KR20080082999A - Tcp handler and method of aligning connector in tcp handler - Google Patents

Abstract

The alignment of a probe (81) of a probe card (8) with a TCP test pad (P) is automatically performed by the steps of: obtaining the coordinate data of both the TCP test pad (P) and the probe (81) of the probe card (8) by imaging the test pad (P) and the probe (81), respectively, with a second camera (6b); calculating the displacement between the test pad (P) and the probe (81) from the coordinate data of the test pad (P) and the probe (81); and moving the probe card (8) by using the probe card stage (7) according to the displacement. In this manner, the alignment of the TCP test pad (P) and the probe (81) of the probe card (8) can be performed precisely and easily.

Description

TCP HANDLER AND METHOD OF ALIGNING CONNECTOR IN TCP HANDLER

The present invention is referred to as "TCP" by integrating devices manufactured by a tape carrier package (TCP) or a chip on film (COF) (hereinafter, TCP, COF, or other tape automated bonding (TAB) mounting technology), which is a type of IC device. It relates to a TCP handling device used to test.) And a method of positioning a connection terminal in a TCP handling device.

In the manufacturing process of an electronic component such as an IC device, an electronic component test apparatus for testing the performance or function of the finally manufactured IC device or a device in the intermediate stage thereof is required. In the case of TCP, a test apparatus for TCP is used. .

The test apparatus for TCP generally consists of a tester main body, a test head, and a TCP handling apparatus (henceforth a "TCP handler"). The TCP handler conveys a carrier tape in which a plurality of TCPs are formed on a tape (the concept of film. The same applies hereinafter), and presses the carrier tape to a probe of a probe card electrically connected to a test head. The test pad is brought into contact with the probe to provide a plurality of TCPs for sequential testing.

However, in order to perform the test efficiently and accurately using the TCP handler, it is necessary to make sure that the test pad of the TCP and each probe of the probe card are contacted with each other.

Thus, in the case of using the TCP handler, the TCP handler is initialized in advance so that the test pad of the TCP and each probe of the probe card can be securely contacted before the actual operation is performed and the test is performed. I'm working on registering a setting.

The initial configuration of the TCP handler is performed as follows, for example. First, TCP is returned to the test position, and the returned TCP is held by the pusher unit. Then, the pusher unit is moved to a height at which TCP can be clearly recognized by the camera, the test pad of TCP is photographed by the camera, and the image is displayed on the monitor. The operator looks at the monitor and visually sees the angle of rotation of the TCP. Next, in order to clearly recognize the probe of the probe card by the camera, move the pusher unit to a height where TCP cannot be clearly recognized by the camera, and then photograph the probe of the probe card with the camera and monitor this image. Mark on. The operator rotates the probe card stage by manual operation while watching the monitor, and adjusts the rotation angle of the probe card with respect to the rotation angle of TCP. The TCP then moves the pusher unit together with the probe to a height that can be clearly recognized by the camera. The operator moves the probe card stage in the X-axis direction and / or Y-axis direction by manual operation while looking at the monitor to confirm whether all test pads of the TCP can come into contact with the probe of the probe card. The position thus set is registered as the initial setting.

However, in the above-described initial setting method, the grasp of the TCP rotation angle and the adjustment of the rotation angle of the probe card are based on the operator's senses, and therefore, the operator may require a lot of working time. Further, since the test pad of TCP is not displayed on the monitor when adjusting the rotation angle of the probe card, it is very difficult to adjust the rotation angle of the probe card with respect to the TCP rotation angle. In addition, when all the test pads of TCP cannot contact the probe of the probe card, it is necessary to repeatedly perform the movement of the pusher unit and the rotation of the probe card stage, and the work is very complicated.

In particular, since TCP's test pads are smaller and have smaller pitches in accordance with recent multi-pinning and miniaturization of TCP, alignment of pads and probes in the initial setting becomes more difficult and the working time according to the initial setting becomes longer. have. In addition, the alignment between the TCP and the probe may not always be accurately performed, and in this case, contact failure, destabilization of the contact resistance, and short between the adjacent pins may occur during actual operation.

SUMMARY OF THE INVENTION The present invention has been made in view of the above fact, and it is possible to precisely and easily perform alignment processing in a TCP handling apparatus and a TCP handling apparatus capable of accurately and easily aligning a contact terminal of a contact portion and an external terminal of the TCP. It aims to provide a way to.

In order to achieve the above object, firstly, the present invention conveys a carrier tape in which a plurality of TCPs are formed, presses the carrier tape to a plurality of connection terminals of a contact portion electrically connected to a test head, and connects external terminals of TCP to the connection. A TCP handling device that can provide a plurality of TCPs to a sequential test by connecting to a terminal, comprising: a mobile device capable of moving a contact portion provided with the plurality of connection terminals about its planar direction and a vertical axis, and a TCP under test And an imaging device capable of photographing the external terminal and the connection terminal, wherein the imaging device captures the external terminal of the TCP under test to acquire coordinate data of the external terminal, and captures the connection terminal. Acquire coordinate data of the connection terminal, and obtain the coordinate data of the external terminal and the coordinate data of the connection terminal. To obtain the positional displacement amount of the external terminal and the connection terminal, and to perform the alignment of the connection terminal with respect to the external terminal of the TCP under test by moving the contact portion by the moving device based on the positional displacement amount. It provides a TCP handling device, characterized in that (Invention 1).

According to the above invention (Invention 1), since these position shift amounts can be obtained from the coordinate data of the external terminal of the TCP and the contact terminal of the contact portion to be aligned, the contact portion can be automatically moved based on the position shift amount. The positioning of the external terminal of the contact terminal and the contact terminal of the contact portion can be performed accurately and easily. Therefore, when using a TCP handler apparatus, this initial setting can be performed efficiently in a short time.

In the above invention (Invention 1), first, the coordinate data of the external terminal and the coordinate data of the connection terminal are acquired, the positional displacement amount around the vertical axis of the external terminal and the connection terminal is obtained, and the position around the vertical axis. The contact unit is moved around the vertical axis by the moving device on the basis of the amount of displacement, and secondly, coordinate data of the connection terminal is obtained again to obtain the positional displacement amount in the planar direction of the external terminal and the connection terminal, It is preferable to move the contact portion in the plane direction by the moving device based on the amount of positional displacement in the plane direction (invention 2). According to this invention (invention 2), the alignment between the TCP and the contact portion can be more accurately performed by separately performing the alignment around the vertical axis and the alignment in the planar direction.

In the invention (Invention 1), the positional shift amount around the vertical axis of the external terminal and the connecting terminal is the angle of the first straight line obtained from two or more coordinate data of the external terminal and the coordinate data of the two or more connecting terminals. It can obtain | require from the difference of the angle of the 2nd straight line obtained from (Invention 3).

