JPS6468114A - Structure for idt exciting type piezoelectric resonator - Google Patents
Structure for idt exciting type piezoelectric resonatorInfo
- Publication number
- JPS6468114A JPS6468114A JP22548687A JP22548687A JPS6468114A JP S6468114 A JPS6468114 A JP S6468114A JP 22548687 A JP22548687 A JP 22548687A JP 22548687 A JP22548687 A JP 22548687A JP S6468114 A JPS6468114 A JP S6468114A
- Authority
- JP
- Japan
- Prior art keywords
- idt
- type piezoelectric
- piezoelectric resonator
- equal
- period
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
PURPOSE:To obtain an IDT exciting type piezoelectric resonator with less loss without decreasing yield by making the pitch of an IDT and a reflector equal to each other, forming the gap of both to be in complete continuous equal period, inserting a capacitor in series with the IDT so as to vary the capacitor. CONSTITUTION:A period LT of IDT electrodes 2 of an IDT exciting type piezoelectric resonator and a period LR of a reflector are formed to be continuously equal, the line width is made equal and a static capacitance of an interdigital conductor pattern 4 is inserted in series with said IDT 2. Since the resonance frequency of the resonator varies with the series capacitance C, the C is adjusted close to a prescribed value thereby adjusting the resonance frequency to be coincident with the desired value. Thus, the manufacturing dispersion in the resonance frequency is corrected and the yield is improved considerably.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22548687A JPS6468114A (en) | 1987-09-09 | 1987-09-09 | Structure for idt exciting type piezoelectric resonator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22548687A JPS6468114A (en) | 1987-09-09 | 1987-09-09 | Structure for idt exciting type piezoelectric resonator |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6468114A true JPS6468114A (en) | 1989-03-14 |
Family
ID=16830080
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22548687A Pending JPS6468114A (en) | 1987-09-09 | 1987-09-09 | Structure for idt exciting type piezoelectric resonator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6468114A (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08139558A (en) * | 1994-11-14 | 1996-05-31 | Nec Corp | Surface acoustic wave device |
JPH09153758A (en) * | 1995-09-29 | 1997-06-10 | Toshiba Corp | Surface acoustic wave device |
WO2005004326A1 (en) * | 2003-07-02 | 2005-01-13 | Sony Corporation | Mems type oscillator, process for fabricating the same, filter, and communication unit |
JP2005311568A (en) * | 2004-04-20 | 2005-11-04 | Sony Corp | Filter device and transceiver |
JP2012060418A (en) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | Surface acoustic wave device, electronic apparatus and sensor device |
JP2012060422A (en) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | Surface acoustic wave device, electronic apparatus and sensor device |
US8928432B2 (en) | 2010-08-26 | 2015-01-06 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8933612B2 (en) | 2009-02-27 | 2015-01-13 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US9048806B2 (en) | 2010-09-09 | 2015-06-02 | Seiko Epson Corporation | Surface acoustic wave device, electronic apparatus, and sensor apparatus |
US9088263B2 (en) | 2010-06-17 | 2015-07-21 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
JP2017135568A (en) * | 2016-01-27 | 2017-08-03 | 太陽誘電株式会社 | Resonant circuit, filter circuit, and elastic wave resonator |
US10630257B2 (en) | 2016-09-13 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Acoustic wave filter device, multiplexer, radio-frequency front-end circuit, and communication apparatus |
US10715107B2 (en) | 2016-09-21 | 2020-07-14 | Murata Manufacturing Co., Ltd. | Acoustic wave device, radio frequency front-end circuit, and communication device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160123A (en) * | 1980-05-15 | 1981-12-09 | Toshiba Corp | Elastic surface wave device |
JPS574613A (en) * | 1980-06-11 | 1982-01-11 | Murata Mfg Co Ltd | Elastic surface wave device |
JPS58131810A (en) * | 1982-02-01 | 1983-08-05 | Toshiba Corp | Surface acoustic wave device |
-
1987
- 1987-09-09 JP JP22548687A patent/JPS6468114A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56160123A (en) * | 1980-05-15 | 1981-12-09 | Toshiba Corp | Elastic surface wave device |
JPS574613A (en) * | 1980-06-11 | 1982-01-11 | Murata Mfg Co Ltd | Elastic surface wave device |
JPS58131810A (en) * | 1982-02-01 | 1983-08-05 | Toshiba Corp | Surface acoustic wave device |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08139558A (en) * | 1994-11-14 | 1996-05-31 | Nec Corp | Surface acoustic wave device |
JPH09153758A (en) * | 1995-09-29 | 1997-06-10 | Toshiba Corp | Surface acoustic wave device |
WO2005004326A1 (en) * | 2003-07-02 | 2005-01-13 | Sony Corporation | Mems type oscillator, process for fabricating the same, filter, and communication unit |
US7504909B2 (en) | 2003-07-02 | 2009-03-17 | Sony Corporation | MEMS type oscillator, process for fabricating the same, filter, and communication unit |
JP2005311568A (en) * | 2004-04-20 | 2005-11-04 | Sony Corp | Filter device and transceiver |
US8933612B2 (en) | 2009-02-27 | 2015-01-13 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US8952596B2 (en) | 2009-02-27 | 2015-02-10 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US9762207B2 (en) | 2009-02-27 | 2017-09-12 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic instrument |
US9088263B2 (en) | 2010-06-17 | 2015-07-21 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US9537464B2 (en) | 2010-06-17 | 2017-01-03 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
US8928432B2 (en) | 2010-08-26 | 2015-01-06 | Seiko Epson Corporation | Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus |
JP2012060422A (en) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | Surface acoustic wave device, electronic apparatus and sensor device |
JP2012060418A (en) * | 2010-09-09 | 2012-03-22 | Seiko Epson Corp | Surface acoustic wave device, electronic apparatus and sensor device |
US9048806B2 (en) | 2010-09-09 | 2015-06-02 | Seiko Epson Corporation | Surface acoustic wave device, electronic apparatus, and sensor apparatus |
JP2017135568A (en) * | 2016-01-27 | 2017-08-03 | 太陽誘電株式会社 | Resonant circuit, filter circuit, and elastic wave resonator |
US10630257B2 (en) | 2016-09-13 | 2020-04-21 | Murata Manufacturing Co., Ltd. | Acoustic wave filter device, multiplexer, radio-frequency front-end circuit, and communication apparatus |
US10715107B2 (en) | 2016-09-21 | 2020-07-14 | Murata Manufacturing Co., Ltd. | Acoustic wave device, radio frequency front-end circuit, and communication device |
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