TW200729290A - Carrier platform apparatus and correcting method of the coordinates, exposure apparatus, and manufacturing method of device - Google Patents
Carrier platform apparatus and correcting method of the coordinates, exposure apparatus, and manufacturing method of deviceInfo
- Publication number
- TW200729290A TW200729290A TW095139124A TW95139124A TW200729290A TW 200729290 A TW200729290 A TW 200729290A TW 095139124 A TW095139124 A TW 095139124A TW 95139124 A TW95139124 A TW 95139124A TW 200729290 A TW200729290 A TW 200729290A
- Authority
- TW
- Taiwan
- Prior art keywords
- platform
- coordinates
- manufacturing
- carrier platform
- exposure apparatus
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
- G03F7/70725—Stages control
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/682—Mask-wafer alignment
Abstract
The invention provides a carrier platform apparatus. It includes: platform; moving platform (WTB) installed on the platform; measuring section of position information for measuring the position information of the moving platform (WTB); measuring section (45) of the deformation amount for measuring the correlation deformation amount of at least one of the platform and the moving platform (WTB); and correction section, which corrects the measured result from the measuring section of position information according to the measured result from the measuring section (45) of the deformation amount.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005308326 | 2005-10-24 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200729290A true TW200729290A (en) | 2007-08-01 |
TWI433210B TWI433210B (en) | 2014-04-01 |
Family
ID=37967715
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095139124A TWI433210B (en) | 2005-10-24 | 2006-10-24 | An exposure apparatus, an exposure method, and an element manufacturing method |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP5040657B2 (en) |
TW (1) | TWI433210B (en) |
WO (1) | WO2007049603A1 (en) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7649611B2 (en) | 2005-12-30 | 2010-01-19 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US8421994B2 (en) * | 2007-09-27 | 2013-04-16 | Nikon Corporation | Exposure apparatus |
US8994923B2 (en) * | 2008-09-22 | 2015-03-31 | Nikon Corporation | Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method |
US8325325B2 (en) | 2008-09-22 | 2012-12-04 | Nikon Corporation | Movable body apparatus, movable body drive method, exposure apparatus, exposure method, and device manufacturing method |
NL2005013A (en) * | 2009-07-31 | 2011-02-02 | Asml Netherlands Bv | Positioning system, lithographic apparatus and method. |
US20120064460A1 (en) * | 2010-09-07 | 2012-03-15 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
US8598538B2 (en) * | 2010-09-07 | 2013-12-03 | Nikon Corporation | Movable body apparatus, object processing device, exposure apparatus, flat-panel display manufacturing method, and device manufacturing method |
JP5717431B2 (en) | 2010-12-14 | 2015-05-13 | キヤノン株式会社 | Stage apparatus, exposure apparatus, and device manufacturing method |
NL2009357A (en) | 2011-09-27 | 2013-03-28 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
TWI468880B (en) * | 2012-06-15 | 2015-01-11 | Asml Netherlands Bv | Positioning system, lithographic apparatus and device manufacturing method |
KR102299921B1 (en) | 2014-10-07 | 2021-09-09 | 삼성전자주식회사 | Optical apparatus |
CN112204707A (en) * | 2018-05-31 | 2021-01-08 | 应用材料公司 | Multi-substrate processing for digital lithography systems |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5998446U (en) * | 1982-12-22 | 1984-07-03 | 株式会社日立製作所 | Reduction projection exposure equipment |
JP3097319B2 (en) * | 1992-06-18 | 2000-10-10 | 株式会社安川電機 | Non-contact power supply control method for electric motor, separated control electric motor by the method, and mechanical device using the separated control electric motor |
JPH09275072A (en) * | 1996-04-05 | 1997-10-21 | Nikon Corp | Straightness error correction method for moving mirror and stage device |
JP3809676B2 (en) * | 1996-10-21 | 2006-08-16 | 株式会社ニコン | Scanning exposure equipment |
JPH10260009A (en) * | 1997-03-21 | 1998-09-29 | Nikon Corp | Coordinate measuring device |
JP3445102B2 (en) * | 1997-06-13 | 2003-09-08 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
JP3849266B2 (en) * | 1997-12-18 | 2006-11-22 | 株式会社ニコン | Laser interference length measuring method and apparatus, stage apparatus using the same, and exposure apparatus using the same |
JPH11233403A (en) * | 1998-02-10 | 1999-08-27 | Nikon Corp | Method for adjusting stage and scanning aligner using the same |
JP2000240717A (en) * | 1999-02-19 | 2000-09-05 | Canon Inc | Active vibration resistant device |
JP3518400B2 (en) * | 1999-03-18 | 2004-04-12 | 株式会社日立製作所 | Electron beam drawing apparatus and drawing method using electron beam |
JP2002118050A (en) * | 2000-10-10 | 2002-04-19 | Canon Inc | Stage device, aligner, method for manufacturing semiconductor device, semiconductor manufacturing plant, and maintenance method for the aligner |
JP2003209044A (en) * | 2002-01-16 | 2003-07-25 | Canon Inc | Exposure device employing specific small power radio system between special environment and normal environment |
JP3984841B2 (en) * | 2002-03-07 | 2007-10-03 | キヤノン株式会社 | Distortion measuring apparatus, distortion suppressing apparatus, exposure apparatus, and device manufacturing method |
JP4350941B2 (en) * | 2002-11-14 | 2009-10-28 | キヤノン株式会社 | Charged particle beam exposure apparatus and device manufacturing method |
JP4546255B2 (en) * | 2002-12-12 | 2010-09-15 | ザイゴ コーポレーション | In-process correction of stage mirror distortion during photolithographic exposure cycles |
TWI338323B (en) * | 2003-02-17 | 2011-03-01 | Nikon Corp | Stage device, exposure device and manufacguring method of devices |
JP2005252246A (en) * | 2004-02-04 | 2005-09-15 | Nikon Corp | Exposure device and exposure method, method of controlling position and method of fabricating the device |
-
2006
- 2006-10-24 JP JP2007542585A patent/JP5040657B2/en active Active
- 2006-10-24 WO PCT/JP2006/321142 patent/WO2007049603A1/en active Application Filing
- 2006-10-24 TW TW095139124A patent/TWI433210B/en active
Also Published As
Publication number | Publication date |
---|---|
WO2007049603A1 (en) | 2007-05-03 |
JPWO2007049603A1 (en) | 2009-04-30 |
TWI433210B (en) | 2014-04-01 |
JP5040657B2 (en) | 2012-10-03 |
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