In the invention (Invention 3), the TCP handling apparatus further includes a display device, and it is preferable that the first straight line and / or the second straight line can be displayed on the display device (Invention 4). According to this invention (invention 4), the position shift around the vertical axis can be visually confirmed by displaying the first straight line and / or the second straight line on the display device.

In the invention (Invention 4), it is preferable that the first straight line can be overlaid on the display device by overlaying the image of the external terminal photographed by the imaging device (Invention 5), and the invention (invention) In 4), it is preferable that the second straight line can be overlaid on the display device by overlaying the image of the connection terminal photographed by the imaging device (invention 6).

In the above invention (Invention 4), it is preferable that the value of the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device (Invention 7). According to this invention (invention 7), the position shift amount around the vertical axis can be visually confirmed by displaying the value of the angle difference between the first straight line and the second straight line on the display device.

In the invention (invention 4), the first straight line and / or displayed on the display device when the contact portion is moved around a vertical axis so that the angle difference between the first straight line angle and the second straight line becomes smaller than a predetermined value. It is preferable to change the color of the second straight line (Invention 8). According to this invention (invention 8), it can be visually confirmed by the display device that the positional shift around the vertical axis is corrected.

In the said invention (invention 4), it is preferable to make a notification sound when the said contact part is moved around a vertical axis, and when the angle difference of the said 1st linear line and the said 2nd linear line becomes smaller than a predetermined value (invention 9). According to this invention (invention 9), even when the operator does not look at the display device, it is possible to visually confirm that the position shift around the vertical axis is completed.

In the above invention (Invention 3), the TCP handling apparatus further includes an imaging device moving device capable of moving the imaging device, and the imaging device moves by the imaging device moving device. It is preferable to photograph two or more places and two or more places of the connection terminals (invention 10). According to this invention (invention 10), since the image pickup apparatus can photograph a plurality of portions at different positions of the external terminals and a plurality of portions at different positions of the connection terminals, the positional displacement amount of the TCP and the contact portion can be better corrected. Can be obtained, so that the alignment of the contact portion with TCP can be performed more accurately.

In the above invention (Invention 1), the TCP handling apparatus further includes a movable diffuse reflecting plate, and it is preferable to insert the diffuse reflecting plate between the connecting terminal and the carrier tape when photographing the connecting terminal of the contact portion. (Invention 11). According to this invention (invention 11), since the image of the high contrast connection terminal can be obtained by setting the diffuse reflector as a background, the coordinate data of the connection terminal can be obtained with good accuracy, and the alignment between the TCP and the contact portion can be improved. It can be done correctly.

Secondly, the present invention carries a plurality of TCPs by conveying a carrier tape having a plurality of TCPs, pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to a test head, and connecting external terminals of TCP to the connection terminals. A TCP handling device capable of providing a sequential test to a test device, comprising: an imaging device capable of photographing the external terminal of the TCP under test and the connection terminal, and a display device; and a contact portion provided with the plurality of connection terminals, A first straight line and / or the imaging device which is movable in a plane direction and around a vertical axis, and is obtained from coordinate data of the external terminals obtained by photographing two or more external terminals of the TCP under test by the imaging device. A second straight line obtained from coordinate data of the connection terminal obtained by photographing two or more locations of the connection terminal; The present invention provides a TCP handling device which can display the display device (Invention 12).

According to the invention (invention 12), since the operator can move the contact portion around the vertical axis while looking at the first straight line and / or the second straight line displayed on the display device, the alignment between the TCP and the vertical axis of the contact portion can be accurately and easily. Can be done.

In the invention (Invention 12), it is preferable that the first straight line can be overlaid on the display device by overlaying the image of the external terminal photographed by the imaging device (Invention 13). Further, the invention (invention) In 12), it is preferable that the second straight line can be overlaid on the display device by overlaying the image of the connection terminal photographed by the imaging device (invention 14).

In the invention (Invention 12), the tilt angle and / or the coordinate value of the predetermined point of the first straight line and / or the second straight line may be further displayed on the display device (invention 15). According to this invention (invention 15), since the operator can perform the alignment of the contact portion with the TCP on the basis of the inclination angle and / or the coordinate value displayed on the display device, the alignment of the contact portion with the TCP is more accurately and It can be done easily.

In the above invention (Invention 12), it is preferable that the value of the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device (Invention 16). According to this invention (invention 16), by displaying the value of the angle difference between the two straight lines, the operator can perform the alignment of the contact portion with the TCP by bringing this value close to 0 (deg), so that the alignment It can be done accurately and easily.

In the invention (invention 12), the first straight line to be displayed on the display device when the contact portion is moved around the vertical axis and the angle difference between the first straight line and the second straight line is smaller than a predetermined value. Alternatively, it is preferable to change the color of the second straight line (Invention 17). According to this invention (invention 17), by changing the color of the first straight line and / or the second straight line, the operator can recognize that the correction of the positional shift around the vertical axis has been completed, thereby making it easier to adjust the alignment of the TCP and the contact portion. It can be done easily.

In the said invention (invention 12), it is preferable to make a notification sound when the said contact part is moved around a vertical axis, and when the angle difference of the said 1st straight line and said 2nd straight line becomes smaller than a predetermined value (invention 18). According to this invention (invention 18), by sounding a notification sound, the operator can visually confirm that the correction of the positional shift around the vertical axis has been completed, so that the alignment between the TCP and the contact portion can be performed more easily.

In the above invention (Invention 12), the TCP handling apparatus further includes an imaging device moving device capable of moving the imaging device, and the imaging device is configured to move two external terminals by moving by the imaging device moving device. It is preferable to photograph at least two locations and two or more of the connection terminals (invention 19). According to this invention (invention 19), since the image pickup apparatus can photograph the plurality of portions at different positions of the external terminals and the plurality of portions at different positions of the connecting terminals, the angles of the first straight line and the second straight line are more accurately determined. Can be obtained, so that the alignment of the contact portion with TCP can be performed more accurately.

In the above invention (Invention 12), the TCP handling apparatus further includes a movable reflecting plate, and it is preferable to insert the diffusion reflecting plate between the connecting terminal and the carrier tape when photographing the connecting terminal of the contact portion. (Invention 20). According to this invention (Invention 20), since the image of the high contrast connection terminal can be obtained by setting the diffuse reflector as a background, the angle of the second straight line can be obtained more accurately, and the alignment between the TCP and the contact can be performed more accurately. have.

