy • bis (ethyl acetoacetate) ) 鍩, di-n-propane • bis (ethylacetamate acetate) chromium, di-i-propane • bis (ethylacetamate acetate) 锖, di-n-butyl—bis (ethylacetamate acetate) Salt) rhenium, two-two-two-butyric acid • bis (ethyl acetic acid acetate) chromium, two-one t-butyl • bis (ethylacetic acid acetate) ytterbium, one ethyl • Tris (ethylacetamate acetate) 鍩, one-n-propoxy group • gins (ethylacetamate acetate) 鍩, —— i-propoxy • gins (ethylacetamate acetate) 鍩, One-n-butoxy • tris (ethyl) acetate chromium, one-two-butoxy • gins (ethylethylacetate) chromium, one-t—butoxy • Ginseng (ethyl acetoacetate) hydrazone, ethyl (ethyl acetoacetate) chromium, mono (ethyl acetone ligand) three (a) (ethyl acetoacetate), bis (ethyl acetone acetate) Chromium chelate compounds such as bis (ethylacetamidineacetate) chromium, ginseng (acetamidineacetate ligand)-(ethylacetamidineacetate) chromium; ginseng (acetamidineacetone) Aluminium chelates of aluminum, ginseng (ethyl acetoacetate) aluminum, and the like; exemplified by titanium or aluminum chelates, particularly titanium chelates. These metal chelates may be used singly or in combination of two or more kinds. As for acid catalysts, such as hydrochloric acid, nitric acid, sulfuric acid, hydrofluoric acid, phosphoric acid, this paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) --------- • 衣-^ --- -、 玎 ------ 0 ^ (Please read the precautions on the back before filling out this page) -22- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1238908 A7 __B7 V. Description of the invention (2〇) Boric acid Inorganic acids such as oxalic acid, acetic acid, propionic acid, butyric acid, valeric acid, hexanoic acid, heptanoic acid, caprylic acid, nonanoic acid, capric acid, oxalic acid, maleic acid, methylmalonic acid 'adipic acid (Fatty acid), Sebacic acid, Getic acid, Butyric acid, Benzoic acid, Peanut dipping acid, Benzoic acid, 2-Ethylhexane acid, Oleic acid, Stearic acid, Linoleic acid, Linolenic acid, Salicylic acid Acid, benzene (methane) acid, P-aminobenzene (formic acid), P-toluenesulfonic acid, benzenesulfonic acid, monochloroacetic acid, dichloroacetic acid, trichloroacetic acid, trifluoroacetic acid, formic acid, malonic acid, sulfonic acid , Phthalic acid, fumaric acid, citric acid, tartaric acid, succinic acid, fumaric acid, itenic acid, mesaconic acid, citraconic acid, malic acid, hydrolysate of glutaric acid, malay The organic acid anhydride hydrolyzate, hydrolyzate of phthalic anhydride, etc., and may include more appropriate as an example of an organic acid. These acid catalysts can be used singly or in combination of two or more kinds. The amount of the catalyst used is the total amount of the groups represented by RiO-group, R20-group, R40-group and R50-group in the compounds (1) to (3), lmo 1, usually 0.0001 to 10mo 1, preferably from 0.0005 to 5mo 1. When the amount of the catalyst used is within the above range, gelatinization of the polymer during the reaction is considered. In the present invention, the temperature when the component (A) is hydrolyzed is usually 0 to 100 ° C, and preferably 15 to 80 ° C. In addition, in the component (A), when each component is converted into a fully hydrolyzed condensate, the compound (2) is estimated to be 5 to 75% by weight, and preferably 10 to 70% by weight based on the total amount of the compounds (1) to (3). % 'Is more preferably from 15 to 70% by weight. The compound (1) and / or (3) is estimated to be 95 to 25% by weight in the total amount of the compounds (1) to (3), preferably 90 to this paper. The Chinese paper standard (CNS) A4 specification (21 〇X 297mm) -23- Bu ------- Fee L ----- 1T ------ # 1. (Please read the notes on the back before filling this page) Wisdom of the Ministry of Economy Printed by the staff of the Property Bureau 1238908 A7 B7 _ V. Description of the invention (21) 30% by weight, more preferably 85% to 30% by weight. Although the compound (2) is in the total amount of the compounds (1) to (3), although it is estimated to be 5 to 75% by weight, the elasticity of the obtained coating film is high, and in particular, it has a superior specific permittivity. Here, for the so-called fully hydrolyzed condensate of the present invention, the compounds of (1) to (3) are hydrolyzed to 100% by RiO- group, R20- group, R4-0- group and R50- group at 100%. The i OH group is further condensed to form a siloxane structure. As for the component (A), because the storage stability of the composition is better, it is preferably a hydrolyzed condensate of the compound (1) and the compound (2). The interlayer insulating film for L C D of the present invention is obtained by heating a solution containing the component (A) and a solvent. The solvents usable in this case include, for example, at least one selected from the group consisting of alcohol-based solvents, ketone-based solvents, amine-based solvents, ester-based solvents, and aprotic solvents. Here, as for the alcohol-based solvent, methanol, ethanol, n-propanol, i-propanol, n-butanol, i-butanol, second-butanol, t-butanol, n-pentanol, i- Amyl alcohol, 2-methylbutanol, second monopentanol, t monopentanol, 3-methoxybutanol, η-hexanol, 2-methylpentanol, second monohexanol, 2-ethyl Butyl alcohol, second heptanol, heptanol-3, n-iso alcohol, 2-ethylhexanol, second-octanol, n-nonanol, 2,6 dimethylheptanol-6, n Didecyl alcohol, 211 (alk) ol, trimethylnonanol, 214 (alk) alcohol, 217 (alk) alcohol, phenol'cyclohexanol, methylcyclohexanol Alcohol, 3, 3, 5-trimethylcyclohexanol, benzyl alcohol (benzyl alcohol), diketol, and other alcohol-based solvents; This paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 0X297) ) L --------_____ T______ (Please read the notes on the back before filling this page) -24- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1238908 A7 B7 V. Description of the invention (22) Glycol , 1, 2-propanediol, 1, 3- Diol 