JPS56126749A - Detecting method for defect of sheet-form substance - Google Patents

Detecting method for defect of sheet-form substance

Info

Publication number
JPS56126749A
JPS56126749A JP2978380A JP2978380A JPS56126749A JP S56126749 A JPS56126749 A JP S56126749A JP 2978380 A JP2978380 A JP 2978380A JP 2978380 A JP2978380 A JP 2978380A JP S56126749 A JPS56126749 A JP S56126749A
Authority
JP
Japan
Prior art keywords
glass plate
laser
substance
instance
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2978380A
Other languages
Japanese (ja)
Inventor
Koji Tsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2978380A priority Critical patent/JPS56126749A/en
Publication of JPS56126749A publication Critical patent/JPS56126749A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details

Landscapes

  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To enable sharp detection free from noises by employing a laser beam having an elliptical cross section. CONSTITUTION:As the substance to be inspected, a transparent sheet-form substance 1 such as, for instance, a glass plate is provided. For a light source 2 of an optical system, an He-Ne gas laser is employed, for instance. The beam of light from this laser is adjusted to be a laser beam having an elliptical cross section, and later it is scanned in the direction of the width of the glass plate 1 by a rotary mirror 3, the light transmitted therethrough is reflected by a concave reflecting mirror 4 provided below the glass plate 1 and, passing through an optical path reverse to the incident beam, is taken out by a half reflecting mirror 5 provided in the course of this optical system, and a defect information is detected as the change in luminous energy thereof by a detector 6.
JP2978380A 1980-03-11 1980-03-11 Detecting method for defect of sheet-form substance Pending JPS56126749A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2978380A JPS56126749A (en) 1980-03-11 1980-03-11 Detecting method for defect of sheet-form substance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2978380A JPS56126749A (en) 1980-03-11 1980-03-11 Detecting method for defect of sheet-form substance

Publications (1)

Publication Number Publication Date
JPS56126749A true JPS56126749A (en) 1981-10-05

Family

ID=12285604

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2978380A Pending JPS56126749A (en) 1980-03-11 1980-03-11 Detecting method for defect of sheet-form substance

Country Status (1)

Country Link
JP (1) JPS56126749A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6449947A (en) * 1987-07-22 1989-02-27 Philips Nv Inspection method and apparatus for holed mask sheet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6449947A (en) * 1987-07-22 1989-02-27 Philips Nv Inspection method and apparatus for holed mask sheet

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