Thirdly, the present invention carries a plurality of TCPs by conveying a carrier tape having a plurality of TCPs, pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to a test head, and connecting external terminals of TCP to the connection terminals. A method of aligning a connection terminal in a TCP handling apparatus capable of providing a sequential test, comprising: first, acquiring coordinate data of the external terminal and coordinate data of the connection terminal to obtain a vertical axis of the external terminal and the connection terminal; The positional displacement amount of the circumference is obtained, the contact portion is moved around the vertical axis based on the positional displacement amount of the circumference of the vertical axis, and secondly, the coordinate data of the connection terminal is obtained again, and the plane of the external terminal and the connection terminal is obtained. The position shift amount in the direction, and the contact is performed based on the position shift amount in the planar direction. Provided is a method for aligning a connection terminal, which moves a part in a plane direction (Invention 21).

Moreover, this invention conveys the carrier tape in which the TCP was formed in multiple numbers, presses a carrier tape to the some connection terminal of the contact part electrically connected to a test head, and connects the external terminal of TCP to the said connection terminal, A method of aligning a connection terminal in a TCP handling apparatus capable of providing a sequential test, comprising: acquiring coordinate data of the external terminal and coordinate data of the connection terminal, and positioning a position around a vertical axis of the external terminal and the connection terminal. A method of aligning a connection terminal is provided, wherein the amount of misalignment and the amount of positional misalignment in the planar direction are obtained, and the contact portion is moved around the vertical axis and / or in the planar direction based on the positional misalignment (invention 22). .

In the invention (invention 21, 22), the positional displacement amount around the vertical axis of the external terminal and the connection terminal is equal to or greater than the angle of the first straight line obtained from the coordinate data of two or more locations of the external terminal and the two or more locations of the connection terminal. It is preferable to obtain | require from the difference of the angle of the 2nd straight line obtained from coordinate data (invention 23).

In the said invention (invention 23), it is preferable to display the value of the angle difference of the said 1st straight line and the said 2nd straight line on a display apparatus (invention 24).

In the invention (invention 23), the first straight line and the second straight line are displayed on a display device, the contact portion is moved around a vertical axis, and the difference between the angle of the first straight line and the angle of the second straight line is a predetermined value. When it becomes smaller, it is preferable to change the color of the first straight line and / or the second straight line displayed on the display device (invention 25).

In the said invention (invention 23), it is preferable to make a notification sound when the said contact part is moved around a vertical axis and the difference of the angle of the said 1st linear line and the said 2nd linear line becomes smaller than predetermined value (invention 26). ,

In the invention (Invention 21, 22), when imaging the connection terminal of the contact portion, it is preferable to insert a diffuse reflecting plate between the connection terminal and the carrier tape (invention 27).

Fourthly, the present invention carries a plurality of TCPs by conveying a carrier tape in which a plurality of TCPs are formed, pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to a test head, and connecting an external terminal of TCP to the connection terminals. A method for aligning a connection terminal in a TCP handling apparatus capable of providing a sequential test, comprising: a first image obtained from coordinate data of the external terminal obtained by photographing two or more external terminals of a TCP under test by an imaging device; A straight line is displayed on the display device, and a second straight line obtained from the coordinate data of the connected terminal obtained by photographing two or more of the connection terminals by the imaging device is displayed on the display device together with the first straight line. The vertical axis of the contact portion while looking at the first straight line and the second straight line displayed on the display device Provided is a method for aligning a connection terminal, which can be moved around (invention 28).

In the said invention (invention 28), it is preferable to display the value of the angle difference of the said 1st straight line and the said 2nd straight line on a display apparatus (invention 29).

In the invention (invention 28), the first straight line to be displayed on the display device when the contact portion is moved around the vertical axis and the difference between the angle of the first straight line and the angle of the second straight line is smaller than a predetermined value; and / Alternatively, it is preferable to change the color of the second straight line (invention 30).

In the said invention (invention 28), it is preferable to make a notification sound when the said contact part is moved around a vertical axis, and the difference of the angle of the said 1st linear line and the said 2nd linear line becomes smaller than a predetermined value (invention 31).

In the invention (Invention 28), when imaging the connection terminal of the contact portion, it is preferable to insert a diffusion reflector between the connection terminal and the carrier tape (invention 32).

According to the method for aligning the TCP handling device or the connection terminal of the present invention, it is possible to accurately and easily align the contact terminal of the contact portion with the external terminal of the TCP.

1 is a front view showing a TCP tester using a TCP handler according to an embodiment of the present invention.

2 is a side view of a pusher unit in a TCP handler according to an embodiment of the present invention.

3 is a plan view of a pusher stage in a TCP handler according to an embodiment of the present invention.

4 is a plan view of a probe card stage in a TCP handler according to an embodiment of the present invention.

5 is a front view of a probe card stage in a TCP handler according to an embodiment of the present invention.

Fig. 6A is a flowchart (1) showing an operation during initial setting of a TCP handler according to an embodiment of the present invention.

Fig. 6B is a flowchart (2) showing an operation during initial setting of a TCP handler according to an embodiment of the present invention.

Fig. 6C is a flowchart (3) showing an operation during initial setting of a TCP handler according to an embodiment of the present invention.

7 (a) to 7 (g) are schematic diagrams of a monitor display screen at the time of initial setting of a TCP handler according to an embodiment of the present invention.

Explanation of the sign

One… TCP test equipment

2… TCP handler

3... Pusher unit

4… Pusher stage

5... Carrier tape

6b... Second camera (imaging device)

7... Probe card stage

8… Probe card

81... Probe (contact terminal)

9... Display

10... Test head

11... Diffuse reflector

21... Reel

22... Reel

P… TCP test pad (external terminal)

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described in detail based on drawing.

1 is a front view illustrating a TCP test apparatus using a TCP handler according to an embodiment of the present invention, FIG. 2 is a side view of a pusher unit in a TCP handler according to an embodiment of the present invention, and FIG. 3 is an embodiment of the present invention. 4 is a plan view of a pusher stage in a TCP handler according to an embodiment of FIG. 4, and FIG. 4 is a plan view of a probe card stage in a TCP handler according to an embodiment of the present invention, and FIG. 5 is a TCP according to an embodiment of the present invention. Front view of the probe card stage in the handler.

First, the whole structure of the test apparatus for TCP provided with a TCP handler concerning embodiment of this invention is demonstrated. The test apparatus 1 for TCP is comprised from the tester main body which is not shown in figure, the test head 10 electrically connected to the tester main body, and the TCP handler 2 provided above the test head 10. As shown in FIG.

The TCP handler 2 provides each TCP formed in multiple numbers on the carrier tape 5 for a sequential test, and in this embodiment, TCP is provided to a test one by one for simplicity of description. However, the present invention is not limited thereto, and a plurality of TCPs arranged in the serial direction and / or the parallel direction on the carrier tape 5 may be simultaneously provided to the test.

