KR20120048430A - Glass conveyor system and method for conveying glass using the same - Google Patents

Glass conveyor system and method for conveying glass using the same Download PDF

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Publication number
KR20120048430A
KR20120048430A KR1020100110049A KR20100110049A KR20120048430A KR 20120048430 A KR20120048430 A KR 20120048430A KR 1020100110049 A KR1020100110049 A KR 1020100110049A KR 20100110049 A KR20100110049 A KR 20100110049A KR 20120048430 A KR20120048430 A KR 20120048430A
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South Korea
Prior art keywords
substrate
unit
robot arm
process chamber
unit process
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KR1020100110049A
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Korean (ko)
Inventor
강희철
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엘지디스플레이 주식회사
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Priority to KR1020100110049A priority Critical patent/KR20120048430A/en
Publication of KR20120048430A publication Critical patent/KR20120048430A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/22—Devices influencing the relative position or the attitude of articles during transit by conveyors
    • B65G47/24—Devices influencing the relative position or the attitude of articles during transit by conveyors orientating the articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a substrate conveying apparatus and a conveying method, and the disclosed invention comprises: a cassette on which a plurality of substrates to be processed are loaded; A substrate transfer unit for transferring the substrate used in the unit process from the cassette in a direction in which the unit process chamber is located; A substrate position adjusting unit which adjusts a traveling direction of the substrate so that the substrate transferred through the substrate transfer unit can be smoothly introduced into the unit process chamber; And a substrate unloading unit which unloads a substrate having a changed direction through the substrate positioning unit through a robot arm and inserts the substrate into the unit process chamber, wherein the substrate positioning unit is mounted with a plurality of robots. It comprises a substrate rotary table consisting of a plurality of longitudinal support and horizontal support formed with a female entrance groove, and a rotary drive for raising and rotating the substrate rotary table.

Description

Substrate conveying apparatus and substrate conveying method {GLASS CONVEYOR SYSTEM AND METHOD FOR CONVEYING GLASS USING THE SAME}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device, and more particularly, to a substrate transport device in which a glass substrate is transferred during a manufacturing process of the liquid crystal display device.

In general, a liquid crystal display (LCD) forms a liquid crystal layer having anisotropic dielectric constant between upper and lower glass substrates facing each other, and then adjusts the intensity of an electric field formed in the liquid crystal layer to adjust the arrangement of liquid crystal molecules. A display device that displays a desired image by changing the amount of light transmitted through the liquid crystal molecules.

The liquid crystal display device is manufactured through various manufacturing processes, and the manufacturing process is composed of many unit processes, and the equipment performed in each unit process is different.

In this way, a conveyor, that is, a conveying device, for transporting a glass substrate for manufacturing a liquid crystal display device with equipment performed in each unit process should be provided.

The substrate conveying apparatus according to the related art will be described with reference to FIG. 1 as follows.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view schematically showing a substrate positioning portion and a substrate arriving on the substrate positioning portion of a substrate transfer apparatus according to the prior art.

Although not shown in the drawing, the substrate conveying apparatus according to the prior art is provided with a substrate loading unit for loading a substrate used in a unit process from a plurality of cassettes provided with a plurality of substrates to be processed by using a robot arm of a robot.

In addition, a substrate transfer unit for transferring the substrate loaded by the substrate loading unit in the direction of the unit process chamber is provided.

A substrate position adjusting unit is provided to adjust the position of the substrate so that the substrate transferred through the substrate transfer unit can be smoothly introduced into the unit process chamber.

In addition, a substrate unloading unit is provided to unload a substrate whose position is changed through the substrate positioning unit through a robot arm and into the unit process chamber.

As shown in FIG. 1, the substrate transfer part (not shown) is responsible for moving the substrate 11 in a constant conveyance direction. In addition, the substrate transfer part is provided with a plurality of rotary rollers 13 so that the substrate 11 passes over the substrate transfer part, and the plurality of rotary rollers 13 are freely rotated by the rotation shaft 15. In addition, the rotation shaft 15 is supported by the support frames 17 provided on both side surfaces of the substrate transfer device.