'pentanediol-2,4,2-methylpentanediol-2,4, hexanediol-2,5, heptanediol-'2,4,2-ethylhexanediol-1, 3. Polyvalent alcohol solvents such as diethylene glycol, dipropylene glycol, triethylene glycol, and tripropylene glycol; ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol monohexyl alcohol, Ethylene glycol monophenyl ether, ethylene glycol 2-ethylbutyl ether, diethylene glycol (mono) methyl ether, diethylene glycol monoethyl ether, diethylene glycol monopropyl ether, diethylene glycol 1 Butyl ether, diethylene glycol-hexyl ether, propylene glycol monomethyl ether, propylene glycol monoethyl ether, propylene glycol monopropyl ether, propylene glycol monobutyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether Partial ether solvents of polyvalent alcohols such as methyl ether, dipropylene glycol monopropyl ether, and the like. These alcohol solvents may be used singly or in combination of two or more kinds. As for the ketone-based solvent, acetone, methyl ethyl ketone, methyl-n-propyl ketone, methyl-n-butyl fluorenone, diethyl ketone, methyl-i-butyl fluorene Ketones, methyl-n-pentyl ketone, ethyl-n-butyl ketone, fluorenyl-n-hexyl ketone, di-i-butyl ketone, trimethylnonanone, cycloethyl ketone, 2-hexanone In addition to cyclohexanone, 2,4-pentanedione, acetone, acetophenone, fluorenone, etc., acetone, 2,4-monohexadione, 2,4-heptanedione, 3,5 — Heptanedione, 5-methyl-2,4-hexanedione, 2,2,6,6-tetramethyl-1,3,5-heptanedione, 1,1,1,5,5,5-6 Fluoro-pentanedione-2,4-heptanedione and other Θ-diketones. These ketone solvents may be used alone or in combination of two or more. As for the amine-based solvents, formamide, N-methylformamide, and N are used. This paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm). IT ~ (Please read the precautions on the back first. (Fill in this page again)-25- 1238908 Printed by the Consumer Cooperatives of the Intellectual Property Office of the Ministry of Economic Affairs A7 B7 V. Description of the invention (23) N-dimethylformamide, n-ethylformamide, N, N- Diethylformamide, acetamido, N-methylacetamido, N, N-dimethylacetamido, N-ethylacetamido, N-dimethylacetamido, N-methylpropanamido, N-methylpyrrole, n-methylpyrromorph, N-methylpyridine, N-methylpyrrolidine, n-ethylpyridomorph, N-acetamidine Piperidine, N-acetamidine and the like. These amine-based solvents may be used singly or in combination of two or more kinds. Examples of the ester-based solvent include diethyl carbonate, vinyl carbonate, propylene carbonate, diethyl carbonate, methyl acetate, ethyl acetate, T-butyrolactone, r-valerolactone, and n-propyl acetate , I-propyl acetate, n-butyl acetate, i-butyl acetate, second mono-butyl acetate, n-pentyl acetate, second-pentyl acetate, 3-methoxybutyl acetate, methyl acetate Pentyl acetate, 2-ethylbutyl acetate, 2-ethylhexyl acetate, benzyl acetate, cyclohexyl acetate, methylcyclohexyl acetate, n-nonyl acetate, ethyl acetate, ethyl acetate Ethyl acetate, ethylene glycol monomethyl ether ester, ethylene glycol monoethyl ether ether, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, diethylene glycol acetate n-butyl ether acetate, acetic acid Propylene glycol monomethyl ether ester, propylene glycol monoethyl ether ester, propylene glycol monopropyl ether ester, propylene glycol monobutyl ether acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, ethylene glycol diacetate, Methoxytriethylene glycol acetate, ethyl propionate, n-butyl propionate, i-pentyl propionate, diethyl oxalate, grass Di-n-butyl acid, methyl lactate, ethyl lactate, n-butyl lactate, n-pentyl lactate, diethyl malonate, dimethyl phthalate, diethyl phthalate, and the like. These ester solvents may be used singly or in combination of two or more kinds. The size of this paper is applicable to China National Standard (CNS) Α4 specification (210 × 297 mm) L ------- • this— · -----, order ------ (Please read the note on the back first Please fill out this page again) -26- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1238908 A7 B7 __ V. Description of the invention (24) As for the aprotic solvents, acetonitrile, dimethylasyl, N, N, N, N —tetraethylsulfonamide, hexamethyltriamine, N —methylmorpholinone, N -methylpyrrole, N —ethylpyrrole, N -methyl- △ 3 -pyrroline , N-methylpiperidine, N-ethylpiperidine, N, N-dimethylpiperazine, N-fluorenyl (te) imidazole, N-methyl-4 piperidone, N-methyl-1 2-piperidone, N-methyl-2-pyrrolidone, 1,3-dimethyl-1,2-imidazolidone, 1,3-dimethyltetrahydro-2 (1 Η) -imidone and the like. These solvents may be used singly or in combination. The hydrolyzed condensate used in the present invention is produced by, for example, dissolving the component (A) in a solvent and adding a catalyst and water. When the (A) component is hydrolyzed and condensed, the alkoxy group Imo 1 in the (A) component is preferably water in the range of 8 to 20 mo 1, and particularly preferably water in the range of 0.8 to 1 5 mo 1. If the amount of water added is less than 0 · 8 m ο 1, the crack resistance of the paint film is deteriorated, and if it exceeds 20 m ο 1, the coating uniformity of the paint film is deteriorated. In the present invention, the temperature when the components (A) and (B) are subjected to hydrolysis is usually 0 to 100 ° C, and preferably 15 to 80 ° C. The total solids concentration used in the hydrolyzed condensate of the present invention is preferably 2 to 30% by weight, and it is appropriately adjusted according to the purpose of use. The total solid content concentration of the composition is, for example, 2 to 30% by weight, and the film thickness of the coating film is in an appropriate range, and it is more stable in storage. The hydrolyzed condensate used in the present invention may also contain the following components: 0 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) L ------------- T · ----- (Please read the notes on the back before filling this page) -27- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1238908 