JPS52155058A - Film formation method - Google Patents
Film formation methodInfo
- Publication number
- JPS52155058A JPS52155058A JP7254276A JP7254276A JPS52155058A JP S52155058 A JPS52155058 A JP S52155058A JP 7254276 A JP7254276 A JP 7254276A JP 7254276 A JP7254276 A JP 7254276A JP S52155058 A JPS52155058 A JP S52155058A
- Authority
- JP
- Japan
- Prior art keywords
- film formation
- formation method
- substrate
- film
- spin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To form the film of a uniform thickness free from build-up on its circumference on a substrate by using a substrate holder which is recessed only in the position where the semiconductor substrate is to be placed, at the time of spin-coating of glass coating liquid.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7254276A JPS52155058A (en) | 1976-06-18 | 1976-06-18 | Film formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7254276A JPS52155058A (en) | 1976-06-18 | 1976-06-18 | Film formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS52155058A true JPS52155058A (en) | 1977-12-23 |
Family
ID=13492340
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7254276A Pending JPS52155058A (en) | 1976-06-18 | 1976-06-18 | Film formation method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52155058A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61278148A (en) * | 1985-06-01 | 1986-12-09 | Nippon Gakki Seizo Kk | Forming method for glass coating |
-
1976
- 1976-06-18 JP JP7254276A patent/JPS52155058A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61278148A (en) * | 1985-06-01 | 1986-12-09 | Nippon Gakki Seizo Kk | Forming method for glass coating |
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