The TCP handler 2 is provided with the unwinding reel 21 and the winding reel 22, and the carrier tape 5 before a test is wound by the unwinding reel 21. As shown in FIG. The carrier tape 5 is unwound from the unwinding reel 21 and wound around the winding reel 22 after being provided for testing.

Three spacer rolls 23a passing the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the winding reel 22 between the unwinding reel 21 and the unwinding reel 22, 23b and 23c are provided. Each spacer roll 23a, 23b, 23c can be moved up and down, respectively, so that the tension of the protective tape 51 can be adjusted.

On the lower side of the unwinding reel 21, a tape guide 24a, a unwinding limit roller 25a, an inner sub sprocket 25b, and an inner guide roller 25c are provided, and the carrier tape unwound from the unwinding reel 21 ( 5) is guided by the tape guide 24a, and it is conveyed to the pusher unit 3 through the unwinding limit roller 25a, the inner sub sprocket 25b, and the inner guide roller 25c.

The tape guide 24b, the winding limit roller 25f, the outer sub sprocket 25e, and the outer guide roller 25d are provided in the lower side of the winding reel 22, and the carrier tape 5 after being provided for a test is the outer side. It is wound around the winding reel 22 while being guided by the tape guide 24b through the guide roller 25d, the outer sub sprocket 25e, and the winding limit roller 25f.

And the pusher unit 3 is provided between the inner guide roller 25c and the outer guide roller 25d.

1 and 2, a servo motor 31 capable of rotating the ball screw 32 is installed in the frame (pusher frame) 36 of the pusher unit 3 via a bracket 361. At the same time, the pusher main body portion 33 in which the ball screw 32 is screwed is provided via two linear motion guides (hereinafter referred to as "LM guides") 37 in two Z-axis directions. The pusher main body 33 is movable in the vertical direction (Z-axis direction) while being guided to the linear motion guide 37 by driving the servo motor 31.

At the lower end of the pusher main body portion 33, a suction plate 34 is provided which is connected to a negative pressure source (not shown) and can hold and hold the carrier tape 5.

A tension sprocket 35a is provided on the front end side (left side in Fig. 1) of the pusher main body part 33, and a main sprocket 35b is provided on the rear end side (right side in Fig. 1) of the pusher body part 33. The carrier tape 5 is held at a desired tension.

As shown in FIG. 2 and FIG. 3, the pusher stage 4 is provided on the back side of the pusher body part 33 in the pusher frame 36 so as to be mounted on the base 38, and the pusher stage 4 is provided. The top table 48, which is a rotating table of, is fixed to the pusher frame 36.

On the base 40 of the pusher stage 4, a servo motor 41a for rotating the ball screw 42a having an axis in the X axis direction, and a servo motor 41b for rotating the ball screw 42b having an axis in the Y axis direction. ) And a servo motor 41c for rotating the ball screw 42c having an axis in the Y-axis direction, and the servomotor 41b and the servomotor 41c are located at both ends on the base 40, respectively.

A sliding block 44a guided by the LM guides 43a and 43a in the X-axis direction and slidable in the X-axis direction is screwed to the ball screw 42a. A sliding plate 46a is provided in the sliding block 44a so as to be slidable in the Y-axis direction via the LM guide 45a in the Y-axis direction. On the upper side of the sliding plate 46a, a rotating member 47a having a roller link therein is fixed, and the rotating member 47a is rotatably provided on the top table 48.

A sliding block 44b guided by the LM guides 43b and 43b in the Y-axis direction and slidable in the Y-axis direction is screwed to the ball screw 42b. The sliding plate 46b is provided in the sliding block 44b so as to be slidable in the X-axis direction via the LM guide 45b in the X-axis direction. On the upper side of the sliding plate 46b, a rotating member 47b having a roller link therein is fixed, and the rotating member 47b is rotatably provided on the top table 48. As shown in FIG.

The ball screw 42c is screwed with a sliding block 44c guided by the LM guides 43c and 43c in the Y-axis direction and slidable in the Y-axis direction. The sliding plate 46c is provided in the sliding block 44c so that the sliding plate 46c can slide in the X-axis direction via the LM guide 45c in the X-axis direction. On the upper side of the sliding plate 46c, a rotating member 47c having a roller link therein is fixed, and the rotating member 47c is rotatably provided on the top table 48.

In the pusher stage 4 having such a configuration, the top table 48 is moved by driving the servo motor 41a to slide the sliding block 44a, the sliding plate 46b, and the sliding plate 46c in the X-axis direction. Can move in the axial direction. In addition, the top table 48 is Y-axis by driving the servo motor 41b and the servo motor 41c to slide the sliding block 44b, the sliding block 44c, and the sliding plate 46a in the Y-axis direction. Can be moved in a direction. Further, by driving the servo motor 41a to slide the sliding block 44a in the X-axis direction, the servo motor 41b and the servo motor 41c are driven to drive the sliding block 44b and the sliding block 44c. The top table 48 can be rotated around its vertical axis by sliding the respective rotation members 47a, 47b, 47c by sliding them in directions opposite to each other on the Y axis. According to this pusher stage 4, it is possible to move the pusher unit 3 in the X-Y-axis direction and to rotate it about the vertical axis.

On the other hand, as shown in FIG. 1, as the lower side of the pusher unit 3, the probe card stage 7 in which the probe card 8 was mounted is provided in the upper part of the test head 10. As shown in FIG. Here, although the probe card stage 7 can carry out the movement control by the motor drive mechanism, and has only the manual adjustment function, in this embodiment, it shall have a motor drive mechanism.

4 and 5, on the base 71 of the probe card stage 7, a servo motor 711 for rotating the ball screw 712 having an axis in the X-axis direction, and four X-axis directions. The LM guide 713 is provided. On these four LM guides 713, the rectangular X base 72 guided so that sliding in the X-axis direction by each LM guide 713 is provided. One side portion of the X base 72 is formed with a screw engaging portion 721 in which a ball screw 712 is screwed.

On the X base 72, a servo motor 722 for rotating the ball screw 723 having an axis in the Y-axis direction and two LM guides 724 in the Y-axis direction are provided. On these two LM guides 724, a rectangular Y base 73 guided to be slidable in the Y-axis direction by each LM guide 724 is provided. One side portion of the Y base 73 is formed with a screw engaging portion 731 in which a ball screw 723 is screwed.

