JPH0430318A - Manufacture of magnetic head and grinding holder - Google Patents

Abstract

PURPOSE:To attain simultaneous grinding of many magnetic heads by providing a spring having a projection to depress the rear face center of a magnetic head slider being accommodated for supporting the magnetic heads. CONSTITUTION:A support plate 11 accommodating and supporting many magnetic head sliders 10, a spring plate 15 with many springs 14 pressing the magnetic head sliders 10 onto a grinding face plate 13 formed thereto, a pressing plate 17 having the spring plate 15 with respect to the support plate 11, a weight holder 18 placed on the pressing plate 17 and a weight 19 placed on the weight holder 18 are employed for the manufacture. Then the magnetic head holders 10 are supported by the support plate 11 to expose the slider face and pressed on the grinding face plate 13 with the springs 14 to lap the slider face. Thus, the magnetic head grinding is implemented at high efficiency to eliminate a personal error in the grinding, and the production of the magnetic heads is implemented with high reliability.

Description

[Detailed Description of the Invention] [Summary] Regarding a method for manufacturing a thin film magnetic head and a polishing holder used when polishing a slider surface, the present invention aims to process the slider surface of a magnetic head with high efficiency and precision. The magnetic head slider is equipped with a support plate for holding the magnetic head with a hole capable of accommodating the magnetic head slider, and a spring having a protrusion capable of pressing the central part of the back of the magnetic head slider housed in the iron man. The medium facing surface is configured to be polished.

[Industrial application field]

The present invention relates to a method for manufacturing a thin film magnetic head and a polishing holder used when polishing a slider surface.

As the recording density of magnetic disk devices continues to increase,
It is important to have magnetic head levitation technology to bring the magnetic pole close to the edge and precise processing technology for the tip of the magnetic head.

In recent years, the flying height of magnetic heads has decreased to around 0.15ρ, and the distance between the slider and the recording medium surface has become significantly narrower. For this reason, there is an increasing demand to maintain a highly flat slider surface of 0.05 m or less and to reduce concavities (IJ recesses) in the magnetic pole portion and machining distortions at the tips of the magnetic poles.

[Conventional technology]

FIG. 11 shows a conventional method of manufacturing a thin film magnetic head. In this manufacturing method, first, as shown in the same figure (a), 1203
・A large number of magnetic head elements consisting of magnetic poles 2 and coils 3 are formed on a TiC ceramic substrate 1 by a thin film method, and this is cut into a rod shape as shown by the dashed line. After forming the slider 4 by polishing as shown in Figure (b), it is cut and separated from the lid at the position indicated by the - dotted chain line to form each magnetic head 5 as shown in Figure (C). In order to correct the distortion of the slider surface 4a, the slider surface 4a is hand rubbed one by one.

[Problem to be solved by the invention]

This lapping work has originally been a problem in that it is inefficient, requires skill, and varies from person to person, resulting in variations in the finish of the slider surface. In addition, as magnetic heads have become smaller in recent years, the work has become increasingly difficult, and there has been a need to mechanize the work.

In addition, as shown in the cross-sectional view of FIG. 12, in the conventional magnetic head, a thin film magnetic head element consisting of an N+Fe magnetic pole 2 and a conductive coil 3 is attached to a slider 4 made of ^β20°・TiC ceramic through an alumina protective film 6. However, the hardness of Al2O2/TiC of the slider 4 is Hv~2000, and the hardness of the alumina of the protective film 6 is Hv~800, whereas the NiFe of the magnetic pole 2 has a Vickers hardness of Hv~2000.
Hv~300, so magnetic pole 2 is used when polishing the slider surface.
The tip of the holder is shaved off more than the other parts, creating a recess 7. Even if this level difference is set to 0.032=-, for example, if the flying height of the slider is 0.12 to 0.157-, it will have an adverse effect on recording and reproduction. As a method of reducing this dent, it has been proposed to form a protective film or a magnetic film on the magnetic pole part and polish it by a predetermined amount. For example, Japanese Patent Application Laid-Open No. 62-154319. However, none of the conventional polishing methods can precisely set the minute amount of machining on the magnetic head slider surface.
Such precision machining was impossible.

