JPH08172061A - Method of affixing sheet - Google Patents

Abstract

PURPOSE: To make the bubbling as well as cracking and spliting of a work hard by a method wherein a sheet is bent in the first space by the air pressure difference between the first and second spaces oppositely formed holding the sheet so as to slowly bring into contact with a work from the near crest of the bent to the outer periphery. CONSTITUTION: When a work 1 is suction-held by a suction hole 14 of a base member 12 and then a dicing sheet 2 is sticked on a sheet hold ing member 18, the holding member 18, the additive agent layer 2a of the dicing sheet 2 mounted downward on the member 12 to form a space 20. Next, after the formation of another space 24 by mounting a hood member 22 on the member 18, the spaces 20, 24 are simultaneously pressure-reduced through the intermediary of air pressure adjusting holes 16, 26. Next, when the space 24 is slowly fed with air leaving the pressure-reduced state of the space 20 intact, the near crest part in the sectionally curved state of the sheet 2 is brought into contact with the central part of the work 1 to be pressure-sticked by the air pressure difference. Finally, the air pressure difference and the suction of the suction hole 14 are dissolved to relieve the tension of the sheet 2.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sheet sticking method, and more particularly to a sheet sticking method for sticking a fragile work such as ceramics used for a piezoelectric element and a dicing sheet without generating bubbles. Regarding the method.

[0002]

2. Description of the Related Art FIG. 5 is a process diagram showing an example of a conventional sheet sticking method which is the background of the present invention. Work 1
Is a thin plate made of, for example, ceramics. A dicing sheet 2 is attached to one main surface of the work 1 as a pre-process when dicing the work 1 into a predetermined shape. The dicing sheet 2 is
For example, it is made of a plastic film and is for preventing the cutting blade from damaging the table on which the work is placed when the work is cut by the dicer, and preventing the cut work 1 from scattering. A pressure-sensitive adhesive, for example, is applied to the attaching surface of the dicing sheet 2.

When air is caught between the work 1 and the dicing sheet 2 when the dicing sheet 2 is stuck, the work 1 is peeled from the dicing sheet 2 at the time of dicing cutting, or the work 1 is cracked. It may cause cracking. In order to prevent this, in the sheet sticking method shown in FIG. 5, the dicing sheet 2 is pressed against the work 1 by the pressing roller 3 so that air bubbles are not generated between the work 1 and the dicing sheet 2. There is.

FIG. 6 is a process diagram showing another example of the conventional sheet sticking method. In this sheet sticking method, the work 1 is held at the tip of the pressure head 4. The pressure head 4 is displaced toward the dicing sheet 2. Then, the work 1 is pressed and attached to the main surface of the dicing sheet 2 by the pressure head 4. In the sheet sticking method shown in FIG. 6, bubbles are not generated between the dicing sheet 2 and the work 1 by pressing with the pressure head 4.

[0005]

However, in the conventional sheet sticking method, a large stress is applied to the work 1 by the pressing roller 3 and the pressure head 4. Therefore, particularly, the work 1 is made of thin ceramics or the like. In this case, there is a problem that the work 1 is likely to be cracked or broken.

Therefore, a main object of the present invention is to provide a sheet sticking method in which bubbles are unlikely to occur when a sheet is stuck to a work and cracks or breaks are not easily generated in the work.

[0007]

A sheet sticking method according to the present invention comprises a step of holding a work, and a step of holding a sheet to be stuck on one main surface of the work on one main surface of the work. A step of accommodating a work and forming a substantially sealed first space including a space between the work and the sheet, and forming a second space so as to face the first space with the sheet interposed therebetween. A step of lowering the atmospheric pressure in the first space as compared with the second space, and a second step
And a step of pressing the sheet to one main surface of the work by the pressure difference between the space and the first space and sticking the sheet.

In the step of pressing and adhering the sheet to one main surface of the work by the pressure difference between the second space and the first space, the pressure difference in the second space is applied to generate the pressure difference. Good.

Further, in the step of pressing the sheet against one main surface of the work by the pressure difference between the second space and the first space to attach the sheet, a pressure difference is generated in the first space by reducing the pressure. Good. At that time, the second space may be simultaneously pressurized.

Further, before the step of pressing the sheet against the one main surface of the work and adhering it by the pressure difference between the second space and the first space, the step of depressurizing the first space and the second space, respectively. May be included.

