KR101597653B1

KR101597653B1 - Multi-zone pressure sensor

Info

Publication number: KR101597653B1
Application number: KR1020140138544A
Authority: KR
Inventors: 조영호; 윤성현
Original assignee: 한국과학기술원
Priority date: 2014-10-14
Filing date: 2014-10-14
Publication date: 2016-02-25

Abstract

In the multi-range pressure sensor, the pressure applying section includes a pressure detecting section. Wherein the pressure applying portion is attached to and supported by the subject and includes a first supporting portion, a first deforming portion disposed in the first supporting portion and deformable by a first external pressure, a second supporting portion disposed in the first deforming portion, And a second deformable portion disposed in the second support portion and deformable by a second external pressure. Wherein the pressure detecting unit detects the first external pressure and the second external pressure applied to the pressure applying unit and detects a deformation of the first deforming unit with respect to the first supporting unit and a second detecting unit that detects a deformation of the first deforming unit with respect to the first supporting unit, And a second detecting section for detecting a deformation of the second deforming section.

Description

A multi-zone pressure sensor

The present invention relates to a multi-range pressure sensor, and more particularly, to a multi-range pressure sensor capable of measuring a pressure signal from a human body.

Recently, in the technique of measuring the condition of a person, a technique of measuring emotions has emerged in addition to a physiological condition of a person. In the method of measuring the emotional state, it is the measurement of stress that occupies a socially important part. The most important physical parameter in measuring human stress is heart rate variability. This can be obtained by detecting the arterial pressure waveform of a person, that is, the pulse wave, and analyzing the frequency thereof. Through these heart rate variability, the vulnerability of the subject to stress and the current stress level can be measured. Therefore, it is important to develop and miniaturize a pulse-wave sensor that can accurately detect a pulse wave to monitor human stress at all times.

Signals that can be detected at the fingertips include hand pointing pressure, skin conductivity, and skin temperature in addition to pulse waves. Among these, the hand point indicating pressure is an important physical quantity for detecting human intention, but there is a problem that inter-signal interference occurs because it is a physical quantity like a pulse wave.

It is an object of the present invention to solve the problems of the prior art as described above, and it is an object of the present invention to provide a blood pressure measuring device and a blood pressure measuring method which are capable of accurately measuring a human condition, And it is an object of the present invention to provide a multi-range pressure sensor which can simultaneously detect the pressure.

It is to be understood, however, that the present invention is not limited to the above-described embodiments and various modifications may be made without departing from the spirit and scope of the invention.

In order to accomplish the object of the present invention, the multi-range pressure sensor according to the exemplary embodiments includes a pressure application unit including a pressure detection unit. Wherein the pressure applying portion is attached to and supported by the subject and includes a first supporting portion, a first deforming portion disposed in the first supporting portion and deformable by a first external pressure, a second supporting portion disposed in the first deforming portion, And a second deformable portion disposed in the second support portion and deformable by a second external pressure. Wherein the pressure detecting unit detects the first external pressure and the second external pressure applied to the pressure applying unit and detects a deformation of the first deforming unit with respect to the first supporting unit and a second detecting unit that detects a deformation of the first deforming unit with respect to the first supporting unit, And a second detecting section for detecting a deformation of the second deforming section.

In the exemplary embodiments, the first external pressure and the second external pressure may be generated by different forces in the uniaxial direction, respectively, in the pressure application portion.

In exemplary embodiments, the first support portion of the pressure applying portion may have a circular or polygonal ring shape.

In exemplary embodiments, at least one of the first and second deformations may have apertures spaced circumferentially about the center of the ring to form a plurality of deformation beams.

In exemplary embodiments, the detection sensitivity and range of external pressure may be determined by varying the thickness and width of the first and second deformations.

In exemplary embodiments, the first deformable portion may have a first thickness and the second deformable portion may have a second thickness that is less than the first thickness.

In the exemplary embodiments, the first and second detecting portions include a piezoresistive sensor for measuring a change in resistance according to the deformation of the first and second deformations, a pair of upper portions for measuring a change in capacitance A capacitance sensor having an electrode and a lower electrode, or a piezoelectric sensor having a pair of upper and lower electrodes for measuring a change in potential difference.

In the exemplary embodiments, at least one of the first and second deformations may comprise a piezoelectric material.

In exemplary embodiments, the pressure applying portion may further include a center support disposed in the second deforming portion and connected to the second deforming portion.

In the exemplary embodiments, the pressure applying unit may further include a base portion disposed below the first support portion and fixing the first support portion.

In exemplary embodiments, the multi-range pressure sensor may further include first and second stoppers disposed on the base portion and restricting deformation of the first and second deformations.

