JP6602121B2 - Current introduction terminal, electron gun provided with the current introduction terminal, X-ray generator tube provided with the electron gun, and X-ray imaging apparatus provided with the X-ray generator tube - Google Patents

Current introduction terminal, electron gun provided with the current introduction terminal, X-ray generator tube provided with the electron gun, and X-ray imaging apparatus provided with the X-ray generator tube Download PDF

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JP6602121B2
JP6602121B2 JP2015176801A JP2015176801A JP6602121B2 JP 6602121 B2 JP6602121 B2 JP 6602121B2 JP 2015176801 A JP2015176801 A JP 2015176801A JP 2015176801 A JP2015176801 A JP 2015176801A JP 6602121 B2 JP6602121 B2 JP 6602121B2
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containing layer
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芳浩 柳沢
康雄 大橋
孝夫 小倉
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Description

本発明は、真空外囲器内外を電気的に接続するのに用いられる電流導入端子、該電流導入端子を備えた電子銃、該電子銃を備えたＸ線発生管及び該Ｘ線発生管を備えたＸ線撮影装置に関する。   The present invention relates to a current introduction terminal used for electrically connecting the inside and outside of a vacuum envelope, an electron gun provided with the current introduction terminal, an X-ray generation tube provided with the electron gun, and the X-ray generation tube. The present invention relates to an X-ray imaging apparatus provided.

真空外囲器内外を電気的に接続する電流導入端子は、真空外囲器内部に設置した素子の駆動やヒーター類の加熱のための電流の供給の際に使用される。このような電流導入端子は、例えば医療機器、非破壊検査装置等に適用可能なＸ線発生管に用いられている。Ｘ線発生管は、電子銃と、重金属などからなるターゲットとを内包する。電子銃は、電子ビームを制御するための電極、電子を放出する電子放出部を駆動するためのヒーター、電流導入端子等を備えている。また、電流導入端子は、Ｘ線発生管を構成する真空外囲器の一部として構成されているために、真空気密性と耐熱性が必要とされる。電流導入端子は、導電線材と真空外囲器とを電気的に絶縁するため、絶縁部材に導電線材を貫通させた構造となっている。このため、絶縁部材と導電線材間の真空気密性を持たせる必要がある。この手法として、接合材を用いて真空気密性を付与する手法が用いられている。電流導入端子として、例えば特許文献１に開示された従来技術が挙げられる。   A current introduction terminal for electrically connecting the inside and outside of the vacuum envelope is used when driving an element installed inside the vacuum envelope and supplying a current for heating the heaters. Such a current introduction terminal is used for, for example, an X-ray generator tube applicable to a medical device, a nondestructive inspection apparatus, and the like. The X-ray generator tube contains an electron gun and a target made of heavy metal or the like. The electron gun includes an electrode for controlling an electron beam, a heater for driving an electron emission unit that emits electrons, a current introduction terminal, and the like. Further, since the current introduction terminal is configured as a part of the vacuum envelope constituting the X-ray generating tube, it needs vacuum hermeticity and heat resistance. The current introduction terminal has a structure in which the conductive wire is passed through the insulating member in order to electrically insulate the conductive wire from the vacuum envelope. For this reason, it is necessary to provide vacuum tightness between the insulating member and the conductive wire. As this technique, a technique of imparting vacuum tightness using a bonding material is used. As the current introduction terminal, for example, the conventional technique disclosed in Patent Document 1 can be cited.

アメリカ特許第５９９４９７５号明細書US Pat. No. 5,994,975

しかしながら、上記接合材を用いて真空気密性を付与する手法では、接合材の固化に伴う収縮に起因する応力により絶縁部材にクラックが生じ、真空気密性を維持できなくなる場合があった。   However, in the method of imparting vacuum hermeticity using the above-mentioned bonding material, the insulating member may crack due to stress caused by shrinkage accompanying solidification of the bonding material, and the vacuum hermeticity may not be maintained.

本発明は、上記接合材に起因する、絶縁部材に加わる応力を低減し、絶縁部材のクラック発生を抑制し、電流導入端子及びこれを用いた装置の信頼性を向上させることを目的とする。   It is an object of the present invention to reduce the stress applied to the insulating member due to the bonding material, suppress the occurrence of cracks in the insulating member, and improve the reliability of the current introduction terminal and the apparatus using the current introducing terminal.

本発明は、上記課題を解決するために、
非金属材料を含有し互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた第１の金属含有層と、
前記第１の金属含有層の直径より大きい直径を有し、前記第１の金属含有層に対向し前記導電線材を囲むとともに前記第１の金属含有層との対向面に第２の金属含有層を有し前記非金属材料を含有する非金属ワッシャと、
前記第１の金属含有層と前記非金属ワッシャとの間で前記第１の金属含有層と前記非金属ワッシャにそれぞれ接し、前記導電線材を囲む接合材と、
を備え、
前記非金属ワッシャの径方向において、前記非金属ワッシャと前記接合材とが接する長さが前記第１の金属含有層と前記接合材とが接する長さより長いことを特徴とする電流導入端子を提供するものである。
また、本発明は、非金属材料を含有し互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた第１の金属含有層と、
前記第１の金属含有層に対向し前記導電線材を囲むとともに前記第１の金属含有層との対向面に第２の金属含有層を有し前記非金属材料を含有する非金属ワッシャと、
前記第１の金属含有層と前記非金属ワッシャとの間で前記第１の金属含有層と前記非金属ワッシャにそれぞれ接する間隙と、前記非金属ワッシャの前記絶縁部材との対向面とは反対側の面と、に配置され前記導電線材を囲む接合材と、
を備え、
前記非金属ワッシャの径方向において、前記非金属ワッシャと前記接合材とが接する長さが前記第１の金属含有層と前記接合材とが接する長さより長いことを特徴とする電流導入端子を提供するものである。
さらに、本発明は、互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた金属含有層と、
前記金属含有層の直径より大きい直径を有し、前記金属含有層に対向し前記導電線材を囲むワッシャと、
前記金属含有層と前記ワッシャとの間で前記金属含有層と前記ワッシャにそれぞれ接し、前記導電線材を囲む接合材と、
を備え、
前記ワッシャの径方向において、前記ワッシャと前記接合材とが接する長さが前記金属含有層と前記接合材とが接する長さより長く、前記ワッシャは前記金属含有層よりも前記接合材との濡れ性が高いことを特徴とする電流導入端子を提供するものである。
またさらに、本発明は、互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた金属含有層と、前記金属含有層に対向し前記導電線材を囲むワッシャと、
前記金属含有層と前記ワッシャとの間で前記金属含有層と前記ワッシャにそれぞれ接する間隙と、前記ワッシャの前記絶縁部材との対向面とは反対側の面と、に配置され前記導電線材を囲む接合材と、
を備え、
前記ワッシャの径方向において、前記ワッシャと前記接合材とが接する長さが前記金属含有層と前記接合材とが接する長さより長く、前記ワッシャは前記金属含有層よりも前記接合材との濡れ性が高いことを特徴とする電流導入端子を提供するものである。 In order to solve the above problems, the present invention
An insulating member having two surfaces that contain non-metallic materials and are located on opposite sides;
A conductive wire penetrating between the two surfaces of the insulating member;
A first metal-containing layer provided on one of the two surfaces so as to surround the conductive wire;
The second metal-containing layer has a diameter larger than the diameter of the first metal-containing layer, faces the first metal-containing layer , surrounds the conductive wire, and faces the first metal-containing layer. A non-metallic washer containing the non-metallic material ,
A bonding material that is in contact with the first metal-containing layer and the non-metallic washer between the first metal-containing layer and the non-metallic washer, and surrounds the conductive wire;
With
In the radial direction of the non-metallic washers, provide a current introduction terminal, characterized in that longer than the length of the length of said non-metallic washers and the bonding material is in contact said and bonding material is in contact with the first metal-containing layer To do.
The present invention also includes an insulating member having two surfaces that contain a nonmetallic material and are located on opposite sides of each other;
A conductive wire penetrating between the two surfaces of the insulating member;
A first metal-containing layer provided on one of the two surfaces so as to surround the conductive wire;
A metallic washer containing said non-metallic material has a second metal-containing layer on the opposite surface of the first metal-containing layer with facing the first metal-containing layer surrounding the conductive wire,
A gap in contact with the said non-metallic washer and the first metal-containing layer between said non-metallic washer and the first metal-containing layer, opposite to the surface facing the said insulating member of said non-metallic washer And a bonding material disposed on the surface and surrounding the conductive wire,
With
In the radial direction of the non-metallic washers, provide a current introduction terminal, characterized in that longer than the length of the length of said non-metallic washers and the bonding material is in contact said and bonding material is in contact with the first metal-containing layer To do.
Furthermore, the present invention provides an insulating member having two surfaces located on opposite sides of each other;
A conductive wire penetrating between the two surfaces of the insulating member;
A metal-containing layer provided on one surface of the two surfaces so as to surround the conductive wire;
A washer having a diameter greater than the diameter of the metal-containing layer, facing the metal-containing layer and surrounding the conductive wire;
A bonding material that is in contact with the metal-containing layer and the washer between the metal-containing layer and the washer, and surrounds the conductive wire;
With
In the radial direction of the washer, the length of contact between the washer and the bonding material is longer than the length of contact between the metal-containing layer and the bonding material, and the washer is wettable with the bonding material more than the metal-containing layer. The current introduction terminal is characterized by having a high current.
Still further, the present invention provides an insulating member having two surfaces located on opposite sides of each other;
A conductive wire penetrating between the two surfaces of the insulating member;
A metal-containing layer provided on one of the two surfaces so as to surround the conductive wire, a washer facing the metal-containing layer and surrounding the conductive wire,
The gap between the metal-containing layer and the washer is in contact with the metal-containing layer and the washer, and the surface of the washer opposite to the surface facing the insulating member, and surrounds the conductive wire. A bonding material;
With
In the radial direction of the washer, the length of contact between the washer and the bonding material is longer than the length of contact between the metal-containing layer and the bonding material, and the washer is wettable with the bonding material more than the metal-containing layer. The current introduction terminal is characterized by having a high current.

また、本発明は、
上記電流導入端子と、前記導電線材に電気的に接続された電子放出部又は電子放出部を加熱する加熱部の少なくともいずれか一方とを有することを特徴とする電子銃、
上記電子銃を備える陰極と、前記電子銃に対向するターゲットを備える陽極と、前記陰極と前記陽極との間において前記陰極と前記陽極とに接続される絶縁管とを備えることを特徴とするＸ線発生管、及び、
上記Ｘ線発生管と、前記Ｘ線発生管から放出され、被検体を透過したＸ線を検出するＸ線検出装置と、前記Ｘ線発生管と前記Ｘ線検出装置とを連携制御する制御装置とを有することを特徴とするＸ線撮影装置を提供するものでもある。 The present invention also provides:
An electron gun comprising: the current introduction terminal; and at least one of an electron emission portion electrically connected to the conductive wire or a heating portion for heating the electron emission portion;
A cathode comprising the electron gun, an anode comprising a target facing the electron gun, and an insulating tube connected to the cathode and the anode between the cathode and the anode X Line generator tube, and
The X-ray generation tube, an X-ray detection device that detects X-rays emitted from the X-ray generation tube and transmitted through the subject, and a control device that controls the X-ray generation tube and the X-ray detection device in a coordinated manner The present invention also provides an X-ray imaging apparatus characterized by comprising:

本発明は、前記ワッシャの径方向における接合材と接する長さを、金属含有層よりワッシャを大きくすることによって、接合材に起因する絶縁部材に加わる応力を低減し、絶縁部材のクラック発生を抑制し、真空気密性を向上させるものである。   The present invention reduces the stress applied to the insulating member caused by the bonding material by suppressing the occurrence of cracks in the insulating member by increasing the length of the washer in contact with the bonding material in the radial direction by making the washer larger than the metal-containing layer. Thus, the vacuum tightness is improved.

