KR20060080475A - Apparatus for sealing the driving shaft for the effusion cell in the deposition system and deposition system having it - Google Patents

Abstract

The present invention relates to a drive shaft sealing apparatus for a deposition source for a deposition system and a deposition system having the same, a coupling portion coupled to a drive shaft installed in a vacuum chamber of a deposition system, and connected to the coupling portion through a connection portion in the vacuum chamber. A support plate having a support plate for supporting an evaporation source for injecting organic vapor material, the connection part having a through-window formed therein; A beam surrounding one side of the driving shaft and having one side open to move the support body in the vertical direction along the driving shaft; And a blocking plate penetrating through the through-window, thereby preventing the organic gaseous material from being scattered in the vacuum chamber and adhering to the driving body, so that the deposition source smoothly moves up and down.

Beam, blocking plate, support, tubular body, coupling

Description

Drive shaft sealing device of evaporation source for evaporation system and evaporation system having same {APPARATUS FOR SEALING THE DRIVING SHAFT FOR THE EFFUSION CELL IN THE DEPOSITION SYSTEM AND DEPOSITION SYSTEM HAVING IT}             

1 is an exploded perspective view showing a state in which a sealing device according to the present invention is installed around a drive shaft;

2 is a perspective view of the combination of the sealing device according to the present invention;

3 is a view of a deposition system in which a sealing apparatus according to the present invention is installed in a vacuum chamber;

4 is an exploded perspective view showing a state in which a sealing device according to another embodiment of the present invention is installed around a drive shaft;

FIG. 5A is a perspective view showing an operating state of the sealing apparatus shown in FIG. 4 with the deposition source located in the buffer region; FIG.

5B is a perspective view showing an operating state of the sealing apparatus shown in FIG. 4 in a state in which a deposition source is located in a film formation region;

<Description of Symbols for Major Parts of Drawings>

10: vacuum chamber

20: evaporation source

30: substrate

40: mask

50: Chuck

110: beam

120, 220: support plate

130: blocking plate

230a, 230b: tubular body

The present invention relates to a device for sealing a drive shaft for moving a support plate for supporting an evaporation source for injecting organic vapor material in the deposition system in the vertical direction, and a deposition system having the same, in more detail in the vacuum chamber while being sprayed from the evaporation source The present invention relates to a drive shaft sealing apparatus for a deposition source for a deposition system and a deposition system having the same, which can prevent the organic gaseous material scattering from being attached to the drive shaft to reduce the movement performance of the deposition source.

In general, an electroluminescent display device, which is one of flat panel displays, is classified into an inorganic electroluminescent display device and an organic electroluminescent display device according to a material used as a light emitting layer, and the organic electroluminescent display device can be driven at a low voltage. It is attracting attention because of its light weight and thinness, and its wide viewing angle as well as its fast response speed.

The organic light emitting device of the organic light emitting display device includes an anode, an organic material layer, and a cathode that are stacked on a substrate. The organic material layer includes an organic material layer of an organic light emitting layer that recombines holes and electrons to form excitons and emits light, and also between the cathode and the organic light emitting layer to smoothly transport holes and electrons to the organic light emitting layer to improve luminous efficiency. The organic material layer of the hole injection layer and the electron transport layer is interposed between the anode and the organic light emitting layer while interposing the organic material layer of the electron injection layer and the electron transport layer.

The organic light emitting device having the above-described structure is generally manufactured by a physical vapor deposition method such as a vacuum deposition method, an ion plating method and a sputtering method or a chemical vapor deposition method by a gas reaction. In particular, in order to form the organic material layer of the organic EL device, a vacuum deposition method in which an organic vapor material formed by evaporating an organic material in a vacuum chamber is sprayed from a deposition source and deposited on a substrate is widely used.

Recently, in response to the increase in size of the display, the size of the substrate has been enlarged, and in order to deposit the organic material layer on such a large substrate, a deposition system has been developed in which an evaporation source is sprayed while vertically moving up and down in a vacuum chamber.

Such a deposition system is provided with a drive shaft for moving the deposition source in the vertical direction, and the drive shaft is rotated by the drive means. Due to the axial rotation of the drive shaft, the deposition source injects the organic vapor material formed by evaporating the organic material while moving in the vertical vertical direction.

The drive shaft is kept exposed in the vacuum chamber. In addition, the organic vapor substance injected from the deposition source is scattered in the vacuum chamber. At this time, some of the scattering organic vapor material is attached to the drive shaft to act as a foreign matter has caused a problem that the vertical movement of the deposition source is not performed smoothly.

Therefore, there is a need for a method for preventing the by-products of organic gaseous substances present in the vacuum chamber from adhering to the drive shaft.

