KR20160101575A - Scanning micromirror - Google Patents

Abstract

The present invention includes: a main body having a front side, a rear side, and a side; a display unit for outputting screen information and being installed on the front; a speaker module for forming an overlapping area overlapping the display unit, and installed on the main body to reciprocate along one direction on the display unit; and a control unit for moving the speaker module based on the output state information of the screen information.

Description

[0002] SCANNING MICROMIRROR [0003]

The present invention relates to a scanning micromirror including a dummy coil.

Along with the development of optical device technology, various technologies using light as a medium for inputting and outputting various information and transmitting information have been emerging. These techniques include the use of scanned beams from a light source, such as a bar code scanner or a basic level scanning laser display.

In particular, recently, a system using beam scanning with high spatial resolution has been developed. Such systems include a projection-type display system, a head mounted display (HMD), a laser Printer and the like.

Such a beam scanning technique requires a scanning micromirror having various scanning speeds and scanning ranges, that is, various angular displacements and tilting angles, depending on application examples. Conventional beam scanning is performed by using a galvanic mirror or a rotating polygon mirror, and is implemented by adjusting the angle of incidence between the reflecting surface of the mirror and incident light.

Such a scanning micromirror is a MEMS device mainly used for a display and a distance sensor (range finder / Lidar). The scanning micromirror is a driving device capable of spatially modulating an optical path, and a driving force can be obtained through various methods.

There is a way to use electrostatic force, electromagnetic force and piezoelectric in such a way that driving force can be obtained. In general, a scanning micromirror using an electromagnetic force obtains a driving force by using a Lorentz force generated when current is applied to a coil formed on a device located in a magnetic field generated by a permanent magnet.

The driving shaft of the scanning micromirror is composed of the X axis and the Y axis, and the rotation of the X axis corresponds to the low speed scanning in the vertical direction and generally determines the number of frames of the display. Y-axis rotation corresponds to a high-speed scan in the horizontal direction and generally determines the display resolution. The X-axis rotation is forcibly driven at a speed of about 60 Hz, and the Y-axis rotation is resonance driven in a range of about 19 kHz to 44 kHz depending on the resolution. Various motion resonance modes are formed by the physical structure of the scanning micromirror element. Approximately six resonance modes can be formed before about 18 kHz and about nine resonance modes before about 28 k.

When these modes occur during mirror driving, various types of image quality deterioration occur. As the driving frequency increases, there are more modes in the middle and the possibility of operation increases. Such anomalous operation can be reduced by keeping the device manufacturing process tolerances at higher precision, but higher precision means lower yield and involves higher manufacturing costs.

In order to increase the horizontal resonance frequency of the scanning micromirror, it is necessary to reduce the moment of inertia. To increase the resolution, it is desirable to reduce the thickness of the device in order to reduce the moment of inertia because the size of the mirror must be large. The scanning micromirror includes a silicon structure formed symmetrically with respect to the operation axis, and a winding portion formed asymmetrically on the silicon structure and made of a plated metal. As the silicon structure gradually becomes thinner, the influence of the winding part formed asymmetrically when the scanning micro-mirror rotates increases.

A driving force is generated in a direction deviating from a predetermined driving axis due to the asymmetric structure of the winding portion, and thus more modes are operated.

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above problems, and it is an object of the present invention to provide a scanning micromirror having improved yield by preventing asymmetric rotation.

According to an aspect of the present invention, there is provided a scanning micromirror including a winding magnet and a magnet which are formed on one surface of an outer gimbals and an inner gimbals and generate an electromagnetic field to generate a driving force, And a dummy winding portion formed in a region where the winding is not disposed. The dummy winding portion and the winding are formed to be symmetrical with respect to the rotation axis of the scanning microphone mirror.

According to an embodiment of the present invention, to realize symmetrical rotation, a second winding portion formed in a part of the first to fourth regions and a dummy winding portion formed in the remaining one of the first to fourth regions And the mass of the dummy winding portion is formed to be substantially equal to the mass of the second winding portion formed in the partial region, and the shape thereof can be formed to be the same.

