JPS56130937A - Inspecting apparatus for probe card - Google Patents

Inspecting apparatus for probe card

Info

Publication number
JPS56130937A
JPS56130937A JP3444680A JP3444680A JPS56130937A JP S56130937 A JPS56130937 A JP S56130937A JP 3444680 A JP3444680 A JP 3444680A JP 3444680 A JP3444680 A JP 3444680A JP S56130937 A JPS56130937 A JP S56130937A
Authority
JP
Japan
Prior art keywords
resistance
low resistance
probe
circuit
reference voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3444680A
Other languages
Japanese (ja)
Other versions
JPS6055987B2 (en
Inventor
Isao Nishigaya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP3444680A priority Critical patent/JPS6055987B2/en
Publication of JPS56130937A publication Critical patent/JPS56130937A/en
Publication of JPS6055987B2 publication Critical patent/JPS6055987B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06794—Devices for sensing when probes are in contact, or in position to contact, with measured object

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE:To detect the irregularity in the heights of the ends of respective probes and the dirts thereof by preparing high and low resistance values of two resistors as reference values of contact resistance and comparing and indicating the contact resistance between the respective probes and the reference surface. CONSTITUTION:A constant-current source 8 is connected via a relay 9 to a probe 2 and a reference surface 3 as well as high and low resistance comparator circuits 10, 11 through a start switch 20. The high resistance comparator circuit 10 compares the voltage based on the contact resistance between the probe 2 and the reference surface 3 with a high resistance reference voltage 16, produces an output when the reference voltage 16 is higher and operates a high resistance holding circuit 12 and a high resistance indicator circuit 14. The low resistance comparator circuit 11 similarly compares with the low resistance reference voltage 17, and operates a low resistance indicator circuit 15 when the reference voltage 17 is higher. Thus, the irregularity of the end of the probe can be detected from the high resistance indicator circuit, and the dirts of the end of the probe can be detected from the low resistance indicator circuit.
JP3444680A 1980-03-18 1980-03-18 Blow card inspection equipment Expired JPS6055987B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3444680A JPS6055987B2 (en) 1980-03-18 1980-03-18 Blow card inspection equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3444680A JPS6055987B2 (en) 1980-03-18 1980-03-18 Blow card inspection equipment

Publications (2)

Publication Number Publication Date
JPS56130937A true JPS56130937A (en) 1981-10-14
JPS6055987B2 JPS6055987B2 (en) 1985-12-07

Family

ID=12414466

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3444680A Expired JPS6055987B2 (en) 1980-03-18 1980-03-18 Blow card inspection equipment

Country Status (1)

Country Link
JP (1) JPS6055987B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206238A (en) * 1985-03-08 1986-09-12 Nippon Maikuronikusu:Kk Automatic semiconductor wafer prober
JPS6239021A (en) * 1985-08-14 1987-02-20 Toshiba Corp Probe testing process
JPH02290035A (en) * 1989-11-30 1990-11-29 Tokyo Electron Ltd Semiconductor wafer measuring equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61206238A (en) * 1985-03-08 1986-09-12 Nippon Maikuronikusu:Kk Automatic semiconductor wafer prober
JPS6239021A (en) * 1985-08-14 1987-02-20 Toshiba Corp Probe testing process
JPH02290035A (en) * 1989-11-30 1990-11-29 Tokyo Electron Ltd Semiconductor wafer measuring equipment

Also Published As

Publication number Publication date
JPS6055987B2 (en) 1985-12-07

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