JPH0552137B2 - - Google Patents

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Publication number
JPH0552137B2
JPH0552137B2 JP61102547A JP10254786A JPH0552137B2 JP H0552137 B2 JPH0552137 B2 JP H0552137B2 JP 61102547 A JP61102547 A JP 61102547A JP 10254786 A JP10254786 A JP 10254786A JP H0552137 B2 JPH0552137 B2 JP H0552137B2
Authority
JP
Japan
Prior art keywords
vibrator
contact member
vibrating body
contact
opposing sides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61102547A
Other languages
Japanese (ja)
Other versions
JPS62259484A (en
Inventor
Hiroshi Shimizu
Takashi Takada
Masateru Ishibashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP61102547A priority Critical patent/JPS62259484A/en
Publication of JPS62259484A publication Critical patent/JPS62259484A/en
Publication of JPH0552137B2 publication Critical patent/JPH0552137B2/ja
Granted legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Description

【発明の詳細な説明】 〔技術分野〕 この発明は、圧電素子を用いた往復動型または
回転型等の圧電駆動装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a piezoelectric drive device, such as a reciprocating type or a rotary type, using a piezoelectric element.

〔背景技術〕[Background technology]

従来、圧電素子を用いた超音波モータとして、
特公昭59−037672号公報に示されるものがある。
これは、圧電素子を振動体に貼りつけて縦振動を
発生させ、振動体の先端部に傾きを持つた駆動片
を形成し、その先端部が前記縦振動によつて楕円
運動を行い、円板と接触することにより、摩擦力
により円板を回転させるものである。 Conventionally, as an ultrasonic motor using piezoelectric elements,
There is one shown in Japanese Patent Publication No. 59-037672.
In this method, a piezoelectric element is attached to a vibrating body to generate longitudinal vibration, and a driving piece with an inclination is formed at the tip of the vibrating body. By contacting the disk, the disk is rotated by frictional force.

しかし、この従来構造であると、回転方向が駆
動片の傾き方向によつて決つてしまい、また駆動
片の先端部は細く、摩擦のために摩耗も大きく、
寿命的にも問題がある。 However, with this conventional structure, the direction of rotation is determined by the direction of inclination of the drive piece, and the tip of the drive piece is thin, causing large wear due to friction.
There is also a problem with longevity.

また、他の従来例として、特開昭58−148682号
公報に示されるものがある。この例は、圧電素子
の全体振動を振動体に伝え、一方の波形をもう一
方の波形と90°位相をずらせて振動させることに
より、振動体表面に進行波を発生させ、その上に
ロータを接触させることにより、摩擦でロータを
回転させるものである。 Further, as another conventional example, there is one shown in Japanese Patent Application Laid-Open No. 148682/1982. In this example, the entire vibration of the piezoelectric element is transmitted to the vibrating body, and by vibrating one waveform with a 90° phase shift from the other waveform, a traveling wave is generated on the surface of the vibrating body, and a rotor is placed on top of the traveling wave. By making contact, the rotor is rotated by friction.

この例によると、逆転も可能であるが、常に振
動子全体にエネルギを与える必要があり、しかも
圧電素子の反対側への振動は吸収してやる必要が
ある。このためエネルギロスが大きく、効率向上
に難がある。また、リニアモータの形成には進行
波を循環させる方策を取らなければ、エネルギロ
スが大きすぎて問題に成らず、その循環方法も極
めて難かしい。 According to this example, reversal is also possible, but it is necessary to always apply energy to the entire vibrator, and moreover, it is necessary to absorb vibrations to the opposite side of the piezoelectric element. Therefore, energy loss is large and it is difficult to improve efficiency. Furthermore, in forming a linear motor, unless a measure is taken to circulate the traveling waves, the energy loss is too large to be a problem, and the circulation method is also extremely difficult.

〔発明の目的〕[Purpose of the invention]

この発明は、振動子と接触部材とが最大振動振
幅の位置で確実に接触し安定な駆動力が得られる
ようにすることにより、低消費電力で効率の良い
圧電駆動装置を提供することを目的とする。 An object of the present invention is to provide a piezoelectric drive device with low power consumption and high efficiency by ensuring that a vibrator and a contact member are in contact with each other at the position of maximum vibration amplitude to obtain stable driving force. shall be.