Further, in order to prevent the sheet from bending into the second space, a porous member having air permeability may be arranged in the second space.

Furthermore, in order to prevent the sheet from being flipped over from the work due to the tension of the sheet after the step of pressing and sticking the sheet to one main surface of the work due to the pressure difference between the second space and the first space. The step of moving the work in the seat direction to release the tension of the seat may be included.

[0013]

The first space and the second space are formed so as to face each other with the sheet interposed therebetween. A work is held in the first space. By lowering the air pressure in the first space as compared to the second space, the seat flexes into the first space. The bent sheet gradually contacts the work from the vicinity of the apex of the bending, and is pressed and attached to one main surface of the work due to the difference in atmospheric pressure between the second space and the first space.

[0014]

According to the sheet attaching method of the present invention, the sheet is bent into the first space due to the difference in atmospheric pressure between the first space and the second space which are formed to face each other with the sheet interposed therebetween. No, since the sheet is gradually brought into contact with the work piece from the vicinity of the apex of its deflection to the outer peripheral portion, the air bubble is unlikely to be generated between the sheet and the work piece. Further, since the sheet is pressed against the work by the pressure difference, the entire surface of the sheet to be attached can be pressed uniformly. Further, since the sheet is pressed against the work due to the difference in atmospheric pressure, the work is not overly stressed, and cracks and breaks are less likely to occur.

Further, by reducing the pressure in each of the first space and the second space before attaching the sheet, bubbles are less likely to be generated.

Further, when a porous member having air permeability is arranged in the second space, the sheet is adsorbed and held by the porous member, and the sheet is prevented from bending into the second space.

Further, after the step of pressing the sheet against one main surface of the work and adhering it by the pressure difference between the second space and the first space, the work is moved in the direction of the sheet to release the tension of the sheet. In this case, the tension of the sheet prevents the sheet from being turned over from the work.

The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the following detailed description of the embodiments with reference to the drawings.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a process schematic view showing an embodiment of the present invention. First, the sheet sticking apparatus used in the present invention will be described. The sheet sticking apparatus 10 of the present invention is
A base member 12 having a substantially U-shaped cross section is included. Base member 1
A suction hole 14 as a work holding means is formed in, for example, a substantially central portion of the bottom surface of 2. The suction hole 14 is the work 1
For holding by suction. The suction hole 14 is connected to a suction device (not shown). The work 1 applied to this embodiment is, for example, a thin plate-shaped ceramic material or the like, and is used, for example, for a piezoelectric element or the like.

Further, the suction hole 14 on the bottom surface of the base member 12
A first air pressure adjusting hole 16 is formed on the side of the. First
The air pressure adjusting hole 16 is connected to an air pressure adjusting device (not shown) for sucking or feeding air in the first space described later and adjusting the air pressure.

FIG. 2 is a perspective view showing the sheet holding member of the embodiment shown in FIG. On the base member 12, a sheet holding member 18 having a frame shape of a substantially square V when viewed from above is arranged. The sheet holding member 18 is for sticking and holding the dicing sheet 2. Sheet holding member 1
8 is sandwiched between a base member 12 and a hood member 22 described later. The outer dimensions of the sheet holding member 18 are formed to be the same as the base member 12, and a rectangular through hole larger than at least the outer dimension of the work 1 is formed inside the sheet holding member 18.

The dicing sheet 2 is attached to one surface of the sheet holding member 18. The dicing sheet 2 is made of a material having flexibility and airtightness, and for example, a plastic film is used. A pressure-sensitive adhesive layer 2a, for example, is provided on the sticking surface of the dicing sheet 2. The dicing sheet 2 is attached to the sheet holding member 18 by the adhesive layer 2a. At this time, the pressure-sensitive adhesive layer 2a of the dicing sheet 2 is exposed from the through hole at the substantially central portion of the sheet holding member 18. And the sheet holding means 1
8 is a first seal that is placed on the base member 12 with the pressure-sensitive adhesive layer 2a facing one main surface of the work 1 and is surrounded by the base member 12, the sheet holding member 18, and the dicing sheet 2 and is substantially sealed. The space 20 is formed.

Further, as shown in FIG. 1, a hood member 22 having a substantially U-shaped cross section is placed on the sheet holding means 18 so as to cover the dicing sheet 2, and the hood member 22 and the dicing are performed. A second space 24 surrounded by the sheet 2 and substantially sealed is formed. At this time, the dicing sheet 2 is held by being sandwiched between the hood member 22 and the sheet holding member 18.

