KR101862731B1 - Article transport facility - Google Patents

Abstract

An object of the present invention is to provide an article transporting facility capable of preventing an occurrence of a stagnation of a ceiling conveyance car (transport vehicle) in a first route while allowing an article to be quickly carried in and out of a goods exchange portion A straight first path that passes through the stop position Q1a for the replacement part immediately above the article exchange portion 4 and a second straight path that is parallel to the first path and that is set at a different position in the lateral width direction of the first path A first path side intermediate shelf 5n immediately below the first path and a second path side intermediate shelf 5f immediately below the second path, a wave for a conveyance mounting apparatus 2, (7) is vertically slidable and slidable in the transverse direction so as to be interposed between the first path side intermediate shelf (5n) and the second path side intermediate shelf (5f) and between the second path side intermediate shelf And the article exchange unit 4, The first intermediate intermediate transfer conveying apparatus 6n or the second intermediate intermediate transfer conveying apparatus 6f provided so as to be capable of reciprocating along the running direction of the ceiling conveying vehicle 2, And at least one of them is installed.

Description

{ARTICLE TRANSPORT FACILITY}

The present invention relates to an article carrying apparatus which is capable of traveling along a traveling path in a state of being guided and supported by a running rail provided on a ceiling side and capable of raising and lowering a grip portion for holding an article, And an intermediate shelf disposed above the article exchanging section and below the ceiling transporting car for temporarily mounting an article to be transported to the article exchanging section The present invention relates to an apparatus for transporting goods.

In the above-mentioned article transporting apparatus, the ceiling-carrying truck carries an article to be carried in (loaded into) the article exchanging unit by traveling along the traveling path while holding the article in the gripping unit, Between the plurality of article exchanging units. A plurality of overhead traveling carriages are generally provided, and each of the overhead traveling carriages is stopped directly above an article exchange unit designated as a transfer source (transfer source) or an article exchange unit designated as a transfer line (transfer destination) from a controller that manages a transfer operation, And the article is transported and mounted between the article exchanging section by raising and lowering the grip section.

When the article is transported to the article exchange unit as the transport line by the ceiling transport vehicle and the article exchange unit becomes unable to receive the article, the subsequent ceiling carrier transports the article when the article exchange unit is ready to accept It is necessary to wait until the ceiling conveying car is stagnated. Therefore, conventionally, an intermediate shelf for provisionally mounting an article to be transported and mounted on the article exchanging section is disposed above the article exchanging section and below the ceiling conveying car. By temporally mounting the article on the intermediate shelf, It prevents the stagnation of the car. Further, by providing the intermediate shelf in the vicinity of the article exchange unit, the article exchange unit can be carried in and out quickly when necessary.

As a conventional example of an article transporting apparatus provided with an intermediate shelf, there is a conventional example of a product transporting apparatus having a linear first path via a stop position for the exchanger set immediately above the article exchanging unit, and a second linear path extending in parallel to the first path, And the intermediate shelf is disposed only under the second path (for example, see Fig. 2 of Patent Document 1).

In the above-described conventional example product transporting apparatus, the ceiling carriage that travels along the first path is provided with the grip portion slidable in the widthwise direction of the first path and the second path so that the ceiling- The conveyance of the article to the intermediate shelf located at a different position in the transverse direction of the first path is carried out and the conveyance of the article to the intermediate shelf located at the different position in the transverse direction of the first path is performed, The carriage is designed to perform only the transfer mounting on the intermediate lathe immediately below the second path.

Japanese Patent Application Laid-Open No. 2006-224944

In the above-described conventional product transporting apparatus, when an article provisionally installed on the intermediate shelf is brought into the article exchange section, the ceiling conveyance vehicle not holding the article is moved along the first route to the stop position for the exchange section set just above the article exchange section And the gripping portion is moved by sliding, elevating and lowering, and the article on the intermediate shelf is transferred to the article exchange portion. When the article is taken out from the article exchanging part, the ceiling conveying vehicle not holding the article is similarly caused to travel along the first path to the stop position for the exchanging part set just above the article exchanging part, and the gripping part is moved up and down So that the article is removed from the article exchange portion. In the case where the article carried out from the article exchange part is temporarily mounted on the intermediate shelf, the grip part is slidably moved and lifted and moved while stopping at the stop position for the exchange part in the first path, do.

In this manner, the carrying-in of the article to and from the article exchange unit, the temporary mounting of the article to the intermediate shelf, and the loading of the article provisionally installed in the intermediate shelf into the article exchange unit, The work load of the overhead traveling carriage traveling on the first path becomes high. Therefore, there is a fear that work is concentrated on the overhead traveling carriage traveling on the first route, and congestion may occur.

Further, since there is no intermediate shelf outside just below the second path, even if the number of temporarily mountable articles is small and the number of intermediate shelves is increased to increase the number of temporarily mountable articles, The intermediate shelf is provided at a position spaced apart from the article exchanging portion, so that the conveying distance when the ceiling conveying vehicle traveling in the first path brings the article of the intermediate shelf into the article exchanging portion becomes long. Therefore, there is a fear that the article can not be brought into the article exchange part quickly.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems and an object of the present invention is to provide an article transporting apparatus capable of preventing the occurrence of stagnation of the overhead traveling carriage in the first route as much as possible, And the like.

In order to achieve the above object, a product transportation system according to the present invention includes a grip portion that is capable of traveling along a traveling path while being guided and supported by a running rail provided on a ceiling, And an article transporting device disposed above the article exchanging section and below the ceiling transporting car to be transported and mounted on the article exchanging section, In which the intermediate shelf is provided,

Wherein the traveling path includes a straight first path passing through a stopping position for a switching part set immediately above the article exchanging part and a straight line parallel to the first path and set at a position different from the transverse direction of the first path, A second path side intermediate shelf positioned at a position different from the article exchange portion in the running direction of the ceiling conveyance vehicle and immediately below the first path as the intermediate shelf, And a grip portion for a conveyance mounting apparatus that supports the article is vertically movable and slidable in the widthwise direction of the first path and the second path And is provided between the first path-side intermediate shelf, between the second path-side intermediate shelf, and between the article exchange portion and the second path- A first path and a second path side intermediate shelf, wherein the first path and the first path side intermediate shelf are arranged in a state of overlapping with the first path and the first path side intermediate shelf as viewed in the traveling direction of the ceiling transport vehicle, Side intermediate loading device installed to be capable of reciprocating along the running direction of the overhead traveling carriage at a height between the path and the first path-side intermediate shelf, or a first path- The second path and the second path side intermediate shelf are overlapped with the second path side intermediate shelf so as to be reciprocable along the traveling direction of the ceiling transporting vehicle And a second path side intermediate transfer mounting device provided to the second path side.

According to this configuration, when the article is gripped by the grip portion, the ceiling carriage traveling on the first path stops at the stop position for the exchange portion and descends the grip portion, thereby bringing the article into the article exchange portion provided on the bottom side can do. Likewise, if the gripping portion is not holding the article, the article can be taken out from the article exchange portion provided at the bottom by stopping at the stopping position for the exchange portion and lowering the gripping portion. Thus, the overhead traveling carriage traveling on the first route can carry the articles by the traveling operation along the traveling path to the stopping position for the exchange part and the carrying-in / out of the articles between the article exchange part at the stopping position for the exchange part .

In addition, since the first path-side intermediate shelf and the second path-side intermediate shelf are formed as the intermediate shelf for provisionally loading the articles to be transported and mounted on the article exchanging portion, the ceiling- The article can be temporarily mounted on the first path side intermediate shelf positioned immediately below the stopper by stopping at the position different from the stop position for the exchange part and moving the gripper part, When the article is not gripped, the article is provisionally installed on the first path-side intermediate shelf immediately below the stopper by stopping at the position different from the stop position for the exchange part and moving the grip part down. Likewise, the ceiling carriage running on the second path can temporarily mount the article on the second path side intermediate shelf immediately below, or can receive the article temporarily mounted on the second path side intermediate shelf.

