KR101659048B1 - Apparatus and methode for inspecting surface of warpage panel for flexible device - Google Patents

Apparatus and methode for inspecting surface of warpage panel for flexible device Download PDF

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Publication number
KR101659048B1
KR101659048B1 KR1020140095475A KR20140095475A KR101659048B1 KR 101659048 B1 KR101659048 B1 KR 101659048B1 KR 1020140095475 A KR1020140095475 A KR 1020140095475A KR 20140095475 A KR20140095475 A KR 20140095475A KR 101659048 B1 KR101659048 B1 KR 101659048B1
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South Korea
Prior art keywords
cover
panel
compressed air
wiping
inspection
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KR1020140095475A
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Korean (ko)
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KR20160013545A (en
Inventor
이창우
송준엽
하태호
이재학
김승만
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한국기계연구원
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  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
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Abstract

The present invention can prevent the recessed dimples from appearing on the surface of the wiping panel by allowing the wiping panel for the flexible device of the bent shape to be pressed by using the pressure of the compressed air to flatten and fix the surface to the upper surface of the flat and smooth base The present invention relates to an apparatus and a method for inspecting a surface of a flexible device wiping panel which can increase the inspection speed and enable more stable and accurate inspection.

Description

Technical Field [0001] The present invention relates to an apparatus and a method for inspecting a surface of a flexible panel,

The present invention relates to an apparatus and a method for inspecting the surface of a warpage panel occurring in a flexible device, and in which a wiping panel for a flexible device in a bent state can be inspected in a flat- The present invention relates to an apparatus and a method for inspecting a surface of a flexible device wiping panel that can be easily inspected and can quickly inspect the surface by solving the problem of wiping occurring in the flexible device.

Generally, a panel for a flexible device is inspected to detect foreign matter, stains, dust, defects, etc. on the surface after it is manufactured, and a defect is detected through a vision inspection using a microscope (or an optical camera).

Such a flexible device panel has a thin thickness and warpage (warpage), and it is necessary to conduct a surface inspection along a curved surface. (See Fig. 1)

However, when the surface inspection is performed along the curved surface as described above, the focus is continuously adjusted while being conveyed, so that the conveying speed of the microscope or the inspection object is slow and the inspection time is long.

In order to perform the vision inspection, the conveying means for conveying the object to be inspected (substrate) and the fixing means for fixing the object to be inspected must be installed.

Particularly, in the surface inspection of a film having ductility as a thin film material, the smoothness of the fixing means is a very important issue. That is, as a fixing means for securing the smoothness of the substrate during the inspection, conventionally, a hole is formed in the fixing means and a vacuum attraction force is applied to the hole to adsorb the substrate, or vacuum attraction force is applied using the porous pad, And there is a method of adsorbing and fixing.

An optical inspection apparatus disclosed in Korean Patent Laid-Open Publication No. 10-2013-0120830 is disclosed in this prior art. FIG. 2 shows a device for flatly unfolding a substrate using a conventional vacuum attraction force.

As shown in the drawing, the conventional fixing means using the vacuum suction force has a structure in which an adsorption panel 20 formed of porous ceramics is arranged at the rim and a central portion of the inspection stage 10 and a vacuum line 30 is connected to the adsorption pad 20 The substrate 1 is flattened and fixed on the upper surface of the inspection stage 10 by using the vacuum attraction force, and the surface of the substrate can be inspected using the inspection means 40.

Here, the fixing means using the vacuum attraction force is a technique of sucking air between the substrate and the fixing means to apply a negative pressure to vacuum-adsorb the substrate. Since this apparatus densely adsorbs the entire surface of the substrate with a strong negative pressure, the substrate can be adsorbed while suppressing warpage. However, in such a case, the smoothness can not be ensured due to distortion or lifting of the substrate, which can result in an untestable area.

Further, in the case of a thin film substrate, the substrate of the hole portion formed in the fixing means for vacuum adsorption or the substrate of the pore portion of the porous adsorption pad may be pulled by the vacuum pressure to cause dimples concave on the substrate, Which is difficult to detect. That is, it is difficult to discriminate whether dimples formed by concave depressions due to vacuum pressure are caused by the original surface defects of the substrate or by the vacuum pressure, which takes a long time.

A related art related to this is disclosed in Korean Patent Laid-Open Publication No. 10-2013-0120830 entitled " Optical Inspection Apparatus ".

KR 10-2013-0120830E (2013.11.05.)

