CN205691269U

CN205691269U - The height soft elastic electron skin measured for contact pressure

Info

Publication number: CN205691269U
Application number: CN201620644828.5U
Authority: CN
Inventors: 周建辉; 及冲冲; 司新毅; 余志永; 刘迎娟; 赵贺鸣; 戴静
Original assignee: North China University of Science and Technology
Current assignee: North China University of Science and Technology
Priority date: 2016-06-27
Filing date: 2016-06-27
Publication date: 2016-11-16
Anticipated expiration: 2026-06-27

Abstract

This utility model relates to a kind of height soft elastic electron skin measured for contact pressure.Its upper electrode layer, lower electrode layer, respectively with PDMS as substrate, PDMS substrate arrange nano silver wire AgNws wire array, and middle detector layer is with porous PDMS film as base material；Upper electrode layer, the nano silver wire AgNws wire array of lower electrode layer are placed in PDMS substrate by PDMS printing paper cured in place method；Circular PDMS thin slice it is inlaid with in the hole of porous PDMS film, upper and lower surface evaporation layer of metal Au of circular PDMS thin slice, the metal Au layer on circular PDMS thin slice and upper and lower surface thereof constitutes pressure sensing based on capacitance principle unit, and metal Au electrically connects with nano silver wire AgNws wire.Function of the present utility model is to realize contact pressure detection, not only has high soft elasticity, also has the important feature such as ultra-thin, lightweight, highly sensitive, extensibility is good.

Description

The height soft elastic electron skin measured for contact pressure

Technical field

This utility model relates to electronic skin, a kind of height soft elastic electron skin measured for contact pressure.

Background technology

Electronic skin can help it to know the stimulation in the external world by being attached to the surface of robot, and make appropriate Respond, be directly connected to intellectuality and the multifunction of the carriers such as robot, armarium, human body artificial limb, wearable device, can It is widely used in the numerous areas such as productive life, rehabilitation medical.The design of electronic skin requires to include two aspects, and first, electronics Skin should be able to accurately obtain the various information of surrounding, and this is mainly realized by sensor array；Second, electronics skin Skin should anthropoid skin the same, not only there is the ability experiencing external environment information, also want to be covered in robot and carry The three-dimensional surface of body complexity and movable joint, possess certain flexibility with elastic.Electronic skin is of a great variety, and is used for contacting Tonometric height soft elastic electron skin is that the most most challenge and application potential are maximum.

CN205175585 discloses a kind of flexible electronic skin for measuring contact pressure, and it is based on pressure resistance type, shortcoming Being that the wear resistance of wire and electrode is poor, through wiping repeatedly, nano silver wire surface can be impaired, and the spirit of sensor Sensitivity is the highest.Therefore, it is necessary to a kind of simple in construction is provided, highly sensitive, extensibility good and can accurately measure and connects The height soft elastic electron skin of touch pressure.

Utility model content

This utility model aims to solve the problem that existing electronic skin can not take into account high soft elasticity and contact pressure measures function Problem, and a kind of height for measuring contact pressure soft elastic electron skin is provided.

This utility model solves its technical problem, the technical scheme is that

A kind of height soft elastic electron skin measured for contact pressure, including upper electrode layer, middle detector layer, bottom electrode Layer, upper electrode layer, lower electrode layer, respectively with PDMS as substrate, PDMS substrate arrange nano silver wire AgNws wire array, middle Sensing layer is with porous PDMS film as base material；Upper electrode layer, the nano silver wire AgNws wire array of lower electrode layer pass through PDMS printing paper Cured in place method is placed in PDMS substrate；Circular PDMS thin slice it is inlaid with in the hole of porous PDMS film, circular PDMS thin slice Upper and lower surface is deposited with layer of metal Au, circular PDMS thin slice and the metal Au layer on upper and lower surface thereof by electron beam evaporation Constitute pressure sensing based on capacitance principle unit, upper and lower two surfaces of pressure sensitive unit and nano silver wire AgNws wire electricity Connect.

Using this utility model of technique scheme, compared with prior art, it provides the benefit that:

This utility model uses PDMS printing paper cured in place method to make nano silver wire wire and electrode, available the most fluffy The nano silver wire electrode surface of pine, and it is greatly improved the roughness of electrode surface, thus improve the sensitivity of sensor, and one Determine to improve in degree the abrasion resistance properties of electrode, can be used for detecting the change of the trickle pressure such as pulse, heart rate；Of the present utility model Middle detector layer, based on capacitance principle, uses the plate condenser being embedded in porous PDMS to realize detection function, has an advantage in that The thickness of electronic skin can be reduced further, make electronic skin thinner, be more suitably applied to the special environments such as small space, especially Significant in field of medical device.