The grasping portion for the conveyance mounting apparatus is vertically movable and slidable in the widthwise direction of the first path and the second path so as to be slidable between the first path side intermediate shelf and the second path side intermediate shelf, And at least one of the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus is provided, and therefore, the first path-side intermediate transfer apparatus and the second path- The article temporarily temporarily mounted on the first path-side intermediate shelf can be brought into the article exchange unit by the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus, It is also possible to move it to the second path side intermediate shelf. Likewise, the articles temporarily temporarily mounted on the second path-side intermediate shelf traveling on the second path are brought into the article exchange unit by the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus And it is also possible to move to the second path side intermediate shelf. Thereby, for example, the ceiling-conveying carriage is capable of conveying the article from the conveyance source (for example, conveying the article from the intermediate shelf to the article exchange section and conveying the article from the article exchange section to the intermediate shelf (For example, returning to another article exchanging section) can be carried out. Of course, the ceiling conveying carriage running on the first path may directly carry out the loading / unloading of the article with respect to the article exchange portion.

Thus, all or part of the carry-in / out of the article to / from the article exchange portion can be performed by the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus, , The carrying-out of the article to and from the article exchange unit, the temporary loading of the article to the intermediate shelf, and the carrying-in of the article temporarily put on the intermediate shelf into the article exchange unit may all be performed. There is no need to do. Therefore, the workload of the overhead traveling carriage traveling on the first path can be reduced.

Therefore, as compared with the conventional configuration in which the ceiling conveying vehicle running on the first path is provided with the intermediate shelf just below the second path and the grip portion is slidable in the widthwise direction of the first path and the second path It is possible to avoid an increase in the work load on the overhead traveling carriage traveling on the first route. Thereby, it is possible to prevent the occurrence of stagnation caused by the traveling of the overhead traveling carriage in the first route.

In addition, as the intermediate shelf, by providing the first path side intermediate shelf positioned immediately below the first path and the second path side intermediate shelf positioned immediately below the second path, It is possible to install the intermediate shelf at a position close to the travel path direction from the article exchange unit, so that the article temporarily placed on the intermediate shelf can be transported to the ceiling transport vehicle, the first route side intermediate transfer placement apparatus, Side intermediate transfer unit, the article in the article exchange unit can be transferred to the ceiling transfer vehicle or the first path-side intermediate transfer mounting apparatus or the second path side It can be carried out by the intermediate transfer mounting device and temporarily mounted on the intermediate lathe quickly.

Since the intermediate lathe is formed with the first path side intermediate shelf positioned immediately below the first path and the second path side intermediate shelf positioned immediately below the second path, The transport vehicle or the overhead traveling carriage that travels on the second route can use an intermediate shelf positioned directly underneath. Therefore, the overhead traveling carriage traveling on the first route or the overhead traveling carriage traveling on the second route is designed so that the gripping portion is moved in the route width direction to correspond to the installation interval of the first route and the second route in order to mount the article on the intermediate shelf It is not necessary to provide a mechanism for sliding over a distance that the ceiling-mounted carriage is moved.

From the above, it has been possible to obtain an article transporting facility capable of preventing the occurrence of stagnation of the overhead traveling carriage in the first route as much as possible while allowing the article to be quickly taken out of and taken out from the article exchange portion.

In the embodiment of the product transport apparatus according to the present invention, both the first path-side intermediate transfer apparatus and the second path-side intermediate transfer apparatus are provided, and the first path- Wherein the gripping portion for the on-board device is provided so as to be able to move out of the position between the first path side position immediately below the first path and the second path side position immediately below the second path, Wherein the second path side intermediate transfer destination apparatus is configured to be movable along the traveling direction of the overhead traveling carriage with the grippers for the apparatus being positioned at the first path side position, A second path side position and a second path side position; and a second path side position and a second path side position, And is configured to be movable along the running direction of the car.

According to this configuration, when the article is carried in and out of the article exchange unit, the first path-side intermediate transfer support apparatus is configured such that, when the gripper for the conveyance mounting apparatus is positioned at the first path side position, And the second path side intermediate transfer mounting apparatus moves along the running direction of the overhead traveling carriage with the gripper for the conveyance mounting apparatus positioned at the second path side position. Therefore, the first path-side intermediate transfer mounting apparatus and the second path-side intermediate transfer mounting apparatus can move along the running direction without interfering with each other as much as possible.

The articles temporarily placed on the intermediate shelf by the ceiling conveying car are brought into the article exchange unit by any one of the intermediate transfer apparatuses of both the first path side intermediate transfer apparatus and the second path side intermediate transfer apparatus. Since the article can be taken out from the article exchange part by either one of these intermediate transfer apparatuses and can be temporarily mounted on the intermediate shelf, it is possible to transfer the article to and from the article exchange part by the first path- And the intermediate transfer support apparatus on both sides of the second path side intermediate transfer support apparatus.

In the embodiment of the article transporting apparatus according to the present invention, as the article exchanging section, one article exchanging section and the other article exchanging section spaced from each other in the transverse direction of the first path and the second path are provided, The first path and the second path provided in correspondence with the one article exchange portion and the first path and the second path provided in correspondence with the other article exchange portion are provided in the first path and the second path, Wherein the first path and the second path are provided in parallel with each other at intervals in the transverse direction of the path and are provided in correspondence with at least one of the first path and the second path provided in correspondence with the one article exchange portion and the other article exchange portion Each of the opposite ends of at least one of the first path and the second path is connected to a transfer path, and the ceiling conveying car is installed in correspondence with the one article exchange part The first path and the second path are connected to the transfer path, and the first path and the second path provided in correspondence with the other article exchange unit are connected to the transfer path of the first path and the second path, Wherein said intermediate transfer means is configured to be able to move via said transfer path and between said intermediate transfer installation device provided corresponding to said one article exchange portion and said intermediate transfer installation device provided corresponding to said other article exchange portion, It is preferable that conveying means capable of conveying the article in the widthwise direction of the first path and the second path is provided.

According to this configuration, the ceiling-conveying car has the first path connected to the transfer path of the first path and the second path provided corresponding to one of the article exchanging units, the first path provided corresponding to the other article exchanging unit, The first path and the second path provided in correspondence with the one article exchange unit and the second path connected to the transfer path for the other article exchange unit, And between the first path and the second path, which are connected to the transfer path. Therefore, the ceiling-conveying car is brought into the other article exchanging part by bringing the article carried out from one article exchanging part or the article carried out from the one article exchanging part by the intermediate transfer mounting device and provisionally installed in the intermediate shelf into the other article exchanging part, It can be temporarily mounted on the intermediate shelf for the other article exchange part.

In addition, according to the above-described configuration, between the intermediate transfer mounting apparatus provided in correspondence with one article exchanging section and the intermediate transfer mounting apparatus provided in correspondence with the other article exchanging section, the widths of the first and second paths The article is conveyed by the conveying means to the intermediate conveyance mounting apparatus provided corresponding to the other article exchange unit from the intermediate conveyance installation apparatus provided corresponding to one article exchange unit, The article transported from the one article exchanging unit or the article transported from the one article exchanging unit and provisionally installed on the intermediate shelf is transported by the ceiling transporting vehicle or the intermediate transporting apparatus to the intermediate transporting It is possible to carry it into the other article exchange part by the loading device or to transfer it to the other article exchange part It can be temporarily mounted on the shelf. Therefore, even if the ceiling conveying vehicle does not carry the article in the form of a first route through which the transfer route is connected or an edge of the second route to travel the transfer route, The article can be transported from the intermediate shelf provided to the other article exchanging section and the intermediate shelf provided corresponding thereto in a short (end) manner.