On the Y base 73, a servo motor 732 for rotating the ball screw 733 having an axis in the Y-axis direction and a connection link 734 for freely supporting the card link 735 are provided. A part of the card link 735 is formed with a screw engaging portion 736 in which the ball screw 733 is screwed. The probe card 8 including the plurality of probes 81 is detachably attached to the card link 735 by four pins 82.

Although not shown in FIG. 4 and FIG. 5, each probe 81 of the probe card 8 is electrically connected to the tester body via the test head 10.

In the probe card stage 7 having such a configuration, by driving the servo motor 711, the X base 72, thus the probe card 8 can be moved in the X-axis direction, and the servo motor 722 is driven. The Y base 73 and thus the probe card 8 can be moved in the Y axis direction. In addition, the card link 735 and the probe card 8 can be rotated about their vertical axis by driving the servo motor 732 to rotate the ball screw 733 to move the screw coupling portion 736. On the other hand, the TCP handler 2 is provided with a control device capable of automatically controlling the driving of the servo motors 711, 722, and 732, and thus the probe card 8 is moved in the X-axis direction and Y. It can be moved automatically around the axial and vertical axes.

As shown in FIG. 1, the first camera 6a is placed on the front end side (left side in FIG. 1) of the pusher unit 3, and the second camera (imaging device) 6b is placed below the test head 10. The third camera 6c is provided on the rear end side (right side in Fig. 1) of the pusher unit 3, respectively. On the other hand, the test head 10 is formed with a gap in which the second camera 6b can photograph the probe card 8.

A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c. Based on the test result, the mark punch 26a drills one or a plurality of holes at a predetermined position with respect to the corresponding TCP, and the reject punch 26b punches the TCP determined as a defective test result.

Each camera 6a, 6b, 6c displays the image photographed by these cameras on the display apparatus 9 so that an operator can see. Among these cameras, the first camera 6a and the third camera 6c are for judging the presence or absence of TCP on the carrier tape 5 and the hole position and number by the mark punch 26a. The second camera 6b is for acquiring positional shift information between the TCP and the probe card 8, and is capable of acquiring positional shift information for a plurality of objects in the field of view.

In addition, the second camera 6b is mounted on the camera stage 61, and is viewed in a plan view by the actuator of the camera stage 61 in the vertical and horizontal directions (X-axis and Y-axis directions) and in the vertical direction (Z-axis). Direction). The plurality of test pads P and the probe card 8 in which the second camera 6b is located at a distant position of TCP by moving the second camera 6b in the longitudinal and horizontal directions (X-Y-axis directions) when viewed in a plane. Since the probes 81 at positions far from each other can be photographed, the amount of positional deviation between the TCP and the probe card 8 can be obtained with better accuracy. In addition, the second camera 6b moves in the vertical direction (Z-axis direction) to change the focus position of the second camera 6b, thereby focusing on a desired portion of the test pad P or the probe 81 which is an imaging target. Can be adjusted. As a result, a clear outline image of the imaging target portion can be obtained, and the coordinate data of the test pad P or the probe 81 can be accurately obtained. On the other hand, the second camera 6b itself has a focus adjustment function to externally control the focus position of the second camera 6b, and focus on a desired portion of the test pad P or the probe 81, which is an imaging target. You may be able to match it.

And the display apparatus 9 has an image processing part and the monitor which displays the image which the 2nd camera 6b photographed. The image processing unit has means for overlaying the image photographed by the second camera 6b with a predetermined straight line, a character, or the like on a monitor.

The diffusion reflector 11 is sandwiched between the pusher unit 3 and the probe card 8 between the carrier tape 5 held on the suction plate 34 and the probe card 8. In the present embodiment, the diffuse reflection plate 11 is capable of reciprocating in the X-axis direction. The diffuse reflection plate 11 is formed with fine irregularities on its surface, and can diffuse and reflect light from an illumination light source (not shown). Therefore, when the diffuse reflecting plate 11 is inserted between the carrier tape 5 and the probe card 8, the background of the probe 81 can be made uniformly bright or dark, so that the second camera 6b The high contrast image of the probe 81 can be obtained by this. On the other hand, without providing the diffuse reflecting plate 11, the conditions (irradiation light amount, irradiation color, irradiation angle) of the irradiation light source may be changed to make the identification of the background (test pad) of the probe 81 more clear. .

Next, the usage and operation of the TCP handler 2 will be described.

In the case of using the TCP handler 2, the probes are positioned so that all the probes 81 of the probe card 8 are previously positioned at the center positions of the corresponding test pads P before the TCP handler 2 is actually started. It is necessary to perform the initial setting for moving the card 8. That is, when the varieties of TCP are changed, when TCP of another production lot is tested, or when the probe card 8 is changed, the test pad P of the TCP and the probe 81 of the probe card 8 It is necessary to determine and register the reference position of the X-axis position / Y-axis position / θ rotation angle of the probe card stage 7 so as to be in contact (this position is referred to as a “registration position”). On the other hand, since the pusher stage 4 is used during test execution of TCP, it is assumed that the pusher stage 4 is in an uncontrolled state in the initial setting.

6A to 6C are flowcharts showing the operation of the initial setting of the TCP handler 2, and Figs. 7A to 7G are the initial setting of the TCP handler 2, respectively. Is a schematic diagram of the monitor display screen.

When the TCP handler 2 starts the operation of the initial setting, the reference TCP is returned to the test position (step S01), and the second camera 6b is connected to one end of the plurality of test pads P in TCP. The some test pad P located is image | photographed (step S02). The image processing unit of the TCP handler 2 selects the coordinate data X _pd1 and Y _pd1 of the centers of the plurality of test pads P included in the first image, based on the captured image (first image). At the same time, the first image is displayed on the monitor (step S03, see Fig. 7A). In addition, each coordinate data acquired by this operation shall be mapped to the coordinate system of the camera stage 61. FIG.

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61, and is located at a separate end of the plurality of test pads P in TCP by the second camera 6b. The test pads P are photographed (step S04). The image processing unit of the TCP handler 2 selects the coordinate data X _pd2 and Y _pd2 of the centers of the plurality of test pads P included in the second image based on the captured image (second image). At the same time, the second image is displayed on the monitor (step S05).

The image processing section of the TCP handler 2 is based on the acquired coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ), the position coordinates of the center of the test pad P included in the first image and the second. An angle θ _pd with a straight line in the X-axis direction (horizontal line in FIG. 7) of a straight line (array of the test pads P) passing through the position coordinates of the center of the test pad P included in the image is calculated ( Step S06). Then, a first straight line L1 having the angle θ _pd is generated, and the first straight line L1 is overlaid on the second image (current image) and displayed on the monitor as overlay (step 07, FIG. 7B). ) Reference).

