JPS5831547A - Bonding device - Google Patents

Abstract

PURPOSE:To obtain a bonding device which can suitably alter the lifting height of a capillary and a bonding curve by driving a rockable arm by a linear motor. CONSTITUTION:A linear motor 11 is constructed to reciprocate a movable coil 15 in directions of arrows by the magnetic force of a permanent magnet 12 and a magnetic force produced when a current flows through the coil 15. When a forward current is flowed through the coil 15 of the motor 11, the coil 15 is projected from a yoke 12, and a rockable arm 18 is rotated counterclokwise around a shaft 17 as a center. Accordingly, a capillary 21 is lowered, and the ball 20a of a wire 20 is bonded to a pellet 22. Then, a reverse current is flowed through the coil 15 to raise the capillary 21, and when the forward current is again flowed, the capillary 21 is lowered, thereby bonding a wire 20 to a led frame 23. When this cycle is repeated, a bonding work can be continuously performed.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a fyding device in which a drive mechanism for driving a swinging arm provided with a shaft is modified.

In a semiconductor device assembly worker 1, an indinder device is used as a means for connecting a pellet F and a lead frame using wires.

As shown in FIG.
The rolling force is transmitted to the cam 1 via the persi 1, and this cam JO
The rotation is converted into reciprocating motion for swinging the swinging arm 1 by the cams 7-74. In addition, ζ and the swinging arm jK are provided with a cavity arm #, which is introduced into the tip O cavity r of this capillary arm d, and the nine wires 1
pellet and lead frame (both not shown)
It is designed to be fixed at a predetermined location.

However, as mentioned above, in the case where the swing arm 1 is caused to swing by the cam S, the lift height of the cavity 1 is determined by the shape of the cam, and when the lift height can be adjusted, the cam This is extremely inconvenient as it would require redesigning and remanufacturing 3. In addition, since the rotation of the motor is converted into reciprocating motion via the belt 1 and cam 1, it is structurally complex and difficult to downsize.
From *a Focusing on the above circumstances, is it 1 to 1? 5, so O
As a target, ζro is trying to provide a self-inverter device by driving a swinging arm by a linear peak and changing the lift height of the curve and the index curve as appropriate. be.

Hereinafter, based on one embodiment of this invention shown in drawings, 1l.
tIji. Number 11 in Figure 3 is the linear peak, which has 9 permanent magnets 13 and 1 iron core (center pole) installed in l-ri 12.
4 and a moving coil 1g. The air motor 11 moves the moving coil 11 in the direction of the arrow by the magnetic force of the permanent magnet 11t) and the magnetic force generated in the moving coil 15 and the tortoise. Ic11's return movement seems to be slowing it down. The ζ09 air basket 11ows 12 is fixed to the frame 1#, and the movable coil 15 is connected to one end of a swinging arm 18□ that can swing freely around the support shaft 1r. . A cavity arm 1g is assembled at the other end of the ζO swing arm 18, and a cavity 21 through which the hollow wire 20 is inserted is provided at the tip end of the cavity arm 1g. 9. The linear motor 11 processes the output signals from, for example, a photoelectric position detection device for detecting the position of the above-mentioned medium cylindrical tree and a speed detector for detecting the capillary velocity, by using an information layer device. The linear motor JJO moving coil 1 is controlled by the O command signal.
The stroke can be varied depending on the amount of current flowing through 5. That is, the thrust force y of the linear cage 11 is expressed by the following formula: By controlling the time, you are supposed to adjust the stroke.

As a result, the nine oscillating arms 18 are attracted by the permanent magnets 13 of the linear gear 11 and are kept in a substantially horizontal state, and the cat 21 is in a convenient position.

In this state, the wire 2 is inserted through the carrier 921.
After configuring the coil 2-a with a torch or the like at the lower end of #O, when an electric current is applied to the movable coil 11 of the yoke 11, the movable coil 15 is moved from the yoke 12. Centering, the swinging arm 11 rotates counterclockwise around the support shaft 11. Therefore, the cab 911 descends as shown in FIG. 3 and pelletizes the I-rule 211 of the wire 10. When the winding of the wire 1- to the pellet 22 is completed, a current is passed in the opposite direction to the movable coil jJK to raise the cavity 21 and move it again; fnding to frame 21. In this way, pellet 2j and lead frame 2
3 is connected with the wire 20, one cycle of the -nding process is completed, and by repeating the j4D cycle, the p-ndinda work is performed continuously. The range of movement of the arm JaorjA, that is, the height and moving speed of the 9-legged carriage 21 are as follows:
A position detector that detects 110 positions and a speed detector that detects the moving speed! ! A person can detect it according to
This detection signal is data-processed by the information controller, and the command signal moves the linear motor JJ.
It can be controlled arbitrarily by adjusting the amount of current flowing through K.

ζO! ! As explained above, the swinging arm that raises and lowers the cavity is driven by a linear motor, and the current flowing through the moving coil of the linear motor is controlled to control the lift height and degree of elevation of the cavity. It can be changed as appropriate. However, compared to the conventional O-cam and cam floor that swing the swing arm,
Another advantage is that it is structurally simple.

trswio cylinder unit ttui Figure 1 is a Confucian drawing showing a conventional O&N deinder device, and Fig. 3 is a side view showing an embodiment of the present invention.

11-linear motor, 18--swing arm, 2Q--wire, 21--capillary.

Applicant's agent: Benunshi Suzue Takehiko.

Figure 1 le Figure 3 Continuation of page 1 0 shots Akiyasu Kashima Inside the laboratory

Claims (1)

[Claims] A wire is introduced into a cavity and the cavity is swung by a swiveling arm to indinder the wire, characterized in that the swiveling arm is driven by a linear motor. Device.