JPH04144053A - Device for generating white pulse light - Google Patents
Device for generating white pulse lightInfo
- Publication number
- JPH04144053A JPH04144053A JP26788290A JP26788290A JPH04144053A JP H04144053 A JPH04144053 A JP H04144053A JP 26788290 A JP26788290 A JP 26788290A JP 26788290 A JP26788290 A JP 26788290A JP H04144053 A JPH04144053 A JP H04144053A
- Authority
- JP
- Japan
- Prior art keywords
- light
- pulsed light
- white
- electron
- white pulsed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 18
- 239000002184 metal Substances 0.000 claims abstract description 18
- 238000000926 separation method Methods 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000000758 substrate Substances 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 abstract description 14
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 abstract description 14
- 239000013307 optical fiber Substances 0.000 abstract description 7
- 239000011521 glass Substances 0.000 description 13
- 239000000523 sample Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 description 1
- 229910052776 Thorium Inorganic materials 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 229910052784 alkaline earth metal Inorganic materials 0.000 description 1
- 150000001342 alkaline earth metals Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 239000007806 chemical reaction intermediate Substances 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Landscapes
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Particle Accelerators (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
本発明は高輝度の白色パルス光を得るための白色パルス
光発生装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a white pulsed light generator for obtaining high-intensity white pulsed light.
「従来の技術」
電圧を印加していないキセノンランプの電極（カソード
）に５例えばＹＡＧレーザの基本波（１０６４ｎｍ）を
照射すると、高輝度の白色パルス光を発生することが知
られている。この白色パルス光は１例えばストリークカ
メラを検出器とした時間分解吸収測定装置におけるプロ
ーブ光として利用される。"Prior Art" It is known that when the electrode (cathode) of a xenon lamp to which no voltage is applied is irradiated with, for example, the fundamental wave (1064 nm) of a YAG laser, a high-intensity white pulsed light is generated. This white pulsed light is used, for example, as a probe light in a time-resolved absorption measuring device using a streak camera as a detector.
この種の時間分解吸収装置は、第５図に示すように、レ
ーザパルスの励起光（９）を試料（１０）に照射し、こ
の試料（１０）に生じる励起種、反応中間体のスペクト
ルとその強度の変化を白色プローブ光（１１）により追
跡するもので、このプローブ光（１１）はスペクトルが
連続的な白色光を用い、このプローブ光（１１）の強度
変化をストリークカメラ（１２）で検出することにより
、過渡吸収スペクトルとその強度変化を観察するもので
ある。As shown in Figure 5, this type of time-resolved absorption device irradiates a sample (10) with excitation light (9) of a laser pulse, and produces spectra of excited species and reaction intermediates generated in this sample (10). The change in the intensity is tracked using a white probe light (11). This probe light (11) uses white light with a continuous spectrum, and the change in the intensity of this probe light (11) is tracked using a streak camera (12). Through detection, the transient absorption spectrum and its intensity changes are observed.
しかるに、前記白色プローブ光（１１）の発生装置は、
第５図に示すように、光強度の大きな光、例えばＹＡＧ
レーザの基本波（１０６４ｎｍ） （２）をレンズ（１
）で、被照射手段としてのキセノンランプ（３）のカソ
ード（４）の正面に集光させて白色光（５）を発生させ
、発生した白色光（５）を取出して、レンズ（６）で集
光して光ファイバ（７）を介して試料（１０）へ送るよ
うにしている。However, the generator for the white probe light (11) is
As shown in Fig. 5, light with high light intensity, such as YAG
Laser fundamental wave (1064nm) (2) is connected to lens (1)
), the light is focused on the front of the cathode (4) of the xenon lamp (3) serving as the irradiation means to generate white light (5), and the generated white light (5) is taken out and exposed to the lens (6). The light is focused and sent to the sample (10) via an optical fiber (7).
「発明が解決しようとする課題」
前述のように、入射レーザ（２）をキセノンランプ（３
）のカソード（４）に集光すると、このカソード（４）
から白色パルス光が発生する。特に、レー・ザ（２）の
入射経路と略同−経路の面（１３）（図中斜線部分）に
強く放射する。ところが、従来は、レーザ（２）の入射
経路と同一経路からとり出すのが構造上無理なため、止
むを得ず、第５図のように、側方からとり出していた。“Problems to be Solved by the Invention” As mentioned above, the incident laser (2) is replaced by a xenon lamp (3).
