JPS6417428A - Plasma device - Google Patents

Plasma device

Info

Publication number
JPS6417428A
JPS6417428A JP17348087A JP17348087A JPS6417428A JP S6417428 A JPS6417428 A JP S6417428A JP 17348087 A JP17348087 A JP 17348087A JP 17348087 A JP17348087 A JP 17348087A JP S6417428 A JPS6417428 A JP S6417428A
Authority
JP
Japan
Prior art keywords
temperature
sample
inputted
mounting board
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17348087A
Other languages
English (en)
Inventor
Hironori Araki
Yoshiichi Tobinaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Sumitomo Metal Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Metal Industries Ltd filed Critical Sumitomo Metal Industries Ltd
Priority to JP17348087A priority Critical patent/JPS6417428A/ja
Publication of JPS6417428A publication Critical patent/JPS6417428A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP17348087A 1987-07-10 1987-07-10 Plasma device Pending JPS6417428A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17348087A JPS6417428A (en) 1987-07-10 1987-07-10 Plasma device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17348087A JPS6417428A (en) 1987-07-10 1987-07-10 Plasma device

Publications (1)

Publication Number Publication Date
JPS6417428A true JPS6417428A (en) 1989-01-20

Family

ID=15961277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17348087A Pending JPS6417428A (en) 1987-07-10 1987-07-10 Plasma device

Country Status (1)

Country Link
JP (1) JPS6417428A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01309328A (ja) * 1988-01-20 1989-12-13 Tokyo Electron Ltd プラズマ処理方法及びその装置
US5914051A (en) * 1990-09-26 1999-06-22 Hitachi, Ltd. Microwave plasma processing method and apparatus
JP2009016146A (ja) * 2007-07-04 2009-01-22 Nagano Japan Radio Co プラズマ処理装置およびプラズマ処理方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01309328A (ja) * 1988-01-20 1989-12-13 Tokyo Electron Ltd プラズマ処理方法及びその装置
US5914051A (en) * 1990-09-26 1999-06-22 Hitachi, Ltd. Microwave plasma processing method and apparatus
JP2009016146A (ja) * 2007-07-04 2009-01-22 Nagano Japan Radio Co プラズマ処理装置およびプラズマ処理方法

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