A7 _B7_ V. Description of the invention (25) [Other additives] Used in this The hydrolyzed condensate of the invention can also be added with silica gel, colloidal alumina, organic polymers, surfactants, organic silane coupling agents, triazene compounds, radical generators, compounds containing reactive double bonds, containing Ingredients such as reactive triple bond compounds. The so-called silica gel is, for example, a dispersion of high-purity anhydrous silicic acid by pre-dispersing the aforementioned hydrophilic organic solvent. Generally, the average particle diameter is 5 to 3 0 # m, preferably 10 to 2 0 // m. The solid content concentration It is about 10 to 40% by weight. Examples of such silica gels include methanol silica sol and isopropanol silica sol manufactured by Nissan Chemical Industry Co., Ltd .; OS C A R N A manufactured by Catalytic Chemical Industry Co., Ltd., and the like. As for colloidal alumina, oxidizing solvents manufactured by Nissan Chemical Industry Co., Ltd. are glued 5 2 0, the same as 100, the same as 2 0; oxidized cledr sol 10, the same as 1 manufactured by Chuanxi Fine Chemical Co., Ltd. 3 2 etc. Examples of the organic polymer include compounds having a sugar chain structure, ethylene (based) amine polymers, (meth) acrylate polymers, aromatic vinyl (based) compounds, dendrimers, and polyimide , Polyfluorinated acid, polypropyne, polyfluorinated amine, polyquinoxaline, polyoxadiazole, fluorine-based polymer, compounds with polyolefin oxide structure, etc. Examples of compounds having a polyepoxidized alkylene structure include a polyoxymethylene (base) structure, a polyoxyethylene structure, a polyoxypropylene structure, a polyoxytetrahydrofuran structure, and a polybutene oxide structure. Specific examples include polyoxymethylene alkyl ethers and polyethylene oxide alkyl ethers. The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) L ------ 1T ---- --Awl. »(Please read the precautions on the back before filling this page) -28- 1238908 A7 B7 V. Description of the invention (26) (Please read the precautions on the back before filling this page), polyethylene oxide Alkyl phenyl ethers, polyethylene oxide sterol ethers, polyethylene oxide nonyl ester derivatives, ethylene oxide derivatives of alkylphenol formmorpholine condensates, polyethylene oxide polycyclopropane blocks Copolymers, ether compounds such as polyethylene oxide polypropylene oxide alkyl ethers, polyethylene oxide glycerol aliphatic esters, polyethylene oxide sorbitan fatty acid esters, polyethylene oxide Ether esters of alkane sorbitol fatty acid esters, polyethylene oxide fatty acid alkanolamine sulfates, etc., polyethylene glycol fatty acid esters, glycol fatty acid ethers, fatty acid glycerol-esters, polyglycerol fatty acid esters , Ether ester compounds such as sorbitan fatty acid esters, propylene glycol fatty acid esters, and sucrose fatty acid esters. Examples of the polyethylene oxide polypropylene oxide block copolymer include compounds having a block structure as described below. One (A) j-(B) k-one (A) j — (B) k- (A) 1 — (where 'A represents a CH2CH2C) group, and B represents —CH2CH (CH3) 0 one group, j represents 1 to 90, k represents 10 to 99, and 1 represents a number from 0 to 90). Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, these include polyethylene oxide alkyl ethers, polyethylene oxide polypropylene oxide block copolymers, and polyethylene oxide polypropylene oxide. Ester-type compounds such as alkyl ethers, polycycloethane glycerol fatty acid esters, polyethylene oxide sorbitan fatty acid esters, polycycloethane sorbitol fatty acid esters and the like are preferred examples. These may be used singly or in combination of two or more kinds. Examples of the surfactant include nonionic surfactants, anionic surfactants, cationic surfactants, and amphoteric surfactants, and further include fluorine-based surfactants, silicon-based surfactants, Poly paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) -29- 1238908 A7 B7 V. Description of the invention (27) Epoxy alkylene surfactant, poly (meth) acrylate interface Examples of the active agent include fluorine-based surfactants and silicon-based surfactants. Examples of the fluorine-based surfactant include 1,1,2,2-tetrahedral (m-phenylene) octyl (1,1,2,2-tetrahedral) propyl ether, I, 1, 2,2-tetrahexyl octylhexyl ether, octahexanediol di (1,1,2,2-tetrahexyl butyl) ether, hexaethylene glycol (1,1,2,2,2,3,3 —Hexadecylpentyl) ether, octapropanediol di (1,1,2,2 — ·· 4heptabutyl) ether, hexapropylene glycol (1,1,2,2,

3,3 —Hexapicamyl) ether, sodium perdodecadecyl (sulfo) sulfonate, 1,1,2,2,2,8,8,9,9,10,10 —10hex Second Academies, 1,2,2,3,3-Liugu Pikuai, N- [3-(peroxyoctanesulfonyl) propane] -N, N- -dimethyl-N-residual methylene Trimethylammonium beta, perfluorosulfonylpropyltrimethylammonium salt, perfluoroalkyl-N-ethylsulfonium phosphonium. Glycine, bis (N-perfluorooctylsulfonylsulfonium-N -Ethylamine ethyl), monoperfluoroalkyl ethyl phosphate, etc., have fluorine-based interfacial activity from compounds having a fluoroalkyl group or a fluoromethylene group in at least one of the main chain and the side chain Agent. As for the commercially available products, Megafack F 1 4 2 D can be cited as F172, F173 'and F183 (the above are manufactured by Dainippon Ink Chemical Industry Co., Ltd.), EFTOPET301, 303, and 3 52 (Shin Akita (Manufactured by Kasei Co., Ltd.), Florade FC-430, same FC — 43 1 (manufactured by Sumitomo Three-M Co., Ltd.), Rising Sun Guard AG710, Safron S-382, same SC—101, same SC—102, same SC— 103. The same paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) L-(Please read the precautions on the back before filling this page)-Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperatives -30 -1238908 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs β Industrial Consumer Cooperative A7 B7 V. Description of invention (28) SC — 104, same as SC — 105, same as SC — 106 (made by Asahi Glass Co., Ltd.), BM—1000, BM -Commercially available fluorine-based surfactants under the names of 1100 (manufactured by Yushang Co., Ltd.) and NBX-15 (manufactured by NOES). Among these, the above-mentioned Megack F172, BM-1000, BM-1100, and N B X-1 5 are particularly suitable. As for the silicon-based surfactant, for example, S Η 7 PA, SH21PA, SH30PA, ST94PA (all manufactured by Torayon, Dowkoning, Silicon (Company)) and the like can be used. The amount of the surfactant used is usually 0.0001 to 10 parts by weight based on 100 parts by weight (completely hydrolyzed condensate) of the total amount of the components (A) and (B). These may be used singly or in combination of two or more kinds. Examples of the organic silane coupling agent include 3-glycidyl propyltrimethoxysilane, 3-aminoglycidyl propyltriethoxysilane, 3-glycidyl propyltrimethoxysilane, and 3- Glycidyl propylmethyldimethoxysilane, 1-metha glycidyl propylmethyldimethoxysilane, 3-aminopropyltrimethoxysilane, 3-aminopropyltriethoxysilane, 2-aminopropyltrimethoxysilane, 2-aminopropyltriethoxysilane, N- (2-aminoethyl) -3-aminopropyltrimethoxysilane, N- (2-amino Ethyl) —3-aminopropylmethyldimethoxysilane, 3-ureidopropyltrimethoxysilane, 3-ureidopropyltriethoxysilane, N-ethoxyquinyl-3 -Aminopropyltriethoxysilane, N-triethoxysilylpropyltriethylenetriamine, N -Three paper sizes are applicable to China National Standard (CNS) A4 (210x 297 mm) I IT— (Please read the precautions on the back before filling this page) -31-1238908 Μ Β7 V. Description of the invention (29) Ethoxysilylpropyltriethylenetriamine, 1 -Trimethoxysilyl ~ 1,4,7-triazadecane, 10-triethoxysilyl, 4,7-triazadecane, 9-trimethoxysilyl 3 '6-diazanonyl acetate (ester), 9 triethoxysilyl group, 6-diazanonyl acetate (ester), N-benzyl-1 3-ammonium_propyl Triethoxysilane, N-phenyl-3 -aminopropyltrimethoxysilane, N-phenyl-3 -aminopropyltriethoxysilane, N-bis (gasified ethylene)-3 _ Aminopropyldiethoxy sand, N-bis (ethylene oxide) -3-aminopropyltriethoxysilane, etc. These may be used singly or in combination of two or more kinds. As for the triazene compound, for example, 1,2-bis (3,3-methyltriazinate) benzene and 1,3-bis (3,3-dimethyltriazinate) benzene , 1,4-bis (3,3-dimethyltriazinate) benzene, bis (3,3-dimethyltriazinylphenyl) ether, bis (3'3-dimethyl Triazinyl phenyl) methane, bis (3,3-dimethyldiazinylphenyl) code, bis (3,3-dimethyltriazinylphenyl) sulfide, 2 , 2-bis [4-mono (3,3-dimethyltriazinylphenoxy) phenyl] -1,1,1,1,3,3,3-hexafluoropropane, 2,2-bis [ 4 mono (3,3-dimethyltriazinylphenoxy) phenyl] propane, 1,3,5-tris (3,3-dimethyltriazinyl) benzene, 2,7 —Bis (3,3-dimethyltrinonanedioic acid) -9,9 —bis [4-((3,3-dimethyltrinonanedioic acid) phenyl] fluorene, 2,7—bis (3,3-Dimethyltriazinate) -9,9-Bis [3-propenyl-4 4- (3,3-Dimethyltriazinate) This paper is sized to the Chinese National Standard (CNS ) A4 size (210X297mm) clothing-(Please read the precautions on the back before filling this page)

Printed by 1T Consumer Cooperatives of Intellectual Property Bureau of the Ministry of Economy -32- 1238908 A7 __ B7___ V. Invention Description (30) (Please read the notes on the back before filling this page) Base) Phenyl] 芴, 2, 7 -Bis (3,3-dimethyltriazinate) -9,9-bis [3,5-difluoro-4— (3,3-monomethyltriazinate) phenyl] fluorene 2,7—bis (3,3-dimethyltriazinate) -9,9—bis [3-trifluoromethyl-4 ((3,3-dimethyltriazinate)) Phenyl] hydrazone and the like. These may be used singly or in combination of two or more kinds. Examples of the free radical generating agent include butyl fluorene peroxide, ^ '^ / bis (decylfluorenyl peroxide) diisopropylbenzene, cumyl peroxide neodecanoate, and bis-n-propyl peroxide. Carbonate, diisopropylperoxycarbonate, 1,1,3,3-tetramethylbutyl neodecanoate, bis (4) Printed with t-butyl Cyclohexyl) peroxydicarbonate, 1-cycloethyl-1,1-methylethylperoxyneodecanoate, di-2-ethoxyethylperoxydicarbonate, di (2-peroxyethyl) Hexyl) dicarbonate, t-hexylperoxyneodecanoate, dimethoxybutylperoxydicarbonate, bis (3-methyl-3-permethoxybutyl) dicarbonate, t Monobutyl peroxyneodecanoate, 2,4 dichlorophenylhydrazone, t-hexylfluorenylvalerate, t-butylpervalerate, 3,5,5 '5 -peroxide Trimethylhexyl oxide, octyl peroxide, dodecyl peroxide, stearyl peroxide (octadecyl), Γ, 1,3,3-tetramethylbutyl peroxide 2 -Ethylhexanoate, persuccinate, 2'5-dimethyl-2,5-bis (2-ethylhexyl peroxide) hexane, 1-cyclohexyl-1-methyl peroxide 2-ethylhexanoate, t-hexyl peroxide 2-ethylhexanoate, t-butylperoxy 2-ethylhexanoate, m-toluene and phenylperoxide, phenylperoxide, t-butyl peroxy This paper is sized to the Chinese National Standard (CNS) A4 (210X297 mm) -33-1238908 A7 B7 V. Description of the invention (31) Isobutyrate, di-t-butyl peroxide One 2-methylcyclohexane, 1, 1, bis (t-hexyl peroxide) -3,3,5-trimethylcyclohexane, 1,1-bis (t-hexyl peroxide) cyclohexane , 1,1-bis (t-butyl peroxide) -3,3,5-trimethylcyclohexane, 1,1-bis (t-butyl peroxide) cyclohexane, 2,2-bis (4,4-Di-t-butylcyclohexyl peroxide) propane, 1,1 bis (t-butylperoxy) cyclodecane, t-hexyl isopropyl-carbonate, t-butyl Maleic peroxide, t-butyl peroxide 3,3,5-trimethylhexanoate, t-butylperoxylaurate, 2,5-dimethyl-2,5- (m-toluenyl peroxide) hexane, t-butyl Isopropyl peroxy-carbonate, t-butyl peroxy 2-ethylhexyl-carbonate, t-hexyl peroxybenzoate, 2,5-dimethyl-1,2,5-di (per Benzene oxide) hexane t-butyl peroxyacetate, 2,2-bis (t-butylperoxy) butane, t-butylperoxybenzoate, η-butyl-4,4 Bis (t-butylperoxy) valerate, di-t-butylperphthalate, α, α > -bis (t-butylperoxy) dicumene, peroxide Dicumene, 2,5-Dimethyl-2,5-di (t-butylperoxy) hexane, t-butylcumene peroxide, di-t-butylperoxide p-terpene Alkyl hydroperoxide, 2,5-dimethyl-2,5-di (t-butylperoxy) hexyne-3, dicumyl hydroperoxide t-butyltrimethylperoxysilyl '1,1,3,3-Tetramethylbutyl hydroperoxide, cumene (cumene) peroxide Hydrogen, t-hexyl hydroperoxide, t-butyl