JPH09283595A - Method and system for conveying works in clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily and reliably convey and control cassettes, etc., in a clean room. SOLUTION: A cassette 1 for mounting and conveying works to be machined/ treated in a clean room. An electronic module 10 has a radio communication function, stores information e.g. codes for specifying works mounted in the cassette 1 and is settled at specified position of the cassette 1. A conveyer control and/or treating function for the cassette 1 and/or works mounted therein has a radio communication function for communicating with the module 10. This communication function reads the information stored in the module 10 and controls the conveying and/or treating of the cassette 1 and/or the works mounted therein. It is preferable to provide a function for rewriting the stored contents in the module 10 and use a card type for the module 10. The work conveying and treating system is composed of the above described functions.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention applies a management method of a cassette having semiconductor wafers and the like which are processed by moving between each processing function device and stock function device in a clean room, and to this management method. The present invention relates to an article transport processing system, and in particular, it is an apparatus that allows easy and reliable article transport management / processing by mounting an electronic module having a wireless communication function in a cassette.

[0002]

2. Description of the Related Art In a clean room such as a semiconductor wafer processing factory, a semi-finished product or a finished product in a manufacturing process is transferred between a processing function device and a stocker into a predetermined carrier such as a cassette (hereinafter referred to as a cassette). It is equipped with a function to carry it on board and carry it with an unmanned carrier system, to perform predetermined processing and to temporarily store it. Further, a buffer stocker for clean processing is provided between the outside and the inside of the clean room. It is standard to carry out the loading and unloading work by an automatic transfer machine, but in many cases, an operator sometimes carries the cassette he / she desires from the stocker. Further, before the automatic transfer machine carries out the stocking operation from the stocker, the presence or absence of the cassette on the target shelf is confirmed by the optical sensor.

An ID card indicating the loaded object is attached to such cassettes. In a semiconductor processing apparatus such as a wafer cleaning apparatus, as means for automatically withdrawing or mounting an ID card together with a wafer from a cassette, there is one disclosed in, for example, Japanese Patent Laid-Open No. 6-77305, which replaces a wafer in a wafer cassette. As means for automatically removing or mounting the ID card at the time of cleaning or at the time of cleaning, there is one disclosed in, for example, Japanese Patent Laid-Open No. 6-183522. In addition, as the transport traveling function of the cassette unmanned transport system, a means for mounting the cassette on a transport carriage guided by a characteristic traveling path, and a linear motor
The means for arranging the secondary drive function on the traveling path and traveling the cassette itself as a secondary conductor is adopted. The host computer intensively carries out the transport control using such traveling means. That is, the information from the sender is collected in the host computer, and the unattended transport function of each cassette is operated by a command from the host computer. In order to manage storage and retrieval in a warehouse or the like using the above-mentioned unmanned transportation function, a bar code is printed on an ID card attached to the cassette to obtain information about the cassette in the host computer.

[0004]

By the way, in the centralized management by the host computer as described above in the unmanned transport system, even if the function of the host computer is temporarily stopped due to some accident, the position of each cassette and the load of the cassette Will become unclear and will require a lot of time and labor for reconfirmation. Further, if the cassette is transported to the wrong place for some reason, it is not easy to find it. Further, if the stacker is manually carried, there is a risk that different cassettes will be unloaded by automatic carry-out.
Therefore, it becomes a big problem if the transport cassette for the articles that require urgent work goes missing.

JP-A-6-77305 and JP-A-6-77305
The one disclosed in Japanese Patent Laid-Open No. 183522 aims to execute ID card management in response to movement of a cassette on which a wafer is mounted and the like, and a wafer and a mounted cassette to be transported without being limited to a specific processing function. It does not control the relationship with. If you use a bar code,
For example, since it is limited to about 20 digits, it is sufficient to control by assigning an ID number, but it is not possible to record the information necessary for managing / processing the conveyed object. In addition, it is necessary to properly attach the barcode.