In order to achieve the above object, the multi-range pressure sensor according to exemplary embodiments includes a pressure applying unit and a pressure detecting unit. The pressure application unit includes a first support portion attached to a test object and positioned at an outermost periphery, a first support portion connected to the first support portion, and capable of being deformed by a first force applied in a single axial direction from a contact surface with the test object, And a second deformable portion disposed adjacent to the first deformable portion and deformable by a second force applied in the single axial direction from a local region of the contact surface. Wherein the pressure detecting portion includes a first detecting portion for detecting a first external pressure applied to the first deforming portion by the first force and a second external pressure applied to the second deforming portion by the second force, And a second detection section.

In exemplary embodiments, the first deformable portion may have a first contact surface with the subject, and the second deformable portion may have a second contact surface that is smaller than the first contact surface.

In the exemplary embodiments, the first and second deformations of the pressure applying section may have a circular or polygonal ring shape.

In exemplary embodiments, the pressure applying portion includes a first support portion that supports the first deformation portion and is disposed at an outermost position, and a second support portion that supports the second deformation portion and is disposed between the first deformation portion and the second deformation portion And a second support portion.

In exemplary embodiments, the multi-range pressure sensor may further include first and second stoppers restricting deformation of the first and second deformations on the base portion.

The multi-range pressure sensor according to the present invention can detect changes in a plurality of forces mixed in a single-axis direction, which are locally changed from a part of a contact surface of a subject, and measure them by disassembling them into local forces. In addition, it is possible to manufacture by utilizing micro-machining technology, and it is easy to mass-produce the product and is easy to be mounted on a wearable device because it is advantageous in downsizing. Furthermore, since the measurement of the pulse wave to obtain the heart rate variability, which is a long-term stress index, is possible, it is possible to measure not only a simple human physiological state but also a human psychological state.

However, the effects of the present invention are not limited to the above-mentioned effects, and may be variously expanded without departing from the spirit and scope of the present invention.

1 is a plan view showing a multi-range pressure sensor according to exemplary embodiments;
2 is a cross-sectional view taken along line AA 'of FIG.
FIGS. 3A and 3B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test object. FIG.
4 is a cross-sectional view showing the dimensions of the pressure applying portion of Fig.
5 is a plan view showing a multi-range pressure sensor according to exemplary embodiments.
FIG. 6 is a bottom view showing the pressure applying unit of FIG. 5;
7 is a cross-sectional view taken along line BB 'of FIG.
Figs. 8A and 8B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test object. Fig.
Fig. 9 is a cross-sectional view showing the dimensions of the pressure applying portion of Fig. 5;
10 is a plan view showing a multi-range pressure sensor according to exemplary embodiments.
11 is a plan view showing the base portion of Fig.
12 is a cross-sectional view taken along line CC 'of FIG.
13A and 13B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test body.
14 is a plan view showing a multi-range pressure sensor according to exemplary embodiments.
Fig. 15 is a bottom view showing the pressure applying unit of Fig. 14;
16 is a cross-sectional view taken along line DD 'of FIG.
FIGS. 17A and 17B are cross-sectional views showing deformations of first and second deformations that are deformed according to pressures applied from a test object. FIG.

For the embodiments of the invention disclosed herein, specific structural and functional descriptions are set forth for the purpose of describing an embodiment of the invention only, and it is to be understood that the embodiments of the invention may be practiced in various forms, The present invention should not be construed as limited to the embodiments described in Figs.

The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It is to be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but on the contrary, is intended to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms may be used for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between. Other expressions that describe the relationship between components, such as "between" and "between" or "neighboring to" and "directly adjacent to" should be interpreted as well.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In the present application, the terms "comprise", "having", and the like are intended to specify the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, , Steps, operations, components, parts, or combinations thereof, as a matter of principle.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries should be construed as meaning consistent with meaning in the context of the relevant art and are not to be construed as ideal or overly formal in meaning unless expressly defined in the present application .

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same reference numerals are used for the same constituent elements in the drawings and redundant explanations for the same constituent elements are omitted.

1 is a plan view showing a multi-range pressure sensor according to exemplary embodiments; 2 is a cross-sectional view taken along the line A-A 'in Fig. FIGS. 3A and 3B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test object. FIG. 4 is a cross-sectional view showing the dimensions of the pressure applying portion of Fig.

1 to 4, the multi-range pressure sensor 10 includes a pressure application unit 100 and a pressure application unit 100, which are attached to and supported by a subject H and receives a pressure from the subject H, And a pressure detector 200 for detecting a pressure applied to the pressure sensor 200.

In the exemplary embodiments, the multi-range pressure sensor 10 may be attached to a subject H such as a human finger, arm, etc. with a wearable device to measure the emotional state of a human . For example, the multi-range pressure sensor 10 may be attached to and supported on a subject H such as a human finger through thimble.

1 and 2, the pressure applying unit 100 includes a first supporting part 110 and a first supporting part 110 disposed on the outermost periphery and attached to and supported by the inspected object H, H). &Lt; / RTI > The contact portion includes a first deforming portion 120 disposed in the first supporting portion 110, a second supporting portion 120 disposed in the first deforming portion 120, and a second deforming portion 120 disposed in the second supporting portion 130. [ (140).