（ａ）は本発明の第１の実施形態に係る電流導入端子の断面図、（ｂ）及び（ｃ）は絶縁部材とワッシャの位置関係の説明図である。(A) is sectional drawing of the electric current introduction | transduction terminal which concerns on the 1st Embodiment of this invention, (b) And (c) is explanatory drawing of the positional relationship of an insulating member and a washer. 図１における破線部分の拡大図である。It is an enlarged view of the broken-line part in FIG. 図１における破線部分の拡大図を用いた、第１の実施形態での応力発生状態の説明図である。It is explanatory drawing of the stress generation state in 1st Embodiment using the enlarged view of the broken-line part in FIG. 本発明の第２の実施形態に係る電流導入端子の断面図である。It is sectional drawing of the current introduction terminal which concerns on the 2nd Embodiment of this invention. 本発明の第３の実施形態に係る電流導入端子の断面図である。It is sectional drawing of the current introduction terminal which concerns on the 3rd Embodiment of this invention. 本発明の第４の実施形態に係る電流導入端子の断面図である。It is sectional drawing of the current introduction terminal which concerns on the 4th Embodiment of this invention. （ａ）は本発明に係るＸ線発生管の断面図、（ｂ）は本発明に係る電子銃の断面図である。(A) is sectional drawing of the X-ray generator tube which concerns on this invention, (b) is sectional drawing of the electron gun which concerns on this invention. 本発明に係るＸ線発生管を用いた本発明に係るＸ線撮影装置を説明する図である。It is a figure explaining the X-ray imaging apparatus which concerns on this invention using the X-ray generator tube which concerns on this invention. 特許文献１の電流導入端子の断面図である。10 is a cross-sectional view of a current introduction terminal of Patent Document 1. FIG. 図９における破線部分の拡大図を用いた、特許文献１の電流導入端子の応力発生状態の説明図である。It is explanatory drawing of the stress generation state of the current introduction terminal of patent document 1 using the enlarged view of the broken-line part in FIG.

＜第１の実施形態＞
本発明の第１の実施形態を、図１を用いて説明する。図１（ａ）に示される電流導入端子１０１は、絶縁部材１０２、導電線材１０３、金属含有層１０４、ワッシャ１０５、接合材１０６で構成されている。絶縁部材１０２は、互いに反対側に位置する２つの面を有している。絶縁部材１０２は、上記２つの面間に導電線材１０３を貫通させ、この導電線材１０３を保持している。金属含有層１０４は、一方の面の導電線材１０３の周側を囲む領域に設けられている。ワッシャ１０５は、一方の面の側において、金属含有層１０４に対向し、導電線材１０３の周側を囲んで設けられている。接合材１０６は、電流導入端子１０１の導電線材１０３が貫通した構造における真空気密性を確保し、導電線材１０３、ワッシャ１０５及び絶縁部材１０２を互いに固定するために、絶縁部材１０２とワッシャ１０５の間に配置されている。接合材１０６は、金属含有層１０４とワッシャ１０５との間で、金属含有層１０４とワッシャ１０５にそれぞれ接し、導電線材１０３の周側を囲んで設けられている。また、接合材１０６の内周側は導電線材１０３に密着している。 <First Embodiment>
A first embodiment of the present invention will be described with reference to FIG. A current introduction terminal 101 shown in FIG. 1A includes an insulating member 102, a conductive wire 103, a metal-containing layer 104, a washer 105, and a bonding material 106. The insulating member 102 has two surfaces located on opposite sides. The insulating member 102 penetrates the conductive wire 103 between the two surfaces and holds the conductive wire 103. The metal-containing layer 104 is provided in a region surrounding the peripheral side of the conductive wire 103 on one surface. The washer 105 is provided on one surface side so as to face the metal-containing layer 104 and surround the peripheral side of the conductive wire 103. The bonding material 106 is provided between the insulating member 102 and the washer 105 in order to ensure the vacuum tightness in the structure in which the conductive wire 103 of the current introduction terminal 101 penetrates and to fix the conductive wire 103, the washer 105 and the insulating member 102 to each other. Is arranged. The bonding material 106 is provided between the metal-containing layer 104 and the washer 105 so as to be in contact with the metal-containing layer 104 and the washer 105, and to surround the periphery of the conductive wire 103. The inner peripheral side of the bonding material 106 is in close contact with the conductive wire 103.

本発明においては、ワッシャ１０５の径方向において、ワッシャ１０５と接合材１０６とが接する長さが金属含有層１０４と接合材１０６とが接する長さより長くなっている。この構成を採用していることにより、接合材１０６に起因する、絶縁部材１０２に加わる応力が減少し、絶縁部材１０２のクラック発生を低減させることができる。効果の理由については後述する。なお、図面では１本の導電線材１０３の付近のみを示しているが、通常、絶縁部材１０２には、必要な耐電圧を確保できる間隔を開けて複数の導電線材１０３が貫通して配置される。また、金属含有層１０４、ワッシャ１０５及び接合材１０６は、各導電線材１０３毎に分けて配置されるものである。なお、１０７〜１０９はそれぞれ接触面を示しており、１０７は金属含有層１０４と接合材１０６の接触面、１０８はワッシャ１０５と接合材１０６の接触面、１０９は絶縁部材１０２と金属含有層１０４の接触面である。 In the present invention, in the radial direction of the washer 105, the length of contact between the washer 105 and the bonding material 106 is longer than the length of contact between the metal-containing layer 104 and the bonding material 106. By adopting this configuration, the stress applied to the insulating member 102 due to the bonding material 106 is reduced, and the generation of cracks in the insulating member 102 can be reduced. The reason for the effect will be described later. In the drawing, only the vicinity of one conductive wire 103 is shown, but normally, a plurality of conductive wires 103 are arranged through the insulating member 102 at intervals that can ensure a required withstand voltage. . Further, the metal-containing layer 104, the washer 105, and the bonding material 106 are arranged separately for each conductive wire 103. Reference numerals 107 to 109 denote contact surfaces, 107 is a contact surface between the metal-containing layer 104 and the bonding material 106, 108 is a contact surface between the washer 105 and the bonding material 106, and 109 is an insulating member 102 and the metal-containing layer 104. The contact surface.

絶縁部材１０２とワッシャ１０５は、図１（ｂ）に示すように、絶縁部材１０２を真空側に位置させ、ワッシャ１０５を大気側に位置させる配置とすることができる。真空側と大気側とは、本発明の電流導入端子１０１を用いて図７に示すＸ線発生管７０１を構成した場合における内部空間７１０側とその外部側をいう。図１（ｂ）に示す絶縁部材１０２とワッシャ１０５の配置とする場合、絶縁部材１０２が、Ｘ線発生管７０１の内部空間７１０を形成する容器の構造部材に気密かつ強固に接続される。内部空間７１０は真空雰囲気（減圧雰囲気）で、外部は大気圧雰囲気である。内部空間７１０とその外部間の差圧がワッシャ１０５（及び導電線材１０３）を、容器の構造部材への絶縁部材１０２の接合部へ押し付けるように働く。このため、この接合部の接合強度の安定性を向上させる点で有利である。 As shown in FIG. 1B, the insulating member 102 and the washer 105 can be arranged such that the insulating member 102 is positioned on the vacuum side and the washer 105 is positioned on the atmosphere side. The vacuum side and the atmosphere side refer to the inner space 710 side and the outer side when the X-ray generation tube 701 shown in FIG. 7 is configured using the current introduction terminal 101 of the present invention. In the case of the arrangement of the insulating member 102 and the washer 105 shown in FIG. 1B, the insulating member 102 is hermetically and firmly connected to the structural member of the container forming the internal space 710 of the X-ray generation tube 701. The internal space 710 is a vacuum atmosphere (reduced pressure atmosphere), and the outside is an atmospheric pressure atmosphere. The differential pressure between the interior space 710 and its exterior acts to press the washer 105 (and the conductive wire 103) against the joint of the insulating member 102 to the structural member of the container. For this reason, it is advantageous in terms of improving the stability of the joint strength of the joint.

絶縁部材１０２とワッシャ１０５は、図１（ｃ）に示すように、絶縁部材１０２を大気側に位置させ、ワッシャ１０５を真空側に位置させる配置とすることもできる。図１(ｃ)の配置の場合。絶縁部材１０２とワッシャ１０５を接合する接合材１０６が、図７に示すＸ線発生管７０１における内部空間７１０に配置されるため、接合材１０６の腐食抑制等の化学的安定性の点で有利である。なお、例えば図８で説明するＸ線発生装置８０２で用いる絶縁性液体８１２は、その純度の管理が比較的容易である。このＸ線発生装置８０２のＸ線発生管７０１のように、絶縁性液体８１２に浸漬される場合、絶縁性液体８１２の純度を適切に管理することで接合材１０６の化学的安定性を保つことができる。このため、接合部の機械的強度の安定性の重視する場合には、図１（ｂ）の形態とすることが好ましい。   As shown in FIG. 1C, the insulating member 102 and the washer 105 may be arranged such that the insulating member 102 is positioned on the atmosphere side and the washer 105 is positioned on the vacuum side. In the case of the arrangement of FIG. Since the bonding material 106 for bonding the insulating member 102 and the washer 105 is disposed in the internal space 710 in the X-ray generation tube 701 shown in FIG. 7, it is advantageous in terms of chemical stability such as corrosion suppression of the bonding material 106. is there. For example, the purity of the insulating liquid 812 used in the X-ray generator 802 described in FIG. 8 is relatively easy to manage. When immersed in the insulating liquid 812 as in the X-ray generating tube 701 of the X-ray generator 802, the chemical stability of the bonding material 106 is maintained by appropriately managing the purity of the insulating liquid 812. Can do. For this reason, when emphasizing the stability of the mechanical strength of the joint, it is preferable to adopt the form of FIG.

絶縁部材１０２を構成する絶縁性を有する素材としては、例えば金属酸化物、金属窒化物等を用いることができ、例えばアルミナ、ジルコニア、窒化けい素等のセラミックス等から選択可能である。コスト、加工性からは、セラミックス素材の一つであるアルミナが好適に用いられる。絶縁部材１０２と導電線材１０３は、電流導入端子１０１の接合材１０６による接合後の絶縁部材１０２の残留応力を減らすために、熱膨張率が同等又は近い素材で構成することが好ましい。例えば、絶縁部材１０２としてアルミナを用いた場合、アルミナと熱膨張率が近いコバールを導電線材１０３として用いることにより、電流導入端子１０１の接合材１０６による接合後の絶縁部材１０２の残留応力を減らすことができる。絶縁部材１０２の厚さは、導電線材１０３を固定できればよく、３ｍｍ以上１０ｍｍ以下を用いることができ、より好ましくは、４ｍｍ以上７ｍｍ以下である。絶縁部材１０２は、通常、複数の導電線材１０３を貫通させて保持する。絶縁部材１０２の直径は、所望の本数の導電線材１０３を配置した時に、各導電線材１０３の間の耐電圧を確保できる絶縁部材１０２の大きさが得られるものであればよい。例えば、Ｘ線発生管に用いる電子銃の絶縁部材１０２の場合、導電線材１０３の本数によっても異なるが、１５ｍｍ以上２５ｍｍ以下が望ましい。 As an insulating material constituting the insulating member 102, for example, a metal oxide, a metal nitride, or the like can be used, and for example, it can be selected from ceramics such as alumina, zirconia, and silicon nitride. From the viewpoint of cost and workability, alumina which is one of ceramic materials is preferably used. Insulating member 102 and conductive wire 103 are preferably made of materials having the same or similar thermal expansion coefficient in order to reduce residual stress of insulating member 102 after joining by joining material 106 of current introduction terminal 101. For example, when alumina is used as the insulating member 102, the residual stress of the insulating member 102 after being bonded by the bonding material 106 of the current introduction terminal 101 is reduced by using, as the conductive wire 103, Kovar having a thermal expansion coefficient close to that of alumina. Can do. The thickness of the insulating member 102 may be 3 mm or more and 10 mm or less, and more preferably 4 mm or more and 7 mm or less as long as the conductive wire 103 can be fixed. The insulating member 102 normally holds a plurality of conductive wires 103 penetrating. The diameter of the insulating member 102 is not particularly limited as long as a desired size of the insulating member 102 that can ensure a withstand voltage between the conductive wire members 103 when the desired number of conductive wire members 103 are arranged. For example, in the case of the insulating member 102 of the electron gun used for the X-ray generating tube, it is preferably 15 mm or more and 25 mm or less, although it varies depending on the number of the conductive wires 103.

