CN107664545A - A kind of capacitor type pliable pressure sensor using native micro-structures as template - Google Patents
A kind of capacitor type pliable pressure sensor using native micro-structures as template Download PDFInfo
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- CN107664545A CN107664545A CN201710986158.4A CN201710986158A CN107664545A CN 107664545 A CN107664545 A CN 107664545A CN 201710986158 A CN201710986158 A CN 201710986158A CN 107664545 A CN107664545 A CN 107664545A
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- 239000003990 capacitor Substances 0.000 title claims abstract description 14
- 239000000463 material Substances 0.000 claims abstract description 19
- 239000013536 elastomeric material Substances 0.000 claims abstract description 17
- 229920003225 polyurethane elastomer Polymers 0.000 claims abstract description 15
- 239000005445 natural material Substances 0.000 claims abstract description 11
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000005337 ground glass Substances 0.000 claims abstract description 6
- 230000006698 induction Effects 0.000 claims abstract description 5
- 241000196324 Embryophyta Species 0.000 claims abstract description 4
- 244000137852 Petrea volubilis Species 0.000 claims abstract description 4
- 239000002023 wood Substances 0.000 claims abstract description 4
- 239000007787 solid Substances 0.000 claims abstract 2
- 239000000758 substrate Substances 0.000 claims description 12
- 239000004814 polyurethane Substances 0.000 claims description 6
- 229920001971 elastomer Polymers 0.000 claims description 5
- 238000002360 preparation method Methods 0.000 claims description 5
- 229920005839 ecoflex® Polymers 0.000 claims description 4
- 229920002635 polyurethane Polymers 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920002379 silicone rubber Polymers 0.000 claims description 4
- 238000005507 spraying Methods 0.000 claims description 4
- 230000003362 replicative effect Effects 0.000 claims description 2
- 240000002853 Nelumbo nucifera Species 0.000 abstract description 5
- 235000006508 Nelumbo nucifera Nutrition 0.000 abstract description 5
- 235000006510 Nelumbo pentapetala Nutrition 0.000 abstract description 5
- 239000004744 fabric Substances 0.000 abstract description 5
- 239000002042 Silver nanowire Substances 0.000 abstract description 2
- 239000005338 frosted glass Substances 0.000 abstract description 2
- 238000005516 engineering process Methods 0.000 description 13
- 230000008859 change Effects 0.000 description 9
- 238000011160 research Methods 0.000 description 8
- 230000035945 sensitivity Effects 0.000 description 8
- 239000002086 nanomaterial Substances 0.000 description 7
- 238000013461 design Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000523 sample Substances 0.000 description 4
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 238000004132 cross linking Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000004205 dimethyl polysiloxane Substances 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 description 2
- -1 poly dimethyl silicon Oxygen alkane Chemical class 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000002560 therapeutic procedure Methods 0.000 description 2
- 238000012795 verification Methods 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 241001465754 Metazoa Species 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002238 carbon nanotube film Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000002322 conducting polymer Substances 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 238000002389 environmental scanning electron microscopy Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- MRNHPUHPBOKKQT-UHFFFAOYSA-N indium;tin;hydrate Chemical compound O.[In].[Sn] MRNHPUHPBOKKQT-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002121 nanofiber Substances 0.000 description 1
- 239000011664 nicotinic acid Substances 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920000260 silastic Polymers 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
- G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
- G01L1/146—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors for measuring force distributions, e.g. using force arrays
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
A kind of pressure sensor of capacitor type, using " sandwich sandwich " structure, top layer is driving electrodes, and bottom is induction electrode, and intermediate layer uses elastomeric material；The upper and lower surface of elastomeric material has the solid grain on natural material surface；The elastomeric material that elastomeric material is polyurethane elastomer material, was crosslinked.Natural material surface is plant leaf blade, fabric, the wood of certain roughness, bag, ground glass, skin lines or sand paper.The thickness of elastomeric material is more than 0.3mm.The present invention is made dielectric layer micro-structural by the use of micro-structure surfaces such as lotus leaf, silk fabric and its frosted glass as template and the pliable pressure sensor of electrode is used as by the use of the silver nanowire layer sprayed.