According to an embodiment of the present invention, the winding may be formed on one surface of the outer gimbals, and at least a portion of the dummy winding portion may be formed on the other surface of the outer gimbals to prevent a drive error caused by current movement to the dummy winding portion .

According to the present invention, at least one dummy winding portion is formed in one region of the outer gimbals where no winding portion is formed, so that the scanning micromirror can be balanced.

The mass of the dummy winding portion formed in one region is formed to be substantially equal to the mass of the winding portion formed in the remaining region corresponding to the one region, and the dummy winding portion and the one region of the winding portion may have substantially the same shape. Accordingly, it is possible to solve the problem of the asymmetry in which the rotation axis is changed when the scanning micro-mirror rotates in the X and Y axes.

The winding portion is formed on one surface of the gimbals, at least a portion of the dummy winding portion is formed on the other surface of the gimbals, and a portion of the dummy winding portion formed on the other surface is disposed closer to the portion of the dummy winding portion formed on one surface than the second elastic body . Therefore, since the contact between the winding section and the dummy winding section is cut off, it is possible to prevent the current from flowing in the dummy winding section.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a view of a scanning micromirror according to an embodiment of the present invention viewed from one direction; FIG.
FIG. 2A and FIG. 2B are conceptual diagrams for explaining an arrangement structure of a winding part according to an embodiment. FIG.
Figs. 3A and 3B are perspective views of a cross section cut in Fig. 2B along the first axis in one direction. Fig.
3C is a conceptual diagram for explaining an arrangement structure of a dummy winding section according to another embodiment;
4 is a plan view showing an arrangement of a winding portion according to still another embodiment;
5A and 5B are plan views showing the arrangement of a winding portion according to another embodiment;

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. In addition, it should be noted that the attached drawings are only for easy understanding of the embodiments disclosed in the present specification, and should not be construed as limiting the technical idea disclosed in the present specification by the attached drawings.

The technique disclosed in this specification relates to an optical scanning device that modulates the path of reflected light by operating a micro mirror that reflects input light by applying a predetermined current. The scanning micromirror according to the embodiments disclosed herein may be configured to scan a beam emitted from a light source to a predetermined area of one-dimensional (line) or two-dimensional (plane) do. Accordingly, the scanning micromirror of the present invention can be applied to a laser printer, a confocal microscope, a barcode scanner, a scanning display, and various sensors for reading data such as position, image, and the like. In addition to scanning, it can also be applied to an optical switch device that arbitrarily adjusts the path of reflected light.

However, the technology disclosed in this specification is not limited thereto, and can be applied to all optical scanning devices, devices, and optical scanning methods to which the technical idea of the present invention can be applied.

1 is a perspective view of a scanning micromirror according to an embodiment of the present invention.

1, the scanning micromirror according to the present embodiment includes a mirror plate 51 for reflecting light, a third elastic body 52, a fourth elastic body 54, a fifth elastic body 56, an inner gimbals 53 An outer gimbals 55, a winding part (not shown), a magnetic body (not shown), and a control part (not shown).

The mirror plate 51 is formed to reflect light and the third elastic body 52 is provided around the mirror plate 51 and is connected to the inner gimbals 53. The outer gimbals 55 are formed to enclose the inner gimbals 53 and the fourth elastic bodies 54 elastically connect the outer gimbals 55 and the inner gimbals 53. The outer gimbals 55 are connected to the supporter 57. The fifth elastic body 56 connects the outer gimbals 55 and the support portion 57 with each other. The supporter 57 supports the outer gimbals 55 when the outer gimbals 55 are twisted about the fifth elastic body 56. That is, the support portion 57 supports the outer gimbals 55 while the outer gimbals 55 rotate.

The scanning micromirror 50 includes a winding part (not shown) that is provided in the inner gimbals 53 and the outer gimbals 55 and through which a current flows, and a magnetic body (not shown) that forms a magnetic field around the winding part Time. The winding portion may be formed of a metal such as Ti, Cr, Cu, Au, Ag, Ni, or Al, an Indium Tin Oxide (ITO), a conductive polymer, or a combination thereof.

The winding unit (not shown) may also be formed on the mirror plate 51.