導電線材１０３を構成する素材は、真空内外を電気的に接続可能な導電材料から選択される。この材料としては、例えば銅、銀、ステンレス、真鍮、タングステン、コバール等から選択可能である。導電線材１０３の直径は、絶縁部材１０２を通して、内部と外部の通電が取れればよいが、例えば電流導入端子１０１を電子銃に用いる場合、電子銃のハンドリングや製造のしやすさ等から、０．２ｍｍ以上１．５ｍｍ以下が望ましい。 The material constituting the conductive wire 103 is selected from conductive materials that can be electrically connected inside and outside the vacuum. This material can be selected from, for example, copper, silver, stainless steel, brass, tungsten, and kovar. The diameter of the conductive wire material 103, through the insulating member 102, the may be Torere internal and outer conducting, for example, when using the current introduction terminal 101 to the electron gun, the ease of handling and manufacture of the electron gun or the like, 0 .2mm to 1.5mm is desirable.

金属含有層１０４は、接合材１０６の濡れ性を向上させる目的で設けられる。金属含有層１０４は、同じ絶縁部材１０２に配置される複数の導電線材１０３毎に分けて配置される。金属含有層１０４の形成手段は、連続膜からなるデポジション、イオン打ちこみ等があり、特に、金属含有ペーストを塗布した後に焼成して焼き付け層を形成するメタライズ法が好適である。メタライズ用の金属材料としては、Ｔｉを含む金属やＭｏ−Ｍｎ等が好適に用いられ、メタライズ用の金属材料を絶縁部材１０２の所望の領域に塗工し、その後、不活性化雰囲気で焼成することで金属含有層１０４を形成することができる。金属含有層１０４の厚さは、組成によっても異なるが、概ね０．１〜５μｍが好ましい。 The metal-containing layer 104 is provided for the purpose of improving the wettability of the bonding material 106. The metal-containing layer 104 is arranged separately for each of the plurality of conductive wires 103 arranged on the same insulating member 102. As a means for forming the metal-containing layer 104, there are deposition made of a continuous film, ion implantation, and the like. In particular, a metallization method in which a baking layer is formed by baking after applying a metal-containing paste is suitable. As the metal material for metallization, a metal containing Ti, Mo-Mn, or the like is preferably used, and the metal material for metallization is applied to a desired region of the insulating member 102 and then fired in an inert atmosphere. Thus, the metal-containing layer 104 can be formed. The thickness of the metal-containing layer 104 varies depending on the composition, but is preferably about 0.1 to 5 μm.

ワッシャ１０５は、同じ絶縁部材１０２に配置される複数の導電線材１０３毎に分けて配置される。ワッシャ１０５の構成材料としては、金属、金属酸化物、金属炭化物、金属窒化物等のセラミックスを用いることができる。金属の場合、コバール、銅、鉄、ステンレス等を用いることができる。セラミックスの場合、アルミナ、ジルコニア、炭化ケイ素等、導電性の有無にかかわらず、所定の強度を有するものを用いることができる。ワッシャ１０５の厚さは、接合材１０６や絶縁部材１０２からの応力を受けるため、所定の強度が必要で、材料によっても異なるが、０．２ｍｍ以上が望ましい。厚さの上限は、強度の観点からはないが、大型化やコストアップ等の問題から、２．０ｍｍ以下が望ましい。より好ましくは、０．５ｍｍ以上１．５ｍｍ以下である。ワッシャ１０５の直径は、金属含有層１０４より大きいことが望ましく、また、中央の開口部を除いて、気密性を保つためには幅１．０ｍｍ以上が望ましい。特性上、この幅に制限はないが、多数の導電線材１０３を配置するためには、実質的に３．０ｍｍ以下が望ましい。また、強度と真空気密性の観点から厚さと直径のアスペクト比が１／２〜１／２０であることが望ましく、より好ましくは、１／５〜１／１０である。 The washer 105 is arranged separately for each of the plurality of conductive wires 103 arranged on the same insulating member 102. As a constituent material of the washer 105, ceramics such as metal, metal oxide, metal carbide, and metal nitride can be used. In the case of a metal, Kovar, copper, iron, stainless steel, etc. can be used. In the case of ceramics, those having a predetermined strength such as alumina, zirconia, silicon carbide and the like can be used regardless of the presence or absence of conductivity. The thickness of the washer 105 receives stress from the bonding material 106 and the insulating member 102, and therefore requires a predetermined strength and varies depending on the material, but is preferably 0.2 mm or more. The upper limit of the thickness is not from the viewpoint of strength, but is preferably 2.0 mm or less in view of problems such as an increase in size and cost. More preferably, it is 0.5 mm or more and 1.5 mm or less. The diameter of the washer 105 is desirably larger than that of the metal-containing layer 104, and a width of 1.0 mm or more is desirable in order to maintain airtightness except for the central opening. Although the width is not limited in terms of characteristics, in order to arrange a large number of conductive wires 103, it is substantially desirable that the width is 3.0 mm or less. From the viewpoint of strength and vacuum tightness, the aspect ratio of thickness to diameter is desirably 1/2 to 1/20, and more preferably 1/5 to 1/10.

絶縁部材１０２とワッシャ１０５は、電流導入端子１０１の接合材形成後の残留応力を減らすために、熱膨張率が同等又は近い素材で構成することが好ましい。例えば、絶縁部材１０２としてアルミナを用いた場合、ワッシャ１０５にアルミナと熱膨張率が近いコバールを用いると、電流導入端子１０１の接合材形成後の残留応力を減らすことができ、好適に用いられる。また、絶縁部材１０２にアルミナを用いた場合、ワッシャ１０５にはアルミナもしくは、アルミナを含有するセラミックスをより好適に用いることができる。   Insulating member 102 and washer 105 are preferably made of a material having the same or similar thermal expansion coefficient in order to reduce residual stress after forming the bonding material of current introduction terminal 101. For example, when alumina is used as the insulating member 102, if the washer 105 is made of Kovar having a thermal expansion coefficient close to that of alumina, the residual stress after forming the bonding material of the current introduction terminal 101 can be reduced, which is preferably used. When alumina is used for the insulating member 102, alumina or ceramics containing alumina can be more suitably used for the washer 105.

接合材１０６には、例えば金、銀、銅、錫等を含有する合金からなるろう材を使用することができる。接合材１０６は、ワッシャ１０５や金属含有層１０４の組成に応じて、適宜、選択することができる。ろう材によるろう付けは、固体のろう材料をろう付け箇所に設置し、所定の温度に設定して、一旦ろう材料を溶融させた後、室温に戻した際にそれぞれの材料表面との間を接合させる手法である。接合材と１０６としてろう材を用いる場合、接合材１０６の厚さは、５０μｍ以上５００μｍ以下が望ましく、好適には、８０μｍ以上２００μｍである。接合材１０６は、所望の厚さ、面積になるように、固体の状態で金属含有層１０４とワッシャ１０５の間に配置し、不活性雰囲気下で溶融させることで接合することができる。   As the bonding material 106, for example, a brazing material made of an alloy containing gold, silver, copper, tin, or the like can be used. The bonding material 106 can be appropriately selected according to the composition of the washer 105 and the metal-containing layer 104. In brazing with a brazing material, a solid brazing material is placed at a brazing point, set to a predetermined temperature, once the brazing material is melted, and then returned to room temperature, the space between each material surface is reduced. It is a technique to join. When a brazing material is used as the bonding material and 106, the thickness of the bonding material 106 is desirably 50 μm or more and 500 μm or less, and preferably 80 μm or more and 200 μm. The bonding material 106 can be bonded by being disposed between the metal-containing layer 104 and the washer 105 in a solid state so as to have a desired thickness and area and melting in an inert atmosphere.

接合材１０６の金属含有層１０４とワッシャ１０５に対する濡れの状態を、図２を用いて説明する。図２では、金属含有層１０４の濡れ性よりワッシャ１０５の濡れ性を良くしている。濡れ性の表現方法として接触角を測定する方法があるが、ここでは、濡れ性を接合材１０６の固化後の状態で規定する。接合材１０６は、図２に破線で示す接合材表面２０４で表わされるように、ワッシャ１０５側の接合材先端部（応力集中点Ｂ）２０１と、金属含有層１０４側の接合材先端部２０２とを結んだ直線２０３から、凝固時に僅かに収縮し、内側に入り込んでいる。しかし、この収縮は僅かであるため、実質的に、直線２０３で近似できる。角度θ１は、金属含有層１０４のワッシャ１０５との対向面と直線２０３との交差角、角度θ２は、ワッシャ１０５の金属含有層１０４との対向面と直線２０３との交差角である。ここで、角度θ１＞角度θ２のため、濡れ性は、ワッシャ１０５の方が良い。濡れ性は、材質や僅かな酸化状態、表面の凹凸などにより容易に変化させることができる。   The wet state of the bonding material 106 with respect to the metal-containing layer 104 and the washer 105 will be described with reference to FIG. In FIG. 2, the wettability of the washer 105 is made better than the wettability of the metal-containing layer 104. As a wettability expression method, there is a method of measuring a contact angle. Here, the wettability is defined in a state after the bonding material 106 is solidified. The bonding material 106 includes a bonding material front end portion (stress concentration point B) 201 on the washer 105 side and a bonding material front end portion 202 on the metal-containing layer 104 side, as represented by a bonding material surface 204 indicated by a broken line in FIG. From the straight line 203 connecting the two, it shrinks slightly during solidification and enters the inside. However, since this shrinkage is slight, it can be substantially approximated by a straight line 203. The angle θ1 is the intersection angle between the surface of the metal-containing layer 104 facing the washer 105 and the straight line 203, and the angle θ2 is the angle of intersection between the surface of the washer 105 facing the metal-containing layer 104 and the straight line 203. Here, since the angle θ1> the angle θ2, the washer 105 is better in wettability. The wettability can be easily changed by the material, slight oxidation state, surface irregularities and the like.

次に、特許文献１の技術と対比しながら本発明の効果について説明する。   Next, the effects of the present invention will be described in comparison with the technique of Patent Document 1.

特許文献１の電流導入端子を示す図９において、電流導入端子９０１は、絶縁部材９０２、ピン９０３、金属含有層９０４、接合材９０５で構成されている。ここで、特許文献１のピン９０３は、本実施形態の図１の導電線材１０３とワッシャ１０５を一体化させた部材と見なすことができる。なお、特許文献１では接合材９０５は明示されていないが、金属含有層９０４と同様の長さで接合材９０５を補充して配置した図としている。   In FIG. 9 showing the current introduction terminal of Patent Document 1, the current introduction terminal 901 includes an insulating member 902, a pin 903, a metal-containing layer 904, and a bonding material 905. Here, the pin 903 of Patent Document 1 can be regarded as a member in which the conductive wire 103 and the washer 105 of FIG. In Patent Document 1, the bonding material 905 is not clearly shown, but the bonding material 905 is replenished and arranged with the same length as the metal-containing layer 904.

