JPS5341986A - Production of semiconductor unit - Google Patents
Production of semiconductor unitInfo
- Publication number
- JPS5341986A JPS5341986A JP11605476A JP11605476A JPS5341986A JP S5341986 A JPS5341986 A JP S5341986A JP 11605476 A JP11605476 A JP 11605476A JP 11605476 A JP11605476 A JP 11605476A JP S5341986 A JPS5341986 A JP S5341986A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor unit
- substrate
- insulating layer
- poly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: After stacking the first insulating layer, impurity added poly-Si, and the second insulating layer on a substrate, these layers are etched selectively; and when the substrate is exposed, FET is made without exposing the poly-Si layer to an atmosphere at elevated temperatures, so that the change of a threshold voltage can be prevented.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11605476A JPS5341986A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11605476A JPS5341986A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5341986A true JPS5341986A (en) | 1978-04-15 |
Family
ID=14677551
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11605476A Pending JPS5341986A (en) | 1976-09-29 | 1976-09-29 | Production of semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5341986A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5655073A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS593309A (en) * | 1982-06-08 | 1984-01-10 | ヴィルト ライツ アクチエンゲゼルシャフト | Level base for geodetic apparatus |
JPS5990814U (en) * | 1982-12-11 | 1984-06-20 | 河原 重保 | Fine adjustment mechanism of surveying plummet |
-
1976
- 1976-09-29 JP JP11605476A patent/JPS5341986A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5655073A (en) * | 1979-10-11 | 1981-05-15 | Matsushita Electric Ind Co Ltd | Manufacture of semiconductor device |
JPS593309A (en) * | 1982-06-08 | 1984-01-10 | ヴィルト ライツ アクチエンゲゼルシャフト | Level base for geodetic apparatus |
JPH0345770B2 (en) * | 1982-06-08 | 1991-07-12 | Uiruto Raitsu Gmbh | |
JPS5990814U (en) * | 1982-12-11 | 1984-06-20 | 河原 重保 | Fine adjustment mechanism of surveying plummet |
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