The present invention has been proposed to solve the conventional problems as described above, in the vertically movable organic material deposition apparatus to cope with the increase in size of the substrate, the organic vapor material sprayed from the deposition source is scattered in the vacuum chamber to provide a deposition source. It is an object of the present invention to provide a sealing apparatus for a drive shaft of a deposition source for a deposition system and a deposition system having the same, which can be prevented from being attached to a driving shaft moving upward and downward.

In order to achieve the above object, according to an embodiment of the present invention, the drive shaft sealing device of the deposition source for the deposition system is coupled to the coupling portion coupled to the drive shaft installed in the vacuum chamber of the deposition system, the coupling portion is connected to the coupling portion and A support plate having a support plate for supporting an evaporation source for injecting organic gaseous substances in a vacuum chamber, the connection part having a through window formed therein; A beam surrounding one side of the driving shaft and having one side open to move the support body in the vertical direction along the driving shaft; And a blocking plate penetrating the through window.

According to an embodiment of the present invention, a drive shaft sealing apparatus for a deposition source for a deposition system includes a coupling portion coupled to a drive shaft installed in a vacuum chamber of a deposition system, and coupled to the coupling portion to inject an organic vapor material from the vacuum chamber. A support having a support plate for supporting a deposition source; A first tubular body surrounding a drive shaft positioned above the coupling part; And a second tubular body surrounding a driving shaft positioned below the coupling part.

According to another embodiment of the invention, the deposition system comprises a vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; A support having a support plate coupled to the coupling portion through a coupling portion and a coupling portion coupled to the drive shaft, wherein the connection portion includes a support window; A deposition source mounted on a support plate of the support to inject an organic vapor material toward the substrate; A beam surrounding one side of the driving shaft and having one side open to move the support body in the vertical direction along the driving shaft; And a blocking plate penetrating the through-window of the support.

According to another embodiment of the present invention, a deposition system comprises: a vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; A support having a coupling part coupled to the drive shaft and a support plate connected to the coupling part; A deposition source mounted on a support plate of the support to inject an organic vapor material toward the substrate; A first tubular body surrounding a drive shaft positioned above the coupling part; And a second tubular body surrounding a driving shaft positioned below the coupling part.

Hereinafter, a driving shaft sealing apparatus of a deposition system and a deposition source for a deposition system according to the present invention will be described with reference to the accompanying drawings. The term 'organic material' refers to a material stored in a crucible in a liquid state or a solid state to form an organic material layer on a substrate, and the term 'organic material' is formed by evaporation of an organic material when heating the crucible. Means a gaseous substance. As such, the specific terminology used in the description of the present invention is defined for convenience of description, and may vary according to the intention or custom of a person skilled in the art, and also to limit the technical components of the present invention. It should not be understood.

First, a vacuum deposition method for forming an organic material layer of an organic light emitting device is performed in a vacuum deposition system including a vacuum chamber. One side of the vacuum chamber is provided with a stage having a chuck for supporting the substrate and mask to form the organic layer in an aligned state. In addition, the other side of the vacuum chamber is provided with a deposition source for injecting an organic vapor material toward the substrate. The deposition source is movable in a vertical up and down direction along a drive shaft installed in a substantially upright state in the vacuum chamber.

1 and 2, the driving shaft sealing apparatus of the deposition source for the deposition system according to the present invention has a beam 110 surrounding the driving shaft 12. The beam 110 is formed with an inner space that can accommodate the coupling portion and the connecting portion of the support described below. On one side of the beam 110, the support 120 to be described below is open to move in the vertical direction, thereby forming an open end.

The support body 120 connects the coupling part 126 to the driving shaft 12, the support plate 122 on which the deposition source 20 is mounted, and the coupling part 126 and the support plate 122 to penetrate a predetermined size. It has the connecting part 124 in which the window 124a is formed. A through plate 124a of the connecting portion 124 is provided with a plate-shaped blocking plate 130 (indicated by a dotted line for the sake of simplicity). The coupling portion 126 is formed with a hole 126a through which the drive shaft 12 penetrates. Preferably, the hole 126a is fastened to the drive shaft 12 in a gear coupling manner so that the drive shaft 12 is driven by a driving means (not shown). When rotated by, the coupling portion 126 is moved up and down along the drive shaft 12.

The coupling part 126 and the connection part 124 of the support body 120 are movably received in the inner space of the beam 110 in which the driving shaft 12 is located. Grooves extending outward are formed in the up and down direction adjacent to the open end on the inner surface defining the inner space of the beam 110. The connecting portion 124 of the support 120 is provided with outward protrusions corresponding to the grooves. In this case, the through window 124a is provided at a portion where the outward protrusion is formed. And, in the support 120, a groove is formed between the outward projection and the support plate 122, the open end of the beam 110 acts as a wing inserted into the groove.