In view of the above-mentioned conventional problems, a first object of the present invention is to provide a holder for polishing a magnetic head that allows processing of a magnetic head slider surface with high efficiency and precision.

A second object of the present invention is to provide a method for manufacturing a magnetic head for processing the slider surface of a magnetic head in which a hard protective film is provided on the slider surface.

[Means to solve the problem]

In order to achieve the above first object, the magnetic head polishing holder of the present invention includes a magnetic head holding plate 11 provided with a hole 24 capable of accommodating the magnetic head slider 10,
A spring 14 having a protrusion 14a capable of pressing the rear center portion of the magnetic head slider 10 housed in the magnetic head slider 10, and polishing the medium facing surface of the magnetic head slider 10. The pressurizing force is transmitted to the magnetic head slider 10 via a presser plate 31 having a protrusion 31b facing the central part of the back surface of the magnetic head slider 10. Also, a hole 24 in which the magnetic head slider 10 can be accommodated. A support plate 11 for holding a magnetic head provided with a support plate 11 and a flexible member 3 that presses a magnetic head slider 10 housed in the iron man 24.
4, and the pressing force of the flexible member 34 is applied to the magnetic head slider.
10, and protrusions 31a and 3lb that contact the flexible member 34 and the magnetic head slider 10 are provided on the front and back sides of the insertion/extraction plate 29. do. (Corresponding to Claim 3) Further, the support plate 11 for holding the magnetic head, the presser plate 29, and the spring 14 are each provided with a protrusion or a recess, and the position is determined by combining the protrusion and the recess. (Corresponding to Claim 4) Furthermore, in order to achieve the second object, the method for manufacturing a magnetic head of the present invention uses the above magnetic head polishing holder, and a hard protective film 43 is formed on the slider surface.
holding the magnetic head slider 40 formed with
It is characterized in that the step of the magnetic pole portion 41 is reduced by sliding it on a polishing surface plate to perform polishing.

[For production]

According to this polishing holder, it is possible to polish a large number of magnetic heads at the same time, and furthermore, it is possible to equalize the respective processing pressures so that each magnetic head is processed uniformly. Further, by using a spring or a presser plate, the center point of the magnetic head can be pressurized, and uneven contact of the load on the slider surface can be prevented, thereby achieving even polishing.

In addition, recesses can be reduced by forming a hard protective film or a magnetic thin film on the magnetic pole and then polishing it by a predetermined amount to leave the hard thin film on the magnetic pole. This is because while the magnetic pole tip is covered with a hard protective film, it is less likely to be scraped and the difference in level is reduced.

At the tip of the magnetic pole, there is usually an altered layer whose magnetism has deteriorated due to machining. This portion can be removed by using an atomic processing method such as the ion milling method or a non-contact machining method such as the float polishing method or the EEM method. After the tips of the magnetic poles are removed by these methods, the above-mentioned hard protective film is formed and precisely polished, making it possible to create a head with small recesses and good magnetic properties.

〔Example〕

FIG. 1 is a diagram showing a first embodiment of a magnetic head polishing holder according to the present invention together with a magnetic head slider and a polishing surface plate, where (a) is a plan view and (b) is a view taken along the line b--b of figure a. A cross-sectional view along line b, and (C) is a partially enlarged view of figure b.

As shown in the figure, this embodiment includes a support plate 11 that can accommodate and support a large number of magnetic head sliders 10, a retaining ring 12 that adhesively supports the support plate 11 on the outer periphery, and a magnetic head slider 10. a spring plate 15 formed with a large number of springs 14 for pressing the polishing surface plate 13; and a pressing plate 17 connected to the retaining ring 12 with screws 16 with the spring plate 15 sandwiched between the support plate 11. and the pressing plate 1
A weight holder 18 placed on 7 and the weight holder 18
It consists of a weight 19 placed on top.

