JPH04195779A - Manufacture of magnetic head slider - Google Patents

Abstract

PURPOSE:To make it possible to correct the flatness of a rail surface and provide a suitable crown shape to said rail surface by holding a magnetic head slider, using an offset portion and lap-finishing the surface of the rail. CONSTITUTION:A 20 mum or deeper groove 5 is formed on a block 4 where a row of magnetic heads 3 are laid out, using a mechanical means where the groove 5 will serve as an offset latter. All surfaces except for a rail are cut by an ion mill or a laser process, thereby forming a rail 2. The rail 2 is further cut so that it may be a magnetic head slider 1 respectively. An offset section 6 is supported with a support board 7. Then, the surface of the rail 2 is lapped by means of a lapping level block in such a manner that the rear section may be depressed by way of a flexible material, such as rubber. Since lapping is carried out with the offset section 6 supported, it is possible to correct the flatness of the rail surface 2. Furthermore, the rear section of the magnetic head slider 1 is lapped being pressed by the flexible material, the peripheral part is more lapped than the central part, which turns the rail surface 2 in crown shape.

Description

[Detailed Description of the Invention] [Summary] Regarding a method of manufacturing a magnetic head slider, the purpose is to correct the flatness of the rail surface and to give the rail surface a suitable round shape, using an ion milling method or a laser processing method. In a method for manufacturing a magnetic head slider in which a rail surface is formed and then the rail surface is finished by lapping, a step portion having a height of 204 or more is formed on the side on which the rail surface is formed, and the step portion is used during the lapping work. The magnetic head slider is held and the rail surface is finished by lapping. Further, the rear surface of the magnetic head slider is wrapped with pressure through a flexible member such as rubber to give it a crown shape.

[Industrial application field]

The present invention relates to a method of manufacturing a magnetic head slider.

In recent years, magnetic disk packaging has become more advanced in recording density and smaller in size, and in particular, the slider of the magnetic head has become smaller in size. The purpose of downsizing the slider is to reduce its mass and the pressing force of the gimbal spring, thereby reducing the risk of head crash. The present invention relates to a small slider in which a rail surface is formed without machining using photolithography technology, an ion mill method, or laser beam irradiation, and in particular, processing that stabilizes the flying ability and increases the wear resistance of the rail surface. Regarding the method.

[Conventional technology]

FIG. 6 is a diagram showing a magnetic head slider in which a rail surface is formed by photolithography technology, an ion mill method, or laser beam irradiation, and reference numeral 1 indicates a magnetic head slider 12 having a rail surface.

, This magnetic head slider, as shown in Figure 7,
First, magnetic heads (not shown) are formed in rows as shown in FIG.
As shown in b), a step of several points is formed using an ion mill method or a laser method to form the rail surface 2, and then the magnetic head slider 1 is cut into individual magnetic head sliders 1 as shown in FIG. 7(C). .

Conventionally, in magnetic head sliders in which such rail surfaces are formed without machining, stepped shapes are not used as unnecessary.

In addition, for sliders whose rail surfaces are formed by machining,
Conventionally, stepped shapes have been frequently used, but these shapes are created by mechanically carving the rail surface or magnetic head slider.
It is provided to reduce the mass of the machine and is not intended for polishing.

[Problem to be solved by the invention]

As mentioned above, conventional magnetic head sliders require polishing, grinding,
Furthermore, it has internal stress due to the cutting process. For this reason, distortion may occur on the rail surface after the magnetic head slider is cut. This rail surface is required to have a high level of flatness (PV value of 0.03p or less).
It is necessary to correct this distortion, but until now, the above-mentioned small size (for example, about 2.5 mm in width, 3 mm in length, and 0.5 mm in thickness)
There was no mechanical processing method for modifying the rail surface of the magnetic head slider.

Further, providing a positive crown to the rail surface is effective in alleviating contact between the medium surface of the magnetic disk and the magnetic head slider and reducing wear on the rail surface. However, until now, it has been difficult to provide a positive crown on the rail surface of the magnetic head slider.

SUMMARY OF THE INVENTION In view of the above-mentioned conventional problems, it is an object of the present invention to provide a method of manufacturing a magnetic head slider that allows correction of the flatness of the rail surface and imparting a suitable round shape to the rail surface.

[Means to solve the problem]

In order to achieve the above object, in the method of manufacturing a magnetic head slider of the present invention, a rail surface is formed by an ion milling method or a laser processing method, and then the rail surface is finished by lapping. A stepped portion 6 having a height of 20 mm or more is formed on the side where the rail surface 2 is formed, and the stepped portion 6 is used to hold the magnetic head slider 1 during lapping work, and the rail surface 2 is finished by lapping. Features.

Further, the magnetic head slider 1 is characterized in that a crown shape is provided by wrapping the back surface of the magnetic head slider 1 while applying pressure through a flexible member 8 such as rubber.

[For production]

According to the present invention, the flatness of the rail surface 2 can be corrected by supporting and lapping the magnetic head slider at its stepped portion 6. Furthermore, by lapping the back surface of the magnetic head slider 1 while pressing it with the flexible member 8, more pressing force is applied to the magnetic head slider at its periphery, and the periphery is wrapped more than the center. The rail surface 2 has a crown shape.

[Embodiment] FIG. 1 is a diagram for explaining a first embodiment of the present invention.

The manufacturing method of the magnetic head slider of this embodiment is as shown in FIG. 1(a). First, as shown in FIG.
．． - The grooves 5 described above are formed, and then as shown in FIG.
) The magnetic head sliders 1 are cut into individual magnetic head sliders 1 as shown in FIG.

