KR20070098060A - Signal detector and signal detection system - Google Patents

Abstract

A signal detector and a signal detection system are provided to exactly detect a jittered signal accompanied with a sudden change in voltage by judging whether voltage components correspond to the jittered signal or not, on the basis of the change rate of time. A signal detector(1) for detecting a jittered signal accompanied with the sudden change of voltage, included in an electric signal generated by a test device inspecting electrical characteristics of an object is composed of a component extracting unit(9) extracting voltage components whose absolute value of a voltage value is over a predetermined value, from the electric signal; a change rate deriving unit(11) deriving time change rate of the voltage value in the voltage components extracted by the component extracting unit; a judging unit(13) judging whether the voltage components correspond to the jittered signal or not, on the basis of the time change rate of the voltage value; and an informing unit(14) informing a user of the judgment result if the judging unit determines that at least the voltage components correspond to the jittered signal.

Description

SIGNAL DETECTOR AND SIGNAL DETECTION SYSTEM}

1 is a schematic diagram showing a use mode of a signal detection device according to Embodiment 1;

2 is a schematic block diagram showing the configuration of a signal detection apparatus;

3 is a flowchart for explaining the operation of the signal detection apparatus;

4 is a graph showing time series data of a power supply voltage signal and a time change rate thereof;

5 is a schematic block diagram showing a configuration of a signal detection apparatus according to the second embodiment;

6 is a schematic block diagram showing a configuration of a signal detection apparatus according to the third embodiment;

7 is a schematic diagram illustrating a configuration of a signal detection system according to the fourth embodiment.

※ Explanation of code for main part of drawing

1: Signal detection device 2: Inspection object

3: Inspection device 4: Inspection device body

5: test head 6: cable wiring

6a: card line 6b: sense line

6c: force line 6d: return line

6e: HGND line 8: Signal input part

9 component extraction unit 10 strength filter

11: change rate derivation unit 12: time zone (부 時 部)

13 judgment unit 14 notice

15 control unit 16 rise detection unit

17: falling detection unit 20: signal detection device

21: pattern database 21: occurrence pattern database

22: defective estimation unit 23: control unit

25: signal detection device 26: generation history record

27: repair determination unit 28: control unit

30: signal detection device 31: network

32: management server

The present invention is a signal detection device and a signal detection device using a signal detection device and a signal detection device for detecting an irregular signal accompanied by a sudden voltage change as a signal that can be mixed in the electrical signal generated by the inspection device for inspecting the electrical characteristics of a predetermined inspection target It is about the system.

Background Art Conventionally, inspection apparatuses for inspecting electrical characteristics of inspection targets, such as semiconductor devices, are known. The configuration of such an inspection apparatus includes an inspection apparatus main body that generates and outputs a predetermined electrical signal such as a power signal or an inspection signal for driving an inspection object, and is connected to the inspection apparatus main body via a predetermined wiring cable, It has a structure that can be in electrical contact with the test object to have a test head for transmitting an electrical signal, such as a test signal output from the test apparatus main body to the test object, and at the same time transmits a response signal from the test object to the test apparatus body. It is general (for example, refer patent document 1).

The inspection apparatus main body has a function of generating and outputting an electrical signal, and also has a function of previously storing a pattern of a response signal corresponding to the inspection signal. And the inspection apparatus main body compares the pattern of the response signal memorize | stored with the pattern of the response signal actually obtained from the inspection object, and test | inspects the electrical characteristic of an inspection object, and judges the good or defective product.

[Patent Document 1]

Japanese Patent Application Laid-Open No. 11-030647

However, the conventional inspection apparatus adversely affects the inspection object when an irregular signal such as a spike voltage accompanied by a sudden voltage change is mixed in an electrical signal such as a power supply voltage signal outputted from the inspection apparatus body to the inspection object. Have a task Hereinafter, such a subject will be described in detail.

When an irregular signal accompanied by a sudden voltage change is input to the inspection object, for example, an irregular signal having a peak voltage higher than the rated voltage of the inspection object is input, thereby deteriorating and destroying the electrical characteristics of the inspection object. In particular, recent inspection targets have a tendency to decrease the breakdown voltage with miniaturization, so the rated voltage is also set to a low value, which may be easily broken by input of an irregular signal. In addition, even if the damage is not reached, there is a high possibility of exerting a certain influence on the inspection object. For example, when the inspection using the inspection device is not detected, the deterioration of characteristics, etc., is significantly reduced. There is a possibility of problems such as.

Of course, in the conventional inspection apparatus, it is generally designed in advance so that no sudden voltage change occurs in the electrical signal generated by the inspection apparatus main body. However, an error occurs during a program that determines the contents of the electric signal generated by controlling the driving of the inspection apparatus main body, or an irregular signal occurs in the electrical signal generated by the inspection apparatus main body due to aging of electronic circuits constituting the inspection apparatus main body. It is very difficult to prevent completely.