〔発明の開示〕[Disclosure of the invention]

この発明の圧電駆動装置は、金属弾性材料にて
コ字状またはロ字状に形成されしかも一対の対向
辺の断面形状が各々方形である振動体を少なくと
も１個有し、この振動体は前記各対向辺の少なく
とも隣合う２面に圧電素子が貼着され、この圧電
素子に所定の高周波電圧が印加されて前記対向辺
が共振振動する振動子と、前記各対向辺の隣合う
圧電素子に位相差を持たせて高周波電圧を印加す
る電源装置と、前記振動子の対向辺の各１面に接
触される接触部材と、この接触部材と前記振動子
の少なくとも一方に前記振動子の振幅最大部付近
に位置して設けられて前記接触部材と前記振動子
との接触部分となる突部とを備え、前記振動子の
対向辺の最大振幅部が円または楕円運動をするこ
とにより、前記接触部材または振動子のいずれか
が駆動されるものである。 The piezoelectric drive device of the present invention has at least one vibrating body formed of a metal elastic material in a U-shape or a square-shape and having a pair of opposing sides each having a rectangular cross-sectional shape. A piezoelectric element is attached to at least two adjacent sides of each opposing side, and a predetermined high-frequency voltage is applied to the piezoelectric element, and the opposing side vibrates resonantly. a power supply device that applies a high frequency voltage with a phase difference; a contact member that contacts one side of each opposing side of the vibrator; and a contact member that applies a maximum amplitude of the vibrator to at least one of the contact member and the vibrator. a protrusion that is located near the contact member and serves as a contact portion between the contact member and the vibrator, and the maximum amplitude portion of the opposite side of the vibrator makes a circular or elliptical motion, so that the contact Either the member or the vibrator is driven.

この発明の構成によると、各振動体の各対向辺
の隣り合う２面に貼付けた圧電素子に位相差を持
たせた高周波電圧を印加するので、各対向辺は最
大振幅部が円または楕円運動をする。この対向辺
の１面に接触部材が接触するので、この接触部材
または振動子のいずれかが駆動され、機械的駆動
力が得られる。 According to the configuration of the present invention, a high frequency voltage with a phase difference is applied to the piezoelectric elements attached to two adjacent faces of each opposing side of each vibrating body, so that the maximum amplitude portion of each opposing side moves in a circular or elliptical motion. do. Since the contact member comes into contact with one of the opposing sides, either the contact member or the vibrator is driven, and a mechanical driving force is obtained.

この場合に、各振動体はコ字状またはロ字状と
してあるので、その両対向辺が互いに共振し、大
きな振幅が得られる。そのため、電気的エネルギ
を効率良く機械的駆動力に変換できる。また、振
動体の共振は、２本の対向辺が連続した基端部に
おいて非振動状態となるように行なわれるので、
基端部を支持部とすることにより、支持によつて
振動を妨げることがなく、このことからも高効率
が得られる。また、このように振動体に振動しな
い箇所があることから、振動子と接触部材のいず
れを固定側としても可動側としても用いることが
できる。さらに、振動体は２本の対向辺を有し、
この両方が接触部材に接触し、両方の振動による
駆動力が相加的に働き、接触点が多点化される。
そのため、摩耗が軽減され、かつ安定した駆動が
可能となる。 In this case, since each vibrating body is U-shaped or square-shaped, both opposing sides resonate with each other and a large amplitude can be obtained. Therefore, electrical energy can be efficiently converted into mechanical driving force. In addition, since the vibration body resonates in a non-vibrating state at the base end where the two opposing sides are continuous,
By using the base end portion as a support portion, vibrations are not hindered by the support, and high efficiency can also be obtained from this. Furthermore, since there are parts of the vibrating body that do not vibrate, either the vibrator or the contact member can be used as either a fixed side or a movable side. Furthermore, the vibrating body has two opposing sides,
Both of them come into contact with the contact member, and the driving force generated by both vibrations acts additively, thereby increasing the number of contact points.
Therefore, wear is reduced and stable driving is possible.