Further, as shown in FIG. 6, the bar code written on the ID card 1na of the cassette 1n stored in the rack 30 is obstructed by the upper shelf and cannot be read. Therefore, the cassette 1 can be read even when stored in a shelf.
It is necessary to attach the ID card 1nb to the front side of the n.
Therefore, there is an inconvenience that it is necessary to attach an ID card to each surface of the cassette depending on the transportation and storage conditions of the cassette. Further, in order to confirm the existence of the cassette stocked from the rack 30 by a transfer machine (not shown) for loading and unloading, currently, an optical sensor is used. There is no guarantee that it is the desired cassette by confirming its presence. The present invention solves the above-mentioned problems (problems) of the conventional one, and can carry out and manage unmanned article conveyance between various processing functions such as a semiconductor processing system, and easily recover even when the host computer or the like is stopped. An object of the present invention is to provide an article transportation management method and an article transportation processing system in a clean room, which are capable of being operated.

[0007]

In order to solve the above-mentioned problems, in a method for managing article transportation in a clean room, a wireless communication function is provided at a predetermined position of a cassette for carrying processed / processed articles and carrying them unattended in the clean room. , An electronic module storing information such as a code for specifying the cassette and / or a mounted product of the cassette, and communicating with the electronic module for carrying management and / or processing function of the cassette and / or the mounted product of the cassette A wireless communication function is provided, and the information stored in the electronic module is read out by the wireless communication function, and thus the cassette and / or the cassette-installed product is carried / processed. In this case, it is desirable to provide a function of rewriting the stored contents stored in the electronic module by the wireless communication function, and it is desirable that the electronic module is a card type.

In a clean room article transfer / processing system to which the above-described article transfer management method is applied, a wireless system for mounting processed / processed articles in a clean room and carrying them unattended and / or mounting them on a predetermined position of a cassette mounted object Electronic module with communication and storage functions,
A ground station having a wireless communication function for communicating with an electronic module provided at a predetermined position in a clean room and a function for reading the stored content of the storage function of the electronic module by this wireless communication function is provided, and the storage function of the electronic module includes a cassette and / or Alternatively, information such as a code for identifying the mounted object of the cassette is recorded, and the processing / processing management of the mounted object is configured based on the above information read by the ground station. In this case, the above-mentioned ground station installation position is in the vicinity of a work function for performing predetermined processing or processing on the mounted object of the cassette and / or the stocker storage position for temporarily stocking the cassette and / or at least the installation position of the wireless communication antenna. Is preferably a function of moving the cassette, such as a predetermined position of the front end portion of the transfer function for cassette unloading of the stocker that temporarily stocks the cassette, or a function of linking this function. Further, it is desirable that a predetermined ground station is provided with a function of writing predetermined information in a storage function of the electronic module by a wireless communication function, and it is desirable that the electronic module is detachable. Also, the electronic module is preferably of card type.

Since the present invention has the above-described method and is configured, the management of the unmanned transport cassette can be easily and surely executed, and the electronic modules installed in various places can be operated even after the host computer is stopped. With the storage content reading function of the storage function, it is possible to automatically and promptly grasp the location of each cassette, that is, the conveyed product. In addition, the function of writing in the stored contents of the storage function of the electronic module can immediately respond to changes in the contents of the cassette or its state. If the electronic module is detachable, the display of information indicating the cassette and the mounted items can be easily managed. If the electronic module is used as a card, the antenna configuration can be easily configured, and the replacement process in the event of a failure can be facilitated. You can get closer to the function.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION An optimum embodiment of the present invention will be described in detail with reference to the drawings. First Embodiment: FIG. 1 shows a functional configuration of an article conveyance processing system to which an article conveyance management method using an electronic module having a wireless communication function according to the present invention is applied.
In FIG. 1, reference numeral 1 is a cassette, and a semiconductor wafer or the like, which is a processing material in a clean room provided with an unmanned transfer function (not shown), is mounted on the cassette 1. Reference numeral 2 conceptually shows a traveling path on which an unmanned conveyance function (not shown) guides. The unmanned conveyance function may be a system that travels by a linear motor or an induction travel system that travels along a guide wire extended on a travel path. That is, even in a system in which the cassette is mounted on an unmanned transporting vehicle that is guided and driven by an appropriate drive function, the primary side of the linear motor is appropriately arranged on the ground, and the cassette itself is a secondary motor of the linear motor. A system that forms a conductor may be used. A host computer 3 controls and manages a higher-level information processing system including the article transport processing system, and illustrations of operating functions and display functions are omitted. On a predetermined surface of the cassette 1, a card-type IC card 1 which is a kind of electronic module having a storage function and a wireless communication function.
0 is mounted. 11 is an IC that functions as a mobile station
A mobile station antenna for the wireless communication function of the card 10 is shown in which transmission and reception are integrated.

