JPH0626808A - Sensor target - Google Patents
Sensor targetInfo
- Publication number
- JPH0626808A JPH0626808A JP4206011A JP20601192A JPH0626808A JP H0626808 A JPH0626808 A JP H0626808A JP 4206011 A JP4206011 A JP 4206011A JP 20601192 A JP20601192 A JP 20601192A JP H0626808 A JPH0626808 A JP H0626808A
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- sensor target
- carrier
- angle
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D2205/00—Indexing scheme relating to details of means for transferring or converting the output of a sensing member
- G01D2205/70—Position sensors comprising a moving target with particular shapes, e.g. of soft magnetic targets
- G01D2205/77—Specific profiles
- G01D2205/775—Tapered profiles
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はセンサターゲットに係
り、特に、変位を計測可能なセンサと組み合わせて用い
られることにより、検出対象物の回転角度、回転方向を
検出することができるセンサのセンサターゲットに関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sensor target, and more particularly to a sensor target of a sensor capable of detecting a rotation angle and a rotation direction of an object to be detected by being used in combination with a sensor capable of measuring displacement. Regarding
【０００２】[0002]
【従来の技術】磁気浮上搬送装置は、電磁石の磁力が生
成する吸引力を、変位センサの出力値を基にして制御を
行うことにより、搬送台に備えられた磁性体材料のター
ゲットを磁気力で吸引して搬送路に対して非接触状態に
浮上させ、リニアモータ駆動及び浮上磁極の切替えによ
り搬送台を搬送路に従って移動させている。かかる搬送
装置においては、搬送台の停止・保持、搬送台の移動の
いずれの場合も、搬送台とその軌道となる搬送路とは非
接触状態を維持しているので、接触にともなう塵埃発生
の恐れがなく、そのため、塵埃の発生を極端にきらう半
導体製造設備等において、上記搬送装置は利用出来る。2. Description of the Related Art A magnetic levitation transfer apparatus controls the attraction force generated by the magnetic force of an electromagnet on the basis of the output value of a displacement sensor so that the target of a magnetic material provided on a transfer table is subjected to a magnetic force. Is sucked up and levitated in a non-contact state with respect to the transport path, and the transport table is moved along the transport path by driving the linear motor and switching the floating magnetic poles. In such a transporting device, when the transporting platform is stopped and held, or when the transporting platform is moved, the transporting platform and the transporting path, which is the track thereof, are kept in a non-contact state, so that dust is generated due to the contact. There is no fear, and therefore, the above-mentioned transfer device can be used in a semiconductor manufacturing facility or the like where generation of dust is extremely reluctant.
【０００３】このような磁気浮上搬送装置においては、
例えば、搬送路が十字状に交叉しており、搬送台を交叉
した十字路に直角に進路を変更しなければならない場合
がある。かかる場合には搬送台の回転角度に応じて搬送
台に回転力を与える駆動源を制御する必要があるが、か
かる制御に必要な搬送台の回転角度を得るための好適な
センサが従来無かった。又搬送台を搬送路上の一定の場
所に、その搬送物の積み降ろし等のために停止させる必
要がある。搬送台を非接触で電磁的な力によって停止さ
せると、磁気的なばね力と搬送台の慣性力により搬送台
の重心付近の鉛直軸を中心にθ方向の回転振動が生じ
る。この回転振動に対して適当な制振方法がないのと搬
送台が非接触であることから、減衰力が作用せず完全停
止に長時間を要する。かかる振動を速やかに停止させる
ためには搬送台の回転振動を検出することにより、その
振動を抑えるような電磁的な制御力を印加すればよい
が、そのためには搬送台の回転振動を検出することが必
要である。しかしながら、かかる用途に好適な非接触で
容易に回転角度、回転方向を検出できるセンサとセンサ
ターゲットの組合わせが従来適当なものが無かった。In such a magnetic levitation transport device,
For example, there is a case where the conveyance paths intersect in a cross shape, and the course must be changed at a right angle to the cross path where the carriages are crossed. In such a case, it is necessary to control the drive source that gives a rotational force to the carrier according to the rotation angle of the carrier, but conventionally there has been no suitable sensor for obtaining the rotation angle of the carrier necessary for such control. . Further, it is necessary to stop the carrier at a fixed position on the carrier path for loading and unloading the carrier. When the carrier is stopped in a non-contact manner by an electromagnetic force, a rotational vibration in the θ direction is generated around the vertical axis near the center of gravity of the carrier due to the magnetic spring force and the inertial force of the carrier. Since there is no suitable damping method for this rotational vibration and the carrier is not in contact, the damping force does not act and it takes a long time to completely stop. In order to promptly stop such vibration, it is sufficient to detect the rotational vibration of the carrier and apply an electromagnetic control force to suppress the vibration, but for that purpose, the rotational vibration of the carrier is detected. It is necessary. However, there has been no suitable combination of a sensor and a sensor target, which is suitable for such an application and which can easily detect a rotation angle and a rotation direction in a non-contact manner.