また、接触部材と振動子との少なくとも一方
に、振動子の最大振幅部付近に位置して互いの接
触部分となる突部を設けたので、振動子あるいは
接触部材の面精度に左右されずに、振動子と接触
部材が確実に最大振幅部付近で接触することがで
き、このことから非常に大きな効率を得ることが
できる。 In addition, since a protrusion is provided on at least one of the contact member and the vibrator, which is located near the maximum amplitude part of the vibrator and becomes a contact area with each other, it is not affected by the surface precision of the vibrator or the contact member. , the vibrator and the contact member can reliably come into contact near the maximum amplitude portion, and from this, very high efficiency can be obtained.

実施例 この発明の第１の実施例を第１図ないし第５図
に基づいて説明する。この圧電駆動装置は、リニ
アモータに適用した例であり、金属弾性材料にて
コ字状に形成されしかも一対の対向辺３の断面形
状が各々方形である１個の振動体２からなり、こ
の振動体２は前記各対向辺３の隣合う２面に圧電
素子４が貼着され、この圧電素子４に所定の高周
波電圧が印加されると対向辺３が共振振動する振
動子１と、各対向辺３の隣合う圧電素子４に位相
差を持たせて高周波電圧を印加する電源装置５
と、振動子１の対向辺３の各１面に接触せしめら
れる接触部材６と、この接触部材６に対向辺３の
最大振幅部付近に位置して設けた突部６ａとを備
え、振動子１の対向辺３の最大振幅部が円または
楕円運動をすることにより、接触部材６または振
動子１のいずれかが駆動されるものである。突部
６ａは接触部材６そのものでもよく、また別の部
材を貼着したものでも良い。対向辺３の最大振幅
部は、１次モードで振動させる場合は対向辺３の
長手方向の中心部となる。Embodiment A first embodiment of the present invention will be described based on FIGS. 1 to 5. This piezoelectric drive device is an example applied to a linear motor, and consists of one vibrating body 2 made of a metal elastic material in a U-shape and having a pair of opposing sides 3 each having a rectangular cross-sectional shape. The vibrating body 2 has a piezoelectric element 4 attached to two adjacent surfaces of each of the opposing sides 3, and a vibrator 1 whose opposing sides 3 vibrate resonantly when a predetermined high frequency voltage is applied to the piezoelectric element 4. Power supply device 5 that applies high frequency voltage to adjacent piezoelectric elements 4 on opposing sides 3 with a phase difference
, a contact member 6 that is brought into contact with each side of the opposite sides 3 of the vibrator 1, and a protrusion 6a provided on the contact member 6 near the maximum amplitude part of the opposite side 3. Either the contact member 6 or the vibrator 1 is driven by the circular or elliptical movement of the maximum amplitude portion of the opposite side 3 of the vibrator 1 . The protrusion 6a may be the contact member 6 itself, or may be formed by attaching another member. The maximum amplitude portion of the opposing side 3 is the center in the longitudinal direction of the opposing side 3 when vibrating in the first mode.

振動体２はエリンバ等の恒弾性体を用いている
が、温度に対する安定性が特に要求されていない
ときは、一般の鋼材等他の金属材料を用いてもよ
い。振動体２の基端部２ａは、固定しても振動に
影響を与えない長さをとり、第２図のように基台
７に固定してある。基台７に対し、接触部材６は
相対的に第１図の矢印Ｐ方向へ進退移動自在とな
る様にガイド手段（図示せず）で支持してある。 The vibrating body 2 is made of a constant elastic body such as Erinba, but if stability against temperature is not particularly required, other metal materials such as general steel may be used. The base end 2a of the vibrating body 2 has a length that does not affect vibration even when fixed, and is fixed to a base 7 as shown in FIG. 2. The contact member 6 is supported by guide means (not shown) so that it can move forward and backward relative to the base 7 in the direction of arrow P in FIG.

電源装置５は、第３図に示すように高周波電源
８と90°移相器９とを有し、各圧電素子４，４1〜
４4に同図のように電圧を印加する。同図の
の符号は分極の極性を示す。 The power supply device 5 has a high frequency power supply 8 and a 90° phase shifter 9, as shown in FIG .
4 Apply voltage to 4 as shown in the figure. The symbol in the figure indicates the polarity of polarization.