Reference numeral 20 denotes a wireless communication function, which is an IC for executing work in various processing facilities or warehouse facilities provided as a host system to which the article transport processing system is applied.
It serves as a set with the card 10 to perform wireless communication. Reference numeral 21 denotes an antenna for the ground station for the IC card 10 and the wireless communication function 20, which is shown integrally for transmission and reception. The wireless communication function 20 is connected to a unit information processing function 22 for executing work in each facility, which is provided by a connection cable 20a. Unit information processing function 2
The illustration of the information input device and the display device in 2 is omitted. The unit information processing function 22 is connected to the host computer device 3 by a connection cable 22a. The connection cable 3a connected to the host computer device 3 is a cable that is connected to other unit information processing functions provided in each facility other than the unit information processing function 22, a control function for unmanned transport of cassettes, and the like. ing.

Next, the functions of the IC card 10 and the wireless communication function 20 will be described with reference to FIG. Note that FIG. 2 shows main functional elements for explaining the present invention, and other functional elements such as details of a carrier wave oscillation function and a data processing function are omitted and simplified. In FIG. 2, reference numeral 20A denotes a data processing device (hereinafter referred to as a ground station) in which a wireless communication function 20 installed on the ground and a unit information processing function 22 are combined. The ground station 20A is connected to the host computer 3A. The host computer 3A is connected to a ground station 20N that collectively shows ground stations other than that shown by 20A, and an unmanned carrier system control function, that is, a control function 29 of the unmanned carrier function in which each cassette is mounted. 10A shows a configuration of functional elements of an IC card (hereinafter referred to as a mobile station).
In the ground station 20A, the data processing function 22A has an interpersonal interface 23. By the interpersonal interface 23 of the ground station 20A arranged at a predetermined location, for example, the loading of the cassette 1 (hereinafter referred to as the cassette loading) at the processing facility is changed when the loading or unloading is performed. The information to be stored is written in the IC card 10A of the target cassette. The data input to the ground station 20A via the interface 23 is temporarily held as a predetermined coded signal (this signal is referred to as a temporary hold signal). Further, in the ground station 20A, the transmission signal creation unit 2
The carrier wave created in 4 is transmitted as a predetermined call signal PSK
An output signal modulated by (phase modulation) or FSK (frequency modulation) is amplified by the output amplification function 25a, and is supplied to the transmission antenna 21a from the output unit 25b having a waveform shaping filtering function and a matching function with the transmission antenna 21a. . When the ground station 20A recognizes the approach of the cassette 1 by means such as a signal from a sensor not shown or a control function 29 of the unmanned transport function, which is set in advance in this system, the transmitting antenna 21a modulates a predetermined call signal. The radio wave is transmitted, and when a predetermined condition described later is satisfied, the temporary hold signal is modulated into a carrier wave. In the ground station 20A through which the cassette 1 frequently passes, the above radio wave may be constantly transmitted.