), this cathode (4)
A white pulsed light is generated. In particular, it radiates strongly to the surface (13) (shaded area in the figure) that is on approximately the same path as the incident path of the laser (2). However, in the past, since it was structurally impossible to take out the laser from the same path as the incident path of the laser (2), it had no choice but to take out from the side as shown in FIG.
本発明の目的は、光強度の大きな光の入射経路と略同−
の強く放射するところから高効率の白色パルス光をとり
出せる装置を得ることである。また、その結果として、
光の入射による損傷を与えないようなものを得ることで
ある。The object of the present invention is to
The object of the present invention is to obtain a device that can extract highly efficient white pulsed light from a strongly radiated source. Also, as a result,
The goal is to obtain something that will not be damaged by incident light.
「課題を解決するための手段」 本発明は、被照射手段のガス入り透明容器内に。"Means to solve problems" The present invention is applied to a gas-filled transparent container of a means to be irradiated.
電子の放出し易い金属を設け、この電子放出金属に光強
度の大きな光を照射し、二の電子放出金属から所定の白
色パルス光を発生せしめるようにした装置において、前
記光強度の大きな光の入射方向と略同一方向に、前記電
子放出金属から放射された白色パルス光を分離する分離
手段を設けてなるものである。In an apparatus in which a metal that easily emits electrons is provided, the electron-emitting metal is irradiated with light of high intensity, and a predetermined white pulsed light is generated from the second electron-emitting metal. Separating means for separating the white pulsed light emitted from the electron-emitting metal is provided in substantially the same direction as the incident direction.
「作用」
光強度の大きな光としてレーザを用いた場合、入射する
レーザは、最初はできるだけビーム径の広がった状態と
しておく。このビーム径の大きなレーザは、焦点距離の
短かなレンズを介在させることにより、キセノンランプ
のガラス面の部分はできるだけビーム径の大きな状態で
透過することにより、ガラス面部分の損傷を最小限にす
る。透過したレーザはキセノンランプのカソードに集光
され、このカソードで白色光を発生する。発生した白色
パルス光のうちレーザの入射経路と略同−経路に放射さ
れた白色パルス光だけが分離手段で分離され、光ファイ
バを経て次段へ伝送される。"Operation" When a laser is used as light with high light intensity, the beam diameter of the incident laser is initially made as wide as possible. This laser with a large beam diameter uses a lens with a short focal length to pass through the glass surface of the xenon lamp with a beam diameter as large as possible, thereby minimizing damage to the glass surface. . The transmitted laser beam is focused on the cathode of the xenon lamp, which generates white light. Of the generated white pulsed light, only the white pulsed light emitted along substantially the same path as the laser incident path is separated by the separation means and transmitted to the next stage via the optical fiber.
「実施例」 以下、本発明の一実施例を図面に基き説明する。"Example" Hereinafter, one embodiment of the present invention will be described based on the drawings.
第１図において、（２）は光強度の大きな光で、例えば
Ｎｄ：ＹＡＧレーザ装置にて発生する基本波の１０１０
６４ｎ ３０ｐｓ、 ３０ｍ、ｌレーザパルスとする。In Fig. 1, (2) is light with high optical intensity, for example, 1010 of the fundamental wave generated by an Nd:YAG laser device.
64n 30ps, 30m, l laser pulse.
このレーザ（２）を電子放出金属であるカソード（４）
へ入射し。This laser (2) is connected to a cathode (4) which is an electron-emitting metal.
incident on.