図１０は、本発明との技術的差異を説明するために、図９の破線で囲った部分を拡大して示したものである。図１０におけるピン９０３は、図１のワッシャ１０５に相当する、ピン９０３のワッシャ部である。以下、図１０における９０３が示す部材を「ピン（ワッシャ部）」と記載する。また、１００５は絶縁部材９０２の応力集中点（応力集中点Ｃ）、１００６はピン（ワッシャ部）９０３の応力集中点（応力集中点Ｄ）を示す。   FIG. 10 is an enlarged view of a portion surrounded by a broken line in FIG. 9 in order to explain a technical difference from the present invention. A pin 903 in FIG. 10 is a washer portion of the pin 903 corresponding to the washer 105 in FIG. Hereinafter, the member indicated by 903 in FIG. 10 is referred to as a “pin (washer portion)”. Reference numeral 1005 denotes a stress concentration point (stress concentration point C) of the insulating member 902, and 1006 denotes a stress concentration point (stress concentration point D) of the pin (washer portion) 903.

図１０に示される応力１００１は、絶縁部材９０２がピン（ワッシャ部）９０３から受ける、絶縁部材９０２の応力集中点Ｃ１００５における応力、応力１００２は、絶縁部材９０２が接合材９０５から受ける、応力集中点Ｃ１００５における応力を示している。また、応力１００３は、ピン（ワッシャ部）９０３が絶縁部材９０２から受ける、応力集中点Ｄ１００６における応力、応力１００４は、ピン（ワッシャ部）９０３が接合材９０５から受ける、応力集中点Ｄ１００６における応力を示している。応力１００１は、絶縁部材９０２のピン（ワッシャ部）９０３との対向面に対して垂直方向であり、応力１００２は、絶縁部材９０２のピン（ワッシャ部）９０３との対向面に対して平行方向である。また、応力１００３は、ピン（ワッシャ部）９０３の絶縁部材９０２との対向面に対して垂直方向であり、応力１００４は、ピン（ワッシャ部）９０３の絶縁部材９０２との対向面に対して平行方向である。この図１０で示される各応力１００１，１００２，１００３，１００４は、接合材９０５を溶融させてから固化させて、金属含有層９０４とピン（ワッシャ部）９０３を接合した後の固化時の残留応力として発現する。金属含有層９０４は、０．１〜５μｍ程度と薄いため、応力集中点Ｃ１００５は、絶縁部材９０２の表面に発生する。応力１００１，１００３のベクトルの向きは、接合材９０５のピン（ワッシャ部）９０３及び金属含有層９０４に対する濡れ方で決まる。   The stress 1001 shown in FIG. 10 is the stress at the stress concentration point C1005 of the insulating member 902 that the insulating member 902 receives from the pin (washer portion) 903, and the stress 1002 is the stress concentration point that the insulating member 902 receives from the bonding material 905. The stress in C1005 is shown. The stress 1003 is the stress at the stress concentration point D1006 that the pin (washer portion) 903 receives from the insulating member 902, and the stress 1004 is the stress at the stress concentration point D1006 that the pin (washer portion) 903 receives from the bonding material 905. Show. The stress 1001 is perpendicular to the surface of the insulating member 902 facing the pin (washer portion) 903, and the stress 1002 is parallel to the surface of the insulating member 902 facing the pin (washer portion) 903. is there. The stress 1003 is perpendicular to the surface of the pin (washer portion) 903 facing the insulating member 902, and the stress 1004 is parallel to the surface of the pin (washer portion) 903 facing the insulating member 902. Direction. The stresses 1001, 1002, 1003, and 1004 shown in FIG. 10 are the residual stresses at the time of solidification after the bonding material 905 is melted and then solidified to join the metal-containing layer 904 and the pin (washer portion) 903. As expressed. Since the metal-containing layer 904 is as thin as about 0.1 to 5 μm, the stress concentration point C1005 is generated on the surface of the insulating member 902. The direction of the vectors of the stresses 1001 and 1003 is determined by how the bonding material 905 gets wet with respect to the pins (washers) 903 and the metal-containing layer 904.

絶縁部材９０２にクラックが生じることによる気密性の信頼性低下は、前述したような絶縁部材９０２表面の残留応力（引っ張り応力）に起因する。   The reliability deterioration of the airtightness due to the occurrence of cracks in the insulating member 902 is caused by the residual stress (tensile stress) on the surface of the insulating member 902 as described above.

次に、本実施形態の効果を、図３を用いて説明する。図３は、図１の破線で囲った部分の拡大図で、図１０と対比した説明図である。図３において、３０５は、直線２０３を絶縁部材１０２の方向に延長した時の絶縁部材１０２のワッシャ１０５との対向面との交点（応力集中点Ａ）である。図３において、応力３０１は、絶縁部材１０２がワッシャ１０５から受ける、応力集中点Ａ３０５における応力、応力３０２は、絶縁部材１０２が接合材１０６から受ける、応力集中点Ａ３０５における応力を示している。応力成分３０１ｘは、絶縁部材１０２がワッシャ１０５より受ける応力３０１のＸ方向の応力成分で、絶縁部材１０２のワッシャ１０５との対向面に対して平行な方向の成分である。応力３０３は、ワッシャ１０５が絶縁部材１０２から受ける、応力集中点Ｂ２０１における応力、応力３０４は、ワッシャ１０５が接合材１０６から受ける、応力集中点Ｂ２０１における応力を示している。応力成分３０３ｘは、ワッシャ１０５が絶縁部材１０２より受ける応力３０３のＸ方向の応力成分で、応力３０３の、ワッシャ１０５の絶縁部材１０２との対向面に対して平行な成分である。図３で示される応力３０１，３０３を示すベクトルの向きは、接合材１０６の金属含有層１０４とワッシャ１０５に対する濡れ性により決まり、ここでは、（金属含有層１０４の濡れ性）＜（ワッシャ１０５の濡れ性）としている。 Next, the effect of this embodiment is demonstrated using FIG. FIG. 3 is an enlarged view of a portion surrounded by a broken line in FIG. 1, and is an explanatory view as compared with FIG. In FIG. 3, reference numeral 305 denotes an intersection (stress concentration point A) with the surface of the insulating member 102 facing the washer 105 when the straight line 203 is extended in the direction of the insulating member 102. In FIG. 3, the stress 301 indicates the stress at the stress concentration point A 305 that the insulating member 102 receives from the washer 105, and the stress 302 indicates the stress at the stress concentration point A 305 that the insulating member 102 receives from the bonding material 106. The stress component 301x is a stress component in the X direction of the stress 301 that the insulating member 102 receives from the washer 105, and is a component in a direction parallel to the surface of the insulating member 102 facing the washer 105. The stress 303 indicates the stress at the stress concentration point B201 that the washer 105 receives from the insulating member 102, and the stress 304 indicates the stress at the stress concentration point B201 that the washer 105 receives from the bonding material 106. The stress component 303 x is a stress component in the X direction of the stress 303 received by the washer 105 from the insulating member 102, and is a component parallel to the surface of the washer 105 facing the insulating member 102. The direction of the vector indicating the stresses 301 and 303 shown in FIG. 3 is determined by the wettability of the bonding material 106 to the metal-containing layer 104 and the washer 105. Here, (wetability of the metal-containing layer 104) <(of the washer 105) Wettability).

図３に示すように、Ａ点３０５における絶縁部材１０２の引っ張り応力は、応力３０２より応力成分３０１ｘを差し引いた値となる。したがって、特許文献１の場合と比べて応力が減じられ、絶縁部材１０２のクラック発生を低減できる。   As shown in FIG. 3, the tensile stress of the insulating member 102 at the point A 305 is a value obtained by subtracting the stress component 301 x from the stress 302. Therefore, compared with the case of patent document 1, a stress is reduced and the crack generation of the insulating member 102 can be reduced.

＜第２の実施形態＞
図４に本発明の第２の実施形態を示す。電流導入端子１０１の構成部材は、第１の実施形態と同じであるが、ワッシャ１０５に非金属材料を用い、その絶縁部材１０２との対向面に金属含有層４０１を配置した点が異なる。本実施形態の説明において、絶縁部材１０２のワッシャ１０５との対向面（第１の実施形態における一方の面）に設けた金属含有層を第１の金属含有層１０４、ワッシャ１０５の絶縁部材１０２との対向面に設けた金属含有層を第２の金属含有層４０１とする。 <Second Embodiment>
FIG. 4 shows a second embodiment of the present invention. The constituent members of the current introduction terminal 101 are the same as those in the first embodiment, except that a non-metallic material is used for the washer 105 and the metal-containing layer 401 is disposed on the surface facing the insulating member 102. In the description of this embodiment, the metal-containing layer provided on the surface facing the washer 105 of the insulating member 102 (one surface in the first embodiment) is the first metal-containing layer 104, and the insulating member 102 of the washer 105 The metal-containing layer provided on the opposite surface is referred to as a second metal-containing layer 401.

本実施形態の場合、ワッシャ１０５の構成素材として、絶縁部材１０２と熱膨張率が近い非金属材料を用いることができる。非金属材料としては、酸化物、窒化物、炭化物等から選択することができる。例えば、アルミナ、ジルコニア、炭化ケイ素、窒化ケイ素等のセラミックスを用いることができる。   In the case of this embodiment, a nonmetallic material having a thermal expansion coefficient close to that of the insulating member 102 can be used as a constituent material of the washer 105. The nonmetallic material can be selected from oxides, nitrides, carbides and the like. For example, ceramics such as alumina, zirconia, silicon carbide, and silicon nitride can be used.

ワッシャ１０５は、少なくとも絶縁部材１０２と同じ非金属材料を含有することがより好ましい。第１の金属含有層１０４と第２の金属含有層４０１の組成は、同じでもよいし、異なっていてもよい。組成が異なっている場合には、第１の金属含有層１０４よりも、第２の金属含有層４０１の接合材１０６に対する濡れ性を高くすることがより好ましい。第２の金属含有層４０１は、第１の金属含有層１０４と同様な方法で形成することができる。   More preferably, the washer 105 contains at least the same non-metallic material as the insulating member 102. The compositions of the first metal-containing layer 104 and the second metal-containing layer 401 may be the same or different. When the compositions are different, it is more preferable that the wettability of the second metal-containing layer 401 with respect to the bonding material 106 is higher than that of the first metal-containing layer 104. The second metal-containing layer 401 can be formed by a method similar to that for the first metal-containing layer 104.

例えば、絶縁部材１０２としてアルミナを用いた場合、ワッシャ１０５の材質はアルミナを含有する非金属材料を含有する材料を選択することができ、より好ましくは、アルミナを用いることができる。これにより、第２の金属含有層４０１の濡れ性をコントロールできるとともに、ワッシャ１０５と絶縁部材１０２の熱膨張率を近づけることができるため、加熱後冷却した時に生じる応力を低減できる。   For example, when alumina is used as the insulating member 102, a material containing a non-metallic material containing alumina can be selected as the material of the washer 105, and more preferably, alumina can be used. Thereby, the wettability of the second metal-containing layer 401 can be controlled, and the thermal expansion coefficients of the washer 105 and the insulating member 102 can be made close to each other, so that the stress generated when cooling after heating can be reduced.

＜第３の実施形態＞
図５に本発明の第３の実施形態を示す。電流導入端子１０１の構成部材は、第１の実施形態と同じであるが、ワッシャ１０５の直径を、絶縁部材１０２の一方の表面に配置した金属含有層１０４の直径より大きくした点が異なる。金属含有層１０４の直径を規定することにより、金属含有層１０４と接合材１０６が接する長さを決めることができる。 <Third Embodiment>
FIG. 5 shows a third embodiment of the present invention. Components of the current introduction terminal 101 is the same as the first embodiment, the diameter of the washer 105, the point that was larger than the diameter of the metal-containing layer 104 disposed on one surface of the insulating member 102 differs. By defining the diameter of the metal-containing layer 104, the length of contact between the metal-containing layer 104 and the bonding material 106 can be determined.