For example, the first support portion 110 may have a substantially rectangular ring shape. The first deformable portion 120 has a substantially rectangular ring shape and can be disposed in the first support portion 110. [ The second support part 130 has a substantially rectangular ring shape and can be disposed in the first deformable part 120. The second deformable part 140 has a rectangular shape and may be disposed in the second support part 130. The first deforming part 120 may connect the first supporting part 110 to the second supporting part 130 and the second deforming part 140 may be connected to the second supporting part 130. Here, the center position of the upper surface of the second deforming part 140 is defined as the origin O, and the first supporting part 110, the first deforming part 120, the second supporting part 130 and the second deforming part 140 define the same XY plane and the Z axis can pass through the center of the second deformable part 140. [

The first and second supporting portions 110 and 130 and the first and second deforming portions 120 and 140 may have a shape of a circle, a polygon, or a combination thereof depending on the magnitude of the applied pressure and the condition depending on the region. Lt; / RTI >

The first and second deformations 120 and 140 may have a relatively smaller thickness T1 and T2 than the first and second supports 110 and 130. The first deformable portion 120 and the second deformable portion 140 may have a relatively smaller rigidity than the first and second supports 110 and 130. Therefore, when an external force is applied to the pressure application unit 100, the deformation can be concentrated on the first and second deformations 120 and 140. [ The first deformable part 120 and the second deformable part 140 may be deformable by an external force.

For example, the first deformed portion 120 may be deformed by the external force F1 applied in the Z-axis direction from the contact surface with the inspected object H. The second deforming portion 140 may be deformed by the external force F2 applied in the Z direction from the local region L in the contact surface with the inspected object F. [ Pressure can be generated in each of the first and second deforming parts 120 and 140 by different forces F1 and F2 in the single axis direction applied to the pressure applying part 100. [ Forces F1 and F2 having different frequencies or different frequencies can be applied to the pressure applying unit 100. [

The pressure detecting unit 200 detects the first external pressure applied to the first deforming unit 120 by the external force F1 and the second external pressure applied to the second deforming unit 140 by the external force F2 The first detection unit 210 and the second detection unit 220 may be provided.

The first detecting unit 210 includes a first piezoresistive sensor disposed in the first deforming unit 120 adjacent to the first supporting unit 110 to measure a change in resistance due to the deformation of the first deforming unit 120 can do. The second detecting unit 220 includes a second piezoresistive sensor disposed in the second deforming unit 140 adjacent to the second supporter 130 to measure a change in resistance due to the deformation of the second deforming unit 140 can do. Therefore, the first detection unit 210 can detect the deformation of the first deformable part 120 with respect to the first support part 110. [ The second detection unit 220 can detect deformation of the second deformable part 140 relative to the second support part 130. [ For example, the first and second piezoresistive sensors may include a strain gage having a piezo element.

The output voltage of the piezoresistive sensor can be determined by the following equation (1).

(1)

Here,? R / R = gauge factor x strain.

Since the gauge factor is a value determined according to the piezoresistive material, the ratio of the output voltage to the input voltage of the piezoresistive sensor can be determined by the strains of the first and second deformers 120 and 140.

The measuring position of the applied pressure, the area where the external force acts, and the local area can be determined according to the arrangement and size of the first and second supporting portions 110 and 130, and the like. The range and sensitivity of the measurable external pressure may be determined according to the thickness, rigidity, etc. of the first and second supporting portions 110 and 130 and the first and second deforming portions 120 and 140.

3A, when the pressure applying section 100 is attached to the inspected object H and a first external force F1 such as a finger tip indicating pressure is applied to the pressure applying section 100, The first deformable part 120 is deformed by the first external pressure applied to the first deformable part 120 by sensing and detecting a change in resistance of the first piezoresistive sensor, Can be detected.

3B, when the second external force F2 from the local area such as the vein of the inspected object H is applied to the pressure applying part 100, deformation occurs in the second deforming part 140 Accordingly, the deformation of the second deformable part 140 due to the second external pressure applied to the second deformable part 140 can be detected by detecting and detecting a change in resistance of the second piezoresistive sensor.

4, in one embodiment, the thickness H1 of the first support portion 110 is about 500 m, the thickness T1 of the first deforming portion 120 is about 50 m, 2 The thickness H2 of the support portion 130 is about 30 占 퐉. The width W1 of the first groove defining the first deformed portion 120 is about 1 mm and the width W2 of the second groove defining the second deformed portion 140 is about 2 mm. The outer diameter D1 of the first support portion 110 is about 10 mm and the inner diameter D2 of the first support portion 110 is about 8 mm and the outer diameter D3 of the second support portion 130 is about 6 mm .

