JPH08244909A - Aligning glass substrate within cassette - Google Patents
Aligning glass substrate within cassetteInfo
- Publication number
- JPH08244909A JPH08244909A JP8180195A JP8180195A JPH08244909A JP H08244909 A JPH08244909 A JP H08244909A JP 8180195 A JP8180195 A JP 8180195A JP 8180195 A JP8180195 A JP 8180195A JP H08244909 A JPH08244909 A JP H08244909A
- Authority
- JP
- Japan
- Prior art keywords
- glass substrate
- cassette
- rollers
- glass
- shelf
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Liquid Crystal (AREA)
- Warehouses Or Storage Devices (AREA)
- Automatic Assembly (AREA)
- Wrapping Of Specific Fragile Articles (AREA)
- Registering Or Overturning Sheets (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】この発明は、カセット内の複数の
ガラス基板を整列する方法に関する。FIELD OF THE INVENTION This invention relates to a method of aligning a plurality of glass substrates in a cassette.
【０００２】[0002]
【従来の技術】図３は、液晶パネル用のガラス基板１を
示し、そのサイズを説明すると、縦横の幅ＷH,ＷL は、
３００ｍｍ〜４００ｍｍ程度のものが多く、その厚さｔ
は０．９または１．１ｍｍである。ただし最近では１枚
のガラス基板１に、例えば４枚のカラーフィルタ２a 〜
２d を形成する、いわゆる４枚どりのものがあり、その
場合のサイズは６００ｍｍ〜７００ｍｍ角で、厚さｔは
上記と同様である。BACKGROUND OF THE INVENTION Figure 3 shows a glass substrate 1 of the liquid crystal panel, to explain its size, the width W H of the vertical and horizontal, W L is
Most of them are about 300 mm to 400 mm, and their thickness t
Is 0.9 or 1.1 mm. However, recently, on one glass substrate 1, for example, four color filters 2a ...
There is a so-called four-sheet type which forms 2d, in which case the size is 600 mm to 700 mm square, and the thickness t is the same as above.
【０００３】ガラス基板１は、表面に欠陥や付着異物が
存在すると液晶パネルの品質が劣化するので、検査装置
により欠陥や付着異物の有無が検査されている。図４
は、検査装置に対するガラス基板１の搬送システムの概
略を示す。カセット２は、複数枚のガラス基板１を収容
してカセット台３に搭載され、位置決め具３a 〜３d に
より４隅が押圧されて位置決めされる。収容された各ガ
ラス基板１は搬送ハンド４により順次に取出されて検査
台５まで搬送され、その所定の載置範囲内に載置され、
位置決め具５a 〜５d により位置決めされて検査され
る。Since the quality of the liquid crystal panel is deteriorated when the glass substrate 1 has a defect or an adhering foreign substance on its surface, the inspection device inspects for the presence of the defect or the adhering foreign substance. FIG.
Shows an outline of a transport system for the glass substrate 1 with respect to the inspection device. The cassette 2 accommodates a plurality of glass substrates 1 and is mounted on the cassette table 3, and is positioned by pressing the four corners by the positioning tools 3a to 3d. Each of the contained glass substrates 1 is sequentially taken out by the transport hand 4 and transported to the inspection table 5 and placed within the predetermined placement range.
It is positioned and inspected by the positioning tools 5a to 5d.
【０００４】ガラス基板１は、上記のように厚さｔに比
較して縦横幅ＷH,ＷL が非常に大きいので、あたかも硬
質紙のように湾曲し易く、また破損し易い。このような
ガラス基板１の出し入れを容易にするために、カセット
２の左右の幅には十分な余裕を設けてある。これを図５
により説明する。図５(a) において、カセット２は立方
形のフレーム21と、その両側面に設けた複数本（例えば
３本）の支持柱22、およびその内部に設けた複数段の棚
23よりなる。フレーム21の間口の幅ＷL ’には、収容す
るガラス基板１の横幅ＷL より、例えば３０ｍｍほど大
きい余裕が設けてある。このため、(b) に示すように、
各棚23に載置されたガラス基板１には、その中心に対し
て１５ｍｍ以内で左または右側に移動または傾斜して不
揃いに位置ズレするものがある。ただし、各棚23は十分
な横幅ＷT を有するので、ガラス基板１は位置ズレして
も落下の恐れはない。以上に対して搬送ハンド４には位
置ズレを修正する機能がないので、各ガラス基板１は位
置ズレしたまま検査台５まで搬送される。一方、検査台
５の所定の載置範囲は、このような大きい位置ズレに対
する余裕がないので、位置ズレのまま載置されたガラス
基板１は載置範囲からはみ出して位置決めに支障してい
る。Since the glass substrate 1 has a very large vertical and horizontal widths W H and W L as compared with the thickness t as described above, it is easily bent like a hard paper and is easily damaged. In order to facilitate the loading and unloading of the glass substrate 1 as described above, a sufficient margin is provided in the lateral width of the cassette 2. This is shown in FIG.