In the mobile station 10A, the receiving antenna 1
When 1a receives the radio wave transmitted by the ground station 20A,
The reception function 12 amplifies and demodulates the received wave. In addition, the DC component is extracted by rectification and stored in the storage function 13. The electric energy stored by the storage function 13 is used to operate each electric circuit of the mobile station 10A. The signal demodulated by the reception function 12 operates the data processing function 14. That is, when the above-mentioned call-out signal is received, the data processing function 14 reads out a predetermined response signal and a preset cassette number from the storage function provided in the data processing function 14, and the transmission function 15 uses the carrier wave of the predetermined frequency as a carrier wave. For example AS
It is modulated by K (amplitude modulation) and transmitted from the transmission antenna 11b.

When the receiving antenna 21b of the ground station 20A receives the radio wave transmitted by the mobile station 10A, it amplifies it by the received signal amplifying function 26, extracts the signal transmitted by the demodulating function 27, and transmits it to the data processing function 22A. When confirming the response signal, the data processing function 22A adds a predetermined command signal to the temporary hold signal, modulates the carrier signal created by the transmission signal creating unit 24, and sends the carrier wave from the sending antenna 21a. In the mobile station 10A, when the receiving antenna 11a receives the radio wave transmitted by the ground station 20A, the receiving function 12
The signal is demodulated in step S4 and is processed in accordance with a predetermined command signal included in the received signal. in this case,
It is recorded in the storage function provided in the data processing function 14. When the ground station 20A and the mobile station 10A are in the communication-enabled state as described above, when the information about the cassette-mounted object is written by the interpersonal interface 23,
In some cases, the data is immediately transmitted to the mobile station 10A without being temporarily held as described above. In a facility to which this ground station 20A is attached, a predetermined article is attached with a predetermined document attached to a cassette 1 having an arriving mobile station 10A, and a start switch having an unmanned conveyance function in which the cassette 1 is mounted. Press. On the other hand, the signal held by the ground station 20A is transmitted to the host computer 3A in parallel with the transmission to the mobile station 10A. Therefore, by the control function 29 of the unattended transfer function of the host computer device 3, the cassette 1 on which the above-mentioned article is mounted is transferred to the next processing facility or the like.

When it is necessary to read the information possessed by the mobile station 10A, such as when the ground station 20A needs to unload a load from the arrival cassette 1, the data processing function 22A of the ground station 20A confirms the response signal. Then, a preset information read command signal is sent to the mobile station 10A, and after confirming that the stored content commanded by the mobile station 10A has been transmitted, the above-mentioned hold signal is written. That is, when the ground station 20A receives the response signal, the ground station 20A communicates with the mobile station 10A so as to transmit a signal related to the article conveyed to the ground station 20A. Therefore, the signal concerning the above-mentioned on-board object recorded in the storage function provided in the data processing function 14 of the mobile station 10A is read out, and the ground station 20A is read.
Sent to. The ground station 20A prints out the received signal. The person in charge of the ground station 20A looks at the printed data and takes out the conveyed product in the cassette, and if there is no error, the above-mentioned hold signal is transmitted.

Even in a ground station 20A that does not carry articles,
When the approach of the cassette 1 is detected, as described above, the transmission antenna 21a transmits a radio wave that is unmodulated or modulated by a predetermined call signal, and the reception antenna 11 of the mobile station 10A is transmitted.
When a receives the radio wave transmitted from the ground station 20A, it transmits the response signal and the cassette number to this ground station 20A. When this ground station 20A receives the response signal, this ground station 20A
The mobile station 10A is communicated so as to transmit a signal regarding the article being transported to. Therefore, the signal relating to the mounted object recorded in the storage function provided in the data processing function 14 of the mobile station 10A is read and transmitted to the ground station 20A. The ground station 20A prints out the received signal. The person in charge of the ground station 20A looks at the printed data and takes out the goods in the cassette,
If there is no mistake and there is no article to be transported, press the start switch of the unattended transport function equipped with this cassette. Therefore, by the control function 29 of the unattended transfer function of the host computer device 3, the above-mentioned cassette 1 is transferred to the facility of the next article transfer destination.