hydroperoxide, dibenzyl, 2,3-dimethyl-2,3-diphenylbutane, α α, dimethoxy China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page), 1T Printed by S Industrial Consumer Cooperative of Intellectual Property Bureau of Ministry of Economic Affairs-34-1238908 B7____ V. Description of Invention ( 32) group —α, α > —diphenylbi (di) benzyl, α, α > monodiphenyl—α—methoxybi (di) benzyl, α, diphenyl—α, ❹ / -Dimethoxybi (di) benzyl, α α / monodimethoxy-α, α / -dimethylbi (di) benzyl, α, α / -dimethoxybi (di) benzyl, 3,4-dimethyl-1,3,4-diphenyl-n-hexane, 2,2,3,3-tetraphenyl acetonitrile and the like. These can also be used at the same time 1 type or 2 types. As for compounds containing reactive double bonds, such as phenyl propane, diphenyl propylene, triphenyl propylene, phenyl propylene oxide, diphenyl propylene oxide , Triphenylpropylene benzene oxide, ^ 0-diphenylpropylene oxide alkanes (hydrocarbons), α, ω-diphenylpropylene alkenes, α, 0-diphenylpropylene alkenes, allylamine, Diallylamine, triallylamine 'N-phenylacrylamine, N-phenylpropenyl tetramethamine, N, N-diphenylpropylene urea, triphenylpropylene isocyanate, 2, 2 >-Phenyl propylene compounds such as diphenylpropylene bisphenol A; styrene, divinylbenzene, trivinylbenzene, stilbene (stilbene), propenylbenzene, dipropenylbenzene, tripropenylbenzene, benzene Methyl vinyl ketone, methyl styryl ketone, α, ω-divinylalkanes (hydrocarbons), α, ω-divinylalkenes, α, ω-divinylalkynes, α, ω divinyl oxide alkane (hydrocarbon), α, ω-divinyl alkene, α, ω-divinyl alkyne, α, ω- Dipropenyl alkenes, α 'ω-dipropanyl alkynes, α, ω-dipropanyl alkynes, α' ω-dimethylpropenyl alkane (hydrocarbon), αω one two Methacrylic alkenes, α, ω-dimethylpropenyl alkenes' bispropenyl oxide This paper is sized for Chinese National Standard (CNS) A4 (210X297 ^ cent) (Please read the precautions on the back first (Fill in this page) Printed by the 8th Industrial Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

-35- 1238908 A7 B7 V. Description of the invention (33) L • Packing-(Please read the precautions on the back before filling this page) Benzene, Tripropenyl Oxide, Dipropenyl Oxide, Tripropenyl Oxide , N-vinyl dicarboxylic acid amine, N-vinyl phenyl tetramethyleneimine, and other ethylene compounds; Examples include 2, 2 / -diphenylpropene-4,4 > —bi (di) benzene Polypropyne ethers and polypropynes containing 2,2 > -diphenylpropylene-1,4 / bi (di) benzene. These may be used singly or in combination of two or more kinds. Examples of the compound containing a reactive triple bond include acetylenebenzene, diacetylenebenzene, triacetylenebenzene, diphenyl (yl) acetylenetrimethylsilyl (yl) acetylenebenzene, trimethylsilyl (yl) acetylenebenzene, bis (Trimethylsilylethynyl) benzene, tris (trimethylsilylethynyl) benzene, phenylethynyl (phenyl) benzene, bis (phenylethynyl) benzene, tris (phenyl) Ethynyl) benzene, tris (phenylethynyl) benzene, bis (ethynylphenyl) ether, bis (trisylsilylethynylphenyl) ether, bis (phenylethynylphenyl) ether Wait. These may be used singly or in combination of two or more kinds. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. For the present invention, the boiling point in the composition for forming a film is below 100 ° C, and the content of alcohol is below 20% by weight, particularly preferably below 5% by weight. Alcohols with a boiling point of less than 100 t are the conditions that occur when the (A) component is hydrolyzed and / or condensed, and its content is 20% by weight or less, and it is preferably 5% by weight or less by distillation, etc. It is advisable to remove. When the hydrolyzed condensate used in the present invention is applied to a substrate such as a gate insulating film, a gate oxide film, and a gate electrode of a TFT, a coating method such as a spin coating dip method, a roll coating method, or a spray method is used. This paper size applies to Chinese National Standard (CNS) A4 specifications (210X 297 mm) -36_ 1238908 A7 B7______ 5. Description of invention (34) Decoration means. The film thickness at this time is a dry film thickness, and the thickness of one coating is about 0.05 to 2 // m, and the thickness of two coatings can form a coating of about 0.1 to 4 / z m. Thereafter, it can be dried at room temperature or at a temperature of 80 to 350 ° C. Generally, it can be dried by heating for 2 to 240 minutes to form a glassy or large polymer insulating film. As for the heating method at this time, thermal plating, oven filtration, filtration, etc. can be used. As for heating the atmosphere, controlling the nitrogen atmosphere, the argon atmosphere, the vacuum, the hydrogen concentration under the atmosphere, and the reduced pressure can be performed. By electron beam or ultraviolet irradiation, a paint film can be formed. The interlayer insulating film for L C D thus obtained may form a low temperature, indicate a low permittivity, and because of the excellent heat resistance of the paint film, it is used as an interlayer insulating film for Amorfarce silicon TFT LCDs and polysilicon TFT LCDs. [Examples] Hereinafter, the present invention will be described more specifically with reference to examples. However, the following descriptions are examples of aspects of the present invention, and they are not intended to be limited in particular. The present invention is not limited by the descriptions. In addition, the parts and% (percentages) in the examples and comparative examples are not specifically described, and each part has a weight portion and a weight%. Various evaluations are performed as follows. [Mean weight average molecular weight (Mw)] This paper size applies the Chinese National Standard (CMS) A4 specification (210X 297 mm) (Please read the precautions on the back before filling out this page.) -37- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, 1238908 A7 p -__ B7 _ _ V. Description of the invention (35) Measured by gel permeation