Next, wrapping, which is the main point of the present invention, is carried out as shown in FIG. The surface plate 10 wraps the rail surface 2.

FIG. 2 is a diagram showing a support plate that supports a magnetic head slider, (a) is a top view, (b) is a partial cross-sectional view taken along line bb in diagram a, and (C) is a diagram in diagram b. An X arrow view, and (d) a Y arrow view of figure b.

In this support plate, a magnetic head slider is inserted into one of the Nlt coated layers 11a and the copper plate 11 of a disc in which Nl plating layers 11a and 11b are formed on both sides of a thin copper plate 11 (or only one side is possible). A hole 12 (including a portion 12a into which a tweezers for handling is inserted) is formed as shown in FIG. The second figure that can be exposed (
A hole 13 as shown in d) is provided. In addition, punch holes 12,1
3 are formed in plural on the same circumference as shown in FIG. 2(a). The thickness of the Ni plating layer 13 must be at least 20 microns; if it is thinner than this, the plating layer portion will be distorted when holding the magnetic head slider. Therefore, the height of the stepped portion of the magnetic head slider must also be 20 mm or more.

FIG. 3 shows a jig for roughing a magnetic head slider using the support plate, (a) is a top view, (a) is a top view;
b) is a cross-sectional view taken along line bb in figure a.

In this jig, as shown in the figure, the support plate 7 is adhesively fixed to the support plate holder 14, and the pressing plate 15 is fixed to the support plate holder 14 with screws. The rubber plate 16 is arranged between the support plate 7 and the pressing plate 15, and is attached to each magnetic head slider.
is wrapped evenly regardless of the thickness error. In addition, a pin 17 is embedded in the pressing plate 15,
This bottle 17 is put into a small hole 19 made in the weight holder 18, and lapping work can be performed on the lapping surface plate 10 while preventing idle rotation between the weight holder 18 and the pressing plate 15. A weight 2o is placed on the weight holder 18 to enable adjustment of processing pressure.

According to this embodiment, the support plate 7 can support the magnetic head slider at its stepped portion 6, so that it can be supported so that it does not fall onto the lapping surface plate. Wrapping of the magnetic head slider becomes possible. Further, since the support plate can support a plurality of magnetic head sliders, it is possible to wrap a plurality of magnetic head sliders at the same time, allowing efficient processing.

FIG. 4 is a diagram for explaining a second embodiment of the present invention.

The method for manufacturing the magnetic head slider of this embodiment uses the support plate shown in FIG. 2 and the jig shown in FIG. When the rear surface of the magnetic head slider 1 is pressed with a flexible member 8 such as rubber, the pressure is applied particularly to the periphery of the magnetic head slider 1, as shown by the white arrow in FIG. The force of is small. Therefore, the magnetic head slider 1 is deformed into a negative crown shape. In this state, as shown in FIG. 4(C), when the lower surface is polished with the lapping platen 10, the peripheral portion is processed more than the central portion. When this is removed from the jig and left in a free state, the rail surface 2 becomes a regular crown shape as shown in FIG. 4(d).

Figure 5 shows the results of actually measuring the rail surface of a magnetic head slider wrapped using the above method, and shows approximately 15n+
A positive crown of n is formed. This processing is
Using silicone rubber (thickness 1 mm, hardness 50 degrees), 0.
It is wrapped in a 1M compressed state.

〔Effect of the invention〕

As explained above, according to the present invention, it is possible to wrap a small magnetic head slider, which was previously impossible to wrap, and it is also possible to give a positive crown shape, thereby making it possible to wrap a magnetic head slider of a magnetic disk device. It can contribute to improving reliability.

[Brief explanation of the drawing]

FIG. 1 is a diagram for explaining the first embodiment of the present invention, FIG. 2 is a diagram showing a support plate used in the method of manufacturing a magnetic head slider of the present invention, and FIG. 3 is a diagram for explaining the magnetic head of the present invention. FIG. 4 is a diagram for explaining the second embodiment of the present invention. FIG. 5 is a diagram showing the shape measurement of the rail surface of a magnetic head slider by the method of the present invention. FIG. 6 is a diagram showing the results, FIG. 6 is a diagram showing a conventional magnetic head slider, and FIG. 7 is a diagram showing a conventional magnetic head slider manufacturing method. In the figure, 1 is a magnetic head slider 1, 2 is a rail surface, 3 is a magnetic head, 4 is a block, 5 is a groove, 6 is a stepped portion, 7 is a support plate, 8 is a flexible member, 9 is a pressing plate, 10 is a surface plate for wrapping, 11 is a copper plate, 11a=11b is a Ni plating layer, 12.13 is a hole, 14 is a support plate holder, 15 is a pressing plate, 16 is a rubber plate, 17 is a bottle, 18 is a weight holder, 19 indicates a small hole, and 20 indicates a weight.

Claims (1)

[Claims] 1. A method for manufacturing a magnetic head slider in which a rail surface is formed by an ion milling method or a laser processing method, and then the rail surface is finished by lapping, wherein the side on which the rail surface (2) is formed has a height. A step portion (6) of 20 μm or more is formed, and the step portion (6) is
) to hold the magnetic head slider (1),
A method for manufacturing a magnetic head slider, characterized in that the rail surface (2) is finished by lapping. 2. The method for manufacturing a magnetic head slider according to claim 1, wherein the back surface of the magnetic head slider (1) is wrapped with pressure through a flexible member (8) such as rubber to give it a crown shape. A manufacturing method for a featured magnetic head slider.