Description
Technical field
The present invention relates to the design of a kind of sensor, especially pliable pressure sensor or electronic skin.
Background technology
In the 21 century that science and technology is with rapid changepl. never-ending changes and improvements, biomethanics and engineering in medicine are an emerging cross disciplines, newly
Material is to develop the popular research field that fast, potentiality are big, have a wide range of application.Electronic skin is that new material technology is applied into biology
The product of mechanics and engineering in medicine.For the wearable electricity of either wide variety of manipulator, mechanical arm, or increased popularity
Sub- equipment, or clinical medical human skin substitute, the electronics skin formed by pressure sensor and other sensors set
Skin is all critical elements.In order to meet the needs of these applications, high sensitivity, high flexibility, superior elasticity, extensive collection are developed
Pressure sensor into, high spatial resolution has turned into the important development direction of electronic skin.
In recent years, with the research in world wide for electronic skin expansion and deeply, have many new electronics skins
The design of skin is suggested, but much because device lacks mechanical flexibility, elasticity, mechanical strength, or due to preparing device
Technical process is excessively complicated, cost is too high, is all difficult to meet the needs of above-mentioned application.Actually should to accurately easily measure
The stress distribution on electronic skin surface in the case of, it is necessary to novel electron skin of the design suitable for pressure measxurement.
Electronic skin (Electronic Skin) is had any different with artificial skin (Artificial Skin), and the latter only includes
For the Graftskin of medical science, and the former is then comprising the electronic component more with the property similar to skin, international at present
On unified definition is there is no to it.It is recognized herein that electronic skin is a kind of to utilize sensor technology and new material technology to make
The electronic original part or integrated circuit of the functions such as human skin protection and perception can be imitated.First, electronic skin should be as the mankind
Skin equally has flexibility, you can with any flexural deformation, performance is not significantly affected, and thickness should be in the ideal range
(being less than 1cm)；Secondly electronic skin should have sensitivity, i.e., can both detect small pressure change, the space point of pressure
Resolution also should be sufficiently high；Finally, electronic skin should also have certain mechanical strength, can be protected as human skin
Internal structure.
Early in 1991, T.R.Jensen[1]Deng and E.S.Kolesar[2]Deng just have developed having for robot
The electronic skin of feeling function.The electronic skin using sensor group into sensor array measure pressure, but its reliability
It can not meet use demand with stability.2004, T.Sorneya seminars of Tokyo Univ Japan, which report one piece, had tactile
The flexible electronic skin of function[3].Miniature rubber electric resistance sensor is drawn into molecular semiconductor crystal size simultaneously by the electronic skin
Be fabricated on backing material, sensor forms array and is fabricated to the flexible electronic skin of changeable shape, be used for robot and
Pressure and temperature can be measured simultaneously[4].As a result of polysilicon technology, the electronic skin is very thin, and bending can't be notable
Influence its performance.The shortcomings that electronic skin is due to employ resistive pressure sensor, sacrificial in order to reach the effect of bending
Domestic animal level of response.
2010, the Bao Zhenan professors of Stanford Univ USA and its research team were in Britain's authority's magazine《Nature
materials》On delivered a kind of design of the electronic skin based on flexible capacitance type pressure sensor[5].The electronic skin with
The plastic sheeting that tin indium oxide has been deposited is electrode, and dimethyl silicone polymer (PDMS) is dielectric layer.By to poly dimethyl silicon
Oxygen alkane surface carries out micro-structural processing and is allowed to surface formation column or Pyramid, adds its susceptibility to pressure.