chromatography (GPC) method under the following conditions. Sample: Using tetrahydrofuran as a solvent, 1 g of the hydrolyzed condensate was dissolved in 1,000 C C of tetrahydrofuran. Quasi-polystyrene ... Standard polystyrene manufactured by American Pressure_Chemical Corporation is used. Device: High-temperature and high-speed gel permeation chromatography (Model 150-C ALC / GPC) column (Colum) manufactured by Waters Corporation, USA: SHODEX A-80M (length 50 cm) manufactured by Showa Denko Corporation Measurement temperature · 4 0 t flow rate ·· 1 cc / min [Specific Dielectric Constant] On a 8-inch silicon wafer, a sample of the composition is coated by a spin coating (Spin (oat) method), and thermal plating is performed at 90 ° C. for 3 minutes under nitrogen atmosphere. The substrate was dried at 2000 ° C for 3 minutes, and then the substrate was calcined at 350 ° C under a nitrogen atmosphere for 10 minutes. The obtained film was vapor-deposited to form an aluminum electrode pattern with a specific dielectric. Sample for constant measurement. The specific dielectric constant of the coating film was measured by the CV method at a frequency of 1000 kHz using an HP 1 645 1B electrode manufactured by Hulett Pacard and an HP 428 Precision LCR Meter. 〕 On 8-inch silicon wafers, use spin-coating method to coat the composition sample. The paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page}

-38- 1238908 A7 V. Description of the Invention (36) (Please read the precautions on the back before filling this page), dry the substrate by hot plating at 90 ° C for 3 minutes, and dry the substrate at 200 ° C for 3 minutes. Nitrogen atmospheric thermal plating at 350 ° C for 10 minutes pre-calcined the substrate. The obtained film was taken from a wafer, and the thermal weight reduction was measured in a nitrogen atmosphere at a temperature rising rate of 10 ° C / min, and evaluated from the following criteria. 〇: 1% or less weight reduction at 400 ° C X: 1% or less weight reduction at 400 ° C [Synthesis Example 1] Methyltrimethoxy was added to a separable flask made of quartz Silane 276 · Olg, tetramethoxysilane 86 · 14g, and four (acetamidoacetone ligand) titanium 0092 g were dissolved in propylene glycol-ethyl ether 〇1 g, and then the mixture was stirred using a three-phase motor. , The solution temperature was stabilized at 5 5 ° C. Next, a mixed solution of 225.52 g of ion-exchanged water and 763.00 g of propylene glycol monoethyl ether was added to the solution for one hour. Then, after reacting for 5 5 t for 4 hours, add hexane acetone 4 8. 12 g, and then print the application in 30 minutes for the consumer cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs to cool the reaction solution to room temperature. . From 2 g of methanol and aqueous solution was removed from the reaction solution at 50 ° C by evaporation, and the obtained reaction solution ① was removed. The weight average molecular weight of the condensate and the like thus obtained is 1, 2 3 0. [Synthesis Example 2] In a separable flask made of quartz, 205.50 g of methyltrimethoxysilane and 85.51 g of tetramethoxysilane were added to dissolve the paper. The Chinese standard (CNS) A4 specification was applied ( 210X297 mm) -39-1238908 A7 B7_ V. Description of the invention (37) After propylene glycol-ethyl ether 4 2 6 g, use a three-phase electric motor to stir the solution to stabilize the solution temperature at 50 ° C. Next, 0.63 g of succinic acid was dissolved in 182 g of ion-exchanged water, and it was added to the solution for 1 hour at a cost. Then, after reacting at 50 ° C for 3 hours, the reaction liquid was cooled to room temperature. The reaction solution ② was obtained by removing 360 'of a methanol-containing solution from the reaction solution at 50 ° C by evaporation. The weight-average molecular weight of the condensate and the like thus obtained is 1,400. [Synthesis Example 3] In a separable flask made of quartz, 200 g of distilled propylene glycol-propyl ether, 160 g of ion-exchanged water, and 90% of a 10% methylamine aqueous solution were added, and uniformly stirred. A mixture of 136 g of methyltrimethoxysilane and 209 g of tetraethoxysilane was added to this solution, and the solution was kept at 5 2 ° C for 2 hours to react. This solution was added to 300 g of a propylene glycol-propyl ether solution, and then concentrated to a solution of 10% (equivalent to a fully hydrolyzed condensate) using an evaporator at 50 ° C, followed by 10% propylene glycol in acetic acid. 10 g of a monopropyl ether solution, the obtained reaction ③. The weight-average molecular weight of the condensate and the like thus obtained was 904,000 [Synthesis Example 4] In a separable flask made of quartz, 4 2 8 g of distilled ethanol, 2 1 5 g of ion-exchanged water, and 25% tetramethyl were added. The ammonium hydroxide aqueous solution was 15.6%, which was uniformly stirred. This solution is added with methyltrimethoxy. This paper is sized for Chinese National Standard (CNS) A4 (210X297 mm) (please read the precautions on the back before filling this page). Order printed by the Intellectual Property Bureau of the Ministry of Economic Affairs. -1238908 A7 __ B7 V. Description of the invention (38) (Please read the notes on the back before filling in this page) Mixture of silane 40 · 8g and tetraethoxysilane 61.4g, keep this solution at 5 7 ° C For 2 hours. This solution was added to 300 g of propylene glycol monopropyl ether, and then the concentration was concentrated to 10% of the solution (equivalent to a completely hydrolyzed condensate) using an evaporator of 5. Then, 20 g of a 10% propylene glycol-propyl ether solution of maleic acid was added, and the resulting reaction solution ④ was added. The weight-average molecular weight of the condensate and the like thus obtained was 1,600,00 [Comparative Synthesis Example 1] In a separable flask made of