Table 1 is a table showing the strains measured by the multi-range pressure sensor according to one embodiment.

[Table 1]

Referring to Table 1, a first force F1 of 1N corresponding to a finger tip indicating pressure and a second force F2 (corresponding to a pressure of 40 mmHg of human pulse pressure) are applied to the pressure applying unit 100 having the dimensions of FIG. ) Can be confirmed by simulation results.

The maximum strain (4.62 x 10 ^-6 ) of the second deformed part 140 when the pulse pressure and the finger pointing pressure are simultaneously applied to the pressure applying part 100 is the maximum strain (4.62 x 10 ^-6 ) of the pressure applied to the pressure applying part 100 (4.08 x 10 < ^-6 >) of the second deformable part 140. [ On the other hand, since the maximum strain (8.48 x 10 ^-7 ) of the second deformable portion 140 when the finger tip pressure alone is applied to the pressure applying portion 100 is very small, the second deformable portion 140 ) Shows almost no deformation. Accordingly, it can be seen that the second deforming part 140 can detect only a local acting pressure. By comparing the pressure of the first deforming part 120 with the pressure of the first deforming part 120, The combined forces can be decomposed and only local forces can be measured.

In the exemplary embodiments, the pressure applying portion 100 of the multi-range pressure sensor 10 includes a third deforming portion, a fourth deforming portion, ..., And an N-th transform unit. The pressure detecting unit 200 can detect deformation of N (N is a natural number) deformation parts including the first and second deforming parts 120 and 140. Therefore, it is possible to detect a change in a plurality of forces mixed in a single-axis direction, which locally changes in a part of the contact surface of the subject, and to measure them by decomposing them into local forces.

5 is a plan view showing a multi-range pressure sensor according to exemplary embodiments. FIG. 6 is a bottom view showing the pressure applying unit of FIG. 5; 7 is a cross-sectional view taken along line B-B 'of FIG. Figs. 8A and 8B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test object. Fig. Fig. 9 is a cross-sectional view showing the dimensions of the pressure applying portion of Fig. 5; The multi-range pressure sensor is substantially the same as or similar to the multi-range pressure sensor described with reference to Figs. 1 to 4 except for the structure of the pressure applying section and the strain measuring method. Accordingly, the same constituent elements will be denoted by the same reference numerals, and repetitive description of the same constituent elements will be omitted.

5 to 9, the multi-range pressure sensor 11 includes a pressure application unit 100 and a pressure application unit 100, which are attached to and supported by the inspected object H and to which pressure from the inspected object H is input, And a pressure detector 200 for detecting a pressure applied to the pressure sensor 200.

5 to 7, the pressure application unit 100 includes a base unit 102, a first support unit 110, a first support unit 110, and a second support unit 110, which are fixed on the base unit 102, A second deforming part 120 disposed in the first deforming part 120 and a second deforming part 140 disposed in the second supporting part 130. The first deforming part 120 is disposed in the first deforming part 120, And a central support 150 disposed within the housing 140. The base portion 102 may be disposed below the first support portion 110 to fix the first support portion 110.

For example, the first support portion 110 may have a substantially circular ring shape. The first deformable part 120 has a substantially circular ring shape and can be disposed in the first support part 110. [ The second support part 130 has a substantially circular ring shape and can be disposed in the first deformable part 120. The second deforming part 140 has a substantially circular ring shape and can be disposed in the second supporting part 130. [ The center support portion 150 has a circular shape and can be disposed in the second deforming portion 140. The first deforming part 120 connects the first supporting part 110 and the second supporting part 130 and the second deforming part 140 connects the second supporting part 130 and the center supporting part 150 . Here, the center position of the upper surface of the center support part 150 is defined as the origin O, and the first support part 110, the first transformation part 120, the second support part 130, the second transformation part 140, And the central supporting portion 150 define the same XY plane and the Z axis can pass through the central position of the central supporting portion 150. [

The first and second deformations 120 and 140 may have a relatively smaller thickness T1 and T2 than the first and second supports 110 and 130. The first deformable portion 120 and the second deformable portion 140 may have a relatively smaller rigidity than the first and second supports 110 and 130. The upper surface of the first deformed portion 120 has a first contact surface with the inspected object H and the upper surface of the second deformable portion 140 has a second contact surface with the inspected object H smaller than the first contact surface Lt; / RTI > Therefore, when an external force is applied to the pressure application unit 100, the deformation can be concentrated on the first and second deformations 120 and 140. [ The first deformable part 120 and the second deformable part 140 may be deformable by an external force.

The second support portion 130 and the center support portion 150 may be separated from the base portion 102 by a predetermined distance. The distance between the second supporting portion 130 and the center supporting portion 150 and the base portion 102 can be reduced if the first deforming portion 120 and the second deforming portion 140 are deformed by an external force.