＜第４の実施形態＞
図６に本発明の第４の実施形態を示す。電流導入端子１０１の構成部材は、第１の実施形態と同じであるが、接合材１０６の配置が異なる。具体的には、接合材１０６が、絶縁部材１０２と導電線材１０３の間と、ワッシャ１０５と導電線材１０３の間と、ワッシャ１０５の絶縁部材１０２との対向面とは反対側の導電線材１０３を囲む位置にも配置されている点が異なる。また、金属含有層１０４が、絶縁部材１０２のワッシャ１０５との対向面から、絶縁部材１０２の導電線材１０３との対向面へと連続して回り込んだ状態で設けられている点も異なる。絶縁部材１０２と導電線材１０３の間の接合材１０６は、絶縁部材１０２の導電線材１０３との対向面に設けられた金属含有層１０４と導電線材１０３とに接している。図６において、符号６０１〜６０３は、接合材１０６の一部であって、絶縁部材１０２とワッシャ１０５との間以外の領域に位置する接合材を示す。接合材６０１は絶縁部材１０２と導電線材１０３の間に配置され、接合材６０２はワッシャ１０５と導電線材１０３の間に配置され、接合材６０３はワッシャ１０５の絶縁部材１０２との対向面とは反対側の面の導電線材１０３を囲む領域に配置されている。接合材６０１、接合材６０２及び接合材６０３を全て配置することが最も好ましいが、いずれか１又は２箇所に配置することでもよい。本実施形態の構成をとることにより、クラック発生を低減できるばかりでなく、より強固な気密構造を確保することができる。 <Fourth Embodiment>
FIG. 6 shows a fourth embodiment of the present invention. The constituent members of the current introduction terminal 101 are the same as those in the first embodiment, but the arrangement of the bonding material 106 is different. Specifically, the bonding material 106 includes the conductive wire 103 on the side opposite to the surface of the washer 105 facing the insulating member 102, between the washer 105 and the conductive wire 103, and between the washer 105 and the conductive wire 103. The difference is that it is also placed in the surrounding position. Another difference is that the metal-containing layer 104 is provided so as to continuously wrap around from the surface of the insulating member 102 facing the washer 105 to the surface of the insulating member 102 facing the conductive wire 103. The bonding material 106 between the insulating member 102 and the conductive wire 103 is in contact with the metal-containing layer 104 and the conductive wire 103 provided on the surface of the insulating member 102 facing the conductive wire 103. In FIG. 6, reference numerals 601 to 603 represent a part of the bonding material 106 and a bonding material located in a region other than between the insulating member 102 and the washer 105. The bonding material 601 is disposed between the insulating member 102 and the conductive wire 103, the bonding material 602 is disposed between the washer 105 and the conductive wire 103, and the bonding material 603 is opposite to the surface of the washer 105 facing the insulating member 102. It arrange | positions in the area | region surrounding the conductive wire 103 of the side surface. Although it is most preferable to arrange all of the bonding material 601, the bonding material 602, and the bonding material 603, they may be arranged in any one or two places. By adopting the configuration of the present embodiment, not only the generation of cracks can be reduced, but also a stronger airtight structure can be secured.

＜電子銃＞
図７に、本発明の電流導入端子を用いた、本発明の電子銃及びＸ線発生管の実施形態を示す。 <Electron gun>
FIG. 7 shows an embodiment of the electron gun and X-ray generator tube of the present invention using the current introduction terminal of the present invention.

図７（ｂ）は、本発明の電子銃の説明図である。電子銃７０３は、絶縁部材１０２を貫通した複数の導電線材１０３を有する。それぞれの導電線材１０３には、電子放出部７１１、加熱部７１２、第１の制御電極７１３、第２の制御電極７１４、ゲッター７１５が接続され、電子銃７０３を構成している。図７（ｂ）では、電流導入端子１０１の構成部材である、金属含有層１０４、ワッシャ１０５及び接合材１０６は省略されている。 FIG. 7B is an explanatory diagram of the electron gun of the present invention. The electron gun 703 has a plurality of conductive wire members 103 penetrating the insulating member 102. Each conductive wire 103 is connected to an electron emitting portion 711, a heating portion 712, a first control electrode 713, a second control electrode 714, and a getter 715, thereby constituting an electron gun 703. In FIG. 7 (b), is a component of the current introduction terminal 101, the metal-containing layer 104, the washer 105 and the bonding material 106 is omitted.

図７（ｂ）は、電子放出部７１１を加熱部７１２によって加熱して電子を取り出す傍熱型の電子放出部７１１を用いた電子銃７０３を例示している。傍熱型の電子放出部７１１には、例えばタングステンにバリウムを含浸させた、含浸型カソードが好適に用いられる。加熱部７１２には、タングステンフィラメントが適用可能である。加熱部７１２に対して、導電線材１０３より電力を供給することが可能である。図示される電子放出部７１１は、傍熱型であるが、直接通電加熱するタングステンフィラメントのような直熱型も使用できる。直熱型を用いると、加熱部７１２が不要となるため、電流導入端子１０１の導電線材１０３の本数を減らすことも可能である。   FIG. 7B illustrates an electron gun 703 using an indirectly heated electron emission unit 711 that takes out electrons by heating the electron emission unit 711 with the heating unit 712. For the indirectly heated electron emitting portion 711, for example, an impregnated cathode in which tungsten is impregnated with barium is preferably used. A tungsten filament can be applied to the heating unit 712. Electric power can be supplied from the conductive wire 103 to the heating unit 712. Although the illustrated electron emission portion 711 is an indirectly heated type, a directly heated type such as a tungsten filament that is directly energized and heated can also be used. When the direct heating type is used, the heating unit 712 is not necessary, so that the number of conductive wires 103 of the current introduction terminal 101 can be reduced.

第１の制御電極７１３は、例えば引き出し電極として機能し、図７（ａ）に示されるＸ線発生管７０１のＸ線照射のオン・オフの制御等に使用できる。   The first control electrode 713 functions as, for example, an extraction electrode, and can be used for on / off control of the X-ray irradiation of the X-ray generation tube 701 shown in FIG.

第２の制御電極７１４は、例えば集束電極として機能し、電子線束７０９を集束し、ターゲット７０６の所定の領域に照射する。   The second control electrode 714 functions as, for example, a focusing electrode, focuses the electron beam bundle 709, and irradiates a predetermined region of the target 706.

ゲッター７１５は、図７（ａ）に示されるＸ線発生管７０１内の真空度を維持するために使用される。ゲッター７１５は、例えば、加熱活性化の後にＸ線発生管７０１内のガス成分を吸着させる非蒸発型タイプや、チタン等の金属を加熱蒸発させることで形成される活性な金属蒸着面にガスを吸着させる蒸発型が適用可能である。非蒸発型のゲッターであれば、ヒーターへの電力の供給、蒸発型のゲッターであれば、金属を蒸発させるための電力の供給に導電線材１０３を使用できる。   The getter 715 is used to maintain the degree of vacuum in the X-ray generation tube 701 shown in FIG. The getter 715 is, for example, a non-evaporable type that adsorbs a gas component in the X-ray generation tube 701 after heat activation, or an active metal vapor deposition surface formed by heating and evaporating a metal such as titanium. An evaporation type to be adsorbed is applicable. If it is a non-evaporable getter, the conductive wire 103 can be used to supply power to the heater, and if it is an evaporative getter, it can supply power to evaporate the metal.

また、電流導入端子１０１の導電線材１０３が、電子銃７０３の各構成物へ電気的に接続している。このため、前述した電力の供給以外に、各構成物からの信号の取り出し、図７（ａ）に示されるＸ線発生管７０１を駆動した際に陽極７０５から陰極７０２に流れる電流等を測定することも可能である。 In addition, the conductive wire 103 of the current introduction terminal 101 is electrically connected to each component of the electron gun 703. Therefore, in addition to the supply of electric power described above, extraction of the signal from each construct, measure the current or the like flowing from the anode 705 to the cathode 70 2 when driving the X-ray generating tube 701 shown in FIGS. 7 (a) It is also possible to do.

＜Ｘ線発生管＞
図７に、本発明の電流導入端子１０１を用いた、本発明の電子銃及びＸ線発生管の実施形態を示す。 <X-ray generator tube>
FIG. 7 shows an embodiment of the electron gun and X-ray generator tube of the present invention using the current introduction terminal 101 of the present invention.

図７（ａ）は、本発明のＸ線発生管の説明図である。Ｘ線発生管７０１は、対向して配置された陽極７０５及び陰極７０２と、この陽極７０５と陰極７０２の間に位置し、両者と共に密閉された内部空間７１０形成する絶縁管７０８とを有している。Ｘ線発生管７０１は、電子銃７０３から放出された電子線束７０９をターゲット７０６に照射することによりＸ線を発生させるように構成されている。このため、ターゲット７０６と電子銃７０３は互いに対向して配置されている。電子線束７０９に含まれる電子は、陽極７０５と陰極７０２と絶縁管７０８で囲まれた内部空間７１０に形成された加速電界により、ターゲット７０６でＸ線を発生させるために必要な入射エネルギーまで加速される。   Fig.7 (a) is explanatory drawing of the X-ray generator tube of this invention. The X-ray generation tube 701 includes an anode 705 and a cathode 702 arranged to face each other, and an insulating tube 708 that is located between the anode 705 and the cathode 702 and forms an internal space 710 sealed together with the both. Yes. The X-ray generation tube 701 is configured to generate X-rays by irradiating a target 706 with an electron beam bundle 709 emitted from an electron gun 703. For this reason, the target 706 and the electron gun 703 are disposed to face each other. Electrons included in the electron beam bundle 709 are accelerated to an incident energy necessary for generating X-rays at the target 706 by an accelerating electric field formed in an internal space 710 surrounded by the anode 705, the cathode 702, and the insulating tube 708. The

Ｘ線発生管７０１の内部空間７１０は、電子線束７０９の平均自由行程を確保することを目的として、真空となっている。Ｘ線発生管７０１の内部の圧力は、１０-4Ｐａ以下であることが好ましく、電子放出部７１１の寿命の観点からは、１０-6Ｐａ以下であることがより一層好ましい。係る圧力を達成するためには、予め不図示の排気管及び真空ポンプを用いて真空排気した後、排気管を封止する手段が好適に適用可能である。 The internal space 710 of the X-ray generation tube 701 is evacuated for the purpose of ensuring the mean free path of the electron beam bundle 709. The pressure inside the X-ray generating tube 701 is preferably 10 -4 Pa or less, from the viewpoint of the life of the electron emission portion 7 11, still more preferably not more than 10 -6 Pa. In order to achieve such a pressure, a means for sealing the exhaust pipe after evacuating in advance using an exhaust pipe (not shown) and a vacuum pump can be suitably applied.

陽極７０５は、少なくともターゲット７０６と陽極部材７０７を備え、Ｘ線発生管７０１の陽極電位を規定する電極として機能している。陽極部材７０７は導電性材料からなり、ターゲット７０６と電気的に接続されている。また、陽極部材７０７には、銅、鉄、タングステン、コバールなど金属を用いることができ、絶縁管７０８とろう材などにより接合されている。絶縁管７０８がセラミックスである場合、陽極部材７０７には線膨張係数が近いコバールを好適に用いることができる。   The anode 705 includes at least a target 706 and an anode member 707, and functions as an electrode that defines the anode potential of the X-ray generation tube 701. The anode member 707 is made of a conductive material and is electrically connected to the target 706. The anode member 707 can be made of metal such as copper, iron, tungsten, and kovar, and is joined to the insulating tube 708 with a brazing material or the like. When the insulating tube 708 is ceramic, Kovar having a linear expansion coefficient close to the anode member 707 can be suitably used.