In this manner, the load of the overhead traveling carriage can be further reduced, and the article can be taken out from one article exchanging section and brought into the other article exchanging section quickly.

In the embodiment of the product transporting apparatus according to the present invention, it is preferable that the transporting means is provided between the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus provided corresponding to the one article exchange unit Side intermediate transfer apparatus or the second-path-side intermediate transfer apparatus, which is capable of loading and supporting the article at one transfer position for transferring the article, and which is provided in correspondence with the other article exchange unit, And a conveying conveyor capable of loading and conveying the article to the other conveying mounting position for conveying the article at the other conveying position.

With this configuration, the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus installed in correspondence with one of the article exchanging units, in a state of being stopped just above one transfer sheet mounting position, By moving the grip portion up and down in the vertical direction, the article is handed over from the upper side to the transfer conveyor. The conveying conveyor in a state of loading and supporting the article at the one feeding position mounts the article to the other feeding position. Then, in a state in which the first path-side intermediate transfer apparatus or the second path-side intermediate transfer apparatus installed in correspondence with the other article exchange unit is stopped just above the other transfer sheet mounting position, So as to receive the article on which the conveying conveyor is mounted and supported at the other conveyance mounting position.

As described above, the first path-side intermediate transfer device or the second path-side intermediate transfer device provided in correspondence with one of the article exchanging parts is capable of moving just above one transfer position and holding the gripper for the transfer device in the vertical direction The article can be exchanged with the conveying means by a function that can be realized without making a large change to the existing configuration of moving up and down the tray. When a new position is set as the stop position just above the one-side transfer mounting position, a hardware (e.g., a position detection sensor) or software (e.g., a position determination program based on position information in the traveling path) The position detecting means may be provided. The same applies to the first path side intermediate transfer mounting apparatus or the second path side intermediate transfer mounting apparatus provided corresponding to the other article exchange portion.

In this way, when the conveying means capable of conveying the article between the intermediate conveyance mounting apparatus for one article exchanging section and the intermediate conveyance mounting apparatus for the other article exchanging section is provided, the conventional configuration of the intermediate conveyance mounting apparatus So that the conveying means can be constituted.

In the embodiment of the present invention, the first path and the second path are formed at the same height, and the first path-side intermediate shelf and the second path- It is preferable that they are installed at the same height. This simplifies the structure of the entire facility and the operation of loading and unloading.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of an entire product transport apparatus according to the embodiment. Fig.
2 is a partially enlarged plan view of Fig.
Fig. 3 is a partially enlarged side view of Fig. 1. Fig.
4 is a front view of the ceiling conveying vehicle as viewed in the direction of travel.
5 is a partially enlarged front view of Fig.
6 is a plan view showing the arrangement of the conveying conveyor.
7 is a front view showing the arrangement of the conveying conveyor.
8 is a plan view for explaining a stop position of the intermediate transfer mounting apparatus.
9 is a control block diagram.
10 is a plan view showing the carrying means according to another embodiment.

DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of a product transport system according to the present invention will be described with reference to the drawings.

[Overall configuration]

Fig. 1 is an overall plan view of the product transporting apparatus according to the present embodiment, and Fig. 2 is an enlarged plan view of a left upper portion of the paper surface in Fig. Here, the upper left portion of the paper surface is the upper left portion in the case where the drawing is arranged so that the reference numerals assigned to the respective elements (elements) shown in the drawing can be seen with a right incense . Likewise, in the following description, when the expressions such as left, right, top, bottom, and the like of the paper are used, they mean directions in the paper when the drawings are similarly arranged. The vertical direction of the paper means a direction perpendicular to the left and right direction of the paper in the direction of the paper surface. This product transporting facility is provided in a semiconductor manufacturing factory and includes a plurality of overhead transportation vehicles 2 for transporting a substrate storage container such as a FOUP containing a plurality of semiconductor wafers as an article W to a traveling rail 1 so as to be able to travel in one direction along the traveling path.

The running rail 1 is provided at a height above the bottom surface by a set height, as shown in Fig. 1 when viewed in a plan view. Thereby, three annular paths LP1 to LP3 arranged in the left-right direction on the ground are provided on the ceiling side. Each of these annular paths LP1 to LP3 extends in the longitudinal direction as a whole and has two straight portions extending along the longitudinal direction and two curved portions connecting the straight portions at the ends . Between the first annular path LP1 and the second annular path LP2 and a pair of paths constituted by a straight first path L1 and a second path L2 extending perpendicularly to the longitudinal direction of the annular path, A plurality is set in an arrayed state. Similarly, a pair of paths (constituted by the first path L1 and the second path L2) are provided between the second annular path LP2 and the third annular path LP3. As shown in Fig. 4, the running rail 1 is provided with a pair of rail members 1a and 1b arranged at intervals in the lateral width direction orthogonal to the horizontal direction with respect to the running direction of the ceiling conveying vehicle 2 . The pair of rail members 1a and 1b are suspended by a plurality of pairs of rail supporting members 9 provided on the ceiling.

One end of the first path L1 and the second path L2 disposed between the annular paths LP1 and LP2 are connected to the annular path LP1 by the connecting portion K and the other end is connected to the annular path LP2 and the connecting portion K Respectively. Likewise, one end of the first path L1 and the second path L2 disposed between the annular paths LP2 and LP3 are connected by the connecting portion K to the annular path LP2, and the other end is connected by the annular path LP3 and the connecting portion K, respectively. Thereby, the overhead traveling carriage 2 can travel from the first path L1 or the second path L2 to the annular paths LP1 to LP3, and from the annular paths LP1 to LP3 to the first path L1 or the second path L2. As shown in Fig. 1, the second annular path LP2 is composed of a double loop path (that is, the entire one annular path is disposed in another annular path) connected to each other at a plurality of points. Since the plurality of overhead traveling carriages 2 run only in one direction, the running direction of the overhead traveling carriage 2 in the first path L1 and the second path L2, which are arranged vertically at the ground surface of Figs. 1 and 2, Are alternately set in a reverse direction.

Directly above the station 4 as an article exchange unit of a plurality of processing apparatuses 8 arranged in the left-right direction (i.e., a direction perpendicular to the longitudinal direction of the annular path) of Figs. 1 and 2, A first path L1 is provided along the arrangement direction of the stations 4 (left and right direction of the paper in Figs. 1 and 2). A second path L2 is set in parallel with the first path L1 at different positions in the lateral direction of the first path L1 (the vertical direction of the paper surface in Figs. 1 and 2, i.e., the longitudinal direction of the annular path).

[Processing Apparatus]

Between the first annular path LP1 and the second annular path LP2 and between the second annular path LP2 and the third annular path LP3, the semiconductor wafers accommodated in the substrate storage container are taken out, and processing or inspection of the semiconductor wafers Are disposed on the floor surface in a state in which they are aligned in the up, down, left, and right directions of the paper surface of Figs. 1 and 2. A station 4 is provided at the end of the processing apparatus 8 and the processing apparatus 8 is connected to the ceiling transporting vehicle 2 and a later described intermediate transfer mounting apparatus 6 via the station 4 Exchange goods W.

The processing apparatus 8 is arranged in a pair in the posture in which the stations 4 are opposed to each other in the vertical direction of the paper in Figs. 1 and 2. For example, the station 4 installed to the processing apparatus 8 on the left upper side of FIG. 2 is opposed to the station 4 installed on the lower left side of the processing apparatus 8 on the ground in the vertical direction . As described above, the station 4 is provided with one station 4 and the other station 4 spaced apart from each other in the arrangement direction of the first path L1 and the second path L2. The first path L1 and the second path L2 provided corresponding to the station 4 on the other side and the first path L1 and the second path L2 provided corresponding to the station 4 on the other side correspond to the first path L1 and the second path L2, L2. The first path L1 and the second path L2 are both connected to the annular paths LP1 to LP3 at both ends thereof. Therefore, in the overhead traveling carriage 2 running on the first path L1 and the second path L2 disposed between the annular path LP1 and the annular path LP2, The annular path LP1 and the annular path LP2 function as a transfer path for transferring to the other first path L1 or the second path L2. Likewise, in the case of the overhead traveling carriage 2 traveling on the first path L1 or the second path L2 disposed between the annular path LP2 and the annular path LP3, the annular path LP2 and the annular path LP3 are connected to each other via the first path L1 And serves as a path for transfer to the second route L2.