Next year, the research team have delivered a kind of electronic skin of the capacitance pressure transducer, based on carbon nano-tube film again[6]。
CNT (CNT) is attached on flexible plate by sensor, and the film of metal oxide has been deposited before instead of.Although this
Place does not solve all problems using the trial of nano material, but this has undoubtedly given us to inspire：Used in traditional design
Brand-new material, unexpected effect can be reached sometimes.In capacitance pressure transducer, due to receiving for nanometer conductive material
Metrical scale effect, electrode surface nano material regional concentration can change with pressure, and the size changed has with initial concentration
Close.Simultaneously as the self property of nano material (being herein CNT), obtained electronic skin also has and can preferably drawn
Stretching property, electrode conductivuty will not weaken after the stretch, or even increase.The change of this performance can extend by pressing
The service life of the electronic skin of force sensor integrated composition.
Literature research result shows, its sensitivity is improved in the nearly 5 years heat for turning into research using flexible sensor micro-structural
Point.Stanford Univ USA Bao Zhenan teaches 2010 in Nature materials[5], 2014 in Nature
communications[8]Publish an article, the dielectric layer material of micro-structural has been respectively adopted and conducting polymer composite is used as and passed
Inductor components, condenser type and resistance-type electronic skin are made.South Korea Seoul university Changhyun Pang etc. 2012 exist
Nature materials table articles, resistance-type strain gauge is made using the nanofiber with interlocking micro-structural[13]。
The team that U.S. increasing Berkeley Ali professors Javey lead employs the micro-nano technology technology based on photoetching and is prepared for
Electronic skin sensor[14].Although the research for device microstructure makes significant progress, its micro-structural constructs mode
Use the technologies such as the deposition based on microelectronic, photoetching, cost is high, energy consumption is big and access threshold is high more.Therefore, one kind is sought
Turn into the inevitable development of pliable pressure sensor suitable for the novel preparation technology of low energy consumption, large area, high efficiency production mode
One of direction.Chinese Academy of Sciences's Suzhou nanometer technology utilizes polydimethylsiloxanes in 2014 with nano bionic Suo Zhangting researcher seminar
Alkane (PDMS) silicon rubber replicates the micro-structural of silk, and makes electrode using CNT, and a kind of resistance-type stress has been made and has passed
Sensor[16], but the pressure sensor of capacitor type has not been reported.
Bibliography：
[1]Todd R.Jensen,Robert G.Radwin,and Jolm G.Webster.A conductive
polymer sensor for measuring external finger forces[J].Journal of
Biomechanics,1991,24(9):851-858.
[2]Edward S.Kolesar,Rocky R.Reston,Douglas G.Ford,and Robert
C.Fitch.Matltiplexed piezoelectric polymer tactile sensor[J].Journal of
Robotic Systems,1992,9(1):37-63,
[3]Takao Someya,Tsuyoshi Sekitani,Slzingo Iba,Yusaku Kato,Hiroshi
Kawaguchi,and Takayasu Sakzzrai.A large-area.flexible pressure sensor matrix
with organic field-effect transistors for artificial skin applications[J]
.Proceedings of tyae National Acaderray of Sciences of tjte United States of
America,2004,101(27):9966-9970,
[4]Takao Someya,Yusaku Kato,Tsuyoshi Sekitani,Shingo Iba,Yoshiaki
Noguchi,Yousuke Murase,and Hiroshi Kawaguchiand Takayasu Sakurai.Conformable,
flexible,large-area networks of pressure and thermal sensors with organic
transistor active matrixes[J].Proceedings of the National Academy of Sciences
of the United States of America,2005,102(35):12321-12325,
[5] S.C.B.Mannsfeld, B.C mono- K.Lee, Z.Baoeta.Highly sensitive flexible
pressure sensors with microstructured rubber dielectric layers[J].Nature
Materials.2010,vo1.99:859-864.
[6]Darren J.Lipomi,Michael Vosgueritchian,Benjamin C-K.Tee,Sondra
L.Hellstrom,Jennifer A.Lee,Courtney H.Fox and Zhenan Bao.Skin-like pressure
and strain sensors based on transparent elastic films of carbon nanotubes[J]
.Nature Nanotechnology.2011,DOI:10.1038:788-792.