【０００４】[0004]
【発明が解決しようとする課題】本発明は係る従来技術
の問題点に鑑み、例えば磁気浮上搬送装置における搬送
台に取付け、搬送台が搬送路に対して回転あるいは回転
振動する場合に、その回転角度、回転方向を容易に変位
センサを用いて検出することのできるセンサターゲット
を提供する。In view of the problems of the prior art, the present invention is mounted on, for example, a carrier table in a magnetic levitation carrier apparatus, and when the carrier table rotates or rotationally vibrates with respect to a carrier path, its rotation Provided is a sensor target which can easily detect an angle and a rotation direction by using a displacement sensor.
【０００５】[0005]
【課題を解決するための手段】回転角度、回転方向を検
出するためのセンサターゲットであって、環状の溝もし
くは突起を備え、該環状の溝もしくは突起は、前記環状
の中心点に対する角度に応じて、その高さ、幅等が変化
したものであることを特徴とするA sensor target for detecting a rotation angle and a rotation direction, comprising a ring-shaped groove or protrusion, the ring-shaped groove or protrusion depending on an angle with respect to the ring-shaped center point. And its height and width are changed.
【０００６】[0006]
【作用】係る前述の構成を具備する本発明のセンサター
ゲットによれば、環状の溝もしくは突起は、環状の中心
点に対する角度に応じて変化するものであるので、環状
のターゲットに対向して変位センサを配置することによ
って、変位センサには環状のセンサターゲットの中心点
に対する角度に応じた変位、即ち、角度に応じた信号を
検出することが可能となる。このようにして変位センサ
によって環状のセンサターゲットとの距離の変化、即
ち、変位を検出することによって、センサターゲットの
中心点に対する回転角度を検出することができ、また検
出した角度の増減傾向から回転方向を検出することがで
きる。According to the sensor target of the present invention having the above-described structure, since the annular groove or projection changes in accordance with the angle with respect to the annular center point, the annular target or displacement is displaced. By disposing the sensor, it becomes possible for the displacement sensor to detect the displacement according to the angle with respect to the center point of the annular sensor target, that is, the signal according to the angle. In this way, by detecting the change in the distance from the annular sensor target by the displacement sensor, that is, the displacement, the rotation angle with respect to the center point of the sensor target can be detected. The direction can be detected.
【０００７】[0007]
【実施例】図１は本発明の一実施例のセンサターゲット
の説明図である。センサターゲット１は環状の突起７か
ら形成され環状の中心点ＸＸ′軸に対してその角度θに
応じて高さＨが変化したものである。センサターゲット
１は搬送台３に固定されており、搬送台３がＸＸ′軸を
中心として回転すると、センサターゲット１もこれに伴
いＸＸ′軸を中心として回転する。一方、変位センサ
５，６は図示しない搬送路に固定されており、センサタ
ーゲット１のセンサターゲット面２との間隔ｄ、即ち変
位を検出する。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is an explanatory view of a sensor target according to an embodiment of the present invention. The sensor target 1 is formed of an annular protrusion 7 and has a height H that changes in accordance with the angle θ with respect to the annular center point XX ′ axis. The sensor target 1 is fixed to the carrier table 3. When the carrier table 3 rotates about the XX 'axis, the sensor target 1 also rotates about the XX' axis. On the other hand, the displacement sensors 5 and 6 are fixed to a conveyance path (not shown), and detect the distance d between the sensor target 1 and the sensor target surface 2, that is, the displacement.