Accordingly, the drive shaft 12 is inserted into the hole 126a of the coupling portion 126, the wing portion of the beam 110 is inserted into the groove of the support 120, and the outward protrusion of the connection portion 124 is the beam 110. The coupling part 126 and the connection part 124 of the support body 120 are positioned in the inner space of the beam 110 by being inserted into the groove of the support 110. At this time, the blocking plate 130 is inserted into the through-window (124a) of the connecting portion 124, the drive shaft 12 is sealed from the outside. In addition, the support plate 122 of the support 120 is exposed to the outside of the beam 110.

As shown in FIG. 3, in the deposition system in which the drive shaft sealing apparatus according to the exemplary embodiment of the present invention is installed, one side of the vacuum chamber 10 supports the substrate 30 and the mask 40 in an aligned state. A chuck 50 is provided. On the other side of the vacuum chamber 10, the drive shaft 12 is provided in the inner space of the beam 110, in this state is maintained in a closed state by the blocking plate 130. The deposition source 20 is seated on the support plate 122 of the support 120 exposed through the open end of the beam 110.

The driving shaft 12 is axially rotated by the operation of the driving means (not shown), and the support plate 122 of the support 120 moves vertically along the open end of the beam 110 in association with the driving shaft 12. In addition, even when the organic gaseous material sprayed from the deposition source toward the substrate 30 is scattered in the vacuum chamber 10, the organic gaseous material scattered by the blocking plate 130 and the beam 110 adheres to the drive shaft 12. Effectively prevents this.

On the other hand, referring to Figure 4, the drive shaft sealing apparatus of the deposition source for the deposition system according to another embodiment of the present invention is coupled to the coupling portion 226, the coupling portion 226, coupled to the driving shaft 12, the deposition source It includes a support 220 having a support plate 222 is seated. The drive shaft 12 positioned at the upper portion of the coupling portion 226 at the top thereof is surrounded by the first tubular body 230a, and the drive shaft 12 positioned at the lower portion thereof is formed by the second tubular body 230a. Surrounded.

Preferably, the lower portion of the first tubular body 230a is fixed to the upper surface of the coupling portion 226, and the upper portion of the second tubular body 230b is fixed to the lower surface of the coupling portion 226. In addition, the upper portion of the first tubular body 230a is fixed to the upper surface of the vacuum chamber 10, and the lower portion of the second tubular body 230b is fixed to the lower surface of the vacuum chamber 10. Therefore, the drive shaft 12 is maintained in a sealed state to the first tubular body and the second tubular body 230a and 230b and the engaging portion 226 of the support 220.

The first tubular body and the second tubular body 230a and 230b effectively externally drive the drive shaft 12 while the coupling part 226 moves upward and downward as the drive shaft 12 rotates by a driving means (not shown). It is desirable to have a stretchable structure in order to seal it from. For example, the first tubular body preferably has the second tubular body 230a, 230b having a corrugated tube shape.

Referring to FIG. 8A, in the deposition system in which the driving shaft sealing apparatus is installed according to another embodiment of the present invention, one side of the vacuum chamber 10 supports the substrate 30 and the mask 40 in an aligned state. Chuck 50 is provided. The other side of the vacuum chamber 10 is provided with a drive shaft 12, the support shaft 220 is coupled to the drive shaft 12 to be movable in the vertical vertical direction through the coupling portion 226. The support 220 has a support plate 222 on which a deposition source in which an organic material is stored is mounted. The first tubular body 230a is provided on the drive shaft 12 positioned above the coupling portion 226 of the support 220, while the second tubular body is provided on the drive shaft 12 positioned below the support shaft 12. 230b is provided.

The first tubular body 230a is extended to the maximum length with the support 220 being provided under the drive shaft 12 so that the deposition source 20 is located in the buffer region A of the vacuum chamber 10. On the other hand, the second tubular body 230b is reduced to the minimum length. At this position, the deposition source 20 is preheated to evaporate the organic material to form the organic vapor material and also wait until the deposition rate of the organic vapor material reaches the target value.

As shown in FIG. 8B, when the deposition rate of the organic gaseous material sprayed from the deposition source 20 reaches a target value, the driving shaft 12 is rotated by the operation of a driving means (not shown) to support the support 220. Move. As a result, the deposition source 20, which is seated on the support plate 222 of the support 220, is positioned in the deposition region B of the vacuum chamber 10. At this time, the organic vapor material is injected from the deposition source 20 to form an organic material layer on the substrate 30 in the vacuum chamber 10.