Second Embodiment: In the first embodiment, the IC card, which is an electronic module, is illustrated as being fixed to the cassette, but the second embodiment shown in FIG. An IC card is detachably installed. In FIG. 3, 10S is an IC card holder (electronic module holder) provided in the cassette 1, and the IC card 10 having a communication function is detachably attached to the IC card holder 10S. Reference numeral 11 is an IC card antenna. That is, when carrying out an article loaded in the cassette 1 from a facility that does not form the ground station 20A, etc., the IC card 10 in which information is written in advance corresponding to a specific cassette 1
Prepare and wear it when necessary. In addition, even if the IC card 10 fails, replacement with a spare IC card can be performed. Others are the same as those in the first embodiment, and thus the description thereof will be omitted.

Third Embodiment: FIG. 4 shows a third embodiment to which the present invention is applied. When the articles to be treated are primarily stocked in the treatment process in the clean room, or in the clean room and the clean room. This is a case where it is used for a management function provided at the stocking position of a stocker having a dust removing function provided as an external buffer function. 30A is a stocker, 1n is a cassette, and this cassette 1n is one cassette already stored in the stocker. 20
Is a wireless communication function, and is attached to a predetermined position of the stocker 30A. 1a is a cassette that has been transported by an unmanned transport function (not shown) and has been placed at a storage position by a transfer machine (not shown), and 10 is an IC card that has the function of a mobile station mounted on this cassette 1a (Hereinafter referred to as a mobile station). That is, the wireless communication function 20 of the stocker 30A
Is mounted at a position where it can communicate with the mobile station 10 of the cassette 1a that has arrived at the storage position. Therefore, in the case of a system that communicates with the mobile station 10 at the stopped position without the transfer machine described above, the wireless communication function 20 may be mounted at a position lower than that in FIG. In FIG. 4, the cassette 1a and the wireless communication function 20 communicate with each other by the same means as described in the first embodiment, and the contents of the cassette 1a and / or the contents of the cassette 1a are a worker or a manager on the ground. When grasped by the device, the cassette 1a is manually or automatically transferred to a predetermined shelf of the stocker 30A.

Fourth Embodiment: Next, referring to FIG. 5, a description will be given of confirmation means when the cassette stored in the stocker in the clean room is unloaded. In FIG. 5, 30B
Shows a state where the stocker is viewed from the side, 1b is a cassette stored in a predetermined shelf 30B2 of the stocker 30B, and 10 is a mobile station mounted in this cassette.
Reference numeral 35 denotes an automatic transfer machine (hereinafter referred to as a stacker) for exclusive use of warehousing or carrying out warehousing operations, and is configured to grasp and transfer a cassette by a grip 36 formed at the tip of an arm 35a. 20 is a stacker 35
The wireless communication function is attached to the tip of the arm 35a.
A predetermined upper management device causes a control device (not shown) of the stacker 35 to move the shelf 30B above the shelf on which the cassette 1b is placed.
When a delivery command is issued with 1 being specified, the grip 36 of the stacker 35 is moved to the front of the shelf 30B1. Grip 3
When 6 is moved to the front of the shelf 30B1, the wireless communication function 20 transmits a predetermined call signal as in the first embodiment. However, since there is no cassette on the shelf 30B1, the wireless communication function 20 does not receive the response signal.
Therefore, the unit information processing function (not shown) belonging to the stocker 30B connected to the wireless communication function 20 is the shelf 30B1.
It is determined that there is no cassette in and a preset signal is output. That is, for example, the worker is notified or a host computer device (not shown) is notified.

