JPS52134492A - Ion source unit - Google Patents
Ion source unitInfo
- Publication number
- JPS52134492A JPS52134492A JP4995176A JP4995176A JPS52134492A JP S52134492 A JPS52134492 A JP S52134492A JP 4995176 A JP4995176 A JP 4995176A JP 4995176 A JP4995176 A JP 4995176A JP S52134492 A JPS52134492 A JP S52134492A
- Authority
- JP
- Japan
- Prior art keywords
- source unit
- ion source
- equipping
- lens
- varying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Particle Accelerators (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE: To utilize the beam for the separation of the mass by varying the cross sectional form of the large current ion beam by equipping the lens after the electrode system of the multiple slit type drawer electrodes.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51049951A JPS598949B2 (en) | 1976-05-04 | 1976-05-04 | ion source device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP51049951A JPS598949B2 (en) | 1976-05-04 | 1976-05-04 | ion source device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52134492A true JPS52134492A (en) | 1977-11-10 |
JPS598949B2 JPS598949B2 (en) | 1984-02-28 |
Family
ID=12845333
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51049951A Expired JPS598949B2 (en) | 1976-05-04 | 1976-05-04 | ion source device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS598949B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6084759A (en) * | 1983-10-14 | 1985-05-14 | Seiko Instr & Electronics Ltd | Hot-cathode electron impact type ion source |
JPS61121240A (en) * | 1984-11-17 | 1986-06-09 | Nissin Electric Co Ltd | Metal ion source |
JPH07302576A (en) * | 1995-04-21 | 1995-11-14 | Hitachi Ltd | Ion implanting method |
-
1976
- 1976-05-04 JP JP51049951A patent/JPS598949B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6084759A (en) * | 1983-10-14 | 1985-05-14 | Seiko Instr & Electronics Ltd | Hot-cathode electron impact type ion source |
JPS61121240A (en) * | 1984-11-17 | 1986-06-09 | Nissin Electric Co Ltd | Metal ion source |
JPH07302576A (en) * | 1995-04-21 | 1995-11-14 | Hitachi Ltd | Ion implanting method |
Also Published As
Publication number | Publication date |
---|---|
JPS598949B2 (en) | 1984-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5389360A (en) | Electronic gun constituent | |
JPS52134492A (en) | Ion source unit | |
JPS51115283A (en) | Electrode | |
JPS51136277A (en) | Lens for electron particle beam | |
JPS53146531A (en) | Pickup tube | |
JPS5436499A (en) | Improved isotopes separating method | |
JPS5248471A (en) | Ion implantation device | |
JPS51143348A (en) | Apparatus for focusing a light beam | |
JPS5391079A (en) | Sieving method of ion and membrane used for above method | |
JPS524995A (en) | Uranium isotope separating process | |
JPS53131893A (en) | Ion source | |
JPS5417843A (en) | Electrostatic recording head | |
JPS52115618A (en) | Reference signal generator | |
JPS547384A (en) | Detecting method of partial discharge position | |
JPS51133029A (en) | Corona discharge device | |
JPS53140091A (en) | Ion source for mass spectrograph | |
JPS51115376A (en) | Electrostatic waste gas purifier | |
JPS53113030A (en) | Antitumors containing inositol hexasulfate or its salts as an active constituent | |
JPS53140873A (en) | Method of coating electrode coil for bulb with cathod material | |
JPS5253392A (en) | Yawing stabilizer | |
JPS51118057A (en) | Power source device | |
JPS5329723A (en) | Printer head of discharge type | |
JPS53397A (en) | Metalic ion source | |
JPS5217503A (en) | Apparatus for trapping fuel vapor | |
JPS5218483A (en) | F-cont. cation exchange resin membrane |