2 to 4, the station 4 is provided at the end of the processing apparatus 8 so that the article W can be mounted and supported at a height lower than the height of the processing apparatus 8. The article W handed to the station 4 by the ceiling conveying carriage 2 or the intermediate transfer receiving apparatus 6 is received inside the processing apparatus 8 and the processed article W is returned to the station 4, And is received by the conveying car 2 or the intermediate transfer mounting device 6. [

In the present embodiment, the length of the station 4 in the running direction is set so that the three articles W can be mounted on the ceiling-carrying truck 2 while being arranged adjacent to the running direction thereof. That is, the station 4 is provided with three commodity exchange positions. In the traveling path 1, the ceiling transport vehicle 2 exchanges the commodities W with respect to these commodity exchange positions (that is, The stop position Q1 for the first exchange part, the stop position Q1b for the second exchange part, and the third exchange part Q1b for the second exchange part in this order from the upstream in the running direction of the overhead traveling carriage 2 in the first path L1, Three of the auxiliary stop positions Q1c are set just above each of the three commodity exchange positions in the station 4. [

[Middle shelf]

As shown in Figs. 1 to 4, an article W to be handed to the station 4 or an article W to be received temporarily from the station 4 is temporarily placed under the first path L1 and the second path L2 The intermediate shelf 5 temporarily holding the article W is disposed above the station 4 in the vertical direction and below the ceiling transporting carriage 2. [ In this embodiment, as the processing apparatus 8, the first processing apparatus 8a and the second processing apparatus 8b are arranged in a state of being arranged along the running direction of the ceiling conveying vehicle 2 in the first path L1 or the second path L2, And a plurality of intermediate shelves 5 are disposed adjacent to the upper side of the other processing apparatus 8 from the upper side region of one of the processing apparatuses 8 of these processing apparatuses 8, Area. The intermediate shelf 5 includes a first path side intermediate shelf 5n located immediately below the first path L1 and located at a position different from the station 4 in the traveling direction of the ceiling conveying car 2, And a second path side intermediate shelf 5f positioned immediately below the second path side intermediate shelf 5f.

As shown in Figs. 3 and 4, the intermediate shelf 5 is provided so as to protrude downward from the lower portion of the buffer frame 55 suspended from the ceiling. 6, the buffer frame 55 includes an upstream portion 55a located on the upstream side in the running direction of the overhead traveling carriage 2 running on the first route L1 and a downstream portion 55a located on the downstream side And a downstream side portion 55b that is provided on the downstream side of the first path side frame body 55n and the second path side frame body 55f as shown in Figs. 4, 5 and 6, And arranged in the transverse direction of the path. Since the upstream portion 55a and the downstream portion 55b have the same configuration, the upstream portion 55a will be exemplarily described below.

The first path side frame member 55n and the second path side frame member 55f in the upstream side portion 55a are formed by arranging the frame type horizontal frame member 25 with a gap in the vertical direction, And are connected by a longitudinal connecting member 26 at a plurality of positions in the transverse direction and the running direction of the car 2. [ The horizontal frame member 25 includes a plurality of vertical horizontal members 25Y along the longitudinal direction of the first path L1 and the second path L2 and a horizontal horizontal member 25Y along the width direction of the first path L1 and the second path L2 25T are connected to each other. The vertical horizontal member 25Y and the vertical connecting member 26 are continuous from the upstream portion 55a to the downstream portion 55b.

The first path side frame body 55n and the second path side frame body 55f are suspended from the ceiling by a plurality of shelf hanging holes 24. The shelf head suspension 24 is longer than the rail supporting member 9 supporting the running rail 1 by a length equivalent to the height of the top rail transporting carriage 2. [ As a result, the first path L1 and the second path L2 of the overhead traveling carriage 2 are positioned between the plurality of shelf halves 24 when viewed in the running direction, The body 55n is located immediately below the first path L1 of the ceiling conveying car 2 and the second path side frame 55f at the upstream side portion 55a is located at the lower end of the ceiling- 2 < / RTI > path L2.

As shown in Fig. 6, the first path side frame body 55n in the upstream portion 55a is provided with an upstream side and a downstream side end portion in the running direction of the overhead traveling carriage 2 running on the first path L1 An intermediate shelf member 27 for forming the first path-side intermediate shelf 5n is provided. At the four positions excluding the end on the downstream side in the running direction of the overhead traveling carriage 2 running on the second path L2, the second path side frame body 55f on the upstream side portion 55a is provided with the And an intermediate shelf member 27 for forming the second path side intermediate shelf 5f.

As shown in Figs. 5 and 6, the intermediate lathe 27 has three positioning pins (not shown) which are engaged with three positioning grooves formed on the bottom surface of the article W, A connecting plate portion 27b upwardly directed from one end of the mounting surface portion 27a and a connecting plate portion 27c upwardly extending from the other end of the mounting surface portion 27a, . The upper end of one connecting plate portion 27b is connected to the vertical horizontal member 25Y and the upper end of the other connecting plate portion 27c is connected to one longitudinal vertical member 25Y in another longitudinal The intermediate shelf member 27 is connected to the horizontal member 25Y by the connection bracket 29 so that the mounting surface portion 27a is positioned lower than the lower end of the buffer frame 55 by the height of the article W And is fixed to the frame member 55 for a buffer. With this arrangement, in the posture (a position in which the opening of the front surface of the substrate storage container is located) of the article W is directed to the one connection plate portion 27b (the posture in the rightward direction in FIG. 5) So that the article W is mounted and supported by the arm 27a.

As shown in Figs. 2 and 6, the two first path-side intermediate shelves 5n and the second path L2 (located on the first path L1 side in the upstream portion 55a of the buffer frame 55) The four second path side intermediate shelves 5f located on the side of the first processing apparatus 8a and the station 4 on the first processing apparatus 8a are arranged in a group As shown in Fig. Similarly, two first path-side intermediate shelf 5n located on the first path L1 side in the downstream portion 55b of the buffer frame 55 and four second path side intermediate shelves 5n located on the second path L2 side The second transfer processing target group G2 as a set of transfer target groups to be installed corresponding to the second processing apparatus 8b by the path side intermediate shelf 5f and the station 4 in the second processing apparatus 8b, . As described above, one set of the conveying target objects is provided for each of the first processing device 8a and the second processing device 8b.

Then, with respect to the transporting objects other than the station 4 among the first group G1 of transporting objects, the stopping position where the ceiling transporting vehicle 2 traveling on the first route L1 is stopped and the stopping position where the second transporting route A stop position at which the car 2 is stopped is set. In other words, as stop positions for the first group G1 to be carried, in addition to the three stop positions Q1a to Q1c for the exchange part corresponding to the three commodity exchange positions of the station 4, At a position adjacent to the stop position Q1a for the first exchanger on the upstream side and a position adjacent to the stop position Q1c for the exchange part at the downstream most downstream side in the direction along the first path L1 on the downstream side, The first path side intermediate shelf stop position Q2n for transporting and mounting the article W between the car 2 and the first path side intermediate shelf 5n is set. In the second path L2, the ceiling transporting carriage 2 running the second path L2 is provided at the four positions corresponding to the four second path-side intermediate shelves 5f, and the second path-side intermediate shelf 5f and the second path- A second path side intermediate shelf stop position Q2f for loading and carrying the article W is set. The same applies to the stop position for the second group G2 to which the second transfer is carried.