A second air pressure adjusting hole 26 is formed in the central portion of the hood member 22. The second air pressure adjusting hole 26 is
It is connected to an air pressure adjusting device (not shown) for sucking air in the second space 24 or sending in air and adjusting the air pressure. A compressor, a vacuum pump, etc. are used for the atmospheric pressure adjusting device of this embodiment.

Next, the sheet attaching method of this embodiment will be described with reference to FIG. First, as shown in FIG. 1 (A), the work 1 has a suction hole 1 at a substantially central portion of the base member 12.
It is sucked and held by 4. Also, the dicing sheet 2
Is attached to the sheet holding member 18. Sheet holding member 1
8 is placed on the base member 12 with the pressure-sensitive adhesive layer 2a of the dicing sheet 2 facing the work 1 to form the first space 20. Next, the hood member 22 is placed on the sheet holding member 18, and the second space 24 is formed. The dicing sheet 2 and the sheet holding member 18 are sandwiched and held by the hood member 22 and the base member 12.

Next, air is sucked from the first air pressure adjusting hole 16 to reduce the air pressure in the first space 20. at the same time,
Air is sucked from the second atmospheric pressure adjusting hole 26, and the atmospheric pressure of the second space 24 is also reduced. The reason why both the first space 20 and the second space 24 are decompressed at the same time is to reduce the generation of bubbles due to the inclusion of air between the dicing sheet 2 and the work 1 when the dicing sheet 2 is attached.

Next, the suction of the second space 24 is stopped while the first space 20 is kept depressurized. next,
Air is gradually fed into the second space 24 to be pressurized. Then, the atmospheric pressure of the second space 24 changes to the first space 20.
It will gradually rise above the atmospheric pressure. And FIG.
As shown in (B), the dicing sheet 2 bends into the first space 20 in a bow shape in cross section. Since the dicing sheet 2 is held by the sheet holding member 18 having a larger outer shape than the work 1 to be bonded, the bending is
The substantially central portion of the dicing sheet 2 is the largest. Then, the substantially central portion of the dicing sheet 2, that is, the vicinity of the apex having a bow-shaped cross section first contacts the substantially central portion of the work 1,
It is pressed and attached due to the difference in atmospheric pressure.

Further, by continuously applying pressure, as shown in FIG.
As shown in (C), the dicing sheet 2 is pressed and attached to the entire one main surface of the work 1 so as to spread from the central portion of the work 1 to the outer peripheral portion. Then, after the dicing sheet 2 is completely attached to the work 1, the first space 20
When the suction of the workpiece, the pressurization of the second space 24, and the suction of the workpiece holding means 14 are eliminated, the work 1
1 is lifted by the tension of the dicing sheet 2 as shown in FIG. The work 1 to which the dicing sheet 2 is attached has a base member 12 and a hood member 2.
After the sheet 2 is divided into upper and lower parts, it is carried to the next step while being held by the sheet holding member 18.

According to the sheet attaching method of this embodiment, since the bent dicing sheet 2 is gradually attached from the vicinity of the apex of the bend to the outer peripheral portion, it is difficult to entrap air between the work 1 and the work 1. , Bubbles are less likely to occur. Further, since the dicing sheet 2 is pressed by a difference in atmospheric pressure, the dicing sheet 2 is pressed against the work 1 by a uniform pressure on the entire surface. Further, since the pressure is applied due to the difference in atmospheric pressure, it is easy to adjust the pressing force by adjusting the atmospheric pressure. Further, since the pressure is applied by the difference in atmospheric pressure, excessive stress is unlikely to be applied to the work, and cracks and breaks are less likely to occur.

FIG. 3 is a sectional view showing a sheet sticking apparatus according to another embodiment of the present invention. This sheet pasting device 1
0 includes a plate-shaped porous member 28 having air permeability. The porous member 28 is arranged in the second space 24.
The porous member 28 contacts the surface of the dicing sheet 2 opposite to the work 1 in order to prevent the dicing sheet 2 from flexing into the second space 24 when depressurizing the second space 24. . And when decompressing the second space,
The dicing sheet 2 is a porous member 28 having air permeability.
Will be adsorbed by. Therefore, by providing the porous member 28, it is possible to prevent the dicing sheet 2 from bending toward the side opposite to the work 1, and it becomes more difficult for bubbles to be generated during attachment.