【０００８】図５は変位センサの出力特性の説明図であ
る。図示するように変位センサとセンサターゲット面の
ギャップ（センサヘッド面からセンサターゲット面２ま
での距離）ｄに応じてセンサ出力は直線的に変化する。
ここで変位センサ５，６は渦電流型センサ、あるいはイ
ンダクタンスの変化を利用した電磁誘導型センサであ
る。したがって、搬送路上に固定された変位センサ５，
６の出力は、搬送台３がＸＸ′軸を中心として回転する
と、回転角度θに応じてそれぞれ直線的な出力電圧Ｖ
1 ，Ｖ2 が得られる。FIG. 5 is an explanatory diagram of the output characteristics of the displacement sensor. As shown in the figure, the sensor output changes linearly according to the gap (distance from the sensor head surface to the sensor target surface 2) d between the displacement sensor and the sensor target surface.
Here, the displacement sensors 5 and 6 are eddy current type sensors or electromagnetic induction type sensors that utilize changes in inductance. Therefore, the displacement sensor 5, which is fixed on the conveyance path,
The output of 6 is a linear output voltage V according to the rotation angle θ when the carrier 3 rotates about the XX ′ axis.
1 and V2 are obtained.
【０００９】図６は変位センサの出力特性の説明図であ
り、変位センサ５の出力Ｖ1 及び変位センサ６の出力Ｖ
2 に関するものである。搬送台３がＸＸ′軸を中心とし
て回転すると、変位センサ５のセンサ出力Ｖ1 は回転角
θが１８０°まではセンサターゲット面とのギャップｄ
が大きくなることから、出力Ｖ1 が増大し、さらに１８
０°〜３６０°までは、ギャップｄが小さくなることか
ら、その出力電圧Ｖ1は直線的に減少する。同様に、変
位センサ５，６のセンサ出力Ｖ2 は回転角度θが０〜１
８０°までは、センサターゲット面とのギャップｄが小
さくなることから、直線的に出力Ｖ2 は減少し、回転角
度θが１８０°〜３６０°までは、センサターゲット面
とのギャップｄが大きくなることからセンサ出力Ｖ2 は
直線的に増大する。FIG. 6 is an explanatory diagram of the output characteristics of the displacement sensor. The output V 1 of the displacement sensor 5 and the output V of the displacement sensor 6 are shown.
It is about 2 . When the carrier 3 rotates about the XX 'axis, the sensor output V 1 of the displacement sensor 5 has a gap d with the sensor target surface up to a rotation angle θ of 180 °.
Becomes larger, the output V 1 increases, and
From 0 ° to 360 °, the output voltage V 1 decreases linearly because the gap d becomes small. Similarly, the sensor output V 2 of the displacement sensors 5 and 6 has a rotation angle θ of 0 to 1
Since the gap d with the sensor target surface becomes smaller up to 80 °, the output V 2 decreases linearly, and the gap d with the sensor target surface increases until the rotation angle θ is 180 ° to 360 °. Therefore, the sensor output V 2 increases linearly.
【００１０】図７は変位センサの出力特性の説明図であ
り、センサ出力Ｖ1 とセンサ出力Ｖ2 の差分である。セ
ンサ出力Ｖ1 とセンサ出力Ｖ2 を差動増幅器等によりそ
の出力を演算処理すると図７に示す出力特性が得られ
る。即ち搬送台３がＸＸ′軸を中心として３６０°回転
すると、その出力は１８０°までは直線的に下降し１８
０°〜３６０°までは直線的に上昇する。このように変
位センサ５，６及び搬送台３上にセンサターゲット１を
設けると、搬送台３がＸＸ′軸を中心として回転した場
合にその回転角度を検出することができる。また０〜１
８０°まではセンサ出力が下降し、１８０°〜３６０°
まではセンサ出力が増加する。従ってセンサ出力を微分
することによって、回転角度の回転方向を検出すること
ができる。FIG. 7 is an explanatory diagram of the output characteristic of the displacement sensor, which is the difference between the sensor output V 1 and the sensor output V 2 . When the sensor output V 1 and the sensor output V 2 are arithmetically processed by a differential amplifier or the like, the output characteristic shown in FIG. 7 is obtained. That is, when the carrier table 3 rotates 360 ° about the XX 'axis, its output linearly drops to 180 °.
It rises linearly from 0 ° to 360 °. By providing the sensor targets 1 on the displacement sensors 5 and 6 and the carrier 3 in this way, the rotation angle can be detected when the carrier 3 rotates about the XX 'axis. 0-1
The sensor output drops to 80 °, 180 ° to 360 °
Until the sensor output increases. Therefore, the rotation direction of the rotation angle can be detected by differentiating the sensor output.