[Ceiling conveying car]

3, 4, and 7, the ceiling-carrying truck 2 is provided with a running section 10 having a running drive wheel for running on the running rail 1, And a body portion 11 for supporting the article W so as to be capable of moving up and down and turning. The connecting body for connecting the traveling portion 10 and the main body portion 11 is composed of a pair of rail members Are disposed between the first and second plates 1a and 1b. The traveling section 10 is provided with a traveling motor 51 (see Fig. 9) for rotationally driving the traveling driving wheel.

4, the main body portion 11 includes a grip portion 3 for holding the article W, a lifting operation means 12 for lifting and moving the lifting support body 22 supporting the grip portion 3, (Not shown) for pivoting the grip portion 3 around the vertical axis for each of the lifting supporters 22; and a swinging means for swinging the upper portion of the article W held by the grip portion 3, And a cover body 13 covering one side of the cover body 13. The main body 11 is provided with a receiving coil 14 so as to be positioned between a pair of the rail members 1a and 1b and is connected to a feeder line 15 provided along the running rail 1, A magnetic field is generated by energizing the electric current so that electric power required by the ceiling transporting car 2 side is generated in the power receiving coil 14 by the magnetic field and the power is supplied to the ceiling transporting car 2 in a non- have.

The elevating operation means 12 includes a lifting motor 52 (see Fig. 9) and a rotary drum. By the rotation operation of the lifting motor 52, the rotary drum is moved in one direction and in the opposite direction The lifting supporter 22 is vertically movable up and down by rotating and driving the take-up belt 16.

The pivoting operation means includes a pivoting motor 53 (see Fig. 9). The pivoting motion of the pivoting motor 53 causes the pivoting support 22 to turn around the vertical axis. The lift support 22 is provided with a gripping posture for gripping the article W by the operation of the gripping motor 54 (see Fig. 9) and a posture of the gripping part 3 in the gripping- A switching mechanism is provided.

With the above-described configuration, the ceiling-carrying truck 2 travels along the first path L1 and the second path L2 and the annular paths LP1 to LP3 by traveling in one direction while being guided and supported by the traveling rail 1. [ It is possible.

The ceiling transporting vehicle 2 traveling on the first route L1 is operated by the lifting and lowering operation means 12 to lift the lifting support body 22 in the state of being stopped at any of the stop positions Q1a to Q1c The turning support means 22 is turned by the turning operation means and the switching mechanism is operated to switch the grip portion 3 to the gripping position and the grip releasing position, The article W is transported and mounted between the first path side intermediate shelf 5n and the exchange position, and similarly, in a state of being stopped at any one of the plurality of first path side intermediate shelf stop positions, And transports the article W therebetween.

The ceiling carrying truck 2 running on the second path L2 is stopped by one of the plurality of second path-side intermediate lathe stop positions and the elevating operation means 12 causes the elevating support body 22 The lifting support body 22 is turned by the turning operation means and the switching mechanism is operated to switch the grip portion 3 to the gripping position and the grip releasing position, And transports the article W between the intermediate shelf 5f and the intermediate shelf 5f.

3 and 4, the ceiling-carrying truck 2 running on the first path L1 is located at the most upstream position in the traveling direction indicated by the arrow a in Fig. 3 among the three stop positions Q1a to Q1c for the exchanger in the upstream portion 55a The ceiling carrying truck 2 which stops at the stop position Q1a for the exchanger at the upstream side and the ceiling carrying truck 2 that travels the second path L2 is stopped at the stop position Q2f for the second route side intermediate shelves at the four positions on the downstream portion 55b, And stopped at the intermediate lathe stop position Q2f at the most upstream side in the running direction indicated by the arrow b.

[Intermediate transfer mounting device]

As shown in Figs. 3 to 7, there is provided an intermediate conveyance mounting apparatus 6 to which a buffer frame 55 provided with an intermediate shelf 5 is to be installed. As the intermediate transfer apparatus 6, one first intermediate transfer apparatus 6n and one second intermediate transfer apparatus 6f are provided for one buffer frame 55. The first intermediate conveyance mounting apparatus 6n is arranged so as to be vertically overlapped with the first path L1 and the first path side intermediate shelf 5n when viewed in the running direction of the ceiling conveying car 2 Is positioned between the first path L1 and the first path side intermediate shelf 5n when viewed in the running direction of the first path side intermediate shelf 5n and preferably below the first path L1, ), And is provided so as to be capable of reciprocating in the direction along the running direction of the overhead traveling carriage 2 at a height between the first path L1 and the first path side intermediate shelf 5n have. The second intermediate conveyance mounting apparatus 6f is arranged so as to overlap with the second path L2 and the second path side intermediate shelf 5f when viewed in the running direction of the ceiling conveying vehicle 2 Is positioned between the second path L2 and the second path side intermediate shelf 5f as viewed in the running direction of the first path side intermediate shelf 5f, ), And is provided so as to be capable of reciprocating in the direction along the running direction of the overhead traveling carriage 2 at a height between the second path L2 and the second path side intermediate shelf 5f have.

Both the first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f are provided so as to be reciprocally movable over the entire range of the buffer frame member 55 in the moving direction thereof. As a result, each of the first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f reciprocates over the upstream portion 55a and the downstream portion 55b, whereby the first processing apparatus 8a The object W can be transported and mounted on any one of the objects to be transported in the second transporting object group G2 provided corresponding to the first transporting object group G1 and the second processing apparatus 8b provided corresponding to the first transporting object group G2. Details will be described below.

As shown in Fig. 5, the first intermediate transfer support apparatus 6n is provided with a grip portion 7 for a transfer support device for supporting the article W so as to be vertically movable, 7) is transversely operated in the widthwise direction (the widthwise direction of the first path L1 and the second path L2, in the lateral direction of the paper in FIG. 5) of the transporting device.

The first intermediate transfer mounting apparatus 6n is configured such that the gripping section 7 for the conveyance mounting apparatus is moved to the retreating position as the first path side position just below the first path L1 And a protruding position as a second path side position just below the second path L2, and the protruding position of the top end of the overhead traveling carriage 2 in the state in which the gripper 7 for the conveyance mounting apparatus is located at the retreat position And is configured to be movable along the running direction. Thus, interference with the ceiling conveying car 2 during the conveyance mounting operation and interference with the second intermediate conveyance loading apparatus 6f are prevented.

4 shows a state in which the first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f are retracting the grippers 7 for the conveyance mounting apparatus to the retreat position in the traveling direction Fig. 5 is a view showing the state in which the grippers 7 for the conveyance mounting apparatus are protruded to the protruding positions in the state in which the first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f are stopped together When viewed in the traveling direction of the ceiling-conveying vehicle 2. [0051] As shown in Fig.

3 to 5, the buffer frame 55 is provided with a guide support body 17 for supporting the first intermediate transfer support apparatus 6n and guiding movement along the running direction of the overhead traveling carriage 2 The guide supporting body 17 is provided on the ceiling carrying truck 2 in a stopped state at the stop position Q1 for the exchange part and the stop position Q2 for the intermediate shelf, Thereby forming a space through which the article W can pass in the vertical direction.

Concretely, the guide supporting body 17 is provided in the first intermediate transfer mounting apparatus 6n in a state in which the grip portion 3 of the ceiling conveying car 2 holding the article W forms a gap through which it can pass in the vertical direction, And a pair of lower guide rails 18 · 19 spaced apart from each other in the transverse direction. The pair of lower guide rails 18 · 19 are provided on the upper side of the buffer frame 55 in such a manner that two rail mounting members 20 · 21).