Therefore, in the conventional inspection apparatus, in order to confirm whether or not it is caused by an irregular signal when a problem such as a failure occurs in the inspection object, the occurrence of the irregular signal was detected by observing the waveform of the electrical signal with an oscilloscope or the like afterwards. . For example, when it is determined that an irregular signal has been generated in a predetermined inspection apparatus, a countermeasure such as re-inspecting another inspection apparatus for an inspection object whose electrical characteristics have been inspected by such an inspection apparatus is taken. I was losing.

However, such a response is not enough. In other words, depending on the waveform of the irregular signal or the like, the inspection object may not be destroyed as described above. In such a case, the oscilloscope is not checked from the beginning after the fact and confirms the occurrence of the irregular signal. Because it is very difficult. Therefore, in the conventional inspection method, it was only possible to obtain a very limited effect that it is possible to recognize only that the inspection object is destroyed and that an irregular signal has occurred after the fact.

SUMMARY OF THE INVENTION The present invention has been made in view of the above and realizes a signal detection device and a signal detection system capable of quickly detecting an irregular signal that may be included in an electrical signal generated by an inspection device regardless of whether an inspection object is destroyed. For the purpose of

In order to solve the above problems and achieve the object, the signal detection device according to claim 1 is a signal that can be mixed in an electrical signal generated by an inspection device that inspects an electrical characteristic of a predetermined inspection object, and is accompanied by an unexpected voltage fluctuation. A signal detecting apparatus for detecting an irregular signal, comprising: component extracting means for extracting a voltage component whose absolute value of a voltage value is greater than or equal to a predetermined value from the electrical signal, and a voltage component extracted by the component extracting means; Change rate deriving means for deriving a rate of change in time of the voltage value of?, And determining means for determining whether the voltage component corresponds to an irregular signal based on the time change rate of the voltage value derived by the change rate deriving means, and at least the When it is determined by the determination means that the voltage component corresponds to the irregular signal, the determination result is It characterized in that it includes a notice means for the user to notice.

According to the invention of claim 1, since the time change rate is derived for the voltage component extracted from the electric signal, and a determination is made as to whether or not the voltage component corresponds to an irregular signal based on the time change rate. It is possible to reliably detect an irregular signal accompanying sudden voltage fluctuations unlike ordinary components originally included in the process.

The signal detection device according to claim 2 is the power supply signal according to the invention, wherein the electric signal is output from the inspection device to the inspection object at the time of inspection and functions as a driving power of the inspection apparatus. It is done.

Further, in the above-described invention, the signal detecting apparatus according to claim 3 is characterized in that the determining means has a predetermined timing and a negative value in a period in which the time change rate becomes a positive value. It is characterized by determining whether or not the voltage component corresponds to an irregular signal on the basis of a time interval between a predetermined timing in a period.

Further, in the above-described invention, the signal detecting apparatus according to claim 4 includes rising detection means for detecting a change from 0 to a positive value of the time change rate, and a change from 0 to a negative value of the time change rate. Further comprising falling detection means for detecting, wherein the determining means is configured to correct the voltage component by the irregular signal based on a time interval between the detection timing of the rising change detecting means and the detection timing of the falling change detecting means. It is characterized by determining whether or not.

In the signal detecting apparatus according to claim 5, in the above-described invention, the determining means is used when the time interval becomes less than or equal to a predetermined threshold smaller than the minimum value of the time interval in the normal component of the electric signal. It is characterized by determining that the voltage component corresponds to an irregular signal.

Further, in the above-described invention, the signal detecting apparatus according to claim 6 is a defective guessing means for guessing a defective portion in the inspection apparatus on the basis of the occurrence pattern of the voltage component determined to correspond to an irregular signal by the determining means. Characterized in that further provided.

Further, in the above-described invention, the signal detection device according to claim 7 further includes a generation pattern database which records a correspondence relationship between the occurrence pattern of the irregular signal and the defective portion of the inspection apparatus, wherein the failure estimation means includes: Based on the occurrence pattern of the voltage component determined to correspond to the irregular signal by the determination means, the defective portion of the inspection apparatus is estimated while referring to the correspondence recorded in the database.

In the above-described invention, the signal detecting apparatus according to claim 8 includes a generation history recording unit for recording a generation history of an irregular signal, and a repair of the inspection apparatus based on a generation history of an irregular signal recorded in the generation history recording unit. Characterized in that it further comprises a repair determination means for determining whether or not the need.