【００１１】図２は本発明の第１の実施例のセンサター
ゲットの斜視図である。図示するように環状のセンサタ
ーゲット１は環状の突起７でありその中心であるＸＸ′
軸に対する角度に応じてターゲット面２の高さＨが変化
している。なお、センサターゲット１の環状の突起７の
幅は全周に渡って一定の幅となっている。図３は本発明
の第２の実施例のセンサターゲットの斜視図である。本
実施例においては環状の溝８を備え、溝８の底部がセン
サターゲット面２となっている。従って、センサターゲ
ット表面からセンサターゲット面２までの深さＨは、環
状の中心軸ＸＸ′に対する角度θに対して直線的に変化
している。FIG. 2 is a perspective view of the sensor target of the first embodiment of the present invention. As shown in the figure, the annular sensor target 1 is an annular protrusion 7 and its center is XX '.
The height H of the target surface 2 changes according to the angle with respect to the axis. The width of the annular projection 7 of the sensor target 1 is constant over the entire circumference. FIG. 3 is a perspective view of a sensor target according to the second embodiment of the present invention. In this embodiment, an annular groove 8 is provided, and the bottom of the groove 8 is the sensor target surface 2. Therefore, the depth H from the sensor target surface to the sensor target surface 2 changes linearly with respect to the angle θ with respect to the annular central axis XX ′.
【００１２】図４（Ａ）は本発明の第３の実施例のセン
サターゲットの斜視図である。本実施例においては、環
状のセンサターゲット１の突起７の幅Ｗが変化するもの
である。即ちセンサターゲットの突起７の高さＨは一定
であるが、中心軸ＸＸ′に対する角度θに応じてセンサ
ターゲットのターゲット面２の幅Ｗが変化するものであ
る。図４（Ｂ）は、このセンサターゲット１を上面から
見た平面図である。このようにセンサターゲットの幅Ｗ
が変化するものであっても、渦電流型センサ、あるいは
インダクタンス型センサにおいては、センサターゲット
の幅Ｗに比例した出力が得られることから、回転角度θ
に比例した変位センサのセンサ出力Ｖ1，Ｖ2 を同様に
得ることができる。FIG. 4A is a perspective view of a sensor target according to a third embodiment of the present invention. In this embodiment, the width W of the protrusion 7 of the annular sensor target 1 changes. That is, the height H of the protrusion 7 of the sensor target is constant, but the width W of the target surface 2 of the sensor target changes according to the angle θ with respect to the central axis XX ′. FIG. 4B is a plan view of the sensor target 1 as seen from above. Thus, the width W of the sensor target
Eddy current type sensor or inductance type sensor, an output proportional to the width W of the sensor target is obtained, so that the rotation angle θ
Similarly, the sensor outputs V 1 and V 2 of the displacement sensor proportional to can be obtained.
【００１３】係るセンサターゲット１を搭載した搬送台
３は、搬送路上を磁気浮上して交叉する搬送路に移動す
るような場合には、搬送路の交差点において、搬送台の
回転角度を検出する必要がある。そのような場合に、交
差点の対応する位置に配置された変位センサ５，６より
の出力に応じて回転角度、回転方向を容易に検出するこ
とができる。When the carrier table 3 having the sensor target 1 mounted thereon is magnetically levitated on the carrier path and moves to the intersecting carrier path, it is necessary to detect the rotation angle of the carrier table at the intersection of the carrier paths. There is. In such a case, the rotation angle and the rotation direction can be easily detected according to the outputs from the displacement sensors 5 and 6 arranged at the corresponding positions of the intersection.
【００１４】また磁気浮上搬送装置において、搬送台３
を停止するような場合には、搬送台の重心付近の鉛直方
向の回転軸に対して回転振動を生じ、この振動を検出す
る必要がある。係る場合に搬送台の回転振動を上記実施
例のセンサターゲットにより変位センサと組合せてその
角度、方向、速度を容易に検出できる。In the magnetic levitation transfer device, the transfer table 3
In the case of stopping, the rotational vibration is generated about the vertical rotation shaft near the center of gravity of the carrier, and this vibration needs to be detected. In such a case, the rotational vibration of the carrier can be combined with the displacement sensor by the sensor target of the above embodiment to easily detect the angle, direction and speed.