A pair of lower guide rails 18 and 19 are slidably engaged with the pair of lower guide rails 18 · 19 at both ends in the widthwise direction of the transporting base material 32 of the moving base material 32 provided on the upper portion of the first intermediate transfer device 6n, The blocks 34 and 35 are provided in a fixed state. An operated bracket 33 is attached to one end of the movable base material 32 in the running direction. 3 and 5, the driven bracket 33 includes a drive pulley 36a and a driven pulley 36b having teeth that rotate around the horizontal axis. The operated bracket 33 is connected to the upper surface of the upper winding portion of the moving operation timing belt 38 on the longitudinally wound surface wound around the upper and lower frames 36a and 36b.

The movable base member 32 is rotatably supported on the pair of lower guide rails 18 · 19 by rotationally driving the movable operation motor 37 for winding and operating the movable operation timing belt 38 in one direction and in the opposite direction. Thereby making it possible to perform a reciprocating linear movement operation. In other words, the movement of the first intermediate transfer support apparatus 6n can be controlled by controlling the rotation operation of the movement operation motor 37. [ The positioning control of the movement of the intermediate transfer support apparatus 6 may be performed by servo control using the servo motor as the movement control operation motor 37 or may be performed by the servo control of the first intermediate transfer support apparatus 6n in the running direction A plurality of photoelectric sensors corresponding to the respective stop positions are provided as position detecting means for detecting a stop position for carrying the substrate placed on the moving path along which the substrate is placed, and positioning control is performed based on the detection information of these sensors .

5, on the upper surface of the moving base material 32 of the first intermediate transfer support apparatus 6n, a ball screw 40 capable of moving the guide block 39 in the transverse widthwise direction is installed . The guide block 39 is provided at the end of the base fork of the multistage slide fork 42 for moving the lifting support 41 in the transverse direction of the conveyance mounting device in the retracting direction It is connected. The slide fork 42 has, for example, a base fork, an intermediate fork slidable in the lateral direction with respect to the base fork, and a primary fork slidable in the transverse direction with respect to the intermediate fork . The respective stages of the slide forks 42 are connected to each other by a link belt 43 in a state in which they are engaged with each other by a linear movement guide mechanism and are lifted and lowered to the primary fork So that the elevating support 41 connected via the operating means 45 and the pivoting operation means 46 can be moved out. The horizontal block actuating motor 44 for rotationally driving the screw 40a of the ball screw 40 is rotationally driven in the one direction and the reverse direction so that the guide block 39 is moved in the transverse widthwise direction And a direction perpendicular to the longitudinal direction of the first and second paths). As described above, the grip portion 7 for the conveyance mounting apparatus in the intermediate conveyance mounting apparatus 6 is conveyed to the side of the conveyance mounting apparatus by the lateral row driving motor 44, the ball screw 40, and the slide fork 42 And lateral row operation means 31 for performing horizontal row operation in the width direction.

The lifting and lowering operation means 45 rotates the rotary drum 48 by driving the lifting motor 47 to rotate in one direction and the opposite direction so that the lifting and lowering support 41, So as to vertically move up and down. The turning operation means 46 rotationally drives the swinging motor 50 to turn the grip portion 7 for the conveyance mounting apparatus around the vertical axis. Thereby, the posture can be adjusted to a proper posture in the plane of the article W with respect to the station 4 and the intermediate shelf 5.

8, in the upstream portion 55a and the downstream portion 55b of the buffer frame 55, the first intermediate transfer support apparatus 6n is configured such that, Two stop positions Pnl and Pn5 for transporting are set just above each of the two first path-side intermediate shelves 5n and a stop between these stopping positions for transporting in the moving direction of the first intermediate transfer mounting apparatus 6n The grip portion 7 for the conveyance mounting apparatus is moved in the lateral direction and moved up and down in the state of being stopped at any one of the three transporting stop positions Pn2 to Pn4 set at the first path side intermediate shelf 5n The second path side intermediate shelf 5f, and the commodity exchanging position in the station 4, as shown in Fig.

The second intermediate transfer mounting apparatus 6f is similar to the first intermediate transfer mounting apparatus 6n except that the lateral row operation means 31 is opposite to the direction in which the gripping section 7 for the transfer destination apparatus is moved in the reverse direction, . The second intermediate transfer support apparatus 6f has four second path side intermediate shelves 5f on the upstream side portion 55a and the downstream side portion 55b of the buffer frame 55, Of the buffer frame 55 in the traveling direction of the ceiling-carrying truck 2 among the four transport-stopping positions Pf2 to Pf5 and the two first-path-side intermediate shelves 5n, In the state of being stopped at any one of the feed stop positions Pf1 corresponding to the inner first side path side intermediate shelf 5n, the grip portion 7 for the conveyance mounting apparatus is moved in the lateral direction, The article W can be transported and mounted between the shelf 5n and the second path side intermediate shelf 5f and between the article exchange positions in the station 4. [

[Conveying conveyor]

In the intermediate portion of the buffer frame 55 in the traveling direction of the overhead traveling carriage 2, one station 4 (four stations shown in Fig. 2) (The left upper station in FIG. 2) and the other station 4 (the left lower station in FIG. 2) And a conveying conveyor 56 capable of conveying the article W between the conveyance object group and the conveyance object group installed in correspondence with the station 4 are provided. Likewise, a conveyance conveyor 56 capable of conveying the article W between the conveyance target group provided corresponding to the right upper station 4 in Fig. 2 and the conveyance target group provided corresponding to the right lower station 4, Respectively. As shown in Fig. 7, these pair of conveying conveyors 56 are connected to the upstream portion 55a and the downstream portion 55b of the buffer frame 55 in a suspended state. Since they have the same configuration, a description will be given of the conveyance conveyor 56 connected to the upstream side portion 55a of the buffer frame 55 in the following description.

6 and 7, the conveying conveyor 56 includes a conveying path portion 57 for connecting the buffer frames 55 provided in correspondence with the one and the other station 4, And a conveying moving body (59) capable of reciprocating the conveying path portion (57) so that the conveying path (57) can be elevated and retracted. One end of the conveying path portion 57 is connected to the buffer frame 55 provided corresponding to one of the stations 4 and the other end of the conveying path portion 57 is connected to the other station 4 And the conveying conveyor 56 is suspended by the frame body 55 for both buffers. The intermediate portion of the conveying conveyor 56 and the ceiling may be connected to the shelf spout 24 by the same member for reinforcement.

9, the conveying moving body 59 includes a traveling motor 61 for rotationally driving the drive wheels, an elevating motor 62 for raising and lowering the article placing table 58, an article placing table 58, And a swing motor 63 for swinging and driving the swing motor. Like the intermediate shelf member 27 forming the intermediate shelf 5, is engaged with the three positioning grooves formed on the bottom surface of the article W to position the article W in the article placing table 58 And three positioning pins projecting upward.

The conveying path portion 57 is constituted by a housing, and a slit 60 is formed in the upper surface portion thereof along the longitudinal direction. The conveying moving body 59 is disposed inside the case body of the conveying path portion 57 in order to prevent dust from scattering to the outside, 58 are connected to and supported by the transporting mobile body by means of a support shaft (not shown) threaded into the slit 60 above the upper surface portion. The conveying moving body 59 is reciprocally moved along the longitudinal direction inside the conveying path portion 57 in a state in which the conveying moving body 59 is guided by a guide mechanism (not shown) by rotationally driving the drive wheel in one direction and the opposite direction .

As shown in Fig. 8, in the movement path of each of the first intermediate transfer installation 6n and the second intermediate transfer installation 6f provided corresponding to one of the stations 4, The first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f are arranged between the end of the conveyor 56 on one side of the station 4 A conveyor transfer mounting position Pc for transferring and mounting the article W is set. Likewise, in the movement path of each of the first intermediate transfer installation 6n and the second intermediate transfer installation 6f provided corresponding to the other station 4, The first intermediate transfer support apparatus 6n and the second intermediate transfer support apparatus 6f are provided between the end of the conveying conveyor 56 on the side of the other station 4 side at a position where the conveyor 56 is located A conveyor transfer mounting position Pc for transferring and mounting the article W is set.

