TW350988B - Manufacturing method of forming metal layout by means of hard mask - Google Patents
Manufacturing method of forming metal layout by means of hard maskInfo
- Publication number
- TW350988B TW350988B TW086113980A TW86113980A TW350988B TW 350988 B TW350988 B TW 350988B TW 086113980 A TW086113980 A TW 086113980A TW 86113980 A TW86113980 A TW 86113980A TW 350988 B TW350988 B TW 350988B
- Authority
- TW
- Taiwan
- Prior art keywords
- hard mask
- manufacturing
- forming metal
- metal layout
- layout
- Prior art date
Links
Abstract
Manufacturing method of forming metal layout by means of hard mask, including the following steps: (a) forming on the semiconductor substrate surface a metal layer and a anti-reflective layer; (b) forming a hard mask on said anti-reflective layer; (c) defining the layout the hard mask; and (d) etching the anti-reflective layer and the metal layer for defining the metal layout, with the reacted gas of the etching with SF6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113980A TW350988B (en) | 1997-09-25 | 1997-09-25 | Manufacturing method of forming metal layout by means of hard mask |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW086113980A TW350988B (en) | 1997-09-25 | 1997-09-25 | Manufacturing method of forming metal layout by means of hard mask |
Publications (1)
Publication Number | Publication Date |
---|---|
TW350988B true TW350988B (en) | 1999-01-21 |
Family
ID=57939961
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW086113980A TW350988B (en) | 1997-09-25 | 1997-09-25 | Manufacturing method of forming metal layout by means of hard mask |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW350988B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI415221B (en) * | 2009-09-30 | 2013-11-11 | Macronix Int Co Ltd | Method for preventing al-cu bottom damage using tin liner |
TWI669994B (en) * | 2017-12-04 | 2019-08-21 | 希華晶體科技股份有限公司 | Method for manufacturing miniaturized circuit and its products |
-
1997
- 1997-09-25 TW TW086113980A patent/TW350988B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI415221B (en) * | 2009-09-30 | 2013-11-11 | Macronix Int Co Ltd | Method for preventing al-cu bottom damage using tin liner |
TWI669994B (en) * | 2017-12-04 | 2019-08-21 | 希華晶體科技股份有限公司 | Method for manufacturing miniaturized circuit and its products |
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Legal Events
Date | Code | Title | Description |
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MK4A | Expiration of patent term of an invention patent |