動 作 振動体２の２本の対向辺３の各圧電素子４1〜
４4に、第３図の電源装置５で高周波電圧を印加
して励振すると、各対向辺３はそれぞれの圧電素
子４1〜４4の励振に従つて縦および横方向に振動
する。このとき圧電素子４2，４4に圧電素子４1，
４3よりも90°位相を遅らせた電圧を印加すると、
振動子１の対向辺３の最大振幅部である中心部の
Ｘ点、Ｙ点は、第４図の様な円または楕円軌道を
描いて運動する。したがつて、対向辺３の１面に
接触部材６が接触するように配置してあると、接
触部材６は矢印Ｐ方向に直線的に移動する。Ｘ
点、Ｙ点の楕円軌道の偏平度は、対向辺３の曲げ
方向による曲げ剛性の違いや、各圧電素子４1〜
４4に印加する電圧の大きさ、位相差等により調
整できる。Operation Each piezoelectric element 4 1 on the two opposing sides 3 of the vibrating body 2
4 4 , when a high frequency voltage is applied and excited by the power supply device 5 of FIG. 3, each opposing side 3 vibrates in the vertical and horizontal directions in accordance with the excitation of the respective piezoelectric elements 4 1 to 4 4 . At this time, piezoelectric elements 4 2 and 4 4 have piezoelectric elements 4 1 ,
4 When applying a voltage whose phase is delayed by 90° compared to 3 ,
Points X and Y at the center, which are the maximum amplitude parts of the opposing sides 3 of the vibrator 1, move in circular or elliptical orbits as shown in FIG. Therefore, when the contact member 6 is arranged so as to be in contact with one surface of the opposing side 3, the contact member 6 moves linearly in the direction of the arrow P. X
The flatness of the elliptical orbit of the point and Y point is determined by the difference in bending rigidity depending on the bending direction of the opposing side 3, and the difference in bending rigidity depending on the bending direction of the opposing side 3 , and the
It can be adjusted by adjusting the magnitude of the voltage applied to 4 , the phase difference, etc.

圧電素子４2，４4に90°進み位相の電圧を印加
すれば、第４図と反対回りの軌道を描くことにな
り、接触部材６は矢印Ｐと逆方向に移動する。 If a voltage with a 90° advance phase is applied to the piezoelectric elements 4 2 and 4 4 , the contact member 6 will move in the opposite direction to the arrow P, drawing a trajectory opposite to that shown in FIG. 4 .

このように動作するが、各振動体２はロ字状と
してあるので、その両対向辺３が互いに共振し、
大きな振幅が得られる。そのため、電気的エネル
ギを効率良く機械的駆動力に変換できる。また、
振動体２の共振は、２本の対向辺３が連続した基
端部２ａにおいて第５図Ａのように非振動状態と
なるように行なわれるので、基端部２ａを支持部
とすることにより、支持によつて振動を妨げるこ
とがなく、このことからも高効率が得られる。ま
た、このように振動体２に振動しない箇所がある
ことから、振動子１と接触部材６のいずれを固定
側としても可動側としても用いることができる。
さらに、振動体２は２本の対向辺３を有し、この
両方が接触部材６に接触し、両方の振動により駆
動力が相加的に働き、接触点が多点化される。そ
のため、摩耗が軽減され、かつ安定した駆動が可
能となる。 It operates in this way, but since each vibrating body 2 is square-shaped, its opposite sides 3 resonate with each other,
Large amplitude can be obtained. Therefore, electrical energy can be efficiently converted into mechanical driving force. Also,
The resonance of the vibrating body 2 is performed in such a way that the base end 2a where the two opposing sides 3 are continuous is in a non-vibrating state as shown in FIG. 5A, so by using the base end 2a as a support part, , vibrations are not hindered by the support, which also provides high efficiency. Further, since there are parts of the vibrating body 2 that do not vibrate in this way, either the vibrator 1 or the contact member 6 can be used as either a fixed side or a movable side.
Further, the vibrating body 2 has two opposing sides 3, both of which are in contact with the contact member 6, and the vibrations of both sides act additively to produce a driving force, thereby increasing the number of contact points. Therefore, wear is reduced and stable driving is possible.

また、接触部材６に突部６ａを設けてあるた
め、対向辺３と接触部材６とが、振幅最大部付近
で確実に接触する。そのため、大きな推進力を得
ることとなり、高効率が得られる。 In addition, since the contact member 6 is provided with the protrusion 6a, the opposing side 3 and the contact member 6 reliably contact near the maximum amplitude portion. Therefore, a large propulsion force is obtained, resulting in high efficiency.