[7]Kyoichi Ikeda,Hideki Kuwayama,Takashi Kobayashi,Teysuya Watanabe,
Tadashi Nishikawa,Takashi Yoshida and Kinji Harada.Three-dimensional
Micromachining of Silicon Pressure Sensor Integrating Resonant Strain Gauge
on Diaphragm[J].Sensors and Actuators,1990,A21-A23:1007-1010.
[8]Lijia Pan,Alex Chortos,Guihua Yu,Yaqun Wang,Scott Isaacson,Ranulfo
Allen,Yi Shi,Reinhold Dauskardt and Zhenan Bao.An ultra-sensitive resistive
pressure sensor based on hollow-sphere microstructure induced elasticity in
conducting polymer film[J].Nature Communications,2014,DOI:10.1038:1-8.
[9] Han Bing, Wang Yue, Meng Fanhao, pressure sensor design [J] Jilin University of the great waves based on PVDF piezoelectrics
Journal (Edition), 2012,50 (12):333-336.
[10] Gu Cheng novel pressure sensors part and research [D] the Shanghai integrated based on thin film transistor (TFT):Shanghai traffic
University, 2013：2-3
[11]C.Giacomozzi and V.1Vlacellari.Piezo-dynamometric platform for a
more complete analysis of foot-to-floor interaction[J].Rehabilitation
Engineering,IEEE Transactions on,1997,5(4):322-330.
[12]Metin Yavuz,Georgeanne Botek,and Brian L.Davis.Plantar shear
stress distributions:Comparing actual and predicted frictional forces at the
foot ground interface[J].Journal of Biorraechanics,2007,40(13):3045-3049.
[13]Changhyun Pang,Sung-Hoon Ahn,Kahp-Yang Suh.A flexible and highly
sensitive strain gauge sensor using reversible interlocking of nanofibres[J]
.Nature Materials,2012,11(9):795-801.
[14]Zhiyong Fan,Johnny C.Ho,Ali Javey et al.Toward the Development of
Printable Nanowire Electronics and Sensors[J}Adv Mater,2009,21(37):3730-3743.
[15] Hong Yu, the et al.A Flexible and Highly of Hong-Bin Yao, Jin Ge, Shi mono-
Pressure-Sensitive Graphene Polyurethane Sponge Based on Fractured
Microstructure Design[J],Adv.Mater,2013,25(46):6692-6698.
[16]XuewEn Wang,Yang Gu,Ting Zhang,et al.Silk-Molded Flexible,
Ultrasensitive,and Highly Stable Electronic Skin for Monitoring Human
Physiological Signals[J],Adv.Mater,2014,26(9):1336-1342
[17]F-R.Fan,L.Lin,G.Zhu et al.Transparent triboelectric
nanogenerators and self-powered pressure sensors based on micropatterned
plastic films[J],Nano Letters,2012.
[18]K.Norrman,A.Siahkali and N.B.Larsen,Studies of spin-coated
polymer films Annu[J].Rep.Prog.Chem.Sect.C,2005,vo1.101:174-201.
[19] Wang Yuanyuan, type polyurethane elastomer production technical standard [Z], the limited public affairs of Wuhan sea stone Sealing Technology are poured
Department, 2010
[20]Tahmina Akter and Woo Soo Kim.Reversibly Stretchable Transparent
Conductive Coatings of Spray-Deposited Silver Nanowires[J],American Chemical
Society,2012,dol:10.1021:1855-1859
[21]Prashant Jain and T.Pradeep.Potential of Silver Nanoparticle-
Coated Polyurethane Foam As an Antibacterial Water Filter[J].Wiley
InterScience,2005,doI:10.1002:59-63
[22]International Organization for Standardization.Guide to the
expression of uncertainty in measurement[M].ISO,Geneva,1995.