SUMMARY OF THE INVENTION It is an object of the present invention to provide a flexible wiping panel for a flexible device which can be flatly spread and fixed and which does not cause concave dimples on the wiping panel surface. The present invention also provides an apparatus and a method for inspecting a surface of a flexible device wiping panel which can increase the inspection speed and enable more stable and accurate inspection.

According to an aspect of the present invention, there is provided a flexible device wipe panel surface inspection apparatus including: a table having a top surface formed to be flat and smooth; A cover which is spaced apart from the upper side of the surface plate and has a hollow interior and an open lower side to form a compressed air inlet; And inspecting means provided inside the cover; And a control unit.

Further, the lower end width of the open lower side of the cover is formed to be narrower than the width of the wiped panel placed on the upper surface of the surface plate.

Further, the cover and the inspection means are formed to be movable up and down, back and forth, and left and right directions.

In this case, the inspecting means is coupled to the cover, and the inspecting means is formed to be movable up and down, back and forth, and left and right in a state of being coupled to the cover.

Further, the cover is formed in a pyramid shape having a larger cross-sectional area than the upper side.

Further, the cover has a compressed air inlet formed at the upper center thereof.

A method of inspecting a surface of a flexible device wiping panel according to the present invention comprises the steps of: (S10) placing a wiping panel on an upper surface of a surface plate having a flat and smooth upper surface; (S20) bringing the cover close to the wipe panel so that the lower open lower end of the cover is spaced apart from the upper surface of the wipe panel; Injecting compressed air into the hollow interior of the cover so that the wiping panel is brought into close contact with the upper surface of the surface of the plate (S30); And inspecting the surface of the wiping panel by moving inspection means disposed in the hollow interior of the cover (S40); And a control unit.

In addition, the compressed air is continuously injected into the cover in steps S30 and S40, and the injected compressed air is discharged to the outside of the cover through the space between the lower end of the cover and the upper surface of the wiper panel do.

INDUSTRIAL APPLICABILITY The flexible device wipe panel surface inspection apparatus and method according to the present invention are advantageous in that a wipe panel for a flexible device in a bent shape can be flattened and fixed, and then the surface can be inspected, thereby allowing a rapid inspection speed.

In addition, since the wiping panel is fixed and the surface to which the wiping panel is adhered is formed flat and smooth, and no vacuum is used, it is possible to prevent concave dimples from being generated on the surface of the closely attached wiping panel, There is an advantage that inspection can be performed.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a method of inspecting the surface of a flexible device wafers panel. Fig.
2 is a cross-sectional view showing a conventional flexible device wipe panel surface inspection apparatus.
3 to 5 are cross-sectional schematic views showing an apparatus and a method for inspecting a surface of a flexible device wipe panel according to the present invention.
6 is a schematic cross-sectional view showing the width of the lower end of the cover and the width of the wiping panel according to the present invention.

Hereinafter, an apparatus and method for inspecting a surface of a flexible device wafers panel according to the present invention will be described in detail with reference to the accompanying drawings.

3 to 5 are cross-sectional schematic views showing an apparatus and a method for inspecting a surface of a flexible device wipe panel according to the present invention.

As shown in the figure, the flexible device wafers panel surface inspection apparatus 1000 according to the present invention includes: a base 100 having a flat and smooth upper surface; A cover 200 spaced apart from the upper surface of the base 100 and having a hollow interior and a lower opening to form a compressed air inlet 210; And inspection means (300) provided inside the cover (200); . ≪ / RTI >

First, the surface of the base 100 is flat and smooth.

The cover 200 is disposed on the upper surface of the base 100 and is spaced apart from the upper surface of the base 100 by a predetermined distance. The cover 200 is formed hollow so that its interior is empty and opened at its lower side, and a compressed air inlet 210 is formed at an upper side thereof. Here, the compressed air inlet 210 may be connected to a compressed air tank or a compressor by a hose or a pipe so as to supply compressed air. So that the compressed air injected through the compressed air inlet 210 can be discharged through the inside of the cover 200 to the opened lower side.

The inspection means 300 may be provided in the hollow interior of the cover 200 and the inspection means 300 may be a microscope capable of inspecting the surface of the wiping panel 400 or a camera which is a photographing means.

The lower end of the cover 200 is positioned to be spaced from the upper surface of the wiping panel 400 by a predetermined distance while the wiping panel 400 having the curved upper surface is placed on the upper surface of the base 100, The wiping panel 400 having a curved shape is pushed by the pressure of the compressed air and the wiping panel 400 is pressed against the surface of the base 100 As shown in Fig. At this time, the compressed air injected into the cover 200 is discharged through the gap between the lower end of the cover 200 and the wiping panel 400. If the gap is too large, The distance between the lower end of the cover 200 and the upper surface of the wiper panel 400 may be adjusted so that the compressed air is supplied to the inside of the cover 200 through the gap, It is preferable to allow the gas to be discharged.