Further, the signal detection system according to claim 9 is a signal that can be mixed in electrical signals generated by a plurality of inspection apparatuses for inspecting electrical characteristics of a predetermined inspection object, and a signal for detecting an irregular signal accompanied by a sudden voltage change. A detection system comprising: component extraction means for extracting a voltage component disposed corresponding to each of a plurality of the inspection apparatuses, the voltage component having a voltage value equal to or greater than a predetermined value from the electrical signal, and the voltage component extracted by the component extraction means; Change rate deriving means for deriving a rate of change of the voltage value in the apparatus, and determining means for determining whether the voltage component corresponds to an irregular signal based on the time change rate of the voltage value derived by the change rate deriving means. Input a plurality of signal detection devices and determination results obtained by the plurality of signal detection devices W at least and in that it includes a management server provided with a notice means for the determination result to the effect that the voltage component corresponding to the random signal notice the determination result obtained in the case the user is characterized.

According to the invention of claim 9, in the case where a plurality of signal detection apparatuses are provided, the management server is provided with a plurality of signal detection apparatuses by providing a management server for inputting the determination result obtained by each signal detection apparatus and reporting the determination result. It is possible to collectively perform the notification of the obtained determination result.

EMBODIMENT OF THE INVENTION Below, the best form (henceforth only an "embodiment") for implementing the signal detection apparatus and signal detection system which concern on this invention is demonstrated. In addition, of course, this invention is not limited by embodiment shown below.

(Embodiment 1)

First, the signal detection device according to the first embodiment will be described. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram which shows the use form of the signal detection apparatus which concerns on Embodiment 1. As shown in FIG. 1, the signal detection device 1 according to the first embodiment is a sudden occurrence that may be included in an electrical signal generated by the inspection device 3 that performs inspection of electrical characteristics or the like on the inspection object 2. It is for detecting an irregular signal accompanied by a voltage variation.

Specifically, the inspection apparatus 3 has the function of electrically connecting the inspection apparatus main body 4 which produces | generates an electrical signal, and the inspection object 2, and the electrical signal produced | generated by the inspection apparatus main body 4 The test head 5 and the cable wiring 6 which electrically connect between the test | inspection apparatus main body 4 and the test head 5 for outputting to the test | inspection object 2 are provided. With respect to the inspection apparatus 3 having such a configuration, the signal detection apparatus 1 according to the first embodiment is disposed above the cable wiring 6, so that it is output from the inspection apparatus main body 4 to the test head 5. In the first embodiment, the electric signal has a function of detecting an irregular signal that can be included in a power supply voltage signal functioning as a driving power of the inspection target 2.

The inspection apparatus main body 4 has a function of generating and outputting an electrical signal necessary for inspection, and a function of analyzing a response signal output from the inspection object 2 and the like. In the first embodiment, the inspection apparatus main body 4 generates and outputs a power supply voltage signal which is at least used as driving power of the inspection object 2 as an electrical signal required for inspection.

The test head 5 is provided with a probe (not shown) for electrically connecting with the inspection object 2 and has a structure electrically connected with the cable wiring 6. By having such a configuration, the test head 5 is electrically connected between the inspection apparatus main body 4 and the inspection object via the cable wiring 6 to enable input and output of electrical signals to the inspection object 2. Let's do it.

The cable wiring 6 is for electrically connecting between the tester main body 4 and the test head 5. The cable wiring 6 has a function of propagating at least an electrical signal generated by the inspection apparatus main body 4, but in the first embodiment, the cable wiring 6 is one of the electrical signals generated by the inspection apparatus main body 4; At the time of inspection, at least the power supply voltage signal used to drive the inspection object 2 is propagated.

Next, the structure of the signal detection apparatus 1 which concerns on this Embodiment 1 is demonstrated. 2 is a schematic block diagram showing the configuration of the signal detection apparatus 1. As shown in FIG. 2, the signal detection device 1 includes a signal input unit 8 for inputting a power supply voltage signal, which is an example of an electrical signal generated by the inspection device main body 4, and a voltage component having a voltage value having a predetermined intensity. A component extraction part 9 which extracts this is provided. In addition, the signal detection device 1 includes a change rate derivation unit 11 which derives a time change rate of the voltage value in the voltage component extracted by the component extraction unit 9 and a change rate derivation unit 11. The time portion 12 derives a time interval between the predetermined timing during the period in which the rate of time change is positive, and the predetermined timing during the period in which the time rate of change has a negative value. A judging section 13 for judging whether the extracted voltage component corresponds to an irregular signal, a notifying section 14 for notifying the judgment result, and a signal input section 8 to a notifying section The control part 15 which controls the drive state of 14 is provided.

The signal input unit 8 is for inputting a power supply voltage signal generated by the inspection apparatus main body 4 and output to the inspection object 2 via the cable wiring 6. Various configurations can be used as the configuration for realizing such a function. In the first embodiment, for example, a signal branching mechanism is arranged in advance on the cable wiring 6, and the signal input section 8 is used for general signal input / output. It is assumed that an interface is provided. In the first embodiment, signal input is performed in a form corresponding to the structure of the cable wiring 6. Specifically, the signal input unit 8 is a guide provided in the cable wiring 6 as shown in FIG. 2. By inputting an electric signal propagating through the sense line 6b and the return line 6d among the line 6a, sense line 6b, force line 6c, return line 6d, and HGND line 6e, Input the voltage signal.