On the other hand, in the state where the support body 220 is moved so that the deposition source 20 is positioned in the film formation region B of the vacuum chamber 10, the first tubular body 230a is slightly reduced and the second tubular body 230b is ) Is slightly elongated.

Therefore, since the tubular bodies 230a and 230b extend and contract in conjunction with the moving direction of the supporter 220, the drive body 12 is sealed from the outside by the tubular bodies 230a and 230b and the engaging portion 226. Even when the organic gaseous material sprayed from the deposition source 20 mounted on the support plate 222 of the supporter 220 scatters in the vacuum chamber 10, the organic gaseous material scattered on the driving body 12 contacts. It effectively blocks you from doing.

The foregoing is merely illustrative of the preferred embodiments of the present invention and those skilled in the art to which the present invention pertains recognize that modifications and variations can be made to the present invention without departing from the spirit and gist of the invention as set forth in the appended claims. shall.

According to the present invention, since the driving body for moving the deposition source for injecting the organic vapor material in the vertical direction is kept in a sealed state in the vacuum chamber, the sprayed organic vapor material is scattered in the vacuum chamber and attached to the driving body. Prevent the deposition source to move up and down smoothly.

Claims (15)

A coupling part coupled to the drive shaft installed in the vacuum chamber of the deposition system, and a support plate connected to the coupling part through a connection part and supporting a deposition source for injecting organic vapor material from the vacuum chamber, wherein the connection part has a through-window formed therein. Support; A beam surrounding one side of the driving shaft and having one side open to move the support body in the vertical direction along the driving shaft; And A drive shaft sealing apparatus for a deposition source for a deposition system, characterized in that the barrier plate penetrates the through-window. The method of claim 1, Grooves are formed at both edges of the connection part of the support, and the wing end corresponding to the groove part of the connection part is formed at the open end of the beam. The method of claim 2, A driving shaft sealing apparatus for a deposition source for a deposition system, characterized in that a protrusion extending outwardly is formed between the groove of the connection portion and the coupling portion, and a groove corresponding to the protrusion is formed on an inner surface of the beam. . The method of claim 3, And the through-window is formed in a portion where the protrusion is formed. A support having a coupling part coupled to a drive shaft installed in a vacuum chamber of a deposition system, and a support plate connected to the coupling part and supporting a deposition source for injecting organic vapor material from the vacuum chamber; A first tubular body surrounding a drive shaft positioned above the coupling part; And And a second tubular body surrounding a driving shaft positioned below the coupling part. The method of claim 5, The lower portion of the first tubular body is fixed to the upper surface of the coupling portion and the upper side of the second tubular body is fixed to the lower surface of the coupling portion drive shaft sealing apparatus for a deposition source for a deposition system. The method according to claim 5 or 6, The first tubular body and the second tubular body is a drive shaft sealing apparatus for a deposition source for a deposition system, characterized in that the length can be stretched. The method of claim 7, wherein And the first tubular body and the second tubular body have an outer shape of a corrugated pipe. Vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; A support having a support plate coupled to the coupling portion through a coupling portion and a coupling portion coupled to the drive shaft, wherein the connection portion includes a support window; A deposition source mounted on a support plate of the support to inject an organic vapor material toward the substrate; A beam surrounding one side of the driving shaft and having one side open to move the support body in the vertical direction along the driving shaft; And Deposition system, characterized in that consisting of a blocking plate penetrating through the through-window of the support. The method of claim 9, Grooves are formed at both edges of the connection part of the support, and an open end of the beam has a wing corresponding to the groove part of the connection part. The method of claim 10, And a protrusion extending outwardly between the recess of the connection portion and the coupling portion, and a groove corresponding to the protrusion is formed on an inner surface of the beam. Vacuum chamber; A stage having a chuck supporting the substrate and the mask installed in one side of the vacuum chamber in an aligned state; A drive shaft installed at the other side of the vacuum chamber; A support having a coupling part coupled to the drive shaft and a support plate connected to the coupling part; A deposition source mounted on a support plate of the support to inject an organic vapor material toward the substrate; A first tubular body surrounding a drive shaft positioned above the coupling part; And And a second tubular body surrounding a driving shaft positioned under the coupling part. The method of claim 12, And a lower portion of the first tubular body is fixed to the upper surface of the coupling portion and an upper portion of the second tubular body is fixed to the lower surface of the coupling portion. The method according to claim 12 or 13, And the first tubular body and the second tubular body are stretchable in length. The method of claim 14, And the first tubular body and the second tubular body have an outer shape of a corrugated pipe.

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