This will be described below. In FIG. 5A, the cassette 2 is a cubic frame 21, a plurality of (for example, three) support columns 22 provided on both sides of the frame 21, and a plurality of shelves provided inside thereof.
It consists of 23. A width W L 'of the frontage of the frame 21 is provided with a margin larger than the lateral width W L of the glass substrate 1 to be housed, for example, by about 30 mm. Therefore, as shown in (b),
Some of the glass substrates 1 placed on the shelves 23 move or incline to the left or right within 15 mm from the center and are misaligned. However, since each of the shelves 23 has a sufficient width W T , there is no fear of dropping the glass substrate 1 even if the glass substrate 1 is displaced. On the other hand, since the transport hand 4 does not have the function of correcting the positional deviation, each glass substrate 1 is transported to the inspection table 5 with the positional deviation. On the other hand, since the predetermined mounting range of the inspection table 5 has no margin for such a large positional deviation, the glass substrate 1 placed with the positional deviation sticks out of the mounting range and interferes with the positioning.
【０００５】[0005]
【発明が解決しようとする課題】上記の位置ズレを修正
するために、カセット２の両側の支持柱22の間に適当な
棒を押し込み、各ガラス基板１の両側面を押圧して整列
させる方法が試みられた。しかしガラス基板１は湾曲し
易く、またその両端の下面が各棚の上面にピッタリ付着
しているため、単に側面を押圧しても容易には移動せ
ず、むしろ押圧された部分が破損することさえある。そ
こで、このような欠点のない有効な修正手段が必要とさ
れている。この発明は以上に鑑みてなされたもので、カ
セット２の各棚23に載置された各ガラス基板１の位置ズ
レを、一挙に修正して整列させる方法を提供することを
目的とする。In order to correct the above-mentioned misalignment, a method in which a proper rod is pushed between the support columns 22 on both sides of the cassette 2 and both side surfaces of each glass substrate 1 are pressed and aligned. Was tried. However, since the glass substrate 1 is easily curved and the lower surfaces of both ends thereof are exactly attached to the upper surfaces of the shelves, they cannot be easily moved even if the side surfaces are simply pressed, and the pressed portions are rather damaged. Even there. Therefore, there is a need for an effective remedy that does not have these drawbacks. The present invention has been made in view of the above, and an object thereof is to provide a method for correcting and aligning the positional deviation of each glass substrate 1 placed on each shelf 23 of the cassette 2 at once.
【０００６】[0006]
【課題を解決するための手段】この発明はカセット内の
ガラス基板整列方法であって、カセットの両側に、縦方
向に配列された複数の回動自由なローラーと、各ローラ
ーを回動する回動機構、および上昇または下降する昇降
機構とを設ける。回動機構により各ローラーを回動し
て、カセットの各棚に載置された各ガラス基板の両側面
に接触させ、接触した各ローラーを昇降機構により上昇
して、各棚に付着した各ガラス基板の両端を持ち上げな
がら、水平方向に押圧して各ガラス基板を左右方向に整
列させ、ついで、各ローラーをさらに回動して両側面よ
り離間させ、下降して各ガラス基板を各棚に再び載置す
るものである。SUMMARY OF THE INVENTION The present invention is a method for aligning glass substrates in a cassette, which comprises a plurality of freely rotatable rollers arranged vertically on both sides of the cassette and a rotating roller for rotating each roller. A moving mechanism and a lifting mechanism that raises or lowers are provided. Each roller is rotated by the rotating mechanism to contact both side surfaces of each glass substrate placed on each shelf of the cassette, and each contacted roller is lifted by the elevating mechanism to attach each glass to each shelf. While lifting both ends of the substrate, press horizontally to align each glass substrate in the left-right direction, then rotate each roller further to separate it from both sides, and lower it to put each glass substrate back on each shelf. It is to be placed.
