JPS6417428A - Plasma device - Google Patents
Plasma deviceInfo
- Publication number
- JPS6417428A JPS6417428A JP17348087A JP17348087A JPS6417428A JP S6417428 A JPS6417428 A JP S6417428A JP 17348087 A JP17348087 A JP 17348087A JP 17348087 A JP17348087 A JP 17348087A JP S6417428 A JPS6417428 A JP S6417428A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- sample
- inputted
- mounting board
- controller
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17348087A JPS6417428A (en) | 1987-07-10 | 1987-07-10 | Plasma device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17348087A JPS6417428A (en) | 1987-07-10 | 1987-07-10 | Plasma device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417428A true JPS6417428A (en) | 1989-01-20 |
Family
ID=15961277
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17348087A Pending JPS6417428A (en) | 1987-07-10 | 1987-07-10 | Plasma device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417428A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01309328A (ja) * | 1988-01-20 | 1989-12-13 | Tokyo Electron Ltd | プラズマ処理方法及びその装置 |
US5914051A (en) * | 1990-09-26 | 1999-06-22 | Hitachi, Ltd. | Microwave plasma processing method and apparatus |
JP2009016146A (ja) * | 2007-07-04 | 2009-01-22 | Nagano Japan Radio Co | プラズマ処理装置およびプラズマ処理方法 |
-
1987
- 1987-07-10 JP JP17348087A patent/JPS6417428A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01309328A (ja) * | 1988-01-20 | 1989-12-13 | Tokyo Electron Ltd | プラズマ処理方法及びその装置 |
US5914051A (en) * | 1990-09-26 | 1999-06-22 | Hitachi, Ltd. | Microwave plasma processing method and apparatus |
JP2009016146A (ja) * | 2007-07-04 | 2009-01-22 | Nagano Japan Radio Co | プラズマ処理装置およびプラズマ処理方法 |
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