FIG. 4 is a schematic sectional view showing a sheet sticking apparatus according to still another embodiment of the present invention. The sheet sticking apparatus 10 shown in FIG. 4 includes a work holding table 30 that is vertically displaceable as work holding means. A second suction hole 32 for sucking and holding the work 1 is formed in the work holding table 30 so as to penetrate substantially the center thereof. Second
The suction hole 32 of the suction hole 1 of the base member 12
4 is connected by a stretchable connecting pipe 34 such as a rubber pipe. By sucking with a suction device (not shown) connected to the suction hole 14, the work 1 is sucked by the second suction hole 32 and held by the work holding table 30. For example, a vacuum pump is used as the suction device.

The work holding table 30 is held by a hydraulic cylinder 36 or the like so as to be vertically movable. When the work holding table 30 descends, the dicing sheet 2 is attached to the work 1 by the same method as described above. Next, the work holding table 30 is raised by the hydraulic cylinder 36, so that the tension applied to the bent dicing sheet 2 is released. This prevents the dicing sheet 2 from being turned over from the work 1.

Alternatively, the second atmospheric pressure adjusting hole 24 may be left open, and only the first space may be gradually depressurized to bend the dicing sheet 2 and attach it to the work 1.
In addition, by opening the first air pressure adjusting hole 16 and gradually pressurizing only the second space, the dicing sheet 2
May be bent and attached to the work 1.

In order to attach and hold the dicing sheet 2 to the sheet holding member 18, an adhesive is applied to one surface of the sheet holding member 18, and the dicing sheet 2 is held by the adhesive. Good.

[Brief description of drawings]

FIG. 1 is a process schematic view showing an embodiment of the present invention.

FIG. 2 is a perspective view showing a sheet holding member of the embodiment shown in FIG.

FIG. 3 is a schematic sectional view showing a sheet sticking apparatus according to another embodiment of the present invention.

FIG. 4 is a schematic sectional view showing a sheet sticking apparatus according to still another embodiment of the present invention.

FIG. 5 is a process diagram showing an example of a conventional sheet sticking method which is the background of the present invention.

FIG. 6 is a process diagram showing another example of the conventional sheet sticking method which is the background of the present invention.

[Explanation of symbols]

 1 Work 2 Dicing Sheet 3 Pressing Roller 4 Pressing Head 10 Sheet Sticking Device 12 Base Member 14 Suction Hole 16 First Atmospheric Pressure Adjusting Hole 18 Sheet Holding Member 20 First Space 22 Hood Member 24 Second Space 26 Second Atmospheric Pressure Adjustment hole 28 Porous member 30 Workpiece holding base 32 Second suction hole 34 Connection pipe

Claims (6)

[Claims] 1. A step of holding a work, a step of holding a sheet to be attached to one main surface of the work with respect to one main surface of the work, a step of storing the work and combining the work and the sheet. Forming a substantially sealed first space including a space, forming a second space so as to face the first space with the sheet interposed therebetween, and comparing the second space with the second space. A sheet pasting method including a step of lowering the atmospheric pressure of the first space, and a step of pushing the sheet to one main surface of the workpiece by the atmospheric pressure difference between the second space and the first space to stick the sheet. . 2. In the step of pressing and adhering the sheet to one main surface of the work due to the atmospheric pressure difference between the second space and the first space, the atmospheric pressure is applied by pressurizing the second space. The sheet sticking method according to claim 1, which causes a difference. 3. The step of pressing the sheet against the one main surface of the work by the pressure difference between the second space and the first space to attach the sheet, by depressurizing the first space. The sheet sticking method according to claim 1, wherein a pressure difference is generated. 4. The step of pressing the sheet against the one main surface of the work by the pressure difference between the second space and the first space to attach the sheet to the first space and the second space. The sheet sticking method according to any one of claims 1 to 3, comprising a step of depressurizing each space. 5. The porous member having air permeability is arranged in the second space in order to prevent the sheet from bending into the second space. The method for attaching the sheet described in. 6. After the step of pressing and adhering the sheet to one main surface of the work due to the atmospheric pressure difference between the second space and the first space, the sheet is forced to adhere to the work by the tension of the sheet. The sheet sticking method according to any one of claims 1 to 5, further comprising a step of moving the work in the sheet direction to release the tension of the sheet in order to prevent the sheet from being twisted.