In addition, the substrate alignment unit 50 is provided on the rotation shaft 15 or the substrate transfer unit located at both sides of the substrate positioning unit, and the fine positioning table 51 provided in the substrate alignment unit 50 is the substrate. If the (11) is not in the desired position in the raised and rotated state is to play a role of correcting it.

The substrate positioning unit includes a substrate rotating table 40 on which the transferred substrate 11 is seated, a vertical moving unit 20 for vertically raising or lowering the substrate 11, and the rotating table 40. It is provided with a vertical and rotation drive unit 30 for raising and rotating. At this time, the vertical and rotation drive unit 30 is provided with a cylinder portion 31 for raising the substrate rotation table 40, and a drive motor unit 35 for rotating the substrate rotation table 40. In addition, the vertical moving part 20 is provided with a vertical support 21 for supporting the substrate 11 and a cylinder 23 for moving the body of the moving part up and down at the time of raising and lowering. In particular, the vertical moving part 20 is provided on both sides of the vertical and rotation driving part 30.

A substrate transfer method using a substrate transfer apparatus according to the related art having the above configuration will be described below with reference to FIGS. 2 to 3.

2 is a flow chart showing a substrate rotation operation in the substrate position adjusting portion of the substrate transfer apparatus according to the prior art.

3A to 3D are front views schematically illustrating a process of changing a traveling direction by rotating a substrate on a substrate position adjusting unit of the substrate transfer device.

In order to transport the substrate for the liquid crystal display device into the unit process chamber that is performed in each unit process, a cassette on which a plurality of substrates as a processing agent are loaded is transferred adjacent to the substrate transport apparatus.

Then, the unit process chamber is moved by the plurality of rotating rollers 13 provided in the substrate transfer unit after being unloaded to the substrate transfer unit for transferring the substrate used in the unit process in the direction of the unit process chamber from the cassette. Will be moved in the direction.

Subsequently, as illustrated in FIGS. 2 and 3A, as a first step S10, the substrate position adjusting unit provided at a position adjacent to the unit process chamber (not shown) is transferred to the substrate 11 transferred through the substrate transfer unit. (Not shown). At this time, the substrate position adjusting unit is provided with a substrate rotation table 40, the substrate 11 is located on the substrate rotation table 40.

Then, as shown in Fig. 2 and 3b, as a second step (S12), by operating the vertical and rotation drive unit 30 provided below the substrate position adjusting unit to operate the substrate rotation table 40 to a predetermined height Raise. At this time, the vertical and rotation drive unit 30 is provided with a substrate stage 31 for supporting the substrate rotation table 40, and the cylinder portion 33 to enable the vertical movement of the substrate rotation table 40 is provided The operation of the cylinder portion 33 causes the substrate rotation table 40 to rise, thereby causing the substrate 11 on the rotation roller 13 to rise with the substrate rotation table 40 rising. do.

Subsequently, in a third step S14, the vertical and rotation driving units 30 are operated again to rotate the substrate rotation table 40 by a predetermined angle to thereby rotate the substrate 11 on the substrate rotation table 40. Change location At this time, as shown in Figure 3b, the vertical and rotation drive unit 30 is provided with a drive motor unit 35 for rotating the substrate rotation table 40 together with the cylinder portion 33, the substrate rotation table 40 can be rotated.

Next, as shown in FIGS. 2 and 3C, as a fourth step S16, the substrate 11 is in the same direction as the unit process chamber due to the operation of the vertical and rotation driving units 30. In the linearly positioned state, the vertical and rotary driving units 30 are operated to lower the substrate rotating table 40 again.

Subsequently, as shown in FIG. 2, as a fifth step S18, a rotational axis (not shown, 15 of 1 2) positioned on both sides of the substrate positioning unit or a substrate alignment unit provided in a portion of the substrate transfer unit ( When the substrate 11 is not placed at a desired position in a raised and rotated state by using a fine position adjuster (not shown in FIG. 1 of FIG. 1) provided in FIG. It is calibrated so that the substrate 11 is in a desired position.

Subsequently, as shown in FIGS. 2 and 3D, as a sixth step S20, the cylinder 11 provided in the vertical moving part 20 is operated to lift the vertical support 21 while raising the substrate 11. Raise up.

