SG11201605964QA - Treatment of a surface modification layer for controlled bonding of thin sheets with carriers - Google Patents

Treatment of a surface modification layer for controlled bonding of thin sheets with carriers

Info

Publication number
SG11201605964QA
SG11201605964QA SG11201605964QA SG11201605964QA SG11201605964QA SG 11201605964Q A SG11201605964Q A SG 11201605964QA SG 11201605964Q A SG11201605964Q A SG 11201605964QA SG 11201605964Q A SG11201605964Q A SG 11201605964QA SG 11201605964Q A SG11201605964Q A SG 11201605964QA
Authority
SG
Singapore
Prior art keywords
carriers
treatment
surface modification
modification layer
thin sheets
Prior art date
Application number
SG11201605964QA
Inventor
Robert Alan Bellman
Dana Craig Bookbinder
Theresa Chang
Shiwen Liu
Robert George Manley
Prantik Mazumder
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of SG11201605964QA publication Critical patent/SG11201605964QA/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/04—Interconnection of layers
    • B32B7/06—Interconnection of layers permitting easy separation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/62—Plasma-deposition of organic layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B17/00—Layered products essentially comprising sheet glass, or glass, slag, or like fibres
    • B32B17/06—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material
    • B32B17/10—Layered products essentially comprising sheet glass, or glass, slag, or like fibres comprising glass as the main or only constituent of a layer, next to another layer of a specific material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/28—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material
    • C03C17/32—Surface treatment of glass, not in the form of fibres or filaments, by coating with organic material with synthetic or natural resins
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
    • C03C27/06—Joining glass to glass by processes other than fusing
    • C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
    • C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2218/00—Methods for coating glass
    • C03C2218/30—Aspects of methods for coating glass not covered above
    • C03C2218/32—After-treatment
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2400/00—Presence of inorganic and organic materials
    • C09J2400/10—Presence of inorganic materials
    • C09J2400/14—Glass
    • C09J2400/143—Glass in the substrate
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J2400/00—Presence of inorganic and organic materials
    • C09J2400/10—Presence of inorganic materials
    • C09J2400/14—Glass
    • C09J2400/146—Glass in the pretreated surface to be joined

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)
SG11201605964QA 2014-01-27 2015-01-27 Treatment of a surface modification layer for controlled bonding of thin sheets with carriers SG11201605964QA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201461931912P 2014-01-27 2014-01-27
PCT/US2015/013017 WO2015113023A1 (en) 2014-01-27 2015-01-27 Treatment of a surface modification layer for controlled bonding of thin sheets with carriers

Publications (1)

Publication Number Publication Date
SG11201605964QA true SG11201605964QA (en) 2016-08-30

Family

ID=52464589

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201605964QA SG11201605964QA (en) 2014-01-27 2015-01-27 Treatment of a surface modification layer for controlled bonding of thin sheets with carriers

Country Status (6)

Country Link
EP (1) EP3099484A1 (en)
JP (1) JP2017511756A (en)
KR (1) KR20160114106A (en)
SG (1) SG11201605964QA (en)
TW (1) TW201529511A (en)
WO (1) WO2015113023A1 (en)

