JPS52155058A - Film formation method - Google Patents

Film formation method

Info

Publication number
JPS52155058A
JPS52155058A JP7254276A JP7254276A JPS52155058A JP S52155058 A JPS52155058 A JP S52155058A JP 7254276 A JP7254276 A JP 7254276A JP 7254276 A JP7254276 A JP 7254276A JP S52155058 A JPS52155058 A JP S52155058A
Authority
JP
Japan
Prior art keywords
film formation
formation method
substrate
film
spin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7254276A
Other languages
Japanese (ja)
Inventor
Shoichi Kakimoto
Kiyoshi Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7254276A priority Critical patent/JPS52155058A/en
Publication of JPS52155058A publication Critical patent/JPS52155058A/en
Pending legal-status Critical Current

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  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To form the film of a uniform thickness free from build-up on its circumference on a substrate by using a substrate holder which is recessed only in the position where the semiconductor substrate is to be placed, at the time of spin-coating of glass coating liquid.
COPYRIGHT: (C)1977,JPO&Japio
JP7254276A 1976-06-18 1976-06-18 Film formation method Pending JPS52155058A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7254276A JPS52155058A (en) 1976-06-18 1976-06-18 Film formation method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7254276A JPS52155058A (en) 1976-06-18 1976-06-18 Film formation method

Publications (1)

Publication Number Publication Date
JPS52155058A true JPS52155058A (en) 1977-12-23

Family

ID=13492340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7254276A Pending JPS52155058A (en) 1976-06-18 1976-06-18 Film formation method

Country Status (1)

Country Link
JP (1) JPS52155058A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278148A (en) * 1985-06-01 1986-12-09 Nippon Gakki Seizo Kk Forming method for glass coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278148A (en) * 1985-06-01 1986-12-09 Nippon Gakki Seizo Kk Forming method for glass coating

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