JPS5248471A - Ion implantation device - Google Patents

Ion implantation device

Info

Publication number
JPS5248471A
JPS5248471A JP12464075A JP12464075A JPS5248471A JP S5248471 A JPS5248471 A JP S5248471A JP 12464075 A JP12464075 A JP 12464075A JP 12464075 A JP12464075 A JP 12464075A JP S5248471 A JPS5248471 A JP S5248471A
Authority
JP
Japan
Prior art keywords
ion implantation
implantation device
implantation conditions
holder
automatically select
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12464075A
Other languages
Japanese (ja)
Other versions
JPS606086B2 (en
Inventor
Koji Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NISSHIN HAIBORUTEEJI KK
Nissin High Voltage Co Ltd
Original Assignee
NISSHIN HAIBORUTEEJI KK
Nissin High Voltage Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NISSHIN HAIBORUTEEJI KK, Nissin High Voltage Co Ltd filed Critical NISSHIN HAIBORUTEEJI KK
Priority to JP50124640A priority Critical patent/JPS606086B2/en
Publication of JPS5248471A publication Critical patent/JPS5248471A/en
Publication of JPS606086B2 publication Critical patent/JPS606086B2/en
Expired legal-status Critical Current

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Abstract

PURPOSE: To automatically select implantation conditions by using the holder having recorded ion implantation conditions.
COPYRIGHT: (C)1977,JPO&Japio
JP50124640A 1975-10-16 1975-10-16 ion implanter Expired JPS606086B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50124640A JPS606086B2 (en) 1975-10-16 1975-10-16 ion implanter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50124640A JPS606086B2 (en) 1975-10-16 1975-10-16 ion implanter

Publications (2)

Publication Number Publication Date
JPS5248471A true JPS5248471A (en) 1977-04-18
JPS606086B2 JPS606086B2 (en) 1985-02-15

Family

ID=14890403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50124640A Expired JPS606086B2 (en) 1975-10-16 1975-10-16 ion implanter

Country Status (1)

Country Link
JP (1) JPS606086B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201765U (en) * 1987-05-21 1987-12-23
JPH0722453U (en) * 1993-09-28 1995-04-21 住友重機械工業株式会社 Charged particle beam irradiation device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376194U (en) * 1986-11-07 1988-05-20

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834352A (en) * 1971-09-07 1973-05-18
JPS4914102A (en) * 1972-05-16 1974-02-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4834352A (en) * 1971-09-07 1973-05-18
JPS4914102A (en) * 1972-05-16 1974-02-07

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62201765U (en) * 1987-05-21 1987-12-23
JPH0722453U (en) * 1993-09-28 1995-04-21 住友重機械工業株式会社 Charged particle beam irradiation device

Also Published As

Publication number Publication date
JPS606086B2 (en) 1985-02-15

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