The pressure detecting unit 200 detects the first external pressure applied to the first deforming unit 120 by the external force F1 and the second external pressure applied to the second deforming unit 140 by the external force F2 The first detection unit 230 and the second detection unit 240 may be included.

The first detection unit 230 may include a pair of a first upper electrode 232 and a first lower electrode 234 for measuring a change in capacitance due to the deformation of the first deformable part 120. The first upper electrode 232 is disposed on the lower surface of the second supporting portion 130 adjacent to the first deforming portion 120 and the first lower electrode 234 is disposed on the lower surface of the base portion 230 corresponding to the first upper electrode 232. [ (Not shown). The second detection unit 240 may include a pair of a second upper electrode 242 and a second lower electrode 244 for measuring a change in capacitance due to the deformation of the second deforming unit 140. The second upper electrode 242 is disposed on the lower surface of the central support 150 adjacent to the second deforming portion 140 and the second lower electrode 244 is disposed on the lower surface of the base portion 150 corresponding to the second upper electrode 242. [ 102, respectively.

Accordingly, the first detection unit 230 can detect the deformation of the first deformable part 120 with respect to the first supporting unit 110 by using the capacitive sensor. The second detection unit 240 can detect the deformation of the second deformable part 140 with respect to the second support part 130 by using the capacitive sensor.

The output voltage of the capacitive sensor can be determined by the following equation (2).

(2)

Where C is the capacitance, A is the area between the upper electrode and the lower electrode, d is the distance between the upper electrode and the lower electrode, and? Is the dielectric constant.

Since the dielectric constant is a value determined according to the material between the upper electrode and the lower electrode, the output voltage of the capacitance sensor can be determined by the displacement of the first and second deformers 120 and 140.

8A, when the pressure applying unit 100 is attached to the inspected object H and a first external force F1 such as a finger tip indicating pressure is applied to the pressure applying unit 100, The sensor of the first capacitance type senses the capacitance change and the first deformation part 120 due to the first external pressure applied to the first deformation part 120 is deformed, Can be detected.

8B, when the second external force F2 from the local area such as the vein of the inspected object H is applied to the pressure applying part 100, deformation occurs in the second deforming part 140 Accordingly, the sensor of the second capacitance type can detect the deformation of the second deformable part 140 due to the second external pressure applied to the second deformable part 140 by sensing a capacitance change.

9, in one embodiment, the thickness H1 of the first supporting portion 110 is about 500 m, the thickness T1 of the first deforming portion 120 is about 50 m, 2 The thickness H2 of the support portion 130 is about 30 占 퐉. The width W1 of the first groove defining the first deformed portion 120 is about 1 mm and the width W2 of the second groove defining the second deformed portion 140 is about 1 mm. The outer diameter D1 of the first support portion 110 is about 12 mm and the inner diameter D2 of the first support portion 110 is about 10 mm and the outer diameter D3 of the second support portion 130 is about 5 mm And the diameter D4 of the center support portion 150 is about 3 mm.

Table 2 is a table showing the strains measured by the multi-range pressure sensor according to one embodiment.

[Table 2]

Referring to Table 2, the first force F1 of 1N corresponding to the fingertip indicating pressure and the second force F2 corresponding to the pressure of the human resting pulse pressure of 40 mmHg are applied to the pressure applying unit 100 having the dimensions of FIG. ) Can be confirmed by simulation results.

The maximum strain (3.29 x 10 ^-1 ) of the center support part 150 when the pulse pressure and the finger pointing pressure are simultaneously applied to the pressure applying part 100 is the same as the maximum strain of the center support part 150 when the pulse pressure is applied to the pressure applying part 100 (2.23 x 10 < ^-1 > On the other hand, since the maximum strain (1.05 x 10 ^-1 ) of the center support portion 150 when only the finger tip pressure is applied to the pressure applying portion 100 is small, It can be seen that it does not happen. Accordingly, it can be seen that the second deforming part 140 can detect only a local acting pressure. By comparing the pressure of the first deforming part 120 with the pressure of the first deforming part 120, The combined forces can be decomposed and only local forces can be measured.

10 is a plan view showing a multi-range pressure sensor according to exemplary embodiments. 11 is a plan view showing the base portion of Fig. 12 is a cross-sectional view taken along line C-C 'of FIG. 13A and 13B are cross-sectional views showing deformations of the first and second deformations that are deformed according to pressures applied from a test body. The multi-range pressure sensor is substantially the same as or similar to the multi-range pressure sensor described with reference to Figs. 5 to 9, except for the structure of the pressure applying section and the strain measuring method. Accordingly, the same constituent elements will be denoted by the same reference numerals, and repetitive description of the same constituent elements will be omitted.

10 to 13B, the multi-range pressure sensor 12 includes a pressure application unit 100 and a pressure application unit 100 which are attached to and supported by the body H and to which a pressure from the subject H is input, And a pressure detector 200 for detecting a pressure applied to the pressure sensor 200.

