SG11201804129YA - Plasma device driven by multiple-phase alternating or pulsed electrical current and method of producing a plasma - Google Patents

Abstract

INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property - Organization International Bureau ires.. 00) (43) International Publication Date ,„,i .... ... 26 May 2017(26.05.2017) WIPO I PCT (10) WO International 111111111111111111111111111111111111111111111111111111111111111111111111111111111111111 2017/087233 Publication Number Al (51) International Patent Classification: (74) Agent: ZOLTICK, Martin M.; 607 14th Street, N.W., C23C 16/455 (2006.01) BO5D 3/14 (2006.01) Suite 800, Washington, District of Columbia 20005 (US). BOM 19/08 (2006.01) B05D 7/00 (2006.01) BO5D 3/06 (2006.01) (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (21) International Application Number: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, PCT/US2016/061134 BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (22) International Filing Date: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, 9 November 2016 (09.11.2016) KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, (25) Filing Language: English MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (26) Publication Language: English SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, (30) Priority Data: TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, 14/942,673 16 November 2015 (16.11.2015) US ZW. 14/942,737 16 November 2015 (16.11.2015) US (84) Designated States (unless otherwise indicated, for every kind ARIPO (71) Applicants: AGC FLAT GLASS NORTH AMERICA, of regional protection available): (BW, GH, INC. [US/US]; 11175 Cicero Drive, Suite 400, Alpharetta, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, Georgia 30022 (US). ASAHI GLASS CO., LTD. [JP/JP]; TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Shin-Maranouchi Building, 1-5-1 Maranouchi, Chiyo- TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, da-ku, Tokyo, 100-8405 (JP). AGC GLASS EUROPE DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, S.A. [BE/BE]; Technovation Centre, Rue Louis Bleriot, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, 12, 6041 Gosselies (BE). GW, KM, ML, MR, NE, SN, TD, TG). Inventors: CHAMBERS, John; AGC Glass Company (72) c/o Published: North America, Petaluma R&D, 1311 Clegg Street, Suite B, Petaluma, California 94954 (US). MASCHWITZ, — with international search report (Art 21(3)) Peter; 6601 Hutchins Avenue, Sebastopol, California 95472 (US). (54) Title: PLASMA DEVICE DRIVEN BY MULTIPLE-PHASE ALTERNATING OR PULSED ELECTRICAL CURRENT AND — METHOD OF PRODUCING A PLASMA 1402b 1404b 1430 1410 1410 / 1406b 1 WV 1420 .h. 1420 .g • - .... — 1420 1-1 .4t E-density [B/m3]-Max:8.89e+016 5e+013 998e+013 1996+014 3.9]=+014 792e4014 15564015 3.15e+015 629e+015 1 26e+016 254+016 5e4016 en en ei FIG. 14B it-- 00 (57) : A plasma source and method of producing a plasma are provided. The plasma source includes at least three hollow 0 --•-... cathodes, including a first hollow cathode, a second hollow cathode, and a third hollow cathode, each hollow cathode having a IN plasmaexit region. The plasma source includes a source of power capable of producing multiple output waves, including a first out - c:::, put wave, a second output wave, and a third output wave, wherein the first output wave and the second output wave are out of phase, el the second output wave and the third output wave are out of phase, and the first output wave and the third output wave are out of 0 phase. Each hollow cathode is electrically connected to the source of power such that the first hollow cathode is electrically connec - ,-t ted to the first output wave, the second hollow cathode is electrically connected to the second output wave, and the third is electric - P.- ally connected to the third output wave.