陽極部材７０７は、例えば、ターゲット７０６の周囲を、Ｘ線の照射方向に突出させることで、ターゲット７０６で発生したＸ線の照射領域を制御する機能をもたせてもよい。この場合、陽極部材７０７には、タングステン、タンタル等の重金属を含有させたものを用いることができる。   For example, the anode member 707 may have a function of controlling the irradiation region of the X-rays generated by the target 706 by projecting the periphery of the target 706 in the X-ray irradiation direction. In this case, as the anode member 707, a material containing a heavy metal such as tungsten or tantalum can be used.

ターゲット７０６は、不図示のタングステン等の重金属からなるターゲット層と、ターゲット層を保持する不図示の支持基板とから構成されている。ターゲット７０６は、発生したＸ線をＸ線発生管７０１の外に取り出す透過窓の役割を担うと共に、Ｘ線発生管７０１の内部を真空に保つための、真空容器の一部としての機能も有する。   The target 706 includes a target layer made of a heavy metal such as tungsten (not shown) and a support substrate (not shown) that holds the target layer. The target 706 serves as a transmission window for extracting generated X-rays out of the X-ray generation tube 701 and also has a function as a part of a vacuum container for keeping the inside of the X-ray generation tube 701 in a vacuum. .

陰極７０２は、少なくとも電子銃７０３と陰極部材７０４とを備え、Ｘ線発生管７０１の陰極電位を規定する電極として機能している。陰極部材７０４は、銅、鉄、タングステン、コバールなど金属を用いることができ、絶縁管７０８とろう材等により接合されている。絶縁管７０８がセラミックスの場合、陰極部材７０４には線膨張係数が近いコバールを好適に用いることができる。電子銃７０３は、図７（ｂ）に示される絶縁部材１０２を、例えばろう材等により、陰極部材７０４に気密に接合することで取り付けられている。 Cathode 702 functions as an electrode and at least an electron gun 703 and the cathode member 704, defines the cathode potential of the X-ray generating tube 70 1. The cathode member 704 can be made of metal such as copper, iron, tungsten, and kovar, and is joined to the insulating tube 708 by a brazing material or the like. When the insulating tube 708 is ceramic, Kovar having a linear expansion coefficient close to that of the cathode member 704 can be preferably used. The electron gun 703 is attached by airtightly bonding the insulating member 102 shown in FIG. 7B to the cathode member 704 with, for example, a brazing material.

絶縁管７０８は、Ｘ線発生管７０１の陰極電位に規定される陰極７０２と、陽極電位に規定される陽極７０５との間の電気的絶縁を図るために配置されている。絶縁管７０８は、ガラス材料やセラミックス材料等の絶縁性材料で構成されているが、加工性、コスト等により、アルミナが好適に用いられる。   The insulating tube 708 is arranged for electrical insulation between the cathode 702 defined by the cathode potential of the X-ray generation tube 701 and the anode 705 defined by the anode potential. The insulating tube 708 is made of an insulating material such as a glass material or a ceramic material, but alumina is preferably used due to workability, cost, and the like.

＜Ｘ線発生装置およびＸ線撮影装置＞
図８に、本発明のＸ線発生管を用いたＸ線発生装置及びＸ線撮影装置の実施形態を示す。Ｘ線発生装置８０２は、Ｘ線透過窓８１０を有する収納容器８０８の内部に、Ｘ線発生管７０１及びＸ線発生管７０１を駆動するための電圧制御部８１１を備えている。 <X-ray generator and X-ray imaging apparatus>
FIG. 8 shows an embodiment of an X-ray generator and X-ray imaging apparatus using the X-ray generator tube of the present invention. The X-ray generation apparatus 802 includes an X-ray generation tube 701 and a voltage control unit 811 for driving the X-ray generation tube 701 inside a storage container 808 having an X-ray transmission window 810.

電圧制御部８１１により、Ｘ線発生管７０１の陰極７０２と陽極７０５［図７（ａ）参照］の間に管電圧が印加され、ターゲット７０６と電子放出部７１１［図７（ａ）及び（ｂ）参照］の間に電界が形成される。ターゲット７０６が有する不図示のターゲット層の膜厚と金属種に応じて、管電圧を適宜設定することにより、必要な線種を選択することができる。   The voltage control unit 811 applies a tube voltage between the cathode 702 and the anode 705 of the X-ray generation tube 701 [see FIG. 7A], and the target 706 and the electron emission unit 711 [FIGS. 7A and 7B]. ) Reference] is formed. A necessary line type can be selected by appropriately setting the tube voltage according to the film thickness and metal type of a target layer (not shown) included in the target 706.

Ｘ線発生管７０１及び電圧制御部８１１を収納する収納容器８０８は、容器として十分な強度を有し、かつ放熱性に優れたものが望ましく、その構成材料として、例えば真鍮、鉄、ステンレス等の金属材料が用いられる。   The storage container 808 that stores the X-ray generation tube 701 and the voltage control unit 811 is preferably a container having sufficient strength and excellent heat dissipation, and examples of the constituent material thereof include brass, iron, and stainless steel. A metal material is used.

絶縁性液体８１２は、収納容器８０８内部のＸ線発生管７０１と電圧制御部８１１以外の余空間に充填されている。絶縁性液体８１２は、電気絶縁性を有する液体で、収納容器８０８内部の電気的絶縁性を維持する役割と、Ｘ線発生管７０１の冷却媒体としての役割を有する。絶縁性液体８１２としては、鉱油、シリコーン油、パーフルオロ系オイル等の電気絶縁油を用いることができる。   The insulating liquid 812 is filled in an extra space other than the X-ray generation tube 701 and the voltage control unit 811 inside the storage container 808. The insulating liquid 812 is a liquid having electrical insulation, and has a role of maintaining electrical insulation inside the storage container 808 and a role of a cooling medium for the X-ray generation tube 701. As the insulating liquid 812, an electrical insulating oil such as mineral oil, silicone oil, perfluoro oil, or the like can be used.

本発明のＸ線撮影装置８０１は、図８に示すように、Ｘ線発生装置８０２と、Ｘ線検出器８０３と、信号処理部８０４と、装置制御部８０５と、表示部８０６を備えている。Ｘ線撮影装置８０１は、Ｘ線発生装置８０２で発生したＸ線束８０９を、Ｘ線透過窓８１０を通して、被検体８０７に照射することにより、被検体８０７のＸ線透視画像を撮影することができる。信号処理部８０４は、Ｘ線検出器８０３からの信号処理を行う。装置制御部８０５は、Ｘ線発生装置８０２とＸ線検出器８０３を連携制御する。表示部８０６は、撮影したＸ線投資画像を表示する。   As shown in FIG. 8, the X-ray imaging apparatus 801 of the present invention includes an X-ray generator 802, an X-ray detector 803, a signal processing unit 804, a device control unit 805, and a display unit 806. . The X-ray imaging apparatus 801 can capture an X-ray fluoroscopic image of the subject 807 by irradiating the subject 807 with the X-ray bundle 809 generated by the X-ray generator 802 through the X-ray transmission window 810. . The signal processing unit 804 performs signal processing from the X-ray detector 803. The apparatus control unit 805 controls the X-ray generator 802 and the X-ray detector 803 in a coordinated manner. A display unit 806 displays the photographed X-ray investment image.

Ｘ線発生装置８０２は、電圧制御部８１１とＸ線発生管７０１を備えている。装置制御部８０５は、電圧制御部８１１を介してＸ線発生管７０１を作動させることでＸ線照射の制御をすると同時に、Ｘ線検出器８０３によるＸ線の検出を制御する。また、信号処理部８０４を介しＸ線検出器８０３からの信号処理も行う。Ｘ線発生装置８０２から放出され、被検体８０７を透過したＸ線は、Ｘ線検出器８０３で検出されることで、被検体８０７のＸ線透過画像が撮影される。撮影されたＸ線透過画像は表示部８０６に表示される。また、装置制御部８０５は、Ｘ線発生装置８０２の駆動において、電圧制御部８１１を介してＸ線発生管７０１に印加される電圧信号を制御して、適正な撮影条件を整える。   The X-ray generator 802 includes a voltage controller 811 and an X-ray generator tube 701. The apparatus control unit 805 controls the X-ray irradiation by operating the X-ray generation tube 701 via the voltage control unit 811 and at the same time controls the X-ray detection by the X-ray detector 803. Further, signal processing from the X-ray detector 803 is also performed via the signal processing unit 804. X-rays emitted from the X-ray generator 802 and transmitted through the subject 807 are detected by the X-ray detector 803, and an X-ray transmission image of the subject 807 is taken. The captured X-ray transmission image is displayed on the display unit 806. In addition, the apparatus control unit 805 controls the voltage signal applied to the X-ray generation tube 701 via the voltage control unit 811 in driving the X-ray generation apparatus 802 to adjust appropriate imaging conditions.

＜実施例１＞
本実施例では、図５に示した構成で、導電線材１０３を７本備えた電流導入端子１０１を作製し、係る電流導入端子１０１を用いて図７（ｂ）に示す電子銃７０３を作製した。まず、厚さ５．０ｍｍ、直径２０ｍｍのアルミナの絶縁部材１０２に、直径１．１ｍｍの貫通穴を７箇所開けた。穴を開けた絶縁部材１０２の一方の面の各穴の周囲に、穴の中心対して同心で、外径３ｍｍ、内径が１．２ｍｍの領域にＭｏ−Ｍｎペーストを塗工し、その後、１５００℃の真空雰囲気で焼成して、金属含有層１０４を形成した。絶縁部材１０２に設けた直径１．１ｍｍの穴の中には、コバールの直径１．０ｍｍの導電線材１０３を配置した。 <Example 1>
In this embodiment, in the configuration shown in FIG. 5, to produce a current introducing pin 1 01 having a conductive wire 103 seven, the electron gun 703 shown in FIG. 7 (b) using a current introduction terminal 101 according Produced. First, seven through holes having a diameter of 1.1 mm were formed in an alumina insulating member 102 having a thickness of 5.0 mm and a diameter of 20 mm. A Mo-Mn paste is applied to a region having an outer diameter of 3 mm and an inner diameter of 1.2 mm around each hole on one surface of the insulating member 102 having a hole and concentric with the center of the hole. The metal-containing layer 104 was formed by firing in a vacuum atmosphere at 0 ° C. In a hole having a diameter of 1.1 mm provided in the insulating member 102, a conductive wire 103 having a diameter of 1.0 mm was disposed.

ワッシャ１０５は、外径５ｍｍ、内径１．１ｍｍ、厚さ０．４ｍｍのコバールで作製した。ワッシャ１０５の内径部には、絶縁部材１０２の金属含有層１０４を形成した側に延出している導電線材１０３を通した。   The washer 105 was made of Kovar having an outer diameter of 5 mm, an inner diameter of 1.1 mm, and a thickness of 0.4 mm. A conductive wire 103 extending to the side on which the metal-containing layer 104 of the insulating member 102 was formed was passed through the inner diameter portion of the washer 105.

次に、ワッシャ１０５と金属含有層１０４の間に接合材１０６を挟み、係る状態を不図示の冶具で固定した後、真空雰囲気中で８４０℃に保持し、接合材１０６を溶融させる高温ろう付けを行った。ここで接合材１０６は、東洋理研株式会社製のろう材「ＢＡ−１０８」（Ａｇ：７２％、Ｃｕ：２８％）を用いた。   Next, the bonding material 106 is sandwiched between the washer 105 and the metal-containing layer 104, the state is fixed with a jig (not shown), and then held at 840 ° C. in a vacuum atmosphere to melt the bonding material 106 at a high temperature. Went. Here, as the bonding material 106, a brazing material “BA-108” (Ag: 72%, Cu: 28%) manufactured by Toyo Riken Co., Ltd. was used.