この実施例では、対向辺３を第５図Ａのように
1stモードで振動させる場合につき説明したが、
第５図Ｂ，Ｃに示すように、2ndモードや3rdモ
ード等、高次モードで振動させると、対向辺３の
接触部材６に対する接触点をより一層多くでき
る。これにより、接触点における摩耗をより一層
少なくし、かつ動作の安定を図ることができる。 In this embodiment, the opposite side 3 is as shown in FIG. 5A.
I explained the case of vibrating in 1st mode,
As shown in FIGS. 5B and 5C, by vibrating in a higher order mode such as a 2nd mode or a 3rd mode, the contact points of the opposing side 3 with the contact member 6 can be further increased. This makes it possible to further reduce wear at the contact points and stabilize the operation.

1stモードは、対向辺３の長手方向につき、１
枚の圧電素子４を貼り付けた場合に発生する。
2ndモードは、この１枚の圧電素子４を長手方向
に２分割し、分極方向を反対にして貼付けたとき
に発生する。3rdモードは、１枚の圧電素子４を
長手方向に３分割し、中央の分割圧電素子と両側
の分割圧電素子の分極方向を反対として貼り付
け、各分割圧電素子の同一面側の電極を共通とし
て同一の電圧を印加したときに発生する振幅モー
ドを示す。高次モードで振動させる場合、接触部
材６の突部６ａは、各モードでの最大振幅部のす
べてに配設する。すなわち、ｎ次モードの時には
ｎ個の突部６ａを設ける。 In the 1st mode, 1
This occurs when two piezoelectric elements 4 are attached.
The 2nd mode occurs when this single piezoelectric element 4 is divided into two parts in the longitudinal direction and pasted together with the polarization directions reversed. In the 3rd mode, one piezoelectric element 4 is divided into three parts in the longitudinal direction, and the central divided piezoelectric element and the divided piezoelectric elements on both sides are pasted with opposite polarization directions, and the electrodes on the same side of each divided piezoelectric element are common. This shows the amplitude mode that occurs when the same voltage is applied as . When vibrating in a higher order mode, the protrusions 6a of the contact member 6 are arranged at all of the maximum amplitude parts in each mode. That is, in the n-th mode, n protrusions 6a are provided.

なお、前記実施例では突部６ａの断面形状を円
弧状としたが、突部６ａは円弧以外の凸曲面の断
面形状であつてもよく、また第６図Ａ，Ｂに示す
ように方形状の断面形状としてもよい。第６図Ｂ
は、２次モードで振動させる場合に用いる接触部
材６である。 In the above embodiment, the protrusion 6a has a circular arc cross-sectional shape, but the protrusion 6a may have a convex cross-sectional shape other than a circular arc, or may have a rectangular shape as shown in FIGS. 6A and B. It is also possible to have a cross-sectional shape of . Figure 6B
is a contact member 6 used when vibrating in a secondary mode.

また、この実施例では、振動子１を接触部材６
の片面だけにしか、接触させていないが、第７図
のように振動体２を複数個用いて、両面に接触さ
せてもよい。この場合、接触部材６の突部６ａ
は、接触部材６の両面に設ける。８は２個の振動
体２を結合したスペーサである。 In addition, in this embodiment, the vibrator 1 is connected to the contact member 6.
Although only one side of the vibrating body 2 is brought into contact with the vibrating body 2, as shown in FIG. 7, a plurality of vibrating bodies 2 may be used and brought into contact with both sides. In this case, the protrusion 6a of the contact member 6
are provided on both sides of the contact member 6. 8 is a spacer that connects the two vibrating bodies 2;

第８図は第４の実施例を示す。この例は、振動
子１側に突部３ａを設けたものである。突部３ａ
は振動子１自身でも、また別の部材でもよい。接
触部材には第１図のように突部６ａを設けたもの
を用いてもよく、また突部６ａを有しないものを
用いてもよい。 FIG. 8 shows a fourth embodiment. In this example, a protrusion 3a is provided on the vibrator 1 side. Projection 3a
may be the vibrator 1 itself or another member. The contact member may be provided with a protrusion 6a as shown in FIG. 1, or may be provided without a protrusion 6a.

