JPS61106058A - Ultrafine displacement linear electromagnetic actuator - Google Patents

Ultrafine displacement linear electromagnetic actuator

Info

Publication number
JPS61106058A
JPS61106058A JP22835884A JP22835884A JPS61106058A JP S61106058 A JPS61106058 A JP S61106058A JP 22835884 A JP22835884 A JP 22835884A JP 22835884 A JP22835884 A JP 22835884A JP S61106058 A JPS61106058 A JP S61106058A
Authority
JP
Japan
Prior art keywords
permanent magnet
stator
electromagnetic actuator
excitation
linear electromagnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22835884A
Other languages
Japanese (ja)
Inventor
Nagahiko Nagasaka
長坂 長彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP22835884A priority Critical patent/JPS61106058A/en
Publication of JPS61106058A publication Critical patent/JPS61106058A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K33/00Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
    • H02K33/16Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

PURPOSE:To obtain high thrust at ultrafine displacement and to improve the responsiveness by axially aligning electromagnets in which coils are wound in the grooves of circular inner periphery, and supporting a movable member on the inner periphery. CONSTITUTION:A rod type linear electromagnetic actuator in which a permanent magnet 2 is filled inside has a stator made of two annular electromagnets 6, 8, a movable element made of a permanent magnet 2 attached with pole pieces 3 and a shaft 1, and a bracket 5. Grooves 9a, 9b are formed to produce axial N- and S-poles on the inner peripheral side of the electromagnet, and pole pieces 3a, 3b are opposed radially to the inner peripheral surfaces of the grooves 9a, 9b. Thus, when coil 6a, 6b are energized in the direction as shown, S-, N-, N-, S-poles are generated from the left on the stator, and the element is affected by the force at the left to move.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、線形で制御性の良い微少変位リニア電磁アク
チュエータを可動マグネット形あるいは可動コア形で実
現したもので、推力とストロークの積が寸法や重量あた
り大きくできる磁気構造に関する。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention realizes a linear electromagnetic actuator with fine displacement that is linear and has good controllability in the form of a movable magnet or a movable core. and magnetic structures that can be made larger per weight.

〔従来技術と問題点〕[Prior art and problems]

油圧サーボ弁やレーザディスクのレンズ駆動などに現在
は可動コイル形のリニア電磁アクチュエータ(ボイスコ
イルモータ)が使われている。
Currently, moving coil type linear electromagnetic actuators (voice coil motors) are used to drive hydraulic servo valves and laser disk lenses.

この種の従来例の側断面図を第7図に表わす。A side sectional view of this type of conventional example is shown in FIG.

この永久磁石可動形リニア振動アクチュエータ(Lin
ear 0scillation Actuator 
)は、−次側(固定子)が1組2個のコイル6、継鉄8
と1個の中央磁極7とからなり、二次側(可動子)は1
組2個の磁極片3と1個の円筒状の永久磁石2がら構成
されている。
This permanent magnet movable linear vibration actuator (Lin
ear 0scillation Actuator
), the negative side (stator) has one set of two coils 6 and a yoke 8.
and one central magnetic pole 7, and the secondary side (mover) is one
It is composed of two sets of magnetic pole pieces 3 and one cylindrical permanent magnet 2.

摺動部は軸受4と側板5がらなり、このリニア振動アク
チュエータ全体の構造は円筒状となっている。
The sliding portion consists of a bearing 4 and a side plate 5, and the overall structure of this linear vibration actuator is cylindrical.

2個のコイル6は、相対向する面に同極となるように結
線し、電流(商用周波数)を流すと可動子は左右方向に
振動する。
The two coils 6 are connected to opposite surfaces so that they have the same polarity, and when a current (commercial frequency) is applied, the movable element vibrates in the left-right direction.

しかしながら、このような従来例は、応答性は良いが、
磁気構造が良くないので、推力の割りに寸法が大きくな
る欠点がある。
However, although such conventional examples have good responsiveness,
Since the magnetic structure is not good, there is a drawback that the size is large in relation to the thrust.