このカソード（４）で発光した光は前記レーザ（２）と
分離する分離手段、すなわちダイクロインクミラーなど
のビームサンプラー（８）に送られる。このビームサン
プラー（８）は、石英基板に１６層程度のＺｒＯ２，５
ｉｎ２を蒸着したもので、第２図のように、１１０６４
ｎ付近を略１．００％反射し、可視光領域を略１００％
透過するような特性をもち、さらに光損傷しきい値が高
くなるように作られる。このビームサンプラー（８）で
反射したレーザ（２）はレンズ（１）を通して被照射手
段のキセノンランプ（３）の電極（カソード）（４）に
照射される。このとき、キセノンランプ（３）のガラス
面（１４）の半径が大きければ、このガラス面（１４）
の損傷の問題はない。しかし、ガラス面（１４）の半径
か小さければレンズ（１）は非球面で焦点距離を短かく
し、かつできるだけキセノンランプ（３）に近づけるこ
とによってレーザ（２）のビーム径を最初は広くしてキ
セノンランプ（３）のガラス面（１４）を透過させて
このガラス面（１４）の損傷を可及的に防止する。レー
ザ（２）がキセノンランプ（３）のカソード（４）に集
光されると、この方ソード（４）の略全周で白色パルス
光（５）が発生する。The light emitted by this cathode (4) is sent to a separation means that separates it from the laser (2), that is, a beam sampler (8) such as a dichroic ink mirror. This beam sampler (8) consists of about 16 layers of ZrO2,5 on a quartz substrate.
11064 as shown in Figure 2.
Reflects approximately 1.00% near n and approximately 100% in the visible light region
It has transparent properties and is made to have a high optical damage threshold. The laser (2) reflected by the beam sampler (8) passes through the lens (1) and is irradiated onto an electrode (cathode) (4) of a xenon lamp (3) serving as the irradiation means. At this time, if the radius of the glass surface (14) of the xenon lamp (3) is large, this glass surface (14)
There is no damage problem. However, if the radius of the glass surface (14) is small, the lens (1) should be aspherical to shorten the focal length, and the beam diameter of the laser (2) should be initially widened by placing it as close to the xenon lamp (3) as possible. Through the glass surface (14) of the xenon lamp (3)
Damage to this glass surface (14) is prevented as much as possible. When the laser (2) is focused on the cathode (4) of the xenon lamp (3), white pulsed light (5) is generated around the entire circumference of the cathode (4).
発生した白色パルス光（５）のうち、レーザ（２）の入
射面と同じ面の白色パルス光（５）が最も強く放射する
ため、この入射経路と同じ経路の白色パルス光（５）を
集光する。これが再び前記レンズ（１）を通って平行光
線となる。ビームサンプラー（８）は白色パルス光（５
）の可視光領域を略１００％透過し、透過した白色パル
ス光（５）はさらにレンズ（６）で光ファイバ（７）に
集光されて、この光ファイバ（７）により次段へ伝送さ
れる。Of the generated white pulsed light (5), the white pulsed light (5) on the same surface as the incident surface of the laser (2) is emitted most intensely, so the white pulsed light (5) on the same path as this incident path is collected. Shine. This passes through the lens (1) again and becomes parallel light. The beam sampler (8) emits white pulsed light (5
), and the transmitted white pulsed light (5) is further focused by a lens (6) onto an optical fiber (7), and transmitted to the next stage by this optical fiber (7). Ru.
前記実施例では、キセノンランプ（３）のカソード（４
）にレーザ（２）を照射して白色パルス光（５）を得る
例を示したが、これに限られるものではない。In the above embodiment, the cathode (4) of the xenon lamp (3)
) is irradiated with the laser (2) to obtain the white pulsed light (5), but the present invention is not limited to this.
すなわち、ガラス管は密閉した透明容器とし、内部にキ
セノンその他の不活性ガスを充填し、また、内部の電子
の放出しやすい金属は、例えば、バリウム、トリウムな
どのアルカリ金属、アルカリ土類金属入りのタングステ
ンとする。さらに、前記照射光源はレーザでなくとも、
光強度の大きな光であればよい。また、管内に充填する
ガスはキセノン以外に、クリプトンであってもよい。た
だし、クリプトンを用いるとやや赤みの付いたパルス光
となる。In other words, the glass tube should be a sealed transparent container, and the inside should be filled with xenon or other inert gas, and the metal that easily releases electrons inside should be a glass tube containing an alkali metal or alkaline earth metal such as barium or thorium. tungsten. Furthermore, the irradiation light source does not have to be a laser,
Any light with high light intensity is sufficient. Further, the gas filled in the tube may be krypton instead of xenon. However, if krypton is used, the pulsed light will be slightly reddish.