quartz, tetramethoxysilane 8 5.5.1 g was dissolved in After 4 2 g of propylene glycol monoethyl ether was stirred using a three-phase motor, the temperature of the solution was stabilized at 50 ° C. Next, 0.63 g of succinic acid was dissolved in ion-exchanged water, and 182 g was added for 1 hour to the solution. Thereafter, after reacting at 50 ° C for 3 hours, the reaction solution was cooled to room temperature, and 360 ° g of the methanol-containing solution was evaporated from the reaction solution at 50 ° C to obtain the reaction solution ⑤. Printed by the Consumer Cooperative of the Intellectual Property Office of the Ministry of Economic Affairs. The weight average molecular weight of the condensate obtained in this way is 2,400. [Example 1] The reaction solution ③ obtained in Synthesis Example 3 was filtered using a Teflon filter membrane having a pore size of 0.2 / m to obtain a composition for the membrane of the present invention. The obtained composition was applied on a silicon wafer by a spin coating method. The specific permittivity of the coating film is expressed as 2. 5 7 and the low specific permittivity. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -41-1238908 A7 B7 V. Description of the invention (39) . When the heat resistance of the coating film was evaluated, the weight reduction was less than 1%. (Please read the precautions on the back before filling in this page.) [Examples 2 to 6] For Example 1, Table 1 shows the reaction solution and its use in the same manner as in Example 1 except that the reaction solution was used. The evaluation results are shown in Table 1. [Table 1] Example (A) Component specific dielectric constant heat resistance 1 Reaction liquid ③ 2.57 〇2 Reaction liquid ④ 2.34 〇3 Reaction liquid ③ 30g + Reaction liquid ① 10g 2.65 〇4 Reaction liquid ③ 30g + Reaction liquid 01 〇g 2.69 〇 5 Reaction liquid ④ 30g + reaction liquid ① 20g 2.78 〇6 Reaction liquid ④ 30g + reaction liquid ① 20g 2.82 〇 [Example 7] Printed by S Industrial Consumers Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs will prepare transparent glass plates made of borosilicate glass (Corning Corporation 7059) 2 sheets. Secondly, this one sheet is made by a known method, and as shown in FIG. 1, a TFT array substrate 10 is manufactured. Fig. 1. For convenience of drawing, adopting one T F T part is to describe a cross-sectional view of a T F T array (aiTay) substrate. As shown in Figure 1, the symbol 1 is a glass substrate, 2 is a pre-formed film with a thickness of 4000 nm on the aforementioned substrate, 3 is a Gate electrode, 4 is a Gate insulation film, 5 paper standards are applicable to Chinese national standards (CNS) A4 specification (210X297 mm) -42- 1238908 A7 B7 V. Description of the invention (4〇) (Please read the precautions on the back before filling this page) A semiconductor film made of Amorfarce sand (however, if (Polysand film can also be used), 5 series η-type impurities diffused η + layer, 6 series insulation film used in Example 1, 7 series source wiring, 8 series excretion wiring, 8 > pixel electrode, 8 > Connected to the previous excretion wiring. A glass plate on the other side of the substrate 10 opposite to the above-mentioned substrate 10 is formed by a known method on the glass 11 with a transparent counter electrode 11 made of indium tin oxide. In this way, FIG. 2 is used to make the counter substrate 20. Thereafter, each liquid crystal alignment film 22 is formed on the surface of the aforementioned TFT array substrate 10 and the surface of the opposite substrate 20. Secondly, the two polar plates are placed inside the liquid crystal alignment films 2 2-2 2 with a distance of 5 // m, and the periphery of the whole divided into 4 equal areas can be glued together and overlapped. The liquid crystal display element is used for There are 4 small rooms. Thereafter, a twisted array (Twisted Nematic, TN) type liquid crystal 2 3 (ZL l-4792; manufactured by Milk Corporation) of the above-mentioned empty cell is sealed in a vacuum, or the liquid crystal cell is sealed, and then pasted on both sides of the liquid crystal cell The polarizing plate 24 is shown in FIG. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, this LCD will apply a bias voltage of 2 V for 30 hours with an AC pulse wave of 60 // sec, 30Hz, and 2.6V. After that, the flicker will turn on when After removing the bias voltage for 2 · 1 second, it is eliminated, indicating that it has flicker resistance. [Example 8] For Example 7, when it is an insulating film, the use of Example 2 will be used in accordance with the Chinese National Standard (CNS) A4 specification at this paper size (21〇 > < 297 mm) • 43-1238908 A7 __B7 V. Explanation of the Invention (41) Except that the flicker of the LCD is measured in the same manner as in Example 7. The flicker is eliminated after 1.7 seconds after removing the bias voltage, indicating that it has excellent flicker resistance. [Example 9] In Example 7, when Example 3 was used as an insulating film, the flicker of L C D was measured in the same manner as in Example 7 except that the insulating film was used. Flicker is eliminated after 2.1 seconds after the bias voltage is removed, indicating that it has superior flicker tolerance. [Example 10] In Example 7, when Example 4 was used as an insulating film, the flicker of L C D was measured in the same manner as in Example 7 except that the insulating film was used. The flicker is eliminated after 2-3 seconds after the bias voltage is removed, indicating superior flash-tolerance. [Example 1 1] In Example 7, when Example 5 was used as the insulating film, the flicker of L C D was measured in the same manner as in Example 7 except that the insulating film was used. The flicker is eliminated after 2-3 seconds after the bias voltage is removed, indicating that it has superior flicker-tolerance. [Example 1 2] For Example 7, when Example 6 is used for the