JPS62165985A - Laser oscillator stabilized at diverging angle of laser beam - Google Patents
Laser oscillator stabilized at diverging angle of laser beamInfo
- Publication number
- JPS62165985A JPS62165985A JP653586A JP653586A JPS62165985A JP S62165985 A JPS62165985 A JP S62165985A JP 653586 A JP653586 A JP 653586A JP 653586 A JP653586 A JP 653586A JP S62165985 A JPS62165985 A JP S62165985A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- curvature
- diverging angle
- laser beam
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
- H01S3/139—Stabilisation of laser output parameters, e.g. frequency or amplitude by controlling the mutual position or the reflecting properties of the reflectors of the cavity, e.g. by controlling the cavity length
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、固体レーデ発振器、特に、出射ビームの拡が
り角度の安定化に関するものである・〔従来の技術〕
従来固体レーデ発振器において、レーザビームの拡がり
角度の制御は、レーザ発振器外部に付加L[ビームエキ
スパンダーによって行なわれることがある。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a solid-state Raded oscillator, and particularly to stabilization of the divergence angle of an emitted beam. [Prior Art] In a conventional solid-state Raded oscillator, the laser beam The spread angle of the beam is sometimes controlled by an additional L beam expander outside the laser oscillator.
しかシアビームエキスパンダーによるビーム拡がり角度
の制御においては、ビーム径の変動は避けられない。し
かも制御が困難な2枚以上のレンズを必要とする。し念
がってレーデ媒質への励起エネルギーが変化すると、レ
ーザ媒質の熱レンズ効果が生じ、この結果、ビーム拡が
り角の変動全安定させることは困難であっ几。However, when controlling the beam expansion angle using a shear beam expander, variations in the beam diameter are unavoidable. Moreover, it requires two or more lenses that are difficult to control. However, if the excitation energy to the Laser medium changes, a thermal lensing effect of the laser medium will occur, and as a result, it is difficult to fully stabilize the variation of the beam divergence angle.
本発明によれば、固体レーザ発振器において。 According to the invention, in a solid state laser oscillator.
共振器を構成する反射鏡としての曲率可変反射鏡と、出
射ビームの拡が9角全検出するレーザビーム検出装置と
、該レーザビーム検出装置の出力に応じ、上記曲率可変
反射鏡の曲率を制御□□する制御回路とを有することを
特徴とするレーザビーム(拡がり角度を安定化したレー
ザ発振器が得らi 、。A variable curvature reflector serving as a reflector constituting a resonator, a laser beam detection device that detects all nine angles of spread of the emitted beam, and controlling the curvature of the variable curvature reflector according to the output of the laser beam detection device. A laser oscillator with a stabilized divergence angle is obtained, characterized by having a control circuit that controls □□.
次に本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第1図は本発明の一実施例によるレーザ発振器を示す。FIG. 1 shows a laser oscillator according to one embodiment of the invention.
図示のレーザ発振器は、ピエゾ素子音用いた曲率可変全
反射鏡1と、レーザ媒質2と2部分透過反射鏡3とを含
んでいる。部分透過反射鏡3よシ出力されるレーザビー
ムは拡がり角度θ全もつ。この拡が9角度θは1反射鏡
1及び3の曲率と、レーザ媒質2の熱レンズ効果により
生じる。The illustrated laser oscillator includes a variable curvature total reflection mirror 1 using a piezo element sound, a laser medium 2, and a two-part transmission reflection mirror 3. The laser beam output from the partially transmitting reflector 3 has a total divergence angle θ. This expansion angle θ is caused by the curvature of the reflecting mirrors 1 and 3 and the thermal lens effect of the laser medium 2.
ここで反射鏡3の曲率はレンズ焦点距離により一義的に
決定する。一方、レーザ媒質2の熱レンズ効果は励起エ
ネルギーによシ変動する。このためレーデ媒質2に対す
る励起エネルギーに変化があると、レーザビームの拡が
り角θにも変動を生じるおそれがある。Here, the curvature of the reflecting mirror 3 is uniquely determined by the lens focal length. On the other hand, the thermal lens effect of the laser medium 2 varies depending on the excitation energy. Therefore, if there is a change in the excitation energy for the Rade medium 2, there is a possibility that the spread angle θ of the laser beam will also change.