As described above, the flexible device wipe panel surface inspection apparatus of the present invention is advantageous in that it can inspect the surface after the wavy form of the wipe panel for a flexible device is flattened and fixed, and the inspection speed can be increased.

In addition, since the wiping panel is fixed and the surface to which the wiping panel is adhered is formed flat and smooth, and no vacuum is used, it is possible to prevent concave dimples from being generated on the surface of the closely attached wiping panel, There is an advantage that inspection can be performed.

The bottom width of the open lower side of the cover 200 may be narrower than the width of the woof paper panel 400 placed on the upper surface of the base 100.

6, the width WC of the lower end of the cover 200 is narrower than the width WP of the waved panel 400 having a curvature. As a result, A force to press the paper panel 400 may act. That is, when the width of the lower end of the cover 200 is wider than the width of the woof paper panel 400, compressed air flows between the lower surface of the woof paper panel 400 and the upper surface of the surface plate 100, This is because the pressing force may not work.

In addition, the cover 200 and the inspection means 300 may be formed to be movable up and down, back and forth, and left and right.

That is, the cover 200 is placed on the upper surface of the base 100 so that the wiping panel 400 is spaced apart from the upper surface of the base 100 so that the wiping panel 400 can be placed on the upper surface of the base 100 And may be formed to be movable in the up and down direction so that the lower end of the cover 200 may be disposed close to the upper surface of the woofing panel 400 after being laid. When the wiping panel 400 is wide, the cover 200 can be moved back and forth and left and right. When the wiping panel 400 is wide, the wiping panel 400 is moved to the upper surface So that it can be inspected.

The inspection means 300 may be movable up and down to inspect the surface of the wiping panel 400 so as to be close to the upper surface of the wiping panel 400. The inspection means 300 may be moved back and forth, .

The inspection means 300 may be coupled to the cover 200 and the inspection means 300 may be configured to be movable up and down, back and forth, and left and right in a state of being coupled to the cover 200.

This allows the inspection means 300 to be movable up and down, back and forth, and left and right separately from the cover 200 in a state where the inspection means 300 is coupled to the cover 200 to move together with the movement of the cover 200. That is, after the cover 200 is moved upward or raised to place the wiper panel 400 on the upper surface of the base 100, the wiper panel 400 is moved downward The inspection means 300 can be moved up and down together with the cover 200 while being moved. At this time, in a state where the cover 200 is disposed close to the wiping panel 400 and the position is fixed, the inspection means 300 is moved up and down, back and forth and left and right for surface inspection of the wiping panel 400 .

In addition, the cover 200 may be formed in a pyramid shape having a larger cross-sectional area lower than the upper side.

That is, the cover 200 is formed in a pyramid shape so that the compressed air injected into the cover 200 can flow toward the lower outer side of the cover 200 from the center portion, So that a pressing pressure can be applied from the portion toward the peripheral portion. Thus, air can be prevented from remaining between the lower surface of the wiping panel 400 and the upper surface of the surface plate 100, and the wiping panel 400 can be brought into flat contact with the surface of the surface plate 100. At this time, the cover 200 may be formed in a hemispherical shape or a conical shape in addition to the pyramid shape.

In addition, the cover 200 may have a compressed air inlet 210 formed at the upper center thereof.

That is, when the compressed air is injected into the cover 200 from the upper center of the cover 200, the compressed air inlet 210 is formed at the center of the upper portion of the cover 200, So that the pressure can be applied to the periphery of the wiping panel 400 from the central portion of the wiping panel 400. As a result, 100 can be prevented.

The method for inspecting the surface of a flexible device wiping panel according to the present invention includes: (S10) placing a wiping panel 400 on a top surface of a surface plate 100 having a flat and smooth upper surface; (S20) bringing the cover 200 close to the wiping panel 400 so that the lower open lower end of the cover 200 is spaced apart from the upper surface of the wiping panel 400; (S30) injecting compressed air into the hollow interior of the cover 200 so that the wiping panel 400 adheres to the upper surface of the base 100; And inspecting the surface of the wiper panel 400 by moving inspection means 300 disposed in the hollow interior of the cover 200 (S40); . ≪ / RTI >

This makes it possible to inspect the surface of the wiping panel 400 after applying a pressing force to the wiping panel 400 placed on the upper surface of the surface plate 100 by using the pressure of the compressed air,

That is, as shown in FIG. 3, a woven fabric panel 400 having a curved surface is formed on an upper surface of a base 100 having a flat and smooth surface, and the lower end of the open lower side of the cover 200 is woven 5, the compressed air is injected into the cover 200 as shown in FIG. 5, so that the wiping panel 400 is brought into close contact with the upper surface of the base 100 to be flat And then the surface of the wiping panel 400 is inspected using the inspection means 300.

