JPH05299963A - Electronic parts housing container - Google Patents

Abstract

PURPOSE:To provide a piezoelectric vibrator housing container in which a piezoelectric vibrator can be normally and stably operated for a long time by increasing the strength of the attachment of a metallize wiring layer provided on an insulating substrate to a metallic supporting body which supports the piezoelectric vibrator. CONSTITUTION:The piezoelectric vibrator housing container is constituted of the insulating substrate 1 having a metallize wiring layer 5 derived from an upper face to a bottom face, the metallic supporting body 6 attached to the metallize wiring layer 5 by a local part heating method, which supports the piezoelectric vibrator 4, and a cover body 2. The thickness of the part of the metal supporting body 6 attached to the metallize wiring layer 5 is 20-500mum.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a piezoelectric vibrator housing container for housing a piezoelectric vibrator made of crystal or piezoelectric ceramics.

[0002]

2. Description of the Related Art Conventionally, as shown in FIG. 2, a piezoelectric vibrator housing container for housing a piezoelectric vibrator is made of an electrically insulating material such as alumina ceramics, and is led out from the upper surface to the side surface to the bottom surface. An insulating substrate 11 having a metallized wiring layer 12, a pair of metal supports 15 for supporting a piezoelectric vibrator 14 adhered to the metallized wiring layer 12 via a conductive adhesive 13 made of a polyimide resin or the like, and a bowl. The pair of metal supports 15 are bonded to each other with a conductive adhesive to support the piezoelectric vibrator 14 on the metal supports 15, and then the lids 16 are placed in vacuum. The lower surface of the is bonded to the insulating substrate 11 via a sealing member made of resin, glass or the like, and the piezoelectric vibrator 14 is hermetically sealed inside the container made of the insulating substrate 11 and the lid body 16 to obtain a final product. Of the piezoelectric vibrating element.

[0003]

However, in this conventional container for accommodating the piezoelectric vibrator, the metallized wiring layer in which the metal support 15 is provided on the insulating substrate 11 via the conductive adhesive 13 made of polyimide resin or the like is used. Since it is adhered to 12, and the metal support 15 is usually made of a metal such as Kovar metal or 42 alloy, the Kovar metal or the like has a slightly inferior bondability to a conductive adhesive made of a polyimide resin. When the metal support 15 cannot be firmly adhered to the metallized wiring layer 12 and the piezoelectric vibrator is repeatedly subjected to a vibration larger than the outside, the metal support 15 is dislocated from the metallized wiring layer 12 of the insulating substrate 11 and the piezoelectric element is removed. It has a drawback that the function as a vibration element is lost.

Therefore, in order to solve the above-mentioned drawbacks, it is conceivable to braze the metal support 15 to the metallized wiring layer 12 provided on the insulating substrate 11 via a brazing material such as silver brazing.

However, the metal brazing material 15 is placed on the metallized wiring layer 12 of the insulating substrate 11 with the silver brazing material sandwiched therebetween, and this is passed through a furnace at a temperature of about 900 ° C. to heat the silver brazing material. When the metal support 15 is melted and brazed to the metallized wiring layer 12 provided on the insulating substrate 11, heat at the time of brazing is applied to the entire metal support 15 to deteriorate the springiness of the metal support 15. As a result, the piezoelectric vibrator
There are variations in the vibration frequency of 14 or the piezoelectric vibrator 15
When vibration is repeatedly applied from the outside to the piezoelectric vibrator 14, the vibration is transmitted to the piezoelectric vibrator 14 as it is, the piezoelectric vibrator 14 is damaged, or the piezoelectric vibrator 14 is disengaged from the metal support 15 to cause piezoelectric vibration. It causes a defect that the function as an element is lost.

[0006]

SUMMARY OF THE INVENTION The present invention has been devised in view of the above drawbacks, and an object of the present invention is to provide a piezoelectric material having a strong attachment strength between a metallized wiring layer provided on an insulating substrate and a metal support for supporting a piezoelectric vibrator. An object of the present invention is to provide a container for accommodating a piezoelectric vibrator, which can operate the vibrator normally and stably for a long period of time.