The component extraction unit 9 is for extracting a voltage component that is determined to have an absolute value greater than a predetermined threshold voltage. Specifically, the component extraction section 9 includes an intensity filter 10 that allows only a component whose absolute value is greater than a predetermined threshold voltage value to pass through the power supply voltage signal input through the signal input section 8. The component extraction unit 9 has a function of outputting the voltage component that has passed through the intensity filter 10 to the control unit 15. The threshold voltage value of the intensity filter 10 may affect, for example, the influence of something on the inspection object 2, that is, the product life decreases even if the inspection object 2 is not destroyed. It is preferable to set it as a value which can be extended, and you may set it as independent independently according to the test | inspection object (2). It is also preferable to perform an amplification process so that the electric signal (power supply voltage signal) input by the component extraction section 9 becomes a voltage value suitable for determining whether or not it is an irregular signal.

The change rate derivation section 11 is for deriving a time change rate of the voltage value in the voltage component extracted by the component extraction section 9. Although any arbitrary thing may be used as a change rate to derive, in this Embodiment 1, the change rate derivation part 11 shall derive the time differential value of a voltage component as an example of time change rate.

The timekeeping section 12 has a predetermined timing in a period in which the time change rate becomes a positive value with respect to the time change rate of the voltage component derived by the change rate derivation unit 11, and in a period in which the time change rate becomes a negative value. It is for deriving a time interval between and with a predetermined timing. Specifically, the timekeeping unit 12 has a configuration of sequentially inputting the time change rate of the voltage value of the voltage component derived by the change rate derivation unit 11 as time series data, and at the same time, the timing of the rise of time series data of such time change rate ( That is, the rising detector 16 detects the timing at which the rate of change of time changes from 0 to a positive value, and the falling detects the timing of falling of the time series data (ie, the timing at which the rate of change of time changes from 0 to a negative value). The detector 17 is provided. Under such a configuration, the timekeeping unit 12 grasps the timing of the rise of the time change rate as a predetermined timing in the period in which the time change rate becomes a positive value, and as the predetermined timing in the period in which the time change rate becomes a negative value. It has a function of grasping the timing of falling of the rate of change of time, deriving a time interval between them, and outputting the derivation result to the controller 15. In addition, the rise detection part 16 and the fall detection part 17 can be implement | achieved with a predetermined comparator (comparator), respectively.

The determination unit 13 has a function of determining whether or not the voltage component extracted by the component extraction unit 9 corresponds to an irregular signal based on the time change rate of the voltage value. Specifically, the judging section 13 according to the first embodiment performs the judging operation based on the time interval relating to the rate of change of time derived by the timekeeping section 12. More specifically, the time interval has a predetermined power supply. It has a function of judging that a voltage component corresponds to an irregular signal in the case of a predetermined threshold value smaller than the minimum value of the time interval in the normal signal contained in a voltage signal.

The notification unit 14 is for notifying the determination result by the determination unit 13. For example, when the determination unit 13 obtains a determination result indicating that a predetermined voltage component corresponds to an irregular signal. It has a function of notifying the user of the signal detection apparatus that an irregular signal has occurred. The notification unit 14 may be configured by, for example, a display that visually displays the determination result, or may be configured to notify the determination result by a predetermined warning sound. For example, the signal detection apparatus according to the first embodiment is connected to a network such as the Internet, and the notification unit 14 transmits an e-mail including the determination result to the user's terminal via such a network. It may be of.

Next, the operation of the signal detection apparatus according to the first embodiment will be described. 3 is a flowchart for explaining the operation of the signal detection apparatus according to the present embodiment, and FIG. 4 is a schematic graph for explaining the operation of the signal detection apparatus. 3 and 4, the operation of the signal detection apparatus will be described below.

First, the signal detecting device extracts a voltage component whose absolute value of the voltage value is greater than or equal to a predetermined value from the power supply voltage signal by the component extraction unit 9 (step S 101), and is extracted by the change rate derivation unit 11. The rate of time change of the voltage value in the voltage component is derived (step S102). And the signal detection apparatus is the time interval between the predetermined timing in the period by which the time change rate becomes a positive value by the time display part 12, and the predetermined timing in the period in which the time change rate becomes a negative value. (Step S103). In the first embodiment, as described above, such timings use rising timings and falling timings of time change rates, respectively, and these timings are detected by the rising detection unit 16 and the falling detection unit 17.

Thereafter, the signal detecting apparatus determines whether or not the time interval derived in step S103 by the determination unit 13 is equal to or less than a predetermined threshold value (step S104). If the time interval is less than or equal to the threshold (step S104, Yes), the determination unit 13 determines that the voltage component corresponds to the irregular signal (step S105), and the determination result is notified by the notification unit 14. On the other hand, when the time interval is larger than the threshold (step S104, No), the determination unit 13 determines that the voltage component is other than the irregular signal, for example, the normal component constituting the power supply voltage signal (step S106), the determination result is notified by the notification unit 14.