Next, the TCP handler 2 inserts the diffusion reflector 11 between the carrier tape 5 and the probe card 8 (step S08). Then, the second camera 6b is moved by the camera stage 61, and the plurality of probes 81 corresponding to the plurality of test pads P included in the first image by the second camera 6b. (Step S09). The image processing unit of the TCP handler 2 acquires coordinate data (X _pd1 , Y _pd1 ) of each of the distal ends of the plurality of probes 81 included in the third image, based on the captured image (third image). At the same time, the third image is displayed on the monitor (step S10, see Fig. 7C). Here, since the background of the probe 81 is the diffuse reflecting plate 11, an image of the high contrast probe 81 can be obtained. Therefore, the coordinate data of the probe 81 can be acquired with good precision, and the alignment of the test pad P of the TCP and the probe 81 of the probe card 8 can be performed more accurately.

The TCP handler 2 moves the 2nd camera 6b by the camera stage 61, and responds to the some test pad P contained in the said 2nd image by the 2nd camera 6b. The probe 81 is photographed (step S11). The image processing unit of the TCP handler 2 acquires coordinate data (X _pd2 , Y _pd2 ) of the tip portions of the plurality of probes 81 included in the fourth image, based on the captured image (fourth image). At the same time, the fourth image is displayed on the monitor (step S12).

The image processing section of the TCP handler 2 is based on the acquired coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ), and the position coordinates and the fourth image of the tip of the probe 81 included in the third image. The angle θ _pd of the straight line (array of the probes 81) passing through the position coordinates of the tip of the probe 81 included in the X-axis direction (horizontal line in FIG. 7) with the straight line in the X axis direction is calculated (step S13). ). Then, a second straight line L2 having the angle θ _pd is generated, and the first straight line L1 and the second straight line L2 are overlaid on the fourth image (current image) and displayed on the monitor. Step 14, see Fig. 7 (d)). In this way, by displaying the first straight line L1 and the second straight line L2 on the monitor, the amount of position shift around the vertical axis can be visually confirmed.

Next, the TCP handler 2 calculates the difference value _Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 obtained in steps S06 and S13. (Step S15). And if the absolute value of the obtained difference value (DELTA) (theta) is larger than predetermined value D (step S16, Yes), the TCP handler 2 will carry out the probe card stage 7 based on the difference value (DELTA) (theta). When the rotational movement is made (step S17) and the absolute value of the difference value Δθ is equal to or less than the predetermined value D (step S18, Yes), the rotational movement of the probe card stage 7 is stopped (step S19). Then, the color of the second straight line L2 is changed (see step S20, Fig. 7 (e)). On the other hand, in step S16, when the absolute value of the difference value Δθ is equal to or less than the predetermined value D (step S16, No), the second straight line L2 is kept in the state without rotating the probe card stage 7. Is changed (step S20). In this way, it is possible to visually confirm on the monitor that the positional shift around the vertical axis of the test pad P and the probe 81 is corrected by changing the color of the second straight line L2.

Next, the TCP handler 2 moves the second camera 6b by the camera stage 61 to correspond to the plurality of test pads P included in the first image by the second camera 6b. The plurality of probes 81 to be photographed are photographed again (step S21). Accordingly, the probe card 8 is moved around the vertical axis in step S17, so that even if the target probe 81 is out of the field of view of the second camera 6b, the image can be taken again. The image processing unit of the TCP handler 2 _acquires the coordinate data X _pb3 and Y _pb3 of each of the tip portions of the plurality of probes 81 included in the fifth image, based on the captured image (fifth image). At the same time, the fifth image is overlaid on the monitor in superimposition with the first image (step S22, see FIG. 7 (f)).

Similarly, the TCP handler 2 moves the second camera 6b by the camera stage 61 to correspond to the plurality of test pads P included in the second image by the second camera 6b. The some probe 81 is image | photographed again (step S23). The image processing unit of the TCP handler 2 _acquires the coordinate data X _pb4 and Y _pb4 of each of the tip portions of the plurality of probes 81 included in the sixth image, based on the captured image (sixth image). At the same time, the sixth image is overlaid on the monitor and superimposed on the second image (step S24, see FIG. 7 (f)).

Subsequently, the TCP handler 2 includes two coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ) of the test pad P, and two coordinate data (X _pb3 ) of the probe 81. The difference values DELTA X and DELTA Y between the test pad P and the probe 81 and the X component from the (Y _pb3 ) and (X _pb4 and Y _pb4 ) are calculated (step S25). And when the absolute value of the obtained difference value (DELTA) X, (DELTA) Y is larger than predetermined value P (step S26, Yes), the TCP handler 2 probes based on difference value (DELTA) X, (DELTA) Y. When the card stage 7 is moved in the X-axis direction and / or the Y-axis direction (step S27), and the absolute values of the difference values ΔX and ΔY become less than or equal to the predetermined value P (steps S28, Yes). ), The movement of the probe card stage 7 is stopped (step S29, see FIG. 7 (g)), and the position of the probe card stage 7 is registered (step S30). On the other hand, when the absolute value of the difference values DELTA X and DELTA Y is less than or equal to the predetermined value P in step S26 (step S26, No), the position is registered without moving the probe card stage 7 (step S30). ).

Finally, the TCP handler 2 removes the diffuse reflection plate 11 from between the carrier tape 5 and the probe card 8 (step S31), and finishes the initial setting.

As described above, according to the TCP handler 2 according to the present embodiment, the alignment of the test pad P of the TCP and the probe 81 of the probe card 8 can be automatically performed, so that the alignment can be precisely performed. It can also be easily performed. In particular, in the present embodiment, the alignment between the test pad P of the TCP and the probe 81 of the probe card 8 is obtained by separately performing alignment between the vertical axis and alignment of the X-axis direction and the Y-axis direction. It can be done correctly.

Next, as another embodiment of the present invention, a TCP handler for performing initial setting regarding the alignment of the test pad P of the TCP and the probe 81 of the probe card 8 by manual operation will be described.

Although the TCP handler which concerns on this embodiment has a structure substantially the same as the said TCP handler 2, Servo motors 711, 722, and 732 which are driving sources of the probe card stage 7 are operated by an operator. It may be driven, or the servo motors 711, 722, and 732 may be omitted, and the probe card stage 7 may operate by operating the operating rod or the like.

In the operation of initial setting of the TCP handler according to the present embodiment, steps S01 to S15 are executed in the same manner as described above. While the TCP handler is calculating the difference value _Δθ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2 (step S15), the operator is displayed on the monitor. While looking at the first straight line L1 and the second straight line L2 (see FIG. 7 (d)), the probe card stage 7 is rotated by manual operation.