〔発明の目的〕[Purpose of the invention]

ここにおいて本発明は、従来例の難点を克服し、理想的
と考えられる構造からなる微少変位リニア電磁アクチュ
エータを提供することを、その目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to overcome the difficulties of the conventional examples and to provide a minute displacement linear electromagnetic actuator having a structure considered to be ideal.

〔発明の概要〕[Summary of the invention]

本発明は、円環状にして内周面に溝部をそなえた継鉄の
内部にコイルを巻回した電磁石を軸方向に2個並列に配
設する手段と、 これら2つのコイルに交流電流を相互に逆方向になるよ
うに流通させる手段と、 2つの前記電磁石の内周面に空隙を介して磁性体から形
成され軸方向に自在に変位できるように支承された可動
部材と、 円環状の軸方向に着磁された永久磁石と、を設けた微少
変位リニア電磁アクチュエータである。
The present invention provides means for axially arranging two electromagnets each having a coil wound therein inside a yoke having an annular shape and having a groove on its inner peripheral surface, and for mutually supplying alternating current to these two coils. a movable member formed of a magnetic material and supported so as to be freely displaceable in the axial direction through a gap between the inner circumferential surfaces of the two electromagnets; and an annular shaft. This is a minute displacement linear electromagnetic actuator equipped with a permanent magnet magnetized in the direction.

(実施例) 本発明の第1の実施例における断面で表わした側面図を
第1図に示す。
(Embodiment) FIG. 1 shows a side view in cross section of a first embodiment of the present invention.

すべての図面において同一符号は同一もしくは相当部分
を表わす。
The same reference numerals represent the same or corresponding parts in all drawings.

内側に永久磁石を入れたロッド形のリニア電磁アクチュ
エータである。
It is a rod-shaped linear electromagnetic actuator with a permanent magnet inside.

固定子は軸1方向に並べた2個の円環状(継鉄8a、8
b)の電磁石より成り、この起磁力の極性は互いに逆方
向になるようにコイル6a、6bを巻回し接続する。
The stator consists of two annular pieces (yoke 8a, 8
It consists of an electromagnet (b), and the coils 6a and 6b are wound and connected so that the polarities of the magnetomotive force are in opposite directions.

可動子は磁極片3を付けた永久磁石2で円環の軸方向に
着磁され、軸方向にのみ変位できるよう、適当なギャッ
プを介して固定側に支持されている。
The mover is magnetized in the axial direction of the ring by a permanent magnet 2 having magnetic pole pieces 3 attached thereto, and is supported on the stationary side via a suitable gap so that it can be displaced only in the axial direction.

円環状電磁石の内周側には、軸方向にN、S。On the inner circumferential side of the annular electromagnet, there are N and S in the axial direction.

S、NまたはS、N、N、Sの磁極が生ずるようN、8
間またはS、N間に溝9a、9bがあり、この19a、
9bの内周面に径方向に対向して可動子永久磁石2のW
i極片3a、3bが配設される。
N, 8 to produce magnetic poles of S, N or S, N, N, S
There are grooves 9a and 9b between S and N, and these 19a,
W of the mover permanent magnet 2 is radially opposed to the inner circumferential surface of the mover permanent magnet 9b.
i-pole pieces 3a, 3b are provided.

もつとも、永久磁石2.la極片3a、3bは、ブラケ
ット5に支持された軸受4によりX方向に自在に摺動で
きる軸1に、■合固着されている。
However, permanent magnet 2. The la pole pieces 3a, 3b are fixed to a shaft 1 which can freely slide in the X direction by means of a bearing 4 supported by a bracket 5.

コイル6aの上側が■、下側が■、コイル6bの上側が
■、下側が■の電流を流すと、この固定子は左からS、
N、N、Sの磁極が生ずる。
When a current is passed through the upper side of the coil 6a, the lower side is ■, the upper side of the coil 6b is ■, and the lower side is ■, this stator will move from the left to S,
N, N, S magnetic poles are generated.

