JPH03103085A - Manufacture of dielectric movable element for power generator using electrostatic force - Google Patents

Abstract

PURPOSE:To reduce a manufacturing cost by forming grooves of a desired pattern on a substrate, forming a film of ferroelectric material thereon, polishing it, etc. CONSTITUTION:A dielectric movable element of an electrostatic motor or an electrostatic actuator is formed of a substrate 1 of a material easily finely processed such as an SiO2, etc. This manufacture includes first forming a plurality of grooves 2 by etching based on a predetermined pattern on the substrate 1, then forming a film 3 of a ferroelectric material such as BaTiO3, etc., on the upper surface of the substrate including the grooves 2, and then polishing the surface of the film 3 by suitable polishing means to flatten the surface. As a result, a dielectric material having a fine pattern can easily be formed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a dielectric mover in a power generation device that uses electrostatic force, such as an electrostatic motor or an electrostatic actuator.

Conventionally, various types of power generating devices have been proposed as this type of power generating device. A rotor or linear motion element is provided in the rotor, and electrostatic induction between the stator electrodes and the rotor or linear motion element converts electrical energy into mechanical rotation or linear kinetic energy, or converts mechanical rotation or linear kinetic energy into electricity. An example of this device is disclosed in which stator electrodes At, A2, A3 . A linear electrostatic motor is described in which a movable element C is provided between BISB2 and B3, and the movable element C is moved by attracting the movable element C with the electrostatic force generated by the voltage applied to the stator electrode. There is. The mover C is configured by alternately connecting dielectrics CISC2 having different dielectric constants, that is, for example, dielectrics Ct
is made to have a larger dielectric constant than the dielectric C2.

In addition, instead of the movable element as shown in FIG. 12, a material having the same dielectric constant is used as shown in FIG. There are also known materials with different dielectric constants.

In the operation of such a known device, when a voltage is applied between electrode A2 and electrode B2 of the stator in the illustrated state, the electrostatic force generated causes the mover C or The central dielectric Ct or the convex portion at D is attracted and moves between these two electrodes, thereby moving mover C or D to the right in the drawing. In this state, the dielectric C on the right side of the mover C or D
The t or convex portion half faces electrode A3 and electrode B3 of the stator, and voltage application is applied between electrode A2 and electrode B2.
By switching from between the electrode ^3 and the electrode B3, the movable element C or D further moves to the right. In this way, the movable element C is
Or D can be moved continuously.

[Problems to be Solved by the Invention] A dielectric mover as shown in FIG. 12 can be manufactured relatively easily if the overall dimensions are relatively large. However, power generators that use electrostatic force have a simpler structure than conventional electromagnetic motors and can be made very small, and are expected to be used in micro motors and micro actuators. ing. Therefore, the dielectric mover also needs to be configured in a compact size, but with existing technology it is difficult to alternately connect fine dielectric materials with different permittivity, and the realization of miniaturization, which is a characteristic of this type of device, is difficult. is hindering.

Furthermore, regarding the mover, which has a high dielectric material with irregularities formed in a predetermined repeating pattern, as shown in Figure 3, the fine irregularities are difficult to obtain because the microfabrication technology for high dielectric ceramics has not yet reached an industrially satisfactory level. cannot be easily formed with satisfactory accuracy. Therefore, the dielectric mover having such an uneven structure also becomes an obstacle to miniaturization of the device.

By the way, Sl and Sin2 in the semiconductor manufacturing process
Microfabrication technology such as these has developed dramatically, and today it has advanced to the submicron level. Research is also progressing on micromachining that applies this microfabrication technology.

The present inventors have conducted research and development on the application of microfabrication technology in semiconductor manufacturing processes and micromachining technology that applies it to the manufacture of dielectric movers in power generators that utilize electrostatic force. By applying microfabrication technology in the semiconductor manufacturing process and micromachining technology that applies it, we can form fine uneven patterns with high and low dielectric constants and high dielectric materials that can be used as movers in electrostatic motors and electrostatic actuators. Invented the act of digging.