[0007]

According to the present invention, there is provided an insulating substrate having a metallized wiring layer extending from a top surface to a bottom surface, and a metal support for supporting a piezoelectric vibrator attached to the metallized wiring layer by a local heating method. And a lid for storing the piezoelectric vibrator, wherein the metal support has a thickness of 20 to 500 μm at a portion attached to the metallized wiring layer.
It is characterized by being m.

[0008]

According to the container for accommodating the piezoelectric vibrator of the present invention, the metal support supporting the piezoelectric vibrator is provided with a region having a thickness of 20 to 500 μm, and the region is locally formed on the metallized wiring layer provided on the insulating substrate. Since the metal support is attached by the heating method, it is possible to firmly attach the metal support to the metallized wiring layer provided on the insulating substrate, and to effectively prevent the spring deterioration of the metal support. As a result, even if vibrations are repeatedly applied from the outside, some of the vibrations are absorbed by the metal support, causing no damage to the piezoelectric vibrator and no detachment of the piezoelectric vibrator from the metal support. As a result, the piezoelectric vibrator can be stably operated at a constant vibration frequency for a long period of time.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will now be described in detail with reference to the accompanying drawings. FIG. 1 shows an embodiment of a container for accommodating a piezoelectric vibrator of the present invention, in which 1 is an insulating base made of an electrically insulating material, and 2 is a bowl-shaped lid made of the same electrically insulating material. This insulating substrate
A container 3 for housing the piezoelectric vibrator 4 is constituted by 1 and the lid 2.

The insulating substrate 1 is made of a ceramic such as an aluminum oxide sintered body, a zirconium oxide sintered body, a mullite sintered body, an aluminum nitride sintered body, for example, an aluminum oxide sintered body. Is an alumina (Al ₂ O ₃ ), silica (SiO ₂ ), calcia (CaO), magnesia (MgO), etc. The sheet-shaped ceramic green sheet is formed by adopting the doctor budo method or the calendar roll method, and then the ceramic green sheet is appropriately punched to form a predetermined shape and a through hole having an appropriate diameter. Then, finally, a plurality of the ceramic green sheets having the predetermined shape are laminated and fired at a high temperature (about 1600 ° C.).

The insulating base 1 is covered with a metallized wiring layer 5 from the upper surface to the bottom through the inside, and a pair of metal supports 6 are electrically connected to the upper surface of the insulating base 1 of the metallized wiring layer 5. Is attached and fixed, and the bottom surface of the insulating substrate 1 is joined to the wiring conductor portion of the external electric circuit board via a brazing material such as solder.

The metallized wiring layer 5 deposited on the insulating substrate 1 is made of a refractory metal powder such as tungsten, molybdenum, or manganese. The refractory metal powder such as tungsten is mixed with an appropriate organic solvent or solvent. The metal paste thus obtained is applied by printing in advance on the upper and lower surfaces of the ceramic green sheet to be the insulating substrate 1 and in the through-holes by a conventionally known screen printing method or the like to cover the insulating substrate 1 from the upper surface to the bottom through the inside. Be worn.

The metallized wiring layer 5 is an insulating substrate 1
A pair of metal supports 6 is attached to a portion located on the upper surface of the metal support 6, and the pair of metal supports 6 support the piezoelectric vibrator 4 and electrically connect the electrodes of the piezoelectric vibrator 4 to the metallized wiring layer 5. Both ends of the piezoelectric vibrator 4 are bonded and fixed to the pair of metal supports 6 via an adhesive such as polyimide conductive resin, and at the same time, the electrodes of the piezoelectric vibrator 4 are fixed to the metal support 6. It is electrically conducted.

The metal support 6 is nickel silver (Cu-Zn-Ni alloy)
, Kovar metal (Fe-Ni-Co alloy), 42 alloy (Fe-Ni alloy) and other elastic metals.For example, in the case of Kovar metal, iron, nickel, cobalt are weighed to a specified value. This is melted by heat and alloyed to form an ingot (lump) of Kovar, and the ingot is formed into a thin plate by a rolling method, and finally the thin sheet of Kovar metal is punched into a predetermined shape by a conventionally known punching method. Formed by.