Next, the stacker 3 starts from a predetermined upper management device.
5 is instructed to eject the cassette 1b from the shelf 30B2, the stacker 35
Grip 36 is moved to the front of shelf 30B2. When the grip 36 is moved to the front of the shelf 30B2, the same as above.
The wireless communication function 20 transmits a predetermined call signal. The mobile station 10 that has received the call signal transmits a response signal as described in the first embodiment. Therefore, a unit information processing function (not shown) connected to the wireless communication function 20
However, when it is determined that the cassette 1b is the target, the stacker 35 is instructed to continue the unloading operation of the cassette 1b through a predetermined signal path, and the cassette 1b is unloaded to the predetermined position. In the above description, the wireless communication function is attached to the tip of the arm, but only the antenna may be attached according to the mechanical condition of the attachment location. Further, in order to transfer the cassette, it has been explained that the grip is attached to the stacker, but the cassette moving mechanism may be a fork corresponding to the structure and configuration conditions of the cassette and the stocker. It suffices to set the wireless communication function or the mounting condition and mounting position of the antenna according to the condition.

The above description shows an embodiment for explaining the basic configuration and the operation thereof for realizing the technical idea of the present invention, and relates to the conditions of the unmanned transfer system related to the clean room and the transfer cassette thereof. Correspondingly and appropriately applied. For example, although the case where an IC card is used as the electronic module to be mounted in the cassette is shown, even if the function of other shapes is configured, as described in the embodiment, detailed information about the corresponding cassette is mounted in the cassette itself. ,
It suffices if a function of notifying a person in charge of the ground and recording information input from the person in charge of the ground can be provided by a wireless communication function formed with the ground. Also, although the electronic module is mounted on the cassette in the above embodiments in the above description, the electronic module may be mounted at any suitable location depending on the cassette usage conditions and the stocker structure. Good. Also, the mounting position and the transmission output of the wireless communication function of the ground station may be set in correspondence with the mounting condition of the electronic module in the cassette. It is natural that the ground station which does not need to write data in the equipment as shown in the third or fourth embodiment has only the data reading function and need not have the data writing function.

[0022]

Since the present invention has the element functions as described above, it has the following excellent effects. (1) Detailed information about the transport cassette itself and the articles mounted on the cassette can be transported in perfect synchronization with the transported article. (2) Detailed information about articles to be loaded in the cassette that is transported in synchronism with the transport cassette itself can be easily grasped by the processing / processing function unit and the stock unit of an arbitrary loaded product. (3) Conveyed goods and information related to these goods can be conveyed in perfect synchronization and can be easily grasped, so even if some trouble occurs, for example, the location of the cassette and related information are lost in the management department, promptly It is possible to find the location of the article in and to grasp the contents loaded in the cassette. (4) Since the information is stored in the electronic storage function, the amount of written information is not limited unlike the barcode. For example, while a barcode can record only information of about 20 digits, a storage capacity of 512 bytes to 1024 bytes can be easily obtained. (5) Since the amount of stored information is not limited, detailed information can be conveyed in synchronization with the conveyed article. (6) Since the information is stored in the electronic storage function, it is not necessary to re-read the information every time the transport information changes like a barcode. (7) In the case of a bar code, depending on the conditions, it is necessary to attach it in a plurality of directions, but according to the wireless communication function as in the present invention, a method of the wireless communication function corresponding to the usage conditions, such as frequency and construction, is used. If the allowable limit of leakage electromagnetic waves leaking from an object is observed, the ground station has a high degree of freedom in setting the transmission power and can be used in a wide range. (8) If the electronic module is a card type, it will be easy to handle, including mounting in a cassette. (9) If the electronic module can be attached to and detached from the cassette, information can be recorded in the electronic module in advance, and replacement in the event of an electronic module failure can be easily done, facilitating system management and maintenance. I can do it. (10) If the ground station is installed at the stocker storage position, it is possible to easily confirm the cassette to be stored for temporary storage and its mounted items, and to reliably execute inventory management. (11) If at least the wireless communication antenna of the ground station is installed at a predetermined position such as the tip of the transfer function for stacking cassettes (stacker), it is easy and sure to confirm the presence of the cassette on the stocker at the time of shipment and what is loaded in that cassette. Can be executed. (12) If the ground station is provided with a function for writing predetermined information in the storage function of the electronic module, it is possible to change and mount appropriate information in response to changes in the mounted object mounted in the cassette, processing / processing results, and the like.