永久磁石2の磁極は左からN、Sだから、可動子は左に
力を受けて動く。これを第2図に示す。
Since the magnetic poles of the permanent magnet 2 are N and S from the left, the mover moves to the left under force. This is shown in FIG.

さらに、コイル5a、5bの電流を逆に流せば、第3図
のように右方に力を受ける。
Furthermore, if the currents in the coils 5a and 5b are reversed, a force will be applied to the right as shown in FIG.

第7図(従来例)の磁気構造にくらべると、本発明の第
1図の方が合理的であることは自明である。
It is obvious that the magnetic structure shown in FIG. 1 of the present invention is more rational than the magnetic structure shown in FIG. 7 (conventional example).

本発明の第2の実施例の側断面図を第4図に表わす。A side sectional view of a second embodiment of the invention is shown in FIG.

この実施例は、永久磁石2の磁極片3a、3bを切り離
して、これを可動子とする構造である。
This embodiment has a structure in which the magnetic pole pieces 3a and 3b of the permanent magnet 2 are separated and used as a mover.

11は永久磁石2を固定子へ支持させる非磁石体、また
12も磁極片3aと3bを分離する非磁性体である。
11 is a non-magnetic body that supports the permanent magnet 2 on the stator, and 12 is a non-magnetic body that separates the magnetic pole pieces 3a and 3b.

支持構造が多少複雑になるが、可動子(分離された磁極
片3a、3b)の質量を小さくできるので、応答性が良
くなる。
Although the support structure becomes somewhat complicated, the mass of the mover (separated magnetic pole pieces 3a, 3b) can be reduced, resulting in improved responsiveness.

本発明の第3の実施例として図示していないが、m1石
と永久磁石の空隙部対向面に誘導子歯を切る手段が考え
られる。
As a third embodiment of the present invention, although not shown, it is conceivable to cut inductor teeth on the opposing surfaces of the gap between the m1 stone and the permanent magnet.

この実施例は、ストロークは小さくなるが大推力が得ら
れる。
In this embodiment, although the stroke is small, a large thrust can be obtained.

第5図は本発明の第4の実施例における上半分を断面で
示した側面図である。
FIG. 5 is a side view showing a cross section of the upper half of the fourth embodiment of the present invention.

この実施例は、ロッドタイプで、永久磁石2を固定子側
に移した構造である。
This embodiment is of a rod type and has a structure in which the permanent magnet 2 is moved to the stator side.

永久磁石2を固定子側に移し電磁石鉄心を形成する継鉄
8aと8bの間に挿入し両者の側面に固着させ、軸は磁
性体からなる可動コア10とし、電磁石の内周に空隙を
介して対向する可動コア10の外周には誘導子歯の突起
10a、10bを形づくる。
The permanent magnet 2 is moved to the stator side, inserted between the yokes 8a and 8b forming the electromagnet core, and fixed to the sides of both.The shaft is a movable core 10 made of a magnetic material, and the inner circumference of the electromagnet is placed with a gap in between. Inductor tooth protrusions 10a and 10b are formed on the outer periphery of the movable core 10 facing each other.

コイル5a、5bに交流電流を加えることで、可動コア
10はX方向に微少振動を発生する。
By applying alternating current to the coils 5a and 5b, the movable core 10 generates minute vibrations in the X direction.

本発明の第5の実施例の上半分の側断面図を第6図に表
わす。
A side sectional view of the upper half of the fifth embodiment of the present invention is shown in FIG.

この実施例もロッドタイプで、永久磁石2を固定子側に
配設するとともに、可動コア10の誘導子歯10a、1
0bをそれぞれの電磁石の継鉄8a、8bの溝部の深さ
一杯に伸長させて突出させである。
This embodiment is also of the rod type, and the permanent magnet 2 is disposed on the stator side, and the inductor teeth 10a, 1 of the movable core 10 are
0b are extended to the full depth of the grooves of the yokes 8a and 8b of the respective electromagnets to protrude.