Therefore, an object of the present invention is to provide a method for manufacturing a dielectric mover that can be used in a power generation device that utilizes electrostatic force.

[Means for Solving the Problems] In order to achieve the above object, a method for manufacturing a dielectric mover in a power generation device using electrostatic force according to the first aspect of the present invention is a method for manufacturing a dielectric mover that can be easily microfabricated. A predetermined pattern of grooves is formed on a substrate made of the material, a film of a ferroelectric material such as BaTIO is formed on the substrate in which the grooves are formed, and a film of a ferroelectric material such as BaTIO is formed. It consists of polishing the top surface of the membrane to make it flat.

Further, the method for manufacturing a dielectric mover according to the second aspect of the present invention is to form grooves in a predetermined pattern on a substrate made of a material that is easily microfabricated, and to fill the formed substrate with Ba.
The process consists of forming a film of ferroelectric material such as Ti03, polishing the top surface of the thus formed film of ferroelectric material to make it flat, and removing the substrate by an etching process.

[Function] In the methods according to the first and second inventions of the present invention configured as described above, the ferroelectric material itself that threatens the dielectric of the mover is not subjected to difficult microfabrication. A substrate made of a material that can easily be used is used, and only this substrate is microfabricated, and the dielectric of the mover is formed using a certain film technique. This makes it possible to easily form a dielectric material with a fine pattern.

Further, in the method according to the first aspect of the present invention, the movable element dielectric can be formed on both the front and back surfaces of the substrate.

[Embodiments] Examples of the present invention will be described below with reference to FIGS. 1 to 11 of the accompanying drawings.

1 to 4 show a method of manufacturing a dielectric mover according to an embodiment of the present invention.

FIG. 1 shows a certain substrate 1 made of a material, such as Si02, which has a relatively low dielectric constant and is easily microfabricated before processing. Board 1
The size and shape of the movable member can be appropriately selected depending on the size of the mover to be manufactured, but in the illustrated example, a rectangular plate-like member is used.

First, in the substrate 1 shown in FIG. 1, a plurality of grooves 2 extending in the width direction are formed by etching based on a predetermined pattern as shown in FIG.

A film 3 of a ferroelectric material such as B a Ti 0 3 is formed on the upper surface of the substrate 1 including the grooves 2 formed in the desired pattern. This film can be formed using any suitable conventional film deposition method, such as vacuum evaporation, sputtering, or CVD.
A film forming method such as D or a precipitation method from a liquid phase can be used. In this step, the film 3 of ferroelectric material is treated in particular to fill each groove 2 formed in the previous step.

Finally, the surface of the ferroelectric material film 3 is polished using a suitable polishing means such as lapping, borsing, etching, etc. to flatten the surface as shown in FIG. In this case, preferably the surface of the substrate 1 can be treated to the surface level so that the film 3 of ferroelectric material remains only in the grooves 2. The mover is thus completed, and as can be seen from the drawings, in the mover manufactured in this embodiment, the substrate 1 functions as a carrier or support for the dielectric.

Another embodiment of the present invention is shown in FIGS. 5-9.

In this case, a substrate 4 made of a material that can be easily etched and microfabricated regardless of the dielectric constant is used, and FIG. 5 shows the form before processing.

In the first step, a plurality of grooves 5 extending in the width direction are formed on the surface of the substrate 4 based on a predetermined pattern in the same manner as in the above embodiment, and as shown in FIG. A substrate 4 is obtained.

In the second step shown in FIG. 7, for example, BaT
A film 6 of ferroelectric material such as iO3 is formed relatively thick. Formation of this film 6 can be carried out using an appropriate film forming method such as a vacuum evaporation method, sputtering, CVD, etc., or precipitation synthesis method from a liquid phase, as in the case of the above embodiment.