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Publication number Priority date Publication date Assignee Title
US9725357B2 (en) 2012-10-12 2017-08-08 Corning Incorporated Glass articles having films with moderate adhesion and retained strength
US10543662B2 (en) 2012-02-08 2020-01-28 Corning Incorporated Device modified substrate article and methods for making
TWI615367B (en) 2012-10-12 2018-02-21 康寧公司 Articles having retained strength
US9340443B2 (en) 2012-12-13 2016-05-17 Corning Incorporated Bulk annealing of glass sheets
TWI617437B (en) 2012-12-13 2018-03-11 康寧公司 Facilitated processing for controlling bonding between sheet and carrier
US10086584B2 (en) 2012-12-13 2018-10-02 Corning Incorporated Glass articles and methods for controlled bonding of glass sheets with carriers
US10014177B2 (en) 2012-12-13 2018-07-03 Corning Incorporated Methods for processing electronic devices
US10510576B2 (en) 2013-10-14 2019-12-17 Corning Incorporated Carrier-bonding methods and articles for semiconductor and interposer processing
JP6770432B2 (en) 2014-01-27 2020-10-14 コーニング インコーポレイテッド Articles and methods for controlled binding of thin sheets to carriers
KR20160145062A (en) 2014-04-09 2016-12-19 코닝 인코포레이티드 Device modified substrate article and methods for making
JP2018524201A (en) 2015-05-19 2018-08-30 コーニング インコーポレイテッド Articles and methods for bonding sheets with carriers
JP7106276B2 (en) * 2015-06-26 2022-07-26 コーニング インコーポレイテッド Articles and methods with sheets and carriers
TWI574346B (en) * 2015-08-14 2017-03-11 Dong-Ming Li Composite cold plate for glass substrate cooling
US20180305247A1 (en) * 2015-10-02 2018-10-25 Corning Incorporated Methods for treating a glass surface to reduce particle adhesion
JP2018535172A (en) * 2015-10-02 2018-11-29 コーニング インコーポレイテッド Removable glass surface treatment and method for reducing particle adhesion
CN108353507B (en) 2015-10-30 2020-11-27 康宁股份有限公司 Method for processing a first substrate bonded to a second substrate
US10316010B2 (en) 2015-12-17 2019-06-11 South Dakota Board Of Regents Versatile non-destructive surface modification of carbonaceous materials and process for grafting into polymer matrices
TW201737766A (en) 2016-01-21 2017-10-16 康寧公司 Methods for processing a substrate
US10410883B2 (en) 2016-06-01 2019-09-10 Corning Incorporated Articles and methods of forming vias in substrates
US10794679B2 (en) 2016-06-29 2020-10-06 Corning Incorporated Method and system for measuring geometric parameters of through holes
US10134657B2 (en) 2016-06-29 2018-11-20 Corning Incorporated Inorganic wafer having through-holes attached to semiconductor wafer
TW201825623A (en) 2016-08-30 2018-07-16 美商康寧公司 Siloxane plasma polymers for sheet bonding
TWI810161B (en) 2016-08-31 2023-08-01 美商康寧公司 Articles of controllably bonded sheets and methods for making same
CN109906145B (en) * 2016-10-27 2022-10-21 康宁股份有限公司 Stacking structure with improved puncture resistance
WO2018097409A1 (en) * 2016-11-28 2018-05-31 주식회사 네패스 Semiconductor package produced using insulation frame, and method for producing same
US11078112B2 (en) 2017-05-25 2021-08-03 Corning Incorporated Silica-containing substrates with vias having an axially variable sidewall taper and methods for forming the same
US10580725B2 (en) 2017-05-25 2020-03-03 Corning Incorporated Articles having vias with geometry attributes and methods for fabricating the same
CN111615567B (en) * 2017-12-15 2023-04-14 康宁股份有限公司 Method for treating substrate and method for producing article including adhesive sheet
US11554984B2 (en) 2018-02-22 2023-01-17 Corning Incorporated Alkali-free borosilicate glasses with low post-HF etch roughness
US11152294B2 (en) 2018-04-09 2021-10-19 Corning Incorporated Hermetic metallized via with improved reliability
KR20210127188A (en) 2019-02-21 2021-10-21 코닝 인코포레이티드 Glass or glass ceramic article having copper-metalized through holes and process for making same
JP6806193B2 (en) * 2019-07-24 2021-01-06 Ａｇｃ株式会社 Glass laminate with protective film
JP6939974B2 (en) * 2019-07-24 2021-09-22 Ａｇｃ株式会社 Display device

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US20040258850A1 (en) * 2003-06-18 2004-12-23 Ann Straccia Environmentally friendly reactive fixture to allow localized surface engineering for improved adhesion to coated and non-coated substrates
US7087134B2 (en) * 2004-03-31 2006-08-08 Hewlett-Packard Development Company, L.P. System and method for direct-bonding of substrates
US20060246218A1 (en) * 2005-04-29 2006-11-02 Guardian Industries Corp. Hydrophilic DLC on substrate with barrier discharge pyrolysis treatment
KR101285442B1 (en) * 2005-08-09 2013-07-12 아사히 가라스 가부시키가이샤 Thin sheet glass laminate and method for manufacturing display using thin sheet glass laminate
KR101486601B1 (en) * 2007-03-12 2015-01-26 아사히 가라스 가부시키가이샤 Glass substrate provided with protection glass and method for manufacturing display device using glass substrate provided with protection glass
WO2012144499A1 (en) * 2011-04-22 2012-10-26 旭硝子株式会社 Laminate, method for producing same, and use of same
JP2013216513A (en) * 2012-04-05 2013-10-24 Nippon Electric Glass Co Ltd Method for cutting glass film and glass film lamination body
US20150329415A1 (en) * 2012-12-13 2015-11-19 Robert Alan Bellman Glass and methods of making glass articles

Also Published As

Publication number Publication date
TW201529511A (en) 2015-08-01
JP2017511756A (en) 2017-04-27
KR20160114106A (en) 2016-10-04
WO2015113023A1 (en) 2015-07-30
EP3099484A1 (en) 2016-12-07

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