The scanning micromirror 50 is configured to rotate the mirror plate 51 and the inner gimbals 53 such that the current flowing in the winding unit (not shown) . In addition, the scanning micromirror 50 controls the outer gimbals 55 to rotate about the fifth elastic body 56. The control unit controls the frequency, direction, size and the like of the current flowing in the winding unit so that the mirror plate 51 and the inner and outer gimbals 53 and 55 act as external forces, , And the fourth and fifth elastic bodies 52, 54, and 56, respectively.

One area of the scanning micromirror 50 according to the present embodiment rotates with respect to at least a part of X-axis and Y-axis perpendicular to each other.

2A and 2B are conceptual diagrams for explaining an arrangement structure of a winding part according to an embodiment. The scanning micromirror 50 includes first and second magnets 611 and 613, a first winding part 64 and first and second dummy winding parts 71 and 72 which form a magnetic field in a radial direction .

Although the inner gimbals 53 and the outer gimbals 55 are not shown in FIG. 2A, the first winding portions 64 may be formed in at least one of the outer gimbals 55 and the inner gables 53 have.

Referring to FIGS. 1, 2A and 2B, the first winding part 64 is formed on the outer gimbals 55, starting from one side of the supporting part 57 and passing through the fifth elastic body 56, . Then, the first winding portion 64 is branched to the two winding portions at a point where the first winding portion 64 is connected to the inner gimbals 53 through the fourth elastic body 54. The two branched winding portions form two semicircles on the inner gimbals 53 and again form another quadrature on the outer gimbals 55 through the fourth elastic body 54 and are connected to each other via the fifth elastic body 56 And extend to the other side of the support portion 57.

That is, the first winding portion 64 is formed of four turns of a first winding formed in four quadrants of the inner gimbals 53, and a second winding formed in one of the first to fourth quadrants .

In the first to fourth quadrants, the second winding is formed on the second and fourth quadrants. However, the region where the second winding is formed is not limited to this, have.

2B is a plan view of the scanning micromirror in which the first winding portion 64 of FIG. 2A is formed.

Referring to FIGS. 2A and 2B, when a current 2I is applied to one side of the support 57, a current 2I flows in a quadrant formed on the outer gimbals 55. The current I flows through each of the winding portions formed in the inner gimbals 53. As a result,

A current of 2I flows in a clockwise direction in a second quadrant of the outer gimbals 55 and an I current flows in a counterclockwise direction in a second quadrant of the inner gimbals 53. Thus, The same electromagnetic force as that flowing in the direction. As in the present embodiment, the scanning micromirror having one winding part can realize two-axis driving by changing the frequency of driving current.

The inner gimbals 53 and the outer gables 55 of the scanning micromirror 50 according to the present invention may be made of an insulating silicon material. The winding portion may be formed on one surface of the insulating silicon material. In addition, an insulating layer (not shown) may be formed on the lower part of the winding part so that the shape of the winding part can be electrically isolated from other components.

In order to reduce the inertia moment of the scanning mirror mirror 50, in order to improve the resolution formed by the scanning angle of the scanning micromirror 50 and the diameter of the mirror, it is preferable to increase the size of the mirror, It is preferable to reduce the thickness of the inner gimbals 53 and the outer gimbals 55 of the silicon material in order to reduce the moment of inertia enlarged by the gaps.

The scanning micromirror 50 according to the present invention has the first and second dummy winding portions 71 and 72 formed on the outer gimbals 55 of the silicon material. The first and second dummy winding sections 71 and 72 are formed such that the first winding section 64 of the first to fourth regions of the outer gimbals 55 corresponding to the first to fourth quadrants is formed Is formed.

The first dummy winding portion 71 is formed in the first quadrant region of the outer gimbals 55 where the first winding portion 64 is not formed. The second dummy winding portion 72 is formed in the third quadrant of the outer gimbals 55. That is, the first and second dummy winding portions 71 and 72 are formed on the outer gimbals 55 on which the first winding portion 64 is not formed. The first and second dummy winding sections 71 and 72 are made of substantially the same material as the first winding section 64 and may be formed together with the first winding section 64.

Each of the first and second dummy winding sections 71 and 72 is formed to be substantially the same as the shape of one region of the first winding section 64 disposed on the second and fourth quadrants. That is, the sum of the masses of the first and second dummy winding sections 71 and 72 is substantially equal to the sum of the masses of the first winding section 64 on the second and fourth quadrants.