As preferably, this utility model further technical scheme is:

Upper electrode layer, the nano silver wire AgNws wire array of lower electrode layer are parallel wire array, and square crossing is covered It is placed on the both sides of middle detector layer, the cross point corresponding pressure sensing unit of upper and lower two-layer nano silver wire AgNws wire.

Accompanying drawing explanation

Fig. 1 is the layer structure schematic diagram of this utility model embodiment；

Fig. 2 is the cross section structure schematic diagram of this utility model embodiment；

Fig. 3 is the operation principle schematic diagram of sensing unit；

In figure: upper electrode layer 1；Upper electrode layer nano silver wire AgNws wire array 11；Middle detector layer 2；Porous PDMS film 2 1；Pressure sensitive unit 22；Lower electrode layer 3；Lower electrode layer nano silver wire AgNws wire array 31.

Detailed description of the invention

Below in conjunction with drawings and Examples, this utility model is described in detail.

Seeing Fig. 1, a kind of height for measuring contact pressure soft elastic electron skin, the most successively by upper electrode layer 1, middle detector layer 2, lower electrode layer 3 are constituted.

See Fig. 2, upper electrode layer 1, lower electrode layer 3 respectively with PDMS as substrate, the PDMS substrate lower surface of upper electrode layer 1 On PDMS printing paper cured in place method is provided with upper electrode layer nano silver wire AgNws wire array 11, lower electrode layer 3 On PDMS upper surface of substrate, PDMS printing paper cured in place method is provided with lower electrode layer nano silver wire AgNws wire array 31；Middle detector layer 2, with porous PDMS film 21 as base material, is inlaid with circular PDMS thin slice in the hole of porous PDMS film 21, circular The upper and lower surface of PDMS thin slice is deposited with layer of metal Au, circular PDMS thin slice and upper and lower surface thereof by electron beam evaporation Metal Au layer constitute pressure sensing unit 22 based on capacitance principle, the metal on upper and lower two surfaces of pressure sensitive unit 22 Au is electrically connected with upper electrode layer nano silver wire AgNws wire array 11 and lower electrode layer nano silver wire AgNws wire array 31 respectively Connect.

Upper electrode layer 1, the nano silver wire AgNws wire array of lower electrode layer 3 are parallel wire array, and square crossing It is covered in the both sides of middle detector layer 2, the cross point corresponding pressure sensing unit 22 of upper and lower two-layer nano silver wire AgNws wire.

Upper electrode layer 1, the thickness of lower electrode layer 3 are preferably 0. 25mm；The thickness of middle detector layer 2 is about 0. 1mm, Au Thickness is about 50nm, can greatly improve the soft elasticity of electronic skin.

See Fig. 3, when the stress point of electronic skin collects pressure and is sent to pressure sensitive unit 22, cause pressure The dielectric layer deformation of the capacitor in power sensing element 22, thus cause the change of the capacitance C of pressure sensitive unit 22, thus Achieve a butt joint the measurement of touch pressure.

The size of above-mentioned electronic skin can adjust according to the actual requirements, and the present embodiment is 8 × 8 capacitive sensing cells battle arrays Row.

These are only preferred embodiment of the present utility model, not thereby limit interest field of the present utility model, every Utilize equivalent structure or equivalent function conversion that this utility model description and accompanying drawing content made, or directly or ask to connect and be used in Other relevant technical fields, are included in interest field of the present utility model.

Claims

1. the height soft elastic electron skin measured for contact pressure, including upper electrode layer, middle detector layer, bottom electrode Layer, upper electrode layer, lower electrode layer, respectively with PDMS as substrate, PDMS substrate arrange nano silver wire AgNws wire array, middle Sensing layer is with porous PDMS film as base material；It is characterized in that:

Upper electrode layer, the nano silver wire AgNws wire array of lower electrode layer are placed in PDMS by PDMS printing paper cured in place method In substrate；

Being inlaid with circular PDMS thin slice in the hole of porous PDMS film, electron beam evaporation plating is passed through on the upper and lower surface of circular PDMS thin slice Technique evaporation layer of metal Au, the metal Au layer on circular PDMS thin slice and upper and lower surface thereof constitutes pressure based on capacitance principle Sensing element, upper and lower two surfaces of pressure sensitive unit electrically connect with nano silver wire AgNws wire.

The height soft elastic electron skin measured for contact pressure the most according to claim 1, it is characterised in that: upper electrode Layer, the nano silver wire AgNws wire array of lower electrode layer are parallel wire array, and square crossing is covered in middle detector layer Both sides, the cross point corresponding pressure sensing unit of upper and lower two-layer nano silver wire AgNws wire.