前記実施例では、光強度の大きな光を電子放出金属（４
）に入射するように屈折させ、かつ、白色パルス光（５
）を透過する分離手段としてビームサンプラー（８）を
用いたが、その他の例を第３図および第４図により説明
する。In the above embodiment, the light with high intensity is emitted from an electron-emitting metal (4
), and the white pulsed light (5
A beam sampler (8) was used as the separation means for transmitting the light beam through the beam, but other examples will be explained with reference to FIGS. 3 and 4.
第３図において、分離手段は平面反射！（８）とレンズ
（６）からなり、光強度の大きな光は平面反射鏡（８）
の中心に通過孔（１５）を通して透明容器（１４）の電
子放出金属（４）に照射される。このとき、ビーム径が
小さいので、透明容器（１４）の通過時にガラス面（１
４）に損傷を与えない場合に用いられる。In Figure 3, the separation means is plane reflection! (8) and lens (6), and the light with high light intensity is reflected by a flat reflector (8).
The electron-emitting metal (4) of the transparent container (14) is irradiated through the passage hole (15) at the center of the electron beam. At this time, since the beam diameter is small, the glass surface (14) passes through the transparent container (14).
4) Used when there is no damage to the product.
発生した白色パルス光（５）は平面反射！ （８）で反
射され、レンズ（６）で光ファイバ（７）へ集光される
。The generated white pulsed light (5) is a plane reflection! (8), and is focused by a lens (6) onto an optical fiber (7).
なお、平面反射！ （８）とレンズ（６）からなる分離
手段は、は第４図のように、凹面ｆｆｉ （８）に代え
ることができる。In addition, plane reflection! The separation means consisting of (8) and lens (6) can be replaced by a concave surface ffi (8) as shown in FIG.
「発明の効果」
本発明は上述のように構成したので、最も強く放射する
個所から白色パルス光を高効率で集光することができる
。また、短い焦点距離のレンズを介在すれば、ガラス面
を径の広いビームが透過し、ガラス面に損傷を与えるこ
とを防止できる。"Effects of the Invention" Since the present invention is configured as described above, it is possible to collect white pulsed light with high efficiency from the location where the light is emitted most intensely. Further, by interposing a lens with a short focal length, a beam with a wide diameter can be transmitted through the glass surface, and damage to the glass surface can be prevented.
第１図は本発明による白色パルス光発生装置の第１実施
例を示す説明図、第２図はビームサンプラーの波長特性
図、第３図は本発明による白色パルス光発生装置の第２
実施例を示す説明図、第４図は本発明による白色パルス
光発生装置の第３実施例を示す説明図、第５図は従来装
置の説明図である。
（１）・・レンズ、（２）・・・光強度の大きな光、（
３）・・・被照射手段、（４）・・・電子放出金属、（
５）・・・白色パルス光、（６）・・レンズ、（７）・
・・光ファイバ、（８）・・・入射光と出射光の分離手
段、（９）・・・励起光、（１０）・・・試料、（１１
）・・・白色プローブ光、（１２）・・・ストリークカ
メラ、（１４）・・透明容器（ガラス面）、（１５）・
・・通過孔。FIG. 1 is an explanatory diagram showing a first embodiment of the white pulsed light generator according to the present invention, FIG. 2 is a wavelength characteristic diagram of a beam sampler, and FIG. 3 is a second embodiment of the white pulsed light generator according to the present invention.
FIG. 4 is an explanatory diagram showing a third embodiment of the white pulse light generating device according to the present invention, and FIG. 5 is an explanatory diagram of a conventional device. (1)...Lens, (2)...Light with high light intensity, (
3)...Irradiated means, (4)...Electron-emitting metal, (
5)...white pulsed light, (6)...lens, (7)...
... Optical fiber, (8) ... Separation means for incident light and outgoing light, (9) ... Excitation light, (10) ... Sample, (11
)...White probe light, (12)...Streak camera, (14)...Transparent container (glass surface), (15)...