とくに、微少変位高推力形としての特長がある。In particular, it has the advantage of being a small displacement, high thrust type.

〔発明の効果〕〔Effect of the invention〕

かくして本発明によれば、次のような特段の効果が得ら
れ、工業的に当該分野に資するところ大きい。
Thus, according to the present invention, the following special effects can be obtained, which greatly contributes to the relevant field industrially.

a) 永久磁石としてレアアースを用いて、磁束をしぼ
り込むと、空隙部の磁束密度を非常に高くできる。
a) By using rare earth as a permanent magnet and constricting the magnetic flux, the magnetic flux density in the gap can be made extremely high.

コイルのスペースは十分にとれるので、大きなアンペア
ターンがとれるので、B11(ここに、Bは磁束密度、
1は有効導体長、iは電流)で計算すると、ボイスコイ
ルモータにくらべて同じ寸法で10倍以上の力が出せる
Since there is enough space for the coil, a large ampere turn can be taken, so B11 (here, B is the magnetic flux density,
When calculated using 1 as the effective conductor length and i as the current, it can produce 10 times more force than a voice coil motor with the same dimensions.

b) 振動アクチュエータとしてニアコンプレッサに有
望である。特に可動コア形はイノー−シャが小さくなる
ので高い周波数まで使える。
b) It is promising as a vibration actuator for near compressors. In particular, the movable core type has a small inertia and can be used up to high frequencies.

C) 線形範囲が数ミリから十数ミリと比較的広くとれ
て、推力の割にコンパクトにまとまり、制御性も良いの
で、サーボ弁、比例弁、微少変位の位置制御、電流−力
および電流−変位変換確トランスデューサとして応用で
きる。
C) It has a relatively wide linear range from several millimeters to more than ten millimeters, is compact considering its thrust, and has good controllability, so it can be used for servo valves, proportional valves, minute displacement position control, current-force and current- It can be applied as a displacement transducer.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1の実施例の側断面図、第2図、第
3図はその動作説明図、第4図は本発明の第2の実施例
の側断面図、第5図、第6図は本発明の第4.第5の実
施例における上半分の側断面図、第7図は従来例の側断
面図である。 1・・・軸、2・・・永久磁石、3.3a、3b・・・
磁極片、4・・・軸受、5・・・ブラケット(側根)、
6゜5a、 6b・・・コイル、7・・・中央磁極、8
・・・継鉄、8a、F3b・・・円環状継鉄、9a、9
b、・・・溝、10・・・可動コア、10a、10b・
・・誘導子歯(突起)、11.12・・・非磁性体。 第2図 第3図 鶏6図 第7図
FIG. 1 is a side sectional view of the first embodiment of the present invention, FIGS. 2 and 3 are explanatory diagrams of its operation, FIG. 4 is a side sectional view of the second embodiment of the present invention, and FIG. 5 , FIG. 6 shows the fourth aspect of the present invention. FIG. 7 is a side sectional view of the upper half of the fifth embodiment, and FIG. 7 is a side sectional view of the conventional example. 1... Axis, 2... Permanent magnet, 3.3a, 3b...
Magnetic pole piece, 4... Bearing, 5... Bracket (side root),
6゜5a, 6b...Coil, 7...Central magnetic pole, 8
...Yoke, 8a, F3b...Circular yoke, 9a, 9
b,...Groove, 10...Movable core, 10a, 10b.
...Inductor tooth (protrusion), 11.12...Nonmagnetic material. Figure 2 Figure 3 Chicken Figure 6 Figure 7

Claims (1)