Next, as a seventh step S22, the robot arm provided in the substrate unloading unit enters the substrate 11 and then unloads the substrate 11 to move into the unit process chamber and into the unit process chamber. The board | substrate conveyance process of is completed.

However, according to the prior art, the means for raising the substrate separately and the means for rotating the substrate rotating table had to be provided separately for unloading the substrate, and the means for raising and rotating the substrate and the substrate rotating table were operated separately. Because it had to be done, it took a lot of time to unload the substrate.

Further, according to the prior art, since the two vertical moving parts including at least two cylinders are needed to separately lift the substrate in order to unload the substrate, the cost for the substrate carrying apparatus is increased accordingly.

Accordingly, the present invention is to solve the above problems, an object of the present invention is to improve the structure of the substrate positioning portion used to change the substrate traveling direction to reduce the time required to transfer the substrate, it is used in the substrate positioning portion It is to provide a substrate transfer apparatus and a transfer method that can reduce the cost invested in substrate transfer by removing the components.

In order to achieve the above object, the substrate transfer apparatus according to the present invention comprises a cassette on which a plurality of substrates to be processed are loaded; A substrate transfer unit for transferring the substrate used in the unit process from the cassette in a direction in which the unit process chamber is located; A substrate position adjusting unit which adjusts a traveling direction of the substrate so that the substrate transferred through the substrate transfer unit can be smoothly introduced into the unit process chamber; And a substrate unloading unit which unloads a substrate having a changed direction through the substrate positioning unit through a robot arm and inserts the substrate into the unit process chamber, wherein the substrate positioning unit is mounted with a plurality of robots. It characterized in that it comprises a substrate rotary table consisting of a plurality of longitudinal support and horizontal support formed with the arm entry grooves, and a rotary drive for raising and rotating the substrate rotary table.

In order to achieve the above object, the substrate conveying method according to the present invention comprises the steps of providing a cassette containing a plurality of substrates to be treated; Selecting a substrate used in the unit process from the cassette and moving the substrate to a substrate transfer unit; Transferring the substrate moved to the substrate transfer unit in a direction in which a unit process chamber is present; Positioning a substrate transferred through the substrate transfer unit on a substrate rotating table provided in a substrate positioning unit; Raising a substrate rotating table on which the substrate is placed; Adjusting a substrate position by rotating the substrate to allow the substrate to smoothly enter the unit process chamber; And unloading the substrate into the unit process chamber by entering the robot arm through a plurality of robot arm entry grooves provided in the substrate rotation table.

According to the present invention, after the substrate arrives at the substrate transfer device for completion or progress of the unit process, the substrate position adjusting unit is provided to adjust the direction of the substrate just before entering the process chamber where the unit process proceeds through the substrate transfer unit. The substrate rotation table provided on the substrate position adjusting unit is raised in a state in which the substrate rotating table is raised, and then rotated to adjust the traveling direction. The substrate is unloaded while being moved under the rotary table to transfer the substrate into the unit process chamber.

Since the robot arm enters through the robot arm entry grooves in the substrate rotation table and unloads the substrate while the substrate rotation table provided on the substrate position adjusting unit is raised and rotated, the position of the substrate is changed and unloaded. The loading time can be shortened.