The processing in step S101 is for excluding noise components that do not have a significant effect on the inspection object 2 from the power supply voltage signal. The signal detection device according to the first embodiment is for detecting an irregular signal accompanied by a voltage change such that the inspection object 2 does not have a breakdown or breakdown even if the breakdown or breakdown does not occur. This is because it is not necessary to analyze the minute voltage component whose absolute value is lower than the predetermined threshold value.

In addition, the signal detecting apparatus according to the first embodiment has a predetermined timing in a period in which the time change rate of the extracted voltage component becomes a positive value and a predetermined timing in a period in which a negative value is obtained, as shown in steps S10-S104. The presence or absence of an irregular signal is determined using the time interval between and. Hereinafter, such a determination mechanism will be described in detail.

4 is a graph showing the time variation of the voltage value of the power supply voltage signal and the time variation of the rate of change of the power supply voltage signal. Specifically, the curve l ₁ in FIG. 4 shows the time variation of the power supply voltage signal, and the curve l ₂ is a schematic diagram showing the time variation of the rate of change of the power supply voltage signal. The normal component of the power supply voltage signal is generally formed by a pulse signal, and the irregular signal to be detected is generated in the form of an unexpected voltage fluctuation among such pulse signals. In the example shown in Figure 4 with the other hand the rise and fall of the pulse signal is the normal component each at time (t _1, t _3), as shown in curve (l ₁₎ occurs, an abrupt voltage change at the time (t ₂₎ An accompanying irregular signal is occurring.

With respect to the power supply voltage signal having such a configuration, the first embodiment makes it possible to detect the irregular signal by separating the irregular signal from the normal component by utilizing the time change rate of the voltage component. As shown in the curve l ₂ of FIG. 4, in the graph of the temporal change rate of the voltage component, peaks (times t ₁ and t ₃ ) attributable to rising and falling of the normal component (pulse signal) and peaks corresponding to an irregular signal are shown. (Time t ₂ ) occurs. Here, when the peaks in the curve l ₂ are compared, the time intervals between peaks having only positive or negative values in the time portion corresponding to the normal component are somewhat larger than those in the example of FIG. t ₃ -t ₁ )], on the other hand, in the portion due to the irregular signal, the time interval between the positive peak and the negative peak is very small. In this way, the irregular signal has a characteristic of sudden voltage fluctuation, that is, the voltage value changes instantaneously and returns to its original value immediately, so that the rate of change of the irregular signal becomes a positive period and a negative period. The time interval between and is very small.

The signal detection apparatus according to the first embodiment detects an irregular signal by using the difference of such time intervals. That is, in Embodiment 1, the time interval between the predetermined timing of the period in which the rate of change of time becomes a positive value and the predetermined timing of the period in which the time period becomes a negative value is derived in advance with respect to the normal component and derived. The determination unit 13 stores in advance a value smaller than the time interval as a threshold. In step S104, the determination unit 13 compares the threshold set in advance and the time interval in the rate of change of the voltage component derived in step S103 to determine whether the voltage component to be determined is an irregular signal, a normal component, or the like. Is judged.

Since it is judged whether or not it corresponds to an irregular signal in this manner, the signal detection device according to the first embodiment can detect irregular signals with high accuracy. As shown in the curve l ₂ of FIG. 4, since the irregular signal accompanied by sudden voltage fluctuations is significantly different in time series variation pattern of the rate of change in time compared with the normal component of the power supply voltage signal formed by the pulse signal or the like, It is possible to easily discriminate both, and it is possible to detect irregular signals with high accuracy with a simple configuration.

(Embodiment 2)

Next, a signal detection apparatus according to the second embodiment will be described. The signal detection apparatus according to the second embodiment is provided with a mechanism for estimating a defective portion of the inspection apparatus main body that generates an electric signal in which the irregular signal is mixed based on the detected pattern of the irregular signal.

5 is a schematic block diagram showing the configuration of the signal detection apparatus 20 according to the second embodiment. As shown in FIG. 5, the signal detection device 20 according to the second embodiment is the same as the signal detection device 1 according to the first embodiment, the signal input unit 8, the component extraction unit 9, and the intensity filter 10. ), A change rate derivation unit 11, a timekeeping unit 12, a determination unit 13, a notice unit 14, a rise detection unit 16, and a fall detection unit 17. A defect estimator for estimating a defective portion while referring to the occurrence pattern database 21 which records a correspondence relationship with the defective portion in the apparatus main body, and the information recorded in the occurrence pattern database 21 based on the detected irregular signal waveform. (22) and a control unit (23) for controlling the driving state of each component including them.