Referring to FIG. 2B, the first and second dummy winding sections 71 and 72 form a separation distance d such that the first winding section 64 is not in contact with the first and second dummy winding sections 71 and 72. Particularly, the first dummy winding portion 71 is formed to be spaced apart from the first winding portion 64 formed on the fifth elastic body 56. As a result, the current is blocked from moving to the first and second dummy winding sections 71 and 72.

For example, masking is performed on the structure formed of the silicon material of the scanning micromirror 50, and the first winding part 64 of the metal material and the first and second dummy winding parts ( 71 and 72 can be formed together. In this case, it covers one area of the silicon material structure so that the metal material is not formed at the spacing distance in the masking process.

According to the present invention, at least one dummy winding portion is formed in a region where one winding portion is not formed in one of the inner gimbals and the outer gimbals, so that the scanning micromirror can be balanced.

Figs. 3A and 3B are perspective views of a cross section cut in Fig. 2B along the first axis in one direction. Fig. Referring to FIG. 3A, the first dummy winding portion 71 and the first winding portion 64 are formed on substantially the same surface of the silicon material.

3B, when the first winding part 64 is formed on the first surface of the silicon material structure, the first dummy winding part 71 is formed on the first surface of the silicon structure, As shown in FIG. That is, the first winding portion 64 and the first and second dummy winding portions 71 and 72 are formed on different surfaces of the structure.

According to the present embodiment, since the first and second dummy winding sections 71 and 72 are cut off from contact with the first winding section 64, it is possible to prevent a fault that a current flows in the dummy winding section.

3C is a conceptual diagram for explaining an arrangement structure of the dummy winding portion according to another embodiment. The first dummy winding section 71 of the scanning micromirror according to the present embodiment includes first and second metal members 71a and 71b and the second dummy winding section 72 includes third and fourth And metal members 72a and 72b. The first and second metal members 71a and 71b may correspond to a shape obtained by cutting the first dummy winding portion 71 of FIG. 3A, but the present invention is not limited thereto.

The scanning micromirror has a first winding part 64 formed on a front surface thereof, and the first metal member 71a and the third metal member 72a are formed. The first and third metal members 71a and 72a are formed on the outer gimbals 55 adjacent to the fourth elastic body 54. [

The second and fourth metal members 71b and 72b are formed on the rear surface. The second and fourth metal members 71b and 72b are formed in a region adjacent to the fifth elastic member 56. [ The first and second metal members 71a and 71b are formed in areas that are distinguished from each other so as not to overlap with each other, and the third and fourth metal members 72a and 72b are formed so as not to overlap each other. The first to fourth metal members 71a, 71b, 72a, and 72b are uniformly disposed on the outer gimbals 55 on the scanning micro-mirror.

According to the present embodiment, the contact between the winding portion on the fifth elastic body 56 and the dummy winding portion can be cut off, and the defective rate can be minimized.

4 is a plan view showing an arrangement of a winding portion according to still another embodiment. Unlike the winding portion of FIG. 2B in which one winding portion is branched into two winding portions and then joined together, the winding portion of FIG. 4 is composed of the second and third winding portions 65 and 66.

4, the second and third winding portions 65 and 66 are formed on the outer gimbals 55 via the five elastic bodies 56, starting from one side of the support portion 57, Form a quadrant. The second winding portion 65 forms one semicircle on the inner gimbals 53 and the third winding portion 66 is formed on the inner gimbals 53 It forms another semicircle.

The second and third winding portions 65 and 66 again form another quadrature on the outer gimbals 55 via the fourth elastic body 54 and the second and third winding portions 65 and 66 are connected to each other via the fifth elastic body 56, And ends at the other side.

That is, the second and third winding portions 65 and 66 are formed on the second and fourth quadrants of the outer gimbals 55, respectively. The scanning micromirror 50 according to the present embodiment includes third to sixth dummy winding portions 73, 74, 75, and 76 disposed in the first and third quadrants of the outer gimbals 55. The third and fourth dummy winding sections 73 and 74 are disposed in the first quadrant and the fifth and sixth dummy winding sections 75 and 76 are formed in the third quadrant.