10 to 12, the pressure applying part 100 is formed on the base part 102 and includes first and second deforming parts 120 and 140 for preventing excessive deformation of the first and second deforming parts 120 and 140, And may further include second stoppers (106, 108). Specifically, the first stopper 106 is disposed on the upper surface of the base portion 102 in correspondence with the second support portion 130, and the second stopper 108 is disposed on the upper surface of the base portion 102 As shown in FIG.

The second support portion 130 is separated from the first stopper 106 by a predetermined distance and the center support portion 150 is spaced apart from the second stopper 108 by a predetermined distance when no external force is applied to the pressure applying portion 100 . When an external force is applied to the pressure applying unit 100, the first deforming unit 120 is deformed so that the second supporting unit 130 is brought close to the base unit 102 and further the first deforming unit 120 is further deformed The second support portion 130 comes into contact with the first stopper 106, so that excessive deformation of the first deformable portion 120 can be prevented. When the external force is applied to the pressure applying unit 100, the second deforming unit 140 is deformed to bring the central supporting unit 150 closer to the base unit 102, and further, The center support portion 150 comes into contact with the second stopper 108, so that excessive deformation of the second deformable portion 140 can be prevented. Therefore, breakage of the first and second deformable parts 120 and 140 due to excessive deformation can be prevented.

The pressure detecting unit 200 detects the first external pressure applied to the first deforming unit 120 by the external force F1 and the second external pressure applied to the second deforming unit 140 by the external force F2 The first detection unit 210 and the second detection unit 240 may be included.

The first detecting unit 210 includes a first piezoresistive sensor disposed in the first deforming unit 120 adjacent to the first supporting unit 110 to measure a change in resistance due to the deformation of the first deforming unit 120 can do. The second detection unit 240 may include a pair of a second upper electrode 242 and a second lower electrode 244 for measuring a change in capacitance due to the deformation of the second deforming unit 140. The second upper electrode 242 is disposed on the lower surface of the central support 150 adjacent to the second deforming portion 140 and the second lower electrode 244 is disposed on the lower surface of the base portion 150 corresponding to the second upper electrode 242. [ 102, respectively.

Accordingly, the first detection unit 210 can detect the deformation of the first deformation unit 120 with respect to the first support unit 110 using the strain gage having the piezo element. The second detection unit 240 can detect the deformation of the second deformable part 140 with respect to the second support part 130 by using the capacitive sensor.

Alternatively, the first detecting portion may include a pair of upper electrodes and a lower electrode for measuring a change in capacitance due to the deformation of the first deforming portion, and the second detecting portion may include a second detecting portion, And a piezoresistive sensor disposed on the first deformed portion to measure a change in resistance due to the deformation of the second deformed portion.

13A, when the pressure applying unit 100 is attached to the inspected object H and a first external force F1 such as a finger tip indicating pressure is applied to the pressure applying unit 100, The first deformable part 120 is deformed by the first external pressure applied to the first deformable part 120 by sensing and detecting a change in resistance of the first piezoresistive sensor, Can be detected. When the first deformable part 120 is further deformed, the second support part 130 moves downward and then comes into contact with the first stopper 106. [ Thus, excessive deformation of the first deformable portion 120 can be prevented.

13B, when the second external force F2 from the local area such as the vein of the inspected object H is applied to the pressure applying part 100, deformation occurs in the second deforming part 140 The distance between the second upper electrode 242 and the second lower electrode 244 is reduced so that the sensor of the second capacitance type senses a change in capacitance, 2 It is possible to detect deformation of the second deforming portion 140 due to external pressure.

14 is a plan view showing a multi-range pressure sensor according to exemplary embodiments. Fig. 15 is a bottom view showing the pressure applying unit of Fig. 14; 16 is a cross-sectional view taken along the line D-D 'in Fig. FIGS. 17A and 17B are cross-sectional views showing deformations of first and second deformations that are deformed according to pressures applied from a test object. FIG. The multi-range pressure sensor is substantially the same as or similar to the multi-range pressure sensor described with reference to Figs. 1 to 4 except for the structure of the pressure applying section and the strain measuring method. Accordingly, the same constituent elements will be denoted by the same reference numerals, and repetitive description of the same constituent elements will be omitted.

14 to 17B, the multi-range pressure sensor 13 includes a pressure application unit 100 and a pressure application unit 100, which are attached to and supported by the inspected object H and to which pressure from the inspected object H is input, And a pressure detector 200 for detecting a pressure applied to the pressure sensor 200.