insulation film, the paper size of the insulation paper is also applied to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling in (This page)-Binding and printing printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-44- 1238908 A7 B7 V. Invention Description (42) (Please read the precautions on the back before filling this page) Except for film use and Example 7 The flicker of the LCD was measured in the same way. The flicker is eliminated after 2 to 4 seconds after the bias voltage is removed, indicating that it has superior flicker-tolerance. [Comparative Example 1] A coating film was evaluated in the same manner as in Example 1 except that the reaction solution ⑤ obtained in Comparative Synthesis Example 1 was used. The specific dielectric constant of the coating film is 3 · 6 8 and the specific dielectric constant exceeds 3. In addition, when the heat resistance of the coating film was evaluated, a weight loss of 1 · 3% at 400 ° C was a deterioration. [Comparative Example 2] In Example 7, when Comparative Example 1 was used as an insulating film, the flicker of L C D was measured in the same manner as in Example 7 except that an insulating film was used. The flicker is removed after 15 seconds after removing the bias voltage, and the flicker resistance is deteriorated. Printed by the Intellectual Property of the Ministry of Economic Affairs and the Consumer Consumption Cooperative [Comparative Example 3] For Example 7, when using the Chemical Vapor for the insulation film

Except for the Sio2 film produced by the Deposition method, the flicker of the LC CD was measured in the same manner as in Example 7. The flicker was removed after 120 seconds after removing the bias voltage, and the flicker-resistant system was deteriorated. [Effects of the invention] This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -45-1238908 A 7 B7 V. Description of the invention (43) According to the present invention, it is possible to provide specific hospital oxygen The sand hydrolyzed polymer is heated to form a low-temperature, low-dielectric constant, and an interlayer insulating film for LCDs, which is superior to the heat resistance of the coating film. [Brief Description of Drawings] [FIG. 1] A sectional view of an array substrate of a TF array in the embodiment of the present invention. [Fig. 2] An embodiment of the present invention is a cross-sectional view of an opposing substrate. [Fig. 3] An embodiment of the present invention is a cross-sectional view of an L C D. [Explanation of Symbols] 1 Glass substrate 2 Lower layer film 3 Amorfarce stone layer 4 General electrode 5 Semiconductor film 5 η + layer 6 Insulating film 7 Source wiring 8 Drain wiring 8 " Pixel electrode ίο TFT array substrate 11 Glass substrate paper Zhang scale is applicable to China National Standard (CNS) Α4 specification (2 丨 0X297 mm), --------— (Please read the precautions on the back before filling this page) Order for the employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the cooperative-46- 1238908 A7 B7 V. Description of the invention (44)

1 2 Transparent counter electrode 2 〇 Opposite substrate 2 2 Liquid crystal alignment film 2 3 TN liquid crystal 2 4 Polarizer 3 〇 Liquid crystal cell 3 1 LCD (Please read the precautions on the back before filling this page) The paper size printed by the Employees' Cooperative of the Property Bureau applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -47-

Claims (1)

1238908 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs? Amendment and Replacement --- ^ year > Month R_ VI. Patent Application No. 90 1 1 93 82 Patent Application Chinese Patent Application Amendment 1994 Amendment on February 4 1. An interlayer insulating film for a liquid crystal display device, characterized in that: (A) (A-1) represents a compound R of the following general formula (1) by heating in the presence of a catalyst. a S i (OR1) 4-a ... (1) (wherein R represents a hydrogen atom, a fluorine atom or a monovalent organic group, and R1 represents an alkyl group, an aromatic group, an allyl group or an epoxy group Propyl, a represents an integer of 1 to 2), (A-2) represents a compound of the following general formula (2) and Si (OR2) 4 ... (2) (where R2 represents an alkane (Aryl, aryl, allyl, or glycidyl) and (A-3) represent compounds of the following general formula (3) R3b (R4〇) 3-bSi- (R7) d-Si (OR5) 3- cR6〇 ... (3) [In the formula, R3 ~ R6 represent the same or different, each alkyl, aromatic, allyl or epoxypropyl group, b ~ c represent the same or different, 0 ~ An integer of 2 where R7 represents an oxygen atom, a phenylene group or a (CH2) a-group Here η line integer of 1~6), D represents at least one kind of compound 1] of the square or groups chosen, be obtained by hydrolysis condensation hydrolysis condensates obtained are heated. 2. The interlayer insulation film for liquid crystal display elements, such as the item 1 in the scope of patent application, wherein the heating temperature of the hydrolyzed condensate is below 350 ° C. 3 · If the layer for the liquid crystal display element of item 1 or 2 of the scope of patent application is applied, the paper size applies to the Chinese National Standard (CNS) A4 specification (21 × 297 mm) (Please read the precautions on the back before filling this page) 1238908 A8 B8 C8 D8 VI. Patent application range Insulation film, where the specific dielectric constant is 3 or less. 4 · The interlayer insulating film for liquid crystal display elements as described in item 1 or 2 of the patent application scope, in which the catalyst is an alkali catalyst. 5. A liquid crystal display element comprising an interlayer insulating film for a liquid crystal display element such as the scope of claims 1 or 2 of the patent application. (Please read the precautions on the back before filling out this page) Order Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm) -2-