The first intermediate transfer apparatus 6n and the second intermediate transfer apparatus 6f installed in correspondence with the one station 4 are stopped at the conveyor transfer mounting position Pc set in each movement path, (54) provided at one of the conveyance mounting positions, which is one end of the conveying path (56). Similarly, the first intermediate transfer installation 6n and the second intermediate transfer installation 6f installed in correspondence with the other station 4 are in a state of being stopped at the conveyer transfer mounting position Pc set in each movement path And the water tray 64 installed at the other transporting position, which is the other end of the transporting conveyor 56, for transporting and mounting the article W.

In the present embodiment, the conveyor transfer mounting position Pc is set so as to correspond to the conveyance stop positions Pn5 and Pf5 of the upstream side portion 55a and the conveyance stop positions Pn1 and Pf1 of the downstream side portion 55b, Is set to the same position in the moving direction of the apparatus (6n) or the second intermediate transfer mounting apparatus (6f). Since the conveyor transfer mounting position Pc is located just below the second path L2, the first intermediate transfer mounting apparatus 6n projects the gripper 7 for the transfer mounting apparatus to the projecting position, 59). The second intermediate transfer mounting apparatus 6f transfers and mounts the article W to and from the transporting moving body 59 while holding the gripping section 7 for the transporting apparatus at the retracted position.

As shown in Figs. 4, 6, and 7, a receiving table 64 capable of loading and supporting the article W is provided at both of the one conveying mounting position and the other conveying mounting position of the conveying conveyor 56. Fig. In the receiving stand 64, three positioning pins for positioning the article W are provided so as to protrude upward. These positioning pins are disposed so as to engage with the bottom surface of the article W at a position different from that of the article carrying table 58 in the moving carrier 59 for conveying, The article placing table 58 can be lifted from the lower side of the table W so that the article W can be held in a state of being positioned by the article placing table 58. The article W is received from the receiving tray 64 on the moving moving body 59 The loading and unloading can be carried out without deviating the position and posture of the article W. Similarly, the position of the article W to be transported, in which the opposite article W is delivered from the transporting moving body 59 to the receiving table 64, can be performed without deviating.

As described above, in the present embodiment, the first intermediate transfer apparatus 6n and the second intermediate transfer apparatus 6f provided corresponding to the one station 4 and the second intermediate transfer apparatus 6f provided corresponding to the other station 4 There is provided a conveying means for conveying the article W in the transverse direction of the first path L1 and the second path L2 between the first intermediate transfer apparatus 6n and the second intermediate transfer apparatus 6f, Means for supporting the article W at the one feeding position for feeding the article W between the first intermediate feeder 6n and the second intermediate feeder 6f provided corresponding to one of the stations 4, To the other transfer destination mounting position where the first intermediate transfer apparatus 6n provided in correspondence with the other station 4 and the second intermediate transfer apparatus 6f transfer the article W between the first intermediate transfer apparatus 6n and the second intermediate transfer apparatus 6f, To the carry-on conveyor 56 It is composed.

In this embodiment, the conveying conveyor 56 is provided with the first intermediate transfer installation 6n provided corresponding to one of the stations 4 and the second intermediate transfer installation 6f, And the first intermediate transfer installation device 6n and the second intermediate transfer installation device 6f installed in correspondence with the other station 4 are provided with the transfer receiving position The article W can be transported and mounted at the other transporting position where the receiving stand 64 capable of loading and supporting the article W is provided and the article W can be loaded and transported between the one transporting position and the other transporting position And a moving body 59 for a moving body.

9 is a control block diagram of the product transport facility. The intermediate conveyance installation controller VCp provided in the intermediate conveyance loading unit 6 and the conveyor controller VCr provided in the conveyance conveyor 56 are connected to the host controller HC and the wireless communication Respectively. The host controller HC manages the processing stages of the articles W and sets a conveying source and conveying line for each of the articles W so as to properly convey the articles W in accordance with a conveying request from each of the processing apparatuses and issues a conveying instruction . Then, the operation of the overhead conveying carriage 2, the intermediate conveyance loading apparatus 6, and the conveying conveyor 56 is controlled by the respective controllers based on a conveyance command instructed by the host controller HC.

The host controller HC takes out the processed article W from the station 4 and returns it to the processing apparatus 8 in the next step, for example, when the processing of the article W is completed by a certain processing apparatus 8 And a return instruction is issued for the next time. The transporting operation is performed by the station 4 or the transporting target group belonging to the same buffer frame 55 to which the transporting target group of the station 4 belongs. The other article W is temporarily placed on the intermediate shelf 5 of the buffer frame 55 on the ceiling transporting car 2 transporting the wafer W so that the ceiling transporting carriage 2 in the standby state does not exist It is possible to quickly carry out the above-mentioned unloading operation. In addition, by provisionally mounting the intermediate shelf 5, it is possible to eliminate as much waste of the entire facility as the ceiling transporting vehicle 2 travels in an empty state in which the article W is not held.

In the present embodiment, the intermediate shelf 5 is provided just below both the first path L1 and the second path L2, and all of the ceiling transporting carriages 2 running on the first path L1 or the second path L2 , And only the lower part of the ceiling conveying car 2 is conveyed. Therefore, it is possible to avoid the problem that the load of the conveying installation work is concentrated on the ceiling conveying carriage 2 running on the first path. The transporting and mounting work of the articles W to the station 4 in the processing apparatus 8 is carried out in a plurality of intermediate positions provided in the buffer frame 55 provided over the stations 4 adjacent to the station in the traveling direction. Since the number of intermediate shelves 5 is small, the article W to be carried into the station 4 by the overhead conveying carriage 2 and the article W to be carried out can be temporarily mounted on the intermediate shelf 5 It is possible to do without causing as much inconvenience as possible. Further, by providing the intermediate transfer support device 6 directly below both the first path L1 and the second path L2, the load of the transfer mounting work of the ceiling conveying car 2 can be further reduced. Further, when the article W is to be transported to the transport target group for the station 4 opposed to the transport target group for the station 4 from the stationary transporting carriage 2, It is possible to quickly transport the article W by using the conveying conveyor 56 between the intermediate conveyance mounting apparatuses for the opposite stations 4 instead of the route for conveying the route via the LP1 to LP3.

[Other Embodiments]

While the invention made by the inventor has been specifically described in accordance with the embodiments of the invention as described above, the present invention is not limited to the above-described embodiments, and various modifications are possible without departing from the gist of the invention. Hereinafter, another embodiment of the present invention will be described.

(1) In the above embodiment, both end portions of the second path L2 are connected to the annular paths LP1 to LP3 as transfer paths. However, both ends of the second path L2 may not be connected to any path. In this case, the overhead traveling carriage 2 traveling on the second route L2 travels on the second travel route L2.

(2) In the above-described embodiment, the intermediate transfer mounting apparatus 6 has a configuration in which a plurality of adjacent stations 4 and the buffer frame 55 are used in common, The buffer frame 55 may be provided exclusively for the single station 4 so as to be movable between the intermediate transfer unit 55a and the downstream portion 55b, 6 may be movable within the range of the buffer frame 55 for the single station 4 in the moving direction.

(3) In the above embodiment, the ceiling-carrying truck may be configured so that the grip portion is slidable in the lateral direction of the traveling path.

(4) In the above-described embodiment, the first intermediate transfer apparatus 6n and the second intermediate transfer apparatus 6f are arranged in a state in which the holding unit 7 for the transfer destination apparatus is positioned at the retreat position, 2, the first intermediate transfer installation device 6n and the second intermediate transfer installation device 6f are configured to be movable in the intermediate transfer installation device and the conveyance mounting operation of the opposing side, So as to allow movement of the grip portion 7 for the conveyance mounting apparatus in a state in which the grip portion 7 protrudes to the protruding position or movement while performing the withdrawal operation of the grip portion 7 for the conveyance mounting apparatus .