上述に鑑み2図示のレーザ発振器はさらに、レーザビー
ム拡が9角の変動を検出するレーザビーム検出装置を含
んでいる。このレーザビーム検出装置ハ、レーザビーム
全分岐させる定めの、ビームスプリッタ−4と、このビ
ームスプリッタ−4によって分岐させられたレーザビー
ムの拡がり角の変動を検出する几めのレーザビーム検出
器5とを有している。レーザビーム検出器5はレーザビ
ームの拡がり角の変動の様子を表わす電気信号を出力す
るものである。検出器5の出力信号は制御回路6に入力
される。制御回路6はその出カンこよって曲率可変全反
射m1の曲率を変化させるものである。すなわち、制御
回路6はレーザビームの拡が9角度の変動を安定させる
ようにフィードバック制御する。なお反射鏡1の曲率半
径は無限大から数mの範囲内において任意に変化させら
れる。In view of the above, the laser oscillator shown in FIG. 2 further includes a laser beam detection device that detects a nine-angle variation in laser beam expansion. This laser beam detection device includes a beam splitter 4 that is designed to split all of the laser beams, and a precise laser beam detector 5 that detects variations in the divergence angle of the laser beam split by the beam splitter 4. have. The laser beam detector 5 outputs an electric signal representing the variation in the divergence angle of the laser beam. The output signal of the detector 5 is input to the control circuit 6. The control circuit 6 changes the curvature of the variable curvature total reflection m1 depending on its output. That is, the control circuit 6 performs feedback control to stabilize the nine-angle variation in the spread of the laser beam. Note that the radius of curvature of the reflecting mirror 1 can be arbitrarily changed within a range from infinity to several meters.
次にピエゾ素子を用いた曲率可変全反射鏡の原理を第2
図及び第3図全周いて説明する。Next, we will explain the principle of a variable curvature total reflection mirror using piezo elements in the second section.
The explanation will be given with reference to FIG. 3 and the entire circumference of FIG.
第2図において、11は、2枚のピエゾ素子を張り合わ
せ友もので、ピエゾ素子に対して電界が互いに反対方向
になるよう、電極が取り付けられている。ここで片端面
に対して誘電体全蒸着し。In FIG. 2, numeral 11 is a material made by pasting together two piezo elements, and electrodes are attached to the piezo elements so that electric fields are directed in opposite directions. Here, a dielectric is completely vapor-deposited on one end surface.
全反射鏡とする。今、ピエゾ素子に制御回路12によシ
ミ界金印加すると、第3図に示されるように2つのピエ
ゾ素子に互いに反対方向の応力が加わり5曲率、Rで近
似される曲率半径が得られる。It is a total reflection mirror. Now, when a spot field is applied to the piezo elements by the control circuit 12, stresses in mutually opposite directions are applied to the two piezo elements as shown in FIG. 3, resulting in a radius of curvature approximated by 5 curvatures and R.
以上説明したように2本発明はレーザ発振器以外にビー
ムエキスノセンダー等の他の光学系全必要とせず、また
簡便な制御回路によりレーザビームの拡がり角度全安定
化することができる効果を有する。As explained above, the present invention does not require any other optical system such as a beam exosender other than a laser oscillator, and has the effect that the spread angle of the laser beam can be fully stabilized by a simple control circuit.
第1図は本発明の一実施例を示す構成説明図。
第2図は同実施例に用いられた曲率可変全反射鏡の制御
原理を説明する図、第3図は曲率可変全反射鏡の曲率変
化の原理全説明する図である。
1・・・曲率可変全反射鏡、2・・・レーザ媒質、3・
・・部分透過反射鏡、4・・・ビームスプリッタ−95
・・・レーザビーム検出器、6・・・制御回路。
第2図
第3図FIG. 1 is a configuration explanatory diagram showing one embodiment of the present invention. FIG. 2 is a diagram illustrating the control principle of the variable curvature total reflection mirror used in the same embodiment, and FIG. 3 is a diagram illustrating the principle of changing the curvature of the variable curvature total reflection mirror. 1... Curvature variable total reflection mirror, 2... Laser medium, 3...