本実施例の電子銃７０３用の電流導入端子１０１は、図７（ｂ）に示すように、加熱部７１２とゲッター７１５用に各２本、第１の制御電極７１３、第２の制御電極７１４、電子放出部７１１用に各１本で、合計７本の導電線材１０３を有する。   As shown in FIG. 7B, two current introduction terminals 101 for the electron gun 703 of the present embodiment are provided for the heating unit 712 and the getter 715, the first control electrode 713 and the second control electrode 714, respectively. Each of the electron emission portions 711 has seven conductive wires 103 in total.

加熱部７１２としてタングステンヒータ、ゲッター７１５としてバリウムゲッター、第１の制御電極７１３、第２の制御電極７１４としてリング状のモリブデン、電子放出部７１１として、バリウムをタングステン焼結体に含新させた含浸型カソードを用いた。 A tungsten heater as the heating unit 712, a barium getter as the getter 715, a ring-shaped molybdenum as the first control electrode 713 and a second control electrode 714, and barium as an electron emission unit 711 are impregnated in a tungsten sintered body. A type cathode was used.

これらの電子銃７０３の構成部材を、導電線材１０３に抵抗溶接し、電子銃７０３とした。なお、これらの構成部材を固定するために、不図示の支柱や、絶縁性をとるための不図示の絶縁部材を適宜配置した。   These constituent members of the electron gun 703 were resistance welded to the conductive wire 103 to obtain an electron gun 703. In addition, in order to fix these structural members, support columns (not shown) and insulating members (not shown) for insulating properties were appropriately arranged.

次に、図７（ａ）に示す、上記電子銃７０３を搭載したＸ線発生管７０１を作製した。電子銃７０３の絶縁部材１０２にはクラックの発生が無く、Ｘ線発生管７０１の真空リークに伴う不具合も生じなかった。   Next, an X-ray generation tube 701 mounted with the electron gun 703 shown in FIG. There were no cracks in the insulating member 102 of the electron gun 703, and there were no problems associated with vacuum leakage of the X-ray generator tube 701.

次に、図８に示す、上記Ｘ線発生管７０１を備えたＸ線発生装置８０２、このＸ線発生装置８０２を備えたＸ線撮影装置８０１を作製した。電子加速電圧１００ｋＶの設定でＸ線撮影を行ったところ、良好な撮影画像を得ることができた。   Next, an X-ray generation apparatus 802 including the X-ray generation tube 701 and an X-ray imaging apparatus 801 including the X-ray generation apparatus 802 shown in FIG. 8 were produced. When X-ray imaging was performed at a setting of an electron acceleration voltage of 100 kV, a good captured image could be obtained.

絶縁部材１０２、金属含有層１０４、接合材１０６、ワッシャ１０５の接合状態を観察するため、Ｘ線発生管７０１を解体し、電流導入端子１０１の絶縁部材１０２の周辺を切り出した。切り出した試料を樹脂に埋め込み、断面を出して、ＳＥＭ及び光学顕微鏡で観察した。金属含有層１０４の厚さは２．１μｍであった。接合材１０６は厚さが１２０μｍで、金属含有層１０４の端部まで接していた。また、接合材１０６は、ワッシャ１０５の端部まで接していた。実測したところ、図２の角度θ１に相当する角度は１５５°、θ２に相当する角度は２３°であった。また、ワッシャ１０５に反りが生じる等の不具合がないことも確認した。 To observe the bonding state of the insulating member 102, the metal-containing layer 104, the bonding material 106, the washer 105, dismantled X-ray generating tube 701, it was cut out around the insulating member 10 2 of the current introduction terminal 101. The cut sample was embedded in resin, the cross section was taken out, and observed with an SEM and an optical microscope. The thickness of the metal containing layer 104 was 2.1 μm. The bonding material 106 had a thickness of 120 μm and was in contact with the end of the metal-containing layer 104. Further, the bonding material 106 was in contact with the end of the washer 105. When actually measured, the angle corresponding to the angle θ1 in FIG. 2 was 155 °, and the angle corresponding to θ2 was 23 °. It was also confirmed that there was no problem such as the washer 105 being warped.

＜実施例２＞
本実施例においては、実施例１に対して、以下に示す以外は同様の条件で電流導入端子１０１及び電子銃７０３を作製した。本実施例に用いたワッシャ１０５は非金属で、図４に示すように、絶縁部材１０２との対向面に、内径が１．１ｍｍ、外径が３．５ｍｍの第２の金属含有層４０１を配置した。この非金属ワッシャ１０５は、材料として絶縁部材１０２と同じアルミナを用い、第２の金属含有層４０１としては、実施例１で金属含有層（第１の金属含有層）１０４として用いたＭｏ−Ｍｎペーストとした。以上のように、非金属製のワッシャ１０５を用い、このワッシャ１０５の絶縁部材１０２との対向面に第２の金属含有層４０１を配置した以外は、実施例１と同様に電流導入端子１０１を作製した。そして、この電流導入端子１０１を使って、実施例１と同様に、図７（ａ）及び（ｂ）に示す電子銃７０３、Ｘ線発生管７０１、図８に示すＸ線発生装置８０２、Ｘ線撮影装置８０１を作製し、評価したところ、不具合は発生しなかった。 <Example 2>
In this example, the current introduction terminal 101 and the electron gun 703 were manufactured under the same conditions as in Example 1 except for the following. The washer 105 used in this example is non-metallic, and as shown in FIG. 4, a second metal-containing layer 401 having an inner diameter of 1.1 mm and an outer diameter of 3.5 mm is provided on the surface facing the insulating member 102. Arranged. This non-metallic washer 105 uses the same alumina as the insulating member 102 as a material, and the second metal-containing layer 401 is the Mo-Mn used as the metal-containing layer (first metal-containing layer) 104 in Example 1. A paste was used. As described above, using a washer 105 made of non-metallic, except that the second metal-containing layer 401 disposed on the opposing surfaces of the insulating member 102 of the washer 105, similar to a current introduction terminal to Example 1 101 was produced. Then, using this current introduction terminal 101, similarly to the first embodiment, the electron gun 703, the X-ray generator tube 701 shown in FIGS. 7A and 7B, the X-ray generator 802 shown in FIG. When the line imaging apparatus 801 was manufactured and evaluated, no defects occurred.

絶縁部材１０２、第１の金属含有層１０４、接合材１０６、ワッシャ１０５及び第２の金属含有層４０１の接合状態を観察するため、Ｘ線発生管７０１を解体し、電流導入端子１０１の絶縁部材１０２の周辺を切り出した。実施例１と同様に切り出した試料を樹脂に埋め込み、断面を出して、ＳＥＭ及び光学顕微鏡で観察した。第１の金属含有層１０４の厚さは２．５μｍであった。第２の金属含有層４０１の厚さは、２．０μｍであった。接合材１０６は厚さが１００μｍで、第１の金属含有層１０４の端部まで接していた。また、接合材１０６は、第２の金属含有層４０１の端部まで接していた。絶縁部材１０２及びワッシャ１０５のアルミナ露出部には、接合材１０６が接していなかった。実測したところ、図２の角度θ１に相当する角度は１３０°、角度θ２に相当する角度は５８°であった。また、ワッシャ１０５に反りや割れが生じる等の不具合がないことも確認した。 The insulating member 102, the first metal-containing layer 104, the bonding material 106, for observing the bonding state of the washer 105 and the second metal-containing layer 401, dismantled X-ray generating tube 701, the insulating current introduction terminal 1 01 The periphery of the member 102 was cut out. A sample cut out in the same manner as in Example 1 was embedded in a resin, a cross section was taken out, and observed with an SEM and an optical microscope. The thickness of the first metal-containing layer 104 was 2.5 μm. The thickness of the second metal-containing layer 401 was 2.0 μm. The bonding material 106 had a thickness of 100 μm and was in contact with the end of the first metal-containing layer 104. Further, the bonding material 106 was in contact with the end of the second metal-containing layer 401. Alumina exposed portion of the insulating member 102 and the washer 105, the junction member 106 did not contact. When actually measured, the angle corresponding to the angle θ1 in FIG. 2 was 130 °, and the angle corresponding to the angle θ2 was 58 °. It was also confirmed that the washer 105 was free from defects such as warping and cracking.

１０１：電流導入端子、１０２：絶縁部材、１０３：導電線材、１０４：金属含有層（第１の金属含有層）、１０５：ワッシャ、１０６：接合材、１０７〜１０９：接触面、２０１：接合材先端部（応力集中点Ｂ）、２０２：接合材先端部、２０３：直線、２０４：接合材表面、３０１：応力、３０１ｘ：応力成分、３０２：応力、３０３：応力、３０３ｘ：応力成分、３０４：応力、３０５：応力集中点Ａ、４０１：金属含有層（第２の金属含有層）、６０１〜６０３：接合材、７０１：Ｘ線発生管、７０２：陰極、７０３：電子銃、７０４：陰極部材、７０５：陽極、７０６：ターゲット、７０７：陽極部材、７０８：絶縁管、７０９：電子線束、７１０：内部空間、７１１：電子放出部、７１２：加熱部、７１３：第１の制御電極、７１４：第２の制御電極、７１５：ゲッター、８０１：Ｘ線撮影装置、８０２：Ｘ線発生装置、８０３：Ｘ線検出器、８０４：信号処理部、８０５：装置制御部、８０６：表示部、８０７：被検体、８０８：収納容器、８０９：Ｘ線束、８１０：Ｘ線透過窓、８１１：電圧制御部、８１２：絶縁性液体、９０１：電流導入端子、９０２：絶縁部材、９０３：導電線材、９０４：金属含有層、９０５：接合材、１００１〜１００４：応力、１００５：応力集中点Ｃ、１００６：応力集中点Ｄ   101: current introduction terminal, 102: insulating member, 103: conductive wire, 104: metal-containing layer (first metal-containing layer), 105: washer, 106: bonding material, 107 to 109: contact surface, 201: bonding material Tip portion (stress concentration point B), 202: bonding material tip portion, 203: straight line, 204: bonding material surface, 301: stress, 301x: stress component, 302: stress, 303: stress, 303x: stress component, 304: Stress, 305: Stress concentration point A, 401: Metal-containing layer (second metal-containing layer), 601 to 603: Bonding material, 701: X-ray generator, 702: Cathode, 703: Electron gun, 704: Cathode member 705: anode, 706: target, 707: anode member, 708: insulating tube, 709: electron beam bundle, 710: internal space, 711: electron emission unit, 712: heating unit, 713: first control electrode, 7 4: second control electrode, 715: getter, 801: X-ray imaging device, 802: X-ray generator, 803: X-ray detector, 804: signal processing unit, 805: device control unit, 806: display unit, 807: Subject, 808: Storage container, 809: X-ray bundle, 810: X-ray transmission window, 811: Voltage control unit, 812: Insulating liquid, 901: Current introduction terminal, 902: Insulating member, 903: Conductive wire, 904: Metal-containing layer, 905: Bonding material, 1001 to 1004: Stress, 1005: Stress concentration point C, 1006: Stress concentration point D

Claims (23)