(5) In the above embodiment, the first intermediate transfer support device 6n and the second intermediate transfer support device 6f are respectively provided for one buffer frame 55, A plurality of the first intermediate transfer apparatuses 6n and the second intermediate transfer apparatuses 6f may be provided for the buffer frame member 55. [

(6) In the above-described embodiment, as the conveying conveyor, the conveying moving member capable of moving the conveying path portion is configured to convey the article. However, instead of this configuration, as the conveying conveyor, And may be configured to carry the article by reciprocating operation.

(7) In the above embodiment, the conveying means is constituted by the conveying conveyor. However, as illustrated in Fig. 10, the conveying means may be constituted by a pair of the article exchanging portions arranged in the direction perpendicular to the longitudinal direction of the traveling path, A movable rail provided between the frame members for the movable frame, and an intermediate conveyance mounting apparatus configured to be movable with the movable rail. In the example shown in Fig. 10, the conveying means is constituted by the moving rail and the second path side intermediate conveyance mounting apparatus. However, the conveying means may be constituted by the moving rail and the first path side intermediate conveyance mounting apparatus. In either case, it is preferable to provide a moving direction switching means for switching the moving direction of the intermediate transfer device from the direction along the running direction of the ceiling conveying vehicle to the direction along the widthwise direction of the traveling path. Hereinafter, specific examples will be described.

10, in the case where the intermediate transfer support apparatus 6 is configured so as to be capable of running in a suspended state supported by the upper rail 65 along the running direction of the overhead traveling carriage 2, the overhead traveling carriage 2 Between the buffer frame 55 of the pair of stations 4 arranged in the vertical direction with respect to the longitudinal direction of the first path L1 and the second path L2 of the upper rail 65, cross rail 67 is provided. As a part of the upper rail 65 of the second intermediate feeder 6f in each of these buffer frames 55, a moving direction switching rail 66 (moving direction switching means) rotatable around the vertical axis, Are disposed at both ends of the movable rail 67. [

According to this configuration, the second intermediate feeder 6f holding the article W is caused to travel along the running direction of the overhead traveling carriage 2 to the position where the moving direction switching rail 66 is installed, And then the traveling direction switching rail 66 is suspended from the first path L1 and the second path L2 of the overhead traveling carriage 2 by the first path L1 and the second path L2, The second intermediate transfer mounting apparatus 6f transfers the cross rail 67 from one buffer frame 55 to the other buffer frame 55 by switching the direction along the width direction of the path L2 Can move along.

After the second intermediate transfer support apparatus 6f reaches the other buffer frame 55, the movement direction switching rail 66 in the other buffer frame 55 is moved to the overhead conveyance carriage 2 by changing the direction along the first path L1 and the second path L2 from the direction along the lateral direction of the first path L1 and the second path L2, The movable frame 5 is moved along the upper rail 65 in the stationary frame member 55 so as to be moved to the article exchange position in the other station 4 or to the intermediate shelf 5 in the buffer frame member relative to the station 4. [ The article W can be transported and mounted. In this way, the same second intermediate transfer mounting apparatus 6f can be used in the buffer frame member 55 with respect to the one station 4 and the same buffer member 55 with respect to the other station 4 have.

1: Running rail
2: Ceiling conveyor
3:
4:
5: Middle shelf
5n: intermediate path on the first path side
5f: intermediate path side shelf side
6: Medium transfer device
6n: first path side intermediate transfer mounting device
6f: second path side intermediate transfer mounting device
7: gripper for transfer device
56: conveying conveyor (conveying means)
W: Goods
L1: first path
L2: second path
LP1, LP2, LP3: Route for transfer
Q1a, Q2a, Q3a: Stop position for exchanger

Claims (5)

(Grip portion) capable of traveling along a traveling path in a state of being guided and supported by a running rail provided on the ceiling side and capable of lifting and lowering the article, A ceiling conveyance vehicle (conveyance vehicle)
And an intermediate shelf disposed above the article exchange unit and below the ceiling conveyance car for temporarily mounting an article to be transported and mounted on the article exchange unit,
Wherein the traveling path includes a straight first path passing through a stopping position for a switching part set immediately above the article exchanging part and a straight line parallel to the first path and set at a position different from the transverse direction of the first path, 2 path is installed,
The intermediate shelf includes a first path side intermediate shelf positioned directly below the first path and at a different position from the article exchange portion in the running direction of the ceiling transporting vehicle, A second path side intermediate shelf is provided,
A grip portion for a conveyance mounting apparatus for supporting the article is vertically movable and slidable in a lateral width direction of the first path and the second path, Side intermediate shelf, and an intermediate transfer-receiving apparatus capable of transferring and loading the article between the intermediate-stage side shelf and the second path-side intermediate shelf,
The intermediate transfer support apparatus according to any one of claims 1 to 3, wherein the intermediate transfer support apparatus is provided with a first path and a second path side intermediate shelf, A first path side intermediate transfer mounting device provided so as to be capable of reciprocating along the running direction of the overhead traveling carriage at a height between the second path side and the second path side intermediate side in the traveling direction of the overhead traveling carriage, And a second path-side intermediate transfer mounting device provided so as to be capable of reciprocating along the running direction of the overhead traveling carriage at a height between the second path and the second path- At least one of which is installed. The method according to claim 1,
Wherein both the first path-side intermediate transfer mounting apparatus and the second path-side intermediate transfer mounting apparatus are provided,
Wherein the first path-side intermediate transfer support apparatus is configured so that the grip portion for the conveyance mounting apparatus is arranged between the first path side position immediately below the first path and the second path side position immediately below the second path, And is movable along a traveling direction of the overhead traveling carriage in a state in which the grip portion for the conveyance mounting apparatus is located at the first path side position,
Wherein the second path side intermediate transfer mounting apparatus is provided with a grip portion for the conveyance mounting apparatus so as to be able to move out between the second path side position and the first path side position, And is movable along the traveling direction of the overhead traveling carriage in a state of being positioned at the second path side position. 3. The method according to claim 1 or 2,
Wherein the one or more article exchanging parts are provided with one article exchanging part and the other article exchanging part which are spaced apart from each other in the transverse direction of the first path and the second path,
Wherein the first path and the second path provided in correspondence with the one article exchange portion and the first path and the second path provided in correspondence with the other article exchange portion are formed by the first path and the second path, Two paths are arranged in parallel in a state of being spaced from each other in the transverse direction of the two paths,
The first path and the second path provided corresponding to at least one of the first path and the second path provided corresponding to the one article exchange portion and the other article exchange portion, Are connected to the transfer route,
The overhead traveling carriage is connected to the transfer route of the first route and the second route provided corresponding to the one article exchange unit and the first route provided corresponding to the other goods exchange unit, Wherein the transfer path is configured to be movable between the connection path and the connection path of the second path via the transfer path,
And the intermediate transfer support apparatus provided in correspondence with the one article exchange unit and the intermediate transfer installation apparatus provided in correspondence with the other article exchange unit are arranged in the transverse direction of the first path and the second path Is provided with a conveying means capable of conveying the article. The method of claim 3,
Wherein the conveying means is configured to mount the article at one of the first and second path side intermediate transfer apparatuses provided in correspondence with the one article exchange unit or the one intermediate transfer apparatus for transferring the article to / Side intermediate transfer apparatus or the second path-side intermediate transfer apparatus, which is capable of supporting and transferring an article between the first path-side intermediate transfer apparatus and the second path- And a conveying conveyor capable of loading and conveying the article. 3. The method according to claim 1 or 2,
Wherein the first path and the second path are formed at the same height, and the first path side intermediate shelf and the second path side intermediate shelf are provided at the same height.

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