The occurrence pattern database 21 records, for example, the correspondence relationship between the occurrence pattern of irregular signals generated in the past with respect to the inspection apparatus of the same configuration and the defective part of the inspection apparatus. As the occurrence pattern of the irregular signal recorded in the occurrence pattern database 21, for example, parameters related to the waveform of the irregular signal detected in addition to the occurrence interval of the irregular signal, for example, data such as peak voltage, half value width, Itself. The data derived from the detected irregular signal may be recorded as the generation pattern in the generation pattern database 21 as information derived from the detected irregular signal even if data other than these are used.

The failure estimating unit 22 is for estimating a defective portion of the inspection apparatus that is the source of the irregular signal based on the occurrence pattern of the irregular signal. Specifically, the failure estimating unit 22 grasps the occurrence pattern of the voltage component determined by the determination unit 13 to correspond to the irregular signal, and is the same as the occurrence pattern detected from the information recorded in the generation pattern database 21. It has a function of searching for a similar thing, acquiring the information of the defective part corresponding to the detected occurrence pattern from the information recorded in the occurrence pattern database 21 and outputting it to the control unit 23. The acquired defective part information is output to the notification part 14 via the control part 23, and the information about the defective part estimated to correspond to the detected irregular signal is notified by the notification part 14. As shown in FIG.

As described above, irregular signals are caused by errors in a program that determines the contents of electrical signals to be generated, or aged deterioration of electronic circuits constituting an inspection device. It is thought to be. Therefore, by recording the correspondence between the occurrence pattern of the irregular signal generated in the past and the defective part in the same kind of inspection device in the occurrence pattern database 21, not only the detection of the irregular signal but also the defective portion generated by the inspection device are estimated. It is possible to do By providing the occurrence pattern database 21 and the failure estimating unit 22 in this manner, the signal detection device according to the second embodiment, in addition to the advantages in the first embodiment, detects a defective portion of the inspection device when an irregular signal is detected. It is possible to estimate, which has the advantage of greatly reducing the effort required for repair and the like.

(Embodiment 3)

Next, a signal detection apparatus according to the third embodiment will be described. The signal detection apparatus according to the third embodiment has a mechanism for estimating whether the inspection apparatus needs to be repaired based on the occurrence history of the irregular signal.

6 is a schematic block diagram showing a configuration of a signal detection apparatus according to the third embodiment. As shown in FIG. 6, the signal detection apparatus 25 which concerns on Embodiment 3 is the signal input part 8, the component extraction part 9, the intensity filter 10, the change rate derivation part 11, and the time signal part similarly to Embodiment 1. (12), the determination section 13, the notice section 14, the rise detection section 16 and the fall detection section 17, while the generation history recording section 26 for recording the occurrence history of the detected irregular signal and And a repair determination unit 27 for determining whether or not the inspection apparatus 3 needs to be repaired based on the occurrence history of the irregular signal recorded in the occurrence history recording unit 26, and controlling the driving state of each component including the same. The control unit 28 is provided.

The generation history recording unit 26 is for recording the generation history of the voltage component determined by the determination unit 13 to correspond to the irregular signal. The specific contents of the occurrence history recorded in the occurrence history recording section 26 may be recorded only at the time of occurrence of the irregular signal, but more preferably the waveform of the generated irregular signal is also recorded.

The repair determination unit 27 has a function of determining whether the inspection apparatus needs to be repaired based on the occurrence history of the irregular signal recorded in the occurrence history recording unit 26. Specifically, the repair determination unit 27 grasps the time change in the frequency of occurrence of the irregular signal, for example, on the basis of the recorded occurrence of the irregular signal, so that a defective part requiring repair, for example, in an electronic circuit inside the inspection apparatus. It has a function of judging whether or not it exists. The determination result obtained by the repair determination unit 27 is output to the notification unit 14 via the control unit 28, and the user repairs the inspection apparatus 3 according to the notification contents by the notification unit 14. Recognize whether it is necessary.

In addition to the function of the signal detection device according to the first embodiment, the signal detection device according to the third embodiment has a function of determining whether repair of the inspection device 3 that is the detection target of the irregular signal is necessary. Although the inspection apparatus 3 may be repaired uniformly when an irregular signal is detected, in the operation | movement of the actual inspection apparatus 3, such correspondence has a problem in operation cost. That is, in the case of the inspection apparatus 3 which rarely generates an irregular signal, it is necessary not only to closely inspect the presence or absence of deterioration of the inspection object 2 when the irregular signal is detected, but also to be surely promptly repaired. There is also a case where it is judged to continue to use from the viewpoint of operating costs. On the other hand, in the case of the inspection apparatus 3 in which irregular signals frequently occur, the inspection apparatus 3 leads to frequent occurrences such as deterioration of the product life of the inspection object 2, and thus the inspection apparatus 3 can be quickly repaired or replaced with a new one. Is preferable.