The content of the invention
The present invention seeks to propose a kind of pressure sensor of capacitor type and preparation method thereof；Utilize polyurethane elastomer
(PU) micro-structural of silk, lotus leaf and ground glass is replicated, traditional micro-nano technology technology is instead of, is prepared for the electricity of excellent performance
Appearance type pressure sensor.
The technical scheme is that a kind of pressure sensor of capacitor type, using sandwich sandwich structure, top layer is driving
Electrode, bottom are induction electrode, and intermediate layer uses elastomeric material；The upper and lower surface of elastomeric material has the vertical of natural material surface
Body lines；The elastomeric material that elastomeric material is polyurethane elastomer material, was crosslinked.Natural material surface is plant leaf blade, knitted
Thing, the wood of certain roughness, bag, ground glass, skin lines or sand paper.The thickness of elastomeric material is more than 0.3mm.
The preparation method of the pressure sensor of capacitor type, in table of the natural material as template (silicon rubber is as template)
Face, in template on pour polyurethane elastomer or crosslinking rubber, obtain replicating microstructured polyurethane bulk substrate；Obtaining
Polyurethane elastomer substrate spraying nano silver wire obtains upper/lower electrode, and intermediate course is poured using flexible Ecoflex resins
Build and form.When top layer loading force, the elastic-plastic material (polyurethane elastomer material) in intermediate layer strains, and is driven so as to cause
The distance between moving electrode and induction electrode and overlapping area change, and according to the change of output capacitance, reach detection loading
Pressure size purpose, the micro-nano structure replicated play a part of strengthen transducer sensitivity.
The polyurethane elastomer substrate surface micro-structural shot using ESEM, as shown in the figure.
Beneficial effect：The micro-structure surfaces such as research and utilization lotus leaf, silk fabric and its frosted glass of the present invention make as template
Dielectric layer micro-structural is simultaneously used as the pliable pressure sensor of electrode by the use of the silver nanowire layer sprayed：The present invention studies saturating
Bright and flexible electronic skin has extensive in man-machine interactive system, robot probe's sensor-based system and medical science of recovery therapy
Potential application, thus it is of increased attention.The present invention using simple low cost process prepare possess translucency,
The pressure sensor of high sensitivity and elastic stretchability matter.Transparent and flexible electronic skin man-machine interactive system,
There is extensive potential application in robot probe's sensor-based system and medical science of recovery therapy, thus it is of increased attention.But
It is to prepare to possess the pressure sensor of translucency, high sensitivity and elastic stretchability matter still using simple low cost process
It is so a difficult point.The present invention solves this difficult point.
Brief description of the drawings
Fig. 1 is substrate surface micro-structural of the present invention；(a-c) sharpening sand glass bears structure (three three, width figure multiplication factors)；
(d-f) silk like fabric bears structure (three three, width figure multiplication factors)；(g-i) imitate lotus leaf and bear structure (three three, width figure multiplication factors).
Fig. 2 different surfaces micro-structural substrates align the horizontal influence of pressure-responsive.
Embodiment
Natural material surface is plant leaf blade, fabric, the wood of certain roughness, bag, ground glass, skin lines or sand
Paper.Elastomeric material is higher with PU, thickness 0.4-0.8mm.
The preparation method of the pressure sensor of described capacitor type, in surface detail of the natural material as template,
Template can use silastic material to prepare, and template surface specifically has the decorative pattern of natural material, in the surface flower of silicon rubber transfer
Polyurethane elastomer or crosslinking rubber are poured in the template of line, obtains the polyurethane bulk substrate of composite microstructure；Obtaining
Polyurethane elastomer substrate spraying nano silver wire obtains upper/lower electrode, and intermediate course, which uses, has polyurethane elastomer (elastic
Ecoflex resins) pour and form.When top layer loading force, (Ecoflex resins are poly- to the polyurethane elastic-plastic material in intermediate layer
Urethane elastomeric material) strain, so as to cause the distance between driving electrodes and induction electrode and overlapping area to become
Change, according to the change of output capacitance, reach the purpose of the pressure size of detection loading, the micro-nano structure replicated, which plays, strengthens biography
The effect of sensor sensitivity.