第９図は第５の実施例であり、接触部材６′が
支軸１０回りで回転自在な回転型としてある。接
触部材６′には円環状の突部６a′を、振動子１の
最大振幅部と対応して設けてある。振動子１は第
１図または第８図の例と同様のものである。 FIG. 9 shows a fifth embodiment, in which the contact member 6' is of a rotary type that can freely rotate around a support shaft 10. The contact member 6' is provided with an annular protrusion 6a' corresponding to the maximum amplitude part of the vibrator 1. The vibrator 1 is similar to the example shown in FIG. 1 or FIG.

第１０図は第６の実施例であり、振動子１′が
１個のコ字状の振動体２′からなる。接触部材６
は突部６ａを有し、矢印Ｐ方向に進退自在であ
る。 FIG. 10 shows a sixth embodiment, in which the vibrator 1' consists of one U-shaped vibrating body 2'. Contact member 6
has a protrusion 6a and can freely move forward and backward in the direction of arrow P.

第１１図は第７の実施例であり、振動子１′が
コ字形で、かつ接触部材６′が支軸１０回りで回
転自在な回転型としてある。接触部材６′は円環
状の突部６a′を有する。 FIG. 11 shows a seventh embodiment, in which the vibrator 1' is U-shaped and the contact member 6' is of a rotary type that can freely rotate around a support shaft 10. The contact member 6' has an annular projection 6a'.

これら第７図ないし第１１図の各実施例におい
ても、第１の実施例と同様な各利点が得られる。 Each of the embodiments shown in FIGS. 7 to 11 also provides advantages similar to those of the first embodiment.

〔発明の効果〕〔Effect of the invention〕

この発明の圧電駆動装置は、各振動体をコ字状
またはロ字状としてあるので、その両対向辺が互
いに共振し、大きな振幅が得られる。そのため、
電気的エネルギを効率良く機械的駆動力に変換で
きる。また、振動体の共振は、２本の対向辺が連
続した基端部において非振動状態となるように行
なわれるので、基端部を支持部とすることによ
り、支持によつて振動を妨げることがなく、この
ことからも高効率が得られる。また、このように
振動体に振動しない箇所があることから、振動子
と接触部材のいずれを固定側としても可動側とし
ても用いることができる。さらに、振動体は２本
の対向辺を有し、この両方が接触部材に接触し、
両方の振動による駆動力が相加的に働き、接触点
が多点化される。そのため、摩耗が軽減され、か
つ安定した駆動が可能となるという効果がある。 In the piezoelectric drive device of the present invention, each vibrating body is U-shaped or square-shaped, so both opposing sides resonate with each other and a large amplitude can be obtained. Therefore,
Electrical energy can be efficiently converted into mechanical driving force. In addition, since the resonance of the vibrating body occurs in a non-vibrating state at the base end where two opposing sides are continuous, by using the base end as a support part, vibration can be prevented by the support. This also results in high efficiency. Furthermore, since there are parts of the vibrating body that do not vibrate, either the vibrator or the contact member can be used as either a fixed side or a movable side. Furthermore, the vibrating body has two opposing sides, both of which contact the contact member,
The driving force from both vibrations acts additively, and the contact points are multiplied. This has the effect of reducing wear and enabling stable driving.