... Passage hole.
Claims (5)
し易い金属を設け、この電子放出金属に光強度の大きな
光を照射し、この電子放出金属から所定の白色パルス光
を発生せしめるようにした装置において、前記光強度の
大きな光の入射方向と略同一方向に、前記電子放出金属
から放射された白色パルス光を分離する分離手段を設け
てなることを特徴とする白色パルス光発生装置。(1) A metal that easily emits electrons is provided in a gas-filled transparent container of the irradiation means, and the electron-emitting metal is irradiated with light of high light intensity to generate a predetermined white pulsed light from the electron-emitting metal. The white pulsed light generation device is characterized in that a separating means for separating the white pulsed light emitted from the electron emitting metal is provided in substantially the same direction as the incident direction of the high intensity light. Device.
きな光を反射し、電子放出金属で発生した白色パルス光
を透過するビームサンプラーからなる請求項（１）記載
の白色パルス光発生装置。(2) The white pulsed light generator according to claim 1, wherein the separating means comprises a beam sampler that reflects the high-intensity light irradiated onto the electron-emitting metal and transmits the white pulsed light generated by the electron-emitting metal. .
Ｏ＿２を蒸着し、光強度の大きな光としての１０６４ｎ
ｍのレーザを略１００％反射し、発生した白色パルス光
を略１００％透過するものからなる請求項（２）記載の
白色パルス光発生装置。(3) The beam sampler is made of ZrO_2 and Si on a quartz substrate.
1064n as a light with high light intensity by vapor depositing O_2
3. The white pulsed light generating device according to claim 2, wherein the white pulsed light generating device is configured to reflect approximately 100% of the laser beam of m and transmit approximately 100% of the generated white pulsed light.
を電子放出金属に集光するための短い焦点距離のレンズ
を挿入してなる請求項（１）、（２）または（３）記載
の白色パルス光発生装置。(4) Claim (1), (2) or (3) wherein a lens with a short focal length is inserted between the separation means and the irradiation means to focus the light with high intensity onto the electron emitting metal. ) The white pulsed light generator described in ).
きな光を通過する通過孔を有し、かつ発生した白色パル
ス光を反射する反射鏡からなる請求項（１）記載の白色
パルス光発生装置。(5) The white pulsed light according to claim 1, wherein the separating means comprises a reflecting mirror that has a passage hole through which the high-intensity light irradiated onto the electron-emitting metal and reflects the generated white pulsed light. Generator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26788290A JPH061688B2 (en) | 1990-10-05 | 1990-10-05 | White pulse light generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26788290A JPH061688B2 (en) | 1990-10-05 | 1990-10-05 | White pulse light generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04144053A true JPH04144053A (en) | 1992-05-18 |
| JPH061688B2 JPH061688B2 (en) | 1994-01-05 |
Family
ID=17450943
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26788290A Expired - Fee Related JPH061688B2 (en) | 1990-10-05 | 1990-10-05 | White pulse light generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH061688B2 (en) |
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| JP2012230924A (en) * | 2006-03-31 | 2012-11-22 | Energetic Technology Inc | Laser-driven light source and method |
| US8525138B2 (en) | 2006-03-31 | 2013-09-03 | Energetiq Technology, Inc. | Laser-driven light source |
| WO2015083463A1 (en) * | 2013-12-06 | 2015-06-11 | 浜松ホトニクス株式会社 | Light-emitting sealed body |
| US9576785B2 (en) | 2015-05-14 | 2017-02-21 | Excelitas Technologies Corp. | Electrodeless single CW laser driven xenon lamp |
| US9646816B2 (en) | 2013-12-06 | 2017-05-09 | Hamamatsu Photonics K.K. | Light source device |
| US9678262B2 (en) | 2013-09-20 | 2017-06-13 | Qloptiq Photonics GmbH & Co. KG | Laser-operated light source |
| US9741553B2 (en) | 2014-05-15 | 2017-08-22 | Excelitas Technologies Corp. | Elliptical and dual parabolic laser driven sealed beam lamps |
