JPS6475664A - Formation of x-ray transmitting film - Google Patents
Formation of x-ray transmitting filmInfo
- Publication number
- JPS6475664A JPS6475664A JP23405287A JP23405287A JPS6475664A JP S6475664 A JPS6475664 A JP S6475664A JP 23405287 A JP23405287 A JP 23405287A JP 23405287 A JP23405287 A JP 23405287A JP S6475664 A JPS6475664 A JP S6475664A
- Authority
- JP
- Japan
- Prior art keywords
- film
- sputtering
- ray transmitting
- gas
- transmitting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
PURPOSE:To form an X-ray transmitting film having controlled internal stress when an Si3N4 film is deposited by sputtering, by using a gaseous mixture of an inert gas with N2 as a sputtering gas and varying the mixing ratio. CONSTITUTION:When an Si3N4 film is deposited on a substrate by sputtering, a gaseous mixture of an inert gas with N2 is used as a sputtering gas and the mixing ratio is varied. The pressure of the sputtering gas is preferably kept low during deposition so that a formed film takes in no impurities. Thus, the internal stress of the film is precisely controlled without changing the compsn., refractive index, density, visible light transmissivity, mechanical properties, etc.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23405287A JPS6475664A (en) | 1987-09-18 | 1987-09-18 | Formation of x-ray transmitting film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23405287A JPS6475664A (en) | 1987-09-18 | 1987-09-18 | Formation of x-ray transmitting film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6475664A true JPS6475664A (en) | 1989-03-22 |
Family
ID=16964819
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23405287A Pending JPS6475664A (en) | 1987-09-18 | 1987-09-18 | Formation of x-ray transmitting film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6475664A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7196396B2 (en) | 2002-12-26 | 2007-03-27 | Fujitsu Limited | Semiconductor device having STI without divot and its manufacture |
US10954808B2 (en) | 2015-06-03 | 2021-03-23 | Mitsubishi Power, Ltd. | Sealing device and rotary machine |
-
1987
- 1987-09-18 JP JP23405287A patent/JPS6475664A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7196396B2 (en) | 2002-12-26 | 2007-03-27 | Fujitsu Limited | Semiconductor device having STI without divot and its manufacture |
US7208812B2 (en) | 2002-12-26 | 2007-04-24 | Fujitsu Limited | Semiconductor device having STI without divot and its manufacture |
US7759215B2 (en) | 2002-12-26 | 2010-07-20 | Fujitsu Semiconductor Limited | Semiconductor device having STI without divot and its manufacture |
US10954808B2 (en) | 2015-06-03 | 2021-03-23 | Mitsubishi Power, Ltd. | Sealing device and rotary machine |
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