[Brief description of drawings]

FIG. 1 is a perspective view showing a schematic configuration of a first embodiment of an article transportation management method and an article transportation processing system in a clean room according to the present invention.

FIG. 2 is a block diagram showing a schematic configuration of element functions constituting each of a ground station and a mobile station in a wireless communication function corresponding to the first embodiment to which the present invention is applied.

FIG. 3 is a perspective view illustrating a detachable structure of a mobile station that describes a second embodiment to which the present invention is applied.

FIG. 4 is a front view of a stocker for explaining a third embodiment according to the present invention.

FIG. 5 is a side view of a stocker and an automatic transfer machine for explaining a fourth embodiment of the present invention.

FIG. 6 is a front view of a stocker for explaining the problems of the conventional one.

[Explanation of symbols]

 1: Cassette 2: Traveling Road 3: Host Computer Device 3A: Host Computer 10: Electronic Module (IC Card), (Mobile Station) 10A: Mobile Station 10S: Electronic Module Holder (IC Card Holder) 11: Mobile Station Antenna 14 : Mobile station data processing function 20: Wireless communication function 20A: Ground station 21: Ground station antenna 22: Unit information processing function 22A: Ground station data processing function 29: Unmanned transfer function control function 30A, 30B: Stocker 35 : Automatic transfer machine (stacker) 35a: Arm 36: Grip

Claims (10)

[Claims] 1. A wireless communication function is provided at a predetermined position of a cassette for carrying processed / processed products in a clean room for unmanned transportation, and information such as a code for identifying the cassette and / or the mounted product of the cassette is stored. A wireless communication function for communicating with the electronic module is provided in the transport management and / or processing function of the cassette and / or the mounted product of the cassette, and the electronic module is stored by the wireless communication function. A method of transporting and managing articles in a clean room, characterized in that the above information is read out, and transport / processing management of the cassette and / or a product mounted in the cassette is performed based on this information. 2. The method for managing article transportation in a clean room according to claim 1, wherein the electronic module is provided with a function of rewriting the stored contents by a wireless communication function. 3. The article transportation management method according to claim 1, wherein the electronic module is a card type. 4. A system for carrying and processing articles in a clean room, comprising a wireless communication function and a storage function for mounting a processed / processed product in the clean room and carrying the cassette unmanned and / or a mounted part of the cassette at a predetermined position. An electronic module provided, a ground station having a wireless communication function for communicating with the electronic module provided at a predetermined position in the clean room, and a ground station having a function of reading the stored contents of the storage function of the electronic module by the wireless communication function,
For the storage function of the electronic module, the cassette and / or
Alternatively, information such as a code for identifying a mounted object of the cassette is recorded, and processing / processing management of the mounted object is performed based on the information read by the ground station. Processing system. 5. The article conveying / processing system for a clean room according to claim 4, wherein the ground station installation position is near a work function for performing a predetermined processing or processing on the mounted object of the cassette. 6. The clean room article transfer / processing system according to claim 4, wherein the ground station installation position is a stocker storage position for temporarily stocking cassettes. 7. The function of moving the cassette, or the function of at least the wireless communication antenna of the ground station, such as a predetermined position of the leading end of the transfer function for stocking a cassette of a stocker for temporarily stocking the cassette. The article conveyance processing system for a clean room according to claim 4, which is a cooperation function of the above. 8. The clean room article transfer processing system according to claim 4, wherein the ground station has a function of writing predetermined information in a storage function of the electronic module by the wireless communication function. 9. The article conveying and processing system for a clean room according to claim 4, wherein the electronic module is detachable. 10. The article transfer processing system according to claim 4, wherein the electronic module is a card type.