JPS52134492A - Ion source unit - Google Patents

Ion source unit

Info

Publication number
JPS52134492A
JPS52134492A JP4995176A JP4995176A JPS52134492A JP S52134492 A JPS52134492 A JP S52134492A JP 4995176 A JP4995176 A JP 4995176A JP 4995176 A JP4995176 A JP 4995176A JP S52134492 A JPS52134492 A JP S52134492A
Authority
JP
Japan
Prior art keywords
source unit
ion source
equipping
lens
varying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4995176A
Other languages
Japanese (ja)
Other versions
JPS598949B2 (en
Inventor
Katsumi Tokikuchi
Kuniyuki Sakumichi
Hideki Koike
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP51049951A priority Critical patent/JPS598949B2/en
Publication of JPS52134492A publication Critical patent/JPS52134492A/en
Publication of JPS598949B2 publication Critical patent/JPS598949B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE: To utilize the beam for the separation of the mass by varying the cross sectional form of the large current ion beam by equipping the lens after the electrode system of the multiple slit type drawer electrodes.
COPYRIGHT: (C)1977,JPO&Japio
JP51049951A 1976-05-04 1976-05-04 ion source device Expired JPS598949B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51049951A JPS598949B2 (en) 1976-05-04 1976-05-04 ion source device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51049951A JPS598949B2 (en) 1976-05-04 1976-05-04 ion source device

Publications (2)

Publication Number Publication Date
JPS52134492A true JPS52134492A (en) 1977-11-10
JPS598949B2 JPS598949B2 (en) 1984-02-28

Family

ID=12845333

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51049951A Expired JPS598949B2 (en) 1976-05-04 1976-05-04 ion source device

Country Status (1)

Country Link
JP (1) JPS598949B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084759A (en) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd Hot-cathode electron impact type ion source
JPS61121240A (en) * 1984-11-17 1986-06-09 Nissin Electric Co Ltd Metal ion source
JPH07302576A (en) * 1995-04-21 1995-11-14 Hitachi Ltd Ion implanting method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6084759A (en) * 1983-10-14 1985-05-14 Seiko Instr & Electronics Ltd Hot-cathode electron impact type ion source
JPS61121240A (en) * 1984-11-17 1986-06-09 Nissin Electric Co Ltd Metal ion source
JPH07302576A (en) * 1995-04-21 1995-11-14 Hitachi Ltd Ion implanting method

Also Published As

Publication number Publication date
JPS598949B2 (en) 1984-02-28

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