In addition, in the past, a means for raising the substrate rotation table and a means for rotating the substrate rotation table had to be separately provided to unload the substrate, and the means for raising and rotating the substrate rotation table had to be operated separately. Although it took a long time to unload the substrate, in the present invention, by changing the robot arm entry structure of the substrate rotation table, the substrate unloading operation using the robot arm is performed immediately while the substrate rotation table is raised and rotated. As a result, the time required for transfer of the substrate is shortened, and the cost of investment is reduced by eliminating the need for a component that raises and lowers a separate substrate rotating table.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a front view schematically showing a substrate positioning portion and a substrate arriving on the substrate positioning portion of a substrate transfer apparatus according to the prior art.
2 is a flow chart showing a substrate rotation operation in the substrate position adjusting portion of the substrate transfer apparatus according to the prior art.
3A to 3D are front views schematically illustrating a process of changing a traveling direction by rotating a substrate on a substrate position adjusting unit of the substrate transfer device.
4 is a schematic view showing a configuration system of a substrate transfer device according to the present invention.
5 is a front view schematically showing the configuration of a substrate and a substrate positioning unit placed on the substrate positioning unit of the substrate transfer device according to the present invention.
6 is a perspective view showing a substrate rotating table provided in a substrate position adjusting portion of the substrate conveying apparatus according to the present invention.
7 is a robot arm unloading the substrate through the robot arm entry grooves formed in the horizontal support among the plurality of horizontal arm support grooves provided in the vertical support and the horizontal support constituting the substrate rotation table of the substrate transport apparatus according to the present invention; It is a schematic plan view which shows the state entering to make.
8 is a process flowchart illustrating a process of rotating and unloading a substrate on a substrate position adjusting unit of the substrate transfer device according to the present invention.
FIG. 9 is a partially enlarged view of part “A” of FIG. 5 and is an enlarged front view illustrating a state in which a substrate is seated on a substrate rotating table provided in the substrate positioning unit.
Fig. 10 is a front view showing a state in which the substrate position adjusting portion of the substrate transfer device according to the present invention is raised and rotated.

Hereinafter, a substrate transfer apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

4 is a schematic view showing a configuration system of a substrate transfer device according to the present invention.

5 is a front view schematically showing the configuration of a substrate and a substrate positioning unit placed on the substrate positioning unit of the substrate transfer device according to the present invention.

The substrate transfer apparatus according to the present invention, as shown in Figure 4, the stocker 100 having a plurality of cassettes (100a) on which a plurality of substrates to be processed are loaded; A substrate loading part 200 for loading the substrate 101 used in the unit process from the cassette 100a using the robot arm 210a of the robot 210 provided in the substrate loading part 200; A first substrate transfer part 300 on which the substrate 101 loaded by the substrate loading part 200 is unloaded; The first substrate position adjusting unit 400 and the first substrate position adjusting unit 400 are used to change the position of the substrate so that the substrate 101 arrived through the first substrate transfer unit 300 can be smoothly processed in the direction in which the unit process chamber 800 is located. ; A second substrate transfer part 500 for transferring the substrate 101 whose position is adjusted by the first substrate position adjustment part 400 in the direction in which the unit process chamber 800 is located; A second substrate position adjusting unit 600 for adjusting a position of the substrate 101 so that the substrate 101 transferred through the second substrate transfer unit 500 can be smoothly introduced into the unit process chamber; And a substrate unloading unit 700 for unloading the substrate 101 whose position has been changed through the second substrate positioning unit 600 through the robot arm 710a and into the unit process chamber 800. do.

Here, since the first substrate position adjusting unit 400 and the second substrate position adjusting unit 600 have the same configuration, the second substrate position adjusting unit 600 will be described.

As shown in FIG. 5, the first and second substrate transfer units 300 and 500 are responsible for moving the substrate 101 in a constant conveyance direction. In addition, the first and second substrate transfer units 300 and 500 are provided with a plurality of rotary rollers 113 so that the substrate 101 passes over the substrate transfer units 300 and 500, and the plurality of rotary rollers ( 113 are free to rotate by the rotation shaft 115. In addition, the rotation shaft 115 is supported by the support frame 117 provided on both sides of the substrate transfer device. At this time, the rotation angle of the substrate 101 may be applied to all 90 degrees, 180 degrees and 270 degrees.

In addition, the substrate alignment unit 150 is provided on the rotation shaft 115 or the substrate transfer unit located at both sides of the substrate positioning unit 600, and the micro positioning unit 151 provided in the substrate alignment unit 150. When the substrate 101 is distorted instead of being placed in a desired position in the raised and rotated state, it is responsible for correcting the problem.

In addition, the substrate positioning unit 600 raises the substrate rotating table 140 on which the transferred substrate 101 is seated and the robot arm entry grooves 141a are formed, and raises the substrate rotating table 140. The vertical and rotation drive unit 130 to rotate is provided. In this case, the vertical and rotation drive unit 13 includes a drive shaft 131 for supporting the substrate rotation table 140, a cylinder portion 133 for raising the substrate rotation table 140, and the substrate rotation table 140. The drive motor 135 for rotating the is provided.