【０００７】[0007]
【作用】上記のガラス基板整列方法においては、カセッ
トの両側に縦方向に配列された複数の回動可能なローラ
ーが、回動機構により回動して各ガラス基板の両側面に
接触する。ここで各ローラーを昇降機構により上昇する
と、各棚に付着している各ガラス基板の両端が持ち上げ
られて、各棚から離間するので移動が容易となる。各ロ
ーラーのつづく回動により両側面が水平方向に押圧さ
れ、各ガラス基板は中心方向に移動して整列する。つい
で各ローラーはさらに回動して両側面より離間し、ここ
で各ローラーを下降すると各ガラス基板は整列状態で各
棚に再び載置される。整列された各ガラス基板は、搬送
ハンドにより検査台の所定の載置範囲内に載置されるの
で、位置決めが支障なくなされて検査される。In the above glass substrate aligning method, a plurality of rotatable rollers vertically arranged on both sides of the cassette are rotated by the rotating mechanism to contact both side surfaces of each glass substrate. Here, when each roller is raised by the elevating mechanism, both ends of each glass substrate attached to each shelf are lifted and separated from each shelf, which facilitates movement. Both sides are pressed in the horizontal direction by the continuous rotation of the rollers, and the glass substrates move toward the center and are aligned. Then, each roller is further rotated and separated from both side surfaces, and when each roller is lowered here, each glass substrate is again placed on each shelf in an aligned state. Each of the aligned glass substrates is placed within a predetermined placement range of the inspection table by the transport hand, so that the positioning is performed without any trouble and the glass substrates are inspected.
【０００８】[0008]
【実施例】図１は、この発明を具体化したガラス基板整
列機構６の一実施例の構成図、図２は、ガラス基板整列
機構６の動作説明図である。図１において、ガラス基板
整列機構６は、カセット２の両側に対称的に配設された
整列機構６Ａ，６Ｂよりなる。両整列機構６Ａ，６Ｂは
同一構成で、カセット２の両側面の各支持柱22の間に対
応して縦方向に配列され、互いに連結された回転自由の
２個のローラー61a,61b と、カセット台３の下側に補助
ベースＢを設け、これに配設された回動機構62，昇降機
構63とにより構成される。1 is a block diagram of an embodiment of a glass substrate alignment mechanism 6 embodying the present invention, and FIG. 2 is an operation explanatory view of the glass substrate alignment mechanism 6. In FIG. 1, the glass substrate alignment mechanism 6 comprises alignment mechanisms 6A and 6B symmetrically arranged on both sides of the cassette 2. Both alignment mechanisms 6A and 6B have the same structure, and are arranged vertically between corresponding support columns 22 on both side surfaces of the cassette 2 and are two rotatable rollers 61a and 61b connected to each other, and the cassettes. An auxiliary base B is provided on the lower side of the table 3, and is composed of a rotating mechanism 62 and an elevating mechanism 63 arranged on the auxiliary base B.
【０００９】回動機構62は、補助ベースＢに固定された
支持板621 と、これに軸支され、両ローラー61a,61b を
回動する回転軸622,623 、回転軸622 の下端に固定され
た回動板624 、これに結合されたアーム625 およびエア
シリンダ626 よりなる。昇降機構63は、両ローラー61a,
61b に結合した昇降板631 と、その下端に軸支された結
合板632 、これに結合されたアーム633 およびエアシリ
ンダ634 よりなる。The rotation mechanism 62 includes a support plate 621 fixed to the auxiliary base B, rotation shafts 622 and 623 pivotally supported by the support plate 621 to rotate the rollers 61a and 61b, and a rotation shaft fixed to the lower end of the rotation shaft 622. The moving plate 624 includes an arm 625 and an air cylinder 626 connected to the moving plate 624. The lifting mechanism 63 includes both rollers 61a,
It comprises an elevating plate 631 coupled to 61b, a coupling plate 632 pivotally supported at the lower end thereof, an arm 633 and an air cylinder 634 coupled to this.