For this reason, in the third embodiment, in addition to the configuration of the first embodiment, a repair apparatus 27 or the like that newly determines whether or not the inspection apparatus 3 needs to be repaired based on the occurrence history of the irregular signal is newly provided. It is decided whether the repair of 3) is necessary. The repair determination unit 27 grasps the occurrence frequency of the irregular signal based on time series data of, for example, the occurrence time of the irregular signal among the occurrence histories recorded in the occurrence history recording unit 26, so that the occurrence frequency is equal to or greater than a predetermined value. In this case, it is determined that repair is necessary. As the determination mechanism of the repair determination unit 27, not only the occurrence frequency is used, but also the peak voltage of the irregular signal generated in the generation history recording unit 26, for example, is also recorded, and the repair is required by adding the peak voltage value. It may be determined whether or not.

(Embodiment 4)

Next, a signal detection system according to the fourth embodiment will be described. The signal detection system according to the fourth embodiment is used when a plurality of inspection apparatuses are used simultaneously to cope with an environment in which a large amount of inspection targets 2 are inspected, such as a semiconductor device manufacturing plant. The first embodiment is realized by a system in which a plurality of signal detection devices having the same configuration as those of the first embodiment and the like are managed by a management server.

7 is a schematic diagram showing the configuration of a signal detection system according to the fourth embodiment. As shown in Fig. 7, the signal detection system according to the fourth embodiment is applied to a plurality of inspection apparatuses 3-1 to 3-n (n: natural number of 2 or more), and the inspection apparatuses 3-1 to The signal detection devices 30-1 to 30-n arranged in correspondence with each of 3-n), the network 31 to which each of the signal detection devices 30-1 to 30-n are connected, and a network ( 31, the management server which acquires predetermined information from the signal detection devices 30-1 to 30-n via the network 31 and manages the signal detection devices 30-1 to 30-n. (32) is provided.

The signal detecting apparatuses 30-1 to 30-n have the same basic configuration as the signal detecting apparatus according to any one of the first to third embodiments, and have a predetermined interface for connecting to the network 31. Equipped. Therefore, as described in Embodiments 1 to 3, after extracting a voltage component having a predetermined intensity from the power supply voltage signal, deriving a time variation rate of the extracted voltage component, and deriving a predetermined time interval based on the time variation rate, The judgment processing based on the interval has a function of detecting an irregular signal.

The network 31 is for enabling information transfer between the signal detection apparatuses 30-1 to 30-n and the management server 32. Therefore, as a specific example of the network 31, it is only necessary to realize such a function, and any configuration such as a local area network (LAN), a wide area network (WAN), the Internet, or a wireless LAN can be used.

The management server 32 is for unitarily managing the signal detection apparatuses 30-1 to 30-n arranged in plurality. Specifically, the management server 32 inputs information output from the signal detection apparatuses 30-1 to 30-n, and either of the inspection apparatuses 3-1 to 3-n based on the input information. In the case where the irregular signal is generated at the minimum has a function to notify the user of the occurrence of the irregular signal.

Next, the advantages of the signal detection system according to the fourth embodiment will be described. For example, in the manufacturing facilities of semiconductor devices, the signal detection apparatuses described in Embodiments 1 to 3 are generally used in a form in which a plurality of signal detection apparatuses are operated in parallel instead of being used alone. In such a case, when each of the plurality of signal detection devices is operated alone, the user needs to sequentially check whether or not an irregular signal is detected for each signal detection device, and the operation of the signal detection device is very complicated. It becomes.

In contrast, in the signal detection system according to the fourth embodiment, the management server 32 is newly installed, and the information obtained from the plurality of signal detection devices 30-1 to 30-n via the network 31 is managed. (32) manages unitarily, and it is set as the structure which announces when the irregular signal generate | occur | produced unitarily. Therefore, in the signal detection system according to the fourth embodiment, the user does not need to sequentially check each of the signal detection devices 30-1 to 30-n, but only by checking the driving status of the management server 32. It is possible to grasp the driving situation of -1 to 30-n). Therefore, the signal detection system according to the fourth embodiment can reduce the management burden of the user and at the same time the inspection apparatuses 3-1 to 3-n corresponding to the signal detection devices 30-1 to 30-n. ) Has the advantage of being able to cope quickly in the event of an irregular signal.

As mentioned above, although this invention was demonstrated to Embodiment 1-4, this invention is not limited to the above-mentioned embodiment, It is possible for those skilled in the art to conceive various examples, modifications, etc. For example, in Embodiments 1 to 4, although a power supply voltage signal is used as an electric signal for detecting the mixing of irregular signals, a configuration for detecting an irregular signal in addition to the power supply voltage signal is also effective. For example, it is useful to detect an irregular signal because there is a harmful effect such as damage to the electronic circuit inside the inspection apparatus due to the incorporation of an irregular signal accompanied by a sudden voltage change even in the electrical signal used inside the inspection apparatus. Because.