6 is a perspective view showing a substrate rotating table provided in a substrate position adjusting portion of the substrate conveying apparatus according to the present invention.

As shown in FIG. 6, the substrate rotating table 140 includes a plurality of vertical supports 141 and horizontal supports 143, and a plurality of vertical supports 141 and horizontal supports 143 are provided in the substrate rotation table 140. The robot arm entry grooves 141a and 143a are formed at regular intervals so that the robot arms can enter. In this case, the robot arm entry grooves 141a and 143a respectively formed in the plurality of vertical supporters 141 and the horizontal supporter 143 are formed on the same line as each of the vertical supporter 141 and the horizontal supporter 143. In addition, the structure of the robot arm access grooves 141a and 143a may vary depending on the shape of the vertical support 141 and the horizontal support 143. For example, the robot arm access grooves 141a and 143a may be different. A portion of the vertical support 141 and the horizontal support 143 is bent or may be configured in a form in which a predetermined portion of the upper surface is removed. In addition, the robot arm entry grooves 141a and 143a may be configured in various shapes other than the groove shape.

FIG. 7 illustrates a robot arm for unloading a substrate through robot arm entry grooves formed in a vertical support among a plurality of horizontal arms and a plurality of robot arms provided in the vertical support of the substrate rotation table according to the present invention. It is a schematic plan view which shows the entering state.

As shown in FIG. 7, the vertical support 141 among the plurality of vertical supporters 141 constituting the substrate rotation table 140 and the plurality of robot arm entry grooves 141a and 143a provided in the horizontal support 143. In the direction, the robot arm 710a enters to unload the substrate 101 through the robot arm entry grooves 141a formed in the vertical support 141. In this case, the robot arm entry grooves 141a and 143a formed in each of the vertical supporters 141 are formed to be located on the same line as each other, so that the robot arm 710a is smoothly provided through the plurality of robot arm entry grooves 141a. It is possible to enter the substrate rotation table 140. In addition, the substrate 101 may be unloaded by entering the robot arm 710 in the horizontal support 143 side without entering the robot arm 710 in the vertical support 141 side direction.

In the present invention, the substrate is rotated in the state in which the substrate rotation table 140 is raised, rather than unloading the substrate after raising the substrate again using a separate substrate raising means in a state where the substrate position is changed as before. Next, the robot arm 710 enters the substrate rotation table 140 through the robot arm entry grooves 141a formed in the substrate rotation table 140 to unload the substrate 101, thereby unloading the substrate. The time required to shorten.

On the other hand, the substrate transfer method using the substrate transfer apparatus according to the present invention having the above configuration will be described with reference to FIGS.

8 is a process flowchart illustrating a process of rotating and unloading a substrate on a substrate position adjusting unit of the substrate transfer device according to the present invention.

FIG. 9 is a partially enlarged view of part “A” of FIG. 5 and is an enlarged front view illustrating a state in which a substrate is seated on a substrate rotating table provided in the substrate positioning unit.

Fig. 10 is a front view showing a state in which the substrate position adjusting portion of the substrate transfer device according to the present invention is raised and rotated.

In order to transport the substrate for the liquid crystal display device into the unit process chamber that is performed in each unit process, a cassette on which a plurality of substrates as a processing agent are loaded is transferred adjacent to the substrate transport apparatus.

Subsequently, a substrate transfer unit (not shown) which transfers the substrate used in the unit process from the cassette in the direction of the unit process chamber by using the robot arm provided in the substrate loading unit (not shown in FIG. 4). After being unloaded to 300, 500 of 4), the plurality of rotary rollers 113 provided in the substrate transfer part move in the advancing direction in which the unit process chamber (not shown in FIG. 4, 800) is located.

Subsequently, as shown in FIG. 8, as a first step S110, a substrate position adjusting unit provided at a position adjacent to a unit process chamber (not shown) of the substrate 101 transferred through the substrate transfer unit 500. 600). At this time, the substrate position adjusting unit 600 is provided with a substrate rotation table 140, the substrate 101 is located on the substrate rotation table 140.