【００１０】以下図１と図２により、両整列機構６Ａ，
６Ｂによるガラス基板１の整列方法を説明する。図２
(a) において、カセット２の各棚23には、上から順次に
ガラス基板１-1，１-2，１-3が載置されており、基板１
-1はほぼ中央にあり、基板１-2は右方に位置ズレし、基
板１-3は左方に位置ズレしているとする。これらに対し
て両ローラー61a,61b は離隔した位置にある。ここでエ
アシリンダ626 を動作して回動機構62を駆動すると、回
動軸622 の回動により左右の両ローラー61a,61b がそれ
ぞれ回動して、各基板１-1，１-2，１-3の両側面に接近
し、右側では基板１-2の右側面に、左側では基板１-3の
左側面に接触する。この接触時点で、エアシリンダ634
により昇降機構63を駆動して、両ローラー61a,61b をΔ
z上昇すると、棚23に付着している基板１-2の右端と、
基板１-3の左端とが、(b) に示すように持ち上げられて
移動が容易となる。両ローラー61a,61b をさらに回動す
ると、基板１-2は右側の両ローラー61a,61b により、基
板１-3は左側の両ローラー61a,61b により、それぞれ中
心方向に押圧されて整列される。ついで左右の両ローラ
ー61a,61b を下降すると、(c) に示すように、各基板１
-1，１-2，１-3は整列状態で各棚23に再び載置され、両
ローラー61a,61b はさらに回動して待避する。上記の両
基板整列機構６Ａ，６Ｂは一実施例であって、ローラー
の個数は両側に２個づつとしたが、必要により増加する
ことも可能であり、また回動機構62と昇降機構63は上記
と異なる配置や構成が考えられるが、請求項１記載の方
法を具体化したものである限り、この発明に包含される
ことは云うまでもない。Referring now to FIGS. 1 and 2, both alignment mechanisms 6A,
A method of aligning the glass substrates 1 by 6B will be described. Figure 2
In (a), the glass substrates 1-1, 1-2, 1-3 are sequentially placed on the respective shelves 23 of the cassette 2 from the top.
It is assumed that -1 is located substantially in the center, the substrate 1-2 is displaced to the right, and the substrate 1-3 is displaced to the left. On the other hand, the rollers 61a and 61b are located apart from each other. Here, when the air cylinder 626 is operated to drive the rotation mechanism 62, the rotation of the rotation shaft 622 causes both the left and right rollers 61a and 61b to rotate, respectively, and each of the substrates 1-1, 1-2, 1 -3 on both sides, contacting the right side of the substrate 1-2 on the right side and the left side of the substrate 1-3 on the left side. At the time of this contact, the air cylinder 634
Drives the lifting mechanism 63 to drive both rollers 61a and 61b
When z is raised, the right end of the board 1-2 attached to the shelf 23,
The left end of the substrate 1-3 is lifted as shown in (b) to facilitate movement. When the rollers 61a and 61b are further rotated, the substrate 1-2 is pressed by the right rollers 61a and 61b and the substrate 1-3 is pressed toward the center by the left rollers 61a and 61b, respectively. Then, when the left and right rollers 61a and 61b are lowered, as shown in (c), each substrate 1
-1, 1-2, and 1-3 are again placed on the shelves 23 in an aligned state, and both rollers 61a and 61b are further rotated and retracted. The above-mentioned both substrate aligning mechanisms 6A and 6B are one embodiment, and the number of rollers is two on each side, but it is possible to increase the number if necessary, and the rotating mechanism 62 and the lifting mechanism 63 are provided. Although arrangements and configurations different from those described above are conceivable, it goes without saying that they are included in the present invention as long as they embody the method according to claim 1.