・Partially transmitting reflector, 4...Beam splitter-95
...Laser beam detector, 6...Control circuit. Figure 2 Figure 3
Claims (1)
鏡としての曲率可変反射鏡と、出射ビームの拡がり角を
検出するレーザビーム検出装置と、該レーザビーム検出
装置の出力に応じ、上記曲率可変反射鏡の曲率を制御す
る制御回路とを有することを特徴とするレーザビームの
拡がり角度を安定化したレーザ発振器。1) In a solid-state laser oscillator, a variable curvature reflector as a reflector constituting a resonator, a laser beam detector that detects the divergence angle of the emitted beam, and a variable curvature reflector that detects the divergence angle of the emitted beam according to the output of the laser beam detector. 1. A laser oscillator that stabilizes the spread angle of a laser beam, comprising a control circuit that controls the curvature of a mirror.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP653586A JPS62165985A (en) | 1986-01-17 | 1986-01-17 | Laser oscillator stabilized at diverging angle of laser beam |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP653586A JPS62165985A (en) | 1986-01-17 | 1986-01-17 | Laser oscillator stabilized at diverging angle of laser beam |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62165985A true JPS62165985A (en) | 1987-07-22 |
Family
ID=11641044
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP653586A Pending JPS62165985A (en) | 1986-01-17 | 1986-01-17 | Laser oscillator stabilized at diverging angle of laser beam |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62165985A (en) |
Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01128580A (en) * | 1987-11-13 | 1989-05-22 | Fuji Electric Co Ltd | Slab shaped solid state laser oscillator |
FR2674782A1 (en) * | 1991-03-15 | 1992-10-09 | Diehl Gmbh & Co | DEVICE FOR INFLUENCING THE BEAM IN THE MACHINING OF WORKPIECES WITH A HIGH ENERGY LASER BEAM. |
US5825801A (en) * | 1996-08-21 | 1998-10-20 | Mitsubishi Denki Kabushiki Kaisha | Laser apparatus |
US6273883B1 (en) | 1996-04-09 | 2001-08-14 | Cynosure, Inc. | Alexandrite laser system for treatment of dermatological specimens |
DE10230522B4 (en) * | 2001-07-07 | 2008-11-13 | Rofin-Sinar Laser Gmbh | Stripline laser with an unstable resonator |
CN102522685A (en) * | 2011-12-27 | 2012-06-27 | 清华大学 | Compensation device for thermal lens effect of laser |
CN102684055A (en) * | 2012-05-15 | 2012-09-19 | 清华大学 | Device for adjusting curvature radius of reflector |
US8915948B2 (en) | 2002-06-19 | 2014-12-23 | Palomar Medical Technologies, Llc | Method and apparatus for photothermal treatment of tissue at depth |
US9028536B2 (en) | 2006-08-02 | 2015-05-12 | Cynosure, Inc. | Picosecond laser apparatus and methods for its operation and use |
US9780518B2 (en) | 2012-04-18 | 2017-10-03 | Cynosure, Inc. | Picosecond laser apparatus and methods for treating target tissues with same |
US10245107B2 (en) | 2013-03-15 | 2019-04-02 | Cynosure, Inc. | Picosecond optical radiation systems and methods of use |
US10434324B2 (en) | 2005-04-22 | 2019-10-08 | Cynosure, Llc | Methods and systems for laser treatment using non-uniform output beam |
US11418000B2 (en) | 2018-02-26 | 2022-08-16 | Cynosure, Llc | Q-switched cavity dumped sub-nanosecond laser |
-
1986
- 1986-01-17 JP JP653586A patent/JPS62165985A/en active Pending
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01128580A (en) * | 1987-11-13 | 1989-05-22 | Fuji Electric Co Ltd | Slab shaped solid state laser oscillator |
FR2674782A1 (en) * | 1991-03-15 | 1992-10-09 | Diehl Gmbh & Co | DEVICE FOR INFLUENCING THE BEAM IN THE MACHINING OF WORKPIECES WITH A HIGH ENERGY LASER BEAM. |