Next, as a second step (S120), the substrate rotation table 140 is raised to a predetermined height by operating the vertical and rotation driving units 130 provided below the substrate positioning unit 600. In this case, as shown in FIG. 9, the vertical and rotation driving units 130 may include a cylinder shaft for enabling vertical movement of the driving shaft 131 supporting the substrate rotation table 140 and the substrate rotation table 140. 133 is provided so that the substrate rotating table 140 is raised due to the operation of the cylinder portion 133, so that the substrate 101 on the rotating roller 113 is the substrate rotating table 140 It rises with the rise.

Subsequently, as a third step (S130), the vertical and rotation driving units 130 are operated again to rotate the substrate rotation table 140 by a predetermined angle so that the substrate 101 on the substrate rotation table 140 is rotated. Change location At this time, as shown in Figure 9, the vertical and rotation drive unit 130 is provided with a drive motor unit 135 for rotating the substrate rotation table 140 together with the cylinder portion 133, the substrate rotation table Rotation of 140 is possible.

Subsequently, although not shown in the drawings, the rotational axes (not shown, refer to 115 of FIG. 5) positioned on both sides of the substrate positioning unit 600 or the substrate alignment unit (not shown, 150 of FIG. 5) are provided. The substrate 101 is corrected when the substrate 101 is not placed at a desired position in a raised and rotated state by using a fine position adjusting table (not shown in FIG. 5). Make sure you are at the desired location.

Next, as a fourth step, due to the operation of the vertical and rotary driving unit 130, the substrate 101 is placed in a predetermined direction, that is, in the same line as the unit process chamber (not shown in FIG. 4, 800). In the state, the robot arm 710a provided in the substrate unloading part 700 immediately enters the substrate rotation table 140 through the robot arm entry grooves 141a formed in the substrate rotation table 140. The 101 is unloaded and moved into the unit process chamber to complete the substrate transfer process into the unit process chamber. In this case, the process of conveying the substrate again after the unit process is completed while the substrate is inserted into the unit process chamber is performed in the same manner as above.

According to the present invention, after the substrate arrives at the substrate transfer device for completion or progress of the unit process, the substrate position adjusting unit is provided to adjust the direction of the substrate just before entering the process chamber where the unit process proceeds through the substrate transfer unit. The substrate rotation table provided on the substrate position adjusting unit is raised in a state in which the substrate rotating table is raised, and then rotated to adjust the traveling direction. The substrate is unloaded while being moved under the rotary table to transfer the substrate into the unit process chamber.

Since the robot arm enters through the robot arm entry grooves in the substrate rotation table and unloads the substrate while the substrate rotation table provided on the substrate position adjusting unit is raised and rotated, the position of the substrate is changed and unloaded. The loading time can be shortened.

In addition, in the past, a means for raising the substrate rotation table and a means for rotating the substrate rotation table had to be separately provided to unload the substrate, and the means for raising and rotating the substrate rotation table had to be operated separately. Although it took a long time to unload the substrate, in the present invention, by changing the robot arm entry structure of the substrate rotation table, the substrate unloading operation using the robot arm is performed immediately while the substrate rotation table is raised and rotated. As a result, the time required for transfer of the substrate is shortened, and the cost of investment is reduced by eliminating the need for a component that raises and lowers a separate substrate rotating table.

Although embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains may implement the present invention in other specific forms without changing the technical spirit or essential features thereof. I can understand that.

Therefore, since the embodiments described above are provided to fully inform the scope of the invention to those skilled in the art, it should be understood that they are exemplary in all respects and not limited. The invention is only defined by the scope of the claims.

100: stocker 100a: cassette
101: substrate 113: rotary roller
115: axis of rotation 130: vertical and rotary drive unit
133: cylinder portion 135: drive motor portion
140: substrate rotation table 141: horizontal support
141a, 143a: robot arm entry groove 143: longitudinal support
150: substrate alignment unit 151a: fine position adjusting table
200: substrate loading part 300, 500: substrate transfer part
400 and 600: substrate position adjusting portion 700: substrate unloading portion
800: unit process chamber

Claims (13)