| US9748086B2 (en) | 2014-05-15 | 2017-08-29 | Excelitas Technologies Corp. | Laser driven sealed beam lamp |
| US10008378B2 (en) | 2015-05-14 | 2018-06-26 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with improved stability |
| US10057973B2 (en) | 2015-05-14 | 2018-08-21 | Excelitas Technologies Corp. | Electrodeless single low power CW laser driven plasma lamp |
| US10078167B2 (en) | 2013-09-20 | 2018-09-18 | Asml Netherlands B.V. | Laser-operated light source |
| US10109473B1 (en) | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
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1990
- 1990-10-05 JP JP26788290A patent/JPH061688B2/en not_active Expired - Fee Related
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| US9609732B2 (en) | 2006-03-31 | 2017-03-28 | Energetiq Technology, Inc. | Laser-driven light source for generating light from a plasma in an pressurized chamber |
| US8525138B2 (en) | 2006-03-31 | 2013-09-03 | Energetiq Technology, Inc. | Laser-driven light source |
| US8969841B2 (en) | 2006-03-31 | 2015-03-03 | Energetiq Technology, Inc. | Light source for generating light from a laser sustained plasma in a above-atmospheric pressure chamber |
| US9048000B2 (en) | 2006-03-31 | 2015-06-02 | Energetiq Technology, Inc. | High brightness laser-driven light source |
| JP2012230924A (en) * | 2006-03-31 | 2012-11-22 | Energetic Technology Inc | Laser-driven light source and method |
| US9185786B2 (en) | 2006-03-31 | 2015-11-10 | Energetiq Technology, Inc. | Laser-driven light source |
| US10845523B2 (en) | 2013-09-20 | 2020-11-24 | Asml Netherlands B.V. | Laser-operated light source |
| US9678262B2 (en) | 2013-09-20 | 2017-06-13 | Qloptiq Photonics GmbH & Co. KG | Laser-operated light source |
| US10078167B2 (en) | 2013-09-20 | 2018-09-18 | Asml Netherlands B.V. | Laser-operated light source |
| US9984865B2 (en) | 2013-12-06 | 2018-05-29 | Hamamatsu Photonics K.K. | Light-emitting sealed body |
| US9646816B2 (en) | 2013-12-06 | 2017-05-09 | Hamamatsu Photonics K.K. | Light source device |
| WO2015083463A1 (en) * | 2013-12-06 | 2015-06-11 | 浜松ホトニクス株式会社 | Light-emitting sealed body |
| US9824879B2 (en) | 2013-12-06 | 2017-11-21 | Hamamatsu Photonics K.K. | Light source device |
| US10032622B2 (en) | 2013-12-06 | 2018-07-24 | Hamamatsu Photonics K.K. | Light source device |
| US9741553B2 (en) | 2014-05-15 | 2017-08-22 | Excelitas Technologies Corp. | Elliptical and dual parabolic laser driven sealed beam lamps |
| US9922814B2 (en) | 2014-05-15 | 2018-03-20 | Excelitas Technologies Corp. | Apparatus and a method for operating a sealed beam lamp containing an ionizable medium |
| US9748086B2 (en) | 2014-05-15 | 2017-08-29 | Excelitas Technologies Corp. | Laser driven sealed beam lamp |
| US10186416B2 (en) | 2014-05-15 | 2019-01-22 | Excelitas Technologies Corp. | Apparatus and a method for operating a variable pressure sealed beam lamp |
| US10008378B2 (en) | 2015-05-14 | 2018-06-26 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with improved stability |
| US10057973B2 (en) | 2015-05-14 | 2018-08-21 | Excelitas Technologies Corp. | Electrodeless single low power CW laser driven plasma lamp |
| US10497555B2 (en) | 2015-05-14 | 2019-12-03 | Excelitas Technologies Corp. | Laser driven sealed beam lamp with improved stability |
| US9576785B2 (en) | 2015-05-14 | 2017-02-21 | Excelitas Technologies Corp. | Electrodeless single CW laser driven xenon lamp |
| US10109473B1 (en) | 2018-01-26 | 2018-10-23 | Excelitas Technologies Corp. | Mechanically sealed tube for laser sustained plasma lamp and production method for same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH061688B2 (en) | 1994-01-05 |
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