As illustrated, verification experimental verification, the treated substrate of surface micro-structure and directly under culture dish before use respectively
Obtained bottom plate does contrast test on surface, each nano silver wire solution for spraying 8ml and with elastomer thin film spaced-apart electrodes.With nothing
Microstructure sample is compared, and the data that the sensitivity that there is the sample of micro-nano structure to be obtained strengthens are as shown in Figure 2.
Experiment shows that the pliable pressure sensor based on the substrate with surface micro-structure has higher malleation force-responsive water
It is flat and particularly evident for the slight pressure within 5000Pa.This is probably that surface micro-structure is more because when pressure is smaller
Completely, what can be occurred changes greatly；When pressure is larger, surface texture is insensitive for pressure already close to cylinder.From silver
The CNT that nano-material substitutes conventional metals paper tinsel or largely used in recent years is more preferable as the effect of electrode；By life
In the material such as common silk, lotus leaf and ground glass prepare and have the substrate flexibility pressure sensor of surface micro-structure to normal pressure
Level of response, i.e., change for the normal pressure of formed objects, the change of output capacitance value obtained gain.
Claims (6)
1. a kind of pressure sensor of capacitor type, it is characterized in that using " sandwich sandwich " structure, top layer is driving electrodes, bottom
For induction electrode, intermediate layer uses elastomeric material；The upper and lower surface of elastomeric material has the solid grain on natural material surface；Bullet
Property material be polyurethane elastomer material, the elastomeric material that was crosslinked.
2. the pressure sensor of capacitor type according to claim 1, it is characterized in that natural material surface is plant leaf blade, knitted
Thing, the wood of certain roughness, bag, ground glass, skin lines or sand paper.
3. the pressure sensor of capacitor type according to claim 1, it is characterized in that the thickness of elastomeric material be 0.3mm with
On.
4. the pressure sensor of capacitor type according to claim 1, it is characterized in that the thickness of elastomeric material is 0.4-
0.8mm。
5. the pressure sensor of capacitor type according to claim 1, it is characterized in that nano silver wire material is as electrode.
6. the preparation method of the pressure sensor of the capacitor type according to claim 1-6, it is characterized in that in the natural material
Expect surface as silicon rubber template, in template on pour polyurethane elastomer or be crosslinked rubber, obtain replicating microstructured
Polyurethane bulk substrate；Upper/lower electrode is obtained obtaining polyurethane elastomer substrate spraying nano silver wire, intermediate course is using tool
Flexible Ecoflex resins, which pour, to be formed.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108318059A (en) * | 2018-02-12 | 2018-07-24 | 清华大学 | Paper substrate sensor and preparation method thereof |
| CN108827501A (en) * | 2018-07-18 | 2018-11-16 | 南方科技大学 | A kind of tactile tactility apparatus and preparation method thereof |
| CN110455443A (en) * | 2019-08-23 | 2019-11-15 | 北京航空航天大学 | A kind of flexible capacitive sensor and preparation method thereof using the preparation of silver nanowires flexible electrode |
| CN111289152A (en) * | 2018-06-28 | 2020-06-16 | 成都新柯力化工科技有限公司 | Wearable flexible pressure electronic sensor and preparation method thereof |
| CN113155327A (en) * | 2021-03-30 | 2021-07-23 | 中国科学院深圳先进技术研究院 | Bionic microarray flexible electrode, preparation method thereof and flexible pressure sensor |
| CN114459671A (en) * | 2020-11-10 | 2022-05-10 | 苏州苏大维格科技集团股份有限公司 | Flexible transparent capacitive sensor and manufacturing method thereof |
Citations (11)
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