A cassette on which a plurality of substrates which are to be processed are loaded;
A substrate transfer unit for transferring the substrate used in the unit process from the cassette in a direction in which the unit process chamber is located;
A substrate position adjusting unit which adjusts a traveling direction of the substrate so that the substrate transferred through the substrate transfer unit can be smoothly introduced into the unit process chamber;
And a substrate unloading unit which unloads a substrate whose substrate position is changed through the substrate positioning unit through a robot arm and inserts the substrate into the unit process chamber. And a rotation driving unit for raising and rotating the substrate rotation table. The substrate transfer apparatus of claim 1, further comprising a substrate alignment unit configured to compensate for a degree of distortion of the substrate in which the substrate position is changed. The substrate transport apparatus of claim 1, wherein the substrate is unloaded by a robot arm in a state of being seated on a substrate rotating table. The substrate transport apparatus of claim 1, wherein the rotation angle of the substrate is any one of 90 degrees, 180 degrees, and 270 degrees. The substrate transport apparatus of claim 1, wherein the substrate rotation table includes a plurality of horizontal supports and vertical supports, and the robot arm entry grooves are formed in each of the plurality of horizontal supports and the vertical supports. The apparatus of claim 5, wherein the robot arm entry grooves formed in each of the plurality of horizontal supporters and the vertical supporters are positioned on the same line. Providing a cassette in which a plurality of substrates, which are to be processed, are loaded;
Selecting a substrate used in the unit process from the cassette and moving the substrate to a substrate transfer unit;
Transferring the substrate moved to the substrate transfer unit in a direction in which a unit process chamber is present;
Positioning a substrate transferred through the substrate transfer unit on a substrate rotating table provided in a substrate positioning unit;
Raising a substrate rotating table on which the substrate is placed;
Adjusting a substrate position by rotating the substrate to allow the substrate to smoothly enter the unit process chamber;
And unloading the substrate into the unit process chamber by entering the robot arm through a plurality of robot arm entry grooves provided in the substrate rotation table. 8. The method of claim 7, further comprising compensating for the degree of distortion of the substrate with the changed substrate position. 8. The method of claim 7, wherein the substrate is unloaded by a robot arm while seated on a substrate rotating table. 8. The method of claim 7, wherein the rotation angle of the substrate is any one of 90 degrees, 180 degrees, and 270 degrees. The method of claim 7, wherein the substrate rotation table is composed of a plurality of horizontal supports and vertical supports, and the robot arm entry grooves are formed in each of the plurality of horizontal supports and the vertical supports. 12. The method of claim 11, wherein the robot arm entry grooves formed in each of the plurality of horizontal supporters and the vertical supporters are positioned on the same line. 12. The method of claim 11, wherein the substrate is unloaded by moving the robot arm into the substrate rotation table in the lateral direction of the plurality of horizontal supports or vertical supports.
KR1020100110049A 2010-11-05 2010-11-05 Glass conveyor system and method for conveying glass using the same KR20120048430A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101479936B1 (en) * 2013-06-28 2015-01-12 주식회사 에스에프에이 Apparatus for transferring object
CN105035764A (en) * 2015-08-07 2015-11-11 中国建材国际工程集团有限公司 Float glass plate on-line 90-degree rotating device
CN105775743A (en) * 2016-04-26 2016-07-20 武汉华星光电技术有限公司 Steering unit used for glass substrate processing and steering device
CN105819227A (en) * 2016-06-03 2016-08-03 中国建材国际工程集团有限公司 Glass plate rotation and conveying device
CN107117458A (en) * 2017-05-25 2017-09-01 昆山国显光电有限公司 Glass rotating device and glass processing system

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101479936B1 (en) * 2013-06-28 2015-01-12 주식회사 에스에프에이 Apparatus for transferring object
CN105035764A (en) * 2015-08-07 2015-11-11 中国建材国际工程集团有限公司 Float glass plate on-line 90-degree rotating device
CN105035764B (en) * 2015-08-07 2019-03-01 中国建材国际工程集团有限公司 The online 90 degree of rotating devices of float glass plate
CN105775743A (en) * 2016-04-26 2016-07-20 武汉华星光电技术有限公司 Steering unit used for glass substrate processing and steering device
CN105819227A (en) * 2016-06-03 2016-08-03 中国建材国际工程集团有限公司 Glass plate rotation and conveying device
CN107117458A (en) * 2017-05-25 2017-09-01 昆山国显光电有限公司 Glass rotating device and glass processing system

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