Then, the TCP handler changes the color of the second straight line L2 when the absolute value of the difference value DELTA θ becomes less than or equal to the predetermined value D (step S101, Yes) (step S102, Fig. 7 (e)). ) Reference). The operator checks it and stops the rotational movement of the probe card stage 7. After the step S102, the TCP handler removes the diffuse reflection plate 11 from between the carrier tape 5 and the probe card 8 (step S103).

As described above, the operator can move the probe card 8 around the vertical axis by a desired angle amount while looking at the first straight line L1 and the second straight line L2 displayed on the monitor, and at the same time, Since the correction of the positional shift around the vertical axis is completed by the color change of the second straight line L2, the position around the vertical axis of the test pad P of the TCP and the probe 81 of the probe card 8 The fitting can be carried out accurately and easily and furthermore quickly.

Correction of positional deviation in the X-axis direction and / or Y-axis direction by manual operation may be performed by the same method as in the prior art. Specifically, the TCP moves the pusher unit 3 together with the probe 81 to a height that can be clearly recognized by the second camera 6b. The operator moves the probe card stage 7 in the X-axis direction and / or the Y-axis direction by manual operation while looking at the monitor on which the test pad P and the probe 81 are displayed, so that all the test pads P of the TCP are probed. Check if it can come in contact with the probe 81 of the card (8). The position of the probe card stage 7 set in this way is registered (step S104), and the initial setting is completed.

The embodiments described above are described to facilitate understanding of the present invention and are not described to limit the present invention. Therefore, each element disclosed in the said embodiment is intended to include all the design changes and equivalents which belong to the technical scope of this invention.

For example, in the said embodiment, in step S14-S20 or S102, the angle (theta) _pd of the 1st straight line L1 and the 2nd straight line (with or instead of 1st straight line L1 and 2nd straight line L2) A second straight line L2 with respect to the first straight line L1 when the angle θ _pb of L2 is numerically displayed on a monitor or the relative angle between two straight lines (for example, based on the first straight line L1). Angle) may be displayed numerically (see Figs. 7 (d) and (e)). By doing in this way, the position shift amount of TCP and the probe card 8 can be visually confirmed by numerical value.

In order to perform alignment of the test pad P of the TCP and the probe 81 of the probe card 8 by manual operation, the angle θ _pd of the first straight line L1 and the angle of the second straight line L2 ( When the numerical value θ _pb is displayed on the monitor, the probe card stage 7 is placed so that the value of the angle θ _pb of the second straight line L2 is close to the value of the angle θ _pd of the first straight line L1. The probe card stage 7 may be rotated so that the angle value is close to 0 (deg) when the relative angle between the two straight lines is numerically displayed.

Furthermore, in step S14-S20 or S102, the coordinate value of the center part or both ends of a 1st straight line L1 and a 2nd straight line L2 may be numerically displayed on a monitor, and the relative coordinate value (for example, a 1st straight line) between two straight lines may be displayed. The coordinate value of the center part or both ends of the 2nd straight line L2 with respect to the center part or both ends of the said 1st straight line L1 at the time of making reference to L1 may be numerically displayed on a monitor. By doing in this way, the position shift amount of TCP and the probe card 8 can be visually confirmed by numerical value.

Further, during the rotational movement of the probe card stage 7 by step S17 or manual operation, the difference value Δ between the angle θ _pd of the first straight line L1 and the angle θ _pb of the second straight line L2. Depending on the magnitude of θ), pulse sounds of predetermined pulse intervals, sounds of predetermined frequencies, or sounds that are sequentially changed to predetermined tones can be generated, so that the operator can easily recognize the alignment state by hearing. good.

In addition, when the difference value (DELTA) (theta) of the angle (theta) _pd of the 1st straight line L1 and the angle (theta) _pb of the 2nd straight line L2 becomes below predetermined value D in step S20 or S102, In order to notify completion of the alignment around the vertical axis, a message may be displayed on the monitor, or an external lighting device may be provided in the TCP handler 2 to lightly display the external lighting device. By alerting in this way, the operator can confirm that the alignment around the vertical axis is completed.

Furthermore, in the above embodiment, the alignment around the vertical axis of the TCP and the probe card 8 and the alignment in the plane direction are performed separately, but the present invention is not limited to this, and both may be performed simultaneously. Specifically, the coordinate data (X _pd1 , Y _pd1 ) and (X _pd2 , Y _pd2 ) of the test pad P acquired in steps S03 and S05, and the coordinate data (X) of the probe 81 acquired in steps S09 and S11. _{Based on pd1} , Y _pd1 ) and (X _pd2 , Y _pd2 ), the position shift amount around the vertical axis and the shift amount in the X-axis direction and the Y-axis direction are calculated, and the probe card stage 7 is based on the position shift amount. May be moved around the vertical axis / X axis direction / Y axis direction to perform alignment of the test pad P and the probe 81. As a result, the working time of the misalignment correction between the TCP and the probe card 8 is further shortened.

The present invention is very useful for accurately and easily performing the positioning operation of the contact terminals of the contact portion and the external terminals of the TCP in the initial setting of the TCP handling apparatus.

Claims (32)