Further, the metallized wiring layer of the metal support 6
For example, first, a nickel plating layer and a gold plating layer are deposited on the surface of the metallized wiring layer 5, then a brazing material such as silver brazing and a metal support 6 are sequentially placed on the upper surface, and finally, 100 to 50 between the metal support 6 and the metallized wiring layer 5
It is performed by applying 0 VA of electricity for 5 to 100 msec to locally and instantaneously melt the brazing material. In this case, since the melting and heating of the brazing material is local and instantaneous, the entire metal support 6 is heated and the metal support 6 is heated.
The elasticity (elasticity) of 6 does not deteriorate at all, and as a result, even if vibration is repeatedly applied from the outside, part of the vibration is absorbed by metal support 6 and is bonded to metal support 6. It is possible to cause damage to the existing piezoelectric vibrator 4 and to prevent the piezoelectric vibrator 4 from being detached from the metal support 6.

The metallized wiring layer of the metal support 6
When attaching to metal 5, the thickness of the metal support 6
When the thickness is less than 20 μm, the metal support 6 and the metallized wiring layer 5
In the meantime, for example, when electricity is applied to attach the both, a hole is opened in the attachment part of the metal support 6 and the attachment area becomes narrow, so that the metal support 6 is firmly attached to the metallized wiring layer 5. It becomes impossible to attach it, or the metal support 6 is deformed. If it exceeds 500 μm, the metal support 6
The heat generated when the metal support 6 is attached to the metallized wiring layer 5 spreads over the entire surface of the metal 6, and the spring property (elasticity) of the metal support 6 deteriorates. Therefore, the metal support 6 is specified such that the thickness of the attachment portion attached to the metallized wiring layer 5 is in the range of 20 to 500 μm.

Further, the metal support 6 is a metallized wiring layer.
When attaching the metallized wiring layer 5, the metallized wiring layer 5 is coated with a nickel-plated layer or a gold-plated layer in order to strengthen the attachment of the metal support 6 and the metallized wiring layer 5. It is preferably set to 10.0 to 100 μm.

Further, the metal support 6 is a metallized wiring layer.
When attaching to 5, the metallized wiring layer 5 surface is pre-deposited with a nickel-plated layer, a gold-plated layer and a brazing material, and then a 0.5-2.0 μm gold film is deposited on the surface of the brazing material. If so, the contact resistance between the metal support 6 and the metallized wiring layer 5 becomes uniform, and the metal support 6 can be firmly attached to the metallized wiring layer 5. Therefore, when attaching the metal support 6 to the metallized wiring layer 5, a nickel plating layer,
It is preferable to sequentially deposit a gold plating layer, a brazing material, and a film made of gold.

Further, when the metal support 6 is attached,
When gold is applied by plating to a thickness of 0.5 to 2.0 μm on the outer surface of the metal support 6, especially the surface to be attached to the metallized wiring layer 5, the metal support 6 and the metallized wiring layer 5 are attached. It can be made even stronger. Therefore, it is preferable to deposit a gold plating layer of 0.5 to 2.0 μm on the outer surface of the metal support 6, particularly the surface attached to the metallized wiring layer 5.

Furthermore, when the metal support 6 is attached to the metallized wiring layer 5 as described above, the brazing material interposed between the metal support 6 and the metallized wiring layer 5 is silver braze or the like.
By placing a foil-shaped foil of about 10.10 to 100.0 μm between them, or by pre-depositing a molten brazing material on the surface of the metallized wiring layer 5, the brazing material is further preliminarily attached to the metal support 6. Metal support 6 by pressing
And metallized wiring layer 5.

[0021]

On the other hand, the insulating base body 1 has a bowl-shaped lid body joined to the outer peripheral surface of the upper surface thereof by a sealing member such as glass, resin or brazing material, whereby a container 3 composed of the insulating base body 1 and the lid body 2 is formed. The piezoelectric vibrator 4 is hermetically sealed inside.