To further explain each member in detail, the support plate l1 is made by applying N1 plating 21, 21' to a thickness of about 50 kat on both the front and back surfaces of a thin copper plate 20, as shown in FIG.
A pattern 22 as shown in FIG. 3(a) is formed on the N1 plating layer 21 on the front surface), and a pattern 23 as shown in FIG. 3(b) is formed on the Ni layer 21' on the other surface (back surface) by etching. Furthermore, the central copper plate 20 is etched through these patterns 22 and 23 to form a hole 24 for accommodating the magnetic head slider. The pattern 22 consists of a rectangular hole 22a into which the magnetic head slider is inserted, and a semicircular convex portion 22b into which tweezers for handling the magnetic head slider can be inserted, and the pattern 23 consists of two parallel holes into which the magnetic head slider rails are inserted. rectangular hole 23
It consists of a and 23b. Then, as shown in FIG. 4, the magnetic head 10 can be accommodated. Further, as shown in FIG. 2, a plurality of holes 24 (48 holes in the figure) are arranged on two circumferences. Note that 25 is a recess for positioning.

As shown in FIG. 5, the spring plate 15 is made by etching a phosphor bronze disk with an N1 ladle to form a U-shaped hole 26 to form the spring 14, and a magnetic head slider in the center at the tip of the spring 14. The protrusion 14a that contacts and presses N
i It is formed by leaving W5 plate. Note 27
is a positioning protrusion, which is formed of Ni plating.

As shown in FIG. 1(C), the pressing plate 17 has a recess 17a formed therein so as not to hinder the operation of the spring 14. Further, the pressing plate 17 and the weight holder 18 are prevented from spinning idly by a pin 28 embedded in the weight holder 18.

A plurality of weights 19 are prepared, and the magnetic head slider 1
The load applied to 0 can be adjusted.

Each member formed as described above is assembled as shown in FIG. The magnetic head slider 10 is supported on the support plate 11 so that the slider surface thereof is exposed, and the slider surface can be lapped by pressing against the polishing platen 13 with the spring 14.

According to this embodiment, since the projection 14a of the spring 14 can press the center of the magnetic head slider, it is possible to prevent the load from being applied unevenly to the slider surface. Furthermore, since a large number of magnetic head sliders can be mechanically finished at one time, the efficiency of head processing can be increased.

FIG. 6 is a sectional view of a main part of a second embodiment of the magnetic head polishing holder of the present invention.

This embodiment is basically the same as the previous embodiment, except that a presser plate 29 is provided between the spring plate 15 and the support plate 11.
This is because the . As shown in FIG. 7, this presser plate has a U-shaped hole 30 formed by etching to form a lever-shaped portion 31, and a protrusion 31a is formed on the front and back of the plate with an N1 plating layer.
and 31b are formed so that the protrusion 31b can come into contact with the center of the back of the magnetic head slider housed in the support plate 11 as shown in FIG. Note that 32 and 33 are positioning protrusions, which are formed by N1 plating. In this case, a recess 15b for positioning is formed in the spring plate 15, and the spring plate 15 is assembled as shown in FIG. This assembly can be performed with good workability and high precision by combining the hole 25 of the support plate 11, the protrusion 33 of the presser plate 29, the other protrusion 32 of the presser plate 29, and the recess IE15b of the spring plate 15. can.

According to this embodiment, the force generated by the spring 14 of the spring plate 15 is applied to the magnetic head slider by the protrusion 31b of the holding plate 29.
Since it is transmitted to the center of 10, uneven contact does not occur. The presser plate 29 is made of a thin plate (0.1 mm thick) to be easily bent, and the spring 14 is made of a thick plate (0.2 mm thick) to generate a strong restoring force, thereby increasing the flatness of the slider surface of the magnetic head to 300 mm. Good flat surface processing is possible for up to 400 people.

FIG. 8 is a sectional view of a main part showing a third embodiment of a holder for polishing a magnetic head according to the present invention. In this figure, the same parts as in FIG. 6 are designated by the same reference numerals.