【００１１】[0011]
【発明の効果】以上の説明のとおり、この発明のガラス
基板整列方法によれば、カセットの各棚に載置された複
数のガラス基板は、その不揃いな位置ズレが複数のロー
ラーの回動と上昇により、一挙に修正、整列されて各棚
に再び載置されるもので、検査台におけるガラス基板の
位置決めに支障しない効果が大きい。As described above, according to the glass substrate aligning method of the present invention, the plurality of glass substrates placed on the respective shelves of the cassette have a non-uniform position deviation due to the rotation of the plurality of rollers. As it is raised, it is corrected and aligned all at once, and then placed on each shelf again, which has a great effect of not hindering the positioning of the glass substrate on the inspection table.
【図１】図１は、この発明を具体化したガラス基板整列
機構の一実施例の構成図である。FIG. 1 is a configuration diagram of an embodiment of a glass substrate aligning mechanism embodying the present invention.
【図２】図２は、ガラス基板整列機構の動作説明図であ
って、(a)は、ローラーが動作する前の状態の説明図、
(b)は、ローラーが動作している状態の説明図、(c)は、
ローラーによる動作が終了した状態の説明図である。FIG. 2 is an operation explanatory view of the glass substrate alignment mechanism, (a) is an explanatory view of a state before the roller is operated,
(b) is an explanatory view of the state where the roller is operating, (c) is
It is explanatory drawing of the state which the operation | movement by a roller ended.
【図３】図３は、液晶パネル用のガラス基板の説明図で
ある。FIG. 3 is an explanatory diagram of a glass substrate for a liquid crystal panel.
【図４】図４は、検査装置に対するガラス基板の搬送シ
ステムの概略構成図である。FIG. 4 is a schematic configuration diagram of a glass substrate transfer system for an inspection apparatus.
【図５】図５は、カセットの説明図であって、(a)は、
その全体図、(b)は、その正面図、(c)は、その平面図で
ある。FIG. 5 is an explanatory view of a cassette, (a) shows
An overall view, (b) is a front view thereof, and (c) is a plan view thereof.
１…ガラス基板、２…カセット、21…フレーム、22…支
持柱、23…棚、３…カセット台、３a 〜３d …位置決め
具、４…搬送ハンド、５…検査台、５a 〜５d …位置決
め具、６…ガラス基板整列機構、６Ａ，６Ｂ…整列機
構、61a,61b …ローラー、62…回動機構、621 …支持
板、622,623 …回動軸、624 …回動板、625 …アーム、
626 …エアシリンダ、63…昇降機構、631 …昇降板、63
2 …結合板、633 …アーム、634 …エアシリンダ。DESCRIPTION OF SYMBOLS 1 ... Glass substrate, 2 ... Cassette, 21 ... Frame, 22 ... Support pillar, 23 ... Shelf, 3 ... Cassette stand, 3a-3d ... Positioning tool, 4 ... Conveying hand, 5 ... Inspection stand, 5a-5d ... Positioning tool , 6 ... Glass substrate alignment mechanism, 6A, 6B ... Alignment mechanism, 61a, 61b ... Roller, 62 ... Rotation mechanism, 621 ... Support plate, 622, 623 ... Rotation shaft, 624 ... Rotation plate, 625 ... Arm,
626 ... Air cylinder, 63 ... Lifting mechanism, 631 ... Lifting plate, 63
2… Coupling plate, 633… Arm, 634… Air cylinder.
