JPS57106118A - Diffusion furnace - Google Patents

Diffusion furnace

Info

Publication number
JPS57106118A
JPS57106118A JP18199380A JP18199380A JPS57106118A JP S57106118 A JPS57106118 A JP S57106118A JP 18199380 A JP18199380 A JP 18199380A JP 18199380 A JP18199380 A JP 18199380A JP S57106118 A JPS57106118 A JP S57106118A
Authority
JP
Japan
Prior art keywords
furnace
cooling fluid
tube
heater
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18199380A
Other languages
Japanese (ja)
Inventor
Hiroto Nagatomo
Tetsuya Takagaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP18199380A priority Critical patent/JPS57106118A/en
Publication of JPS57106118A publication Critical patent/JPS57106118A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation

Landscapes

  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Furnace Details (AREA)

Abstract

PURPOSE:To remarkably improve the treating efficiency of a diffusion furnace by forcibly cooling uniformly and rapidly the furnace after heated and diffused. CONSTITUTION:A cylindrical heat insulator 12 which prevents heat from a heater 10 from escaping out of a furnace at its heating time is provided through a connecting piece at the outside of the heater 10. A plurality of cooling fluid flowing tubes 14 are buried at the predetermined interval in axially circumferential direction of the heat insulator 12. This tube 14 flows cooling fluid therein to forcibly cool the furnace, thereby rapidly lowering the temperature of the furnace. Two cooling fluid tubes 14 are preferably used as a set, and are constructed to alternately flow the cooling fluid in a direction A for one tube and in a direction B for the other tube, thereby uniformly lowering the temperature of the furnace.
JP18199380A 1980-12-24 1980-12-24 Diffusion furnace Pending JPS57106118A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18199380A JPS57106118A (en) 1980-12-24 1980-12-24 Diffusion furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18199380A JPS57106118A (en) 1980-12-24 1980-12-24 Diffusion furnace

Publications (1)

Publication Number Publication Date
JPS57106118A true JPS57106118A (en) 1982-07-01

Family

ID=16110442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18199380A Pending JPS57106118A (en) 1980-12-24 1980-12-24 Diffusion furnace

Country Status (1)

Country Link
JP (1) JPS57106118A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63260016A (en) * 1987-04-17 1988-10-27 Hitachi Ltd Vertical treatment apparatus
JP2004281703A (en) * 2003-03-14 2004-10-07 Koyo Thermo System Kk Sheet feeding heat treatment apparatus
JP2004281636A (en) * 2003-03-14 2004-10-07 Mitsui Eng & Shipbuild Co Ltd Device and method for heat treating semiconductor

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63260016A (en) * 1987-04-17 1988-10-27 Hitachi Ltd Vertical treatment apparatus
JP2004281703A (en) * 2003-03-14 2004-10-07 Koyo Thermo System Kk Sheet feeding heat treatment apparatus
JP2004281636A (en) * 2003-03-14 2004-10-07 Mitsui Eng & Shipbuild Co Ltd Device and method for heat treating semiconductor
JP4560660B2 (en) * 2003-03-14 2010-10-13 三井造船株式会社 Semiconductor heat treatment apparatus and method

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