Further, when deriving the time interval, the predetermined timing of the period in which the reference time change rate becomes a positive value and the predetermined timing of the period in which the negative value is not necessarily the above-mentioned rising timing and falling timing. As is also apparent from the above-described determination mechanism of the irregular signal, the time interval used for the determination may be a time interval between a period in which the rate of change of time is a positive value and a period in which a negative value is used. The time interval between the timing of the peak of the value and the timing of the peak of the negative value may be used for the determination.

In addition to the above-described determination mechanism, it is also effective to provide a mechanism for comparing the predetermined pattern of the electrical signal such as the power supply voltage signal with the pattern of the actually generated electrical signal. That is, when a peak is formed at a position different from the predetermined pattern, since such a peak is likely to correspond to an irregular signal, a mechanism for performing irregular signal detection by comparing the predetermined pattern with the actual pattern separately from the above-described determination mechanism. The parallelism has the advantage that irregular signal detection with higher certainty can be realized.

The signal detecting apparatus and the signal detecting system according to the present invention adopt a configuration for deriving a rate of change of time with respect to a voltage component extracted from an electric signal and determining whether the voltage component corresponds to an irregular signal based on the rate of change of time. As a result, unlike the usual components originally included in the electric signal, it has the effect of reliably detecting an irregular signal accompanied by an unexpected voltage fluctuation.

Moreover, the signal detection system which concerns on this invention is provided with the management server which inputs the determination result obtained by each signal detection apparatus, and informs a determination result, when a several signal detection apparatus is provided, and a management server detects several signal. The notification of the determination result obtained by the apparatus can be collectively performed, and the user can easily recognize the determination result in each of the plurality of signal detection apparatuses.

Claims (9)

In the signal detection device for detecting an irregular signal accompanied by a sudden voltage change as a signal that can be mixed in the electrical signal generated by the inspection device for inspecting the electrical characteristics of the predetermined inspection object, Component extraction means for extracting a voltage component whose absolute value of the voltage value is greater than or equal to a predetermined value from the electric signal; Change rate derivation means for deriving a rate of change of the voltage value in the voltage component extracted by the component extraction means; Determination means for determining whether or not the voltage component corresponds to an irregular signal based on a time change rate of the voltage value derived by the change rate derivation means; And a notification means for notifying the user of the determination result when at least the voltage component determines that the voltage component corresponds to an irregular signal. The method of claim 1, And the electric signal is a power supply voltage signal which is output from the inspection apparatus to the inspection object at the time of inspection and functions as a driving power of the inspection apparatus. The method of claim 1, The judging means corresponds to an irregular signal based on a time interval between a predetermined timing in a period in which the rate of change of time becomes a positive value and a predetermined timing in a period in which the time change rate becomes a negative value. Determining whether or not the signal is detected. The method of claim 1, Rise detection means for detecting a change from zero to a positive value of the time change rate; Further comprising falling detection means for detecting a change from said time change rate from 0 to a negative value, The determination means determines whether the voltage component corresponds to an irregular signal based on a time interval between the detection timing of the rise detection means and the detection timing of the fall detection means. Device. The method according to claim 3 or 4, And the determining means determines that the voltage component corresponds to an irregular signal when the time interval becomes less than or equal to a predetermined threshold smaller than the minimum value of the time interval in the normal component of the electric signal. Detection device. The method of claim 1, And a failure estimating means for estimating a defective portion of the inspection apparatus based on the occurrence pattern of the voltage component determined to correspond to the irregular signal by the determination means. The method of claim 6, And a generation pattern database which records a correspondence relationship between the occurrence pattern of the irregular signal and the defective part of the inspection apparatus. And the failure estimating means estimates a defective portion of the inspection apparatus while referring to the correspondence recorded in the occurrence pattern database based on the occurrence pattern of the voltage component determined to correspond to the irregular signal by the determination means. A signal detection device. The method of claim 1, A generation history recorder for recording a generation history of the irregular signal; And a repair determination means for determining whether the inspection apparatus needs to be repaired based on the occurrence history of the irregular signal recorded in the occurrence history recording section. In the signal detection system for detecting an irregular signal accompanied by a sudden voltage change as a signal that can be mixed in the electrical signal generated by a plurality of inspection apparatus for inspecting the electrical characteristics of a predetermined inspection object, Component extraction means for extracting a voltage component having a voltage value equal to or greater than a predetermined value from the electric signals, corresponding to each of the plurality of inspection devices, and the voltage value in the voltage component extracted by the component extraction means; A plurality of signal detections comprising: a rate of change derivation means for deriving a rate of change of time; and determining means for determining whether the voltage component corresponds to an irregular signal on the basis of the rate of change of voltage value derived by the rate of change derivation means; Device, And a management server having a notification means for inputting determination results obtained by the plurality of signal detection apparatuses and informing the user of the determination results when at least a determination result is obtained that the voltage component corresponds to an irregular signal. Signal detection system, characterized in that.

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