The pressure applying unit 100 includes a first supporting unit 110 attached to and supported on the test object H and disposed at an outermost position, a first deforming unit 120 disposed in the first supporting unit 110, a first deforming unit 120 And a second deforming part 140 disposed in the second supporting part 130. The second supporting part 130 may be disposed in the second supporting part 130,

For example, the first support portion 110 and the second support portion 130 may have a substantially circular ring shape. The first deformable part 120 may include a plurality of bridge-shaped first deformed beams connecting the first and second supporting parts 110 and 130. Openings 122 spaced apart from each other between the first and second supports 110 and 130 may be formed to form the first deformed beams. The first deformed beams may be spaced apart from each other in the circumferential direction about the origin (O). The second deforming part 140 may include a central part inside the second supporting part 130 and a plurality of second deforming beams in a leg shape connecting the second supporting part 130 and the center part. Openings 142 spaced apart from each other may be formed in the second support portion 130 to form the second deformed beams. The second deformed beams may be spaced apart from each other in the circumferential direction around the origin (O). The thickness, width, length, etc. of the first and second deformed beams can be determined in consideration of detection sensitivity and range of external pressure, and the like.

The pressure detecting unit 200 detects the first external pressure applied to the first deforming unit 120 by the external force F1 and the second external pressure applied to the second deforming unit 140 by the external force F2 The first detection unit 250 and the second detection unit 260 may be included.

The first detecting unit 250 may include a first piezoelectric sensor for measuring a change in the potential difference due to the deformation of the first deforming unit 120. The second detecting unit 260 may include a second piezoelectric sensor for measuring a change in the potential difference due to the deformation of the second deforming unit 140.

The first piezoelectric sensor includes a plurality of first upper electrodes 252 disposed on each of the upper surfaces of the first deformed beams of the first deformed portion 120 and a plurality of second upper electrodes 252 disposed on the lower surfaces of the first deformed beams, And a plurality of first lower electrodes 254 formed on the first lower electrodes 254. The first deformable part 120 may include a piezoelectric material. The second piezoelectric sensor includes a plurality of second upper electrodes 262 disposed on each of the upper surfaces of the second deformed beams of the second deformed part 140 and a plurality of second upper electrodes 262 disposed on the lower surfaces of the second deformed beams 140 And a plurality of second lower electrodes 264 formed on the first insulating layer 262. The second deformable part 140 may include a piezoelectric material. Examples of the piezoelectric material include ZnO, PZT, P (VDF), and P (VDF-TrEE).

Therefore, the first detection unit 250 can detect the deformation of the first deformable part 120 with respect to the first supporting unit 110 by using the piezoelectric effect. The second detection unit 260 can detect the deformation of the second deformable part 140 with respect to the second supporting unit 130 by using the piezoelectric effect.

Alternatively, the first detection unit may include a piezoelectric sensor and the second detection unit may include a piezoresistive sensor or a capacitive sensor. Alternatively, the first detection unit may include a piezoresistive sensor or a capacitive sensor, and the second detection unit may include a piezoelectric sensor.

The first and second detecting portions including the piezoelectric material can generate an output voltage with respect to a force applied to the elastic body. As will be described later, the generated output voltage can be calculated using the amount of charge measured by the electrodes facing each other and the capacitance of the piezoelectric material.

First, an electric displacement vector generated in the piezoelectric material can be determined by the following equation (3).

(3)

Here, Di is the electric displacement vector (3 × 1), eij is the permittivity vector (3 × 3), Eij is the applied electric field vector (3 × 1), dim is the piezoelectric constant vector (3 × 6) The mechanical stress vector (6 × 1).

In this embodiment, since no external electric field is applied (Eij = 0), the electric displacement vector Di generated in the piezoelectric material can be obtained by the following equation (4).

(4)

The amount of charge generated is calculated by multiplying the area of the piezoelectric material by the electric displacement obtained by equation (4), and the total charge generated by integrating it can be obtained as shown in the following equation (5).

(5)

Where q is charge, and dA1, dA2, and dA3 are electrically polled areas.

Therefore, the output voltage finally generated by the piezoelectric effect can be calculated by the following equation (6).

(6)

Here, Vout denotes a voltage generated due to the piezoelectric effect, and Cp denotes a capacitance of a region having a piezoelectric effect by being electrically polled. The capacitance may be determined by the dielectric constant, thickness and area of the piezoelectric material.

Thus, the mechanical stresses are proportional to the strain of the elastic body, so that the output voltages of the first and second deformations 120 and 140 can be determined by the strain of the first and second deformations 120 and 140 have. Accordingly, the first and second detecting units 250 and 260 can detect the deformation of each deformed portion by measuring the potential difference generated between the electrodes facing each other.

In the exemplary embodiments, the multi-range pressure sensor is a miniaturized and integrated pressure sensor that can be attached to the fingertip using a wearable element such as thimble to separately measure finger-point and pulse-wave signals. Therefore, it is possible to analyze the psychological state of human by sensing the change of forces in the local region of the human body together with the intention of the human being through the fingertip indicating pressure on a single element by using the number of microprocessors. Accordingly, by simultaneously detecting the state and intention of a person by using the multi-range pressure sensor, it is possible to monitor not only a health condition of a person but also to enable scientific analysis of various social problems that can be represented by stress have.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention as defined in the following claims. It can be understood that it is possible.