The third to sixth dummy winding sections 73, 74, 75, and 76 are spaced apart from each other so as not to contact the second and third winding sections 65 and 66. The third to sixth dummy winding sections 73, 74, 75, and 76 may be made of substantially the same material as the second and third winding sections 65 and 66. The third and fifth dummy winding sections 73 and 75 are substantially the same as the second and fourth quadrant regions of the third winding section 66 and the fourth and sixth dummy winding sections 74, 76 are substantially the same as the second and fourth quadrant regions of the third winding portion 66.

At least some of the third to sixth dummy winding sections 73, 74, 75, and 76 may be formed together by the same process as the second and third winding sections 65 and 66, The third to sixth dummy winding sections 73, 74, 75, and 76 and the second and third winding sections 65 and 66 are made of substantially the same material. Accordingly, the scanning micromirror can be balanced.

5A and 5B are plan views showing the arrangement of the winding portion according to another embodiment. The components in Figs. 5A and 5B are substantially the same as those in Fig. 4 except for the arrangement structure of the dummy winding portion. Therefore, the same reference numerals are assigned to the same and similar components, and redundant description is omitted.

The third and fifth dummy winding sections 73 and 75 of the scanning micromirror according to the embodiment of FIG. 5A are formed on the front surface, and the fourth and sixth dummy winding sections 74 and 76 are formed on the rear surface do. The shapes of the third to sixth dummy winding sections 73, 74, 75 and 76 are substantially the same as those of the dummy winding sections of FIG.

According to the present embodiment, since the dummy winding portion can be reduced in contact with the second and third winding portions, the defective rate can be minimized.

The scanning micromirror according to FIG. 5B includes seventh and eighth dummy winding portions 77 and 78 formed on the first and third quadrants of the outer gimbals 55. The seventh and eighth dummy winding sections 77 and 78 are formed in different shapes from the second and third winding sections 55 and 56 and are formed to be wider than the second and third winding sections 65 and 66 .

However, it may be formed to be substantially the same as the masses of the second and fourth quadrant regions of the second and third winding portions 65 and 66.

The scanning micromirror described above is not limited to the configuration and the method of the embodiments described above, but the embodiments may be modified so that all or some of the embodiments may be selectively combined .

Claims (10)

A mirror plate driven by the first elastic body as a first rotation axis;
An inner gimble which is formed in a circular shape surrounding the mirror plate and driven by the second elastic body as a second rotation axis;
An outer gimble formed to surround the inner gimble and divided into first, second, third and fourth regions by the first and second rotary shafts;
And a second winding portion extending from the first region and formed in a part of the first to fourth regions, the first winding portion forming a circle, the first winding portion being formed on one surface of the inner gimbals, ;
A magnet for forming the electromagnetic field together with the winding portion; And
And a dummy winding portion formed in the remaining one of the first to fourth regions and formed in the partial region. The method according to claim 1,
Wherein the dummy winding portion and the winding are made of the same material. 3. The method of claim 2,
Wherein the mass of the second winding portion formed in the partial region and the mass of the dummy winding portion formed in the remaining region are the same. The method of claim 3,
When the second winding is formed on one side of the outer gimbals,
Wherein the dummy winding portion includes a first split winding formed on one surface of the outer gimbals and a second divided winding formed on the other surface of the outer gimbals. The method of claim 3,
And the second split winding is disposed adjacent to the second elastic body than the first split winding. The method of claim 3,
Wherein the first and second divided windings are formed in the divided regions of the remaining region so as not to overlap each other. The method according to claim 1,
Wherein the winding section comprises a pair of windings arranged side by side on the inner gimbals and the outer gimbals. 8. The method of claim 7,
Wherein the dummy winding section comprises a pair of dummy windings corresponding to a pair of windings formed on the outer gimbals. 8. The method of claim 7,
Wherein the dummy winding portion comprises first and second dummy windings corresponding to a pair of windings formed on the outer gimbals. 8. The method of claim 7,
Wherein the dummy winding is formed of a winding formed to have the same mass as the pair of windings formed in the one region of the outer gimbals.

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