Similar to the insulating substrate 1, the lid 2 is made of an electrically insulating material such as an aluminum oxide sintered body or an aluminum nitride sintered body. For example, in the case of an aluminum oxide sintered body, alumina, silica, Appropriate organic solvent and solvent are added to and mixed with raw material powder such as calcia and magnesia, and then this is filled in a bowl-shaped mold and is molded into a predetermined shape by applying a predetermined pressure, and finally the above-mentioned molded product About 16
It is manufactured by firing at a temperature of 00 ° C.

Thus, according to the container for accommodating the piezoelectric vibrator of the present invention, both ends of the piezoelectric vibrator 4 are fixed to the pair of metal supports 6 by the conductive adhesive, and the piezoelectric vibrator 4 is fixed to the metal support 6.
Then, the lower surface of the bowl-shaped lid body 2 is bonded to the insulating base body 1 in vacuum by a brazing material such as solder, an epoxy resin, an acrylic resin, or a sealing member made of low-melting glass, etc. The vibrator 4 is hermetically sealed in the container 3 composed of the insulating base 1 and the lid 2 to form a piezoelectric vibrating element as a final product.

The present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the scope of the present invention. For example, in the above-mentioned embodiments, the metal support 6 and Attach metallization wiring layer 5 to metal support 6
And 100 to 500 VA of electricity between 5 and 10
Although it was performed by applying for 0 msec, high frequency induction heating, local heating by concentrating heat of a halogen lamp, or local heating using a laser beam may be adopted.

In the above-described embodiments, the metallized wiring layer 5 provided on the insulating substrate 1 is made of a high melting point metal powder such as tungsten or molybdenum. However, the metallized wiring layer 5 is formed of a high melting point metal such as tungsten. The powder is not limited, and silver-palladium (Ag-Pd), copper (Cu), or the like may be used.

Furthermore, in the above embodiment, the metal support 6
The brazing material having the metallized wiring layer 5 and the metallized wiring layer 5 interposed therebetween is locally heated and melted for attachment, but the brazing material is not always necessary, and a nickel plating layer or a gold plating layer is applied. Metallized wiring layer 5
The metal support 6 can be directly attached to the metal support 6, or can be attached with another metal interposed between the metallized wiring layer 5 and the metal support 6.

[0028]

According to the container for accommodating the piezoelectric vibrator of the present invention, the metal support for supporting the piezoelectric vibrator is attached to the metallized wiring layer adhered to the insulating substrate by the local heating method. The attachment between the metallized wiring layer and the metallized wiring layer is local and instantaneous, and as a result, the metal support is never heated and its spring property is deteriorated. Therefore, in the piezoelectric vibrator housing container of the present invention, the vibration frequency of the piezoelectric vibrator is always constant, and even if vibration is repeatedly applied to the piezoelectric vibrator from outside, a part of the vibration is absorbed by the metal support. Therefore, the piezoelectric vibrator bonded to the metal support is damaged, and the piezoelectric vibrator is never detached from the metal support.

Further, according to the piezoelectric vibrator accommodating container of the present invention, when the metal support is attached to the metallized wiring layer attached to the insulating substrate by the local heating method, the thickness of the attachment portion of the metal support is Since it is 20 to 500 μm, the metal support can be firmly attached to the metallized wiring layer without deteriorating the spring property, which also keeps the piezoelectric vibrator housed inside for a long time and is stable. Can be activated.

[Brief description of drawings]

FIG. 1 is a cross-sectional view showing an example of a container for accommodating a piezoelectric vibrator of the present invention.

FIG. 2 is a cross-sectional view of a conventional piezoelectric vibrator housing container.

[Explanation of symbols]

 1 ... Insulating substrate 2 ... Lid 3 ... Container 4 ... Piezoelectric vibrator 5 ... Metallized wiring Layer 6 ... Metal support

Claims (1)

[Claims] 1. An insulating substrate having a metallized wiring layer extending from a top surface to a bottom surface, a metal support for supporting a piezoelectric vibrator attached to the metallized wiring layer by a local heating method, and a lid. A container for storing a piezoelectric vibrator, wherein the metal support has a thickness of 20 to 500 μm at a portion attached to the metallized wiring layer.