【００１５】実施例に示すようにセンサターゲット１は
環状のその中心軸からの角度に応じて突起の高さ、また
は溝の深さが変化するように構成したものである。従っ
て、その製造は容易であり、一般的な変位センサと組み
合わせて容易に回転体の回転角度、回転方向を検出でき
るセンシングが実現される。As shown in the embodiment, the sensor target 1 is configured so that the height of the protrusion or the depth of the groove changes depending on the angle from the central axis of the ring. Therefore, the manufacturing thereof is easy, and by combining it with a general displacement sensor, the sensing that can easily detect the rotation angle and the rotation direction of the rotating body is realized.
【００１６】[0016]
【発明の効果】以上に説明したように、本発明のセンサ
ターゲットによれば、変位センサと組み合わせることに
よりセンサターゲットの中心軸を回転中心とする回転角
度、回転方向を容易に検出することが可能となる。As described above, according to the sensor target of the present invention, by combining with the displacement sensor, it is possible to easily detect the rotation angle and the rotation direction with the central axis of the sensor target as the rotation center. Becomes
【図１】本発明の一実施例のセンサターゲットの説明
図。FIG. 1 is an explanatory diagram of a sensor target according to an embodiment of the present invention.
【図２】本発明の第一の実施例のセンサターゲットの斜
視図。FIG. 2 is a perspective view of the sensor target according to the first embodiment of the present invention.
【図３】本発明の第二の実施例のセンサターゲットの斜
視図。FIG. 3 is a perspective view of a sensor target according to a second embodiment of the present invention.
【図４】本発明の第三の実施例のセンサターゲットの
（Ａ）は斜視図、（Ｂ）は平面図。4A is a perspective view and FIG. 4B is a plan view of a sensor target according to a third embodiment of the invention.
【図５】変位センサ出力特性の説明図。FIG. 5 is an explanatory diagram of displacement sensor output characteristics.
【図６】変位センサ出力特性の説明図。FIG. 6 is an explanatory diagram of displacement sensor output characteristics.
【図７】変位センサ出力特性の説明図。FIG. 7 is an explanatory diagram of displacement sensor output characteristics.
１ センサターゲット ２ センサターゲット面 ３ 搬送台 ５，６ 変位センサ ７ 突起 ８ 溝 1 Sensor Target 2 Sensor Target Surface 3 Transport Platform 5,6 Displacement Sensor 7 Protrusion 8 Groove
Claims (3)
するためのセンサターゲットであって、環状の溝もしく
は突起を備え、該環状の溝もしくは突起は、前記環状の
中心点に対する角度に応じて変化したものであることを
特徴とするセンサターゲット。1. A sensor target for detecting a rotation angle and a rotation direction of an object to be detected, comprising a ring-shaped groove or protrusion, the ring-shaped groove or protrusion depending on an angle with respect to the ring-shaped center point. The sensor target is characterized in that it has changed.
の中心点に対する角度に応じて、その高さが変化したも
のであることを特徴とする請求項１のセンサターゲッ
ト。2. The sensor target according to claim 1, wherein the height of the annular groove or protrusion is changed according to an angle with respect to the center point of the annular shape.
の中心点に対する角度に応じて、その幅が変化したもの
であることを特徴とする請求項１のセンサターゲット。3. The sensor target according to claim 1, wherein the annular groove or protrusion has a width that varies depending on an angle with respect to the annular center point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4206011A JPH0626808A (en) | 1992-07-09 | 1992-07-09 | Sensor target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4206011A JPH0626808A (en) | 1992-07-09 | 1992-07-09 | Sensor target |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0626808A true JPH0626808A (en) | 1994-02-04 |
Family
ID=16516434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4206011A Pending JPH0626808A (en) | 1992-07-09 | 1992-07-09 | Sensor target |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0626808A (en) |
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1992
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| DE19745823A1 (en) * | 1997-10-16 | 1999-04-29 | Sensor Instr Gmbh | Torque and rotation angle measuring device e.g. for motor vehicle |
| WO2006080325A1 (en) * | 2005-01-25 | 2006-08-03 | The Furukawa Electric Co., Ltd. | Rotation sensor |
| US7999534B2 (en) | 2005-01-25 | 2011-08-16 | The Furukawa Electric Co., Ltd. | Rotation sensor with detection signal timing cycle features |
| JP2008122279A (en) * | 2006-11-14 | 2008-05-29 | Shimadzu Corp | Rotation detecting device and rotation device |
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| JP2018072160A (en) * | 2016-10-28 | 2018-05-10 | ミネベアミツミ株式会社 | Angle detection device and illumination device |
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