This embodiment is basically the same as the previous embodiment shown in FIG. 6, except that the spring plate 15 of the previous embodiment is removed.
The flexible member 34 is used instead of the spring 14. Note that the flexible member 34 is made of rubber or the like. Further, by increasing or decreasing the area of 31a, it is possible to increase or decrease the pressing force of the rubber, and it is possible to select an appropriate pressing force for the polishing load.

This embodiment configured in this manner prevents uneven contact of the slider surface and enables a simple configuration without a spring. Note that when the magnetic head slider is directly pressed by a flexible member, the load tends to be unevenly applied due to the thickness error of the flexible member, but in this embodiment, the center of the magnetic head slider is applied by the action of the presser plate 29. Pressure can be applied to prevent uneven contact during polishing.

Next, a first embodiment of the method for manufacturing a magnetic head of the present invention will be described with reference to FIG. In the figure, reference numeral 40 indicates a slider surface of a magnetic head slider 140a, 41 indicates a magnetic pole portion of a thin film magnetic head, and 42 indicates a gap portion.

In this embodiment, a hard protective film 43 such as a diamond-like carbon film is coated on the slider surface of the magnetic head slider 10, which has been roughly machined as shown in (a), as shown in (b).
The protective film 43 is formed to a thickness of 0 to 1000 ml, and then this protective film 43 is
was lapped on a polishing surface plate using the magnetic head polishing holder of the present invention, excess protective film 43 was removed, and (C
) After passing through the steps in (d) and (e), the hard protective film 43 is left slightly (less than 200 Å) on the magnetic pole portion 41 and completed.

According to this embodiment, since the hard protective film 43 such as a diamond-like carbon film is hard, the level difference on the magnetic pole portion 41 is reduced. By this method, the recess can be reduced from 500 to 200 Å or less, and further, by leaving the hard protective film 43, corrosion of the magnetic pole can be prevented, and the reliability of long-term operation of the magnetic head can be improved.

FIG. 10 is a diagram showing a second embodiment of the method for manufacturing a magnetic head of the present invention. In this figure, the same parts as in FIG. 9 are designated by the same reference numerals.

In this embodiment, a machining strain removal process is added to the process of the previous embodiment, and first, the slider surface 40a and the magnetic pole portion 42 are ground by an ion mill from the rough machining state shown in FIG.

Since the amount of scraping by the ion mill is as small as about 0.1 Ra, the surface roughness of the slider that normally occurs can be suppressed to a small level. Since the cutting speed of an ion mill is about 100 people/minute, cutting of 0.1j- is as fast as about 10 minutes.

The magnetic pole part 42 has a cutting speed that is about 20 to 30% higher than that of the slider part, so when ion milling the magnetic pole part 42 has a dent of 5.
Although the number of workers increases by about 0 to 100, there is no problem because recesses can be reduced by polishing using the magnetic head polishing holder of the present invention. In this example, after ion milling, a hard protective film 43 such as a diamond-like carbon film is formed on the slider surface 40a by sputtering as shown in FIG. Then wrap the hard protective film 43 on the magnetic pole part 41 as shown in (d) to (f).
Complete with a small amount left.

According to this embodiment, the conventional recess, which was about 500, can be reduced to 200 Å or less. Furthermore, since the use of a hard protective film prevents corrosion of the magnetic poles, the reliability of long-term operation of the magnetic head can be increased.

〔Effect of the invention〕

As explained above, with the magnetic head polishing holder of the present invention, after cutting the magnetic heads into each slider, many magnetic heads can be mechanically finished (wrapped) at the same time, making magnetic head processing highly efficient. can. Furthermore, by eliminating individual differences in processing operations, it is possible to increase the reliability of magnetic head production. Furthermore, a magnetic head with fewer recesses can be manufactured.