【特許請求の範囲】 1、磁路を形成する鉄心の両端部が夫々軸方向に曲げら
れ且つ一定の間隙を有して相対している2組の励磁鉄心
を有する固定子と、この各鉄心に巻回され、互いに相反
する方向の磁束を可逆的に発生させる2つの励磁巻線と
、前記固定子と一定の間隙を有して直線方向に可動的に
支持され且つ前記2組の励磁鉄心と直列に磁路を構成し
た永久磁石とを具え、この永久磁石から直線方向のトル
クを得る様にしたことを特長とする微少変位リニア電磁
アクチュエータ。 2、前記第1項記載の固定子と、同2つの励磁巻線と、
前記2つの励磁鉄心と一定の空隙を有して直線方向に固
定された永久磁石と、前記2つの励磁鉄心と永久磁石と
で作られる空隙中に置かれた磁性材の可動子とを具え、
この可動子から直線方向のトルクを得る様にしたことを
特長とする微少変位リニア電磁アクチュエータ。 3、前記第1項記載の固定子において、その2つの励磁
鉄心の中間部に直列に接続した永久磁石と、その各励磁
鉄心に巻回され互いに相反する方向の磁束を可逆的に発
生させる2つの励磁巻線と、その固定子と一定の空隙を
有し、且つ直線方向に可動的に支持された磁性材の可動
子とを具え、この可動子から直線方向のトルクを得る様
にしたことを特長とする微少変位リニア電磁アクチュエ
ータ。 4、前記第3項記載の可動子に2つの歯を附設したこと
を特長とする微少変位リニア電磁アクチュエータ。
[Scope of Claims] 1. A stator having two sets of excitation cores, each of which has both ends bent in the axial direction and faces each other with a constant gap, each core forming a magnetic path. two excitation windings that are wound around the stator and reversibly generate magnetic flux in opposite directions, and the two sets of excitation iron cores that are movably supported in a linear direction with a constant gap from the stator. A micro-displacement linear electromagnetic actuator characterized by comprising a permanent magnet with a magnetic path configured in series with the permanent magnet, and torque in a linear direction is obtained from the permanent magnet. 2. The stator described in item 1 above, and the same two excitation windings,
A permanent magnet fixed in a linear direction with a certain gap between the two exciting iron cores, and a mover made of a magnetic material placed in the gap formed by the two exciting iron cores and the permanent magnet,
This micro-displacement linear electromagnetic actuator is characterized by obtaining torque in a linear direction from this mover. 3. In the stator described in item 1, a permanent magnet is connected in series between the two excitation cores, and a permanent magnet is wound around each of the excitation cores to reversibly generate magnetic flux in opposite directions. The motor is equipped with two excitation windings, a movable element made of a magnetic material that has a fixed air gap with the stator, and is movably supported in a linear direction, so that torque in the linear direction is obtained from the movable element. A micro-displacement linear electromagnetic actuator featuring: 4. A minute displacement linear electromagnetic actuator characterized in that the movable member according to item 3 above is provided with two teeth.
JP22835884A 1984-10-30 1984-10-30 Ultrafine displacement linear electromagnetic actuator Pending JPS61106058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22835884A JPS61106058A (en) 1984-10-30 1984-10-30 Ultrafine displacement linear electromagnetic actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22835884A JPS61106058A (en) 1984-10-30 1984-10-30 Ultrafine displacement linear electromagnetic actuator

Publications (1)

Publication Number Publication Date
JPS61106058A true JPS61106058A (en) 1986-05-24

Family

ID=16875204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22835884A Pending JPS61106058A (en) 1984-10-30 1984-10-30 Ultrafine displacement linear electromagnetic actuator

Country Status (1)