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 ＦＩ 技術表示箇所 Ｈ０１Ｌ 21/68 Ｈ０１Ｌ 21/68 Ｇ // Ｂ６５Ｈ 9/10 Ｂ６５Ｈ 9/10 ─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. 6 Identification number Internal reference number FI Technical indication H01L 21/68 H01L 21/68 G // B65H 9/10 B65H 9/10
Claims (1)
向に位置ズレした複数のガラス基板を、搬送ハンドによ
り順次にチャックして搬送し、検査台の所定の載置範囲
内に載置する搬送システムにおいて、前記カセットの両
側に縦方向に配列された複数の回転自由なローラーと、
該各ローラーを回動する回動機構、および上昇または下
降する昇降機構とを設け、該回動機構により各ローラー
を回動して、該カセットの各棚に載置された各ガラス基
板の両側面に接触させ、該接触した各ローラーを該昇降
機構により上昇して、前記各棚に付着した各ガラス基板
の両端を持ち上げながら、水平方向に押圧して各ガラス
基板を左右方向に整列させ、ついで、該各ローラーをさ
らに回動して該両側面より離間させ、下降して該各ガラ
ス基板を各棚に再び載置することを特徴とする、カセッ
ト内のガラス基板整列方法。1. A plurality of glass substrates placed on a plurality of shelves of a cassette and displaced in the left-right direction are sequentially chucked and conveyed by a conveying hand, and are placed within a predetermined placing range of an inspection table. In the transfer system to be placed, a plurality of freely rotatable rollers arranged in the longitudinal direction on both sides of the cassette,
A rotating mechanism for rotating each roller and an elevating mechanism for raising or lowering are provided, and each roller is rotated by the rotating mechanism to both sides of each glass substrate placed on each shelf of the cassette. The surface is brought into contact with each other, the contacting rollers are lifted by the elevating mechanism, and both ends of each glass substrate attached to each of the shelves are lifted, while being pressed horizontally to align each glass substrate in the left-right direction, Next, a method for aligning glass substrates in a cassette, characterized in that each of the rollers is further rotated so as to be separated from the both side surfaces, lowered, and each of the glass substrates is placed on each shelf again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8180195A JPH08244909A (en) | 1995-03-14 | 1995-03-14 | Aligning glass substrate within cassette |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8180195A JPH08244909A (en) | 1995-03-14 | 1995-03-14 | Aligning glass substrate within cassette |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH08244909A true JPH08244909A (en) | 1996-09-24 |
Family
ID=13756598
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8180195A Pending JPH08244909A (en) | 1995-03-14 | 1995-03-14 | Aligning glass substrate within cassette |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH08244909A (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335429A (en) * | 1997-06-04 | 1998-12-18 | Tokyo Electron Ltd | Wafer allignment and apparatus therefor |
| JP2002167039A (en) * | 2000-11-30 | 2002-06-11 | Ishikawajima Harima Heavy Ind Co Ltd | Board transfer device |
| KR100488928B1 (en) * | 1997-12-11 | 2005-10-26 | 비오이 하이디스 테크놀로지 주식회사 | Liquid Crystal Cell and Cassette Aligner |
| KR100525997B1 (en) * | 1998-05-22 | 2006-02-08 | 삼성전자주식회사 | Substrate Cassette for Liquid Crystal Display |
| KR100525996B1 (en) * | 1998-05-22 | 2006-09-20 | 삼성전자주식회사 | Substrate Cassette for Liquid Crystal Display |
| JP2011035021A (en) * | 2009-07-30 | 2011-02-17 | Tokyo Electron Ltd | Substrate position alignment mechanism; and vacuum pre-chamber and substrate processing system using the same |
| CN103625704A (en) * | 2013-12-15 | 2014-03-12 | 彭智勇 | Ceramic tile stack straightening mechanism provided with one group of radial connecting rod synchronous drive devices |
| CN103625705A (en) * | 2013-12-15 | 2014-03-12 | 彭智勇 | Straightening mechanism of ceramic tile stack |
| KR101445686B1 (en) * | 2012-06-29 | 2014-10-02 | 주식회사 테라세미콘 | Apparatus for aligning substrate |
| CN104691082A (en) * | 2015-03-25 | 2015-06-10 | 深圳市研创精密设备有限公司 | Polaroid laminating machine positioning mechanism with lifting device |
| KR20170019564A (en) * | 2015-08-11 | 2017-02-22 | 삼성디스플레이 주식회사 | Substrate processing system |