A plurality of TCPs may be conveyed, and a plurality of TCPs may be provided for the sequential test by pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting external terminals of TCP to the connection terminals. As a TCP handling device, A moving device capable of moving the contact portion provided with the plurality of connection terminals around its planar direction and vertical axis, and an imaging device capable of photographing the external terminal of the TCP under test and the connection terminal, Photographing the external terminal of the TCP under test by the imaging device to acquire the coordinate data of the external terminal, and simultaneously acquiring the connection terminal to obtain the coordinate data of the connection terminal, From the coordinate data of the external terminal and the coordinate data of the connection terminal, the positional displacement amount of the external terminal and the connection terminal is obtained, And the contact portion is moved by the moving device based on the positional displacement amount to perform alignment of the connection terminal with respect to an external terminal of the TCP under test. The method according to claim 1, Firstly, the coordinate data of the external terminal and the coordinate data of the connection terminal are acquired to obtain a positional shift amount around the vertical axis of the external terminal and the connection terminal, and the moving device based on the positional shift amount around the vertical axis. By moving the contact around the vertical axis, Secondly, the coordinate data of the connection terminal is obtained again to obtain the positional displacement amount in the planar direction of the external terminal and the connection terminal, and the contact portion is planarized by the moving device based on the positional displacement amount in the planar direction. TCP handling device, characterized in that the movement in the direction. The method according to claim 1, The positional shift amount around the vertical axis of the external terminal and the connecting terminal is the angle of the first straight line obtained from two or more coordinate data of the external terminal and the angle of the second straight line obtained from two or more coordinate data of the connecting terminal. A TCP handling device, which is obtained from a car. The method according to claim 3, The TCP handling apparatus further includes a display device, And the first straight line and / or the second straight line can be displayed on the display device. The method according to claim 4, And the first straight line is overlaid on the image of the external terminal photographed by the imaging device, and can be overlaid on the display device. The method according to claim 4, And the second straight line is overlaid on the image of the connection terminal photographed by the imaging device, and can be overlaid on the display device. The method according to claim 4, And a value of the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device. The method according to claim 4, The contact portion is moved around the vertical axis to change the color of the first straight line and / or the second straight line displayed on the display device when the angle difference between the first straight line and the second straight line becomes smaller than a predetermined value. TCP handling apparatus, characterized in that. The method according to claim 4, And a notification sound when the angle of the first straight line and the second straight line becomes smaller than a predetermined value by moving the contact portion around a vertical axis. The method according to claim 3, The TCP handling apparatus further includes an imaging device moving device capable of moving the imaging device. And the imaging device photographs two or more locations of the external terminal and two or more locations of the connection terminal by movement by the imaging device moving device. The method according to claim 1, The TCP handling apparatus further comprises a movable diffuse reflector, And the diffusion reflecting plate is inserted between the connection terminal and the carrier tape when photographing the connection terminal of the contact portion. A plurality of TCPs may be conveyed, and a plurality of TCPs may be provided for the sequential test by pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting external terminals of TCP to the connection terminals. As a TCP handling device, An image pickup device capable of shooting the external terminal of the TCP under test and the connection terminal, and a display device, The contact portion provided with the plurality of connection terminals is movable in both the planar direction and the vertical axis, The first straight line obtained from the coordinate data of the external terminal obtained by photographing two or more external terminals of the TCP under test by the imaging device and / or the two or more locations of the connection terminal acquired by the imaging device; And a second straight line obtained from the coordinate data of the connection terminal can be displayed on the display device. The method according to claim 12, And the first straight line is overlaid on the image of the external terminal photographed by the imaging device, and can be overlaid on the display device. The method according to claim 12, And the second straight line is overlaid on the image of the connection terminal photographed by the imaging device, and can be overlaid on the display device. The method according to claim 12, And the coordinate angle of the inclination angle and / or the predetermined point of the first straight line and / or the second straight line is further displayed on the display device. The method according to claim 12, And a value of the difference between the angle of the first straight line and the angle of the second straight line can be displayed on the display device. The method according to claim 12, The color of the first straight line and / or the second straight line displayed on the display device when the angle between the first straight line and the second straight line becomes smaller than a predetermined value by moving the contact portion around the vertical axis. TCP handling device, characterized in that for changing. The method according to claim 12, And a notification sound when the contact portion is moved around a vertical axis and the angle difference between the first straight line and the second straight line is smaller than a predetermined value. The method according to claim 12, The TCP handling apparatus further includes an imaging device moving device capable of moving the imaging device. And the imaging device photographs two or more locations of the external terminal and two or more locations of the connection terminal by movement by the imaging device moving device. The method according to claim 12, The TCP handling apparatus further comprises a movable diffuse reflector, And the diffusion reflecting plate is inserted between the connection terminal and the carrier tape when photographing the connection terminal of the contact portion. A plurality of TCPs may be conveyed, and a plurality of TCPs may be provided for the sequential test by pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting external terminals of TCP to the connection terminals. A method of positioning a connection terminal in a TCP handling device, Firstly, the coordinate data of the external terminal and the coordinate data of the connection terminal are acquired to obtain the positional displacement amount around the vertical axis of the external terminal and the connection terminal, and the contact portion is based on the positional displacement amount around the vertical axis. Move around the vertical axis, Second, acquiring the coordinate data of the connection terminal again, obtaining the positional displacement amount in the planar direction of the external terminal and the connection terminal, and moving the contact portion in the planar direction based on the positional displacement amount in the planar direction. Positioning method of the connection terminal characterized in that. A plurality of TCPs may be conveyed, and a plurality of TCPs may be provided for the sequential test by pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting external terminals of TCP to the connection terminals. A method of positioning a connection terminal in a TCP handling device, The coordinate data of the external terminal and the coordinate data of the connection terminal are acquired to obtain a positional displacement amount around the vertical axis of the external terminal and the connection terminal and a positional displacement amount in the planar direction, and the contact portion based on the positional displacement amount. A method of aligning a connection terminal, characterized in that for moving around the vertical axis and / or in the plane direction. The method according to claim 21 or 22, The positional shift amount around the vertical axis of the external terminal and the connecting terminal is the angle of the first straight line obtained from two or more coordinate data of the external terminal and the angle of the second straight line obtained from two or more coordinate data of the connecting terminal. A method for aligning a connection terminal, which is obtained from a car. The method according to claim 23, And a value of the difference between the angle of the first straight line and the angle of the second straight line is displayed on the display device. The method according to claim 23, The first straight line and the second straight line are displayed on the display device, the contact portion is moved around the vertical axis, and when the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value, And the color of the first straight line and / or the second straight line to be displayed. The method according to claim 23, And a notification sound when the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value by moving the contact portion around the vertical axis. The method according to claim 21 or 22, And a diffusion reflecting plate is inserted between the connection terminal and the carrier tape when imaging the connection terminal of the contact portion. A plurality of TCPs may be conveyed, and a plurality of TCPs may be provided for the sequential test by pressing a carrier tape to a plurality of connection terminals of a contact portion electrically connected to the test head, and connecting external terminals of TCP to the connection terminals. A method of positioning a connection terminal in a TCP handling device, 2 or more locations of the external terminals of the TCP under test are photographed by the imaging device, and the first straight line obtained from the coordinate data of the obtained external terminals is displayed on the display device. Photographing two or more places of the said connection terminal with an imaging device, and displaying the 2nd straight line obtained from the acquired coordinate data of the said connection terminal with a said 1st straight line on a display apparatus, And an operator can move the contact portion around the vertical axis while looking at the first straight line and the second straight line displayed on the display device. The method according to claim 28, And a value of the difference between the angle of the first straight line and the angle of the second straight line is displayed on the display device. The method according to claim 28, The color of the first straight line and / or the second straight line displayed on the display device when the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value by moving the contact portion around the vertical axis. Positioning method of the connection terminal, characterized in that for changing. The method according to claim 28, And a notification sound when the difference between the angle of the first straight line and the angle of the second straight line becomes smaller than a predetermined value by moving the contact portion around the vertical axis. The method according to claim 28, And a diffusion reflecting plate is inserted between the connection terminal and the carrier tape when imaging the connection terminal of the contact portion.

Images