[Brief explanation of drawings]

FIG. 1 is a diagram showing a first embodiment of the holder for polishing a magnetic head of the present invention, FIG. 2 is a diagram showing a support plate of the first embodiment of the holder for polishing a magnetic head of the present invention, and FIG. 4 shows the pattern of the support plate of the first embodiment of the magnetic head polishing holder of the present invention, and FIG. 4 shows the pattern of the support plate of the first embodiment of the magnetic head polishing holder of the present invention supporting the magnetic head. FIG. 5 is a diagram showing the spring plate of the first embodiment of the magnetic head polishing holder of the present invention, and FIG. 6 is a diagram showing the second embodiment of the magnetic head polishing holder of the present invention. FIG. 7 is a diagram showing a presser plate of a second embodiment of the magnetic head polishing holder of the present invention, FIG. 8 is a diagram showing a third embodiment of the magnetic bend polishing holder of the present invention, FIG. 9 is a diagram showing a first embodiment of the method of manufacturing a magnetic head of the present invention, FIG. 10 is a diagram showing a second embodiment of the method of manufacturing a magnetic head of the present invention, and FIG. 11 is a diagram of a conventional method of manufacturing a magnetic head. FIG. 12 is a cross-sectional view showing a conventional magnetic head. In the figure, 10 is a magnetic head slider, 11 is a support plate, 12 is a retaining ring, 13 is a polishing surface plate, 14 is a spring, 15 is a spring plate, 16 is a screw, 17 is a pressing plate, and 18 is a weight holder. , 19 is a weight, 20 is a copper plate, 21 and 21' are Ni plating, 22.23 is a pattern, 24 is a hole, 25 is a positioning hole, 26.30 is a U-shaped hole, 27.32.33 is a positioning hole 28 is a pin, 29 is a holding plate, 34 is a flexible member, 41 is a magnetic pole portion, 42 is a gap portion, and 43 is a hard protective film. Figures (a) and (b) Figure 51g Planar view showing the spring plate of the first embodiment of the holder for polishing a magnetic head of the present invention Second embodiment of the holder for polishing a magnetic head of the present invention Figure '1PJ6 showing an example of the following Figure 10... Magnetic head slider 11... Support plate 13... Polishing surface plate 14... Subli/die i5... Spring plate 17... Pressing plate 25... ...Positioning hole 29...Press plate 31...Lever-shaped portion 32, filter 5...Positioning protrusion (a) Plan view showing the press plate of the second embodiment of the magnetic head polishing holder of the present invention Fig. 17 Fig. 13... Polishing surface plate 17... Pressing plate 25... Positioning hole 29... Holding plate 33... Protrusion 54... Flexible member First embodiment Fig. 9 43...Diagram showing the second embodiment of the hard protective film Fig. 10 43...Diagram of the hard protective film

Claims (1)

[Claims] 1. A hole (2) that can accommodate a magnetic head slider (10).
4) for holding a magnetic head; and a spring (14) having a protrusion (14a) capable of pressing the central part of the back of the magnetic head slider (10) accommodated in the hole (24). Equipped with a magnetic head slider (10
) A magnetic head polishing holder characterized by polishing the medium facing surface of the magnetic head. 2. In the magnetic head polishing holder according to claim 1, the pressing force of the spring (14) is applied to the magnetic head slider (10) through a presser plate (31) having a protrusion (31b) facing the central part of the back surface. head slider (10
) A holder for polishing a magnetic head, which is characterized by transmitting power to the magnetic head. 3. Hole (2) that can accommodate the magnetic head slider (10)
4) for holding a magnetic head (11), and a magnetic head slider (10) accommodated in the hole (24).
a flexible member (34) that presses the magnetic head slider (34), and a presser plate (29) that transmits the pressing force of the flexible member (34) to the central part of the back surface of the magnetic head slider (10), the presser plate (29)
A flexible member (34) and a magnetic head slider (
10) A holder for polishing a magnetic head, characterized in that projections (31a, 31b) that come into contact with the magnetic head are provided. 4. Support plate (11) and presser plate (29) for holding the magnetic head.
4. The holder for polishing a magnetic head according to claim 1, wherein the spring (14, 34) is provided with a protrusion or a recess, and the position is determined by combining the protrusion and the recess. 5. Using the magnetic head polishing holder according to claim 1, 2, 3 or 4, polish the magnetic head slider surface (40a) on which the hard protective film (43) is formed to remove the magnetic pole portion (41). A method of manufacturing a magnetic head characterized by reducing the step.