非金属材料を含有し互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた第１の金属含有層と、
前記第１の金属含有層の直径より大きい直径を有し、前記第１の金属含有層に対向し前記導電線材を囲むとともに前記第１の金属含有層との対向面に第２の金属含有層を有し前記非金属材料を含有する非金属ワッシャと、
前記第１の金属含有層と前記非金属ワッシャとの間で前記第１の金属含有層と前記非金属ワッシャにそれぞれ接し、前記導電線材を囲む接合材と、
を備え、
前記非金属ワッシャの径方向において、前記非金属ワッシャと前記接合材とが接する長さが前記第１の金属含有層と前記接合材とが接する長さより長いことを特徴とする電流導入端子。 An insulating member having two surfaces that contain non-metallic materials and are located on opposite sides;
A conductive wire penetrating between the two surfaces of the insulating member;
A first metal-containing layer provided on one of the two surfaces so as to surround the conductive wire;
The second metal-containing layer has a diameter larger than the diameter of the first metal-containing layer, faces the first metal-containing layer , surrounds the conductive wire, and faces the first metal-containing layer. A non-metallic washer containing the non-metallic material ,
A bonding material that is in contact with the first metal-containing layer and the non-metallic washer between the first metal-containing layer and the non-metallic washer, and surrounds the conductive wire;
With
Wherein in the radial direction of the non-metallic washers, cable terminal, characterized in that longer than the length of the length of said non-metallic washers and the bonding material is in contact said and bonding material is in contact with the first metal-containing layer. 非金属材料を含有し互いに反対側に位置する二つの面を有する絶縁部材と、
前記絶縁部材の前記二つの面間を貫通する導電線材と、
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた第１の金属含有層と、
前記第１の金属含有層に対向し前記導電線材を囲むとともに前記第１の金属含有層との対向面に第２の金属含有層を有し前記非金属材料を含有する非金属ワッシャと、
前記第１の金属含有層と前記非金属ワッシャとの間で前記第１の金属含有層と前記非金属ワッシャにそれぞれ接する間隙と、前記非金属ワッシャの前記絶縁部材との対向面とは反対側の面と、に配置され前記導電線材を囲む接合材と、
を備え、
前記非金属ワッシャの径方向において、前記非金属ワッシャと前記接合材とが接する長さが前記第１の金属含有層と前記接合材とが接する長さより長いことを特徴とする電流導入端子。 An insulating member having two surfaces that contain non-metallic materials and are located on opposite sides;
A conductive wire penetrating between the two surfaces of the insulating member;
A first metal-containing layer provided on one of the two surfaces so as to surround the conductive wire;
A metallic washer containing said non-metallic material has a second metal-containing layer on the opposite surface of the first metal-containing layer with facing the first metal-containing layer surrounding the conductive wire,
A gap in contact with the said non-metallic washer and the first metal-containing layer between said non-metallic washer and the first metal-containing layer, opposite to the surface facing the said insulating member of said non-metallic washer And a bonding material disposed on the surface and surrounding the conductive wire,
With
Wherein in the radial direction of the non-metallic washers, cable terminal, characterized in that longer than the length of the length of said non-metallic washers and the bonding material is in contact said and bonding material is in contact with the first metal-containing layer. 前記非金属ワッシャの直径は、前記第１の金属含有層の直径より大きいことを特徴とする請求項２に記載の電流導入端子。 The current introduction terminal according to claim 2, wherein a diameter of the non-metallic washer is larger than a diameter of the first metal-containing layer. 前記非金属ワッシャは、前記第１の金属含有層よりも前記接合材との濡れ性が高いことを特徴とする請求項１乃至３のいずれか１項に記載の電流導入端子。 4. The current introduction terminal according to claim 1 , wherein the non-metallic washer has higher wettability with the bonding material than the first metal-containing layer. 5. 前記第１の金属含有層は、連続膜で構成されることを特徴とする請求項１乃至４のいずれか１項に記載の電流導入端子。 The first metal-containing layer, a current introduction terminal according to any one of claims 1 to 4, characterized in that it is constituted by a continuous film. 前記接合材は、前記非金属ワッシャと前記導電線材の間にも位置していることを特徴とする請求項１乃至５のいずれか１項に記載の電流導入端子。 The bonding material, a current introduction terminal according to any one of claims 1 to 5, characterized in that also located between the conductive wire and the non-metallic washer. 前記接合材は、前記絶縁部材と前記導電線材の間にも位置していることを特徴とする請求項１乃至６のいずれか１項に記載の電流導入端子。 The bonding material, the insulating member and any one of the current introduction terminal according to claim 1 to 6, characterized in that also located between the conductive wire material. 前記非金属ワッシャは、前記絶縁部材の前記一方の面の側に位置することを特徴とする請求項１乃至７のいずれか１項に記載の電流導入端子。 The non-metallic washer, cable terminal according to any one of claims 1 to 7, characterized in that located on the side of the one surface of the insulating member. 請求項１乃至８のいずれか１項に記載の電流導入端子と、
前記導電線材に電気的に接続され、加熱により電子を放出する電子放出部と、
を有することを特徴とする電子銃。 The current introduction terminal according to any one of claims 1 to 8 ,
An electron emission portion electrically connected to the conductive wire and emitting electrons by heating;
An electron gun comprising: 請求項９に記載の電子銃を備える陰極と、
前記電子銃に対向するターゲットを備える陽極と、
前記陰極と前記陽極との間に位置し、前記陰極及び前記陽極と共に密閉された内部空間を形成する絶縁管と、
を備えることを特徴とするＸ線発生管。 A cathode comprising the electron gun according to claim 9 ;
An anode comprising a target facing the electron gun;
An insulating tube located between the cathode and the anode and forming a sealed internal space with the cathode and the anode;
An X-ray generating tube comprising: 前記電流導入端子の前記絶縁部材が前記内部空間の側、前記非金属ワッシャが外部側に位置していることを特徴とする請求項１０に記載のＸ線発生管。 The X-ray generator tube according to claim 10 , wherein the insulating member of the current introduction terminal is located on the inner space side and the non-metallic washer is located on the outer side. 互いに反対側に位置する二つの面を有する絶縁部材と、An insulating member having two surfaces opposite to each other;
前記絶縁部材の前記二つの面間を貫通する導電線材と、A conductive wire penetrating between the two surfaces of the insulating member;
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた金属含有層と、A metal-containing layer provided on one surface of the two surfaces so as to surround the conductive wire;
前記金属含有層の直径より大きい直径を有し、前記金属含有層に対向し前記導電線材を囲むワッシャと、A washer having a diameter greater than the diameter of the metal-containing layer, facing the metal-containing layer and surrounding the conductive wire;
前記金属含有層と前記ワッシャとの間で前記金属含有層と前記ワッシャにそれぞれ接し、前記導電線材を囲む接合材と、A bonding material that is in contact with the metal-containing layer and the washer between the metal-containing layer and the washer, and surrounds the conductive wire;
を備え、With
前記ワッシャの径方向において、前記ワッシャと前記接合材とが接する長さが前記金属含有層と前記接合材とが接する長さより長く、前記ワッシャは前記金属含有層よりも前記接合材との濡れ性が高いことを特徴とする電流導入端子。In the radial direction of the washer, the length of contact between the washer and the bonding material is longer than the length of contact between the metal-containing layer and the bonding material, and the washer is wettable with the bonding material more than the metal-containing layer. Current introduction terminal characterized by high current. 互いに反対側に位置する二つの面を有する絶縁部材と、An insulating member having two surfaces opposite to each other;
前記絶縁部材の前記二つの面間を貫通する導電線材と、A conductive wire penetrating between the two surfaces of the insulating member;
前記二つの面のうち一方の面に前記導電線材を囲むように設けられた金属含有層と、前記金属含有層に対向し前記導電線材を囲むワッシャと、A metal-containing layer provided on one of the two surfaces so as to surround the conductive wire, a washer facing the metal-containing layer and surrounding the conductive wire,
前記金属含有層と前記ワッシャとの間で前記金属含有層と前記ワッシャにそれぞれ接する間隙と、前記ワッシャの前記絶縁部材との対向面とは反対側の面と、に配置され前記導電線材を囲む接合材と、The gap between the metal-containing layer and the washer is in contact with the metal-containing layer and the washer, and the surface of the washer opposite to the surface facing the insulating member, and surrounds the conductive wire. A bonding material;
を備え、With
前記ワッシャの径方向において、前記ワッシャと前記接合材とが接する長さが前記金属含有層と前記接合材とが接する長さより長く、前記ワッシャは前記金属含有層よりも前記接合材との濡れ性が高いことを特徴とする電流導入端子。In the radial direction of the washer, the length of contact between the washer and the bonding material is longer than the length of contact between the metal-containing layer and the bonding material, and the washer is wettable with the bonding material more than the metal-containing layer. Current introduction terminal characterized by high current. 前記ワッシャの直径は、前記金属含有層の直径より大きいことを特徴とする請求項１３に記載の電流導入端子。The current introducing terminal according to claim 13, wherein a diameter of the washer is larger than a diameter of the metal-containing layer. 前記ワッシャは、金属ワッシャ又は前記金属含有層との対向面に金属含有層を有する非金属ワッシャであることを特徴とする請求項１２乃至１４のいずれか１項に記載の電流導入端子。The current introducing terminal according to any one of claims 12 to 14, wherein the washer is a metal washer or a non-metal washer having a metal-containing layer on a surface facing the metal-containing layer. 前記金属含有層は、連続膜で構成されることを特徴とする請求項１２乃至１５のいずれか１項に記載の電流導入端子。The current introduction terminal according to claim 12, wherein the metal-containing layer is formed of a continuous film. 前記接合材は、前記ワッシャと前記導電線材の間にも位置していることを特徴とする請求項１２乃至１６のいずれか１項に記載の電流導入端子。The current introduction terminal according to any one of claims 12 to 16, wherein the bonding material is also located between the washer and the conductive wire. 前記接合材は、前記絶縁部材と前記導電線材の間にも位置していることを特徴とする請求項１２乃至１７のいずれか１項に記載の電流導入端子。18. The current introduction terminal according to claim 12, wherein the bonding material is also located between the insulating member and the conductive wire. 前記ワッシャは、前記絶縁部材の前記一方の面の側に位置することを特徴とする請求項１２乃至１８のいずれか１項に記載の電流導入端子。The current introduction terminal according to any one of claims 12 to 18, wherein the washer is positioned on the one surface side of the insulating member. 請求項１２乃至１９のいずれか１項に記載の電流導入端子と、A current introduction terminal according to any one of claims 12 to 19,
前記導電線材に電気的に接続され、加熱により電子を放出する電子放出部と、An electron emission portion electrically connected to the conductive wire and emitting electrons by heating;
を有することを特徴とする電子銃。An electron gun comprising: 請求項２０に記載の電子銃を備える陰極と、A cathode comprising the electron gun of claim 20;
前記電子銃に対向するターゲットを備える陽極と、An anode comprising a target facing the electron gun;
前記陰極と前記陽極との間に位置し、前記陰極及び前記陽極と共に密閉された内部空間を形成する絶縁管と、An insulating tube located between the cathode and the anode and forming a sealed internal space with the cathode and the anode;
を備えることを特徴とするＸ線発生管。An X-ray generating tube comprising: 前記電流導入端子の前記絶縁部材が前記内部空間の側、前記ワッシャが外部側に位置していることを特徴とする請求項２１に記載のＸ線発生管。The X-ray generator tube according to claim 21, wherein the insulating member of the current introduction terminal is located on the inner space side and the washer is located on the outer side. 請求項１０、１１、２１、２２のいずれか１項に記載のＸ線発生管と、
前記Ｘ線発生管から放出され、被検体を透過したＸ線を検出するＸ線検出器と、前記Ｘ線発生管と前記Ｘ線検出器とを連携制御する制御装置と、
を有することを特徴とするＸ線撮影装置。 The X-ray generation tube according to any one of claims 10, 11, 21, and 22 ,
An X-ray detector that detects X-rays emitted from the X-ray generation tube and transmitted through a subject; a control device that controls the X-ray generation tube and the X-ray detector in cooperation with each other;
An X-ray imaging apparatus comprising:
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