また、接触部材と振動子との少なくとも一方
に、振動子の最大振幅部付近に位置して互いの接
触部分となる突部を設けたので、振動子あるいは
接触部材の面精度に左右されずに、振動子と接触
部材が確実に最大振幅部付近で接触することがで
き、このことから非常に大きな効率を得ることが
できるという効果がある。 In addition, since a protrusion is provided on at least one of the contact member and the vibrator, which is located near the maximum amplitude part of the vibrator and becomes a contact area with each other, it is not affected by the surface precision of the vibrator or the contact member. , the vibrator and the contact member can reliably come into contact near the maximum amplitude portion, and this has the effect that very high efficiency can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの発明の一実施例の斜視図、第２図
はその破断側面図、第３図はその電源装置のブロ
ツク図、第４図はその動作説明図、第５図はその
振動モード説明図、第６図Ａ，Ｂはそれぞれ第２
の実施例の接触部材の斜視図、第７図は第３の実
施例の破断側面図、第８図は第４の実施例の振動
子の斜視図、第９図は第５の実施例の平面図、第
１０図は第６の実施例の斜視図、第１１図は第７
の実施例の平面図である。 １，１′……振動子、２，２′……振動体、３…
…対向辺、４，４1〜４4……圧電素子、６，６′
……接触部材、６ａ，６a′……突部。 Fig. 1 is a perspective view of an embodiment of the present invention, Fig. 2 is a cutaway side view thereof, Fig. 3 is a block diagram of the power supply device, Fig. 4 is an explanatory diagram of its operation, and Fig. 5 is its vibration mode. Explanatory drawings, Figures 6A and B are the second
FIG. 7 is a cutaway side view of the third embodiment, FIG. 8 is a perspective view of the vibrator of the fourth embodiment, and FIG. 9 is a perspective view of the fifth embodiment. A plan view, FIG. 10 is a perspective view of the sixth embodiment, and FIG. 11 is a perspective view of the seventh embodiment.
FIG. 1, 1'... vibrator, 2, 2'... vibrator, 3...
...Opposing side, 4,4 1 to 4 4 ...Piezoelectric element, 6,6'
...Contact member, 6a, 6a'...Protrusion.

Claims (1)

【特許請求の範囲】 １ 金属弾性材料にてコ字状またはロ字状に形成
されしかも一対の対向辺の断面形状が各々方形で
ある振動体を少なくとも１個有し、この振動体は
前記各対向辺の少なくとも隣合う２面に圧電素子
が貼着され、この圧電素子に所定の高周波電圧が
印加されて前記対向辺が共振振動する振動子と、 前記各対向辺の隣合う圧電素子に位相差を持た
せて高周波電圧を印加する電源装置と、 前記振動子の対向辺の各一面に接触される接触
部材と、 この接触部材と前記振動子の少なくとも一方に
前記振動子の振幅最大部付近に位置して設けられ
て前記接触部材と前記振動子との接触部分となる
突部とを備え、 前記振動子の対向辺の最大振幅部が円または楕
円運動をすることにより、前記接触部材または振
動子のいずれかが駆動される圧電駆動装置。[Scope of Claims] 1. At least one vibrating body is formed of a metallic elastic material in a U-shape or a square-shape, and each of a pair of opposing sides has a rectangular cross-sectional shape, and this vibrating body is connected to each of the above-mentioned a vibrator having a piezoelectric element attached to at least two adjacent sides of the opposing sides, a predetermined high frequency voltage being applied to the piezoelectric element, and causing the opposing sides to vibrate resonantly; a power supply device that applies a high frequency voltage with a phase difference; a contact member that contacts one side of each opposing side of the vibrator; and at least one of the contact member and the vibrator near the maximum amplitude part of the vibrator. a protrusion that is located at and serves as a contact portion between the contact member and the vibrator, and the maximum amplitude portion of the opposite side of the vibrator makes a circular or elliptical motion, thereby causing the contact member or A piezoelectric drive device that drives one of the vibrators.
JP61102547A 1986-05-02 1986-05-02 Piezoelectric driving apparatus Granted JPS62259484A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61102547A JPS62259484A (en) 1986-05-02 1986-05-02 Piezoelectric driving apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61102547A JPS62259484A (en) 1986-05-02 1986-05-02 Piezoelectric driving apparatus

Publications (2)

Publication Number Publication Date
JPS62259484A JPS62259484A (en) 1987-11-11
JPH0552137B2 true JPH0552137B2 (en) 1993-08-04

Family

ID=14330273

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61102547A Granted JPS62259484A (en) 1986-05-02 1986-05-02 Piezoelectric driving apparatus

Country Status (1)

Country Link
JP (1) JPS62259484A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01198284A (en) * 1988-02-02 1989-08-09 Rion Co Ltd Supersonic linear motor
JP2552429Y2 (en) * 1988-05-11 1997-10-29 富士写真フイルム株式会社 Shutter device
JP2543145B2 (en) * 1988-07-12 1996-10-16 松下電器産業株式会社 Ultrasonic motor
US5006749A (en) * 1989-10-03 1991-04-09 Regents Of The University Of California Method and apparatus for using ultrasonic energy for moving microminiature elements

Also Published As

Publication number Publication date
JPS62259484A (en) 1987-11-11

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