SU1834530A1 - Method of forming microimages - Google Patents

Method of forming microimages

Info

Publication number
SU1834530A1
SU1834530A1 SU4943843/21A SU4943843A SU1834530A1 SU 1834530 A1 SU1834530 A1 SU 1834530A1 SU 4943843/21 A SU4943843/21 A SU 4943843/21A SU 4943843 A SU4943843 A SU 4943843A SU 1834530 A1 SU1834530 A1 SU 1834530A1
Authority
SU
USSR - Soviet Union
Prior art keywords
dies
microimages
forming
electron
tbl
Prior art date
Application number
SU4943843/21A
Other languages
Russian (ru)
Inventor
И.Я. Смоляницкий
А.Н. Кононов
Н.Д. Артемова
Д.П. Поликарпов
А.И. Огурцов
А.Т. Яковлев
С.А. Мещеряков
А.А. Шульгин
Original Assignee
Внедренческое научно-производственное предприятие "ЭКСО"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Внедренческое научно-производственное предприятие "ЭКСО" filed Critical Внедренческое научно-производственное предприятие "ЭКСО"
Priority to SU4943843/21A priority Critical patent/SU1834530A1/en
Application granted granted Critical
Publication of SU1834530A1 publication Critical patent/SU1834530A1/en

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  • Electron Beam Exposure (AREA)

Abstract

FIELD: microelectronics. SUBSTANCE: electron resist is illuminated in sequence and under program control by electron beam in form of square-shaped dies. Sizes of dies are determined by maximal density of beam cross-section at focusing plane. After that latent image is developed. Current density and width of the die are chosen from the relation given in the description of the invention. EFFECT: improved efficiency of process; optimized thermal conditions of illumination. 4 dwg, 4 tbl
SU4943843/21A 1991-05-23 1991-05-23 Method of forming microimages SU1834530A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
SU4943843/21A SU1834530A1 (en) 1991-05-23 1991-05-23 Method of forming microimages

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
SU4943843/21A SU1834530A1 (en) 1991-05-23 1991-05-23 Method of forming microimages

Publications (1)

Publication Number Publication Date
SU1834530A1 true SU1834530A1 (en) 1995-05-20

Family

ID=60541657

Family Applications (1)

Application Number Title Priority Date Filing Date
SU4943843/21A SU1834530A1 (en) 1991-05-23 1991-05-23 Method of forming microimages

Country Status (1)

Country Link
SU (1) SU1834530A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2470336C2 (en) * 2010-12-02 2012-12-20 Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") Method of producing contact photomask with submicron and nanometric design rules

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2470336C2 (en) * 2010-12-02 2012-12-20 Открытое акционерное общество "Научно-исследовательский институт "Элпа" с опытным производством" (ОАО "НИИ "Элпа") Method of producing contact photomask with submicron and nanometric design rules

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