In other words, since the surface of the wiping panel 400 can be inspected by pressing the wiping panel 400 by using the pressure of the compressed air, It is possible to accelerate the speed of the wiping panel 400. Since the vacuum is not applied to the wiping panel 400, concave dimples may not be formed in the wiping panel 400, so that surface defects of the wiping panel 400 can be detected easily and quickly.

In step S30 and step S40, compressed air is continuously injected into the cover 200, and the compressed air is introduced into the cover 200 through the space between the lower end of the cover 200 and the upper surface of the wiper panel 400 And can be discharged to the outside of the cover 200.

That is, compressed air is injected into the cover 200 with the lower end of the cover 200 being spaced apart from the upper surface of the wiping panel 400 by a predetermined distance, The compressed air can be discharged through the gap between the upper surfaces of the upper and lower plates 400. At this time, by appropriately adjusting the vertical position of the cover 200 to reduce the gap, even if the compressed air is discharged, the force of pressing the wiping panel 400 by the pressure of the compressed air injected into the cover 200 may act have. The wiping panel 400 can be brought into close contact with the upper surface of the base 100 while the upper surface of the wiping panel 400 is not pressed by the cover 200, The inspection can be performed quickly without damaging the surface.

It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims. It goes without saying that various modifications can be made.

1000: Flexible device surface panel inspection device
100: Plate
200: cover
210: Compressed air inlet
300: Inspection means
400: woven panel
WP: Width of wiping panel
WC: Width of cover bottom

Claims (8)

A table top having a flat and smooth surface;
A cover which is spaced apart from the upper surface of the base and has a hollow inside and a lower side opened to form a compressed air inlet so that compressed air is discharged through a gap between a lower end and an upper surface of the wiping panel; And
Inspecting means provided inside the cover; , ≪ / RTI >
The cover and the inspection means are formed so as to be movable up and down, back and forth, and left and right,
Wherein the inspecting means is coupled to the cover and the inspecting means is formed so as to be movable up and down, back and forth, and left and right within the cover in a state where the position of the cover is fixed. .
The method according to claim 1,
Wherein a lower end width of the open lower side of the cover is formed to be narrower than a width of a wiping panel placed on an upper surface of the surface plate.
delete delete The method according to claim 1,
Wherein the cover is formed in the shape of a pyramid having a larger cross-sectional area than that of the upper side.
The method according to claim 1,
Wherein the cover has a compressed air inlet formed at an upper center thereof.
(S10) placing a wiping panel on an upper surface of a platen whose top surface is flat and smooth;
(S20) closing the cover after bringing the cover close to the wipe panel so that the lower open bottom of the cover is spaced apart from the upper surface of the wipe panel;
The compressed air injected into the inside of the cover is discharged into the gap between the lower end of the cover and the upper surface of the wiping panel so that the pressure of the compressed air filled in the inside of the cover (S30) so that the wiper panel is brought into close contact with the upper surface of the table by a force pressing the wiper panel. And
Inspecting the surface of the wiping panel while moving the inspection means coupled to the cover and disposed in the hollow interior of the cover (S40); The method as claimed in claim 1, delete
KR1020140095475A 2014-07-28 2014-07-28 Apparatus and methode for inspecting surface of warpage panel for flexible device KR101659048B1 (en)

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KR1020140095475A KR101659048B1 (en) 2014-07-28 2014-07-28 Apparatus and methode for inspecting surface of warpage panel for flexible device

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Application Number Priority Date Filing Date Title
KR1020140095475A KR101659048B1 (en) 2014-07-28 2014-07-28 Apparatus and methode for inspecting surface of warpage panel for flexible device

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KR101659048B1 true KR101659048B1 (en) 2016-09-23

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008232793A (en) * 2007-03-20 2008-10-02 Kaneka Corp Method and apparatus for measuring thickness of film

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11223521A (en) * 1998-02-04 1999-08-17 Hiroshi Akashi Noncontact suction instrument
KR101325761B1 (en) * 2012-04-26 2013-11-08 기가비스주식회사 Optical inspection device
KR101325762B1 (en) 2012-04-26 2013-11-08 기가비스주식회사 Optical inspection device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008232793A (en) * 2007-03-20 2008-10-02 Kaneka Corp Method and apparatus for measuring thickness of film

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