| JP2017163164A (en) * | 2017-06-21 | 2017-09-14 | 光洋サーモシステム株式会社 | Substrate support structure |
| CN108436422A (en) * | 2018-05-25 | 2018-08-24 | 无锡市光彩机械制造有限公司 | A kind of integrated-type steel moald-cavity lateral positioning mechanism |
| KR20190085503A (en) * | 2015-08-11 | 2019-07-18 | 삼성디스플레이 주식회사 | Substrate processing system |
| KR20190112252A (en) * | 2019-09-20 | 2019-10-04 | 삼성디스플레이 주식회사 | Substrate processing system |
| CN111409917A (en) * | 2020-04-08 | 2020-07-14 | 长沙宁湖机械设备有限公司 | Plate-shaped steel packaging winder |
| CN112605650A (en) * | 2020-12-02 | 2021-04-06 | 丹阳市飞翔汽车配件有限公司 | Full-automatic assembling equipment and assembling method for rearview mirror |
| CN114671370A (en) * | 2022-03-25 | 2022-06-28 | 广西交科集团有限公司 | Box girder is with dismantling folding lift transfer cart |
-
1995
- 1995-03-14 JP JP8180195A patent/JPH08244909A/en active Pending
Cited By (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10335429A (en) * | 1997-06-04 | 1998-12-18 | Tokyo Electron Ltd | Wafer allignment and apparatus therefor |
| KR100488928B1 (en) * | 1997-12-11 | 2005-10-26 | 비오이 하이디스 테크놀로지 주식회사 | Liquid Crystal Cell and Cassette Aligner |
| KR100525997B1 (en) * | 1998-05-22 | 2006-02-08 | 삼성전자주식회사 | Substrate Cassette for Liquid Crystal Display |
| KR100525996B1 (en) * | 1998-05-22 | 2006-09-20 | 삼성전자주식회사 | Substrate Cassette for Liquid Crystal Display |
| JP2002167039A (en) * | 2000-11-30 | 2002-06-11 | Ishikawajima Harima Heavy Ind Co Ltd | Board transfer device |
| JP2011035021A (en) * | 2009-07-30 | 2011-02-17 | Tokyo Electron Ltd | Substrate position alignment mechanism; and vacuum pre-chamber and substrate processing system using the same |
| KR101445686B1 (en) * | 2012-06-29 | 2014-10-02 | 주식회사 테라세미콘 | Apparatus for aligning substrate |
| CN103625704B (en) * | 2013-12-15 | 2016-01-20 | 佛山市鼎吉包装技术有限公司 | A kind of buttress of the ceramic tile with one group of centripetal connecting rod synchronous drive device righting mechanism |
| CN103625705A (en) * | 2013-12-15 | 2014-03-12 | 彭智勇 | Straightening mechanism of ceramic tile stack |
| CN103625704A (en) * | 2013-12-15 | 2014-03-12 | 彭智勇 | Ceramic tile stack straightening mechanism provided with one group of radial connecting rod synchronous drive devices |
| CN103625705B (en) * | 2013-12-15 | 2016-04-13 | 佛山市鼎吉包装技术有限公司 | A kind of straight mechanism of ceramic tile stack |
| CN104691082A (en) * | 2015-03-25 | 2015-06-10 | 深圳市研创精密设备有限公司 | Polaroid laminating machine positioning mechanism with lifting device |
| US10699936B2 (en) | 2015-08-11 | 2020-06-30 | Samsung Display Co., Ltd. | Substrate processing system |
| KR20190085503A (en) * | 2015-08-11 | 2019-07-18 | 삼성디스플레이 주식회사 | Substrate processing system |
| KR20170019564A (en) * | 2015-08-11 | 2017-02-22 | 삼성디스플레이 주식회사 | Substrate processing system |
| US11355384B2 (en) | 2015-08-11 | 2022-06-07 | Samsung Display Co., Ltd. | Substrate processing system |
| JP2017163164A (en) * | 2017-06-21 | 2017-09-14 | 光洋サーモシステム株式会社 | Substrate support structure |
| CN108436422A (en) * | 2018-05-25 | 2018-08-24 | 无锡市光彩机械制造有限公司 | A kind of integrated-type steel moald-cavity lateral positioning mechanism |
| KR20190112252A (en) * | 2019-09-20 | 2019-10-04 | 삼성디스플레이 주식회사 | Substrate processing system |
| CN111409917A (en) * | 2020-04-08 | 2020-07-14 | 长沙宁湖机械设备有限公司 | Plate-shaped steel packaging winder |
| CN112605650A (en) * | 2020-12-02 | 2021-04-06 | 丹阳市飞翔汽车配件有限公司 | Full-automatic assembling equipment and assembling method for rearview mirror |
| CN114671370A (en) * | 2022-03-25 | 2022-06-28 | 广西交科集团有限公司 | Box girder is with dismantling folding lift transfer cart |
| CN114671370B (en) * | 2022-03-25 | 2023-06-30 | 广西交科集团有限公司 | Detachable folding lifting transport cart for box girder |
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