10, 11, 12, 13: Multi range pressure sensor
100: pressure application part 102: base part
106: first stopper 108: second stopper
110: first support part 120: first modification part
130: second support part 140: second modification part
150: center support portion 200: pressure detection portion
210, 230, 250: first detection unit 220, 240, 260: second detection unit
232, 242, 252, 262: upper electrode 234, 244, 254, 264: lower electrode

Claims

A first supporting portion, a first deforming portion disposed in the first supporting portion and deformable by a first external pressure, a second supporting portion disposed in the first deforming portion, and a second supporting portion disposed in the second supporting portion, A pressure applying unit having a second deforming portion disposed and deformable by a second external pressure; And
A first detecting unit detecting the first external pressure and the second external pressure applied to the pressure applying unit and detecting a deformation of the first deforming unit with respect to the first supporting unit and a second detecting unit detecting the deformation of the first deforming unit with respect to the second supporting unit, And a second detecting portion for detecting a deformation of the deformed portion.

The multi-range pressure sensor according to claim 1, wherein the first external pressure and the second external pressure are respectively generated by different forces in a single axial direction in the pressure application part.

The multi-range pressure sensor according to claim 1, wherein the first support portion of the pressure application portion has a circular or polygonal ring shape.

The multi-range pressure sensor of claim 3, wherein at least one of the first and second deformations is formed with openings circumferentially spaced apart from the center of the ring to form a plurality of deformed beams.

The multi-range pressure sensor according to claim 1, wherein the sensitivity and the range of detection of the external pressure are determined by different thicknesses and widths of the first and second deformable parts.

The multi-range pressure sensor of claim 1, wherein the first deformable portion has a first thickness and the second deformable portion has a second thickness that is less than the first thickness.

[2] The apparatus of claim 1, wherein the first and second detecting units include a piezoresistive sensor for measuring a change in resistance due to the deformation of the first and second deformations, a pair of upper electrodes for measuring a change in capacitance, A piezoelectric sensor having a lower electrode or a piezoelectric sensor having a pair of upper and lower electrodes for measuring a change in potential difference.

8. The multi-range pressure sensor of claim 7, wherein at least one of the first and second deformations comprises a piezoelectric material.

2. The multi-range pressure sensor of claim 1, wherein the pressure applying portion further comprises a center support portion disposed in the second deforming portion and connected to the second deforming portion.

The multi-range pressure sensor according to claim 1, wherein the pressure applying unit further includes a base unit disposed below the first support unit and fixing the first support unit.

11. The multi-range pressure sensor of claim 10, further comprising first and second stoppers disposed on the base portion and restricting deformation of the first and second deformations.

A first deformable part attached to the subject and being deformable by a first force applied in a single axial direction from a contact surface of the subject with the first supporting part connected to the first supporting part, A pressure applying unit disposed adjacent to the first deforming portion and having a second deforming portion deformable by a second force applied from the local region in the single axis direction; And
A first detecting unit and a second detecting unit for respectively detecting a first external pressure applied to the first deforming unit by the first force and a second external pressure applied to the second deforming unit by the second force, And a pressure detection unit having a pressure sensor.

The multi-range pressure sensor according to claim 12, wherein the first deforming portion has a first contact surface with the subject, and the second deforming portion has a second contact surface smaller than the first contact surface.

13. The multi-range pressure sensor according to claim 12, wherein the first and second deformations of the pressure applying section have a circular or polygonal ring shape.

15. The multi-range pressure sensor of claim 14, wherein at least one of the first and second deformations forms circumferentially spaced openings with respect to a center of the ring to form a plurality of deformed beams.

13. The multi-range pressure sensor of claim 12, wherein the first deformable portion has a first thickness and the second deformable portion has a second thickness that is less than the first thickness.

[12] The apparatus of claim 12, wherein the first and second detection units include a piezoresistive sensor for measuring a change in resistance according to the deformation of the first and second deformations, a pair of upper electrodes for measuring a change in capacitance, A piezoelectric sensor having a lower electrode or a piezoelectric sensor having a pair of upper and lower electrodes for measuring a change in potential difference.

19. The multi-range pressure sensor of claim 18, wherein at least one of the first and second deformations comprises a piezoelectric material.

13. The multi-range pressure sensor of claim 12, wherein the pressure applying portion further comprises a center support portion disposed within the second deforming portion and connected to the second deforming portion.

The multi-range pressure sensor according to claim 12, wherein the pressure applying unit further includes a base unit disposed below the first support unit and fixing the first support unit.

22. The multi-range pressure sensor of claim 21, further comprising first and second stoppers restricting deformation of the first and second deformations on the base portion.