Next, in the third step, the upper surface of the ferroelectric material film 6 formed as shown in FIG. 8 is flattened by surface treatment such as polishing.

In the final step, the substrate 4 is removed by etching to obtain a mover made of only ferroelectric material as shown in FIG.

By the way, in the embodiments shown in FIGS. 1 to 4, Si
It is also possible to form grooves on both sides of the n2 substrate and form ferroelectric films on both sides, thereby obtaining a double-sided movable element as shown in FIG.

Furthermore, in the embodiments shown in FIGS. 1 to 4, SiO2
It is also possible to apply micromachining technology when forming a full 2 in a predetermined pattern on the substrate 1 to provide pulleys 7 parallel to the surface of the substrate along both sides of the substrate 1, as shown in FIG. . Each of these pulleys moves along a guide rail (not shown) provided on the stator side when the movable element is assembled into the device, thereby smoothing the movement of the movable element and simultaneously controlling the movement of the movable element. It can function as a guide.

Although the illustrated embodiments have all been described with respect to manufacturing a linear type mover, the method according to the present invention is equally applicable to, for example, manufacturing a disc-shaped rotary type mover. In that case, the dielectric pattern provided on the mover can be designed in various forms.

Further, in the illustrated embodiment, a single-strip type mover is manufactured, but it is also possible to manufacture a double-strip type or matrix-type mover by providing grooves in double rows or rows and columns.

[Effects of the Invention] As explained above, according to the first and second aspects of the present invention, a substrate made of a material that can be easily microfabricated is used, and a dielectric pattern to be obtained on this substrate is The ferroelectric material that forms the dielectric of the mover is formed on top of the microfabrication using film technology, so the ferroelectric material that forms the dielectric of the mover is not used in the conventional method. There is no need to perform fine processing on the material itself, and therefore a small dielectric mover with a desired fine pattern can be easily obtained.
As a result, it is possible to solve the conventional problem of reducing the size of electrostatic motors and electrostatic actuators.

Furthermore, since the method of the present invention applies conventional semiconductor manufacturing processes and micromachining technology, it is possible to form a desired pattern in a minute area relatively easily, which significantly reduces the manufacturing cost of the mover. becomes possible.

[Brief explanation of drawings]

1 to 4 are schematic diagrams showing each step of one embodiment of the present invention, and FIGS. 5 to 9 are schematic diagrams showing each step of another embodiment of the present invention, Figures 0 and 11 are the first
The schematic diagrams and partially enlarged exploded perspective views showing modifications and applications of the embodiment shown in Figures 1 to 4, and Figures 12 and 13 are schematic diagrams showing examples of conventional electrostatic motors, respectively. Figures Middle 1, 4: Substrate 2, 5: Groove 3, 6: Film of ferroelectric material 7: Bouley Figure 1 Straw 11 Figure Sheep 5 Figure Bow 4 Stem! 0 figure, 11'7 [1; 2 71

Claims (1)

[Claims] 1. Grooves in a predetermined pattern are formed on a substrate made of a material that can be easily microfabricated, and B is formed on the substrate on which the grooves are formed.
A power generation device using electrostatic force characterized by forming a film of a ferroelectric material such as aTiO_3 and polishing the upper surface of the thus formed film of ferroelectric material to make it flat. Manufacturing method of dielectric mover. 2. The method of manufacturing a dielectric mover according to claim 1, wherein grooves in a predetermined pattern are formed on both sides of the substrate, and films of ferroelectric material are formed on both sides of the substrate. 3. Form grooves in a predetermined pattern on a substrate made of a material that is easy to microfabricate, and place B on the substrate with the grooves formed.
An electrostatic method characterized by forming a film of a ferroelectric material such as aTiO_3, polishing the upper surface of the thus formed film of ferroelectric material to make it flat, and further removing the substrate by an etching process. A method for manufacturing a dielectric mover in a power generation device that uses force.