JPS57178324A - Position detector - Google Patents

Position detector

Info

Publication number
JPS57178324A
JPS57178324A JP56062486A JP6248681A JPS57178324A JP S57178324 A JPS57178324 A JP S57178324A JP 56062486 A JP56062486 A JP 56062486A JP 6248681 A JP6248681 A JP 6248681A JP S57178324 A JPS57178324 A JP S57178324A
Authority
JP
Japan
Prior art keywords
scale
light
parts
diodes
detect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56062486A
Other languages
Japanese (ja)
Inventor
Hiroyuki Ibe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56062486A priority Critical patent/JPS57178324A/en
Publication of JPS57178324A publication Critical patent/JPS57178324A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To make the detection of the marginal position of a moving body possible by a method wherein photo signals, which are put into detectors according to the overlapping of light shielding parts and light permeable parts and by the change of which the position is detected, are changed even at the marginal position. CONSTITUTION:A glass scale 21 is fitted to a moving body and another glass scale 22 facing the glass scale 21 is fixed. Light shielding parts 23 and 24 are formed to the left and the fight of the central position on the scale 21 and light permeable parts 25 and 26 are formed on the scale 22. When the scales 21 and 22 are facing completely each other, light beams from lamps 27 and 28 are transmitted and light signals reach photodiodes 29 and 30. When the scale 21 is shifted to the right or the left, one of the diodes 29 and 30 does not detect the light signal. When the scale 21 is shifted further, both diodes 29 and 30 detect the light signals.
JP56062486A 1981-04-27 1981-04-27 Position detector Pending JPS57178324A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56062486A JPS57178324A (en) 1981-04-27 1981-04-27 Position detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56062486A JPS57178324A (en) 1981-04-27 1981-04-27 Position detector

Publications (1)

Publication Number Publication Date
JPS57178324A true JPS57178324A (en) 1982-11-02

Family

ID=13201550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56062486A Pending JPS57178324A (en) 1981-04-27 1981-04-27 Position detector

Country Status (1)

Country Link
JP (1) JPS57178324A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02192885A (en) * 1989-01-20 1990-07-30 Tdk Corp Laser beam processor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02192885A (en) * 1989-01-20 1990-07-30 Tdk Corp Laser beam processor

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