US6273883B1 (en) | 1996-04-09 | 2001-08-14 | Cynosure, Inc. | Alexandrite laser system for treatment of dermatological specimens |
US6610052B2 (en) | 1996-04-09 | 2003-08-26 | Cynosure, Inc. | Laser system and method for treatment of biologic targets |
US7118562B2 (en) | 1996-04-09 | 2006-10-10 | Cynosure, Inc. | Laser system and method for treatment of biologic targets |
US5825801A (en) * | 1996-08-21 | 1998-10-20 | Mitsubishi Denki Kabushiki Kaisha | Laser apparatus |
DE10230522B4 (en) * | 2001-07-07 | 2008-11-13 | Rofin-Sinar Laser Gmbh | Stripline laser with an unstable resonator |
US8915948B2 (en) | 2002-06-19 | 2014-12-23 | Palomar Medical Technologies, Llc | Method and apparatus for photothermal treatment of tissue at depth |
US10556123B2 (en) | 2002-06-19 | 2020-02-11 | Palomar Medical Technologies, Llc | Method and apparatus for treatment of cutaneous and subcutaneous conditions |
US10500413B2 (en) | 2002-06-19 | 2019-12-10 | Palomar Medical Technologies, Llc | Method and apparatus for treatment of cutaneous and subcutaneous conditions |
US10434324B2 (en) | 2005-04-22 | 2019-10-08 | Cynosure, Llc | Methods and systems for laser treatment using non-uniform output beam |
US11712299B2 (en) | 2006-08-02 | 2023-08-01 | Cynosure, LLC. | Picosecond laser apparatus and methods for its operation and use |
US9028536B2 (en) | 2006-08-02 | 2015-05-12 | Cynosure, Inc. | Picosecond laser apparatus and methods for its operation and use |
US10966785B2 (en) | 2006-08-02 | 2021-04-06 | Cynosure, Llc | Picosecond laser apparatus and methods for its operation and use |
US10849687B2 (en) | 2006-08-02 | 2020-12-01 | Cynosure, Llc | Picosecond laser apparatus and methods for its operation and use |
CN102522685A (en) * | 2011-12-27 | 2012-06-27 | 清华大学 | Compensation device for thermal lens effect of laser |
US10305244B2 (en) | 2012-04-18 | 2019-05-28 | Cynosure, Llc | Picosecond laser apparatus and methods for treating target tissues with same |
US10581217B2 (en) | 2012-04-18 | 2020-03-03 | Cynosure, Llc | Picosecond laser apparatus and methods for treating target tissues with same |
US9780518B2 (en) | 2012-04-18 | 2017-10-03 | Cynosure, Inc. | Picosecond laser apparatus and methods for treating target tissues with same |
US11095087B2 (en) | 2012-04-18 | 2021-08-17 | Cynosure, Llc | Picosecond laser apparatus and methods for treating target tissues with same |
US11664637B2 (en) | 2012-04-18 | 2023-05-30 | Cynosure, Llc | Picosecond laser apparatus and methods for treating target tissues with same |
CN102684055A (en) * | 2012-05-15 | 2012-09-19 | 清华大学 | Device for adjusting curvature radius of reflector |
US10285757B2 (en) | 2013-03-15 | 2019-05-14 | Cynosure, Llc | Picosecond optical radiation systems and methods of use |
US10765478B2 (en) | 2013-03-15 | 2020-09-08 | Cynosurce, Llc | Picosecond optical radiation systems and methods of use |
US10245107B2 (en) | 2013-03-15 | 2019-04-02 | Cynosure, Inc. | Picosecond optical radiation systems and methods of use |
US11446086B2 (en) | 2013-03-15 | 2022-09-20 | Cynosure, Llc | Picosecond optical radiation systems and methods of use |
US11418000B2 (en) | 2018-02-26 | 2022-08-16 | Cynosure, Llc | Q-switched cavity dumped sub-nanosecond laser |
US11791603B2 (en) | 2018-02-26 | 2023-10-17 | Cynosure, LLC. | Q-switched cavity dumped sub-nanosecond laser |
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