JPS55117945A - Defect detection unit - Google Patents

Defect detection unit

Info

Publication number
JPS55117945A
JPS55117945A JP2535879A JP2535879A JPS55117945A JP S55117945 A JPS55117945 A JP S55117945A JP 2535879 A JP2535879 A JP 2535879A JP 2535879 A JP2535879 A JP 2535879A JP S55117945 A JPS55117945 A JP S55117945A
Authority
JP
Japan
Prior art keywords
defect detection
reflection light
detectors
comparators
detection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2535879A
Other languages
Japanese (ja)
Inventor
Masahito Nakajima
Moritoshi Ando
Yushi Inagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP2535879A priority Critical patent/JPS55117945A/en
Publication of JPS55117945A publication Critical patent/JPS55117945A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To make accurate defect detection possible by using plural photo detectors to enlarge the margin for detect detection. CONSTITUTION:The light beam from light source 4 scans on a glass substrate, and the reflection light at this time is detected by reflection light detectors 5a and 5b. Outputs from reflection light detectors 5a and 5b are applied to comparators 8a and 8b respectively, and only the signal of a reference level or more is taken out. Output signals of comparators 8a and 8b are inputted to AND circuit 9 and are operated for AND. By the output signal of AND circuit 9, it can be detected whether a photo resist exists on the electrode surface or not.
JP2535879A 1979-03-05 1979-03-05 Defect detection unit Pending JPS55117945A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2535879A JPS55117945A (en) 1979-03-05 1979-03-05 Defect detection unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2535879A JPS55117945A (en) 1979-03-05 1979-03-05 Defect detection unit

Publications (1)

Publication Number Publication Date
JPS55117945A true JPS55117945A (en) 1980-09-10

Family

ID=12163614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2535879A Pending JPS55117945A (en) 1979-03-05 1979-03-05 Defect detection unit

Country Status (1)

Country Link
JP (1) JPS55117945A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290228A2 (en) * 1987-05-08 1988-11-09 Qc Optics, Inc. Surface defect detection and confirmation system and method
JPS6439543A (en) * 1987-08-06 1989-02-09 Nikon Corp Defective inspection device
EP0611608A1 (en) * 1993-02-16 1994-08-24 SYSTEM KURANDT GmbH Method and device for scanning and checking of tracks applied to a substrate
FR2826120A1 (en) * 2001-06-15 2002-12-20 Renault Automation Comau Control of adhesive, from a nozzle, for gluing two parts together, uses two pairs of photoelectric or laser type reflex cell optical sensors

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290228A2 (en) * 1987-05-08 1988-11-09 Qc Optics, Inc. Surface defect detection and confirmation system and method
JPS6439543A (en) * 1987-08-06 1989-02-09 Nikon Corp Defective inspection device
EP0611608A1 (en) * 1993-02-16 1994-08-24 SYSTEM KURANDT GmbH Method and device for scanning and checking of tracks applied to a substrate
FR2826120A1 (en) * 2001-06-15 2002-12-20 Renault Automation Comau Control of adhesive, from a nozzle, for gluing two parts together, uses two pairs of photoelectric or laser type reflex cell optical sensors

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