Country Link
JP (1) JPS61106058A (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954086A2 (en) * 1998-04-28 1999-11-03 Matsushita Refrigeration Company Linear motor and linear compressor
KR100378809B1 (en) * 2000-10-19 2003-04-07 엘지전자 주식회사 Multi type linear motor
JP2004298428A (en) * 2003-03-31 2004-10-28 Shinko Electric Co Ltd Device for shooting pachinko game ball
US6833637B2 (en) 2001-03-29 2004-12-21 Lg Electronics Inc. Reciprocating motor
JP2005245047A (en) * 2004-02-24 2005-09-08 Nippon Pulse Motor Co Ltd Linear actuator
US7382067B2 (en) 2001-12-03 2008-06-03 Shinko Electric Co., Ltd. Linear actuator
JP2008259413A (en) * 2007-04-05 2008-10-23 Aisin Seiki Co Ltd Linear actuator
JP2009240138A (en) * 2008-03-28 2009-10-15 Aisin Seiki Co Ltd Linear actuator
WO2012135022A1 (en) * 2011-03-29 2012-10-04 Bose Corporation Moving magnet actuator magnet carrier
WO2014196298A1 (en) * 2013-06-05 2014-12-11 Thk株式会社 Linear actuator
JP2015510752A (en) * 2012-02-15 2015-04-09 ムービング マグネット テクノロジーズ (ソシエテ アノニム)Moving Magnet Technologies (S.A.) Compact direct drive actuator that generates constant force
JP2018098984A (en) * 2016-12-16 2018-06-21 住友理工株式会社 Electromagnetic actuator

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133661A (en) * 1979-04-03 1980-10-17 Aisan Ind Co Ltd Linear solenoid
JPS5828468U (en) * 1981-08-19 1983-02-24 ソニー株式会社 signal mixing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55133661A (en) * 1979-04-03 1980-10-17 Aisan Ind Co Ltd Linear solenoid
JPS5828468U (en) * 1981-08-19 1983-02-24 ソニー株式会社 signal mixing device

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0954086A2 (en) * 1998-04-28 1999-11-03 Matsushita Refrigeration Company Linear motor and linear compressor
EP0954086A3 (en) * 1998-04-28 2000-12-27 Matsushita Refrigeration Company Linear motor and linear compressor
KR100378809B1 (en) * 2000-10-19 2003-04-07 엘지전자 주식회사 Multi type linear motor
US6833637B2 (en) 2001-03-29 2004-12-21 Lg Electronics Inc. Reciprocating motor
US7382067B2 (en) 2001-12-03 2008-06-03 Shinko Electric Co., Ltd. Linear actuator
US7476990B2 (en) 2001-12-03 2009-01-13 Shinko Electric Co., Ltd. Linear actuator
JP2004298428A (en) * 2003-03-31 2004-10-28 Shinko Electric Co Ltd Device for shooting pachinko game ball
JP2005245047A (en) * 2004-02-24 2005-09-08 Nippon Pulse Motor Co Ltd Linear actuator
JP2008259413A (en) * 2007-04-05 2008-10-23 Aisin Seiki Co Ltd Linear actuator
JP2009240138A (en) * 2008-03-28 2009-10-15 Aisin Seiki Co Ltd Linear actuator
WO2012135022A1 (en) * 2011-03-29 2012-10-04 Bose Corporation Moving magnet actuator magnet carrier
CN103444054A (en) * 2011-03-29 2013-12-11 伯斯有限公司 Moving magnet actuator magnet carrier
US8610318B2 (en) 2011-03-29 2013-12-17 Bose Corporation Moving magnet actuator magnet carrier
JP2014512792A (en) * 2011-03-29 2014-05-22 ボーズ・コーポレーション Magnet carrier of movable magnet actuator
JP2015510752A (en) * 2012-02-15 2015-04-09 ムービング マグネット テクノロジーズ (ソシエテ アノニム)Moving Magnet Technologies (S.A.) Compact direct drive actuator that generates constant force
WO2014196298A1 (en) * 2013-06-05 2014-12-11 Thk株式会社 Linear actuator
JP2014236642A (en) * 2013-06-05 2014-12-15 Thk株式会社 Linear actuator
CN105264756A (en) * 2013-06-05 2016-01-20 Thk株式会社 Linear actuator
US9906113B2 (en) 2013-06-05 2018-02-27 Thk Co., Ltd. Linear actuator
JP2018098984A (en) * 2016-12-16 2018-06-21 住友理工株式会社 Electromagnetic actuator

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